CN1040514C - Working head and laser working apparatus - Google Patents

Working head and laser working apparatus Download PDF

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Publication number
CN1040514C
CN1040514C CN94117154A CN94117154A CN1040514C CN 1040514 C CN1040514 C CN 1040514C CN 94117154 A CN94117154 A CN 94117154A CN 94117154 A CN94117154 A CN 94117154A CN 1040514 C CN1040514 C CN 1040514C
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China
Prior art keywords
supporting gas
combustion
nozzle
flow
processing head
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Expired - Fee Related
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CN94117154A
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Chinese (zh)
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CN1106329A (en
Inventor
加贺邦彦
古藤悟
小川周治
金冈优
村井融
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Mitsubishi Electric Corp
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Mitsubishi Electric Corp
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Priority claimed from JP5263608A external-priority patent/JP2998517B2/en
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Publication of CN1106329A publication Critical patent/CN1106329A/en
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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/03—Observing, e.g. monitoring, the workpiece
    • B23K26/032—Observing, e.g. monitoring, the workpiece using optical means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/12—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure
    • B23K26/123—Working by laser beam, e.g. welding, cutting or boring in a special atmosphere, e.g. in an enclosure in an atmosphere of particular gases
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
    • B23K26/1436—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means for pressure control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
    • B23K26/1437—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means for flow rate control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1435—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means
    • B23K26/1438—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor involving specially adapted flow control means for directional control
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • Mechanical Engineering (AREA)
  • Fluid Mechanics (AREA)
  • Laser Beam Processing (AREA)

Abstract

The invention relates to a laser-machine head capable of processing satable, high speed and high quality maching and laser-machine device using the same. The machining head for the purpose of setting the flow velocity distribution with: a secondary auxiliary-gas supply inlet; an annular dividing wall, for the purpose of dividing the interior of the secondary auxiliary-gas nozzle in the axial direction; an annular flat plate which rotatably touches the side face of the downstream part of the annular dividing wall and interrupts part of the gas-supply inlet and part of which is notched; two dividing plates, which are secured at both end sections of the annular flat plate, divide the interior of the secondary auxiliary-gas nozzle downstream of the annular dividing wall and rotate with the annular flat plate; a driving device for driving the annular flat plate; and a control device for operating the driving device.

Description

Processing head and laser processing device
The present invention relates to a kind of laser processing device, particularly step and processing head thereof.This specification is example explanation Laser Processing with the laser cutting.
The cut-out performance of Laser Processing be decided by laser beam power output, the focal position with respect to the laser beam that is cut off material surface, combustion-supporting gas pressure, be cut off the conditions of work such as distance of material surface and laser beam spray nozzle front end.Simultaneously, also depend on the condition relevant such as kind, surface state, quality, composition, thickness of material with material.Laser processing device requires to have the nargin of broad to the condition of such condition of work, material, can obtain stable crudy.Particularly when cutting off steel, use oxygen jet to make combustion adjuvant, be cut off material by the direct heat fused of laser beam, oxygen jet not only blows away molten metal, and be accompanied by the reaction of violent combustion oxidation and make and be cut off material distillation or fusing, significantly improve cut-out efficient.So the section quality that is cut off material is decided by the combustion oxidation speed on section surface on the large program very much.That is, combustion oxidation speed is big more, and the roughness of section is more little.And, owing to consume to supply with oxygen continuously, be difficult for taking place by the excessive spontaneous combustion that causes of oxygen (the also no show metal spontaneous combustion consumingly that just produces explosion type of laser beam damages the phenomenon of cutting off surface quality).Have again, because the increase of cut-off velocity, so can realize the more cut-out of high speed.So, the supply conditions of optimization combustion-supporting gas, it is very important improving combustion oxidation speed.Based on above understanding, up to the present, the gas supply nozzle various improvement have been carried out.
For example, Figure 46 is the vertical section ideograph that special public clear 61-60757 communique is taken off the laser beam nozzle that the laser processing device in the past that carries is provided with.Among the figure, the 1st, main combustion-supporting gas nozzle, the 2nd, auxiliary combustion-supporting gas nozzle, the 3rd cuts off plate surface, the 10th, the supply source of combustion-supporting gas.
The following describes its action.The formation of the laser beam nozzle that is provided with on processing head in the laser processing device in past as mentioned above.This nozzle has multiplet, and the gas communication road that has on the central shaft reaches around the gas passage of its multiple concentric circles on every side.It is higher that gas passage from the central shaft supplies to the air pressure of the oxygen that cuts off material, and flow velocity is also big.Oxygen mainly flows in the kerf, and wherein a part is by oxidation reaction consumption, and rest parts will melt, the metal of oxidation blows afloat, removes.Lower from the gas flow path gas supplied flow velocity of peripheral part, play preventing that ambient air from sneaking into, making near the central shaft steady air current, keeping oxygen concentration to be in the effect of high levels.And the injection direction of each auxiliary combustion-supporting gas nozzle is arranged to parallel with the injection direction of main combustion-supporting gas nozzle, and gas is the laminar flow shape and sprays.In addition, there is the next door of certain wall thickness in the interface of main combustion-supporting gas nozzle, each auxiliary combustion-supporting gas nozzle, thereby has suppressed interfering with each other between main combustion-supporting gas and the auxiliary combustion-supporting gas to a great extent, has guaranteed that main combustion-supporting gas is laminar condition.
In the Laser Processing, the energy heating of metal by laser beam is cut to the condition of high temperature, for combustion-supporting gas (oxygen), makes it to produce the oxidizing fire reaction to section.But, in the cut-out, often need to give less than supplying with the combustion-supporting gas (oxygen) that needs in the narrow kerf of 1.00mm.In addition, section near, generated combustion products (gas or deposite metal) by oxidation reaction.Combustion-supporting gas (oxygen) jet is if laminar condition, and combustion-supporting gas must spread in the atmosphere of this combustion products (gas componant), reaches the metal surface.So for improving oxidation rate, effective method is to make the combustion-supporting gas jet be turbulent condition, confuses near the boundary layer in the combustion reaction zone of section, upgrades the surface between fresh combustion-supporting gas and the combustion products (gas componant).
In the laser beam nozzle that processing head disposed in the laser processing device in past, the emission direction of each auxiliary combustion-supporting gas ejiction opening is arranged to parallel with the emission direction of main combustion-supporting gas ejiction opening, and gas is laminar condition, suppressed on the degree greatly and main combustion-supporting gas between interference, so also kept main combustion-supporting gas to be the laminar flow shape, flowed steadily.Though the purity (oxygen purity) with the combustion-supporting gas that keeps central part is in the effect of high levels, but, the supply pressure of main combustion-supporting gas is increased for effectively in narrow kerf, supplying with combustion-supporting gas (oxygen) because the air-flow of central part is stable.In addition, because the speed fluctuation amount (disorderly intensity) of nozzle air current central part is little, has formed lower boundary layer, the fresh combustion-supporting gas (oxygen) of combustion-supporting gas concentration (oxygen concentration) on the oxidation reaction surface of metal and be difficult for directly arriving reaction surface.Therefore, the combustion-supporting gas (oxygen) that exists supply can not effectively be used for the problem of oxidation reaction.Also have, under this condition, according to conditions such as flows, the oxygen that fully consumes does not easily remain in the pit of kerf inside, becomes the reason that causes spontaneous combustion.Moreover the interface of main combustion-supporting gas ejiction opening, each auxiliary combustion-supporting gas ejiction opening has the next door of thickness, and the combustion-supporting gas ejection pressure of the front end of laser beam nozzle or the distribution of spouting velocity are discontinuous variation.So, on the border face of main combustion-supporting gas jet, each combustion-supporting gas assisted jet and surrounding air on the wall thickness part, produce and separate.Therefore, can promote the diffusion of main combustion-supporting gas and each auxiliary combustion-supporting gas to mix, finally make it to assist the shield effectiveness of the surrounding air of combustion-supporting gas to diminish, cause purity (oxygen purity) step-down of main combustion-supporting gas with outermost.
The present invention is the device that addresses the above problem.For example the processing head of this laser processing device can reach following purpose: the roughness that reduces section, suppress spontaneous combustion, for finished surface provides that the ambient air mixed volume is few, high-purity and disorderly big combustion-supporting gas (oxygen), accelerated oxidation reaction, stablize, at a high speed, high-quality processing.Use this processing head, can obtain to stablize the laser processing device that carries out high accuracy processing.
For achieving the above object, the processing head of laser processing device of the present invention makes in the processing head that laser beam passes through having, and its feature exists: the central portion at processing head is provided with the main combustion-supporting gas nozzle of supplying with main combustion-supporting gas; Be provided with the auxiliary combustion-supporting gas nozzle more than 1 or 1 around the annular of main combustion-supporting gas nozzle; The internal diameter of the most inboard ejiction opening of above-mentioned auxiliary combustion-supporting gas nozzle can not be littler than the diameter of above-mentioned main combustion-supporting gas (1) nozzle ejiction opening; For the ejection gas pressure that makes ejiction opening and flow velocity changes continuously and the pressure oscillation of main combustion air current and flow velocity change value are increased, the position of the ejiction opening of above-mentioned main combustion-supporting gas is compared with the ejiction opening of above-mentioned auxiliary combustion-supporting gas nozzle, is arranged on the upstream side of air-flow; Also be provided with the means of the velocity flow profile of adjusting auxiliary combustion-supporting gas ejiction opening.
The present invention is provided with the adjustment means of the velocity flow profile of adjusting auxiliary combustion-supporting gas ejiction opening.For example, make velocity flow profile nozzle radially in be asymmetric variation for central shaft in the section.At the place ahead and the rear of machine direction, be provided with the velocity flow profile that makes gas particularly, the means of changes in flow rate.
The present invention is provided with a plurality of gas supply ports of giving auxiliary combustion-supporting gas nozzle air feed in auxiliary combustion-supporting gas nozzle interior at least, or in auxiliary combustion-supporting gas nozzle, be separated out a plurality of little spaces along circumferential direction by the next door, to adjust the velocity flow profile of auxiliary combustion-supporting gas nozzle ejiction opening.
And the present invention has the means that the supply gas flow in each little space is adjusted individually.
In addition, the present invention is formed with auxiliary combustion-supporting gas supply port.Be provided with and will assist the downside of the ring wall that separates vertically in the combustion-supporting gas nozzle to join, and can be rotating, non-complete annular flat board that the part of above-mentioned gas supply port is blocked; And with the rotating two pieces of dividing plates of above-mentioned dull and stereotyped interlock, dividing plate is installed in the two ends of above-mentioned ring plate, and will radially separate in the auxiliary combustion-supporting gas nozzle below the ring bulkhead; And the control device that drives the drive unit of above-mentioned flat board and accessory drive action.
Laser processing device of the present invention, have above-mentioned processing head and detect the processing object surface temperature, cut off the detection means of the light quantity of furrow width, spark, and adjust kind, flow or the pressure of the combustion-supporting gas of above-mentioned processing head ejection according to detection signal.
Apparatus of the present invention are a kind of have above-mentioned processing head and operation controller, and devices of gaseous species, flow or the pressure of the combustion-supporting gas that sprays with the programme-control processing head by above-mentioned operation controller.
At last, the present invention a kind ofly is provided with the measurement of plate thickness means of the thickness of slab that detects machined object and controls the flow of processing head ejection combustion-supporting gas or the device of pressure by the output of thickness of slab detection means by operation controller.
The present invention is provided with the adjustment means of the velocity flow profile of adjusting auxiliary combustion-supporting gas nozzle ejiction opening, for example, radially make velocity flow profile be asymmetrical variation in the section to central shaft, the gas flow rate at the place ahead of machine direction and rear is distributed, changes in flow rate, and according to machine direction, machining kinds, condition supply gas effectively in ditch.
In addition, at least the inwall at auxiliary combustion-supporting nozzle is provided with a plurality of gas supply ports, or in pilot jet, be separated out a plurality of little spaces in radial direction by the next door, by position, number, the size in above-mentioned next door, position, the number of suitably setting the above-mentioned gas supply port, can at random set the flow distribution of the combustion-supporting gas of auxiliary combustion-supporting gas nozzle exit.
At last, owing to have the adjustment means of adjustment to each little space supply gas flow, for example be provided with independent gas supply source and volume control device, the rate of discharge that can freely control auxiliary combustion-supporting gas nozzle by processing conditions distributes, for example according to machine direction, can supply with combustion-supporting gas from the rear of ditch, supply with, process velocity, crudy are improved so can carry out gas efficiently to the inside of ditch always.
In addition, the present invention is formed with auxiliary combustion-supporting gas supply port.Be provided with join at the downside of the ring wall that axially will assist the combustion-supporting gas nozzle interior to separate and can turn round, with a non-complete annular flat board that blocks of above-mentioned gas supply port; And and the rotating two cane dividing plates of above-mentioned dull and stereotyped interlock, this dividing plate is installed on the above-mentioned ring plate, and the following auxiliary combustion-supporting gas nozzle interior of above-mentioned ring wall is radially separated; And the control device that drives the drive unit of above-mentioned flat board and accessory drive action.So, can at random adjust the rate of discharge distribution of auxiliary combustion-supporting gas nozzle according to processing conditions, for example, according to machine direction, can supply with combustion-supporting gas from the rear of ditch always, can carry out gas to ditch inside efficiently and supply with, improve process velocity and crudy.
Moreover, state in the use in the processing unit (plant) of processing head, be provided with the temperature that detects machined object surface in the processing, the information detection means such as light quantity of cutting off furrow width, spark, output according to above-mentioned detection means, adjust gaseous species, flow or the pressure of the combustion-supporting gas of above-mentioned processing head ejection, so can avoid processing unusual.
In addition, according to processing conditions, by gaseous species, flow or the pressure of above-mentioned operation controller, so can make processing more stable by the combustion-supporting gas of the above-mentioned processing head ejection of programme-control.
Also have, the present invention is provided with the measurement of plate thickness means of the thickness of slab that detects machined object, according to the output of these measurement of plate thickness means, controls the flow or the pressure of the combustion-supporting gas of processing head ejection by operation controller.So the operator need not set gas flow according to thickness of slab can stablize processing.
The present invention will be described in conjunction with the embodiments below with reference to figure.Wherein:
Fig. 1 is the processing head vertical section ideograph of the laser processing device of the embodiment of the invention 1.
Fig. 2 is the pressure oscillation distribution key diagram that the present invention relates to the lip-deep combustion air current of cut-out plate of embodiment 1.
Fig. 3 is the key diagram that explanation improves the principle of cutting off performance in the invention process 1.
Fig. 4 is the lip-deep velocity flow profile key diagram of the cut-out plate of present embodiment 1.
Fig. 5 is the performance plot about the relation between the pressure oscillation of combustion air current of the present invention and the section roughness.
Fig. 6 is the figure for the nargin of process velocity and laser power of this example of comparison 1 and prior art.
Fig. 7 is the vertical section ideograph of the position relation of processing head in the expression embodiment of the invention 1.
Fig. 8 is the performance plot of distance relation between the pressure oscillation value of combustion air current and the ejiction opening among the expression embodiment 1.
Fig. 9 is the processing head vertical section ideograph of the embodiment of the invention.
Figure 10 is the oblique view of the processing head inside of perspective present embodiment 3.
Figure 11 is the oblique view of main combustion-supporting gas nozzle of the processing head of the expression embodiment of the invention 4.
Figure 12 is the upward view of main combustion-supporting gas nozzle of the processing head of the embodiment of the invention 5.
Figure 13 is the vertical section ideograph of the processing head of the embodiment of the invention 6.
Figure 14 is the vertical section ideograph of the processing head of the embodiment of the invention 7.
Figure 15 is comparing embodiment 6,7 and the prior art performance plot in the pressure oscillation value of cutting off the lip-deep combustion air current of plate.
Figure 16 is the vertical section ideograph of the processing head of the embodiment of the invention 8.
Figure 17 is the profilograph ideograph of the processing head of the embodiment of the invention 9.
Figure 18 is the partial cutaway oblique view of the processing head of the embodiment of the invention 10.
Figure 19 is that auxiliary combustion-supporting gas imports the aperture number not simultaneously among the expression embodiment 10, the performance plot of the variation that the gross pressure of kerf lower gas discharge portion distributes.
Figure 20 is that the auxiliary combustion-supporting gas of the embodiment of the invention 10 imports the aperture number not simultaneously, the figure of the difference of the fininsh allowance of generation.
Figure 21 is the thickness of slab of the present invention corresponding to machined object, an amount of combustion-supporting gas total flow figure of requirement;
Figure 22 is the suitable flow velocity figure of the present invention corresponding to the desired combustion-supporting gas of thickness of slab of machined object.
Figure 23 is the suitable flow velocity figure of the present invention corresponding to the desired auxiliary combustion air current of thickness of slab of machined object.
Figure 24 is an instance graph that concerns between the suitable little hole count of embodiment 10 working nozzles and the thickness of slab.
Figure 25 is the plane of other shape of aperture of the auxiliary combustion-supporting gas supply port of embodiment 10.
Figure 26 is the processing head part section oblique view of the embodiment of the invention 11.
Figure 27 is the profilograph of the processing head of the embodiment of the invention 12.
Figure 28 is that the processing head split shed area of embodiments of the invention 13 is adjusted the means plane.
Figure 29 is that the processing head split shed area of embodiments of the invention 14 is adjusted the means plane.
Figure 30 is the profilograph of the laser processing device of embodiments of the invention 15.
Figure 31 is the part section oblique view of the processing head of embodiments of the invention 16.
Figure 32 is another routine part section oblique view of embodiments of the invention 16.
Figure 33 is the profilograph of the processing head of the embodiment of the invention 17.
Figure 34 is the ideograph of an example of combustion-supporting gas supply mean of the processing head of the embodiment of the invention 17.
Figure 35 is another instance graph of combustion-supporting gas supply mean of the processing head of the embodiment of the invention 17.
Figure 36 is the key diagram of gas supply condition in the flow-control example of processing head of the embodiment of the invention 17.
Figure 37 is the processing head partial cutaway oblique view of the embodiment of the invention 18.
Figure 38 is the laser processing device pie graph of the embodiment of the invention 19.
Figure 39 is other routine pie graph of the laser processing device of the embodiment of the invention 20.
Figure 40 is the laser processing device pie graph of the embodiment of the invention 21.
Figure 41 is the laser processing device pie graph of the embodiment of the invention 22.
Figure 42 is the laser processing device pie graph of the embodiment of the invention 23.
Figure 43 is the profilograph of processing head of the laser processing device of the embodiment of the invention 24.
Figure 44 is other routine vertical section ideograph of processing head of the laser processing device of embodiment 24.
Figure 45 is the profilograph of processing head of the laser processing device of embodiment 25.
Figure 46 is the profilograph of processing head of the laser processing device of prior art.
Symbolic representation among the figure: 1-master's combustion-supporting gas nozzle, 1a-master's combustion-supporting gas nozzle ejiction opening, 1c-master's combustion-supporting gas nozzle supply port, 2-assists the combustion-supporting gas nozzle, the ejiction opening of the auxiliary combustion-supporting gas nozzle of 2a-, 2c-assists combustion-supporting gas nozzle supply port, 3-is added the cut-out plate surface of thing, 10,18,18a, 18b-combustion-supporting gas supply source, the aperture of the auxiliary combustion-supporting gas nozzle supply port of 11-, the 13-aperture area is adjusted means, the aperture of 15-annular slab, the sensor of 19-information detection means, the 21-operation controller, 30-combustion-supporting gas supply port, the 31-next door, the little space of 32-, the 33-valve, the 35a-fanning strip, the 35b-dividing plate, the 36-drive unit, the 37-control device, 40-measurement of plate thickness sensor.
(embodiment 1)
Fig. 1 is the vertical section ideograph of processing head of the laser processing device of the expression embodiment of the invention 1.This processing head has multiplet, and this example is a dual structure: the main combustion-supporting gas nozzle and the auxiliary combustion-supporting gas nozzle 2 that have laser beam to pass through.Main combustion-supporting gas nozzle 1 is D by portion's diameter in being positioned at 1Main combustion-supporting gas nozzle ejiction opening 1a and coupled main combustion-supporting gas nozzle passage 1b constitute; Auxiliary combustion-supporting gas nozzle is D by the outer circumference diameter that is positioned at main combustion-supporting gas nozzle 1 2(D 2〉=D 1, D in such cases 2＞D 1) auxiliary combustion-supporting gas nozzle ejiction opening 2a and the passage 2b that joins with it constitute.And, main combustion-supporting gas nozzle arrangement is being compared upstream one side that is positioned at combustion air current with the ejiction opening 2a of auxiliary combustion-supporting gas nozzle, its formation makes the ejection gas pressure at ejiction opening place and the ejection gas flow rate changes continuously and the pressure oscillation and the flow velocity change value of main combustion air current are bigger.The cut-out plate surface 3 of machined object is supplied with in the path that combustion-supporting gas (oxygen) is represented by arrow among the figure.
The combustion air current of this embodiment distributes roughly as shown in Figure 2 in the pressure oscillation of cutting off on the plate surface 3.(p: the variation of pressure, P: the absolute value of pressure), the longitudinal axis is corresponding with the ejiction opening of combustion-supporting gas for longitudinal axis surface pressing change p/P (%).Flow through the combustion-supporting gas of main combustion-supporting gas nozzle 1 because its flow velocity variation is bigger,, under the ejiction opening 2a that assists the combustion-supporting gas nozzle, be suppressed to less value so the pressure oscillation value is big under the ejiction opening 1a of main combustion-supporting gas nozzle.By the pump-absorb action that pressure oscillation produces, bleed pressure is improved, just can supply with the gas flow of kerf necessity.
In addition, the flow velocity variation turbulent flow that shows as the oxygen that flows into kerf more greatly is bigger turbulent flowization.Near the section that produces combustion reaction, generated the oxide that produces by burning and the mixed layer of oxygen, the speed dependent of oxidation reaction in to above-mentioned mixed layer diffusion inside, move, arrive the speed of reaction surface.Institute is so that turbulent air flowization can improve oxidation rate effectively thereby above-mentioned mixed layer is played pendulum.Therefore, use has the processing head that present embodiment constitutes, disorderization by Oxygen Flow, pattern as shown in Figure 3 makes above-mentioned mixed layer be labile state, and delivering oxygen is to the ongoing reaction near surface, simultaneously can be from removing the higher mist of oxide concentration near the reaction surface, so increased the oxygen quantity delivered, significantly improved oxidizing fire speed, can realize cutting off at a high speed.In addition, owing to continuous effective ground consumes the oxygen of supplying with, can prevent from stably to process by the spontaneous combustion of the imbalance generation of laser intensification and oxidation reaction speed.
Also have, the combustion-supporting gas (oxygen) that flows out by auxiliary combustion-supporting gas nozzle can prevent sneaking into of surrounding air, thus kept flowing into center in the kerf flow (promptly main combustion-supporting gas (and oxygen purity, can realize more stable cut-out.
Moreover Fig. 4 is the velocity flow profile summary description figure that cuts off the plate surface.The longitudinal axis is ejection gas flow rate u (m/s), and corresponding with the combustion-supporting gas ejiction opening.Press present embodiment, as shown in Figure 3, Figure 4, high more and be continuous change profile to nozzle center being distributed as more of combustion-supporting gas ejiction opening ejection gas pressure and ejection flow velocity.So between main combustion air current and each the auxiliary combustion air current and with the interface of surrounding air on can not produce and separate, thereby solved auxiliary combustion-supporting gas to air shielding to put fruit poor, the problem that causes main combustion-supporting gas purity (oxygen purity) to change.
The performance plot of Fig. 5 has been represented the relation between pressure oscillation value and the section roughness.Transverse axis is pressure oscillation (%), and promptly variation p is for the ratio p/P of the lip-deep pressure P of cut-out under the main combustion-supporting gas nozzle center axle.The longitudinal axis is section roughness Ra-max (μ m).Cutting off material is mild steel SS400, thickness of slab 12mm, and processing conditions is: laser power 1400W, process velocity 0.7m/min.By on the figure as can be seen, the big more surface roughness of pressure oscillation is more little, so improved crudy.I.e. explanation uses the processing head of the nozzle arrangements of present embodiment can realize the high speed cut-out that crudy is higher.
Also has laser power and process fast corresponding nargin when the curve of Fig. 6 (a), 6 (b) has represented that the processing head with present embodiment and prior art carries out the laser cutting experiment.Ordinate is represented process velocity (m/min), and abscissa is laser power (kw).Material is SS400, thickness of slab 12mm.The fininsh allowance of the processing head (pressure oscillation amount 0.1%) of prior art nozzle is used in Fig. 6 (a) expression, and the fininsh allowance of present embodiment processing head is used in Fig. 6 (b) expression.The part of oblique line is arranged is the scope of normal cutoff but draw among the figure.As can be seen, use the processing head of present embodiment can realize cutting off at a high speed.
Have again, use the constructed profile of Fig. 7 to illustrate that pressure, the flow velocity of main combustion air current in the present embodiment change and the position of combustion-supporting gas nozzle ejiction opening 1a, 2a and the relation of cutting off the distance between plate surface 3 and nozzle lower end (ejiction opening).Among the figure, L is the ejiction opening 2a of auxiliary combustion-supporting gas nozzle 2 and the distance between the ejiction opening 1a of the main combustion-supporting gas nozzle 1 of combustion air current upstream one side by comparison; H is the distance of cutting off between plate surface 3 and nozzle lower end (ejiction opening).In the performance plot of Fig. 8, as H, when H was changed, the pressure oscillation value p/P% under nozzle center's axle and the relation of the distance L between ejiction opening were as shown in the figure with the distance of cutting off plate surface 3 and nozzle lower end.Diameter D 1=1.5mm, D 2Under the condition of=5mm, ordinate is represented pressure oscillation value p/P (%), and abscissa is represented the distance L (mm) between the ejiction opening.Symbol zero is the characteristic curve of H=4mm, and symbol △ is that characteristic curve, the symbol of H=2mm is the characteristic curve of H=mm.Can obtain the pressure oscillation amount by figure greater than 0.8% condition is:
H+L≥5×D 1。If make L 〉=5D 1, just can improve the fininsh allowance of the high H of nozzle.By simple structure, obtain bigger pressure oscillation amount.
(embodiment 2)
In the foregoing description 1, processing head is made of main combustion-supporting gas gas nozzle 1 and an auxiliary combustion-supporting gas nozzle 2.Shown in the vertical section ideograph among Fig. 9, auxiliary combustion-supporting gas nozzle 2 can certainly adopt multiplet.At this moment, if the ejiction opening 1a of main combustion-supporting gas nozzle compares with a plurality of auxiliary combustion-supporting gas nozzle ejiction opening 2a, than one of them upstream one side that is positioned at air-flow, can obtain effect similarly to Example 1 at least.
(embodiment 3)
Figure 10 (a) is the processing head of the laser processing device of (c) expression embodiment of the invention 3 (b).In the present embodiment, the other concrete means as pressure that increases main combustion air current and flow velocity change are provided with spiral helicine a plurality of static blades that eddy current forms means.Figure 10 (a) is the vertical section ideograph of the processing head of present embodiment 3, and Figure 10 (b) is the oblique view of the main combustion-supporting gas gas nozzle of perspective inside.In the present embodiment, on the vertical part of the vias inner walls of main combustion-supporting gas nozzle 1, be provided with a plurality of spiral helicine static blades 4.By this static blade 4, in the air-flow that flows through main combustion-supporting nozzle 1 inside, generated eddy current.When nozzle sprayed, if there is the composition that circles round in the jet, the turbulence intensity that is the central shaft shape so was very big.When nozzle and the distance of cutting off the plate surface were identical with the nozzle diameter size, turbulence intensity can reach more than 10%.So, the oxidizing fire reaction be can carry out effectively, accelerate oxidation rate, crudy and processing stability improved, can realize simultaneously cutting off at a high speed.
At least a portion air-flow in the main combustion air current of present embodiment forms in the method for eddy current, both having made the relative distance L between (being ejiction opening 1a) position, main combustion-supporting gas nozzle bottom and the position, auxiliary combustion-supporting gas nozzle lower end (being ejiction opening 2a) is 0, also can make main combustion-supporting gas produce change in flow.In the foregoing description,, the laser beam optical axis big for the lasing beam diameter at main combustion-supporting gas nozzle lower end position place and the same axial adjustment difficulty of nozzle center's axle and the distance on laser beam foucing and machined object surface are adjusted problems such as difficulty, because main combustion-supporting gas nozzle more can be near the processing lens than nozzle in the past, even the relative distance L 0 of nozzle ejiction opening position in this example also can make main combustion-supporting gas flow velocity change, so be easy to be resolved, the advantage of above-mentioned adjustment processing ease is arranged promptly.
In addition, shown in the oblique view of the inside perspective of the main combustion-supporting gas nozzle 1 of Figure 10 (c), the back taper portion that static blade is located at the downside of main combustion-supporting gas nozzle 1 also can.
(embodiment 4)
Figure 11 (a) is the oblique view of main combustion-supporting gas nozzle of the processing head of the embodiment of the invention 4 (b).The eddy current formation means as present embodiment 4 of Figure 11 (a) expression are to be arranged with a plurality of helicla flutes 5 in the vertical portion of the vias inner walls of main combustion-supporting gas nozzle 1.By helicla flute 5, a part that flows through the combustion-supporting gas (oxygen) in the main combustion-supporting gas nozzle is owing to forming eddy current along spiral helicine flow path.The turbulence intensity of the central part of main combustion-supporting gas jet increases.So, in this case, also can accelerate oxidation rate, improve cut-off velocity, cut off quality.
In addition, shown in Figure 11 (b), the back taper portion that helicla flute 5 is located at the downside of main combustion-supporting gas nozzle also can.
(embodiment 5)
Fig. 1 (a) (b) represents the main combustion-supporting gas nozzle of the processing head of the embodiment of the invention 5.Figure 12 (a) is a upward view, and 12 (b) are skiagraphs.Eddy current as embodiment 5 forms means, the present invention is provided with jet hole 6a in the inner wall surface of main combustion-supporting gas nozzle 1, is provided with symmetrically the main combustion-supporting gas secondary flow nozzle 6 of circumferentially parallel ejection gas at the main combustion-supporting gas nozzle 1 main combustion-supporting gas secondary flow of tangential ejection of the periphery of main combustion-supporting gas main flow (promptly).The part of main combustion-supporting gas makes main combustion-supporting gas be eddy current from main combustion-supporting gas secondary flow nozzle 6 ejections.Can realize the effect same thus as embodiment 3,4.
(embodiment 6)
Figure 13 is the skiagraph of processing head of the laser processing device of the embodiment of the invention 6.From the position of the air-flow of the passage 2b inside of the auxiliary combustion-supporting gas nozzle 2 of auxiliary combustion-supporting gas supply port inflow, be provided with the static pressure shift means that the dynamic pressure that has that will assist combustion air current is transformed into static pressure in obstruction, be provided with static pressure conversion face 7 in the case.The flow direction of dotted arrow direction indication combustion air current.Gas in the auxiliary combustion-supporting gas nozzle passage 2b and static pressure conversion face 7 bump against, in case the static pressure answer just becomes uniform airflow at the downside of this static pressure conversion face 7, are discharged by auxiliary combustion-supporting gas nozzle ejiction opening 2a.So the air-flow of the peripheral part of nozzle becomes disorderly less uniform air flow, can better prevent sneaking into of surrounding air.
In the present embodiment, represented to change as static pressure the static pressure conversion face 7 of means, static pressure conversion face 7 is planes of parallel nozzle ejiction opening 2a lower surface.But, both made with nozzle ejiction opening 2a lower surface not parallelly, or not the plane, so long as the gas that the stream of air-flow spray spray (being pilot jet) on every side flows through is bumped against with it, same effect can both be played certainly in the surface that static pressure is replied.
(embodiment 7)
Figure 14 is the vertical section ideograph of processing head of the laser processing device of the embodiment of the invention 7.In the present embodiment, the end of the static pressure conversion face 7 that the inside of the passage 2b of the auxiliary combustion-supporting gas of recording and narrating in embodiment 6 is provided with is provided with the backflow wall 8 of outstanding annular.Regulate the height of backflow wall 8, making between its upper end and the inner nozzle has suitable gap, is to make on it and between the outer wall of main combustion-supporting gas nozzle 1 suitable gap is arranged in this example, forms gas viscous flow space 8a.Dotted arrow is represented air-flow among the figure.Be introduced into the gas of the passage 2b of auxiliary combustion-supporting gas,, just carry out static pressure and reply in case be full of by backflow wall 8, the inwall of auxiliary combustion-supporting gas nozzle 2, the gas viscous flow space 8a that static pressure conversion face 7 constitutes.After this, flow out to the passage 2b of auxiliary combustion-supporting gas nozzle with even velocity from the upper end of backflow wall 8,2b drains into the outside by ejiction opening.So peripheral air-flow has become turbulent little, stable uniform air flow, makes sneaking into of air prevent better effects if.
Figure 15 is that the combustion air current of processing head of comparing embodiment 6, embodiment 7 and prior art is at the performance plot of the distribution of cutting off the lip-deep pressure oscillation amount of plate.Ordinate is represented pressure oscillation amount p/P (%), abscissa represent apart from nozzle center apart from r (mm).Solid line among the figure, dotted line, dotted line characteristic curve are represented the characteristic of embodiment 7, embodiment 6 and prior art respectively.By Tu Kede, with embodiment 7 minimums, the expression air-flow is even, stable in the pressure oscillation amount of cutting off the plate surface for secondary air.Therefore, the mixed volume of surrounding air reduces, and oxygen purity remains on higher level.
(embodiment 8)
Figure 16 is the processing head vertical section ideograph of the laser processing device of embodiments of the invention 8.In the present embodiment, the fore-end of auxiliary combustion-supporting gas nozzle 2 enlarges gradually along the direction of axis to auxiliary combustion-supporting gas nozzle ejiction opening 2a, has formed expansion stream 9.Thus, can not become the acceleration air-flow from the combustion-supporting gas (oxygen) of auxiliary combustion-supporting gas nozzle ejection, and become and not only be parallel to nozzle center's axle but also can not produce the air-flow that separate with nozzle inner walls, be suppressed at not half so nozzle ejiction opening ambient air can be blended into the amount of peripheral combustion air current, keep oxygen purity, realize stable processing.In the present embodiment, flow path area adopts the structure that enlarges gradually, even but flow path area is constant, also can obtain same effect.
(embodiment 9)
Figure 17 is the vertical section ideograph of processing head of the laser processing device of the embodiment of the invention 9.In the present embodiment, it is round table-like that the outermost wall of multiple nozzle promptly assists the wall of combustion-supporting gas nozzle 2 to make, and its imaginary drift angle is got less than 45 °.Therefore, the combustion-supporting gas amount of being detained between laser beam nozzle and machined material surface is few, can prevent dieseling.In addition, the mixed volume of the surrounding air after the promptly auxiliary combustion-supporting gas orifice gas ejection of peripheral air stream nozzle can be suppressed at not half, keeps oxygen purity, realizes stable processing.
(embodiment 10)
Figure 18 is the local vertical section ideograph of processing head of the laser processing device of present embodiment 10.In the present embodiment, the top of nozzle is provided with unified (common) combustion-supporting gas (oxygen) supply source 10.Partly have following structure for the airflow diversion of auxiliary combustion-supporting gas nozzle 2 from combustion-supporting gas 10: the annular position around the promptly main combustion-supporting gas nozzle of the combustion-supporting nozzle 1 of the master of nozzle central portion supply port 1c is provided with the auxiliary combustion-supporting gas supply port that is made of a plurality of apertures.Combustion-supporting gas (oxygen) flows in the auxiliary combustion-supporting gas nozzle passage 2b by above-mentioned aperture 11.Auxiliary combustion-supporting gas (oxygen) flow of main combustion-supporting gas (oxygen) flow of promptly main combustion-supporting gas nozzle 1 ejection of center flow nozzle and promptly auxiliary combustion-supporting gas nozzle 2 ejections of peripheral air stream nozzle, in the present embodiment, change according to the area of aperture 11 and the quantity set point of aperture 11, so, according to the character of rapidoprint, thickness of slab etc., by selecting suitable nozzle promptly to select to have the nozzle of the aperture 11 of proper area and quantity, just can easily obtain main combustion-supporting gas flow and the auxiliary combustion-supporting gas flow expected.
The processing head nozzle of present embodiment particularly more can be brought into play its effect when cutting off slab.When generally making combustion-supporting gas cut-out mild steel slab with oxygen, in the kerf bottom, material temperature is low, the viscosity of oxide increases, and the velocity of discharge reduces, and has suppressed combustion reaction simultaneously, therefore produce hysteresis in the processing front, along with the increase of thickness of slab, hysteresis also increases.So,, be necessary to supply with the bigger oxygen of flow velocity, the discharge of accelerating oxidation thing and oxidation reaction to the part that lags behind for realizing at a high speed and stable processing.Use the processing head nozzle of body embodiment,, can satisfy above-mentioned condition by suitably setting the flow of auxiliary combustion-supporting gas nozzle.
Use the processing head nozzle of present embodiment, the gross pressure along the kerf direction of discharging gas when the chart attirbutes of Figure 19 is shown in kerf supply gas from the ditch bottom distributes.Abscissa is that ordinate is the total gas pressure P (kg/cm of ditch lower end apart from the distance X (mm) of the front that cuts off 2).Thickness of slab 25mm, each size of nozzle is as follows: auxiliary combustion-supporting gas nozzle inside diameter D 2=4mm, main combustion-supporting gas nozzle inside diameter D 1=1.5mm, aperture 11 internal diameters=1mm.The solid line characteristic curve is that gas imports the total pressure profiles of little hole count when being 8; The dotted line characteristic curve is to import the total pressure profiles of little hole count when being 24.This shows, the side that little hole count is many, the flow and the flow velocity of auxiliary combustion-supporting gas are big, in the ditch lower area of the broad of the hysteresis part of corresponding ditch bottom, can obtain higher pressure.
In addition, in the figure of Figure 20, expression aperture number is the difference of the fininsh allowance of laser power and process velocity simultaneously not.Ordinate is that process velocity (m/min) abscissa is laser power (KW).Material is that thickness is SS400, and each size of nozzle is identical with Figure 19, auxiliary combustion-supporting gas nozzle inside diameter D 2=4mm, main combustion-supporting gas nozzle inside diameter D 1=1.5mm, the internal diameter=1mm of aperture 11.Comparison diagram when having represented to import aperture several 8 and 24 among the figure.Zone A is the normal process scope of little hole count when being 8 that import, and area B is to import the normal process scope of hole count when being 24.As can be seen little hole count multi-processing nargin more is more big, can cut off at a high speed.In fact,, will produce local spontaneous combustion on the section, easily produce damage if flow, the flow velocity of auxiliary combustion-supporting gas are excessive.So exist suitable flow, the flow rates of the combustion-supporting gas that can realize good quality processing.
The suitable total flow of machined material thickness of slab when Figure 21 represents that corresponding thickness cuts off.Abscissa is machined material thickness of slab (mm), and ordinate is the total flow N (l/min) of combustion-supporting gas.The scope that oblique line is represented is the measured scope of cut-out matter of recommending.The gas of master's combustion-supporting gas nozzle was at the appropriate flow velocity at ejiction opening place when in addition, Figure 22 represented the slab cut-out.The scope that oblique line is represented is the measured scope of cut-out matter of recommending.Figure 23 represents to assist when slab cuts off the appropriate flow velocity of the air-flow of combustion-supporting gas nozzle at the ejiction opening place in addition.The scope that oblique line is represented is the measured scope of cut-out matter of recommending.Under the situation of the nozzle that uses processing head of the present invention, in the scope of flow that Figure 21-Figure 23 represents and flow velocity, can not produce damage, scum silica frost is adhered, and can obtain high-quality cut-out.Press Figure 21-Figure 23, can realize appropriate flow velocity and the flow corresponding by selecting hole diameter and little hole count with thickness of slab.
Use the nozzle of present embodiment, the scope of number of aperture 11 that can obtain appropriate flow and flow velocity is shown in the figure of Figure 24.Ordinate is represented little hole count (individual), and abscissa is thickness of slab (m).The size of the each several part of nozzle is the same with Figure 19, auxiliary combustion-supporting gas nozzle inside diameter D 2=4mm, main combustion-supporting gas nozzle inside diameter D 1=1.5mm, the internal diameter of aperture 12 is got 1mm.If the size except that this condition selects certainly to realize not damaged by the flow that satisfies Figure 21-Figure 23, flow conditions, the high-quality that no scum silica frost adheres to cuts off.
Represented the situation that being shaped as of aperture 11 is circular among Figure 18, shown in the plane of Figure 25 (a) orifice gas distributary division (b), any other shape such as ellipse, rectangle all can obtain effect same certainly.
(embodiment 11)
Figure 26 is the partial longitudinal section of processing head of the laser processing device of expression embodiment 11.In the foregoing description 10, the gas inflow portion of the annular position around main combustion-supporting gas nozzle supply port 1c, the auxiliary combustion-supporting gas nozzle 2 of inflow is provided with a plurality of apertures 11 as auxiliary combustion-supporting gas supply port, to carry out the stream adjustment.Among this embodiment, as shown in figure 25, on the position of above-mentioned annular, set cancellous fluid resistance body 12, assist the adjustment of combustion-supporting gas flow thus.Fluid resistance body 12 adopts porous material also can.In the present embodiment, the air-flow that flows into auxiliary combustion-supporting gas nozzle 2 is even, by suitably selecting mesh-shape or porous materials, can obtain turbulent flow less, stable air-flow.
(embodiment 12)
Figure 27 is the vertical section ideograph of processing head of the laser processing device of experimental example 12 of the present invention.In the present embodiment, on the auxiliary combustion-supporting gas supply port of auxiliary combustion-supporting gas nozzle 2, be provided with aperture area and adjust means 13.These means are movable, with drive unit by manually or automatically changing aperture area.By such structure, need not change the flow-rate ratio that nozzle can be adjusted combustion-supporting gas flow, main combustion-supporting gas and auxiliary combustion-supporting gas, so can improve operating efficiency.
(embodiment 13)
Figure 28 is the mode view of expression aperture area regulating measure in the processing head of present embodiment 13, is the view from the distributary division of the main combustion air current of the nozzle of processing head upside and auxiliary combustion air current.Present embodiment has been represented the specific implementation method of the aperture area adjustment means of the foregoing description 12.The annular section that has a plurality of gas supply port apertures 11 of guiding combustion-supporting gas on these means and the auxiliary combustion-supporting gas nozzle joins, and is provided with the annular slab 14 that has same aperture 15 with above-mentioned annular section.Be connected to the handle 16 of available manual revolution annular slab 14 on annular slab 14, handle 16 is arranged on the nozzle outside.In annular slab 14 and aperture area adjustment means that handle 16 constitutes by band aperture 15, the part that the aperture that is provided with on aperture 11 that is provided with on the nozzle and the annular slab 14 15 is overlapping will become the gas inflow entrance of combustion-supporting gas being introduced pilot jet.So, by rotating the area of above-mentioned annular slab 14 change gas inflow entrances.Can easily adjust the flow of the combustion-supporting gas that charges into the assist gas nozzle.
In the present embodiment, annular slab 14 by the handle 16 of nozzle outside by hand rotation, certainly its rotate with drive unit mutually the realization of logotype automated process also can.
(embodiment 14)
Figure 29 is the mode view that the expression aperture area is adjusted means in the processing head of present embodiment 14, is the view from the distributary division of the main combustion air current of the nozzle of processing head upside and auxiliary combustion air current.Present embodiment has been represented specific implementation ten thousand methods of the aperture area adjustment means of embodiment 12.Be provided with throttle mechanism 17 in the present embodiment, the annular section that has a plurality of gas supply port apertures 11 of the auxiliary combustion-supporting gas of guiding on throttle mechanism 17 and the auxiliary combustion-supporting gas nozzle joins.Also have with throttle mechanism 17 and join, use the handle 16 of manual adjustments throttle degree from the outside.Aperture area is adjusted means 13 and is made of throttle mechanism 17 and handle 16.By adjusting throttle mechanism 17, change the area of assist gas supply port, can regulate the flow of supply flow body.
In the present embodiment, throttle mechanism 17 is realized with manual by the handle of nozzle outside; If certainly throttle mechanism 17 and driving mechanism mutually the automatic realization of logotype also can.
(embodiment 15)
Figure 30 is the vertical section ideograph of processing head of the laser processing device of the embodiment of the invention 15.In the present embodiment, gas (oxygen) source of main combustion-supporting gas nozzle 1 and auxiliary combustion-supporting gas nozzle 2 is provided with respectively.Can realize thus supplying with oxygen by the flow-rate ratio of appropriate combustion-supporting gas flow, appropriate main combustion-supporting gas and auxiliary combustion-supporting gas.
(embodiment 16)
Figure 31 is the part section ideograph of the laser machining nozzle of the embodiment of the invention 16.Auxiliary combustion-supporting gas nozzle 2 inwalls are provided with a combustion-supporting gas supply port 30, and auxiliary combustion-supporting gas nozzle 2 is inner with 31 separations of a plurality of next doors, forms little space 32.After combustion-supporting gas flows in the auxiliary combustion-supporting gas nozzle 2 by combustion-supporting gas supply port 30, by stopping of next door 31, on one side air-flow makes energy stream few, Yi Bian be distributed in each little space 32.So at the ejiction opening of auxiliary combustion-supporting gas nozzle, its velocity flow profile is circumferentially becoming evenly, unbalanced at the flow at the ejiction opening place of assisted gas body that can prevent that biasing by the combustion-supporting gas supply port from causing.
In the present embodiment, gas supply port is one, and is furnished with the next door of axisymmetric same size.But, by position, number according to gas supply port, by by each next door with the area in next door, carry out individual settings highly, at interval etc., can at random set the flow distribution of auxiliary combustion-supporting gas nozzle exit.For example, shown in the partial cutaway mode oblique drawing of Figure 32, near the high end, the next door of gas supply port, reduced, distance by the distance gas supply port increases the height rising that makes the next door, and the interval in adjacent next door is dwindled, will increase the uniformization effect of the rate of discharge of auxiliary combustion-supporting gas nozzle.
(embodiment 17)
Figure 33 (a) is the profilograph of the laser machining nozzle of the embodiment of the invention 17.In addition, (b) be among the said nozzle figure (a) along the top plan view of B-B section.Assisting combustion-supporting gas gas nozzle inwall to be provided with the combustion-supporting gas supply port 30 of a plurality of radial auxiliary combustion-supporting gas nozzles 2, be provided with 4 supply ports 30 in the present embodiment.Cut apart the auxiliary little space 32 of combustion-supporting gas nozzle inner walls shape by next door 31 by the number of combustion-supporting gas supply port 30.
Shown in the ideograph of Figure 34, each combustion-supporting gas supply port 30 joins with combustion-supporting gas supply source 18 respectively, is controlled by volume control device 20 from each supply source 18 gas supplied flow.Perhaps, as shown in figure 35, each combustion-supporting gas is supplied with and is attached on the unified gas supply source 18 by valve 33, with the switch of operation controller 21 control valves.
Press present embodiment, by adjusting the gas flow of supplying with each little space, the air-flow of the auxiliary combustion-supporting gas nozzle of promptly welcome adjustment is in the combustion-supporting gas flow velocity branch at ejiction opening place.For example, shown in the mode declaration pattern specification figure of Figure 36, by to being positioned at the little space of one side, machine direction rear air feed, if press flow velocity increase with the rear of nozzle direction, the place ahead flow velocity reduces to be adjusted, and can make combustion-supporting gas enter ditch inside easily, also can obtain high pressure in the ditch bottom.In addition, because air-flow has towards the direction composition in machined surface the place ahead of flow velocity, so can suppress the flow separation phenomenon of machined surface front, the accelerated combustion reaction improves crudy.
In the present embodiment, represented to have the situation in 4 little spaces 32, still, little space number is more than 4 or followingly also can obtains effect same certainly.In addition, giving the number of the combustion-supporting gas supply port 30 of each little space 32 air feed certainly is also can obtain effect same more than two.Also have, in the present embodiment, the gas of gas supply port is supplied with by unified supply source and is provided, and uses a plurality of supply sources to link with a plurality of gas supply ports respectively certainly and also can.
(embodiment 18)
Figure 37 (a) is the laser machining nozzle of the embodiment of the invention 18 (b), (a) is the part section mode oblique drawing, (b) is the vertical section ideograph.Present embodiment is provided with incomplete ring plate, this ring plate joins with the downside of the ring wall of the aperture 11 that is provided with the auxiliary combustion-supporting gas supply port of conduct, have the aperture 11 that to assist the combustion-supporting gas supply port and cover, play the effect of covering auxiliary combustion air current.Imperfect ring plate among this embodiment is fanning strip 35a.And dividing plate 35b is fixed on the two ends of fanning strip 35a, the formation integrative-structure.This dividing plate 35b is equivalent to the next door 31 of the foregoing description 16,17, forms little space in auxiliary combustion-supporting gas nozzle 2.In addition, this fanning strip 35a and 35b can be around nozzle center's axle rotations.Present embodiment also has drive unit 36 that drives fanning strip 35a and dividing plate 35b and the control device 37 that makes drive unit 36 starts.The auxiliary gas supply port 11 of combustion-supporting gas by not covered by fanning strip 35a, the little space 32 that flow into dividing plate 35b, assist combustion-supporting gas nozzle 2 inwalls, main combustion-supporting gas nozzle 1 outer wall forms is by auxiliary combustion-supporting gas nozzle ejiction opening ejection.So,, just can obtain effect similarly to Example 17 by pressing the little space of machine direction control position in the machine direction rear.
(embodiment 19)
Figure 38 represents the pie graph of the laser processing device of the embodiment of the invention 19.As shown in the figure, present embodiment uses the processing head of the nozzle with independent combustion-supporting gas (oxygen) supply source shown in Figure 30.Also be provided with test material surface temperature in the processing, cut off the information detection means such as luminous quantity of furrow width, spark, the means of present embodiment are sensors 19; Reach the signal of pressing sensor 19, adjust main combustion-supporting gas and the flow of auxiliary combustion-supporting gas and the volume control device 20 of pressure from the nozzle ejection.Thus, can avoid processing unusual, realize more stable processing.
In the present embodiment, used nozzle processing head, but present embodiment is applied to have unified combustion-supporting gas supply source, is provided with aperture area adjustment means that the such auxiliary combustion-supporting gases of embodiment 13,14 supply with and adjusts the processing head of the nozzle of primary air flow and auxiliary combustion-supporting gas flow and also can obtain same effect certainly with independent combustion-supporting gas supply source.
(embodiment 20)
Figure 39 is the pie graph of the laser processing device of embodiments of the invention 20.Present embodiment has prediction or detects the sensor 19 of spontaneous combustion, according to the signal of this sensor 19, when predicting or detecting the spontaneous combustion generation, will control the pressure and the flow that reduce main combustion-supporting gas and auxiliary combustion-supporting gas either party at least.Therefore, can suppress the generation of spontaneous combustion, realize more stable processing.
(embodiment 21)
Figure 40 is the pie graph of the laser processing device of embodiments of the invention 20.In the present embodiment, the operation controller 21 of laser processing device and the volume control device 20 of combustion-supporting gas supply source 18 link together.And, according to the primary condition of processing such as the kind of material, process velocity, thickness of slab etc. by operation controller 21 usefulness programme-control master combustion-supporting gas nozzles, auxiliary combustion-supporting gas nozzle gas flow separately, the pressure of gas.According to process, the diameter when for example cutting off according to the bight cut-out at punching, straight line cut-out, obtuse angle, the curvature when curve cuts off etc. or according to circle, semicircle, ellipse etc. reaches gas flow, the gas pressure of assisting combustion-supporting gas by main combustion-supporting gas in the operation controller 21 usefulness programme-control processing.Therefore, save the direct time of importing suitable flow of operator, not only improved efficient, and can obtain stable crudy, increase reliability.
(embodiment 22)
Figure 41 is the pie graph of the embodiment of the invention 21.In the present embodiment, it constitutes: be provided with A kind gas supply source A18a and B kind gas supply source B18b as main combustion-supporting gas and auxiliary combustion-supporting gas supply source, be provided with from supply source 18a, 18b and import the transfer valve 23 of gas to the processing head introducing port, the switching of transfer valve is by operation controller 21 controls.Can accomplish by such constituting, for example according to punching, straight line cut off, the bight at pure angle cuts off, curvature when curve cuts off or according to the gaseous species switching with main combustion-supporting gas or auxiliary combustion-supporting gas such as the diameter of circle, semicircle, ellipse etc., for example switch to nitrogen from oxygen, to suppress burning, to prevent from spontaneous combustion to realize stable processing.
Among this embodiment, represented the embodiment when gaseous species is two kinds, also be fine by switching the device that constitutes more than 3 kinds certainly.
(embodiment 23)
Fig. 4 is the processing unit (plant) pie graph of embodiments of the invention 22.Present embodiment is provided with the thickness of slab detection means that detects machined object, the sensor 40 for being provided with on the processing head in this example.Before processing, detect the thickness of slab of machined object and output to operation controller 21.From realizing by volume control device 20 of operation controller 21 output corresponding to the appropriate main combustion-supporting gas of thickness of slab and auxiliary combustion-supporting gas flow and flow velocity.So the operator does not need to set gas pressure according to thickness of slab.Present embodiment provides the processing unit (plant) of high efficiency, high reliability.In this example, measurement of plate thickness sensor 40 is located on the processing head, all can as long as be located at any position that can measure thickness of slab certainly.
(embodiment 24)
Figure 43 is the processing head vertical section ideograph of the laser processing device of the embodiment of the invention 24.In the present embodiment, main combustion-supporting gas nozzle 1 and auxiliary combustion-supporting gas nozzle 2 adopt split type.Having the positioning and fixing structure that main combustion-supporting gas nozzle is located, fixed on the inwall of auxiliary combustion-supporting gas nozzle 2, is boss 22 in this example.Therefore, each nozzle can clutch, for example, can select to make up the different combustion-supporting gas supply ports of condition such as little hole area, quantity arbitrarily.Can select the appropriate flow and the flow-rate ratio of main combustion-supporting gas nozzle 1 and auxiliary combustion-supporting gas nozzle 2 according to the character of material, thickness of slab etc.
Above-mentioned enforcement has illustrated the situation of dual structure nozzle in executing, also each nozzle can be separated for multi-ringed nozzle equally, at the inwall of each nozzle the location is set, fixes the positioning and fixing portion of side nozzle in it.In addition, be positioned, be not boss structure in the positioning and fixing on the inwall of the outer side nozzle of fixing nozzle, and adopt step shown in the ideograph 44A of vertical section or the taper shown in the ideograph 44B of vertical section also can.
(embodiment 25)
Figure 45 is the processing head vertical section ideograph of the laser processing device of present embodiment 25.Main and auxiliary nozzle material differs in the present embodiment, and main burner adopts easy processing metal (for example brass), and the auxiliary combustion-supporting gas nozzle 2 of outermost is made of the metal of high melting point, high rigidity.In this example, when high-temperature oxide that the nozzle periphery produces or deposite metal splash, be not vulnerable to the damage of sputter when cutting off, have the effect of protection inner nozzle, improve nozzle life.
In the foregoing description, be illustrated with regard to laser cutting, but for as laser processing device have the laser weld of same structure with shearing device, same effect is certainly also arranged.
In addition, laser processing device of the present invention, processing head are not limited to the foregoing description, and various structures, form can be arranged.For example, in the processing head position of main combustion-supporting gas nozzle ejiction opening and auxiliary combustion-supporting gas nozzle ejiction opening identical, be provided with eddy current and form means, or be provided with eddy current form means and static pressure shift means all can, can both play same effect.According to processing conditions such as machined object (material category, thickness of slab), punching, cut-out, processing purposes, use above-mentioned various processing heads that constitute and the processing unit (plant) that constitutes by various means.
The present invention is owing to having the structure of above-mentioned explanation, so can obtain following effect.
The present invention is provided with the adjustment means of the velocity flow profile of adjusting auxiliary combustion-supporting gas ejiction opening. For example, can make velocity flow profile, the changes in flow rate of the gas at the place ahead of machine direction and rear, So, can be according to machine direction supply gas effectively.
The present invention is provided with a plurality of auxiliary combustion-supporting gases of giving in auxiliary combustion-supporting gas nozzle interior at least The gas supply port of nozzle air feed, or in auxiliary combustion-supporting gas nozzle by the next door radially Be separated out a plurality of little spaces on the direction, namely the position by suitably setting gas supply port, The size in number, next door, position and number can be adjusted arbitrarily auxiliary combustion-supporting gas nozzle ejection The flow distribution of mouth.
And the present invention has the supply gas flow in each little space is transferred individually Whole means, thus can be according to processing conditions, and at random the auxiliary combustion-supporting gas nozzle of control goes out The mouth flow distribution, supply gas improves process velocity and crudy effectively.
In addition, the present invention is formed with auxiliary combustion-supporting gas supply port. Be provided with will assist combustion-supporting The downside of the ring wall that separates vertically in the gas nozzle joins, and can be rotating, The non-complete ring plate that the part of above-mentioned gas supply port is blocked; And with above-mentioned flat Two pieces of dividing plates that the plate interlock reverses, dividing plate is installed in the two ends of above-mentioned ring plate, and with ring-type Radially separate in the dirty auxiliary combustion-supporting gas nozzle in next door; And drive above-mentioned flat board The control device of drive unit and accessory drive action. Therefore, can according to processing conditions, At random the rate of discharge of the auxiliary combustion-supporting gas nozzle of control distributes effective supply gas; Improve Process velocity and crudy.
Use the processing unit (plant) of above-mentioned processing head, have machined object surface in the processing of detection Temperature, cut off the detection means such as light quantity of furrow width, spark, and defeated according to detection means Go out, adjust kind, flow or the pressure of the combustion-supporting gas of above-mentioned processing head ejection, so can avoid Processing is unusual.
The present invention is provided with operation controller, and by the program control of above-mentioned operation controller The gaseous species of the combustion-supporting gas of processing head processed ejection, flow or and pressure, so can avoid Processing is unusual.
At last, the present invention be provided with the thickness of slab that detects machined object the measurement of plate thickness means and by The output of thickness of slab detection means comes controlled working head ejection combustion-supporting gas by operation controller Flow or pressure so the operator does not need to set flow according to thickness of slab, can be raised the efficiency, Improve process reliability.

Claims (6)

1. the processing head of a laser processing device makes in the processing head that laser beam passes through having, and it is characterized in that: the central portion at processing head is provided with the main combustion-supporting gas nozzle of supplying with main combustion-supporting gas; Be provided with the auxiliary combustion-supporting gas nozzle more than 1 or 1 around the annular of main combustion-supporting gas nozzle; The internal diameter of the most inboard ejiction opening of above-mentioned auxiliary combustion-supporting gas nozzle can not be littler than the diameter of above-mentioned main combustion-supporting gas nozzle ejiction opening; For the ejection gas pressure that makes ejiction opening and flow velocity changes continuously and the pressure oscillation of main combustion air current and flow velocity change value are increased, the position of the ejiction opening of above-mentioned main combustion-supporting gas is compared with the ejiction opening of above-mentioned auxiliary combustion-supporting gas nozzle, is arranged on the upstream side of air-flow; Also be provided with the means of the velocity flow profile of adjusting auxiliary combustion-supporting gas ejiction opening.
2. as the processing head of the laser processing device of claim 1 record, it is characterized in that: the means of adjusting velocity flow profile form by be partitioned into little space with the next door along its circumferencial direction in above-mentioned auxiliary combustion-supporting gas nozzle.
3. the processing head of laser processing device as claimed in claim 2 is characterized in that: velocity flow profile adjustment means have the adjustment means that the supply gas flow in the little space that is separated out is supplied with in independent adjusting.
4. the processing head of the laser processing device of recording and narrating as claim 2 is characterized in that adjusting the constituting of means of above-mentioned velocity flow profile: be provided with auxiliary combustion-supporting gas supply port; At the ring wall of axially separating auxiliary combustion-supporting gas nozzle interior; Be connected on this ring wall downside and can be rotating, non-complete annular flat board that the part of above-mentioned gas supply port is blocked; Be contained in the two ends of this ring plate; Two pieces of dividing plates that the auxiliary combustion-supporting gas nozzle interior of the downside of above-mentioned ring wall radially separated and link with above-mentioned flat board; The drive unit of above-mentioned flat board and the control device that drive unit is moved.
5. the laser processing device with each described processing head of claim 1-4 is characterized in that: the information detection means with machined object surface temperature in the processing of detecting, cut-out furrow width, spark light quantity; And the operation controller of gaseous species, flow or pressure of adjusting the combustion-supporting gas of processing head ejection by the output of above-mentioned information detection means.
6. the laser processing device with processing head of each record of claim 1-4 is characterized in that: have the measurement of plate thickness means of measuring the machined object thickness of slab; And adjust the flow of combustion-supporting gas of processing head ejection or the operation controller of pressure by the output of these measurement of plate thickness means.
CN94117154A 1993-10-21 1994-10-21 Working head and laser working apparatus Expired - Fee Related CN1040514C (en)

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JP5263608A JP2998517B2 (en) 1992-10-23 1993-10-21 Processing head and laser processing device
JP263608/93 1993-10-21

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CN1040514C true CN1040514C (en) 1998-11-04

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DE4437795A1 (en) 1995-04-27
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