CN104006883B - Imaging spectrometer based on multilevel micro-reflector and manufacture method - Google Patents
Imaging spectrometer based on multilevel micro-reflector and manufacture method Download PDFInfo
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- CN104006883B CN104006883B CN201410086253.5A CN201410086253A CN104006883B CN 104006883 B CN104006883 B CN 104006883B CN 201410086253 A CN201410086253 A CN 201410086253A CN 104006883 B CN104006883 B CN 104006883B
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Abstract
Imaging spectrometer based on multilevel micro-reflector and manufacture method, relate to remote sensing of the earth field of detecting, solve existing imaging spectrometer internal containing the slit relevant with spatial resolution, the problem limiting the luminous flux of entrance system, including preposition imaging system, interference system, rearmounted imaging system and focus planardetector, institute's interference system includes multistage ladder micro-reflector lamellar beam splitter, compensating plate and plane mirror；Light that target sends is premenstrual put imaging system and lamellar beam splitter after, light beam is imaged as the first picture point on lamellar beam splitter reflection to plane mirror, and another light beam is imaged as the second picture point through compensating plate after lamellar beam splitter transmission on certain ladder reflecting surface of multistage ladder micro-reflector；The light of the first picture point is transmitted through rearmounted imaging system images through lamellar beam splitter, and after the compensated plate of light of the second picture point to lamellar beam splitter reflection, in rearmounted imaging contracting beam system imaging, the picture of described rearmounted imaging contracting beam system is received by focus planardetector.
Description
Technical field
The invention belongs to remote sensing of the earth observation field, relate to the making side of a kind of Fourier transform infrared imaging spectrometer
Method, is specifically related to a kind of based on multistage ladder micro-reflector novel space-time combined modulation infrared Fourier transform imaging spectrometer system
System manufacture method.
Background technology
Imaging spectrometer is that the optics of new generation grown up on multi-spectral imager basis the eighties in 20th century is distant
Sense instrument, conventional two-dimensional space information can be extended to three dimensions spectral information by it, such that it is able to realize atural object mesh
Mark carries out fine identification and classification.Therefore imaging spectrometer is by the important tool of ground remote sensing detection, and it has merged light
Spectrometer and the advantage of multi-spectral imager, be truly realized the detection that object carries out " collection of illustrative plates unification ".Therefore it widely should
It is used in space remote sensing, the fields such as military target detects, and geological resource is explored, environmental monitoring, meteorologic analysis.According to imaging spectrometer
The difference of operation principle, can be broadly divided into color dispersion-type and Fourier transformation type two class.Color dispersion-type imaging spectrometer is base
In prism or the light-dividing principle of grating, the spectral information of ground object target can be directly obtained on the detector.This type of imaging spectral
Instrument development is compared early, and Technical comparing is ripe, extensive at aerospace field Application comparison, but spectral resolution is controlled by slit
System, therefore it is relatively difficult in terms of detecting infrared weak radiation.Fourier transformation imaging spectrometer is the interference first obtaining object
Then interferogram is done Fourier transformation and obtains the spectrum of object by figure.According to the difference of the modulation system to interferogram, Fourier
Transform imaging spectrograph can be divided mainly into time-modulation type, spatial modulation type and space-time combined modulation type.In time-modulation type Fu
Leaf transformation imaging spectrometer is based on Michelson's interferometer structure, its use driving one index glass to produce optical path difference, therefore
Need the driving means of a set of precision.And complete the time measuring one cycle of needs of a width interferogram, its real-time ratio
Poor.Its inside of spatial modulation Fourier transformation imaging spectrometer is without movable member, and it utilizes the different generations of locus
Optical path difference can realize the spectral measurement to rapid change object, and its real-time is relatively good.But traditional spatial modulation Fourier becomes
As spectrogrph is internal containing the slit relevant with spatial resolution, limit the luminous flux of entrance system.Space-time combined modulation type
Fourier transformation imaging spectrometer is based on image plane interference imaging theory, does not contains slit and therefore movable member has inside it
Luminous flux is big, constitutionally stable advantage.
Summary of the invention
Present invention aim to overcome that the problem that above-mentioned prior art exists, it is provided that a kind of simple in construction, reproducible,
The imaging spectrometer based on multilevel micro-reflector of reliable operation and manufacture method.
Imaging spectrometer based on multilevel micro-reflector, including preposition imaging system, interference system, rearmounted imaging system and
Infrared CCD, described interference system includes multistage ladder micro-reflector lamellar beam splitter, compensating plate and plane mirror；Object
Light that body sends is premenstrual put imaging system and lamellar beam splitter after, form two-beam, light beam through lamellar beam splitter reflection to flat
Be imaged as the first picture point on the reflecting mirror of face, another light beam after lamellar beam splitter transmission through compensating plate at multistage ladder micro-reflector
Certain ladder reflecting surface on be imaged as the second picture point；The light of described first picture point is transmitted through rearmounted imaging system through lamellar beam splitter
System imaging, after the compensated plate of light of the second picture point to lamellar beam splitter reflection, at rearmounted imaging system images, described rearmounted imaging
The picture of system is received by infrared CCD.
The described ladder height setting multistage ladder micro-reflector is as d, in the angle of visual field corresponding to the n-th ladder reflecting surface
In the range of, target object at the n-th ladder micro-reflecting surface imaging and target object in the mirror-bit of the n-th ladder reflecting surface
Put the optical path difference between the formed virtual image, be expressed as with formula one:
Formula one, δ=2nd；
Setting the reflecting surface width of multistage ladder micro-reflector as a, the flying height of Infrared Imaging Spectrometer is H, preposition
The focal length of imaging system is f', then the distance between adjacent image points is a, it is thus achieved that formula two table of the distance between adjacent target object point
It is shown as:
Formula two, Δ h=Ha/f'；
The catercorner length setting multistage ladder micro-reflector as h, the angle of visual field of preposition imaging system is:
The manufacture method of imaging spectrometer based on multilevel micro-reflector, the method is realized by following steps:
Step one, make the substrate of this imaging spectrometer, choose aluminum, copper, titanium, rustless steel or silicon as base material, and
Upper surface is processed by shot blasting；
Step 2, using the center of the substrate after polishing in step one as lamellar beam splitter half-reflection and half-transmission face
Center, utilize lamellar beam splitter and the refractive index of compensating plate and thickness data to the relative position of four optical axis datum lines and
Optical element miniature governor motion position calculates, with the table at both part reflective semitransparent film places, center, rear surface of lamellar beam splitter
The center in face is as the center of system.The thickness of lamellar beam splitter and compensating plate is t, and refractive index is n,.Then primary optic axis is relative
Offset distance l in beam splitter rear surface1For
Second optical axis is relative to the offset distance l of table after beam splitter2For:
3rd optical axis is relative to the offset distance l of table after beam splitter3For:
4th optical axis is relative to the offset distance l of beam splitter rear surface4For:
Use the photoetching of MOEMS technology and the basis reference of etching process four optical axises of making in substrate according to result of calculation
Line and the miniature governor motion of optical element；
Particularly as follows: make the basis reference line of four optical axises, the primary optic axis reference at the most preposition imaging system place
Datum line, the second optical axis basis reference line at multistage ladder micro-reflector place, the 3rd optical axis reference at plane mirror place
Datum line and the 4th optical axis basis reference line at rearmounted imaging system place, then make shape beam splitter in the center of substrate
Miniature governor motion, the 3rd optical axis basis reference line make compensating plate miniature governor motion, second optical axis benchmark join
Examine the miniature governor motion making multistage ladder micro-reflector on line, the 3rd optical axis basis reference line makes plane mirror
Miniature governor motion, primary optic axis makes the miniature governor motion of preposition imaging system, in the 4th optical axis basis reference
The miniature governor motion of rearmounted imaging system and the miniature governor motion of Infrared Detectors is made on line.
Step 3, place four laser respectively in the position that the surrounding of substrate is vertical with the basis reference line of four optical axises
Device, makes laser beam overlap with the basis reference line of described four optical axises, the centre-height of the height of regulation laser instrument to device；
Step 4, lamellar beam splitter is arranged on the miniature governor motion of lamellar beam splitter, compensating plate is arranged on benefit
Repay on the miniature governor motion of plate；Use laser beam corresponding on four optical axis datum lines to lamellar beam splitter and compensating plate
Carry out fine adjustment:
Detailed process is: by white screen fixing before the 4th laser instrument, use white screen and the first laser instrument adjustment sheet
The position of shape beam splitter and angle, fixing lamellar beam splitter；Fix, by white screen and second before white screen is moved to second laser
Laser instrument fixed compensation plate；
Step 5, multistage ladder micro-reflector is arranged on the miniature governor motion of multistage ladder micro-reflector, uses
Multistage ladder micro-reflector is adjusted by the 3rd laser instrument and diaphragm above thereof, when the light of multistage ladder micro-reflector reflection
During by the aperture of diaphragm, fixing multistage ladder micro-reflector；Fixing multistage ladder micro-reflector；Diaphragm is moved to the 4th laser
Before device, when the light of plane mirror reflection passes through the small hole center of diaphragm, fixed pan reflecting mirror；
Step 6, preposition imaging system is installed on the miniature governor motion of preposition imaging system, diaphragm is moved to
Before one laser instrument, use LASER Light Source and diaphragm that preposition imaging system is adjusted, be currently set to as systematic reflection
When light is by diaphragm small hole center, fixing preposition imaging system；Rearmounted imaging system is installed to the miniature of rearmounted imaging system
On governor motion, diaphragm is moved to before the 4th laser instrument, when the light that rearmounted imaging system reflects is by the aperture of diaphragm, Gu
Fixed rearmounted imaging system.
Step 7, four laser instrument and diaphragm are removed, infrared CCD is installed to the miniature governor motion of Infrared Detectors
On, the position of regulation infrared CCD detector, when obtaining multistage ladder micro-reflector peace on infrared CCD detector clearly
Fix infrared CCD during the picture of face reflecting mirror, complete.
Beneficial effects of the present invention: system of the present invention, based on Michelson's interferometer structure, uses lamellar beam splitter,
And plate infrared part reflective semitransparent film, another side plating infrared anti-reflection film in its one side.The optical path difference introduced in order to eliminate beam splitter,
Add the compensating plate of material identical with beam splitter in systems, plate infrared anti-reflection film on the two sides of compensating plate.It is set to before causing
As system, multistage ladder micro-reflector, the optical axis at plane mirror and rearmounted imaging system place is no longer mutually perpendicular to or phase
Overlap mutually.Therefore system also exists four optical axises, the optical axis at the most preposition imaging system place, multistage ladder micro-reflector
The optical axis at place, the optical axis at plane mirror place and the optical axis at rearmounted imaging system place.Carrying out system making when
Using the center on the surface of rear surface both half-reflection and half-transmissions of beam splitter as the datum mark of system, the phase para-position to four optical axises respectively
Put and calculate.Use a multistage ladder micro-reflector to replace the index glass in Michelson interference system, realize with this
The static of system, is greatly improved the reliability of system.And system does not contains slit, with traditional spatial modulation Fourier
Transform imaging spectrograph compares the luminous flux of the system of substantially increasing, and can be greatly improved system under high spectral resolution
Signal to noise ratio, solve the difficult problem that system signal noise ratio is low under high spectral resolution.It is red that this imaging spectrometer is operated in medium wave
Outer wave band, is opaque to visible light but, and brings certain difficulty therefore to the processing of system and debugging.Therefore in the process of native system debugging
In, use seen from combine with infrared, coarse adjustment with the regulative mode that combine is fine-tuned.
Method of the present invention first substrate to making is processed by shot blasting.Utilize the beam splitter face of beam splitter
The relative position of four optical axises in system is calculated by center location on substrate, and according to result of calculation
Complete the making of four optical axis basis reference lines.Then it is fabricated on four optical axis basis reference lines as needed for spectrometer system
The miniature governor motion of each optical element wanted.Each optical element of system is installed to the corresponding miniature regulation of substrate
In mechanism, and adjust its angles and positions, enable the angle of each optical element and position more accurately to meet design needs, thus
Ensure that the precision of space-time combined modulation Infrared Imaging Spectrometer.The present invention can be used for the Fourier transformation in medium-wave infrared work
Imaging spectrometer and the making of pertinent instruments.
Accompanying drawing explanation
Fig. 1 is the system construction drawing of imaging spectrometer based on multilevel micro-reflector of the present invention；
Fig. 2 is that imaging spectrometer based on multilevel micro-reflector of the present invention is swept under pattern in the spy of face battle array at a window
Survey the imaging process on device；
Fig. 3 be imaging spectrometer based on multilevel micro-reflector of the present invention manufacture method in optical axis datum line
Make figure；
In Fig. 4 Fig. 4 a be imaging spectrometer based on multilevel micro-reflector of the present invention manufacture method in beam splitter
Installation and debugging schematic diagram, Fig. 4 b is the installation and debugging schematic diagram of multistage ladder micro-reflector and plane mirror, and Fig. 4 c is set to before being
As system and the installation and debugging schematic diagram of rearmounted imaging system.
Fig. 5 is the peace of the machine system of the manufacture method of imaging spectrometer based on multilevel micro-reflector of the present invention
Debug and attempt.
Detailed description of the invention
Detailed description of the invention one, combine Fig. 1 and Fig. 2 present embodiment is described, imaging spectral based on multilevel micro-reflector
Instrument, the preposition imaging system of described imaging spectrometer 1, interference system 2 and rearmounted imaging contracting beam system 3 and infrared CCD 4 form.Its
Middle interference system 2 is made up of multistage ladder micro-reflector 7, plane mirror 5, lamellar beam splitter 6 and compensating plate 8；The a certain moment
The light that ground target object sends enters this imaging spectral instrument system with a certain angle of visual field, through preposition imaging system 1 and lamellar
It is imaged on respectively after beam splitter 6 on a certain cascaded surface of plane mirror 5 and multistage ladder micro-reflector 7.The most multistage ladder
The different reflecting surface of micro-reflector 7 correspond to imaging in the range of the angle of visual field that ground object is certain, is imaged on multistage rank
Two picture points on a certain reflecting surface of ladder micro-reflector 7 and plane mirror 5 are deposited owing to having fixing ladder height
, therefore can produce fixing phase difference.Two picture points become through rearmounted imaging contracting beam system 3 as two relevant thing sources
As being obtained with the image of width object after interferogram is modulated afterwards.Subsequent time, the light that target object sends can be with
The another one angle of visual field enters system, thus is imaged on adjacent ladder reflecting surface.
Spectrometer system described in present embodiment as infrared system, described lamellar beam splitter 6, the material of compensating plate 8
Material uses zinc selenide, zinc selenide, and raw material is made by the method drawn or grow, then by optics roughing and grinding and polishing, reaches
To required form and parameter index.On surface of lamellar beam splitter 6, evaporation has infrared part reflective semitransparent film, with realize reflection and
The effect of transmission each about 50%；Two surfaces evaporations in another surface of lamellar beam splitter and compensation version have infrared optics anti-reflection
Film, to improve energy efficiency.Zinc selenide beam splitter, the size of compensation version match with multistage ladder micro-reflector size, described
The width diffraction effect to be considered of multilevel micro-reflector 7 is on interferogram and the impact of imaging.The list of described multilevel micro-reflector 7
Individual ladder height scope, between 1nm-50 μm, uses MOEMS technology or optical manufacturing method to make, described multilevel micro-reflector
The ladder height error of 7 is less than the 5% of ladder height.When using MOEMS fabrication techniques multistage ladder micro-reflector, for ensureing rank
The uniformity of ladder height, need to use Rotation evaporation, controls ladder height by light-operated method.Adopt at multistage ladder micromirror surfaces
Preparing infrared high-reflecting film and protecting film with radio-frequency sputtering or electron beam evaporation technique, described multistage ladder micro-reflector ladder is high
Degree, width and step number determine imaging spectrometer spectral resolution and image quality.
The ladder height setting multistage ladder micro-reflector 7 described in present embodiment is as d, at the n-th ladder reflecting surface
In the range of the corresponding angle of visual field, target object in the n-th ladder micro-reflecting surface imaging with target object at the n-th ladder
Optical path difference between the virtual image formed by the mirror position of reflecting surface, is expressed as with formula one:
Formula one, δ=2nd；
Setting the reflecting surface width of multistage ladder micro-reflector 7 as a, the flying height of Infrared Imaging Spectrometer is H, preposition
The focal length of imaging system 1 is f', then the distance between adjacent image points is a, it is thus achieved that the formula two of the distance between adjacent target object point
It is expressed as:
Formula two, Δ h=Ha/f'；
The catercorner length setting multistage ladder micro-reflector 7 as h, the angle of visual field of preposition imaging system 1 is:
In conjunction with Fig. 2, present embodiment being described, Fig. 2 is that a window sweeps native system imaging process on infrared CCD under pattern,Represent is object imaging on infrared CCD.It is the same string of infrared CCD take the most in the same time, it can be seen that when
The when that object having just enter into a scanning window, it is imaged on the right hand edge of string of infrared CCD, then warp through imaging spectrometer
Cross a window and sweep after pattern its imaging infrared CCD with the left hand edge of string.Reflecting surface number at multistage ladder micro-reflector is
In the case of 32, the 32 width images about target object can be obtained on rearmounted infrared CCD.This 32 width image is sheared
After splicing, it is possible to obtain the interferogram of target object, then it is carried out Fourier transformation and be obtained with this target
Spectral information.
Detailed description of the invention two, combining Fig. 3 to Fig. 5 present embodiment is described, present embodiment is detailed description of the invention one
The manufacture method of described imaging spectrometer based on multilevel micro-reflector, the method is realized by following steps:
A, make the substrate of this imaging spectrometer, choose aluminum, copper, titanium, rustless steel or silicon as base material, by substrate material
Expect the substrate according to the dimensional requirement manufacturing system designed, and upper surface is processed by shot blasting；Burnishing surface roughness is less than
In 10 microns, flatness is less than or equal to 50 microns.
B, using the center of substrate as the center in lamellar beam splitter 6 half-reflection and half-transmission face, utilize lamellar beam splitter 6
With the refractive index of compensating plate 6 and thickness data to the relative position of four optical axis datum lines and optical element miniature governor motion position
Put and calculate.The photoetching utilizing MOEMS technology according to result of calculation on substrate makes four optical axises with etching process
Basis reference line and the labelling of element miniature governor motion position.
In conjunction with Fig. 3, particularly as follows: make the basis reference line of four optical axises, first light at the most preposition imaging system place
Axle basis reference line 13, the second optical axis basis reference line 14 at multistage ladder micro-reflector place, the 3rd of plane mirror 5 place
Optical axis basis reference line 15 and the 4th optical axis basis reference line 16 at rearmounted imaging system place, in the rear surface with lamellar beam splitter
The center on the heart both surfaces at part reflective semitransparent film place is as the center of system.The thickness of lamellar beam splitter and compensating plate is t, refractive index
For n, then primary optic axis is relative to the offset distance l of beam splitter rear surface1ForSecond optical axis is relative to beam splitting
The offset distance l of table after device2For:3rd optical axis relative to the offset distance l3 of table after beam splitter is:4th optical axis is relative to the offset distance l of beam splitter rear surface4For:
Use the photoetching of MOEMS technology and the basis reference of etching process four optical axises of making in substrate according to result of calculation
Line and the miniature governor motion of optical element；
Then the miniature governor motion 17 of shape beam splitter is made in the center of substrate, at the 3rd optical axis basis reference line
The 15 miniature governor motions 18 making compensating plate, make the miniature of multistage ladder micro-reflector on the second optical axis reference line
Governor motion 20, makes the miniature governor motion 22 of plane mirror, at primary optic axis on the 3rd optical axis basis reference line 15
The miniature governor motion 23 of the preposition imaging system of upper making, makes the micro-of rearmounted imaging system on the 4th optical axis basis reference line
Type governor motion 24 and the miniature governor motion 25 of Infrared Detectors.
C, place four laser instrument respectively in the position that the surrounding of substrate is vertical with the basis reference line of four optical axises, make to swash
Light light beam lays respectively at the surface of the basis reference line of described four optical axises, and parallel with the basis reference line of four optical axises；
D, lamellar beam splitter 6 is arranged on the miniature governor motion 17 of lamellar beam splitter, compensation version 8 is arranged on compensation
On the miniature governor motion 18 of plate；Laser beam corresponding on four optical axis datum lines is utilized to lamellar beam splitter 6 and to compensate
Plate carries out fine adjustment.In conjunction with Fig. 4 a, before the 4th laser instrument 12, fix a white screen 19, utilize white screen 19 and first to swash
Light device 9 regulates position and the angle of lamellar beam splitter 6, fixing lamellar beam splitter 6, and white screen 19 moves on to profit before second laser 10
With same method regulation fixed compensation plate 8.
E, combine Fig. 4 b, multistage ladder micro-reflector 7 is arranged on the miniature governor motion 20 of multistage ladder micro-reflector
On, utilize the 3rd laser instrument 11 and diaphragm above 21 thereof that multistage ladder micro-reflector 7 is adjusted.By plane mirror 5
It is arranged on the miniature governor motion 22 of plane mirror, diaphragm 21 is moved on to the front end of the first laser instrument 9.Utilize the first laser
Plane mirror is adjusted and fixes by device 9 and the diaphragm before it 21.
F, combine Fig. 4 c, preposition imaging system 1 is installed on the miniature governor motion 23 of preposition imaging system.By Fig. 4 b
In diaphragm 21 move on to before the first laser instrument 9, utilize LASER Light Source and diaphragm 21 that preposition imaging system 1 is adjusted
Joint, fixing preposition imaging system 1.Rearmounted imaging system 3 is installed on the miniature governor motion 24 of rearmounted imaging system, by light
Door screen 21 moves to before the 4th laser instrument 12, utilizes the 4th laser instrument 12 and diaphragm 21 to adjust rearmounted imaging system 3
Joint, fixing rearmounted imaging system 3.
G, combine Fig. 5, four laser instrument and diaphragm 21 are removed, infrared CCD 4 is installed to the miniature tune of Infrared Detectors
In joint mechanism 25, the position of regulation infrared CCD 4, when on infrared surface battle array infrared CCD, 4 obtain the micro-reflection of multistage ladder clearly
Fix infrared CCD 4 during the picture of mirror 7 and plane mirror 5, then set a target surface target 26, finely tune preposition imaging system 1,
Target surface target 26 is made to be imaged on clearly on infrared CCD 4.
H, imaging spectrometer is contained on rotatable platform, the target surface target set is scanned sampling, then to obtaining
The multiple image obtained processes, it is thus achieved that the image of object and spectrogram.
Preposition imaging system 1 described in present embodiment and rearmounted imaging system 3 are Homology of Sphere structure, use silicon and
Germanium makes, to eliminate the aberration of system.In order to increase the transmitance of system, each optical element surface all plates infrared anti-reflection film.
Lamellar beam splitter 6, as the core devices of imaging spectrometer, uses Infrared Material Zinc Selenide or potassium bromide to make, and in beam splitting
Infrared part reflective semitransparent film is plated, at another plated surface infrared anti-reflection film on face.Compensating plate and lamellar beam splitter 6 use homogenous configuration,
Same material, two sides is coated with infrared anti-reflection film respectively.Plane mirror 5 uses silicon wafer to manufacture, and anti-at the infrared height of plated surface
Film, multistage ladder micro-reflector 7 uses the method for repeatedly photoetching plated film to make, the single ladder of described multilevel micro-reflector 7
Altitude range, between 1nm-50 μm, uses MOEMS technology or optical manufacturing method to make, the rank of described multilevel micro-reflector 7
Ladder height error is less than the 5% of ladder height.And at the infrared high-reflecting film of its plated surface.According to the requirement of Machine Design, described
Miniature governor motion uses duralumin or rustless steel to make, and carries out blacking process on surface and inwall.
Obviously, above-described embodiment is only for clearly demonstrating example, and not restriction to embodiment.Right
For those of ordinary skill in the field, can also make on the basis of the above description other multi-form change or
Variation.Here without also cannot all of embodiment be given exhaustive.And the obvious change thus extended out or
Change among still in the protection domain of the invention.
Claims (9)
1. imaging spectrometer based on multilevel micro-reflector, including preposition imaging system (1), interference system (2), rearmounted imaging system
System (3) and infrared CCD (4)；It is characterized in that, described interference system (2) includes multistage ladder micro-reflector (7), lamellar beam splitter
(6), compensating plate (8) and plane mirror (5)；Light that target object sends is premenstrual puts imaging system (1) and lamellar beam splitter (6)
After, forming two-beam, light beam reflexes to be imaged as the first picture point on plane mirror (5) through lamellar beam splitter (6), another bundle
Light is imaged as on certain ladder reflecting surface of multistage ladder micro-reflector through compensating plate (8) after lamellar beam splitter (6) transmission
Second picture point；
The light of described first picture point is transmitted through rearmounted imaging system (3) imaging through lamellar beam splitter (6), and the light of the second picture point is through mending
Repay after plate (8) reflects to lamellar beam splitter (6), in rearmounted imaging system (3) imaging, described rearmounted imaging system (3) as by
Infrared CCD (4) receives；
Set the ladder height of multistage ladder micro-reflector (7) as d, in the angle of visual field scope corresponding to the n-th ladder reflecting surface
In, target object at the n-th ladder micro-reflecting surface imaging and target object in the mirror position institute of the n-th ladder reflecting surface
Optical path difference between the virtual image become, is expressed as with formula one:
Formula one, δ=2nd；
The reflecting surface width setting multistage ladder micro-reflector (7) is H as a, the flying height of Infrared Imaging Spectrometer, front is set to
As the focal length of system (1) is f', then the distance between adjacent image points is a, it is thus achieved that the formula two of the distance between adjacent target object point
It is expressed as:
Formula two, Δ h=Ha/f'；
The catercorner length setting multistage ladder micro-reflector (7) as h, the angle of visual field of preposition imaging system (1) is:
Imaging spectrometer based on multilevel micro-reflector the most according to claim 1, it is characterised in that described lamellar beam splitting
The one side of device (6) plates infrared part reflective semitransparent film, another side plating infrared anti-reflection film；The two sides of described compensating plate (8) is plated infrared respectively
Anti-reflection film.
3. according to the manufacture method of the imaging spectrometer based on multilevel micro-reflector described in claim 1-2 any one, its
Feature is, the method is realized by following steps:
Step one, make the substrate of this imaging spectrometer, choose aluminum, copper, titanium, rustless steel or silicon as base material, and to upper
Surface is processed by shot blasting；
Step 2, using the center of the substrate after polishing in step one as lamellar beam splitter (6) half-reflection and half-transmission face
Center, utilizes relative to four optical axis datum lines of lamellar beam splitter (6) and the refractive index of compensating plate (8) and thickness data
Position and optical element miniature governor motion position calculate, and the thickness of lamellar beam splitter and compensating plate is t, and refractive index is n,
Then primary optic axis is relative to the offset distance l of beam splitter rear surface1For
Second optical axis is relative to the offset distance l of table after beam splitter2For:
3rd optical axis is relative to the offset distance l of table after beam splitter3For:
4th optical axis is relative to the offset distance l of beam splitter rear surface4For:
According to result of calculation substrate use photoetching and the etching process of MOEMS technology make the basis reference line of four optical axises with
And the miniature governor motion of optical element；
Particularly as follows: make the basis reference line of four optical axises, the primary optic axis basis reference at the most preposition imaging system place
Line (13), second optical axis basis reference line (14) at multistage ladder micro-reflector place, the 3rd light at plane mirror (5) place
Axle basis reference line (15) and the 4th optical axis basis reference line (16) at rearmounted imaging system place, then at the centre bit of substrate
Put the miniature governor motion (17) making shape beam splitter, make the miniature regulation of compensating plate at the 3rd optical axis basis reference line (15)
Mechanism (18), makes the miniature governor motion (20) of multistage ladder micro-reflector, the 3rd on the second optical axis reference line
The upper miniature governor motion (22) making plane mirror of optical axis basis reference line (15), makes preposition imaging on primary optic axis
The miniature governor motion (23) of system, makes the miniature governor motion of rearmounted imaging system on the 4th optical axis basis reference line
And the miniature governor motion (25) of Infrared Detectors (24)；
Step 3, place four laser instrument respectively in the position that the surrounding of substrate is vertical with the basis reference line of four optical axises, make
Laser beam overlaps with the basis reference line of described four optical axises, the centre-height of the height of regulation laser instrument to device；
Step 4, lamellar beam splitter (6) is arranged on the miniature governor motion (17) of lamellar beam splitter, compensating plate (8) is pacified
It is contained on the miniature governor motion (18) of compensating plate；Use laser beam corresponding on four optical axis datum lines to lamellar beam splitting
Device (6) and compensating plate (8) carry out fine adjustment:
Detailed process is: by white screen (19) fixing before the 4th laser instrument (12), use white screen (19) and the first laser
The position of device (9) regulation lamellar beam splitter (6) and angle, fixing lamellar beam splitter (6)；White screen (19) is moved to second laser
(10) front fixing, by white screen (19) and second laser (10) fixed compensation plate (8)；
Step 5, multistage ladder micro-reflector (7) is arranged on the miniature governor motion (20) of multistage ladder micro-reflector, adopts
With the 3rd laser instrument (11) and diaphragm (21) above thereof, multistage ladder micro-reflector (7) is adjusted, when multistage ladder is micro-
When the light that reflecting mirror (7) reflects passes through the aperture of diaphragm (21), fixing multistage ladder micro-reflector (7)；Fixing multistage ladder is micro-
Reflecting mirror (7)；Being moved to by diaphragm (21) before the 4th laser instrument (12), the light reflected when plane mirror (5) passes through diaphragm
(21) during small hole center, fixed pan reflecting mirror (5)；
Step 6, preposition imaging system (1) is installed on the miniature governor motion (23) of preposition imaging system, by diaphragm (21)
Move to before the first laser instrument (9), use LASER Light Source and diaphragm (21) that preposition imaging system (1) is adjusted, currently
When putting light that imaging system (1) reflects by diaphragm (21) small hole center, fixing preposition imaging system (1)；By rearmounted imaging system
System (3) is installed on the miniature governor motion (24) of rearmounted imaging system, is moved to by diaphragm (21) before the 4th laser instrument (12),
When the light that rearmounted imaging system (3) reflects is by the aperture of diaphragm (21), fixing rearmounted imaging system；
Step 7, four laser instrument and diaphragm (21) are removed, infrared CCD (4) is installed to the miniature regulation of Infrared Detectors
In mechanism (25), the position of regulation infrared CCD (4), when obtaining multistage ladder micro-reflector (7) on infrared CCD (4) clearly
Fix infrared CCD (4) during with the picture of plane mirror (5), complete.
The manufacture method of imaging spectrometer based on multilevel micro-reflector the most according to claim 3, it is characterised in that
After step 7, also include setting a target surface target (26), finely tune preposition imaging system (1), make target surface target (26) clear
Be imaged on infrared CCD (4)；Imaging spectrometer is contained on rotatable platform, is scanned adopting to the target surface target set
Sample, then processes the multiple image obtained, it is thus achieved that the image of object and spectrogram.
The manufacture method of imaging spectrometer based on multilevel micro-reflector the most according to claim 3, it is characterised in that step
In rapid one, the burnishing surface roughness of substrate after polishing is less than or equal to 10 microns, and flatness is less than or equal to 50 microns.
The manufacture method of imaging spectrometer based on multilevel micro-reflector the most according to claim 3, it is characterised in that institute
State preposition imaging system (1) and rearmounted imaging system (3) is Homology of Sphere structure, use silicon and germanium to make.
The manufacture method of imaging spectrometer based on multilevel micro-reflector the most according to claim 3, it is characterised in that institute
State each optical element surface in preposition imaging system (1) and rearmounted imaging system (3) and all plate infrared anti-reflection film, lamellar beam splitter
(6) use Infrared Material Zinc Selenide or potassium bromide to make, and on beam-splitting surface, plate infrared part reflective semitransparent film, at another plated surface
Infrared anti-reflection film；Compensating plate (8) two sides is coated with infrared anti-reflection film respectively；Plane mirror (5) uses silicon wafer to manufacture, and at table
Infrared high-reflecting film is plated in face.
The manufacture method of imaging spectrometer based on multilevel micro-reflector the most according to claim 3, it is characterised in that many
Level ladder micro-reflector (7) uses the repeatedly photoetching coating process of MOEMS technology to make, and at the infrared high-reflecting film of plated surface；Many
The single ladder height scope of level ladder micro-reflector (7) is between 1nm-50 μm, and ladder height error is less than ladder height
5%.
The manufacture method of imaging spectrometer based on multilevel micro-reflector the most according to claim 3, it is characterised in that set
The ladder height of fixed multistage ladder micro-reflector (7) is d, in the range of the angle of visual field corresponding to the n-th ladder reflecting surface, and target
Object at the n-th ladder micro-reflecting surface imaging and target object empty formed by the mirror position of the n-th ladder reflecting surface
Optical path difference between Xiang, is expressed as with formula one:
Formula one, δ=2nd；
The reflecting surface width setting multistage ladder micro-reflector (7) is H as a, the flying height of Infrared Imaging Spectrometer, front is set to
As the focal length of system (1) is f', then the distance between adjacent image points is a, it is thus achieved that the formula two of the distance between adjacent target object point
It is expressed as:
Formula two, Δ h=Ha/f'；
The catercorner length setting multistage ladder micro-reflector (7) as h, the angle of visual field of preposition imaging system (1) is:
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| CN104697439B (en) * | 2015-03-30 | 2017-12-05 | 北方民族大学 | A kind of multiple beam ladder plane angle reflector laser interference instrument |
| JP5839759B1 (en) * | 2015-07-30 | 2016-01-06 | 浜松ホトニクス株式会社 | Optical interferometer |
| CN108287021B (en) * | 2018-04-02 | 2023-07-07 | 福建师范大学 | Dual-channel hyperspectral microscopic imaging device and method for acquiring spectral information in different stages |
| CN110989142B (en) * | 2019-12-30 | 2021-07-06 | 中国科学院长春光学精密机械与物理研究所 | Preposed common-caliber dual-waveband achromatic lens of Fourier transform imaging spectrometer |
| CN113218506B (en) * | 2021-05-31 | 2022-04-22 | 中国科学院长春光学精密机械与物理研究所 | Infrared double-spectrum Fourier transform imaging spectrometer |
Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0499074A2 (en) * | 1991-02-15 | 1992-08-19 | BRAN + LUEBBE GmbH | Polarization interferometer with narrow band filter |
| CN2581957Y (en) * | 2002-12-05 | 2003-10-22 | 中国科学院长春光学精密机械与物理研究所 | Raster monochromator for eliminating time dispersion |
| CN1713022A (en) * | 2004-06-15 | 2005-12-28 | 索尼株式会社 | Polarimetric beam divider and liquid crystal display device |
| CN1820216A (en) * | 2003-07-23 | 2006-08-16 | 汤姆森特许公司 | Illuminating device with polarization recycling in a double prism |
| CN101091100A (en) * | 2004-11-18 | 2007-12-19 | 摩根研究股份有限公司 | Miniature fourier transform spectrophotometer |
| CN101290363A (en) * | 2008-06-04 | 2008-10-22 | 中国科学院长春光学精密机械与物理研究所 | Method for controlling growing multiple layer film for making multiple-level micro-reflector |
| CN201203578Y (en) * | 2008-04-10 | 2009-03-04 | 中国科学院长春光学精密机械与物理研究所 | Minitype Fourier transformation spectrometer |
| US7636158B1 (en) * | 2004-09-24 | 2009-12-22 | Romuald Pawluczyk | Optimal coupling of high performance line imaging spectrometer to imaging system |
| CN101813521A (en) * | 2010-02-09 | 2010-08-25 | 中国科学院长春光学精密机械与物理研究所 | MWIR/LWIR dual-band imaging spectrometer |
| CN201897503U (en) * | 2010-11-29 | 2011-07-13 | 中国科学院西安光学精密机械研究所 | Wide-spectral-coverage spatial heterodyne spectrometer |
| CN102564591A (en) * | 2011-12-29 | 2012-07-11 | 聚光科技(杭州)股份有限公司 | Spectrum analyzer and spectrum analyzing method |
| CN102620829A (en) * | 2012-04-12 | 2012-08-01 | 重庆大学 | Fourier transform infrared spectrometer based on programmable MEMS (micro-electro-mechanical system) micromirror and single-point detector |
| EP2615436A1 (en) * | 2010-09-08 | 2013-07-17 | National University Corporation Kagawa University | Spectrometer and spectrometric method |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2000321136A (en) * | 1999-05-10 | 2000-11-24 | Shimadzu Corp | Spectrometer |
| WO2005031397A2 (en) * | 2003-09-26 | 2005-04-07 | Zetetic Institute | Catoptric and catadioptric imaging systems with pellicle and aperture-array beam-splitters and non-adaptive and adaptive catoptric surfaces |
-
2014
- 2014-03-10 CN CN201410086253.5A patent/CN104006883B/en active Active
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0499074A2 (en) * | 1991-02-15 | 1992-08-19 | BRAN + LUEBBE GmbH | Polarization interferometer with narrow band filter |
| CN2581957Y (en) * | 2002-12-05 | 2003-10-22 | 中国科学院长春光学精密机械与物理研究所 | Raster monochromator for eliminating time dispersion |
| CN1820216A (en) * | 2003-07-23 | 2006-08-16 | 汤姆森特许公司 | Illuminating device with polarization recycling in a double prism |
| CN1713022A (en) * | 2004-06-15 | 2005-12-28 | 索尼株式会社 | Polarimetric beam divider and liquid crystal display device |
| US7636158B1 (en) * | 2004-09-24 | 2009-12-22 | Romuald Pawluczyk | Optimal coupling of high performance line imaging spectrometer to imaging system |
| CN101091100A (en) * | 2004-11-18 | 2007-12-19 | 摩根研究股份有限公司 | Miniature fourier transform spectrophotometer |
| CN201203578Y (en) * | 2008-04-10 | 2009-03-04 | 中国科学院长春光学精密机械与物理研究所 | Minitype Fourier transformation spectrometer |
| CN101290363A (en) * | 2008-06-04 | 2008-10-22 | 中国科学院长春光学精密机械与物理研究所 | Method for controlling growing multiple layer film for making multiple-level micro-reflector |
| CN101813521A (en) * | 2010-02-09 | 2010-08-25 | 中国科学院长春光学精密机械与物理研究所 | MWIR/LWIR dual-band imaging spectrometer |
| EP2615436A1 (en) * | 2010-09-08 | 2013-07-17 | National University Corporation Kagawa University | Spectrometer and spectrometric method |
| CN201897503U (en) * | 2010-11-29 | 2011-07-13 | 中国科学院西安光学精密机械研究所 | Wide-spectral-coverage spatial heterodyne spectrometer |
| CN102564591A (en) * | 2011-12-29 | 2012-07-11 | 聚光科技(杭州)股份有限公司 | Spectrum analyzer and spectrum analyzing method |
| CN102620829A (en) * | 2012-04-12 | 2012-08-01 | 重庆大学 | Fourier transform infrared spectrometer based on programmable MEMS (micro-electro-mechanical system) micromirror and single-point detector |
Non-Patent Citations (1)
| Title |
|---|
| 空间调制傅里叶变换红外光谱仪干涉系统透射效率研究;吕金光;《光谱学与光谱分析》;20130331;第33卷(第03期);第851页及图1-2 * |
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