CN104215363B - Flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber - Google Patents
Flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber Download PDFInfo
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- CN104215363B CN104215363B CN201410451649.5A CN201410451649A CN104215363B CN 104215363 B CN104215363 B CN 104215363B CN 201410451649 A CN201410451649 A CN 201410451649A CN 104215363 B CN104215363 B CN 104215363B
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Abstract
The invention discloses a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber.PDMS convexity layer including flexible electrode layer, intermediate layer and the top layer of the bottom fitted tightly from bottom to up；Intermediate layer includes conductive rubber array and flexible filler, and conductive rubber array is formed by the arrangement of conductive rubber unit；Flexible electrode layer immediately below conductive rubber unit is provided with test electrode group, and conductive rubber unit is identical with the length of side of one group of test electrode group in flexible electrode layer；PDMS convexity layer is provided with equally distributed nine the miniature boss structures of the array corresponding with each conductive rubber unit, is positioned at directly over conductive rubber unit.The present invention solves the problem that most touch sensor can not detect contact force and Slip Signal simultaneously, achieve the detection to three-dimensional force, energy identification extraction Slip Signal simultaneously, the flexible tactile and slip sense composite sensing array detected with sliding for Artificial intelligent prosthesis, robot three-dimensional force.
Description
Technical field
The present invention relates to a kind of composite sensing array, especially relate to a kind of base in robot flexibility touch sensor field
Flexible tactile and slip sense composite sensing array in pressure-sensitive conductive rubber.
Background technology
Flexible touch sensation sensor is Artificial intelligent prosthesis or the robot acquisition indispensable means of extraneous contact information,
The information provided according to touch sensor, intelligent artificial limb or robot can be to the size of target object, shape, weight, soft or hards
And the physical characteristic such as surface roughness carries out perception, to realize the stable crawl to target object.Object is on touch sensor
Motion cause the vibration of altofrequency short arc to be established, it can detect and explain the sliding of object.Due to great majority
Point contact type sense of touch tactility apparatus based on pressure sensitive can only detect forward contact force, it is impossible to accurately detects tangential force, can not
Pick out relative motion different from power, thus the Slip Signal of the altofrequency short arc during None-identified grasping body.
Therefore, research has high sensitivity and high-resolution distributed flexible tactile and slip sense compound sensor so that it is can be just
Victory is loaded on the body of artificial limb or robot irregular surface, can accurately detect three-dimensional contact force simultaneously and altofrequency is low
The Slip Signal of amplitude, is the key technology of robot automtion research, significant to rehabilitation engineering field.
Sensor of the prior art uses pressure-sensitive conductive rubber, has certain flexibility, can detect three-dimensional force, but have
Four electrode structures proposed, its follow-up data processing method is cumbersome, and conductive rubber array does not does filling flexible thing
Process, flexure plane is easily destroyed during stress sensor construction.
China national patent of invention (publication number CN201210193314.9) discloses a kind of many fingers of human emulated robot
Flexible 3 D force-touch sensor and three-dimensional force detecting system thereof.This sensor uses has the pressure-sensitive compound of quantum tunneling effect
Material Quantum Tunneling Composites(QTC), when QTC is not by natural compression, its body is insulator, resistance
Resistance is up to 1k；When QTC is by natural compression, body generation compressive deformation, QTC presents conductive characteristic, resistance with
The increase of pressure and taper into.This sensor entirety has flexibility, can detect three-dimensional force.But this sensor electrode electricity
Road is divided into upper and lower two-layer, easily damages circuit, and do not embody the function of detection Slip Signal in long-term loading process, it is difficult to
Meet intelligent artificial limb or the demand of robot motor feedback control.
Summary of the invention
Positive force detection can only be carried out for most touch sensors and the problem of sliding cannot be detected simultaneously, the present invention's
Purpose is to propose a kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber, is also that one can detect three-dimensional simultaneously
Power and the distributed flexible tactile and slip sense composite sensing array of sliding, solve most touch sensor and can not detect contact force simultaneously
Problem with Slip Signal, it is possible on the convenient irregular surface being loaded in intelligent artificial limb or robot, for Three-Dimensional contact
Power and the detection of Slip Signal.
The technical solution used in the present invention is:
The present invention includes the PDMS projection of the flexible electrode layer of bottom, intermediate layer and the top layer that fit tightly from bottom to up
Layer；Intermediate layer includes conductive rubber array and the flexible filler being filled in around conductive rubber array, and conductive rubber array is
Array by the arrangement of conductive rubber unit；Flexible electrode layer immediately below conductive rubber unit is provided with test electrode group,
Test electrode group is identical with conductive rubber cellular array distribution mode, conductive rubber unit and one group of survey in flexible electrode layer
The length of side of examination electrode group is identical；PDMS convexity layer is provided with 3 × 3 arrays corresponding with each conductive rubber unit and is uniformly distributed
Nine miniature boss structures, the array element that nine miniature boss structures are formed just is being positioned at each self-corresponding conductive rubber unit
Top.
Described conductive rubber unit is square conductive sheet rubber.
Described conductive rubber array is bonded together formation by the flexible filler of normal temperature cure.
The described array that conductive rubber array is more than 2 × 2.
The test electrode group of described flexible electrode layer is the array distribution of more than 2 × 2.
The group number of described test electrode group is identical with the conductive rubber unit number of conductive rubber array.
Described often group test electrode group is five electrode structures of square shape, and five electrode structures are by being uniformly distributed
Four right angled triangle electrodes in corner and the square electrode composition at center thereof, be in the square electrode at center as public affairs
Use electrode；Often all square electrode of row test electrode group are connected in series rear fairlead by the lead-in wire of parallel routing mode
Foot, is positioned at the right angled triangle electrode identical with position in the test electrode group on the string lead-in wire string by parallel routing mode
Pin drawn by connection after connecting, M row test electrode group is drawn M pin by square electrode, and N row test electrode group is by right angle trigonometry
Shape electrode draws 4N pin.
Described conductive rubber array uses the Inastomer conductive rubber that INABA company of Japan produces.
Described flexible electrode layer is double-sided flex circuit plate, uses Kapton as base material.
The invention has the beneficial effects as follows:
(1) based on pressure-sensitive conductive rubber the flexible tactile and slip sense composite sensing array of the present invention can detect Three-Dimensional contact
Power.Additionally, use Inastomer conductive rubber, there is excellent piezoresistive characteristic, lag performance and the linearity, to slight vibration
There is good presser sensor effect, the Slip Signal of altofrequency short arc can be detected.
(2) PDMS convexity layer is positioned at the outermost layer of tactile and slip sense composite sensing array, and surface has micro-protrusions structure, and
Being filled with flexible filler in conductive rubber array surrounding, this kind of design can be effectively improved flexible tactile and slip sense composite sensing array
Detection sensitivity, and protect the electrode within composite sensing array and lead-in wire.
(3) pressure-sensitive conductive rubber array and flexible electrode layer are single-contact, than the mechanism form of " double contact ",
Manufacturing process is greatly simplified, and contact pressure face is pressure-sensitive conductive rubber face, can shield electrode layer effectively, be effectively improved compound
The working stability performance of sensor array.
(4) present invention tests in flexible electrode layer five distribution of electrodes structures of electrode group, proposes than in prior art
" four electrode structures ", the Data processing method after signals collecting is simpler.
(5) in the present invention, the electrode in flexible electrode layer uses the mode of packet series conductor wire, effectively reduces sense of touch and passes
The external number of pin of sensor, the conductive rubber unit of design is square shape, simple in construction, it is easy to manufacturing, technique is more
Simply.
Accompanying drawing explanation
Fig. 1 is the top view of the present invention.
Fig. 2 is the tactile and slip sense composite sensing array cross section structure schematic diagram of the present invention.
Fig. 3 is the flexible electrode layer schematic diagram of the present invention.
Fig. 4 is the conductive rubber array schematic diagram that the surrounding of the present invention is filled with flexible filler.
Fig. 5 is the structural representation of the tactile and slip sense composite sensing array element of the present invention.
Fig. 6 is the test electrode schematic diagram of the present invention.
Fig. 7 is the test philosophy schematic diagram of the tactile and slip sense composite sensing array element of the present invention.
Fig. 8 is the PDMS convexity layer schematic diagram of the present invention.
In figure: 1.PDMS convexity layer, 2. conductive rubber array, 3. flexible filler, 4. flexible electrode layer, the most miniature boss
Structure, 6. conductive rubber unit, 7. test electrode.
Detailed description of the invention
The invention will be further described with embodiment below in conjunction with the accompanying drawings.
As depicted in figs. 1 and 2, the present invention includes fitting tightly from bottom to up the flexible electrode layer 4 of bottom, intermediate layer and
The PDMS convexity layer 1 of top layer；As shown in Figure 3 and Figure 5, the flexible electrode layer 4 immediately below conductive rubber unit 6 is provided with test electricity
Pole group 7, test electrode group 7 is identical with the array distribution mode of conductive rubber unit 6, conductive rubber unit 6 and flexible electrode layer 4
On one group test electrode group 7 the length of side identical；As shown in Figure 4, intermediate layer includes conductive rubber array 2 and is filled in conduction rubber
Flexible filler 3 around glue array 2, conductive rubber array 2 is by the array of conductive rubber unit 6 arrangement；Such as Fig. 5 and
Shown in Fig. 8, PDMS convexity layer 1 be provided with 3 × 3 arrays corresponding with each conductive rubber unit 6 equally distributed nine micro-
Type boss structure 5, the array element of nine miniature boss structure 5 formation is positioned at directly over each self-corresponding conductive rubber unit 6.
Conductive rubber unit 6 is square conductive sheet rubber.
Surrounding is filled with the conductive rubber array 2 of flexible filler 3, is had identical excellent pressure-sensitive character by more than 2 × 2
Square conductive sheet rubber constitute, conductive rubber array 2 is bonded together formation by the flexible filler 3 of normal temperature cure.
Conductive rubber array 2 is the array of more than 2 × 2.The test electrode group 7 of flexible electrode layer 4 in more than 2 × 2 battle array
Column distribution.The group number of test electrode group 7 is identical with conductive rubber unit 6 number of conductive rubber array 2.
As shown in Figure 6 and Figure 7, electrode group 7 is tested: often group test electrode group 7 structure is identical, is square shape
Five electrode structures, five electrode structures are by four right angled triangle electrodes and the square electrode at center thereof being evenly distributed on corner
Composition, is in the square electrode at center as common electrode；Often all square electrode of row test electrode group 7 are by parallel
The lead-in wire of wire laying mode draws pin after being connected in series, and is positioned at the right angle three identical with position in the test electrode group 7 on string
Dihedral electrode draws pin by the lead-in wire of parallel routing mode after being connected in series, M row test electrode group 7 is drawn by square electrode
Going out M pin, N row test electrode group 7 is drawn total M+4N on 4N pin, i.e. flexible electrode layer 4 by right angled triangle electrode
Individual pin.
Conductive rubber array 2 preferably employs the Inastomer conductive rubber that INABA company of Japan produces.The present invention uses
The Inastomer conductive rubber of pressure sensitive, there is excellent piezoresistive characteristic, lag performance and the linearity, to slight vibration
There is good voltage-sensitive effect, can detect that the Slip Signal of altofrequency short arc.Its operation principle is: when not stressing, conduction
Its body of rubber is insulator, and resistance is up to several megohms；When by ambient pressure effect, conductive rubber compresses
Deformation, due to piezoresistive effect, the conducting particles of constricted zone is closer to each other and produces under the effect of the electric field force of external world's applying
Tunnel current；With constantly increasing of ambient pressure, resistance value gradually decreases to several ohm.
Flexible electrode layer 4 is double-sided flex circuit plate, uses Kapton as base material.
Embodiments of the invention are as follows:
According to the demand of certain applications, as the spatial resolution required, the range of three-dimensional force, transducer sensitivity,
Accuracy of detection, require the indexs such as diastrophic degree, determine the flexible size of tactile and slip sense composite sensing array, tactile and slip sense
Spacing between the size of composite sensing array sensing unit and unit.Range and the sensitivity of three-dimensional force are multiple by tactile and slip sense
Close the size of conductive rubber slice in sensor array sensing unit and the size of five electrode square structures and spacing determines.
As it is shown on figure 3, the test electrode group 7 of the flexible electrode layer 4 of embodiment uses the array distribution of 3 × 3, i.e. flexible electrical
Pole layer 4 comprises nine groups of test electrode groups 7 and 15 terminal pins, uses double-sided flex circuit plate to avoid the intersection of lead-in wire.Its
In, often group test electrode group 7 is five electrode structures, and overall square shape is in the square electrode at center as public
Electrode, four right angled triangle electrodes are the most in 90 ° with the central point line of the square electrode at center, are evenly distributed on square
The corner of electrode.The central electrode of three row is connected in series by the lead-in wire of flexible electrode layer 4 respectively, and the longitudinal direction drawing corresponding three row is divided
Three pins of cloth；The lead-in wire of flexible electrode layer 4 will be located in position in three groups of test electrode groups 7 on string identical respectively
Right angled triangle electrode is connected in series, and draws 12 pins of the genesis analysis of corresponding three row；Ten are had in flexible electrode layer 4
Five pins.The wire laying mode that in flexible electrode layer 4, each electrode is connected with each pin leads uses parallel routing mode.
As shown in Figure 4, embodiment uses the square conductive sheet rubber with pressure-sensitive character to be the distribution of 3x3 array.
Miniature boss structure 5 on the PDMS convexity layer 1 of embodiment is 9:1 with the number ratio of conductive rubber unit 6, shape
Become corresponding equally distributed nine the miniature boss structures 5 of 3x3 array on each conductive rubber unit 6 as shown in Figure 8.
Manufacture flexibility tactile and slip sense composite sensing array of the present invention, first pass through flexible circuit printing technology and manufacture flexible electrode
Layer 4, utilizes screen printing technique to be spin-coated on regularly in the square electrode of flexible electrode layer 4 by high-purity conductive silver glue；So
After square conductive sheet rubber is pasted onto in square electrode；Then flexible filler 3 is filled into the sky of flexible electrode layer 4
White position, normal temperature cure molding；Finally it is filled with flexibility fills out being bonded in surrounding by die marks PDMS convexity layer 1 out
Fill on the conductive rubber array 2 of thing 3.So, flexible tactile and slip sense composite sensing array as depicted in figs. 1 and 2 is just obtained.
Three-dimensional contact force and the sliding Cleaning Principle of the present invention are as follows:
As shown in Fig. 5, Fig. 6 and Fig. 7, the three-dimensional force of any direction passes through the miniature boss structure 5 of flexible convex aliquation by power
Being conducted to conductive rubber unit 6, the elastic deformation of the flexible filler 3 of surrounding is bigger than conductive rubber unit 6.Due to conductive rubber
Contact resistance between piezoresistive effect and conductive rubber array 2 and the flexible electrode layer 4 of unit 6, there are four equivalent electric
Resistance R1、R2、R3、R4.When conductive rubber unit 6 occurs strain, resistance will change.Four resistance are respectively through each
Testing circuit export corresponding voltage signal, be converted into three-dimensional force F by following principlex、Fy、FzMeasurement, thus
Obtain Arbitrary 3 D power.
As only FxDuring effect, because by the compressive strain of equal extent, resistance R1、R4Reduce；Because by equal extent
Tension, resistance R2、R3Increase, and resistance R2、R3Increase amplitude and resistance R1、R4Reduction amplitude is identical.I.e.
As only FyDuring effect, because by the compressive strain of equal extent, resistance R1、R2Reduce；Because by equal extent
Tension, resistance R3、R4Increase, and resistance R3、R4Increase amplitude and resistance R1、R2Reduction amplitude is identical.
As only FzDuring effect, because by the compressive strain of equal extent, resistance R1、R2、 R3、R4Reduce, and reduce amplitude phase
With.
According to above-mentioned analysis, the relation between three-dimensional force and four varistor change in resistance can be derived.Repeatedly try
Test the change in resistance data of acquisition three-dimensional force and four varistors, through linearly decoupling the stress and four obtaining three-dimensional
The linear relationship of the change in resistance of varistor, such that it is able to accurately measure actual three-dimensional force.
Additionally, due to the Inastomer conductive rubber that the present invention uses has excellent piezoresistive effect, lag performance is low,
The linearity is high, can identify the Slip Signal of altofrequency short arc.After measuring three-dimensional force, by signal processing analysis horizontal tangential
Power, utilizes the sliding jump signal of the altofrequency short arc of wavelet analysis extraction horizontal direction, can quickly determine whether to occur
Sliding, it is adaptable to robot regulates the size of grip force during capturing article, it is achieved grip force dynamic equilibrium.With existing base
Three-dimensional force sensor in conductive rubber compares, and the sensor designed by the present invention is measuring sensitivity and the degree of accuracy of three-dimensional force
All improve more than 10%.
Above-mentioned detailed description of the invention is used for illustrating the present invention rather than limiting the invention, the present invention's
In spirit and scope of the claims, any modifications and changes that the present invention is made, both fall within the protection model of the present invention
Enclose.
Claims (8)
1. a flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber, it is characterised in that: include the tightest
The PDMS convexity layer (1) of flexible electrode layer (4), intermediate layer and the top layer of the bottom of closely connected conjunction；Intermediate layer includes conductive rubber battle array
Row (2) and the flexible filler (3) being filled in around conductive rubber array (2), conductive rubber array (2) is by conductive rubber list
The array of unit (6) arrangement；Flexible electrode layer (4) immediately below conductive rubber unit (6) is provided with test electrode group (7),
Test electrode group (7) is identical with the array distribution mode of conductive rubber unit (6), conductive rubber unit (6) and flexible electrode layer
(4) length of side of one group of test electrode group (7) on is identical；It is right with each conductive rubber unit (6) that PDMS convexity layer (1) is provided with
Equally distributed nine the miniature boss structures (5) of 3 × 3 arrays answered, the array element that nine miniature boss structures (5) are formed
It is positioned at directly over each self-corresponding conductive rubber unit (6)；
Described often group test electrode group (7) is five electrode structures of square shape, and five electrode structures are by being uniformly distributed
Four right angled triangle electrodes in corner and the square electrode composition at center thereof, be in the square electrode at center as public affairs
Use electrode；Draw after often all square electrode of row test electrode group (7) are connected in series by the lead-in wire of parallel routing mode
Pin, is positioned at the right angled triangle electrode identical with position in test electrode group (7) on string by parallel routing mode
Pin drawn by lead-in wire after being connected in series, M row test electrode group (7) is drawn M pin, N row test electrode group by square electrode
(7) 4N pin is drawn by right angled triangle electrode.
A kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber the most according to claim 1, its feature
It is: described conductive rubber unit (6) is square conductive sheet rubber.
A kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber the most according to claim 1, its feature
It is: described conductive rubber array (2) is bonded together formation by the flexible filler (3) of normal temperature cure.
A kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber the most according to claim 1, its feature
It is: described conductive rubber array (2) is the array of more than 2 × 2.
A kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber the most according to claim 1, its feature
Be: test electrode group (7) of described flexible electrode layer (4) in more than 2 × 2 array distribution.
A kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber the most according to claim 1, its feature
It is: the group number of described test electrode group (7) is identical with conductive rubber unit (6) number of conductive rubber array (2).
7. according to arbitrary described a kind of based on pressure-sensitive conductive rubber the flexible tactile and slip sense composite sensing array of claim 1～6,
It is characterized in that: described conductive rubber array (2) uses the Inastomer conductive rubber that INABA company of Japan produces.
8. according to arbitrary described a kind of based on pressure-sensitive conductive rubber the flexible tactile and slip sense composite sensing array of claim 1～6,
It is characterized in that: described flexible electrode layer (4) is double-sided flex circuit plate, use Kapton as base material.
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Families Citing this family (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105222702A (en) * | 2015-11-14 | 2016-01-06 | 际华三五一五皮革皮鞋有限公司 | Three dimensionality resistance-type curved surface sensor |
| CN106096591B (en) * | 2016-07-20 | 2019-04-16 | 四川东鼎里智信息技术有限责任公司 | Hand exercise signal acquiring system based on flexible circuit |
| CN106802200B (en) * | 2017-02-23 | 2019-04-12 | 北京航空航天大学 | A kind of flexibility vector tactile and slip sense compound sensor |
| CN108178121B (en) * | 2018-02-07 | 2024-05-03 | 北京先通康桥医药科技有限公司 | Palpation probe and manufacturing method thereof |
| CN108613759B (en) * | 2018-05-03 | 2020-06-02 | 湖南厚生医疗器械有限公司 | Touch sensor skin |
| CN108760095B (en) * | 2018-06-04 | 2020-07-03 | 重庆大学 | Flexible touch sensor unit, sensor and touch distribution monitoring method thereof |
| JP7295013B2 (en) | 2019-12-25 | 2023-06-20 | Ｎｉｓｓｈａ株式会社 | pressure detector |
| CN111347445B (en) * | 2020-02-20 | 2021-07-20 | 安徽建筑大学 | Flexible touch sensor capable of detecting sliding touch force |
| CN111537115A (en) * | 2020-04-27 | 2020-08-14 | 西安交通大学 | Piezoresistive flexible three-dimensional force sensor array and preparation method thereof |
| CN112179410B (en) * | 2020-09-24 | 2022-03-01 | 之江实验室 | Multifunctional flexible touch sensor and preparation method thereof |
| CN112857630B (en) * | 2021-01-15 | 2022-10-14 | 之江实验室 | Three-dimensional convex flexible touch sensor of soft robot hand and manufacturing method |
| CN113155344B (en) * | 2021-01-25 | 2022-10-18 | 电子科技大学 | Flexible electronic skin device with touch information perception function |
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| CN204154423U (en) * | 2014-09-05 | 2015-02-11 | 浙江大学 | A kind of flexible tactile and slip sense composite sensing array based on pressure-sensitive conductive rubber |
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| US4856993A (en) * | 1985-03-29 | 1989-08-15 | Tekscan, Inc. | Pressure and contact sensor system for measuring dental occlusion |
| US6964205B2 (en) * | 2003-12-30 | 2005-11-15 | Tekscan Incorporated | Sensor with plurality of sensor elements arranged with respect to a substrate |
| JP5198608B2 (en) * | 2010-03-18 | 2013-05-15 | 韓国標準科学研究院 | Flexible force or pressure sensor array using semiconductor strain gauge, method for manufacturing the flexible force or pressure sensor array, and force or pressure measuring method using the flexible force or pressure sensor array |
| CN102589759B (en) * | 2012-02-20 | 2013-10-23 | 浙江大学 | Bionic flexible touch sense sensing array based on piezoresistive type and capacitance type combination |
| CN103743503B (en) * | 2013-12-31 | 2015-08-19 | 浙江大学 | Based on the flexible 3 D force-touch sensor of pressure resistance type and capacitive combination |
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