CN103862171A - Method for preparing two-dimensional periodic metal particle array structure through dual-wavelength femtosecond lasers - Google Patents
Method for preparing two-dimensional periodic metal particle array structure through dual-wavelength femtosecond lasers Download PDFInfo
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- CN103862171A CN103862171A CN201410122538.XA CN201410122538A CN103862171A CN 103862171 A CN103862171 A CN 103862171A CN 201410122538 A CN201410122538 A CN 201410122538A CN 103862171 A CN103862171 A CN 103862171A
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/36—Removing material
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/064—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms
- B23K26/0643—Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms comprising mirrors
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/02—Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
- B23K26/06—Shaping the laser beam, e.g. by masks or multi-focusing
- B23K26/067—Dividing the beam into multiple beams, e.g. multifocusing
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/352—Working by laser beam, e.g. welding, cutting or boring for surface treatment
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
- B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
- B23K26/00—Working by laser beam, e.g. welding, cutting or boring
- B23K26/60—Preliminary treatment
Abstract
The invention provides a method for preparing a two-dimensional periodic metal particle array structure through dual-wavelength femtosecond lasers. The method and an implementation device for preparing the two-dimensional periodic particle array structure on the surface of metal by focusing two-color femtosecond laser pulses are provided. The method and the implementation device are characterized in that the metal particle structure is distributed in the two-dimensional direction in a periodic submicron dimension mode; two-color femtosecond lasers with different characteristic parameters are collinearly focused and irradiated on a sample after common channel or branch channel time delay through a nonlinear frequency doubling technology, and formed two-dimensional periodic structure patterns can be effectively adjusted and controlled by changing the azimuth angle of frequency doubling crystals and the power ratio of the two-color lasers. The method has the advantages that through the combinational design of different wavelengths and the polarization property of the femtosecond lasers, the submicron dimension two-dimensional periodic metal particle array structure can be conveniently and quickly prepared. The novel method for preparing the structure through the two-color femtosecond lasers has potential and important application value in the field of material micro-nano processing.
Description
Technical field:
The present invention relates to femtosecond laser and prepare method and the processing unit (plant) of two-dimension periodic sub-micrometer scale particle array structure at metal material surface, apply the physical effect that femto-second laser pulse changes with laser wavelength of incidence and polarization state at metal surface inducing periodic sub-wavelength striated structure, belong to ultrafast laser application and micro-nano manufacture field, may have important potential application future at aspects such as the Design & preparations of the novel nano photonic device relevant with surface plasma wave (Surface plasmon polaritons---SPPs).
Background technology:
In recent years, the fast development of femtosecond laser technology and commercial devices thereof and reach its maturity and attracted the extensive concern of researcher in subjects field, the feature such as burst length of particularly having due to femto-second laser pulse is short, peak power is high and Focal intensity is large, makes it be with a wide range of applications with aspects such as basic scientific research and advanced manufacturing technology development and application such as ultrafast process detection, high field physics, non-linear micro-imaging, laser ablation propelling, material modification and high-accuracy processing.
Particularly in ultrahigh precision processing, processing and preparation field, femto-second laser pulse can realize that institutional framework on micro-nano-scale changes and the emerging means of functional characteristic regulation and control and be subject to countries in the world scientist's extensive concern to materials and devices as a kind of.Compare with the processing technology that tradition adopts optics, electron beam and ion beam exposure to carry out mask etching, that the micro-nano processing of femtosecond laser and technology of preparing have is simple to operate, flexible, speed is fast, cost is low and precision advantages of higher, progressively develops into the forward position research direction in current laser, photoelectron and mechanical engineering field.At present, people utilize femtosecond laser metal, semiconductor, polymer and transparent dielectric etc. successfully to be realized to even processing, the preparation and making on nanoscale of micron, sub-micron.Particularly recently a large amount of experimental studies shows: when the low-yield femtosecond laser of single bundle by after optical focus to repeat or scan mode is irradiated specimen material surface or when inner, the striped that there will be One Dimension Periodic or quasi periodic to arrange in hot spot overlay area, groove or class optical grating construction, its space periodic is along with incident femtosecond laser energy and pulse number change, and can be much smaller than laser wavelength of incidence, striped space arrangement direction [the Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon that is closely related with the polarization state of incident laser, Journal of Applied Physics2010, 108:034903, Formation of extraordinarily uniform periodic structures on metals induced by femtosecond laser pulses, Journal of Applied Physics2006,100:023511, Femtosecond-laser-induced nanostructure formed on hard thin films of TiN and DLC, Appl.Phys.A, 2003,76:983-985].Simultaneously; for this peculiar physical phenomenon; people have also given a large amount of systems deep theoretical research; and in succession propose multiple physical models such as " self-organizing, second harmonic and surface wave interference " and analyzed and simulated [Self-organized pattern formation upon femtosecond laser ablation by circularly polarized light; 2006,252:4702-4706; Formation of nanogratings on the surface of a ZnSe crystal irradiated by femtosecond laser pulses, Physical Review B, 2005,72:125429; Surface Electromagnetic waves in optics, Optical Engineering, 31:718-730].Comparatively speaking, wherein incident laser and its interference theory experimental phenomena that better pragmatize observes between material surface induction generation plasma wave (SPPs), therefore it is accepted by most people at present.
Meanwhile, people also find these cycles or aperiodicity micro nano structure effectively multiple efficacies and physical and chemical performance [Chen Feng, the Zhang Dongshi etc. of reinforcing material of femtosecond laser in metal and semiconductor surface induction generation by large quantity research, the method of preparing metal surface superhydrophobic microstructure by femto-second laser, patent of invention number: 200910021923; Yang Jianjun, Zhang Nan, Yang Yang etc., utilize laser to prepare the method for micro-structural target raising laser propelling impulse coupling coefficient, patent of invention number:
201110087843; Brighter Light Sources from Black Metal:Significant Increase in Emission Efficiency of Incandescent Light Sources Physical Review Letters, 2009,102:234301], thereby greatly expand and promoted application potential and the value of materials and devices, the aspect such as prepare at solar energy utilization, high sensitivity photodetection, solid state lighting and medical device and there is boundless practical application space.
But it is emphasized that at this: in the research process about the micro-nano processing of femtosecond laser in the past, great majority experiment is all to select to adopt the femto-second laser pulse of single centre wavelength as incident light source, and is mainly to induce the periodic stripe structure forming to be the one-dimensional space to distribute at material surface.In order further to expand surface texture type prepared by femtosecond laser; people propose the femtosecond pulse of identical wavelength to be divided into multi-beam laser recently; then utilize their space interference principle to prepare two-dimension periodic micro-nano structure [Fabrication of a two-dimensional periodic microflower array by three interfered femtosecond laser pulses on Al:ZnO thin films at semiconductor material surface; New Journal of Physics; 2010,12:043025; Enhanced optical absorptance of metals using interferometric femtosecond ablation, Optics Express, 2007,15:13838-13843; Jia Xin, Jia Tianqing, femtosecond laser beam is prepared the system and method for asymmetric micro-nano compounding period style, patent of invention number: 201310172920; Chen Jianwen, Gao Hongyi, Xie Honglan etc., the equipment of forming two-dimension nano size periodic structure by fs laser single pulse, patent of invention number: 03142107].Because these experimental techniques are mainly concerned with the multiple-beam interference situation of single wavelength, therefore actual light path design and equipment more complicated, and the two-dimensional structure space periodic that preparation forms also will be subject to the accurate impact of adjusting of optical interference circuit.
Summary of the invention:
Technical problem to be solved by this invention is: how to utilize the femto-second laser pulse of two kinds of different wave lengths to prepare fast at metal material surface the submicron particles array structure that two-dimensional and periodic is arranged, grasp thought of design, manufacturing process, implement device and key element etc. wherein, thereby orientation, size and the space periodic realized metal surface submicrometer structure array carry out Effective Regulation.
The present invention, by the ingenious Combination Design of utilizing femtosecond laser different wave length and polarization characteristic, adopts simple experimental device just can prepare quickly and easily all changeable sub-micrometer scale two-dimension periodic metal lattice structures of orientation and size in metal surface.Compare with traditional two-dimensionally periodic structure manufacturing process, the present invention propose technical method relatively simple, quick and easy, operability is high, has overcome numerous and diverse operation that conventional light path design and fabrication technical method brings.
Technical scheme of the present invention:
Dual wavelength femtosecond laser is prepared the method for two-dimension periodic metallic particles array structure, the present invention's application bbo crystal frequency doubling technology is realized the mixing output of fundamental frequency and frequency multiplication dual wavelength femto-second laser pulse, and both are through conllinear or after variable time postpones to transmit along separate routes, focus on and be radiated at metal surface through same optical element in conllinear mode again, preparation forms has the sub-micrometer scale particle array structure that two-dimension periodic distributes.In addition, by changing the key parameter such as phase matching angle of power ratio, time delay and frequency-doubling crystal of dual-wavelength laser pulse, realize cycle, size and orientation to micro structure array and regulate and control, provide new method for preparing two-dimension periodic micro-nano structure in solid material and device surface rapid processing.The concrete operation step of the inventive method is:
The first step, the making of metallic target sample and fixing
Metal solid target surfaces is carried out after mechanical grinding and polishing, totally obtain metallic target sample with deionized water ultrasonic cleaning, then in air ambient, metallic target sample is fixed on three-dimensional precise mobile platform, and realizes the precision in space three-dimensional (x-y-z) direction to sample by computer control and move;
The material of described metallic target sample is molybdenum or tungsten metal material.
Second step, the obtaining and transmit of dual wavelength femtosecond laser
By by the femto-second laser pulse vertical irradiation of laser instrument output to BBO nonlinear crystal, obtain the dual wavelength femto-second laser pulse that fundamental frequency and frequency-doubled signal mix output, then by both through conllinear fixed light path or along separate routes after the transmission of time variable delay light path, with conllinear mode after same optical focus element vertical irradiation at metallic target sample surfaces;
The 3rd step, the adjustment of metallic target sample surfaces
Control three-dimensional precise mobile platform, above-mentioned metallic target sample can be moved along vertically carrying out precision with the direction that is parallel to laser beam, adjust metallic target sample surfaces gradient simultaneously and make metallic target sample finished surface keep mutually vertical with laser propagation direction all the time in whole processing moving process;
The 4th step, concentrating element focal position determine
Selecting incident femtosecond laser power is 10 milliwatts, then, along the progressively mobile example of direction that is parallel to beam propagation, forms serial ablation pit at metallic target sample surfaces, and determines according to the situation of change of ablation dimple size the focal position that focuses on femtosecond laser beam;
The 5th step, the location of metallic target sample surfaces
Regulate three-dimensional precise mobile platform that metallic target sample surfaces is moved in 300～600 micrometer ranges in focus front along contrary direction of beam propagation from the focal position of concentrating element;
The 6th step, the preparation of two-dimension periodic array structure
Guaranteeing that double-colored femto-second laser pulse all can be irradiated in sample surfaces situation through concentrating element, controlling three-dimensional precise mobile platform makes metallic target sample in the plane perpendicular to beam direction, carry out two-dimensional movement scanning, and by regulating the distance between fundamental frequency and double-frequency laser power, polarization state, sample surfaces and focus, distribute thereby prepare different two-dimension periodic array of particles at metallic target sample surfaces.
The concrete grammar that obtains the generation of dual wavelength femtosecond laser described in second step is: based on the non-linear frequency doubling technology of bbo crystal of I class o+o → e phase matched pattern, the femto-second laser pulse that laser instrument is produced is converted into the dual wavelength femtosecond laser that fundamental frequency and frequency-doubled signal are exported simultaneously, and changes its phase matched angle by the azimuth of rotation bbo crystal.In the time that phase matched is optimum state, the dual wavelength femtosecond laser obtaining is linear polarization, and both polarization directions are mutually vertical, and in the time of phase matched off-target angle, still retention wire polarization but basic frequency laser becomes elliptical polarization of the double-frequency laser of acquisition.
The concrete grammar that adopts conllinear fixed light path to realize the transmission of dual wavelength femtosecond laser described in second step is: the femtosecond laser vertical irradiation of laser instrument output is produced and output dual wavelength femto-second laser pulse to BBO frequency-doubling crystal, then both transmit in conllinear mode and by after dichroic mirror reflects, through same optical element obtain focus on and vertical irradiation at metallic target sample surfaces.
The method that adopts shunt time variable delay light path to realize the transmission of dual wavelength femtosecond laser described in second step is:
(1) first, the femto-second laser pulse of laser instrument output is formed to two laser pulses that energy is identical after beam splitter, and both are introduced respectively in different time delay light paths, wherein in an arm light path, adopt BBO frequency multiplication and filtering technique to realize the output that only has frequency multiplication femtosecond laser, and another arm light path keep the transmission of fundamental frequency femtosecond laser;
(2), through the two arms dual wavelength femtosecond laser after time variable delay optic path separately, arrive a common optical focus element with conllinear transmission means close bundle by dichroscope again after strength retrogression after, and vertical irradiation is at metallic target sample surfaces.
Wherein, the basic frequency laser that regulates two arm light paths to make to be irradiated to metallic target sample surfaces is-50 psec < Δ τ <260 psecs with respect to double-frequency laser burst length delay scope.
The method of the adjusting fundamental frequency described in the 6th step and frequency multiplication femtosecond laser power is: realize the control to dual-wavelength laser power by the combination that utilizes neutral filter or 1/2 wave plate and polarizer.
Described metallic target Sample Scan speed is 0.005 mm/second to 0.4 mm/second.
Described optical focus element is microcobjective or optical lens.
Described dichroscope is less than 5% to the reflectivity of fundamental frequency femtosecond laser, and the reflectivity of frequency multiplication femtosecond laser is greater than to 60%.
Preparing in the process of two-dimension periodic array structure, in the time that dual wavelength femto-second laser pulse is linear polarization, the power ratio scope of required frequency multiplication and basic frequency laser is 1< γ <7; When frequency multiplication femtosecond laser is linear polarization and fundamental frequency femtosecond laser while being elliptical polarization, the power ratio scope of required frequency multiplication and basic frequency laser is about 0.8< γ <3.
In the time regulating the phase matching angle off-target state of frequency-doubling crystal, after him, the basic frequency laser of output becomes elliptical polarization, and double-frequency laser retention wire polarization but its polarization direction change, thereby realize the regulation and control of the inclination within the scope of ± 35 ° to particle array structure orientation.
The two-dimension periodic array structure of preparing at metallic target sample surfaces is actually by the cycle striped of two mutually perpendicular directions and forms in space crossed composition, wherein long period variation scope is 230～300 nanometers, variation of short period scope is 580～640 nanometers, and the change in size scope of the metallic particles intersecting to form is 200～550 nanometers.
Sample translational speed scope described in above-mentioned the 6th step is in 0.005～0.4 mm/second, and minimum mobile accuracy is 1 micron, and the distance range between adjacent two scan lines is 2～100 microns.
Described adjustment bbo crystal azimuth is by realizing in the angle theta turning perpendicular to incident laser plane internal rotation between frequency-doubling crystal o axle and incident basic frequency laser polarization direction, when angle, grain arrangement is chosen in optimum phase matching situation, as with reference to zero point, its excursion is θ=-35 °～35 °.
Advantage of the present invention and beneficial effect:
(1) the near-infrared femto-second laser pulse of application linear polarization produces through bbo crystal fundamental frequency and frequency multiplication dual wavelength femto-second laser pulse, focus on rear vertical irradiation in conllinear mode and form at metal sample spatial induction the submicron particles array structure that two-dimension periodic distributes.Technique of the present invention is simple, and cost is low, and efficiency is high, and can large area realize.
(2) utilize BBO frequency-doubling crystal to produce different wave length and the polarization state Combination Design of fundamental frequency and double-frequency laser pulse, the two-dimensionally periodic structure that completes sub-micrometer scale at sample surfaces single step writes, and the space periodic of two-dimensional structure is different at both direction.
(3) by turning frequency-doubling crystal azimuth perpendicular to incident laser plane internal rotation, can cause polarization characteristic and the power ratio of outputting dual wavelength laser thereafter to change, thereby realize easily, the shape characteristic such as space arrangement direction and cycle of material surface formation two-dimension periodic array structure be carried out to Effective Regulation.
Accompanying drawing explanation
The dual wavelength femtosecond laser conllinear transmission index path that Fig. 1 designs for the present invention.
The dual wavelength femtosecond laser transmission time variable delay index path along separate routes that Fig. 2 designs for the present invention.
Label declaration in Fig. 1 and Fig. 2 is: 1 represents femto-second laser, 2 represent that centre wavelength is the femtosecond laser of 800 nanometers, 3 represent that centre wavelength is the completely reflecting mirror of 800 nanometer femtosecond lasers, 4 represent that centre wavelength is the neutral filter of 800 nanometers, 5 represent BBO frequency-doubling crystal, 6 represent double-colored femtosecond laser, 7 represent dichroscope, 8 represent optical focus element, 9 represent metallic target sample, 10 represent three-dimensional precise mobile platform, 11 represent that centre wavelength is 800 nanometer laser beam splitters, 12 represent time regulatable delay line, 13 represent that centre wavelength is the optical filter of 400 nanometer lasers.
Fig. 3 is the two-dimension periodic submicron particles array structure preparing, wherein A is that embodiment 3 is optimum Match angle θ=0 ° at bbo crystal, be that incident light polarization direction is when parallel with bbo crystal o direction of principal axis, the two-dimension periodic submicron particles array structure that metal molybdenum surface forms, the amplification detail view that B is A.
Fig. 4 is that embodiment 4 is in bbo crystal azimuth off-target phase matched angle, while being θ ≠ 0 °, on metal molybdenum surface, form the situation of change of two-dimension periodic array structure direction, in figure, the upper left corner is labeled as the angle theta between frequency-doubling crystal o axle and incident basic frequency laser polarization direction, wherein, A is the situation of angle theta=-25 °, and B is the situation of angle theta=35 °.
Fig. 5 is that embodiment 5 is the two-dimentional sub-wavelength periodic structure distribution situation that 6 milliwatts, 400 nanometer double-frequency lasers form while delaying 56 psec on metal molybdenum surface in general power.
The specific embodiment:
Below in conjunction with accompanying drawing, the present invention's's " dual wavelength femtosecond laser is prepared the method for two-dimension periodic metallic particles array structure " the specific embodiment is elaborated.
Embodiment 1
Light channel structure as shown in Figure 1, the femtosecond laser 2 that femto-second laser 1 produces incides after completely reflecting mirror 3, its reverberation through neutral filter 4 vertical irradiations to BBO frequency-doubling crystal 5 surfaces, the dual wavelength femtosecond laser 6 producing is afterwards through dichroscope 7, incide concentrating element 8, double-colored femtosecond laser after line focus is irradiated to metallic target sample 9 surfaces that are fixed on three-dimensional precise mobile platform 10, and induction forms the submicron particles array structure that two-dimension periodic distributes.
Wherein, produce the concrete following characteristics parameter of laser pulse of output from femto-second laser: 1000 hertz of repetition rates, pulse width are that 50 femtoseconds, centre wavelength are 800 nanometers, horizontal linear polarization.They impinge perpendicularly on thickness after completely reflecting mirror and neutral filter is on the non-linear frequency-doubling crystal of BBO of 1 millimeter, and is that 400 nanometer frequency-doubled signals and residue centre wavelength are the mixing dual wavelength femto-second laser pulse of 800 nanometer fundamental frequency signals based on I class o+o → e phase matched mode producing output center wavelength.The transmission of both conllinear is also incided on dichroscope with 45° angle, obtains to realize light beam through 4 x Microscope Objectives again after different reflection efficiencies and focus on.By controlling three-dimensional precise mobile platform, sample surfaces is moved to 300～600 microns of distances before laser spot, and with the sweep speed of 0.01～0.4 mm/second at mobile example in the plane vertical with direction of beam propagation, finally realize the quick preparation of two-dimension periodic submicron particles array structure at sample surfaces.
Light channel structure as shown in Figure 2, the femtosecond laser 2 that femto-second laser 1 produces forms two laser pulses after beam splitter 11, then enter respectively two different light paths, wherein the femtosecond laser in an arm light path just arrives dichroscope 7 after neutral filter 4, the femtosecond laser of another arm light path enters time regulatable delay line 12 after completely reflecting mirror 3 and neutral filter 4, then the elapsed time postpones rear vertical irradiation to BBO frequency-doubling crystal 5, arrive dichroscope 7 through optical filter 13 more afterwards, two-way laser becomes respectively the dual wavelength femto-second laser pulse of conllinear transmission after dichroscope 7 transmissions and reflection, they after optical element 8 focuses on vertical irradiation to metallic target sample 9 surfaces that are fixed on three-dimensional precise mobile platform 10, induction forms the submicron particles array structure that two-dimension periodic distributes.
Wherein, 1000 hertz of the repetition rates of exporting from femto-second laser, pulse width is 50 femtoseconds, centre wavelength is the horizontal linear polarization femto-second laser pulse of 800 nanometers, the light path that forms the femto-second laser pulse that two energy are equal to and enter respectively two different directions after beam splitter is propagated, wherein the femtosecond laser in an arm light path is only to obtain suitable intensity regulation and control by attenuator, femtosecond laser in another arm light path is on the non-linear frequency-doubling crystal of BBO of 1 millimeter to thickness by vertical irradiation after time regulatable delay line, and be that 400 nanometers and centre wavelength are the mixing dual wavelength femtosecond laser of 800 nanometers based on I class o+o → e phase matched mode producing output center wavelength, then adopt 400 nanometer optical filters that thereby basic frequency laser is filtered and realizes the transmission of only having frequency multiplication femtosecond laser.The different wave length femto-second laser pulse of propagating in two arm light paths is finally realized conllinear transmission after bundling device, then after 4 x Microscope Objectives focus on vertical irradiation to sample surfaces.By controlling three-dimensional precise mobile platform, sample surfaces is moved to 300～600 microns of distances before laser spot, and with the sweep speed of 0.01～0.4 mm/second at mobile example in the plane vertical with direction of beam propagation, finally realize the quick preparation of two-dimension periodic submicron particles array structure at sample surfaces.
On light path basis in example 1, adopt neutral filter that the fundamental frequency femtosecond laser power inciding on bbo crystal is decayed, and the azimuth that rotates bbo crystal obtains maximum shg efficiency, now realize crystal o axle parallel with incident basic frequency laser polarization direction, thereby cause residue 800 nanometer lasers of exporting thereafter to keep original linear polarization, and 400 nanometer double-frequency lasers are also linear polarization, and both polarization directions are mutually vertical.After dichroic mirror reflects, the general power of dual wavelength femtosecond laser is 2 milliwatts, and sample surfaces is placed on to the front 400 microns of positions of laser spot.Figure 3 shows that Sample Scan speed obtains the scanning electron microscopy picture of processing effect while being 0.04 mm/second, wherein multiplication factor is respectively 20,000 and 60,000 times.Known from this figure: the oval metallic particles structure of formation presents obvious two-dimensional and periodic array distribution, be respectively Λ=616 nanometer and 236 nanometers along the space periodic of horizontal and vertical arrangement, the size of oval particle on both direction is approximately Φ=(448,230) nanometer.
Embodiment 4
On the device basic of example 1, it is constant that the experiment parameters such as dual wavelength femtosecond laser general power, sample position and the sweep speed on material surface are incided in maintenance, but now by the azimuth turn bbo crystal perpendicular to the plane internal rotation of incident laser, make its o axle with respect to the run-off the straight of incident basic frequency laser linear polarization, thereby cause the polarization direction of exporting double-frequency laser to be rotated, and also there is respective change in shg efficiency thereupon; In addition, because the angle of frequency-doubling crystal o axle and incident basic frequency laser polarization direction is now not equal to zero, in frequency multiplication process, incident basic frequency laser can produce the orthogonal e light in polarization direction and o light component in crystal, thereby the polarization characteristic of the residue basic frequency laser of impact from crystal outgoing, now it becomes elliptical polarized light.Therefore,, although say in the dual-wavelength laser general power from bbo crystal outgoing in such cases and do not change, wherein power ratio and the polarization state etc. of fundamental frequency and double-frequency laser all change.Figure 4 shows that in the time that rotation bbo crystal o axle and incident ray polarization direction angle are respectively θ=-25 ° and 35 °, the two-dimensional periodic structure forming on metal molybdenum surface distributes, there is contrary/clockwise inclination with respect to the situation in example 3 in the space arrangement direction of array structure wherein, and the two-dimensional space cycle is respectively Λ=(682,284) nanometer and (698,290) nanometer.
On light path basis in example 2, first the fundamental frequency femto-second laser pulse of laser instrument output is entered to two different time delay light paths after beam splitter, wherein in an arm light path, place bbo crystal and adopt filtering technique to realize the output and the propagation that only there are frequency multiplication femtosecond laser, and the transmission that another arm light path keeps original fundamental frequency femtosecond laser, both are converted into conllinear transmission means by bundling device, and after common optical element focuses on vertical irradiation on metal sample surface.Adjust that two arm dual wavelength femtosecond lasers are linear polarization and polarization direction is mutually vertical, wherein the power ratio of frequency multiplication and basic frequency laser is about 2:1, and the basic frequency laser that arrives sample surfaces is-10 psec < Δ τ <220 psecs with respect to the time delay scope of double-frequency laser.Figure 5 shows that general power is that the two-dimentional sub-wavelength structure that 6 milliwatts, 400 nanometer double-frequency lasers form while delaying 56 psec on metal molybdenum surface distributes, the cycle is respectively Λ=654 and 239 nanometers.
The above is only the preferred embodiment of the present invention, it should be pointed out that for those skilled in the art, is not departing under the prerequisite of original inventive principle, can also do some improvement and and change.If the basic preparation principle of design is identical with this method, these improvement and variation also should be considered as in protection scope of the present invention.
Claims (8)
1. dual wavelength femtosecond laser is prepared the method for two-dimension periodic metallic particles array structure, it is characterized in that the concrete steps of the method are as follows:
The first step, the making of metallic target sample and fixing
Metal solid target surfaces is carried out after mechanical grinding and polishing, totally obtain metallic target sample with deionized water ultrasonic cleaning, then in air ambient, metallic target sample is fixed on three-dimensional precise mobile platform, and realizes the precision in space three-dimensional (x-y-z) direction to sample by computer control and move;
Second step, the obtaining and transmit of dual wavelength femtosecond laser
By by the femto-second laser pulse vertical irradiation of laser instrument output to BBO nonlinear crystal, obtain the dual wavelength femto-second laser pulse that fundamental frequency and frequency-doubled signal mix output, then by both through conllinear fixed light path or along separate routes after the transmission of time variable delay light path, by same concentrating element with conllinear mode vertical irradiation at metallic target sample surfaces;
The 3rd step, the adjustment of metallic target sample surfaces
Control three-dimensional precise mobile platform, above-mentioned metallic target sample can be moved along vertically carrying out precision with the direction that is parallel to laser beam, adjust metallic target sample surfaces gradient simultaneously and make metallic target sample finished surface keep mutually vertical with laser propagation direction all the time in whole processing moving process;
The 4th step, concentrating element focal position determine
Selecting incident femtosecond laser power is 10 milliwatts, then, along the progressively mobile example of direction that is parallel to beam propagation, forms serial ablation pit at metallic target sample surfaces, and determines according to the situation of change of ablation dimple size the focal position that focuses on femtosecond laser beam;
The 5th step, the location of metallic target sample surfaces
Regulate three-dimensional precise mobile platform that metallic target sample surfaces is moved in 300～600 micrometer ranges in focus front along contrary direction of beam propagation from the focal position of concentrating element;
The 6th step, the preparation of two-dimension periodic array structure
Guaranteeing that double-colored femto-second laser pulse all can be irradiated in sample surfaces situation through concentrating element, controlling three-dimensional precise mobile platform makes metallic target sample in the plane perpendicular to beam direction, carry out two-dimensional movement scanning, and by regulating the distance between fundamental frequency and double-frequency laser power, polarization state, sample surfaces and focus, distribute thereby prepare different two-dimension periodic array of particles at metallic target sample surfaces.
2. method according to claim 1, is characterized in that exporting and impinge perpendicularly on from laser instrument the femto-second laser pulse that frequency-doubling crystal, laser signal is linear polarization.
3. method according to claim 1, it is characterized in that the concrete grammar that obtains dual wavelength femtosecond laser described in second step is: the femto-second laser pulse of laser instrument output is converted into the dual wavelength femtosecond laser that fundamental frequency and frequency-doubled signal are exported simultaneously by the non-linear frequency doubling technology based on bbo crystal, and realize the regulation and control to double wave laser polarization state by the azimuth of rotation bbo crystal.
4. method according to claim 1, it is characterized in that adopting described in second step conllinear fixed light path to realize the transmission of dual wavelength femtosecond laser and the concrete grammar that focuses on is: after dichroic mirror reflects, obtain energy attenuation in various degree from the dual wavelength femtosecond laser of frequency-doubling crystal output, then both after same optical element focuses on vertical irradiation at metallic target sample surfaces.
5. method according to claim 1, is characterized in that adopting the method for time variable delay light path acquisition dual wavelength femtosecond laser to be along separate routes described in second step:
(1) based on Michelson's interferometer principle, by the time delay light path that enters two different directions after the femto-second laser pulse beam splitting of laser instrument output, wherein in an arm light path, make only to have the output of frequency multiplication femtosecond laser by employing BBO frequency-doubling crystal and spectral filtering technology, and the transmission that another arm light path keeps original incident femtosecond laser; In addition, realize the energy adjustment to dual wavelength femtosecond laser by place attenuator in every arm light path;
(2) dual wavelength femtosecond laser is after two arms time variable delay light path separately, close and be converted into upper separate front and back of time after bundle but the transmission means of conllinear spatially by dichroscope, and focus on and be radiated at metallic target sample surfaces through common optical element;
(3) the variable optical path delay wire system of adjusting two arm light paths, makes the basic frequency laser that is irradiated to metallic target sample surfaces be about-50 psec < Δ τ <260 psecs with respect to double-frequency laser burst length delay scope.
6. according to the method described in any one in claim 1 to 5, it is characterized in that the metallic target sample motion scan speed described in the 5th step is 0.005 mm/second to 0.4 mm/second.
7. according to the method described in any one in claim 1 to 5, it is characterized in that preparing in two-dimensionally periodic structure process, in the time that dual wavelength femtosecond laser is linear polarization, required frequency multiplication and basic frequency laser power ratio scope are 1< γ <7; When frequency multiplication femtosecond laser is linear polarization and fundamental frequency femtosecond laser while being elliptical polarization, the power ratio scope of required frequency multiplication and basic frequency laser is about 0.8< γ <3; And can realize the regulation and control of the inclination within the scope of ± 35 ° to particle array structure orientation.
8. according to the method described in any one in claim 1 to 5, it is characterized in that the two-dimension periodic array structure of preparing at metallic target sample surfaces is actually by the cycle striped of two mutually perpendicular directions formed in space crossed composition, wherein long period variation scope is 230～300 nanometers, variation of short period scope is 580～640 nanometers, and the metal particle size excursion intersecting to form is 200～500 nanometers.
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