CN103954537A - Dry type particle granularity measuring method - Google Patents
Dry type particle granularity measuring method Download PDFInfo
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- CN103954537A CN103954537A CN201410195041.0A CN201410195041A CN103954537A CN 103954537 A CN103954537 A CN 103954537A CN 201410195041 A CN201410195041 A CN 201410195041A CN 103954537 A CN103954537 A CN 103954537A
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Abstract
The invention provides a dry type particle granularity measuring method. The measuring method comprises the following steps: providing a vacuum chamber, and arranging an upper pole plate, a lower pole plate and a particle pond in the vacuum chamber; switching on a power supply, and generating uniform plasmas between the upper pole plate and lower pole plate in the vacuum chamber; scattering particles to be measured out of the particle pond, forming a dispersed suspended particle system in the plasmas in the vacuum chamber by using the scattered particles; irradiating the suspended particles by adopting laser light, and scattering; recording a Brownian motion trace image by using a camera above the vacuum chamber; calculating the sizes of the particles according to the Brownian motion principle of the particles through a computer to obtain the granularity distribution pattern of the particles. The method is easy and convenient to operate, and rapid and accurate in measurement, and a solution is provided for the rapid analysis and detection in laboratories and the industrial field.
Description
Technical field
The present invention relates to a kind of grain graininess measuring method, specifically a kind of dry type grain graininess measuring method.
Background technology
Particle size analyzer is a kind of instrument for testing solid particle size and distributing, and it has been widely used in the fields such as biology, physics, chemical industry, pharmacy and Analysis on Environment Contamination.Existing particle size analyzer comprises laser particle analyzer and particle image instrument.Laser particle analyzer adopts Mie scattering principle to test dynamic particle, and dynamic particle can be disperseed by wet method, dry method or dry-wet integratedization mode.
Existing laser particle analyzer is comprised of four major parts substantially: 1) light-source system; 2) suspension system; 3) detection system; 4) computer processing system.Most monochromaticity and the good laser of directivity of adopting of light source in light-source system, also can adopt light emitting diode, and its fundamental purpose is irradiate particle and scattering occurs.Suspension system generally comprises the circulation system and sample cell, and its fundamental purpose is that particle is placed in fluid (comprising liquids and gases, respectively corresponding wet method and dry method) and disperses and suspend, to guarantee that particle can be irradiated to and occur scattering by light source.Detection system is generally comprised of lens and sensor devices (as CCD or photomultiplier), is used for recording the scattered light of particle to light source.The data that computer processing system obtains detection system according to adopted measuring principle are carried out computational analysis and are provided particle size distribution figure.Measuring principle mainly contains two kinds: the Brownian movement principle of particle and the particle Mie scattering principle to light source.
Suspension system is a core of laser particle analyzer, and it has determined to a great extent operability, measuring accuracy, the measurement range of laser particle analyzer and has measured cost.Existing laser particle analyzer generally adopts the method (being wet method) of liquid suspended-particle to reach the object of dispersion and suspended particulate substance, as: the grain graininess instrument (CN102095672B) that a kind of particle-size measuring instrument (CN102207443B), a kind of multi-method merge, a kind of a kind of method (CN101769847B) and method (CN101393209B) of using dynamic light scattering high-sensitively detecting microcystin of measuring polytetrafluoroethylpowder powder mean grain size and particle diameter distribution thereof, all adopt wet method to disperse.But wet processing has following drawback: 1) consider that some particle may be dissolved in some liquid, therefore want this class particle just to measure and must choose suitable liquid.This must cause measuring process loaded down with trivial details, and testing cost is high.2) because particle size analyzer need to be added up just and can obtain result integral particle sample, therefore wet processing need to be installed fluid circulation system, pass through fluid circulation system, particle flows with fluid, this can make particle dispersion suspension on the one hand, is for each particle can be irradiated to by light source in flow process on the other hand.But this must cause Measuring Time long, reliability reduces.3) when laser is by liquid, certain decay can occur, thereby cause the sensitivity of system, measuring accuracy is poor.Even if system can configure highly sensitive CCD, but this inevitable system cost that greatly increased again.
Except wet processing, prior art also has the dry type measuring method that adopts gas suspension particle.Thereby but dry method still needs to make gas flow to drive particle flow.And gas flow can cause that gas density and refractive index change, this can disturb laser optical path to a certain extent, reduces measuring accuracy.Meanwhile, adopt drying measure, particle can be attached to circulating device surface, pollutes the whole circulation system, causes cleaning up very difficult.In addition, no matter be scientific research or industrial application, people wish to have a kind ofly can make particle stabilized suspension carry out the method for granulometry.
Summary of the invention
Object of the present invention is just to provide a kind of dry type grain graininess measuring method, to solve in existing dry method and wet method measuring technique, causes complex operation, Measuring Time is long, measuring accuracy is low problem because of particles circulating motion.
The present invention is achieved in that a kind of dry type grain graininess measuring method, comprises the steps:
A, a vacuum chamber is set, in described vacuum chamber, is horizontally disposed with upper and lower two pole plates; Make described top crown ground connection, described bottom crown connects a power supply;
Between b, the upper and lower pole plate in described vacuum chamber, a particle pond is set, in described particle pond, holds particle to be measured; Described particle pond joins with the vibrating arm that passes described vacuum chamber;
C, above the upper window of described vacuum chamber, detection system is set, described detection system connects computer processing system; Place relative with the side window of described vacuum chamber outside described vacuum chamber arranges light-source system;
D, connect described power supply, make described bottom crown electronegative, and produce uniform plasma between described top crown and described bottom crown;
E, at vacuum chamber, make the vibration of described vibrating arm outward, and then drive the described particle pond vibration in vacuum chamber, the particle to be measured in described particle pond is spread out from described particle pond; The particle spreading out is electronegative in described plasma region, and forms the suspension system of stable state, dispersion near above described bottom crown;
F, open light-source system, the laser of being sent out by light-source system is irradiated on the suspended particle in vacuum chamber by the side window of vacuum chamber;
G, open detection system, the particle that the camera in detection system irradiates laser is recorded a video; Video file is sent to described computer processing system;
H, described computer processing system, according to received video file, first calculate the mean square displacement <r of particle
2>, afterwards according to the Brownian movement principle of particle, and according to formula
The particle diameter R of count particles; In formula, k
bfor Boltzmann constant, T is temperature, and t is video time, and η is gas viscosity, and r is particle position.
First the present invention arranges a vacuum chamber, is horizontally disposed with upper and lower two pole plates in vacuum chamber, top crown ground connection, and bottom crown connects a power supply; Switch on power, bottom crown is electronegative, and produces uniform plasma between upper and lower pole plate.One particle pond is set between upper and lower pole plate in vacuum chamber, in particle pond, holds particle to be measured; Particle pond joins with the vibrating arm that passes vacuum chamber; By making vibrating arm vibrate outward at vacuum chamber, can drive the vibration of particle pond, and then can make the particle in particle pond spread out.The particle spreading out will be with negative electricity after entering plasma region, electronegative particle will finally reach balance under the effect of gravity and electrostatic field force, and because like charges repels mutually, so repelling each other between particle, thereby the suspended particle system of formation stable state, dispersion.Because the gas in vacuum chamber is substantially static, thus can overcome in existing dry process because gas flow causes the shortcoming of interference to laser optical path, and then can improve measuring accuracy.
When the present invention measures because using plasma disperses particle and in stable state suspended state, therefore measuring process belongs to dry process, this dry process is compared with existing wet processing, the series of problems that the measuring process that can avoid existing wet processing to bring is loaded down with trivial details, Measuring Time is long etc.
Power supply described in described step a is radio-frequency power supply, and the power electrode of described bottom crown and described radio-frequency power supply joins, another electrode grounding of described radio-frequency power supply; Described bottom crown is bowl-shape sheet metal.
Power supply can be set to radio-frequency power supply, and it is bowl-shape metal plate structure that bottom crown is now set, and can between upper and lower pole plate, produce uniform plasma.Bowl-shape bottom crown structure, can constrain in the particle being spread out by particle pond bottom crown top, on the one hand so that camera is observed in certain visual field; On the other hand, after measuring complete deenergization, particle will drop in bowl-shape bottom crown naturally, follow-up need be taken out bowl-shape bottom crown to clean, and need not clean whole vacuum chamber, overcome each deficiency of measuring the whole circulation system of complete necessary cleaning in existing dry method and wet processing, simple, convenient.
The frequency that regulates described radio-frequency power supply in described steps d is 13.56MHz, and power is 10～100W.
Power supply described in described step a is direct supply, and the negative pole of described bottom crown and described direct supply joins, the plus earth of described direct supply; Described bottom crown is metal plate, is provided with for preventing that the particle being spread out by particle pond from falling the glass ring in described bottom crown outside on described bottom crown.
Power supply can also be set to direct supply, and it is metal plate structure that bottom crown is now set, and glass ring is set on metal plate.The bottom crown of direct supply and metal plate structure matches, and can between upper and lower pole plate, produce uniform plasma equally.Equally, the cooperation of metal plate and glass ring, identical with the bottom crown role of bowl-shape metal plate structure, the particle spreading out can be constrained on the one hand in the glass ring of bottom crown top, be convenient to observation; After power-off, particle falls in glass ring on the other hand, facilitates follow-up cleaning, and need not clean whole vacuum chamber.
Surface at described bottom crown in described step a is formed with frosted layer by frosting technology, on the surface of described frosted layer, by blacking technique, is formed with blacking layer.On the surface of bottom crown, do frosted, blacking processing, blacking layer can effectively absorb bias light, improves the discrimination of the captured movement of particles trace image of camera.
Top crown described in described step a is comprised of two ITO electro-conductive glass, and the ITO rete in two described ITO electro-conductive glass is bonded to each other.This " sandwich " shape structure of top crown, can prevent that the high energy particle in discharge process applying plasma from damaging ITO rete.
Particle pond described in described step b is formed by the multiple layer metal net compacting of different meshes; Described vibrating arm is vertical setting, and described particle pond joins by horizontally disposed insulating bar and described vibrating arm.Because particle pond is made and formed by wire netting, so particle pond will be charged at plasma area, by insulating bar, particle pond and vibrating arm joined, and can avoid to vibrating arm, damaging vibrating arm because of the charge transfer on particle pond.
Described in described step c, light-source system comprises semiconductor laser, in the place ahead of described semiconductor laser, is provided with plano-convex cylindrical lens; Described semiconductor laser and described plano-convex cylindrical lens are together arranged on a lifting table.
After described step h, also comprise the steps:
Regulate the height of lifting table described in described light-source system, make described semiconductor laser from the bottom to top or successively scan the suspended particle irradiating in vacuum chamber from top to bottom; The particle by detection system, laser being irradiated is successively recorded a video simultaneously, by computer processing system, the video recording result of described detection system is carried out to calculation process to draw the particle diameter of all particles afterwards.
Described in described step c, detection system comprises camera, is provided with the increment ring being connected with camera lens rear portion before described camera; The place ahead at described camera lens is provided with bandpass filter, and the semiconductor laser in described light-source system is sent out light frequency sharp and fallen within the scope of the frequency passband of described bandpass filter.
By increment ring being set at camera lens rear portion, can take into account the visual field and the enlargement ratio of camera, the visual field can reach the scope of several centimetres, is conducive to a large amount of particulate samples to be added up.Simultaneously, bandpass filter is set before camera lens, make its frequency passband scope cover semiconductor laser and send out light frequency sharp, only allow near the scattered light of laser center frequency to enter camera, can effectively filter the bias light of plasma, effectively improve the contrast of particle image, and then improve measuring accuracy.
Accompanying drawing explanation
Fig. 1 is the structural representation of equipment therefor in the embodiment of the present invention 1 measuring process.
Fig. 2 is the structural representation of top crown in Fig. 1.
Fig. 3 is bottom crown and connect the structural representation of wire in Fig. 1.
Fig. 4 is by the path curves figure of a captured particle of camera in the embodiment of the present invention 1 measuring process.
In figure: 1, vacuum chamber, 2, bandpass filter, 3, top crown, 3-1, glassy layer, 3-2, ITO rete, 4, particle pond, 5, vibrating arm, 6, side window, 7, particle to be measured, 8, plano-convex cylindrical lens, 9, lifting table, 10, semiconductor laser, 11, bottom crown, 11-1, bowl-shape sheet metal, 11-2, frosted layer, 11-3, blacking layer, 12, insulation sleeve, 13, flowmeter, 14, radio-frequency power supply, 15, vacuum meter, 16, camera, 17, increment ring, 18, camera lens, 19, computer processing system, 20, plain conductor.
Embodiment
Embodiment 1
In the present embodiment, the detailed process of dry type grain graininess measuring method is as follows:
Step a: with reference to figure 1, first a vacuum chamber 1 is set, vacuum chamber 1 is surrounded by stainless steel cavity, stainless steel cavity ground connection; In vacuum chamber 1, be horizontally disposed with upper and lower two pole plates, top crown 3 ground connection, bottom crown 11 connects the power electrode of radio-frequency power supply 14, another electrode grounding of radio-frequency power supply 14, radio-frequency power supply 14 is placed in outside vacuum chamber 1.After radio-frequency power supply 14 is connected, bottom crown 11 electronegative (or weighing-appliance has negative potential) can produce uniform plasma by gas discharge between upper and lower pole plate.
As shown in Figure 2, top crown 3 is comprised of two ITO electro-conductive glass, each piece ITO electro-conductive glass includes glassy layer 3-1 (material can be quartz glass) and is plated in the ITO conductive membrane layer 3-2 (being called for short ITO rete) on glassy layer 3-1, these two ITO electro-conductive glass are superimposed in opposite directions, and the ITO rete 3-2 in two ITO electro-conductive glass is close together, make top crown 3 form " sandwich " structure of " glassy layer-ITO rete-glassy layer " shape, this structure can prevent that the high energy particle in discharge process applying plasma from damaging ITO rete 3-2.
As shown in Figure 3, bottom crown 11 comprises the bowl-shape sheet metal 11-1 of bottom, and for example the height of bowl-shape sheet metal 11-1 is 3mm, and diameter is 50mm; Preferred embodiment is: the inside surface at bowl-shape sheet metal 11-1 is formed with frosted layer 11-2 by frosting technology, on the surface of frosted layer 11-2, by blacking technique, is formed with blacking layer 11-3.Centre-drilling hole at the bottom of the plate of the outside surface of bowl-shape sheet metal 11-1 is socketed with insulation sleeve 12 in bored hole, and the material of insulation sleeve 12 can be teflon, and the wall thickness of insulation sleeve 12 can be 10mm; In the interior cross-under of insulation sleeve 12, have plain conductor 20, bowl-shape sheet metal 11-1 joins by plain conductor 20 and the power electrode of the outer radio-frequency power supply 14 of vacuum chamber 1.
On the cavity of vacuum chamber 1, have air intake opening and gas outlet.By air intake opening, can in vacuum chamber 1, be filled with air or argon gas; Air intake opening place is provided with flowmeter 13, and this flowmeter 13 can be mass flowmeter, by adjust flux meter 13, can control the air pressure in vacuum chamber 1; In gas outlet, place is provided with for measuring the vacuum meter 15 of vacuum chamber 1 internal gas pressure.Air pressure general control in vacuum chamber 1 is between 10～200Pa.
Step b: a particle pond 4 is set between the upper and lower pole plate in vacuum chamber 1, holds particle to be measured in particle pond 4; Particle pond 4 joins with the vibrating arm 5 that passes vacuum chamber 1 by the connecting link of a level, the general vertical setting of vibrating arm 5.Particle pond 4 is formed by the multiple layer metal net compacting of different meshes, and the surface in particle pond 4 is preferably in horizontality, and the center in particle pond 4 is preferably on the axial line in upper and lower pole plate, the place, centre position that the height in particle pond 4 can be in upper and lower pole plate.Outside vacuum chamber 1, move up and down vibrating arm 5 and can make particle pond 4 move up and down, at the outer rotational vibrations bar 5 of vacuum chamber 1, can make particle pond 4 move left and right; Outside vacuum chamber 1, make vibrating arm 5 vibrations can make the particle in particle pond 4 spread out outside particle pond 4.Connecting link between particle pond 4 and vibrating arm 5 is insulating bar, and its material can be teflon; This insulating bar can prevent particle pond 4 in plasma region because conduction is damaged vibrating arm 5.
Step c: on vacuum chamber 1 window above detection system is set, detection system and computer processing system 19 join; Place relative with the side window 6 of vacuum chamber outside vacuum chamber 1 arranges light-source system.Upper window and the side window 6 of vacuum chamber 1 all can be made by quartz glass.
Light-source system comprises semiconductor laser 10, in the place ahead of semiconductor laser 10, is provided with plano-convex cylindrical lens 8, and plano-convex cylindrical lens 8 is arranged on lens carrier; Semiconductor laser 10, plano-convex cylindrical lens 8 and lens carrier are together arranged on a lifting table 9.The axis of lens of plano-convex cylindrical lens 8 should vertically arrange, so that the laser of being sent out by semiconductor laser 10 forms the laser beam of a fan-shaped surface level after plano-convex cylindrical lens 8 expands.By regulating the horizontal level of plano-convex cylindrical lens 8, make the laser beam of laser formed fan-shaped surface level after plano-convex cylindrical lens 8 can cover the corresponding width range of bottom crown 11, that is: make laser beam spread angle cover all particles in present level face, and particle is irradiated.Lifting table 9 can be driven by stepper motor, by regulating umber of pulse and the frequency of stepper motor, can regulate the height of lifting table 9.The minimum step of stepper motor can reach micron dimension, so the present invention can successively scan micron particles.
Detection system comprises camera 16, and camera 16 is high-resolution camera, the optical axis of camera 16 vertically, during video recording the focal plane of camera 16 with expand after fan-shaped surface level laser beam must be coplanar; Before camera 16, be provided with the increment ring 17 being connected with camera lens 18 rear portions; Increment ring 17 is comprised of more piece, can single-unit or more piece use; Camera lens 18 is generally telephoto lens, and its maximum focal length can reach 250mm.In the place ahead of camera lens 18, be provided with bandpass filter 2, bandpass filter 2 is arranged on cage mount pad.The frequency passband scope of bandpass filter 2 cover by semiconductor laser 10 send out light frequency sharp, so only allow near the scattered light of laser center frequency to enter camera, can effectively filter the bias light of plasma, effectively improve the contrast of particle image, and then improve measuring accuracy.
Steps d: connect radio-frequency power supply 14, make bottom crown 11 electronegative, and produce uniform plasma between upper and lower pole plate.
After radio-frequency power supply 14 is connected, the voltage of radio-frequency power supply 14 constantly changes polarity, after discharging and recharging several times, finally can make bottom crown 11 have negative bias.By high-frequency discharge, can between upper and lower pole plate, produce uniform plasma.The frequency that regulates radio-frequency power supply 14 in this step is 13.56MHz, and power is 10～100W.
Step e: make vibrating arm 5 vibrations outside vacuum chamber 1, and then drive particle pond 4 vibrations in vacuum chamber 1, the particle to be measured in particle pond 4 is spread out from described particle pond 4; The particle 7 spreading out is electronegative in plasma region, and forms the suspension system of stable state, dispersion near above bottom crown 11.
By regulating the top in bowl-shape bottom crown 11, position that vibrating arm 5 makes particle pond 4, to guarantee that particle 7 can scatter in bowl-shape bottom crown 11.The vibration of vibrating arm 5 can also can be passed through electric operating by operating manually, and during electric operating, its frequency can be 1～10Hz.
The particle 7 spreading out enters in plasma region, in plasma, the ion of electronegative electronics and positively charged can run up on particle 7, due to the movement velocity of the electronics movement velocity much larger than ion, when therefore the electron stream on running up to particle 7 and ion current reach balance, particle 7 generally can be with upper a certain amount of negative charge.Particle 7 can move downward due to the effect of gravity in plasma region; In the time of near particle 7 drops to bottom crown 11, because bottom crown 11 has negative potential, so particle 7 will be subject to applied force of electrostatic field upwards.When the gravity being subject to when particle 7 and electrostatic field force reach balance, particle 7 will be suspended near bottom crown 11 tops.Meanwhile, because particle 7 all carries negative charge, between them, will mutually repel, thereby scatter, form a good dispersion suspension system.
Spread the rear rotational vibrations bar 5 of particle 7 particle pond 4 has been moved apart to plasma region.
Step f: open light-source system, the laser of being sent out by light-source system is irradiated on the suspended particle 7 in vacuum chamber 1 by the side window 6 of vacuum chamber 1.
Open semiconductor laser 10, regulating its power bracket is 1～100mW, and the centre wavelength of semiconductor laser 10 laser of sending out is 532nm or 650nm.The plano-convex cylindrical lens 8 that regulates semiconductor laser 10 the place aheads, vertically arranges the axis of lens, guarantees that laser forms a fan-shaped surface level laser beam after expanding.The horizontal level that regulates plano-convex cylindrical lens 8, makes fan-shaped surface level laser-beam divergence angle can cover the corresponding width range of bottom crown 11.The umber of pulse of control step motor and frequency, regulate the height of lifting table 9, make fan-shaped surface level laser beam along bottom crown 11 top about 8mm At The Height glancing incidences in vacuum chamber 1, continue to regulate the height of lifting table 9, make laser beam irradiation to the particle to be measured 7 of the bottom.
Step g: open detection system, the particle that the 16 pairs of laser of camera in detection system irradiate is recorded a video; Video file is sent to computer processing system 19.
After on particle 7, can there is scattering, camera 16 records for scattered light in Ear Mucosa Treated by He Ne Laser Irradiation.Regulate increment ring 17 and camera lens 18 focal lengths, and regulate focusing ring focusing, make camera 16 focal planes and fan-shaped surface level laser beam coplanar, and make camera 16 visual field size to fits, clear picture.
As shown in Figure 4, there is shown the Brownian movement geometric locus figure of one of them captured particle of camera 16 in 25 seconds.The Brownian movement geometric locus figure of camera 16 particle of recording saves as MOV form and is sent to computer processing system 19.
Step h: prestore the Matlab program of finishing in computer processing system 19, this program can be identified and follow the tracks of the particle in video recording; Computer processing system 19 mean square displacement <r of count particles first after receiving video recording
2>, afterwards according to the Brownian movement principle of particle, according to formula
The particle diameter R that calculates particle, obtains particle size distribution figure; In formula: k
bfor Boltzmann constant, T is temperature, and t is the duration of camera image, and η is gas viscosity (corresponding with air pressure), and r is particle position.
Step I: regulate the height of lifting table 9 in light-source system, make the fan-shaped surface level laser beam successively scanning from the bottom to top after expanding irradiate the particle to be measured 7 in vacuum chamber 1; Also successively the record a video movement locus image of particle of camera 16, the image that 19 pairs of cameras 16 of computer processing system transmit carries out computing, processing, to draw the particle diameter of all particles, finally can draw the particle size distribution figure of particle.
Simple, convenient while adopting the present invention to measure grain graininess, measure rapidly, accurately, for detecting, the express-analysis of laboratory and industrial circle provides a solution.
Embodiment 2
Compare with embodiment 1, the present embodiment has following difference:
In the present embodiment step a, power supply is direct supply, and the negative pole of bottom crown and direct supply joins, the plus earth of direct supply, and direct supply is placed in outside vacuum chamber; Bottom crown is metal plate structure, is provided with for preventing that the particle being spread out by particle pond from falling the glass ring in bottom crown outside on bottom crown.Preferred embodiment is: the surface at metal plate is formed with frosted layer by frosting technology, on the surface of frosted layer, by blacking technique, is formed with blacking layer.
Steps d is: connect direct supply, regulating the voltage of direct supply is 350V, makes bottom crown have negative potential, under the effect of direct supply, by gas discharge, produces uniform plasma between upper and lower pole plate.
Step f is: open light-source system, the laser of being sent out by light-source system is irradiated on the suspended particle 7 in vacuum chamber 1 by the side window 6 of vacuum chamber 1; Regulate the height of lifting table 9, make laser first be irradiated to the particle of top layer.
Step I is: regulate the height of lifting table 9 in light-source system, make the fan-shaped surface level laser beam successively scanning from top to bottom after expanding irradiate the particle to be measured 7 in vacuum chamber 1; Also successively the record a video movement locus image of particle of camera 16, the image that 19 pairs of cameras 16 of computer processing system transmit carries out computing, processing, to draw the particle diameter of all particles, finally can draw the particle size distribution figure of particle.
In the present embodiment, other parts are identical with embodiment 1, repeat no more.
Claims (10)
1. a dry type grain graininess measuring method, is characterized in that, comprises the steps:
A, a vacuum chamber is set, in described vacuum chamber, is horizontally disposed with upper and lower two pole plates; Make described top crown ground connection, described bottom crown connects a power supply;
Between b, the upper and lower pole plate in described vacuum chamber, a particle pond is set, in described particle pond, holds particle to be measured; Described particle pond joins with the vibrating arm that passes described vacuum chamber;
C, above the upper window of described vacuum chamber, detection system is set, described detection system connects computer processing system; Place relative with the side window of described vacuum chamber outside described vacuum chamber arranges light-source system;
D, connect described power supply, make described bottom crown electronegative, and produce uniform plasma between described top crown and described bottom crown;
E, at vacuum chamber, make the vibration of described vibrating arm outward, and then drive the described particle pond vibration in vacuum chamber, the particle to be measured in described particle pond is spread out from described particle pond; The particle spreading out is electronegative in described plasma region, and forms the suspension system of stable state, dispersion near above described bottom crown;
F, open light-source system, the laser of being sent out by light-source system is irradiated on the suspended particle in vacuum chamber by the side window of vacuum chamber;
G, open detection system, the particle that the camera in detection system irradiates laser is recorded a video; Video file is sent to described computer processing system;
H, described computer processing system, according to received video file, first calculate the mean square displacement <r of particle
2>, afterwards according to the Brownian movement principle of particle, and according to formula
The particle diameter R of count particles; In formula, k
bfor Boltzmann constant, T is temperature, and t is video time, and η is gas viscosity, and r is particle position.
2. dry type grain graininess measuring method according to claim 1, is characterized in that, power supply described in described step a is radio-frequency power supply, and the power electrode of described bottom crown and described radio-frequency power supply joins, another electrode grounding of described radio-frequency power supply; Described bottom crown is bowl-shape sheet metal.
3. dry type grain graininess measuring method according to claim 2, is characterized in that, the frequency that regulates described radio-frequency power supply in described steps d is 13.56MHz, and power is 10～100W.
4. dry type grain graininess measuring method according to claim 1, is characterized in that, power supply described in described step a is direct supply, and the negative pole of described bottom crown and described direct supply joins, the plus earth of described direct supply; Described bottom crown is metal plate, is provided with for preventing that the particle being spread out by particle pond from falling the glass ring in described bottom crown outside on described bottom crown.
5. dry type grain graininess measuring method according to claim 1, is characterized in that, the surface at described bottom crown in described step a is formed with frosted layer by frosting technology, on the surface of described frosted layer, by blacking technique, is formed with blacking layer.
6. dry type grain graininess measuring method according to claim 1, is characterized in that, top crown described in described step a is comprised of two ITO electro-conductive glass, and the ITO rete in two described ITO electro-conductive glass is bonded to each other.
7. dry type grain graininess measuring method according to claim 1, is characterized in that, particle pond described in described step b is formed by the multiple layer metal net compacting of different meshes; Described vibrating arm is vertical setting, and described particle pond joins by horizontally disposed insulating bar and described vibrating arm.
8. according to the dry type grain graininess measuring method described in claim 1～7 any one, it is characterized in that, described in described step c, light-source system comprises semiconductor laser, in the place ahead of described semiconductor laser, is provided with plano-convex cylindrical lens; Described semiconductor laser and described plano-convex cylindrical lens are together arranged on a lifting table.
9. dry type grain graininess measuring method according to claim 8, is characterized in that, after described step h, also comprises the steps:
Regulate the height of lifting table described in described light-source system, make described semiconductor laser from the bottom to top or successively scan the suspended particle irradiating in vacuum chamber from top to bottom; The particle by detection system, laser being irradiated is successively recorded a video simultaneously, by computer processing system, the video recording result of described detection system is carried out to calculation process to draw the particle diameter of all particles afterwards.
10. dry type grain graininess measuring method according to claim 8, is characterized in that, described in described step c, detection system comprises camera, is provided with the increment ring being connected with camera lens rear portion before described camera; The place ahead at described camera lens is provided with bandpass filter, and the semiconductor laser in described light-source system is sent out light frequency sharp and fallen within the scope of the frequency passband of described bandpass filter.
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| CN105043941A (en) * | 2015-08-28 | 2015-11-11 | 厦门理工学院 | Metal liquid drop information acquisition device and method |
| CN106179760A (en) * | 2016-07-05 | 2016-12-07 | 河北大学 | A kind of dry type molecule separation method |
| CN113959915A (en) * | 2021-10-18 | 2022-01-21 | 上海交通大学 | Online particle depolymerization system based on aerosol agglomeration principle |
| CN116124556A (en) * | 2023-04-19 | 2023-05-16 | 四川启睿克科技有限公司 | Solid metal particle dispersing device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5157678A (en) * | 1991-07-03 | 1992-10-20 | High Yield Technology | Laser safe housing for a particle monitor in vacuum pump lines |
| US5481357A (en) * | 1994-03-03 | 1996-01-02 | International Business Machines Corporation | Apparatus and method for high-efficiency, in-situ particle detection |
| CN1776400A (en) * | 2004-11-18 | 2006-05-24 | 株式会社拓普康 | Particle monitoring device and vacuum treatment apparatus |
| CN101082560A (en) * | 2004-03-29 | 2007-12-05 | 东京毅力科创株式会社 | Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring |
| CN102095672A (en) * | 2011-03-17 | 2011-06-15 | 上海理工大学 | Multi-method combined particle size analyzer |
| CN102109454A (en) * | 2011-03-17 | 2011-06-29 | 上海理工大学 | Device for synchronously measuring granularity of dynamic light scattering nanometer particles of multi-particles and method thereof |
-
2014
- 2014-05-09 CN CN201410195041.0A patent/CN103954537B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5157678A (en) * | 1991-07-03 | 1992-10-20 | High Yield Technology | Laser safe housing for a particle monitor in vacuum pump lines |
| US5481357A (en) * | 1994-03-03 | 1996-01-02 | International Business Machines Corporation | Apparatus and method for high-efficiency, in-situ particle detection |
| CN101082560A (en) * | 2004-03-29 | 2007-12-05 | 东京毅力科创株式会社 | Vacuum apparatus including a particle monitoring unit, particle monitoring method and program, and window member for use in the particle monitoring |
| CN1776400A (en) * | 2004-11-18 | 2006-05-24 | 株式会社拓普康 | Particle monitoring device and vacuum treatment apparatus |
| CN102095672A (en) * | 2011-03-17 | 2011-06-15 | 上海理工大学 | Multi-method combined particle size analyzer |
| CN102109454A (en) * | 2011-03-17 | 2011-06-29 | 上海理工大学 | Device for synchronously measuring granularity of dynamic light scattering nanometer particles of multi-particles and method thereof |
Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105043941A (en) * | 2015-08-28 | 2015-11-11 | 厦门理工学院 | Metal liquid drop information acquisition device and method |
| CN105043941B (en) * | 2015-08-28 | 2018-03-30 | 厦门理工学院 | A kind of molten drop information collecting device and its method |
| CN106179760A (en) * | 2016-07-05 | 2016-12-07 | 河北大学 | A kind of dry type molecule separation method |
| CN113959915A (en) * | 2021-10-18 | 2022-01-21 | 上海交通大学 | Online particle depolymerization system based on aerosol agglomeration principle |
| CN113959915B (en) * | 2021-10-18 | 2023-01-20 | 上海交通大学 | On-line particle depolymerization system based on aerosol agglomeration principle |
| CN116124556A (en) * | 2023-04-19 | 2023-05-16 | 四川启睿克科技有限公司 | Solid metal particle dispersing device |
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| Publication number | Publication date |
|---|---|
| CN103954537B (en) | 2016-04-20 |
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