CN104317050A - Novel digital micro-mirror component - Google Patents

Novel digital micro-mirror component Download PDF

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Publication number
CN104317050A
CN104317050A CN201410638055.5A CN201410638055A CN104317050A CN 104317050 A CN104317050 A CN 104317050A CN 201410638055 A CN201410638055 A CN 201410638055A CN 104317050 A CN104317050 A CN 104317050A
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CN
China
Prior art keywords
digital micro
flexure strip
addressing electrodes
micro mirror
mirror element
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201410638055.5A
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Chinese (zh)
Inventor
曾永林
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CHENGDU ATTA GAME TECHNOLOGY Co Ltd
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CHENGDU ATTA GAME TECHNOLOGY Co Ltd
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Priority to CN201410638055.5A priority Critical patent/CN104317050A/en
Publication of CN104317050A publication Critical patent/CN104317050A/en
Pending legal-status Critical Current

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Abstract

The invention discloses a novel digital micro-mirror component. The novel digital micro-mirror component comprises a reflecting mirror, an elastic piece, a connecting plate and a CMOS circuit. The reflecting mirror is arranged on the upper portion of the elastic piece, multiple addressing electrodes on the elastic piece pass through multiple communication addressing electrodes and multiple electric conduction channels and then are connected with the CMOS circuit, wherein the communication addressing electrodes and the electric conduction channels are formed in yokes of the connecting plate and correspond to the addressing electrodes. The novel digital micro-mirror component comprises the reflecting mirror, the elastic piece, the connecting plate and the CMOS circuit, the reflecting mirror is arranged on the upper portion of the elastic piece, and the addressing electrodes on the elastic piece pass through the communication addressing electrodes and the electric conduction channels and then are connected with the CMOS circuit, wherein the communication addressing electrodes and the electric conduction channels are formed in the yokes of the connecting plate and correspond to the addressing electrodes. In this way, the problem that when the digital micro-mirror component performs pulse width modulation on binary system weighted video data, accuracy is low is solved, and it is avoided that when the length of on-off time of each lens is controlled, control accuracy is low.

Description

New digital micro mirror element
Technical field
The present invention relates to a kind of multimedia equipment, particularly relate to a kind of new digital micro mirror element.
Background technology
Projector also known as projector, be a kind of can by image or VIDEO PROJECTION to the equipment on curtain, same to computing machine, VCD, DVD, BD, game machine, DV etc. can be connected and play corresponding vision signal by different interfaces.Projector is widely used in family, office, school and public place of entertainment, and different according to working method, have CRT, LCD, DLP etc. are dissimilar.
The background constantly promoted taken in by projector in the policy of national promote domestic demands and the people under, the enforcement of Rural Culture ethnic minority regions has promoted the quick growth of China's Projector Market further.According to statistics, within 2010, China's Projector Market shipment amount scale reaches 1,280,000, compares 2009 and increases by 43.6%.Think, within 2011, China's Projector Market will keep quick growth, and annual shipment amount will reach 1,670,000, year rate of growth to be about projector be 30%.The five-year, the compound growth rate of China's Projector Market will reach 17.1%.
China projector's product consumption market mainly concentrates on the large-and-medium size cities such as the more flourishing North China of economy, East China, south China.Education, commercial affairs, government, home entertaining are the four large main consumer groups supporting Chinese projector industry.Make a general survey of China's Projector Market.No matter from the quantity of product, quality or kind aspect, all reach certain maturity, the popularization and application of product makes projector change to mass product from comparatively professional display device in the psychological positioning of user, the marketing scale of industry constantly expands, 2010, China's Projector Market sales volume is 1,100,000, compares 2009 and increases by 37.5%.From this 10 years China's Projector Market developments, China's Projector Market scale increases by 18 times, and its average growth rate per annum is 39.14%, and industry is in high-speed development period
From the development form in industry future, education is still industry future development pillar field.According to statistical figure, institute of total kindergarten 12.91 ten thousand, the whole nation in 2010, institute of primary school 39.42 ten thousand, general high school 7.90 ten thousand institute, institute of common medium universities and colleges 3047, institute of higher education school 1778, be equipped with a projector by each classroom to calculate, according to related data display China only education sector market capacity just reach more than 1,100 ten thousand, if calculated according to projection occupation rate, projector can account for about 14%-28% (not comprising market maintenance), and the real sales volume of education market in 2010 is less than 500,000.
Secondly, the development in commercial projection market is also the key strength of left and right projector market development.Although China's commercial affairs projection market, in rapid expansion, is estimated according to relevant survey institute, in future, medium-sized and small enterprises quantity will keep the rate of growth of 7%-8%, and within 2012, medium-sized and small enterprises sum will reach 5,000 ten thousand, industry development Bright Prospect.In addition, with regard to domestic at present, wealthy family's quantity of assets more than 1,000,000 can reach more than 200 ten thousand, and some elite, white collar are comparatively large for the demand of the quality of life, amusement equipment, and following household application market has a high potential.
In the inside of projector, its core component is Digital Micromirror Device, light impulse length modulation can be realized, form different brightness, the image of gray scale and contrast, in the last few years, along with the improvement of Digital Micromirror Device production technology, qualification rate improves, cost declines, DLP projector is obtained for widespread use in high-definition television and digital camera, manufacturer also gets more and more, but the Digital Micromirror Device of a lot of manufacturer production is when carrying out width modulation to binary weighting video data, there will be the problem that degree of accuracy is not high, and to single eyeglass switch time, length controlled time also there will be the problem of control accuracy deficiency.
Summary of the invention
The object of the invention is to provide a kind of new digital micro mirror element to solve the problem.
The present invention is achieved by the following technical solutions:
A kind of new digital micro mirror element, comprise catoptron, flexure strip, web joint and cmos circuit, described catoptron is arranged on described flexure strip top, and the multiple addressing electrodes on described flexure strip are by being connected with described cmos circuit after the multiple connection addressing electrode on the yoke being arranged on described web joint corresponding with it and multiple conductive channel.
Particularly, the side of described flexure strip is provided with multiple micromirror array, and multiple described micromirror array is rotatably connected by the side of torsion shaft and described flexure strip.
Particularly, described micromirror array is rotated within the scope of-12 ° to+12 ° relative to described flexure strip surface.
Further, described micromirror array is two.
Particularly, multiple described addressing electrode is arranged on the side of described flexure strip.
Particularly, described yoke, described addressing electrode and described conductive channel are two.
Particularly, described catoptron is connected with the central rotatable of described web joint by the mirror post being arranged on its central authorities.
Further, the side of described web joint is provided with landing point.
The invention has the beneficial effects as follows:
The present invention is a kind of new digital micro mirror element, comprise catoptron, flexure strip, web joint and cmos circuit, catoptron is arranged on flexure strip top, multiple addressing electrodes on flexure strip by corresponding with it be arranged on multiple connection addressing electrode on the yoke of web joint and multiple conductive channel after be connected with cmos circuit, solve Digital Micromirror Device when carrying out width modulation to binary weighting video data, the not high problem of degree of accuracy occurred, and to single eyeglass switch time, length controlled time no longer there will be the problem of control accuracy deficiency.
Accompanying drawing explanation
Fig. 1 is the structural representation of new digital micro mirror element of the present invention;
Fig. 2 is the detail of construction of new digital micro mirror element of the present invention.
In figure: 1-catoptron, 2-flexure strip, 3-addressing electrode, 4-is communicated with addressing electrode, 5-CMOS circuit, 6-mirror post, 7-torsion shaft, 8-yoke, 9-conductive channel, 10-landing point, 11-first addressing electrode, 12-second addressing electrode, 13-the 3rd addressing electrode, 14-the 4th addressing electrode.
Embodiment
Below in conjunction with drawings and the specific embodiments, the present invention is described in further detail:
As depicted in figs. 1 and 2, the present invention is a kind of new digital micro mirror element, comprise catoptron 1, flexure strip 2, web joint and cmos circuit 5, catoptron 1 is arranged on flexure strip 2 top, and the multiple addressing electrodes 3 on flexure strip 2 are by being connected with cmos circuit 5 after the multiple connection addressing electrode 4 on the yoke 8 being arranged on web joint corresponding with it and multiple conductive channel 9.The side of flexure strip 2 is provided with multiple micromirror array, and multiple micromirror array is rotatably connected by the side of torsion shaft 7 with flexure strip 2.Micromirror array relative resilient sheet 2 surface is rotated within the scope of-12 ° to+12 °.Micromirror array is two.Multiple addressing electrodes 3 are arranged on the side of flexure strip 2.Yoke 8, addressing electrode 3 and conductive channel 9 are two.Catoptron 1 is connected with the central rotatable of web joint by the mirror post 6 being arranged on its central authorities.The side of web joint is provided with landing point 10.Addressing electrode 3 also comprises the first addressing electrode 11, second addressing electrode the 12, three addressing electrode 13 and the 4th addressing electrode 14.
Each micromirror array is equivalent to a digital optical switch,-12 ° to+12 ° can be rotated, of the present inventionly be of a size of 22mm × 18mm, its pixel is up to 1280 × 1024, thickness is 0.5cm, the present invention adopts binary pulse width modulated technology critically to control the switching time of micro mirror, a pair addressing electrode 3 is provided with below catoptron 1 of the present invention, they are connected with the voltage complementary end of cmos circuit 5 below respectively, and have two conductive channels 9, the present invention adopts cmos circuit 5 pairs of catoptrons 1 to carry out addressing, and use cmos circuit 5 to provide static-electronic driving micro-reflector 1 to rotate around torsion shaft 7.
Yoke 8 and micromirror array link together, have identical current potential, 2 pairs of addressing electrode (the first addressing electrodes 11, second addressing electrode 12,3rd addressing electrode 13 and the 4th addressing electrode 14) there is different compensation current potentials, there is the potential difference (PD) do not allowed in yoke 8 and micromirror array and 2 pairs of addressing electrodes, control the potential difference (PD) between addressing voltage, yoke 8 and micromirror array both sides are made to be subject to different electrostatic forcings, thus causing micromirror array to deflect, each micromirror array can rotate-12 ° to+12 °.
These are only the preferred embodiments of the present invention, be not limited to the present invention, for a person skilled in the art, the present invention can have various modifications and variations.Within the spirit and principles in the present invention all, any amendment done, equivalent replacement, improvement etc., be all included within protection scope of the present invention.

Claims (8)

1. a new digital micro mirror element, it is characterized in that: comprise catoptron, flexure strip, web joint and cmos circuit, described catoptron is arranged on described flexure strip top, and the multiple addressing electrodes on described flexure strip are by being connected with described cmos circuit after the multiple connection addressing electrode on the yoke being arranged on described web joint corresponding with it and multiple conductive channel.
2. new digital micro mirror element according to claim 1, is characterized in that: the side of described flexure strip is provided with multiple micromirror array, and multiple described micromirror array is rotatably connected by the side of torsion shaft and described flexure strip.
3. new digital micro mirror element according to claim 1, is characterized in that: described micromirror array is rotated within the scope of-12 ° to+12 ° relative to described flexure strip surface.
4. the new digital micro mirror element according to Claims 2 or 3, is characterized in that: described micromirror array is two.
5. new digital micro mirror element according to claim 1, is characterized in that: multiple described addressing electrodes are arranged on the side of described flexure strip.
6. new digital micro mirror element according to claim 1, is characterized in that: described yoke, described addressing electrode and described conductive channel are two.
7. new digital micro mirror element according to claim 1, is characterized in that: described catoptron is connected with the central rotatable of described web joint by the mirror post being arranged on its central authorities.
8. new digital micro mirror element according to claim 1, is characterized in that: the side of described web joint is provided with landing point.
CN201410638055.5A 2014-11-12 2014-11-12 Novel digital micro-mirror component Pending CN104317050A (en)

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Application Number Priority Date Filing Date Title
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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106054376A (en) * 2015-04-01 2016-10-26 精工爱普生株式会社 Electro-optical device and electronic apparatus
CN108761982A (en) * 2018-04-28 2018-11-06 毅丰显示科技(深圳)有限公司 Project light collection system

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Publication number Priority date Publication date Assignee Title
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
EP0769713A2 (en) * 1995-10-18 1997-04-23 Texas Instruments Incorporated Improvements in or relating to spatial light modulators
US5771116A (en) * 1996-10-21 1998-06-23 Texas Instruments Incorporated Multiple bias level reset waveform for enhanced DMD control
KR100725200B1 (en) * 1999-12-28 2007-06-07 텍사스 인스트루먼츠 인코포레이티드 Digital micromirror device and method for non-contacting, edge-coupled hidden hinge geometry
CN102360120A (en) * 2011-09-30 2012-02-22 上海丽恒光微电子科技有限公司 Digital micro-mirror device and forming method thereof
CN202494829U (en) * 2012-03-16 2012-10-17 中国科学院西安光学精密机械研究所 Digital micro-mirror device
CN204241767U (en) * 2014-11-12 2015-04-01 成都艾塔科技有限公司 New digital micro mirror element

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5535047A (en) * 1995-04-18 1996-07-09 Texas Instruments Incorporated Active yoke hidden hinge digital micromirror device
EP0769713A2 (en) * 1995-10-18 1997-04-23 Texas Instruments Incorporated Improvements in or relating to spatial light modulators
US5771116A (en) * 1996-10-21 1998-06-23 Texas Instruments Incorporated Multiple bias level reset waveform for enhanced DMD control
KR100725200B1 (en) * 1999-12-28 2007-06-07 텍사스 인스트루먼츠 인코포레이티드 Digital micromirror device and method for non-contacting, edge-coupled hidden hinge geometry
CN102360120A (en) * 2011-09-30 2012-02-22 上海丽恒光微电子科技有限公司 Digital micro-mirror device and forming method thereof
CN202494829U (en) * 2012-03-16 2012-10-17 中国科学院西安光学精密机械研究所 Digital micro-mirror device
CN204241767U (en) * 2014-11-12 2015-04-01 成都艾塔科技有限公司 New digital micro mirror element

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106054376A (en) * 2015-04-01 2016-10-26 精工爱普生株式会社 Electro-optical device and electronic apparatus
CN108761982A (en) * 2018-04-28 2018-11-06 毅丰显示科技(深圳)有限公司 Project light collection system
CN108761982B (en) * 2018-04-28 2021-01-12 毅丰显示科技(深圳)有限公司 Projection light collecting system

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Application publication date: 20150128