CN104048759B - High stability tilting mirror interferometer - Google Patents
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- CN104048759B CN104048759B CN201410284248.5A CN201410284248A CN104048759B CN 104048759 B CN104048759 B CN 104048759B CN 201410284248 A CN201410284248 A CN 201410284248A CN 104048759 B CN104048759 B CN 104048759B
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Abstract
The invention discloses a kind of high stability tilting mirror interferometer, comprise the first beam splitter, the first plane mirror, the second beam splitter, the second plane mirror, inclined mirror and collection of energy mirror, described first plane mirror and described second plane mirror be arranged in parallel and form parallel mirror group, and described parallel mirror group is fixedly connected with rotating shaft; The beam splitting coating of described second beam splitter is parallel with described parallel mirror group, and described second beam splitter is fixedly installed between described first plane mirror and described second plane mirror; Described inclined mirror has inclination angle.Adopt pair of parallel level crossing to ensure that incident ray is parallel with emergent ray, the rotation of level crossing group ensure that system autostability and decreases detection time, and system architecture is simple, reduces processing resetting difficulty and production cost.
Description
Technical field
The present invention relates to spectrographic detection and technical field of imaging, particularly relate to a kind of high stability time-modulation type double beam interferometer.
Background technology
Fourier transform infrared spectrometer (FourierTransformInfraredSpectrometer, FTIR) be utilize the interference of light to realize the instrument measured the spectrum of target, there is the series of advantages such as hyperchannel, high flux, high s/n ratio, pinpoint accuracy, have a wide range of applications in fields such as industrial and agricultural production, scientific research, environmental monitoring, food security, airborne and spaceborne RS.
Interferometer is the core component of FTIR, and the performance of interferometer determines the quality of apparatus measures result.The interferometer of current FTIR is all based on Michelson interferometer and distressed structure thereof usually, its structure usually by beam splitter, index glass and horizontal glass three part form, index glass and horizontal glass adopt level crossing or cube catoptron usually, by the interference data of the different optical path difference of index glass motion detection.The mode of motion of index glass mainly contains two kinds, and one is rectilinear motion, and one is rotational motion.
For the interferometer of movable reflector straight-line motion, the most direct and the most succinct scheme adopts plane index glass, is still the core patented technology of some internationally famous manufacturers so far, as the Vectra patent of Nicolet company of the U.S..But its kinematic accuracy to index glass requires very strict, there is very high requirement to material, design.Motion process needs to arrange auxiliary optical path, utilizes laser to carry out real-time precise monitoring and correction to the direction collimation, velocity uniformity, displacement etc. that index glass moves; In addition, because the inclination of index glass is rocked measuring accuracy impact very large, just need a set of high-precision control system to make index glass at the uniform velocity easy motion, but this implements still more difficult in practice and cost is higher; Again, index glass straight reciprocating motion is comparatively strong to the processing technology dependence of tracks, and is subject to the interference of the external environments such as shake or vibrations.These reasons all cause interferometer structure complicated, and system stability is poor, and antijamming capability is low.
Too high difficulty is required in order to overcome plane index glass kinematic accuracy, there is the interferometer scheme of many employing corner reflector movable mirror rectilinear motions, greatly reduce the requirement to index glass bearing and movement detection systems, but due to the reciprocal feature of movable reflector straight-line motion, derivative spectomstry detection rate is lower.
On this basis, people propose to adopt and rotate or swing the interferometer scheme of form, and define many patented technologies, wherein the German Bruker company Rocksolid patent swung based on two corner reflectors of regarding as an honour, commercialization; The Dynascan patent swung based on two parallel mirror of PerkinElmer company of the U.S., overcomes the high-precision requirement in interferometer index glass motion process, achieves very high stability.But be still to-and-fro movement owing to swinging, speed of detection is still lower.
On the other hand, from spacer remote sensing angle, no matter be straight reciprocating motion or swing, all cannot avoid the process of acceleration-deceleration, it is difficult to overcome to the disturbance of satellite platform.
Also someone proposes the interferometer based at the uniform velocity rotating mirror in the world, overcomes reciprocating deficiency.But this interferometer generally needs tilting mirror and multiple horizontal glass composition, and structure is comparatively complicated, increases development and design difficulty, also has certain influence to portability.
Summary of the invention
The object of the embodiment of the present invention is to provide a kind of high stability tilting mirror interferometer, improves stability, simplifies structure, meanwhile, overcome reciprocating acceleration-deceleration process, enables to adapt to the more wide application such as high-speed inspection, spacer remote sensing.
The object of the embodiment of the present invention is achieved through the following technical solutions:
A kind of high stability tilting mirror interferometer, comprises the first beam splitter, the first plane mirror, the second beam splitter, the second plane mirror, inclined mirror and collection of energy mirror:
Described first plane mirror and described second plane mirror be arranged in parallel and form parallel mirror group, and described parallel mirror group is fixedly connected with rotating shaft;
The beam splitting coating of described second beam splitter is parallel with described parallel mirror group, and described second beam splitter is fixedly installed between described first plane mirror and described second plane mirror;
Described inclined mirror has inclination angle;
The light beam entering described first beam splitter arrives described first plane mirror after light splitting;
Enter light beam inclined mirror described in vertical incidence after described second beam splitter reflection of described first plane mirror, and described second plane mirror is arrived after described second beam splitter transmission, enter inclined mirror described in vertical incidence after the beam reflection of described second plane mirror;
The light beam entering described inclined mirror returns described first beam splitter by original optical path, is transmitted to reach after collection of energy mirror is assembled to interfere with each other at detector through described first beam splitter.
The technical scheme provided as can be seen from the invention described above embodiment, adopts parallel mirror group, and the beam splitter that beam splitting coating parallels with parallel mirror group, ensure that impinging perpendicularly on the light beam tilting to penetrate mirror returns along original optical path; It is to make system have zero optical path difference position that inclined mirror is designed to stepped, improves measuring accuracy; Rotating shaft drives the rotation of parallel mirror group, beam splitter to cause system light path periodically-varied, also ensure that the autostability of system simultaneously and decreases Measuring Time.
Accompanying drawing explanation
In order to be illustrated more clearly in the technical scheme of the embodiment of the present invention, below the accompanying drawing used required in describing embodiment is briefly described, apparently, accompanying drawing in the following describes is only some embodiments of the present invention, for those of ordinary skill in the art, under the prerequisite not paying creative work, other accompanying drawings can also be obtained according to these accompanying drawings.
Fig. 1 is that embodiment of the present invention high stability tilting mirror interferometer forms schematic diagram.
Fig. 2 is embodiment of the present invention high stability tilting mirror interferometer medium dip mirror structure schematic diagram.
Fig. 3 is embodiment of the present invention high stability tilting mirror interferometer rotating mechanism schematic diagram.
Fig. 4 is that in embodiment of the present invention high stability tilting mirror interferometer, catoptron group normal and incident ray rotate schematic diagram.
Fig. 5 is the application flow schematic diagram of embodiment of the present invention high stability tilting mirror interferometer.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on embodiments of the invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to protection scope of the present invention.
As shown in Figure 1, the embodiment of the present invention provides a kind of high stability tilting mirror interferometer to comprise the first beam splitter 11, first plane mirror 12, second beam splitter 13, second plane mirror 14, inclined mirror 15 and collection of energy mirror 17:
First plane mirror 12 and the second plane mirror 14 be arranged in parallel and form parallel mirror group 120, and parallel mirror group 120 is fixedly connected with rotating shaft 16;
The beam splitting coating of the second beam splitter 13 is parallel with parallel mirror group 120, and the second beam splitter 13 is fixedly installed between the first plane mirror 12 and the second plane mirror 14;
Inclined mirror 16 has inclination angle;
The light beam entering the first beam splitter 11 arrives the first plane mirror 12 after light splitting;
Enter light beam vertical incidence inclined mirror 15 after the second beam splitter 13 reflects of the first plane mirror 12, and the second plane mirror 14 is arrived after the second beam splitter 13 transmission, enter vertical incidence inclined mirror 15 after the beam reflection of the second plane mirror 14;
The light beam entering inclined mirror 15 returns the first beam splitter 11 by original optical path, is transmitted to reach after collection of energy mirror 17 is assembled to interfere with each other at the second detector 19 through the first beam splitter 11.
As shown in Figure 1, for the ease of understanding, light source 18 is illustrated.
The technical scheme provided as can be seen from the invention described above embodiment, embodiment of the present invention high stability tilting mirror interferometer is a kind of high stability time-modulation type double beam interferometer, it adopts parallel mirror group, and the beam splitter that beam splitting coating parallels with parallel mirror group, ensure that impinging perpendicularly on the light beam tilting to penetrate mirror returns along original optical path; It is to make system have zero optical path difference position that inclined mirror is designed to stepped, improves measuring accuracy; Rotating shaft drives the rotation of parallel mirror group, beam splitter to cause system light path periodically-varied, also ensure that the autostability of system simultaneously and decreases Measuring Time.
Embodiment of the present invention high stability tilting mirror interferometer, along with the uniform rotation of rotating shaft, the second detector 19 receives interference strength during different optical path difference, the interferogram of formation time series arrangement.
As shown in Figure 1, embodiment of the present invention high stability tilting mirror interferometer, the first detector 110 can also be comprised, the transmitted light that the light beam entering the first beam splitter 11 obtains after light splitting arrives the first detector 110, in order to the stability of Calibrating source, in order to the stability of Calibrating source intensity, can revise result of interference when the intensity of light source is unstable, improve measuring accuracy.
Those skilled in the art can understand detector with reference to prior art, and therefore not to repeat here.
Specifically, inclined mirror is stepped appearance, and inclined mirror comprises 2 and be arranged in parallel and the plane of reflection with vertical range h ', and the angle between the plane of reflection and surface level is the inclination angle theta of inclined mirror.
As shown in Figure 2, plane AE is parallel with plane BF, plane EF and plane AD all perpendicular to plane CD, EF=h '.Inclined mirror employing this " step-like " structure is the zero optical path difference position in order to realize during interferometry.
Specifically, parallel mirror group is fixedly connected with the mode of rotating shaft, Ke Yiwei:
Second plane mirror is fixedly connected with by head rod with the 3rd plane mirror, and the second plane mirror is fixedly connected with rotating shaft.
Connecting link can be 1 or many.
Or the 3rd plane mirror is fixedly connected with rotating shaft by the second connecting link, and the second plane mirror is fixedly connected with rotating shaft.
Visible, in axis of rotation process, the second plane mirror remains parallel with the 3rd plane reflection mirror.It will be understood by those skilled in the art that mode that rotating mirror group is fixedly connected with rotating shaft is not by above-mentioned exemplary restriction, any other can implementation tool in protection domain.
Specifically, the second beam splitter is fixedly connected with the second plane mirror with the first plane mirror, Ke Yiwei:
Second beam splitter is fixedly connected with the second plane mirror with the first plane mirror by the 3rd connecting link.Connecting link can be 1 or many.
Specifically, still as shown in Figure 1, rotating shaft is vertically arranged, and rotating shaft one end is through inclined mirror, and as the position of intersecting point according to the second plane mirror and its normal, rotating shaft one end is fixedly connected with the 3rd plane mirror in position.The other end of rotating shaft connects motor, and motor exports at the uniform velocity rotating speed.
Visible, second beam splitter, parallel mirror group are fixed together, and be connected with rotating shaft, like this, when rotating shaft carries out uniform rotation by motor driving, second beam splitter, the also uniform rotation of parallel mirror group, will ensure during axis of rotation through parallel mirror group and the second beam splitter to two equal vertical sand shootings of light beam of inclined mirror to clinoplane.
Embodiment of the present invention high stability tilting mirror interferometer, first beam splitter can be beam splitter or Amici prism, second beam splitter can be beam splitter or Amici prism, and those skilled in the art can understand beam splitter and Amici prism with reference to prior art, and therefore not to repeat here.
Embodiment of the present invention high stability tilting mirror interferometer, collection of energy mirror is spherical reflector or lens, or collection of energy mirror is non-spherical reflector or lens.
As shown in Figure 3,4, the light beam through parallel mirror group is first considered:
(1) first consider to be transmitted through parallel mirror group light beam through the second beam splitter:
As shown in Figure 3, if the angle of inclined mirror dip plane BF and plane CD is θ, rotating shaft rotating speed is ω, and in a rotation period during any time t, the angle of the first plane mirror normal and rotating shaft is α, and reflection angle is β.
Light beam through the first plane mirror 31 and the second beam splitter 32 is OO ', crosses some O and is the boost line l that is parallel to BF and meets at H point with light beam O ' G, make:
L
1＝OO′；L
2＝O′H；
Vertical range between second beam splitter 32 and the first plane mirror 31 is h.
Can be obtained by triangle relation:
L
1=h/cos β formula (1)
L
2=L
1cos (2 β) formula (2)
So:
The expression formula of cos β in derivation formula (1)
The normal of the first plane mirror 31 34 to rotate around the shaft, and as shown in Figure 4, OI is equivalent to rotating shaft to its geometric relationship, and NO is the normal of the first plane mirror, MO when in through the light beam the first beam splitter and the first plane mirror, ∠ MIN=ω t.Order: IM=R
1, IN=R
2, NO=a, MO=b, MN=c.For convenience of deriving, then make OI=1.Then by triangle relation, have:
A=1/cos α formula (4)
B=1/cos θ formula (5)
R
1=tan α formula (6)
R
2=tan θ formula (7)
C
2=a
2+ b
2-2abcos β formula (9)
Simultaneous formula (4)-(9), can obtain:
Cos β=cos α cos θ+sin α sin θ cos (ω t) formula (10)
Derive the expression formula of L
By formula (3) and (10), can obtain
L=2h [cos α cos θ+sin α sin θ cos (ω t)] formula (11)
(2) light beam through the second plane mirror 33 is considered:
Because the beam splitting coating of the first plane mirror 31, second plane mirror 33 and the second beam splitter 32 is parallel to each other between two, make OP/OO '=k (represent centre distance divided by the centre distance between the first plane mirror and the second plane mirror) between the first plane mirror and the second beam splitter, therefore, can obtain according to above derivation:
L '=OP+PQ=2kh [cos α cos θ+sin α sin θ cos (ω t)] formula (12)
Make EF=h ', so the optical path difference of whole system is:
OPD=2 (L '-L-h '/cos θ) formula (13)
Wherein, h represents the vertical range between the first plane mirror and the second beam splitter, and α represents the normal of parallel mirror group and the angle of rotating shaft.
From formula (11) (12) (13), system optical path difference is relevant with the rigging position of rotating shaft rotating speed and the second beam splitter, as long as accurately can record the rotating speed of rotating shaft, just can reach the object accurately measured.
The size of rotating shaft rotational speed omega can design according to user demand, and it depends primarily on detector sampling rate, incident radiation characteristic and sensitivity, does not repeat at this.Obtain the mode of phase place ω t, for be realized by laser calibration, specifically can be understood with reference to prior art, not repeat at this.
In addition, can also by changing h and h ', namely the position of the second beam splitter and the length of EF change the resolution of interferometer.
As shown in Figure 5, the concrete implementation step that interferometer of the present invention realizes interfering is:
51, radiation of light source light changes directional light into after collimation, and the transmitted light got through the first beam splitter is received by detector, and in order to the stability of Calibrating source, motor-driven rotatable shaft drives parallel mirror group and the second beam splitter uniform rotation simultaneously;
52, the reflected light got through the first beam splitter, through the first plane mirror, reflexes to the second beam splitter;
53, incide the light beam of the second beam splitter by the second beam splitter light splitting, a road reflection arrives inclined mirror and is called the first folded light beam, and another Reuter is mapped to the second plane mirror and is called the first transmitted light beam;
54, the first transmitted light beam is after the second plane mirror reflection, impinges perpendicularly on inclined mirror inclined-plane;
55, the light beam incided on inclined mirror clinoplane returns along original optical path after reflection, again successively obtains the second transmitted light beam respectively by after the second beam splitter and the first beam splitter transmission;
56, the first folded light beam impinges perpendicularly on the clinoplane of inclined mirror after the second beam splitter reflection;
57, the light beam incided on inclined mirror clinoplane returns along original optical path after reflection, again by obtaining the second folded light beam after the second beam splitter reflection and the first beam splitter transmission;
58, the second transmitted light beam and the second folded light beam are assembled to detector through collection of energy mirror, obtain final interference signal.
The high stability tilting mirror interferometer of the embodiment of the present invention:
Be fixed together parallel mirror group, the second beam splitter rotation, and overcoming movable reflector straight-line motion formula interferometer affects large shortcoming by kinematic error, improves the measuring accuracy of spectrometer, has stronger antijamming capability;
As long as make two equal vertical sand shootings of light beam of parallel mirror group and the second beam splitter directive inclined mirror to clinoplane, can make to send the two former roads of light beam of getting through beam splitter by light source to return, compared with movable reflector straight-line motion formula interferometer, no longer needing, auxiliary optical path is set real-time precise monitoring and correction are carried out to the direction accuracy, velocity uniformity, displacement etc. that index glass moves, while having simplified system architecture, also improve the stability of system;
By accurately recording the rotating speed of rotating shaft, high-precision measurement can be realized, and due to the translation of relative movable reflector straight-line motion formula interferometer, velocity of rotation is very fast, can realize measuring faster, decrease Measuring Time;
Control compared with index glass moves, to use uniform speed electric motor to carry out to interferometer rotations and control relatively easily, to reduce the difficulty of processing of system by precise guide rail with movable reflector straight-line motion formula interferometer;
Adopt the stability of detector to light source to demarcate, revise the error of interference data, improve measuring accuracy;
Just achieve high-precision interference by means of only parallel mirror group, beam splitter, inclined mirror and a uniform speed electric motor, compared with current index glass rotary type interferometer, stability is higher, and system architecture is simple, reduces processing resetting difficulty and production cost.
Above; be only the present invention's preferably embodiment, but protection scope of the present invention is not limited thereto, is anyly familiar with those skilled in the art in the technical scope that the present invention discloses; the change that can expect easily or replacement, all should be encompassed within protection scope of the present invention.Therefore, protection scope of the present invention should be as the criterion with the protection domain of claims.
Claims (9)
1. a high stability tilting mirror interferometer, is characterized in that, comprises the first beam splitter, the first plane mirror, the second beam splitter, the second plane mirror, inclined mirror and collection of energy mirror:
Described first plane mirror and described second plane mirror be arranged in parallel and form parallel mirror group, and described parallel mirror group is fixedly connected with rotating shaft, rotating shaft uniform rotation, drive parallel mirror group and the second beam splitter at the uniform velocity to rotate;
The beam splitting coating of described second beam splitter is parallel with described parallel mirror group, and described second beam splitter is fixedly installed between described first plane mirror and described second plane mirror;
Described inclined mirror has inclination angle;
The light beam entering described first beam splitter arrives described first plane mirror after light splitting;
Enter light beam inclined mirror described in vertical incidence after described second beam splitter reflection of described first plane mirror, and described second plane mirror is arrived after described second beam splitter transmission, enter inclined mirror described in vertical incidence after the beam reflection of described second plane mirror;
The light beam entering described inclined mirror returns described first beam splitter by original optical path, is transmitted to reach after collection of energy mirror is assembled to interfere with each other at detector through described first beam splitter.
2. high stability tilting mirror interferometer according to claim 1, it is characterized in that, described inclined mirror is stepped appearance, described inclined mirror comprises 2 and be arranged in parallel and the plane of reflection with vertical range h ', and the angle between the described plane of reflection and surface level is the inclination angle theta of described inclined mirror.
3. high stability tilting mirror interferometer according to claim 2, is characterized in that, rotating shaft rotating speed is ω, any time t in a rotation period, and optical path difference is:
OPD＝2(L′-L-h′/cosθ)
Wherein, L=2h [cos α cos θ+sin α sin θ cos (ω t)]
L′＝2kh[cosαcosθ+sinαsinθcos(ωt)]
K represents that centre distance between described first plane mirror and described second beam splitter is divided by the centre distance between described first plane mirror and described second plane mirror, h represents the vertical range between the first plane mirror and the second beam splitter, and α represents the normal of parallel mirror group and the angle of rotating shaft.
4. high stability tilting mirror interferometer according to claim 1 and 2, is characterized in that, described first plane mirror is fixedly connected with by head rod with described second plane mirror, and described first plane mirror is fixedly connected with described rotating shaft;
Or described second plane mirror is fixedly connected with described rotating shaft by the second connecting link, described first plane mirror is fixedly connected with described rotating shaft.
5. high stability tilting mirror interferometer according to claim 1 and 2, is characterized in that, described second beam splitter is fixedly connected with described second plane mirror with described first plane mirror by the 3rd connecting link.
6. high stability tilting mirror interferometer according to claim 1 and 2, it is characterized in that, described rotating shaft is vertically arranged, and described rotating shaft one end is through inclined mirror, and the other end of described rotating shaft connects motor, and described motor exports at the uniform velocity rotating speed.
7. according to the high stability tilting mirror interferometer of claim 1 or 2, it is characterized in that, described first beam splitter is beam splitter or Amici prism, and described second beam splitter is beam splitter or Amici prism.
8. high stability tilting mirror interferometer according to claim 1 and 2, is characterized in that, described collection of energy mirror is spherical reflector or lens, or described collection of energy mirror is non-spherical reflector or lens.
9. high stability tilting mirror interferometer according to claim 1 and 2, is characterized in that, described high stability tilting mirror interferometer also comprises the first detector and the second detector:
The transmitted light that the light beam entering described first beam splitter obtains after light splitting arrives described first detector;
The light beam entering described inclined mirror returns described first beam splitter by original optical path, is transmitted to reach after collection of energy mirror is assembled to interfere with each other at described second detector through described first beam splitter.
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Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1060722A (en) * | 1991-11-20 | 1992-04-29 | 浙江大学 | A kind of rotary scanning interferometer |
| CN1541330A (en) * | 2001-08-13 | 2004-10-27 | 维塔里・阿克纳适夫 | Spectrometric method and device for carrying out said method (variants) |
| CN201331381Y (en) * | 2009-01-15 | 2009-10-21 | 中国科学院西安光学精密机械研究所 | Reflect type high speed tilting mirror interference spectrometer with high resolving capability |
| CN102759402A (en) * | 2012-07-23 | 2012-10-31 | 北京理工大学 | Rotary Fourier transform interference imaging spectrometer |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6952266B2 (en) * | 2003-01-15 | 2005-10-04 | Inlight Solutions, Inc. | Interferometer alignment |
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Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1060722A (en) * | 1991-11-20 | 1992-04-29 | 浙江大学 | A kind of rotary scanning interferometer |
| CN1541330A (en) * | 2001-08-13 | 2004-10-27 | 维塔里・阿克纳适夫 | Spectrometric method and device for carrying out said method (variants) |
| CN201331381Y (en) * | 2009-01-15 | 2009-10-21 | 中国科学院西安光学精密机械研究所 | Reflect type high speed tilting mirror interference spectrometer with high resolving capability |
| CN102759402A (en) * | 2012-07-23 | 2012-10-31 | 北京理工大学 | Rotary Fourier transform interference imaging spectrometer |
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