CN103842875B - Optical image stabilization based on MEMS - Google Patents

Optical image stabilization based on MEMS Download PDF

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Publication number
CN103842875B
CN103842875B CN201280047680.1A CN201280047680A CN103842875B CN 103842875 B CN103842875 B CN 103842875B CN 201280047680 A CN201280047680 A CN 201280047680A CN 103842875 B CN103842875 B CN 103842875B
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China
Prior art keywords
actuator
photographing unit
lens
tangential
ois
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Active
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CN201280047680.1A
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Chinese (zh)
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CN103842875A (en
Inventor
R·C·古铁雷斯
R·J·卡尔韦特
X·刘
P·K·凌
J·A·门德斯
C·扎哈里亚
A·F·德林巴雷昂
P·G·比焦伊
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DigitalOptics Corp MEMS
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DigitalOptics Corp MEMS
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Publication date
Priority claimed from US13/247,895 external-priority patent/US9019390B2/en
Priority claimed from US13/247,906 external-priority patent/US8855476B2/en
Application filed by DigitalOptics Corp MEMS filed Critical DigitalOptics Corp MEMS
Priority to CN201610905935.3A priority Critical patent/CN106569310B/en
Publication of CN103842875A publication Critical patent/CN103842875A/en
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    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/02—Mountings, adjusting means, or light-tight connections, for optical elements for lenses
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/0841—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting element being moved or deformed by electrostatic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/64—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image
    • G02B27/646—Imaging systems using optical elements for stabilisation of the lateral and angular position of the image compensating for small deviations, e.g. due to vibration or shake
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B5/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B5/02—Lateral adjustment of lens
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/681—Motion detection
    • H04N23/6812—Motion detection based on additional sensors, e.g. acceleration sensors
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04N—PICTORIAL COMMUNICATION, e.g. TELEVISION
    • H04N23/00—Cameras or camera modules comprising electronic image sensors; Control thereof
    • H04N23/60—Control of cameras or camera modules
    • H04N23/68—Control of cameras or camera modules for stable pick-up of the scene, e.g. compensating for camera body vibrations
    • H04N23/682—Vibration or motion blur correction
    • H04N23/685—Vibration or motion blur correction performed by mechanical compensation
    • H04N23/687—Vibration or motion blur correction performed by mechanical compensation by shifting the lens or sensor position
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0007—Movement of one or more optical elements for control of motion blur
    • G03B2205/0015—Movement of one or more optical elements for control of motion blur by displacing one or more optical elements normal to the optical axis
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B2205/00—Adjustment of optical system relative to image or object surface other than for focusing
    • G03B2205/0053—Driving means for the movement of one or more optical element

Abstract

Providing a kind of photographing unit (800), this photographing unit (800) including: multiple MEMS electrostatic comb actuator (1 3), and each actuator can be used at least one lens is applied power；And optical image stabilization (OIS) algoritic module (805), it is operable to respond in the motion of photographing unit (800), orders multiple actuator (1 3) to activate at least one lens described.

Description

Optical image stabilization based on MEMS
Related application
This application claims filing date JIUYUE in 2011 28 days, the U. S. application of Application No. 13/247,906 and the applying date It it is the priority of the U. S. application of JIUYUE in 2011 28 days, Application No. 13/247,895.The content entirety these applied for merges Arrive herein.
Technical field
The disclosure relates generally to Optical devices, more specifically, relates to image stabilization based on MEMS (MEMS) System.
Background technology
Possess such as zoom, the automatically fast development of the cell phone cameras of focusing and high-resolution feature to have threatened Make user-friendly camera out-of-date.But, along with this miniature camera has transplanted million the highest picture element densities and zoom function, The picture quality produced is affected by hand tremor.Even if it practice, human user is attempted hardy, the most hand-held photograph Machine is the most also impossible, this is because staff has the natural vibration that peak value is between 7 to 11Hz.Photographing unit This about 10Hz tremble will according to the angular field of view of time of exposure and each image pixel to picture quality produce Increasing impact.The increase of the picture element density of cell phone cameras can introduce produce due to camera-shake more and more Image blurring.
Therefore, have been developed that the motion sensor based on MEMS for digital camera, to solve due to staff The image quality decrease trembleed and cause.Such as, gyroscope based on MEMS can be used for sensing the motion of photographing unit.In response to sense The motion measured, image stabilization system attempts mobile lens or imageing sensor, final by transporting to minimize or to eliminate Dynamic cause image blurring.But, produced actuating is to use traditional actuator to perform.
Therefore, this area needs image stabilization system based on MEMS.
Summary of the invention
First aspect according to the disclosure, it is provided that a kind of photographing unit, comprising: multiple electrostatic actuator；And optics Image stabilization (OIS) algoritic module, it is operable to respond to the motion in photographing unit, orders described in multiple actuator activation extremely Few lens.
Second aspect according to the disclosure, it is provided that a kind of image stability method, including: the motion of sensing photographing unit；Base In the motion sensed, determine the desired lens actuation for stable camera lens；Described desired lens actuation is turned It is changed to desired tangential actuating；And according to described desired tangential actuating, use multiple tangential actuator tangentially to activate at least One lens.
According to the third aspect of the disclosure, a kind of actuator devices, including: platform, it is elastically supported with planar Motion；Three or more actuators, each actuator is all connected to the periphery of described, and can be used to activating Time will act at the power in described plane and be tangentially applied to described；And external frame, its around and support described and Actuator.
By considering the following detailed description to some exemplary embodiments, carry out above-mentioned particularly when combine accompanying drawing Consider, it is possible to the novel actuator devices being better understood from the disclosure and the certain methods using this actuator devices upper Stating and some other feature and advantage, wherein, in one or more accompanying drawing illustrated, similar reference number is used for representing Similar element.
Accompanying drawing explanation
Fig. 1 is the plane graph utilizing the tangential exemplary image stabilizing device activated；
Fig. 2 A-2F is the exemplary image stabilizing device being shown with Fig. 1 to realize optical element in the plane flat Move and the vectogram of rotary motion；
Fig. 3 is the perspective view of the actuator in the device of Fig. 1；
Fig. 4 A is the partial plan layout of the cross one another finger piece of the comb part in the actuator of Fig. 3, and it shows Go out and launched actuator to carry out the finger piece before operation application；
Fig. 4 B is the partial plan layout of the cross one another finger piece of the comb part in the actuator of Fig. 3, and it shows Go out the finger piece after being launched by actuator；
Fig. 4 C is the comb part after comb part has been biased to operating position, in the actuator of Fig. 3 The partial plan layout of cross one another finger piece；
Fig. 5 is the plane graph of the actuator breech lock of Fig. 3, and it illustrates that described actuator breech lock engages with actuator rod is each The stage of kind；
Fig. 6 A-6C is the plane rotation between " stagnation " state and " work " state of the erecting bed in the device illustrating Fig. 1 The vectogram that transhipment is dynamic；
Fig. 6 D is in the plane graph of the erecting bed of dead state；
Fig. 6 E is in the erecting bed plane graph of duty；
The close-up illustration of the arm of the erecting bed of Fig. 6 D that Fig. 6 F is locked out；
Fig. 6 G is the close-up illustration of the arm of the erecting bed of Fig. 6 E not locked；
Fig. 7 is the block diagram of the image stabilization system using tangential actuator；
Fig. 8 is the block diagram of the embodiment of the system of Fig. 7, wherein, realizes optical image stabilization in driver IC Algorithm；
Fig. 9 shows the more details of the driver IC of Fig. 8；
Figure 10 is the flow chart that the image stabilization performed by the system of Fig. 8 and 9 processes；
Figure 11 is the block diagram of the embodiment of the system of Fig. 7, wherein, realizes optical imagery in image processor integrated circuit Stable algorithm；
Figure 12 shows driver and the more details of image processor integrated circuit of Figure 11；And
Figure 13 is the flow chart that the image stabilization performed by the system of Figure 11 and 12 processes.
Detailed description of the invention
Electrostatic lens actuation based on MEMS is utilized to provide effective image stabilization system.In one embodiment, Only three actuators can be placed in around the optical element of such as lens, with steady by utilizing tangential actuating to realize image Fixed.Turning now to accompanying drawing, image stabilizing device 100 includes the centre bore 105 limited by circular mounting platform 110, and it is used for accommodating Such as lens or the optical element of battery of lens (not shown).It is denoted as 3 actuatings of actuator 1, actuator 2 and actuator 3 Device is symmetrically disposed in around hole 105.Platform 110 is activated in the way of tangential actuating by each actuator.In other words, often The direction vector that the linear displacement 120 that individual actuator introduces limits is tangent with the circle surrounding center, hole 118.Such as, linear displacement 120 is tangent with the circle that erecting bed 110 limits.
The tangential actuating of generation it is better understood with reference to the cartesian coordinate system limited by the center 118 in hole 105.Platform 110 and actuator 1,2 and 3 be positioned in the plane limited by x and y direction.Z-direction vertically highlights from the center 118 of plane.As Used herein, the tangential displacement as indicated by direction 115 being considered as each actuator is forward.With regard to this respect For, each actuator thus allows for positively and negatively displacement.As shown in Figure 2 A, if each actuator 1,2 and 3 draws Entering identical displacement, wherein, what actuator 1 and 2 introduced is negative sense displacement tangentially, and actuator 3 introducing is tangentially Positive-displacement, then the tangential forward activated in the x-direction of the platform 110 produced.Contrary, as shown in Figure 2 C, if actuator 1 With 2 it is all forward and actuator 3 is equal negative sense, then the tangential negative sense activated in the x-direction of the platform 110 produced.Alternatively, As shown in Figure 2 B, if actuator 3 does not introduce displacement, actuator 1 negatively activates given amount, and actuator 2 is positively Activate identical amount, the then final forward activated in the y-direction of platform 110.Contrary, if actuator 3 does not introduce displacement, and cause Dynamic device 1 and 2 switching positively and negatively displacement as shown in Figure 2 D, the then final negative sense activated in the y-direction of platform 110.With this Mode, tangential actuating can produce x and the y displacement of any desired size in the moving range of actuator for platform 110.
Tangential actuating can also introduce the platform 110 rotation around z-axis.Such as, in Fig. 2 E, if each actuator 1,2 and 3 All introduce the negative sense displacement of formed objects, then the final of platform 110 activates as turn clockwise (negative θ).Contrary, if in Fig. 2 E Actuator the most as shown in Figure 2 F reverse, the most all of tangential actuating is all forward, then final actuating of platform 110 is (positive θ) is rotated counterclockwise around z-axis.By this way, platform 110 both can desirably translate at x and y plane, it is also possible at θ Direction rotates.
The tangential displacement that each in actuator 1 to 3 introduces can be represented in local coordinate system.Such as, can will activate The device 3 tangential displacement in x direction is appointed as at L3Displacement on direction, it is identical that it has the direction that direction 115 with Fig. 1 represents Forward rule.Being similar to, the tangential displacement of actuator 1 and 2 can be respectively by local linear coordinate L1And L2Represent.Depend on from Center 118 is to the most tangential radial distance R activating point of each actuator, and actuator 1 is in dimension L1In displacement, actuator 2 at L2In displacement and actuator 3 at L3In displacement can be directed to platform 110 at x and the translation of y-dimension and platform 110 with θ The rotation at angle.In this respect, coordinate transform can show as follows:
L 1 = RSinθ - 1 2 X + 3 2 Y
L 2 = RSinθ - 1 2 X + 3 2 Y
L3=RSin θ+X
Coordinate transform above assumes that the neutral position of lens is positioned at initial point, but, if neutral position deviation from origin, then Correspondingly it can be modified.Utilize these coordinate transforms, the shake due to photographing unit detected or other expect not To physical perturbation and translation on x, y plane of the platform 110 that causes or rotate and can be solved by corresponding tangential actuating. Any suitable actuator (such as, pectination or gap enclosed actuator) is used equally to construct actuator 1,2 and 3.Pectination partially Actuator possesses good mobility, such as, +/-50 microns, can be such as Application No. 12/946, and 670(is hereinafter referred to as ' 670 Application), realize as discussed in the commonly assigned U.S. Patent application in filing date on November 15th, 2010 described partially Comb actuator, is merged into the content of this U.S. Patent application herein by way of reference.In this embodiment, each Actuator has standing part 121 and moveable part 122.In the image stabilizing device 100 of Fig. 1, standing part 121 is with outer Framework 125 engages, and includes multiple fixing comb support part 112 radially extended to moveable part 122.It is similar to, Moveable part 122 includes multiple comb support part 113 radially extended to standing part 121.Comb support part 112 and 113 Alternate to support multiple comb part 114.For the sake of clarity, Fig. 1 is shown without comb part 114, but at figure Shown in the close-up illustration of 4A to 4C.
As seen in further detail in figure 3, each actuator 1 to 3 is driven by corresponding bending part 106 Dynamic platform 110.In order to allow to move from relative actuator, each bending part 106 can be the most pliable and the toughest in radial direction, and Tangential direction (corresponding to the linear displacement 120 of Fig. 1) relative stiffness.Such as, bending part 106 can include having and tangential direction The V-type folded bent portions of the longitudinal axis of alignment.Such V-type sweep allows to radially bend, and for displacement 120 Relative stiffness.In this manner it is achieved that " virtual kinetic measurement " for platform 110 arranges, it can be in resting state essence The true ground centre of location 118, it is also possible to realize the translation of desired x-y plane during image stabilization and rotate with θ angle.
The linear expansion described in the application of ' 670 can be used such as to realize using MEMS technology and realizing actuator 1 to 3 The manufacture of comb part 114 of biasing deployed condition.As seen in the close-up illustration at Fig. 4 A, can the most mutually hand over The cross one another finger piece constituting each comb part 114 is manufactured under the state of fork.In other words, the finger of comb part 114 Shape thing is initially set to so that the fixing and removable comb support part 112 and 113 being associated separates about in comb part 114 The length of finger piece.Therefore, the whole comb part 114 being in undeployed configuration in Fig. 4 A is applied voltage difference will not produce Platform 110 is relative to the linear motion in any plane of framework 125, from any phase without producing the lens being connected to it on X, Y or θ motion answered.In order to leave actuating space, each comb part 114 all should separation as shown in Figure 4 B opening up Open.
As shown in Figure 4 B, in one embodiment, may be accomplished by this expansion: by according to arrow 400 Comb support part 113 is moved (thus moveable part 122 of mobile Fig. 1) to expanded position, this expanded position and phase by direction The fixing comb support part 112 of association is coplanar, be parallel to each other and separate with selected distance, and subsequently by moveable part 122 are fixed on expanded position, to carry out substantially coplanar, the motion of straight line relative to fixed component 121.As shown in Figure 4 C, when When so launching, apply whole comb part 114 and remove suitable voltage difference to cause the movable part of resilient support Points 122 do substantially straight line and coplanar shifting with the direction toward and away from standing part 121 as shown in double-head arrow 405 Dynamic, thus cause the element being coupled to platform 110 to do corresponding X, Y and/or θ Z motion.
Have for moveable part 122 being deployed into expanded position and being locked or be fixed on the multiple of expanded position Different method and apparatus.Such as, as it is shown on figure 3, a kind of method of deploying relate on framework 125 coplanar, off-centered Breech lock 300 and fulcrum 304.Breech lock 300 is connected to framework 125 by breech lock bending part 306.Coplanar deployment rod 308 is passed through Launch bending part 310 and be connected to moveable part 122.Deployment rod 308 has the CAM table being configured to engage with breech lock 300 Face 312.It addition, bar 308 has the recess engaged with fulcrum 304, so that bar can rotate relative to fulcrum 304.
In exemplary expansion, as it is shown on figure 3, be applied to may move by acceleration pulse according to the direction of arrow 314 Part 122, and make framework 125 keep static.This pulse makes deployment rod 308 rotate around fulcrum 304 towards breech lock 300.As As can be seen from Figure 5, deployment rod 308 makes cam face 312 engage with breech lock 300 around the rotation of fulcrum 304.? Just, bar 308 is positioned at not deployed position 501, but begins to rotate to centre position 502, so that cam face 312 biased latch 300 and stretch out breech lock bending part 306.For the sake of clarity, it is shown that launching the most section view of bending part 310 Figure.The rotating continuously of bar 308 makes breech lock bending part 306 be pulled down by breech lock 300 to return to deployment rod 308 and be fixed on locking Position 503.Make bar 308 rotate to produce and move the acceleration pulse of moveable part 122, can by little probe or its His MEMS device is inserted into draw ring 315(Fig. 3) in and correspondingly activate.In an alternate embodiment of the invention, it is possible to use such as apply for Day is that the capillary tube described in the commonly assigned U.S. Patent application of on November 15th, 2010, Application No. 12/946,657 is made It is used for launching moveable part 122, by way of reference the content of this U.S. Patent application is merged into herein.Similar , ' 670 application describes optional expansion and the structures and methods of locking.
Launch to may result in comb part 114 relative fully opening as shown in Figure 4 B with locking.At this position, pars pectinata Part 114 is only capable of and effectively shrinks rather than extend.In this respect, shrinking and extend is all to realize relevant actuating as above Required for the positively and negatively motion of device 1,2 and 3.Therefore, the default conditions during image stabilization can relate to as realizing such as figure Medium interlaced shown in 4C and be applied to the voltage to a certain degree of whole comb part 114.By this way, pectination is worked as When voltage is less than the acquiescence running voltage of Fig. 4 C, comb part 114 will extend.Contrary, when pectination voltage is relative to acquiescence When increasing for running voltage, comb part 114 will shrink.In this way it is possible to applied forward by actuator 1,2 and 3 Activate with negative sense, as indicated by arrow 405.
Before whole comb part 114 is applied default voltage, actuator can be at " start mobile ", " shutdown " or " stagnate " state.In dead state, image stabilization is inoperative, but center 118 is unaffected.As discussed according to Fig. 2 F , the suitable displacement of each in actuator 1,2 and 3 produces rotating forward with θ angle, but will not produce at x-y The translation of plane.Thus, this displacement at each comb part 114 be enough to make from the still inactive shape of the expansion shown in Fig. 4 b State is transformed into the acquiescence duty shown in Fig. 4 C.Fig. 6 A shows that actuator 1,2 and 3 rotates to be transformed into work from dead state Dynamic optical image stabilization state.As shown in Figure 8 B, after comb part 114 is biased to their running voltage, Alternatively the running voltage of each in actuator 1,2 and 3 is carried out controllable increase or reduce will cause as with On according to the motion (the most correspondingly moving in center 118) of the determination of the platform 110 described in Fig. 2 A-2F.In order to save energy consumption, when When not carrying out imaging, actuator 1,2 and 3 can turn again to their inactive state as shown in Figure 6 C.
With reference to Fig. 6 D to 6E, actuator 1,2 and 3 be may be better understood from their dead state to motion optical image Stable expansion.The state of actuator device power cutoff can be advantageously employed, to protect equipment not by acting on platform Impulsive force and plane concave change effect and the impact of the bending between equipment nonmobile phase.Therefore, in certain embodiments, one Or multiple lock arms 308 may be connected to the periphery of platform 110, wherein, each in one or more lock arm 308 All there is locking member 428 placed on it, and corresponding multiple complementary locking member 430 can such as be connected to external frame Frame 125, and when platform 110 is arranged on stagnation or during power cutoff state by round, described complementary locking member 430 is set It is set to the complementary locking member of corresponding with on lock arm 308 428 engage.Fig. 6 F is locked out parts 430 and complementary lock The view that limiting-members 428 engages, and Fig. 6 G shows the state that these parts launch.In Fig. 6 G, dotted outline 432 is described Lock arm 308 in running order during activated apparatus carries out image stabilization operation and the week of locking member 428 end The range of movement on limit, and show during this work, between arm 308, locking member 428 and complementary locking member 430 not Interference can be produced.
Fig. 7 shows the block diagram using the tangential control system 700 activating and controlling image stabilization.In image stabilization side Face, difference photographing unit intended motion and unintentionally shake be common.Such as, user may have a mind to the movement of 90 degree In the range of mobile cameras to shoot different object.Should not detect this motion having a mind to, otherwise image stabilization system will Lens 90-degree rotation can be made to compensate this motion having a mind to, and this is that impossible to complete is also undesirable task.A kind of district The method that other photographing unit is shaken unintentionally is the tracking loop of the intended motion using prediction photographing unit.In one embodiment, Control system 700 includes tracking filter, such as, predicts the card of current lens position based on previously measured camera motion Thalmann filter 705.
Kalman filter 705 needs that camera motion carries out some and measures to predict which is that photographing unit has a mind to transport Dynamic, rather than it is not intended to shake.Therefore, some ginsengs on photographing unit measured by the inertial sensor of such as gyroscope 710 based on MEMS The speed of examination point, the center, hole 118 that reference point is discussed such as before.Can be by the pitching such as carried out by gyroscope 710 and deflection Measure the center 118 obtained speed on x, y plane and be respectively labeled as xgAnd yg.Can be by analyzing what camera images obtained This inertia measurement is supplemented by estimation.Therefore, camera images processor 720 can also be to center 118 at x, y Speed in plane is estimated, the center 118 speed on x, y plane is respectively labeled as xcAnd yc.Kalman filter from Gyroscope 710 and camera processor 720 receive velocity estimation and are filtered them, with correspondingly to lens centre 118 Speed on x, y plane is predicted.Kalman filter can be respectively labeled as x to the prediction of reference position speed0With y0.It is filtered removing gyroscopic drift to velocity estimation by high pass filter 725, to described speed in integrator 730 Estimation is integrated, and in amplifier 735, described velocity estimation is multiplied by suitable zoom factor to obtain location estimation Value 740.In this respect, estimated value 740 represents the lens centre of Kalman filter 705 prediction in the case of there is not shake The desired location of 118.Difference between estimated value 740 and the lens position of reality is considered shake, and should be by figure As stabilizing control system 700 compensates.Should be appreciated that the embodiment of control system 700 can be embodied as not including this prediction Tracking loop.Such as, the inertia measurement that gyroscope 710 is carried out can be only high-pass filtering, to provide intended photograph The rough estimate of motor speed.This velocity estimation can be carried out integration as above to obtain location estimation value 740.
In order to obtain the lens position (or equivalence, the position of some reference point (such as, center 118)) of reality, often Individual actuator is all associated with position sensor.Such as, actuator 1 can be with the L of discussion before sensing1The position sensing of displacement Device 741 is associated.In this respect, position sensor 741 can sense the electric capacity of whole comb part 114 with to L1Displacement is carried out Estimate.Optionally, it is possible to use other kinds of sensor, such as, Hall element.Being similar to, actuator 2 and 3 is with corresponding Position sensor 742 and 743 be associated.Thus position sensor 742 senses L2Displacement, and sensor 743 senses L3Displacement. It is digitized these displacements sensed subsequently processing and being sent to coordinate converter in corresponding analog-digital converter 745 750.By the formula discussed before backstepping, make θ=0, will can tangentially activate L1To L3Be converted to sense position xs、ys.Make subsequently The difference between the position of sensing and the position of Kalman filter prediction is determined by adder 755.Can be subsequently at controller 760 It is filtered with output to adder 755 in compensator 765, to obtain the x and y coordinates of final lens, wherein, it should right Lens carry out activating to compensate the shake of photographing unit.
X and y coordinates is converted to tangential coordinates L according to equation as above (making θ=0) by transducer 7701、L2And L3.Turn Parallel operation 770 output thus represent the desired actuating of actuator 1 to 3.Kalman filter prediction and final desired cause Dynamic generation is carried out with relatively low data rate, this is because need to carry out substantial amounts of computing.But, by actuator 1 to 3 The actual actuation being driven into expectation degrees of actuation can use of a relatively high data rate.Therefore, the demarcation line 771 in Fig. 7 Represent and the numeric area of control system 700 is divided into relatively high and relatively low data rate.It is similar to, cut-off rule 772 table Show and control system 700 is divided into numeric area and simulated domain.
Corresponding adder can be used to determine between desired degrees of actuation and actuator 1,2 and the actual actuation of 3 Difference.Corresponding controller 780 the most correspondingly determines suitable control signal for its actuator.Digital-to-analogue can be used subsequently The digital controlled signal of generation is converted to analog control signal by transducer (DAC) 790.As known in the art, static comb Shape actuator usually requires that a liter high-voltage level, such as, the liter high-voltage level obtained by electric charge pump.Accordingly, in response to The analog control signal produced in DAC790, is driven each in actuator 1 to 3 by corresponding drive circuit 790 Dynamic.By this way, control system 700 can use the gyroscope 710 sensing camera motion in cartesian coordinate system, with Three tangential MEMS actuator are the most only used to obtain image stabilization.
Can realize utilizing the image of system 700 by multiple optional embodiments.In this respect, can will filter from Kalman Ripple device 705 is OIS algoritic module to the digital unit of transducer 770 and 750 and the aggregated label of signal path.Can be various Integrated circuit structure realizes this OIS algoritic module.As shown in Figure 8, an embodiment of photographing unit 800 includes that being positioned at MEMS drives OIS algoritic module 805 in dynamic device integrated circuit (IC) 810.Photographing unit 800 includes as above for image stabilization MEMS tangential actuator and for automatically focusing on (AF) and scaling the actuator of purpose.These MEMS actuator are intensively shown For MEMS module 815.Driver IC 810 utilizes from the AF order 820 of AF driver 830 with from optical image stabilization (OIS) MEMS module 815 is driven by the tangential actuation commands of the plane of driver 835 825.MEMS module 815 includes position Sensor, such as, the position sensor discussed in conjunction with Fig. 7, such driver IC 810 can be with receiving plane tangential actuator position 840。
Such as I2Driver IC 810 is connected to other camera components by the bus of C bus 845.It will be appreciated, however, that Other bus protocols can be used.In photographing unit 800, gyroscope 710, imager 720, image processor 850 and micro-process Unit (MCU) 855 is all connected to I2C bus 845.Due to I2C agreement is MS master-slave agreement, so the module in driver IC 810 The position of 805 provides relatively low delay, will be further described it herein.Fig. 9 shows the final control of photographing unit 800 Loop processed.Bus master can be ISP or MCU represented by primary module 900.OIS algoritic module 805 is the version simplified This, this is because have ignored tracking filter, high pass filter is filtered by pitching and the yaw rate exporting gyroscope 710 Ripple estimates the intended motion of photographing unit.Therefore the data stream in MS master-slave bus be typically since equipment to main equipment or oneself Main equipment, to from the data stream of equipment, so the speed of rotation of gyroscope 710 is first delivered to primary module 90, and is subsequently transported to Driver IC 810.In this respect, primary module 900 controls gyroscope 710 and driver IC 810.For the sake of clarity, only at OIS Algoritic module 805 shows the passage of single merging.Therefore, the transducer 770 and 750 in transducer 920 representative graph 7.Profit Actual and desired lens position is changed relative to the neutral position 925 of lens with transducer 920.
Figure 10 shows the data stream produced in bus 845.Image stabilization necessarily consumes some electric currents, it is therefore desirable that Only just carrying out image stabilization process when user just shoots digital photograph.At that time, in initial step 1000, primary module was utilized 900 as I2C bus master, OIS data stream starts.At that time, as shown in step 1005, gyroscope 710 can start comparison The motion of camera carries out inertia measurement, and OIS driver 835 can order MEMS actuator 815 be transformed into from dead state Active state.In step 1010, primary module 900 reads the gyro data of 6 bytes subsequently, so that can be in step 1015 Write data into driver IC.In step 1020, OIS algoritic module 805 can be it is later determined that the actuating of suitable size be to solve The certainly problem of camera-shake.If user has been completed shooting digital photos as determined by step 1025, then exist Step 1030 terminates this flow process.Otherwise, step 1010 to 1025 is repeated.The call duration time of one circulation (step 1010 to 1020) Depend on bus clock cycle and data width.If bus 845 can accommodate 3 bytes in the clock cycle of each 10us, Algorithm operation time needed for then circulation time is 10us*2*6*8+ step 1020, when it is equivalent to 0.96ms+ algorithm computing Between.
Figure 11 shows optional control structure, and wherein, OIS algoritic module 805 is positioned at ISP850.It is similar with Fig. 9, Automatic focus module 940 in ISP850 controls the AF driver 830 in driver IC 810.Driver IC 810, gyroscope 710, imager 720, ISP850 and MCU855 use I2C bus 845 communicates.Figure 12 shows the control ring of generation Road.OIS algoritic module 805 is also the version simplified, this is because omited tracking filter, high pass filter 910 is by top Pitching and the yaw rate of spiral shell instrument 710 output are filtered estimating the intended motion of photographing unit.ISP850 controls gyroscope 710 He Driver IC 810.For the sake of clarity, illustrate only the passage of the single merging of OIS algoritic module 805.
Figure 13 shows the data stream that the embodiment according to Figure 11 and 12 produces in bus 845.In response to live image Calling of screening-mode, in initial step 1300, utilizes ISP850 as I2C bus master, OIS data stream starts.Optional Ground, MCU855 can be as main equipment.As shown in the step 1305 carrying out with step 1300 or carrying out subsequently simultaneously, gyro Instrument 710 can start the motion to photographing unit and carry out inertia measurement, and OIS driver 835 can order MEMS actuator 815 It is transformed into active state from dead state.In step 1310, primary module 900 reads the gyro data of 6 bytes subsequently.Separately Outward, in step 1315, ISP855 reads the current lens position of 6 bytes from transducer 920.In step 1320, OIS algorithm Module 805 can be it is later determined that the actuating of suitable size be with the problem solving camera-shake.Then, in step 1325, The drive command of 6 bytes can be written to corresponding driver IC by ISP855.If as determined by step 1330 User has been completed shooting digital photos, then terminate this flow process in step 1335.Otherwise, step 1310 to 1325 is repeated.One The call duration time of individual circulation (step 1310 to 1325) depends on bus clock cycle and data width.If bus 845 can 3 bytes, then the algorithm computing needed for circulation time is 10us*3*6*8+ step 1320 is accommodated in the clock cycle of each 10us Time, it is equivalent to 1.44ms+ algorithm operation time.Therefore, in principal and subordinate's bus protocol system, make OIS calculate foregoing Method module 805 is positioned in IC driver 810 faster.On the contrary, OIS algoritic module 805 is placed in ISP850 then need extra Data move step.
As would be appreciated by the skilled artisan and according to application-specific, without departing substantially from the disclosure spirit and In the case of scope, numerous amendment can be made with the using method of actuator devices of this disclosure, material, equipment, configuration, replace Changing and change, based on this, the scope of the present disclosure should not limited by specific embodiments described and illustrated herein, this be because of Being only some examples enumerated for them, the scope of the present invention should be with claims included below and functional equivalent body thereof Completely the same.

Claims (19)

1. a photographing unit, including:
Multiple electrostatic actuators, each actuator is configured at least one lens is applied tangential force, wherein, each actuator Including: standing part, it is configured to relative to standing part moveable part of movement between expanded position and not deployed position And it is configured to the breech lock being locked in expanded position by moveable part, wherein, in expanded position, moveable part is used for Relatively fixed part carries out substantially coplanar, the motion of straight line；
Optical image stabilization (OIS) algoritic module, it is configured to respond to the motion of photographing unit, orders multiple actuator activation At least one lens described；And
Driver IC, this driver IC is operable to respond to drive cause in the order of OIS algoritic module Dynamic device.
Photographing unit the most according to claim 1, wherein, OIS algoritic module is configured to respond to the fortune of described photographing unit Dynamic, order multiple actuator tangentially to activate at least one lens described.
Photographing unit the most according to claim 2, farther includes:
The multiple position sensors corresponding with multiple actuators, actuator corresponding thereto measured by each position sensor Tangential displacement；And
Conversion module, its displacement that can be used to the tangential displacement from described position sensor is converted to lens, its In, described lens displacement is also responded by described OIS algoritic module.
Photographing unit the most according to claim 1, wherein, OIS algoritic module is integrated in driver IC, wherein, OIS algoritic module is configured to command-driven device integrated circuit and acceleration pulse is applied to moveable part, with by movable part Divide and be locked in expanded position.
Photographing unit the most according to claim 1, farther includes:
Imager, it is configured to be digitized the image obtained by least one lens described processing；And
Image processor integrated circuit, it can be used to process digitized image, and wherein, OIS algoritic module is integrated in institute State in image processor integrated circuit.
Photographing unit the most according to claim 1, wherein, described photographing unit is integrated in the mobile phone.
Photographing unit the most according to claim 6, wherein, described actuator is electrostatic comb actuator.
Photographing unit the most according to claim 7, farther includes:
For accommodating the circular platform of at least one lens described, wherein, multiple actuators include being symmetrically disposed in described circle Three actuators in the outside of platform.
Photographing unit the most according to claim 1, wherein, OIS algoritic module includes for predicting having a mind to of described photographing unit The Kalman filter of motion.
Photographing unit the most according to claim 9, farther includes:
Gyroscope, wherein, the pitching of the described gyroscope described photographing unit of measurement and driftage, and wherein, described Kalman filtering Device predicts the intended motion of described photographing unit based on measured pitching and driftage,
Wherein, OIS algoritic module is configured to the intended motion of photographing unit and the photographing unit of described Kalman filter prediction Unintentionally shake between difference and order at least one lens of multiple actuator activation.
11. photographing units according to claim 1, wherein, OIS algoritic module is many based on relatively low Data Rate Command Individual actuator, and wherein, described photographing unit farther includes at least one controller, and at least one controller described is used for base In the order of OIS algoritic module, with actuator described in of a relatively high data rate control.
12. 1 kinds of image stability methods, including:
Utilize the motion of gyroscope sensing photographing unit；
Based on the motion sensed, determine the desired lens actuation of stable camera lens；
Described desired lens actuation is converted to desired tangential actuating；
According to described desired tangential actuating, multiple tangential actuator is used tangentially to activate lens；
Before tangential actuating lens, in mobile multiple tangential actuator, the moveable part of each is to be locked in expansion position Put, thus relatively fixed part carries out substantially coplanar, the motion of straight line；
The camera motion sensed by described gyroscope is filtered, to provide the prediction in the precalculated position to lens；
Sense the tangential actuating of multiple tangential actuator；
Described tangential actuating is converted to current lens position；And
Current lens position is deducted, to provide the lens position caused due to camera motion unintentionally from predetermined lens position Put error, wherein, described desired lens actuation by process described in unintentionally camera motion stablize described lens.
13. methods according to claim 12, wherein, described filtering is Kalman filtering.
14. methods according to claim 12, wherein, described filtering is high-pass filtering.
15. methods according to claim 12, wherein, described tangential actuating is that MEMS electrostatic comb tangentially activates, and Wherein, by acceleration pulse is applied to moveable part so that the bar of moveable part engage with breech lock and by multiple tangentially In actuator, the moveable part of each moves to expanded position.
16. 1 kinds of actuator devices, including:
Platform, this is elastically supported planar to move, and wherein, what this included being positioned in plane is suitable to support optics unit The Plane Installation structure of part；
Three or more actuators, each actuator is all connected to the periphery of described, and can be used to activating Time will act at the power in described plane and be tangentially applied to described；
Bending part, actuator is connected to the periphery of platform by this bending part；
Wherein, described power is configured to when being applied on bending part, cooperates with arbitrarily translation planar and/or arbitrarily revolves Turn the movement affecting platform on direction；And
External frame, this external frame around and support described and actuator.
17. actuator devices according to claim 16, wherein, described, actuator and external frame are arranged to big On body coplanar with each other.
18. actuator devices according to claim 16, wherein, bending part includes having align with tangential direction vertical To the V-type folded bent portions of axle.
19. actuator devices according to claim 16, wherein, at least one actuator includes:
Standing part, this standing part engages with external frame, and includes multiple fixing comb support part, and
Including the moveable part of multiple comb support parts,
Wherein, the comb support part of moveable part and the fixing comb support part of standing part alternate, and can move Move and be partially configured as carrying out relative to standing part the movement of plane, straight line.
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