CN104049426B - Bandwidth adjustable liquid crystal terahertz wave plate based on porous graphene transparent electrode - Google Patents
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Abstract
The invention discloses a bandwidth adjustable liquid crystal terahertz wave plate based on a porous graphene transparent electrode. Sub-wavelength metal wire gratings are arranged on the inner side of a substrate of an incidence surface, porous graphene is arranged on the inner side of a substrate on an exit surface, and the two substrates made of fused quartz are sealed and combined to form a liquid crystal box. Two light-control orientation layers are sandwiched between the metal wire gratings and the porous graphene in the liquid crystal box, liquid crystal materials are sandwiched between the two light-control orientation layers, and the liquid crystal materials are terahertz electronic control large birefringence liquid crystal materials. Parallel orientation of liquid crystals is achieved in the liquid crystal box through the mode of light-control orientation, and a 45-degree included angle is formed between the orientation direction and the direction of the metal wire gratings. According to the bandwidth adjustable liquid crystal terahertz wave plate based on the porous graphene transparent electrode, the electronic control birefringence characteristic of the liquid crystals is used, phase delay of ordinary light and extraordinary light is regulated through voltage to correspond to specific wave plates with different frequencies, and the bandwidth adjustable liquid crystal terahertz wave plate has the advantages of being superwide in frequency band, capable of achieving automatic polarization, high in transmittance, large in modulation amount, rapid in response and the like and can be widely applied in the booming terahertz field.
Description
Technical field
The present invention relates to terahertz light electronic technology field, and in particular to one kind is based on the transparent electricity of porous graphene Terahertz
The design and preparation of the adjustable Terahertz wave plate in broadband of pole, sub-wavelength metal wiregrating Integrated electrode/polarizer and liquid crystal material.
Background technology
Liquid crystal material has the mobility of liquid and the order of crystal concurrently, due to its excellent outfield(Electric field, magnetic field, light
Field, sound field, thermal field etc.)Tuning characteristic, in presentation of information and tuneable photonic device important application is played.Nematic liquid crystal
It is a kind of the most frequently used phase, in all nematic liquid crystal applications, orientation is primary link.Traditional is aligned with friction
Orientation is most widely used, and its presence easily causes mechanical damage, electrostatic charge residual and particulate pollutant to surface, is difficult realization many
The defects such as domain structure orientation.And emerging light orientation technology then can completely overcome above-mentioned deficiency, it is considered most competitive
Liquid crystal aligning technology of future generation.
In recent years, research of the people to Terahertz frequency range is increasing, but suitable for the photonic device of Terahertz frequency range,
Especially controllable device is very rare.Liquid crystal as conventional controllable electrooptical material, in visible and infrared band photon
Learn device and obtain extensive exploitation and application.But when being applied to Terahertz frequency range, on the one hand, the transparent conductive film for generally adopting
Tin indium oxide will no longer be suitable for, and simple metal level cannot also meet requirement, it is therefore desirable to seek new electrode design such as stone
Black alkene electrode replaces traditional thin film.On the other hand the birefringence of most of liquid crystal materials can be smaller in Terahertz frequency range, because
This controllable amount is also less, and the requirement of practicality is extremely difficult in general design.And some are to increase the special of modulation voltage
If means such as laminated construction etc. under conditions of transparency electrode shortage, loss can seriously increase.Therefore, most viable scheme is then
Design and apply and still there is big birefringent special liquid crystal material in Terahertz frequency range, really to realize the device of highly effective.
The content of the invention
The present invention seeks to:A kind of adjustable liquid crystal Terahertz wave plate in broadband based on porous graphene transparency electrode is proposed,
Make incidence, exit facet electrode respectively using sub-wavelength metal wiregrating and few layer porous graphene material, with reference to the big birefringences of THz
Liquid crystal material is realizing the adjustable Terahertz wave plate of ultra broadband.
The technical scheme is that:
A kind of broadband based on porous graphene transparency electrode is adjustable liquid crystal Terahertz wave plate, including two panels vitreous silica base
Plate, wherein, the substrate inner side of the plane of incidence is provided with sub-wavelength metal wiregrating, and the substrate inner side of exit facet is provided with porous graphite
Alkene, two panels fused silica substrate is bonded liquid crystal cell by frame glue;Between wire grating and porous graphene in liquid crystal cell
The photo orientated layer of two-layer is folded with, liquid crystal material is folded with the middle of the photo orientated layer of two-layer, liquid crystal material is that Terahertz is automatically controlled big
Birefringence liquid crystal material;The liquid crystal cell realizes the parallel-oriented of liquid crystal by photo orientated mode, and differently- oriented directivity with
Wire grating direction is at 45 °.
The cycle of the wire grating, much smaller than the wavelength of incident illumination, is 1-80 microns.
Further, the cycle of the wire grating be preferably 1-30 μm, the line thickness of wiregrating is 0.5-15 μm.
The number of plies of the porous graphene is 2-5 layers, and its surface distributed has a diameter of micron-sized hole.
Birefringence of the liquid crystal material in 0.5-2.5 THz is 0.30.
The liquid crystal cell can also adopt multiple structures stacked together.
The photo orientated layer of liquid crystal cell and liquid crystal material realize the parallel-oriented of liquid crystal by photo orientated mode, and light-operated
Oriented layer differently- oriented directivity is at 45 ° with wire grating direction.Make the liquid crystal cell Terahertz frequency range reach adjustable a quarter or
Half-wave plate(Backward compatible 1/8th wave plate etc.).
The preparation method of a kind of broadband based on porous graphene transparency electrode of the present invention is adjustable liquid crystal Terahertz wave plate, by
Following step is realized:
(1)Two panels vitreous silica piece is taken, few layer porous graphene and sub-wavelength metal line are set on a quartz substrate respectively
Gate electrode, wherein, porous graphene is transferred on quartz base plate by conventional transfer method from Copper Foil substrate, wire grating electrode
Realized by carrying out photoetching and coating process on a quartz substrate;
(2)Photo orientated layer is that orientation is obtained on the thin film of photosensitive orientants, in wire grating and porous graphene
Surface is respectively applied photo orientated agent film;
(3)Box according to required for the refractive index parameter and target wave plate type of selected liquid crystal material are calculated is thick, right
In quarter-wave plate, box thickness d is slightly larger than λ/4 Δ n, and for 1/2nd wave plates, box thickness d is slightly larger than λ/2 Δ n, and selective membrane
The liner membrane material of thickness correspondence box thickness value;
(4)Liner film slice will be placed on wherein a piece of quartz base plate, another bauerite substrate is placed in contrast, then
Liquid crystal cell is packaged into using frame glue;Again with or blue light ultraviolet with the linear polarization of wire grating angle at 45 °, from being provided with porous stone
The quartz base plate of black alkene this side vertical incidence liquid crystal cell, exposure gives photo orientated agent film molecule and uniformly points to;
(5)The liquid crystal material injection liquid crystal cell chosen, the final electrically conerolled birefringence characteristic using liquid crystal are adjusted by voltage
Section ordinary light realizes the wave plate of corresponding different frequency with the Phase delay of non-ordinary light.
The step(1)In, first carrying out UV ozone method process to few layer graphene, its surface can distribution diameter immediately
For micron-sized hole.Terahertz is set to keep more than 97% and resistance and the complete Graphene phase of monolayer in 0.5-2.5THz transmitances
When being hundred ohm levels.
The step(4)In, exposure gives being arranged on the step of photo orientated agent film molecule is uniformly pointed to and is packaged into liquid
Before brilliant box, i.e., after the surface of wire grating and porous graphene applies photo orientated agent film, first with polarization direction with
The linear polarization of wire grating angle at 45 ° is ultraviolet or blue light vertical exposure gives orientation agent molecule and uniformly points to, and then makes again
Liquid crystal cell.
By the use of wire grating as the electrode transparent to specific polarization ripple, liquid crystal aligning is carried out along the oblique 45 ° of directions of electrode, if
Meter control box is thick simultaneously to make parallel-oriented box, using the electrically conerolled birefringence characteristic of liquid crystal, by voltage-regulation ordinary light with very
The Phase delay of light come realize correspondence different frequency wave plate.Liquid crystal cell is thick to match with selected liquid crystal material parameters, and passes through
It is appropriate to choose liner film thickness control realization, obtain efficiently quickly modulation effect.
Photo orientated layer is that orientation is obtained on the thin film of photosensitive orientants, and photosensitive orientants are azobenzene dye, polyamides
There is isomerization, orientation photo-crosslinking or photodestruciton reaction under line polarisation irradiation and cause in imines, polyvinyl alcohol, cinnamate etc.
The anisotropy of molecular arrangement, and further this order can be passed to by liquid crystal molecule by intermolecular interaction.
The invention has the beneficial effects as follows:
(1) by the use of porous graphene as transparency electrode, ensure that Terahertz all has in the range of ultra-wide band
High permeability more than 97%, even if after spin coating orientation layer material, its transmitance is still up to 95%, and resistance and the complete graphite of monolayer
Alkene is suitable;And with good Electric Field Distribution and control.
(2) by the use of sub-wavelength metal wiregrating as the electrode transparent to specific polarization ripple, it is ensured that full Terahertz frequency range scope
Interior polarizes and high permeability and good Electric Field Distribution and control certainly;
(3) the uniform effective orientation under thicker box thickness, and differently- oriented directivity and aligning direction are realized using photo orientated technology
Precise control, it is ensured that device obtains maximum modulation amount and most fast modulating speed;And will not damage transparency electrode.
(4) from the liquid crystal material in the loss of Terahertz frequency range low absorption, big birefringence, box thickness is effectively reduced, is reduced
Modulating speed is substantially increased while applied voltage;
(5) preparation method is simple, efficiently, it is cheap, can be mass, device performance is stable, and indices reach terahertz
The hereby real requirement of photonic device.
(6) present invention be it is a kind of can realize ultratvide frequency band, from polarization, transmitance is high, modulation voltage is big, response quickly automatically controlled
Wave plate, the broadband is adjustable, and Terahertz wave plate has extensively in the field such as Terahertz communication, Terahertz sensor measuring, terahertz imaging
Application prospect.
Description of the drawings
Fig. 1(a)It is the structural representation of the adjustable Terahertz wave plate in broadband,(b)Stratified liquid crystal box structural representation.
Fig. 2(a)10 μm of+10 μm of wire grating Terahertz transmitance figures,(b)Few layer graphene Terahertz transmitance
Figure,(c)The micro-structure diagram of porous graphene.
Terahertz wave plate result figure that the mono- box broadbands of Fig. 3 are adjustable;A () Terahertz ordinary light is with abnormal light with change in voltage
Wave in time domain, (b) phase contrast between ordinary light and abnormal light with voltage change, (c) the polarization evolution mistake of 2.1 THz ripples
Cheng Tu.
Terahertz wave plate result figure that Fig. 4 bilayer boxes broadband is adjustable;(a) applied voltage be 0V when, Terahertz ordinary light with
Abnormal light phase difference with frequency change, (b) 0.9THz and 1.8THz ripples, ordinary light and abnormal light phase difference with voltage change
Change.
Specific embodiment
The inventive method and application are further elucidated below by embodiment, rather than is limited with these embodiments
The present invention.
As shown in figure 1, quartz base plate 1, few layer porous graphene 2, sub-wavelength metal wiregrating 3, photo orientated layer 4, liquid crystal
5, simply to illustrate in figure, differently- oriented directivity is marked with oblique line.
The present invention combines few layer porous graphene and both transparency electrodes of sub-wavelength metal wiregrating are realized too with liquid crystal
The preparation of the applicable automatically controlled tunable wave plate of hertz frequency range.Implementing technical scheme is:
1. the number of plies of Graphene is 2-5 layers, is transferred in fused silica substrate from Copper Foil substrate by conventional transfer method.
Surface random distribution size is obtained for micron-sized hole by a step UVO method;
2. metal grating parameter is designed, the cycle is 1-80 microns, and material is the metals such as gold, silver, aluminum, platinum, and light grid metal is thick
Degree 20-500 nanometers;Default wire grating electrode is realized by photoetching and coating process in two panels fused silica substrate;
3. two panels piezoid is respectively provided with few layer of porous graphene and sub-wavelength metal wiregrating, wherein a piece of placement liner film
Slice, is then packaged as liquid crystal cell by another and staggered relatively;Or blue light ultraviolet with the linear polarization of wire grating angle at 45 °,
From the quartz base plate of porous graphene this side vertical incidence liquid crystal cell is provided with, exposure gives orientation agent molecule and uniformly points to.
Or before liquid crystal cell is packaged into, after the surface of wire grating and porous graphene applies photo orientated agent film, first
So that the linear polarization of polarization direction and wire grating angle at 45 ° is ultraviolet or blue light vertical exposure gives orientation agent molecule and uniformly refers to
To then making liquid crystal cell again.
4. the box thickness of needs is calculated according to the refractive index parameter and target wave plate type of selected liquid crystal material, for example,
For quarter-wave plate, box thickness d is slightly larger than λ/4 Δ n, and for 1/2nd wave plates, box thickness d is slightly larger than λ/2 Δ n, and selects
Thickness to should thickness value liner membrane material;
5. by the multiple liquid crystal cells of stacking, bit phase delay and its modification scope can be multiplied, also can be effectively improved
Response speed, reduces operating voltage;
6. the liquid crystal material of selection is injected into liquid crystal cell more than clearing point, the final electrically conerolled birefringence using liquid crystal is special
Property, the wave plate of corresponding different frequency is realized with the Phase delay of non-ordinary light by voltage-regulation ordinary light.
Embodiment 1:
The present embodiment is the example of the adjustable Terahertz wave plate in single box broadband.
Concrete structure design such as accompanying drawing 1(a)Shown, the inner side of two bauerite substrate 1 is respectively arranged with sub-wavelength metal wiregrating 2
With few layer of porous graphene 3, the liquid crystal material 6 of the photo orientated layer 5 of liquid crystal cell, the flat of liquid crystal is realized by photo orientated mode
Row orientation, and photo orientated layer differently- oriented directivity is at 45 ° with wire grating direction.The liquid crystal material chosen in this example is that room temperature is double greatly
Refractive index liquid crystal NJU-LDn-4(Referring to patent ZL201210378032.6), birefringence of the liquid crystal in 0.5-2.5 THz
About 0.30, calculating is learnt, to make the liquid crystal cell that the effect of adjustable quarter-wave plate, required minimum liquid crystal are reached in 1THz
Box thickness is 250 μm.
To realize such structure, can be with the preparation of the integration present invention(Including azo liquid crystal cell):First a piece of molten
Carry out photoetching on fused silica substrate respectively and develop, the Lithographic template of selection is 10 μm+10 μm.Deposited by electron beam evaporation afterwards
Physical vaporous deposition deposit thickness is about the substrate surface after the golden film of 50 nm to photoetching, and by being cleaned by ultrasonic remnants
Photoresist eluting, obtains 20 μm of cycle, and line thickness is 10 μm of golden light grid.The microscope photograph of grating pattern such as Fig. 2(a)
Shown in middle illustration.The Graphene of upper three layers of chemical vapour deposition technique (CVD) growth is shifted with another vitreous silica substrate, then
Irradiate 30 minutes in UV ozone cleaning device.Scanning electron microscope (SEM) picture such as Fig. 2 of porous graphene pattern(c)It is shown.This
Afterwards, the surface for having electrode in preparation respectively prepares photo orientated layer, and spin coating concentration is 0.5% azobenzene material SD1 solution,
2 bauerite substrates are separated with the liner film that film thickness is 250 μm makes liquid crystal cell, and it is inclined in the line of 405 ± 10 nm
Shake under light from the quartz base plate of porous graphene this side exposure is provided with, give the surface identical even level of two substrates
Differently- oriented directivity, and differently- oriented directivity obtains photo orientated layer with golden light grid bearing is at 45 °.Then by liquid crystal NJU-LDn-4 at 120 DEG C
Liquid crystal cell is poured in thermal station, a wideband adjustable Terahertz wave plate has just been made.
Such as Fig. 2(a)Shown, in 0.5-2.5THz broadband ranges, TM ripple transmitances are up to 98% to sub-wavelength metal wiregrating,
The transmitance of TE ripples is less than 2%, therefore can not only make Terahertz transparency electrode but also can make Terahertz wide band polarizers.Such as Fig. 2(b)Institute
Show, the transmitance about ~ 82% of original three layer graphene, after UVO process, its transmitance is up to 97%, even if coating light-operated
Oriented layer, three layer graphene transmitances of this porous remain above 95% and polarization are kept in 0.5-2.5THz broadband ranges
Incoherent high permeability.Its surface resistance is about 910 Ω, suitable with the flawless Graphene surface resistance of monolayer.
By changing applied voltage, different Spatial transmissions can be realized for different frequency.Such as Fig. 3(a)It is shown, pass through
Terahertz ordinary light that THz-TDS is measured and abnormal light with change in voltage wave in time domain.Ordinary light does not almost change with voltage,
Abnormal light pulse is integrally moved to the left with voltage, gradually close to ordinary light.Spectral characteristic such as Fig. 3(b)It is shown, it is 0V in voltage
When, 2.1THz is capable of achieving half-wave plate function, and under given voltage, phase contrast increases with the increase of frequency.Ordinary light and exception
Phase contrast between light increases with voltage and reduces, and liquid crystal cell reaches saturation during ~ 50 Vrms.By controlling institute's making alive,
2.1-2.5THz are capable of achieving half-wave plate function, and quarter-wave plate function is capable of achieving between 1.1-2.5THz.In 2.1 THz
When polarization evolution process such as Fig. 3(c)Shown, the polarization state for exporting THz wave is changed under different voltage by linear polarization
Elliptical polarization, circular polarization, reverse elliptical polarization, linear polarization is perpendicular to former linear polarization.
Embodiment 2:
The present embodiment is the example of the adjustable Terahertz wave plate of double-deck box ultra broadband.
Specific structure design such as accompanying drawing 1(b)Shown, preparation method is similar to Example 1, simply middle insertion a piece of two
Face is both provided with the quartz base plate of few layer of porous graphene, and the material of selection is still liquid crystal NJU-LDn-4, therefore same box
Thickness, modulation voltage is 1 times of single box.
By changing applied voltage, different Spatial transmissions can be realized for different frequency.As shown in fig. 4 a, it is in voltage
During 0V, 0.9THz is capable of achieving half-wave plate function, and 1.8THz is capable of achieving full-wave plate function, and phase contrast increases with the increase of frequency.
By taking 0.9THz and 1.8 THz the two frequencies as an example, such as Fig. 4 b are capable of achieving respectively by controlling applied voltage in 1.8 THz
The effect of adjustable half-wave plate, and running voltage is in 9 below Vrms.The loss of the transparency electrode invented due to this patent is less,
This folded cassette method seems more effective than in the past.
Although the present invention with preferred embodiment as above, so it is not limited to the present invention.Technology neck belonging to of the invention
Has usually intellectual in domain, without departing from the spirit and scope of the present invention, when can be used for a variety of modifications and variations.Therefore,
Protection scope of the present invention ought be defined depending on those as defined in claim.
Claims (7)
1. the adjustable liquid crystal Terahertz wave plate in a kind of broadband based on porous graphene transparency electrode, it is characterised in that including two panels
Fused silica substrate, wherein, the substrate inner side of the plane of incidence is provided with sub-wavelength metal wiregrating, and the substrate inner side of exit facet is provided with
Porous graphene, two panels fused silica substrate is bonded liquid crystal cell by frame glue;The number of plies of the porous graphene is 2-5
Layer, its surface distributed has a diameter of micron-sized hole;Two are folded between wire grating and porous graphene in liquid crystal cell
The photo orientated layer of layer, is folded with liquid crystal material in the middle of the photo orientated layer of two-layer, liquid crystal material is the automatically controlled big birefringence of Terahertz
Liquid crystal material;The liquid crystal cell realizes the parallel-oriented of liquid crystal, and differently- oriented directivity and wire grating by photo orientated mode
Direction is at 45 °.
2. the adjustable liquid crystal Terahertz wave plate in a kind of broadband based on porous graphene transparency electrode according to claim 1,
Characterized in that, wavelength of the cycle of the wire grating much smaller than incident illumination, is 1-80 microns.
3. the adjustable liquid crystal Terahertz wave plate in a kind of broadband based on porous graphene transparency electrode according to claim 2,
Characterized in that, the cycle of the wire grating is preferably 1-30 μm, the line thickness of wiregrating is 0.5-15 μm.
4. the adjustable liquid crystal Terahertz wave plate in a kind of broadband based on porous graphene transparency electrode according to claim 1,
Characterized in that, birefringence of the liquid crystal material in 0.5-2.5THz is 0.30.
5. the adjustable liquid crystal terahertz in a kind of broadband based on porous graphene transparency electrode according to one of Claims 1-4
Hereby wave plate, it is characterised in that the liquid crystal cell adopts multiple stepped constructions.
6. a kind of preparation method of the adjustable liquid crystal Terahertz wave plate in broadband based on porous graphene transparency electrode, its feature exists
In by following step realization:
(1) two panels vitreous silica piece is taken, few layer porous graphene and sub-wavelength metal wiregrating electricity is set on a quartz substrate respectively
Pole, wherein, UV ozone method process is first carried out to few layer graphene, its surface can distribution diameter be immediately micron-sized hole
Hole, porous graphene is transferred on quartz base plate by conventional transfer method from Copper Foil substrate, and wire grating electrode is by stone
Photoetching is carried out on English substrate and coating process is realized;
(2) photo orientated layer is that orientation is obtained on the thin film of photosensitive orientants, on wire grating and the surface of porous graphene
It is respectively applied photo orientated agent film;
(3) box according to required for the refractive index parameter and target wave plate type of selected liquid crystal material are calculated is thick, for four
/ mono- wave plate, box thickness d is slightly larger than λ/4 Δ n, and for 1/2nd wave plates, box thickness d is slightly larger than λ/2 Δ n, and selects thickness pair
Answer the liner membrane material of box thickness value;
(4) liner film slice will be placed on wherein a piece of quartz base plate, another bauerite substrate is placed in contrast, then used
Frame glue is packaged into liquid crystal cell;Again with or blue light ultraviolet with the linear polarization of wire grating angle at 45 °, from being provided with porous graphene
Quartz base plate this side vertical incidence liquid crystal cell, exposure gives photo orientated agent film molecule and uniformly points to;
(5) by the liquid crystal material injection liquid crystal cell chosen, the final electrically conerolled birefringence characteristic using liquid crystal is sought by voltage-regulation
Ordinary light realizes the wave plate of corresponding different frequency with the Phase delay of non-ordinary light.
7. preparation method according to claim 6, it is characterised in that in the step (4), exposure gives photo orientated dose
The step of membrane molecular is uniformly pointed to is arranged on and is packaged into before liquid crystal cell, i.e., apply on the surface of wire grating and porous graphene
It is first ultraviolet with the linear polarization of polarization direction and wire grating angle at 45 ° or blue light is vertical exposes after applying photo orientated agent film
Light gives orientation agent molecule and uniformly points to, and liquid crystal cell is then made again.
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CN102866554B (en) * | 2012-10-10 | 2016-04-13 | 南京大学 | The Terahertz wave plate that a kind of wideband is adjustable |
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