CN104067158A - Confocal scanner and optical measuring device using same - Google Patents
Confocal scanner and optical measuring device using same Download PDFInfo
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- CN104067158A CN104067158A CN201380001083.XA CN201380001083A CN104067158A CN 104067158 A CN104067158 A CN 104067158A CN 201380001083 A CN201380001083 A CN 201380001083A CN 104067158 A CN104067158 A CN 104067158A
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- 238000005259 measurement Methods 0.000 claims description 14
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0608—Height gauges
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/04—Measuring microscopes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B21/00—Microscopes
- G02B21/0004—Microscopes specially adapted for specific applications
- G02B21/002—Scanning microscopes
- G02B21/0024—Confocal scanning microscopes (CSOMs) or confocal "macroscopes"; Accessories which are not restricted to use with CSOMs, e.g. sample holders
- G02B21/0036—Scanning details, e.g. scanning stages
- G02B21/0044—Scanning details, e.g. scanning stages moving apertures, e.g. Nipkow disks, rotating lens arrays
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
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- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
- G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
- G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms
Abstract
A confocal opening array and a movable prism having a wedge-shaped space on the interior are attached to a single axis movable table, and a fixed prism having a wedge-shaped apex angle is provided to the exterior of the movable table. At the same time that XY scanning of the opening is achieved by means of movement of the movable table, the thickness of an equivalent plane parallel substrate varies using the pair comprising the movable prism and the fixed prism, and confocal movement (Z scanning) is also simultaneously achieved.
Description
Technical field
The present invention relates to utilize the measurement mechanism of light.Be particularly related to and use confocal optical system to carry out high speed, the simplicity of the three-dimensional measurement of object or the device of surface shape measuring.
Background technology
If use confocal optical system photographic images (following, the image being formed by confocal optical system is called to confocal images), focus not to the light of upper and fuzzy diffusion not by image conversion, the only light image to upper part by focus.In general imaging optical system, focus does not spread in image planes upper and fuzzy light, makes image variation, but in confocal optical system, there is no such situation (or considerably less), so can access the sharp keen image that contrast is higher.In addition, also known use only can be measured the 3D shape of shooting object by focus to the feature of the light image of upper part, utilizes such feature, and its application to industrial community in recent years expands.
In Fig. 7, represent the essential structure of confocal optical system (reflection-type).The light penetrating from pointolite 701 is projected to object by object lens 703 optically focused.From object reflection and again incide light object lens 703 and incide in, detecting by the amount of the light after pin hole 704 by detecting device 705 optically in the pin hole 704 for identical position with pointolite 701 via half-reflecting mirror 702.This is the basic structure of confocal optical system.
By utilizing this optical system, can measure as follows the height of each position of body surface.In the situation that body surface is in the position with pointolite 701 conjugation, it is upper that reflected light is converged in 704 of the pin holes of the position that is equally conjugation, and many reflected light are by pin hole 704.But if body surface is from leaving with the position of pointolite 701 conjugation, the light quantity by pin hole 704 reduces rapidly.Therefore, as long as make the change of distance between object and object lens 703, find detecting device 705 to present the maximum point of exporting, just know the height of body surface.
Because confocal optical system is the optical system of a detection substantially, so generally need to carry out XY scanning in order to obtain confocal images.As the method for XY scanning, be generally the scanning that laser beam flying or use have the rotating circular disk that is called Nipkow disk of many spiral helicine pin holes row, use these scan methods to obtain that the optical system of confocal images is known a confocal microscope.
The three-dimensional measurement that uses confocal microscope is also measured identical with the height of use point measurement type confocal optical system above substantially, make the change of distance between object and object lens 703 and find detecting device 705 to present the point of maximum output, but be not the data of 1 of body surface but 2 view data, the maximum outgoing positions of tieing up are obtained in this point different according to the pixel of view data in the data that make object obtain with change of distance between object lens 703 at every turn.
Particularly, if establishing the resolution of highly measuring is a, make the distance every variation a between object and object lens 703 and obtain and preserve confocal images, (optical axis direction measurement range is all scanned, make the change of distance between object and object lens 703) finish after, by according to the position of the image of the output maximum of pixel exploration detecting device 705, can according to pixel, obtain the position of body surface, can access three-dimensional shape measure data.In patent documentation 1, the method that the distance of object and object lens is optically changed is disclosed.
Conventional art document
Patent documentation
Patent documentation 1: Japanese kokai publication hei 8-304043
Summary of the invention
The technical matters that invention will solve
As described above, by the three-dimensional measurement of confocal optical system, finally need to carry out the whole scanning of three axles of XYZ.Therefore, it is complicated and extensive that structure becomes, and causes expensiveization.In addition, from the viewpoint of measuring speed, also require high speed.
In view of such situation, the object of the invention is to realize simple and confocal three-dimensional measuring apparatus at a high speed.
Means for technical solution problem
In order to solve above-mentioned problem, form a kind of cofocal scanner, it is characterized in that, by following part, formed: travelling table, has the shifting axle of at least one axle; Aperture array, is arranged on above-mentioned travelling table, moves together with above-mentioned travelling table, has a plurality of confocal openings; Mobile prism, has with respect to the shifting axle of above-mentioned travelling table mutually to two faces on the opposite tilting with the angle equating in the other direction, is arranged on above-mentioned travelling table and moves; Fixed prism, have with respect to the shifting axle of above-mentioned travelling table with above-mentioned mobile prism correctly identical angle mutually to two faces on the opposite tilting in the other direction, be arranged on outside above-mentioned travelling table, do not move; By above-mentioned mobile prism and above-mentioned fixed prism are combined, become equivalent parallel plane substrate; Along with the movement of above-mentioned travelling table, the variation in thickness of the parallel plane substrate of equivalence.
Or, form a kind of cofocal scanner, also possess be arranged on above-mentioned travelling table, together with above-mentioned travelling table mobile, be used for preventing at least a slice protection transparent panel that foreign matter adheres to above-mentioned aperture array.
Above-mentioned aperture array is pinhole array, according to interval P, each pin hole is set to bring into play confocal effect; Pin hole adjacent on moving direction is configured to, the slight distance that staggers in the direction with moving direction quadrature S, and P/S is integer.
In addition, above-mentioned aperture array is the slit array that replaces pinhole array, and each slit separates certain intervals P configuration on moving direction, to bring into play confocal effect.
One side of above-mentioned mobile prism and above-mentioned fixed prism is to have mutually angle to equate mutually to the prism of two faces that tilt with respect to the shifting axle of above-mentioned travelling table in the other direction; The opposing party of above-mentioned mobile prism and above-mentioned fixed prism is that the prism that has parts for rectangular shape, be formed with one side can plug and the prism of the shape of the peristome that two faces mutually being tilted with respect to the shifting axle of above-mentioned travelling table round about by the above-mentioned angle mutually to equate clip.
Along with the movement of above-mentioned travelling table, the prism of one side is with respect to the above-mentioned peristome plug of above-mentioned the opposing party's prism, thus the variation in thickness of the parallel plane substrate of above-mentioned equivalence.
An optical measuring device, consists of following part: above-mentioned cofocal scanner; Object lens dispose above-mentioned aperture array on image planes position; Lamp optical system, irradiates effective image planes integral body of above-mentioned object lens; Deflection optical element, will incide in above-mentioned object lens, with the object reflected light of crossing above-mentioned aperture array and be partial to the direction different from above-mentioned lamp optical system by measuring object reflection; 2 dimension detecting devices, receive by the above-mentioned object reflected light after above-mentioned deflection optical element deflection, carry out light-to-current inversion, and as image signal output; Imaging optical system, is imaged onto the picture of above-mentioned aperture array on above-mentioned 2 dimension detecting devices via above-mentioned deflection optical element; Image processing apparatus, inputs the output of above-mentioned 2 dimension detecting devices as digital signal, use the different data in a series of focal position that obtain, and explores and brings peaked focal position, determines the height of this point according to the focal position of exploring; By above-mentioned travelling table, with certain speed, move above-mentioned aperture array and above-mentioned mobile prism, in movement, by above-mentioned 2 dimension detecting devices, repeatedly obtain image, the time shutter of 1 time of above-mentioned 2 dimension detecting devices are set as to arrange the traveling time of integral multiple in cycle with the opening of above-mentioned aperture array moving direction identical.
The effect of invention
By forming as described above, only by the scanning of an axle, just can carry out the scanning of three axles of XYZ, can realize simple, low-cost and confocal three-dimensional measuring apparatus at a high speed.
Accompanying drawing explanation
Fig. 1 means the figure of the embodiment of cofocal scanner of the present invention.
Fig. 2 is for the figure of the aperture array of pin-hole type is described.
Fig. 3 is for the figure of the Focal Point Shift being undertaken by parallel plane substrate is described.
Fig. 4 is for the figure of the aperture array of slit-type is described.
Fig. 5 means the figure of the embodiment of the measurement mechanism that uses cofocal scanner of the present invention.
Fig. 6 is for the figure of the focal position change in the time shutter of the present invention is described.
Fig. 7 is for the figure of conventional art is described.
Fig. 8 is for the figure of chock type is described.
Fig. 9 is for the right figure of chock type prism is described.
Embodiment
When below, of the present invention to concrete enforcement, think that optimum embodiment describes.
First, with reference to Fig. 1～Fig. 4 explanation by the example of the specific embodiment of cofocal scanner of the present invention.
As shown in Figure 1, cofocal scanner of the present invention by the travelling table 101 of an axle, be arranged on bracket 102, aperture array 103 and the mobile prism 104 on this travelling table 101 and form with the independent fixed prism 105 arranging of travelling table 101.
Aperture array 103 as shown in Figure 2, is pinhole array, and the mutual interval P of each pin hole is set as several times of left and right of pinhole diameter, to present confocal effect.As shown in Figure 2, in shifting axle direction, adjacent pin hole staggers slight distance S and configures in the direction perpendicular to shifting axle.
By setpoint distance P and the amount of staggering S, so that P/S is integer, on moving direction, becomes P/S, become the periodical configuration according to P * (P/S).
The amount of staggering S as far as possible hour, attenuates with the scanning of the direction of moving orthogonal, but considers from the resolution of object lens, does not need invalidly to attenuate, and preferably take the radius left and right of pin hole to be set as the amount that P/S is integer.
Aperture array 103 former states can not obtain the transmitted light (information) of non-opening portion, but by mobile above-mentioned cycle P * (P/S), whole of aperture array 103 is not omitted and scanned, can access the information of whole.
Here, if travelling table 101 is moved with certain speed V, with (P * P/S)/v time of timing arbitrarily, carry out above-mentioned whole scanning.Like this, can realize XY scanning by enough axles.
In addition, the mobile prism 104 moving together with aperture array 103 for example as shown in Figure 1, has the shape that the prism of two chock types is combined in the opposed facing mode in inclined-plane, has the space of V-shape between inclined-plane.The shape of the chock type of the drift angle of the angle equal angular independently arrange with travelling table 101 on the other hand,, the fixed prism 105 not mobile with respect to object having the V word that become each other with the inclined-plane of mobile prism 104.By mobile prism 104 and fixed prism 105 are used in combination, form equivalent parallel plane substrate.These equivalent parallel plane substrates are variation in thickness along with the movement of mobile prism 104.In addition, preferably make 2 grades of the drift angle of the V word that the inclined-plane of mobile prism 104 become each other divide face to divide face consistent with 2 grades of the drift angle of fixed prism 105.
Chock type described here, mainly refer to the tetragonal prism that there is the triangular prism of cross sectional shape such shown in Fig. 8 (A) or there is the uneven cross sectional shape in long limit on such opposite shown in Fig. 8 (B), the uneven cross sectional shape in long limit that importantly refers to opposite, as shown in Fig. 8 (C), the shape of short side part is not defined.
As shown in Figure 3, generally speaking, the focal position of imaging len can change according to the thickness that is inserted into the parallel plane substrate in the light path of imaging len.That is,, by the variation in thickness of parallel plane substrate, can carry out Focal Point Shift=Z scanning.The variation in thickness of parallel plane substrate can be by being used in combination chock type prism to realize.Although only use a chock type prism also can realize focal variation, bring fatefulue aberration for imaging optical system.If as shown in Figure 9 the combination of two chock type prisms is used as parallel plane substrate, can aberration be suppressed littlely, but along with the movement of travelling table 101, the change of distance in the space between prism, so light be shifted.Combination for the mobile prism 104 shown in Fig. 1 with fixed prism 105, for with by the chock type prism of Fig. 9 to combining in the opposite direction the equal structure of two-stage, the structure originally being compensated is got back in the displacement of the light bringing for the variation of the space length by between prism again.
Certainly, as long as combining, mobile prism 104 and fixed prism 105 form equivalent parallel plane substrate just passable, so also can be contrary.That is, the prism with the drift angle of chock type can be also mobile prism 104, and the prism with the space of V-shape is fixed prism 105.; a side in mobile prism 104 and fixed prism 105 is configured to; have with mutually equal angle mutually to opposed two faces that tilt with respect to the shifting axle of travelling table 101 in the other direction; and; another is configured to, and has the shape that parts with respect to rectangular shape are formed with the peristome (open space) that this prism can plug.Now, in the formed space of parts of rectangular shape, the mutual equal angle that two opposed faces preferably being had by the prism with to space plug are identical, mutually in the other direction with respect to two spaces that face clips of the shifting axle inclination of travelling table 101.For example, the shape in this space is preferably similar figures with the prism to space plug.In addition, this space also can form in the mode that the parts of rectangular shape are cut apart, and in the case, the parts of rectangular shape are divided into two prisms.Now, preferably two prisms form respectively, parallel with respect to the shifting axle of travelling table 101 with the opposing face of opposed of the prism being plugged.The equivalent parallel plane substrate that the mobile prism 104 forming like this and fixed prism are 105 one-tenth is along with the movement of travelling table 101, and the prism of a Wedge-shaped is by with respect to another can plug in chimeric space, the variation in thickness that it is equivalent.
In addition, be made as mobile prism 104 and fixed prism 105 these two prisms here, but also can be as described above by the chock type prism of Fig. 9 to overlapping two-stage, form with 4 prisms.
As known from the above, if travelling table 101 is moved with certain speed, can carry out the scanning of XY direction and the scanning of Z direction simultaneously.
In addition, aperture array 103 for example also can be made the such slit array of Fig. 4.In slit array, due to need to not the enterprising line scanning in the direction perpendicular to moving direction, so slit separation P former state becomes the cycle.
In addition, it is fatefulue that aperture array 103 adheres to if any the foreign matter of rubbish etc., thus take some countermeasures so that foreign matter non-cohesive be indispensable.Therefore, need on travelling table 101, to arrange as shown in Figure 1 protection transparent panel 106.In the situation that on protection transparent panel 106 evaporation for example chromium opaque coating, that the technology by photoetching forms patterns by aperture array 103 is such, about a side of aperture array 103, do not need specially to arrange and protect transparent panel 106.In addition, the protection of opposite side also can be undertaken this task by mobile prism 104.
Then an example that, represents the confocal three-dimensional measuring apparatus of the above-mentioned cofocal scanner of use.Use Fig. 5 explanation.
Light from light source 501 throws light on aperture array 103 with optimum state by lamp optical system 502.Light source 501 both can have been used the such relevant light source of laser, can be also incoherent thermal light source.But optimum optical system is different separately.The coherence of illumination light is unwanted in confocal optical system, so in the situation that using laser, carry out the such mechanism of irrelevantization inner setting of lamp optical system 502.
See through illumination light after aperture array 103 by cofocal scanner 104 and then by after fixed prism 105, again by mobile prism 104 to object lens 503 incidents.By the imaging effect of object lens 503, illumination light becomes the picture of aperture array 103, by object 504 illuminations.By the illumination light after object 504 reflection, become reflected light, incide in object lens 503, again by the imaging effect of object lens 503, in image space imaging, a part or it is roughly all by the opening of aperture array 103.
The inside or 505 deflections of the deflection optical element between lamp optical system 502 and aperture array 103 that by the reflected light after aperture array 103, are arranged on lamp optical system 502, arrive 2 dimension detecting devices 507 via imaging optical system 506.Imaging optical system 506 is configured to, and the picture of aperture array 103 is imaged onto on 2 dimension detecting devices 507.
By the detected reflected light from object 504 of 2 dimension detecting device 507, by light-to-current inversion, as view data (2 dimension data) output, and be saved in image processing apparatus 508, then by computing, be transformed to the three-dimensional information of object.
Conventionally, in order to prevent being advanced to the direction of 2 dimension detecting devices 507 by the illumination light after aperture array 103 reflections, as deflection optical element 505, use polarisation beam separator, in addition, generally between object lens 503 inside or object lens 503 and object 504, insert λ/4 polarizer 509.
By the illumination light after aperture array 103 reflections, be complete unwanted light, on the other hand, not necessarily large as the catoptrical intensity of the flashlight from object 504, so need to remove as far as possible completely.If make structure as described above, illumination light becomes linear polarization by the deflection optical element 505 as polarisation beam separator, even reflected by aperture array 103, also can be by deflection optical element 505 deflection and the transmission of former state straight ahead can not advanced to the direction of 2 dimension detecting devices 507.On the other hand, by the linear polarization illumination light after aperture array 103, at the time point by λ/4 polarizer 509 once, become rotatory polarization, if reflected by object 504, again pass through λ/4 polarizer 509, be transformed to the linear polarization with the direction of illumination light quadrature, by deflection optical element 505 deflections, and can arrive 2 dimension detecting devices 507.
And then, in order to be removed by the illumination light after aperture array 103 reflection more completely, also have with deflection optical element 505 as polarisation beam separator differently, Polarizer is set and then in the interior situation that testing light element is set of imaging optical system 506 lamp optical system 502 is interior.
In recent years, owing to also having developed the no reflection events surface treatment that the reflection of optical element surface roughly can be eliminated completely etc., so might not need the countermeasure of such use polarization element.
Below, illustrate by above structure, when the actual measurement and how to move.
Measure the startup of action, with the moving beginning of travelling table 101 of cofocal scanner, start.Travelling table 101 is accelerated, if reach the speed of regulation and stablize, start view data and obtain.
View data obtains and refers to, using each sensor pixel exposure of the 2 dimension detecting devices 507 as so-called video camera, using with by exposure by the electric signal of each pixel corresponding to the quantity of electric charge after light-to-current inversion, as view data, exported, be saved in image processing apparatus 508.
Now, if the time of exposure is set as to travelling table 101, move the one-period of periodical configuration of aperture array 103 or the time of the amount of its multiple, can access the confocal images scanning completely on XY.Below represent particularly.
If aperture array 103 is made to the pinhole array type shown in Fig. 2, because a cycle is P * P/S, so if the speed during constant speed of establishing travelling table is v, time shutter T is set as (P * P/S)/v.Or be set as its multiple N * (P * P/S)/v.N is natural number.If set like this, there is the impartial time in the pin hole of aperture array 103 on all positions of moving direction, in addition, about the direction with moving direction quadrature, also between the P of pin hole interval, scans P/S line, can realize XY scanning completely.During as long as travelling table 101 moves with constant speed, just can regularly obtain arbitrarily the confocal images of XY scanning.Condition just will be made as T the time shutter.
On the other hand, mobile prism 104 and fixed prism 105, for by their imaging beam, can be regarded parallel plane substrate as equivalently.Here, if travelling table 101 moves, the thickness of parallel plane substrate changes continuously thereupon.As described above, if in the light path of imaging len the variation in thickness of parallel plane substrate, move focal position, so in this device, move the focal position of object lens 503, realizes Z scanning.As long as the speed of travelling table 101 is certain, thickness just changes pro rata with the time, and focal position constant speed changes.
Because more than, after starting, accelerate, travelling table 101 becomes after constant speed state, if obtain multiple images with constant duration, can access a series of confocal images that focal position changes at certain intervals, only the movement by an axle just can realize the scanning of XYZ tri-axles.After image is obtained, can carry out three-dimensional measurement computing by image processing apparatus 508.
The a series of confocal images of three-dimensional measurement computing by changing at certain intervals with focal position, according to pixel, explore and be treated as peaked confocal images and realize.Body surface (or interface) is present in the focal position that can obtain bringing peaked confocal images, so can determine that the position of Z direction is height.
In the situation that obtain changing at certain intervals the confocal images of focal position, might not obtain image with necessary measuring accuracy interval.Even thicker focal position change interval, processes by interpolation, also can be to surpass the position on surface (or interface) of the determine precision object at interval.
In addition, for easy understanding, above-mentioned middle by focal position time interval, be certain, but be not sine qua non.Even if interval is at random, also can determine the position on the surface (or interface) of object.
As described above, only the movement by an axle just can realize the scanning of XYZ tri-axles, but is continuous because Z moves, so can consider that focal position also changes in the time shutter of 2 dimension detecting devices 507.Therefore, in resulting confocal images, comprise the data that focal position differs time shutter amount.For example, at Z, moving is Focal Point Shift be 1mm/s in the situation that, if the time shutter is 1ms, 1 μ m left and right has been moved in focal position, becomes to mix in confocal images to exist focal position to differ the state of the data of 1 μ m left and right.
As shown in Figure 6, P * P region that consideration is surrounded by pin hole.In the time shutter, this P * P region P/S bar line sweep, but different by the timing of this position by each line.The line of L1 is the beginning left and right of time shutter by this position, and what line L10 passed through is the end left and right of time shutter.
That is, in this region, gathered while starting from exposure the whole timing when finishing.The arbitrarily position of this condition in image is identical, in the region of the P * P of position arbitrarily, comprises whole timing of time shutter.If suppose that the height of object 504 in the P * P region as tiny area is uniform, by Pixel Dimensions is set as to P * P, each pixel becomes only only by the height change integration between time shutter T, can think and represent to start as average exposure the data of the focal position at rear T/2 place.When the multiple of P * P too.
Even if not necessarily Pixel Dimensions is matched with to P * P, so long as optically applied the smoothing that is equivalent to more than diameter P, be fuzzy state, the many states that can regard the mean place in the expression time shutter as arbitrarily in image, can obtain same effect.
That is,, if confocal images is not required to the measurement of higher horizontal resolution more than pin hole interval P level, this problem just can say not to be larger problem.
In the situation that need to be than the measurement under the high resolution of pin hole interval P level, need to make time shutter T shorten or the sweep velocity of Z direction is diminished etc., the focal position being set as in the time shutter changes unquestioned degree for needs measuring accuracy.
Embodiments of the invention have more than been described, but this is only an example of the present invention.The pattern of aperture array 103 can have other patterns that can bring effect same, in addition, it is also conceivable that aperture array 103 is lenticular for following according to pin hole, is about to the such situation of structure that aperture array and microlens array combine.These are also contained in the present invention.
Utilizability in industry
By the present invention, only by the scanning of an axle, just can carry out the scanning of three axles of XYZ, can be succinctly and low-cost and confocal three-dimensional measuring apparatus at a high speed.Thus, can expect there is king-sized demand in needing a large amount of semiconductor industries that exist of the high speed of light and the part of high-precision measurement.
Claims (7)
1. a cofocal scanner, is characterized in that,
By following part, formed:
Travelling table, has the shifting axle of at least one axle;
Aperture array, is arranged on above-mentioned travelling table, moves together with above-mentioned travelling table, has a plurality of confocal openings;
Mobile prism, is arranged on above-mentioned travelling table, moves together with above-mentioned travelling table; And
Fixed prism, is arranged on outside above-mentioned travelling table, with by forming equivalent parallel plane substrate with above-mentioned mobile prism combination;
Along with the movement of above-mentioned travelling table, the variation in thickness of the parallel plane substrate of above-mentioned equivalence.
2. cofocal scanner as claimed in claim 1, is characterized in that,
Also possess be arranged on above-mentioned travelling table, together with above-mentioned travelling table mobile, be used for preventing at least a slice protection transparent panel that foreign matter adheres to above-mentioned aperture array.
3. cofocal scanner as claimed in claim 1 or 2, is characterized in that,
Above-mentioned aperture array is pinhole array, according to interval P, each pin hole is set to bring into play confocal effect;
Pin hole adjacent on moving direction is configured to, the slight distance that staggers in the direction with moving direction quadrature S, and P/S is integer.
4. cofocal scanner as claimed in claim 1 or 2, is characterized in that,
Above-mentioned aperture array is slit array, separates certain intervals P configuration, to bring into play confocal effect between each slit on moving direction.
5. the cofocal scanner as described in any one in claim 1～4, is characterized in that,
One side of above-mentioned mobile prism and above-mentioned fixed prism is to have mutually angle to equate mutually to the prism of two faces that tilt with respect to the shifting axle of above-mentioned travelling table in the other direction;
The opposing party of above-mentioned mobile prism and above-mentioned fixed prism, to there is the prism that is formed with the shape of peristome with respect to the parts of rectangular shape, this peristome is the peristome that the prism of one side can plug, and two faces that mutually tilted with respect to the shifting axle of above-mentioned travelling table round about by the above-mentioned angle mutually to equate clip.
6. cofocal scanner as claimed in claim 5, is characterized in that,
Along with the movement of above-mentioned travelling table, the prism of one side is with respect to the above-mentioned peristome plug of above-mentioned the opposing party's prism, thus the variation in thickness of the parallel plane substrate of above-mentioned equivalence.
7. an optical measuring device, is the measurement mechanism that utilizes light, it is characterized in that,
By following part, formed:
Cofocal scanner in claim 1～6 described in any one;
Object lens dispose above-mentioned aperture array on image planes position;
Lamp optical system, effective image planes of irradiating above-mentioned object lens are whole;
Deflection optical element, will reflect, incide in above-mentioned object lens, by the object reflected light of above-mentioned aperture array, to the direction different from above-mentioned lamp optical system, be partial to by measuring object;
2 dimension detecting devices, receive by the above-mentioned object reflected light after above-mentioned deflection optical element deflection, carry out light-to-current inversion, and as image signal output;
Imaging optical system, is imaged onto the picture of above-mentioned aperture array on above-mentioned 2 dimension detecting devices via above-mentioned deflection optical element;
Image processing apparatus, inputs the output of above-mentioned 2 dimension detecting devices as digital signal, use the different data in a series of focal position that obtain, and explores and brings peaked focal position, determines the height of this point according to the focal position of exploring;
By above-mentioned travelling table, with certain speed, move above-mentioned aperture array and above-mentioned mobile prism, in movement, by above-mentioned 2 dimension detecting devices, repeatedly obtain image, 1 time shutter of above-mentioned 2 dimension detecting devices are set as to arrange the traveling time of integral multiple in cycle with the opening of above-mentioned aperture array moving direction identical.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2013008864A JP5376076B1 (en) | 2013-01-22 | 2013-01-22 | Confocal scanner and optical measurement apparatus using the same |
| JP2013-008864 | 2013-01-22 | ||
| PCT/JP2013/057249 WO2014115341A1 (en) | 2013-01-22 | 2013-03-14 | Confocal scanner and optical measuring device using same |
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| Publication Number | Publication Date |
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| CN104067158A true CN104067158A (en) | 2014-09-24 |
| CN104067158B CN104067158B (en) | 2016-03-16 |
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| CN201380001083.XA Expired - Fee Related CN104067158B (en) | 2013-01-22 | 2013-03-14 | Cofocal scanner and use its optical measuring device |
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| Country | Link |
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| JP (1) | JP5376076B1 (en) |
| KR (1) | KR101444048B1 (en) |
| CN (1) | CN104067158B (en) |
| TW (1) | TWI444656B (en) |
| WO (1) | WO2014115341A1 (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110186391A (en) * | 2019-05-22 | 2019-08-30 | 浙江大学 | A kind of threedimensional model gradient scan method |
| CN110494787A (en) * | 2017-04-13 | 2019-11-22 | 横河电机株式会社 | Microscopic system, microscope, processing unit and microscope camera |
| CN111771150A (en) * | 2018-02-28 | 2020-10-13 | 浜松光子学株式会社 | Light sheet microscope and sample observation method |
| CN112666696A (en) * | 2021-01-18 | 2021-04-16 | 郑州轻工业大学 | Focus scanning method, focus scanning device, and confocal microscope |
Families Citing this family (5)
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|---|---|---|---|---|
| EP3086156A1 (en) * | 2015-04-20 | 2016-10-26 | Canon Kabushiki Kaisha | Laser scanning microscope apparatus |
| US10852519B2 (en) * | 2016-11-30 | 2020-12-01 | Asm Technology Singapore Pte Ltd | Confocal imaging of an object utilising a pinhole array |
| NL2018857B1 (en) * | 2017-05-05 | 2018-11-09 | Illumina Inc | Systems and methods for improved focus tracking using a light source configuration |
| JP6786424B2 (en) * | 2017-03-13 | 2020-11-18 | 株式会社モリタ製作所 | 3D scanner |
| WO2022113407A1 (en) * | 2020-11-25 | 2022-06-02 | 三菱電機株式会社 | Imaging system and imaging method |
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| DE19511937C2 (en) * | 1995-03-31 | 1997-04-30 | Zeiss Carl Jena Gmbh | Confocal epi-microscope |
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- 2013-01-22 JP JP2013008864A patent/JP5376076B1/en not_active Expired - Fee Related
- 2013-03-14 KR KR1020137021773A patent/KR101444048B1/en active IP Right Grant
- 2013-03-14 WO PCT/JP2013/057249 patent/WO2014115341A1/en active Application Filing
- 2013-03-14 CN CN201380001083.XA patent/CN104067158B/en not_active Expired - Fee Related
- 2013-04-29 TW TW102115264A patent/TWI444656B/en not_active IP Right Cessation
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| US5861984A (en) * | 1995-03-31 | 1999-01-19 | Carl Zeiss Jena Gmbh | Confocal scanning microscope and beamsplitter therefor |
| CN1269517A (en) * | 2000-04-26 | 2000-10-11 | 西安交通大学 | Three-dimensional profile measuring method and equipment with optical fiber panel and confocal microscope |
| US20090059362A1 (en) * | 2007-08-27 | 2009-03-05 | Mitutoyo Corporation | Microscope and three-dimensional information acquisition method |
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| CN110494787A (en) * | 2017-04-13 | 2019-11-22 | 横河电机株式会社 | Microscopic system, microscope, processing unit and microscope camera |
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Also Published As
| Publication number | Publication date |
|---|---|
| KR101444048B1 (en) | 2014-09-23 |
| WO2014115341A1 (en) | 2014-07-31 |
| JP5376076B1 (en) | 2013-12-25 |
| CN104067158B (en) | 2016-03-16 |
| KR20140103833A (en) | 2014-08-27 |
| TWI444656B (en) | 2014-07-11 |
| JP2014142183A (en) | 2014-08-07 |
| TW201409073A (en) | 2014-03-01 |
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