CN103837472B - Micro-cantilever deflection and scanning system and the scan method of the micro-cantilever array sensor based on multi-angle plane transmission mirror - Google Patents

Abstract

Micro-cantilever deflection and scanning system and the scan method of the micro-cantilever array sensor based on multi-angle plane transmission mirror, this system comprises: the plane transmission mirror group that a laser instrument, is arranged in a linear, plane transmission mirror quantity equates with the micro-cantilever quantity on micro-cantilever array sensor to be measured, and each plane transmission mirror forms different angles from horizontal plane; This system is by driving the plane transmission mirror of different angles to form a kind of distance element parallel rays generation systems, the laser beam that laser instrument sends irradiates every micro-cantilever free end in micro-cantilever array by distance element parallel rays generation systems, and utilize Optoelectronic Position Sensitive Detector to detect the signal of above-mentioned light, realize the detection to every micro-cantilever deflection situation on micro-cantilever array. The present invention can realize and utilize the irradiation of a laser instrument to every micro-cantilever, has eliminated the systematic error of bringing while detection due to various lasers, has realized the higher detection of accuracy.

Description

Micro-cantilever deflection and scanning system and the scan method of the micro-cantilever array sensor based on multi-angle plane transmission mirror

Technical field

The invention belongs to micro-beam detection field, particularly relate to the micro-cantilever battle array based on multi-angle plane transmission mirrorMicro-cantilever deflection and scanning system and the scan method of biographies sensor.

Background technology

The develop rapidly of the modern science and technology such as measurement, control and automation has greatly promoted entering of information technologyStep, human society has entered the information age. Sensor technology is letter as one of three large pillars of information technologyThe Main Means that breath obtains plays a part more and more important in the development of modern science and technology. Biochemical sensitiveDevice is the important component part in Modern Transducer Technology. At scientific research, food security, health care, environmentBe used widely in the aspects such as monitoring, industrial and agricultural production. Biochemical sensor is a kind of high specific, strongWith cheap analysis tool, it can detect target molecules under complicated background noise condition. Biochemical biographySensor is of a great variety, and character and form is different. In recent years, along with the appearance of MEMS (MEMS) technologyAnd development, for biochemical sensor provides some new selection and thinkings. Micro-cantilever is the simplest as oneMEMS device is subject to extensive concern recently.

Micro-cantilever sensing technology is the one developing rapidly after AFM and micro-system appearanceNew method for sensing. Micro-cantilever beam sensor, as the simplest micromechanical component, is micro-nano sensing technology alwaysThe focus of research. Micro-cantilever beam sensor can be measured in real time to having specific biochemical reaction parameter,In the time there is biochemical reaction on micro-cantilever surface, the upper and lower surface of micro-cantilever can produce stress difference and changes and makeMicro-cantilever produces flexural deformation. By Ear Mucosa Treated by He Ne Laser Irradiation micro-cantilever free end, utilize polished rod bar method micro-to everyAfter amplifying, the end displacement of cantilever beam through Optoelectronic Position Sensitive Detector, signal is surveyed, so rightThe biochemical reaction that micro-cantilever surface occurs is studied. Micro-cantilever beam sensor can be real-time, high as oneSensitivity, selectively novel method for sensing good and non-demarcation is applied in explosion gas, gas pressure, solutionHeavy metal ion, antibiotic, genetic test, protein conformation change, antigen-antibody binding reaction and enzymeThe detection of the directions such as catalytic process.

A large amount of single micro-cantilever biochemical sensors that use are owing to can only enter with a micro-cantilever at every turn at presentRow experiment, has wasted the plenty of time; And owing to needing the contrast of many group samples in biochemical reaction, this is just urgentNeed to realize the research that two many more than beam micro-cantilevers detect.

In paper (Cantileverarraysensors.MaterialsToday, 2005.8 (4): p.30-36.), scholar utilizes vertical cavity surface emitting laser device to provide 8 array light sources to micro-cantilever arrayIn 8 micro-cantilevers carry out sequential irradiation. The problem that this detection method exists is vertical cavity surface emitting typeThe spacing of laser optical interfascicular is fixed, therefore it can only carry out for the micro-cantilever array of certain spacing specificationDetect, and the relatively independent uniformity that can not ensure laser beam of each laser beam.

Previously for a kind of array micro-cantilever joist unit deflection angle measuring systems (publication number: 101261139),Adopt complex optical path to set up Fourier Transform System realization micro-cantilever drift angle has been detected, this system light pathComplexity is difficult for building.

At the system and method (publication number for micromechanics and nano-machine structure are detectedCN101278357A), in, adopt voice coil motor to drive laser instrument to realize every on micro-cantilever array micro-outstandingArm beam scans, and the mechanical oscillation meeting of voice coil motor causes the laser beam that laser instrument sends to produce error.

At paper (Javier, T., etal., Imagingthesurfacestressandvibrationmodesofamicrocantileverbylaserbeamdeflectionmicroscopy.Nanotechnology, 2012.23 (31): p.315501.), scholar adopts to allow and lays micro-cantileverSolvent cell carry out two dimension swing, realize every micro-cantilever in micro-cantilever array is scanned. And it is moltenThe athletic meeting of agent pond makes particle in reaction solution produce unnecessary motion, makes to detect data and produces error.

Summary of the invention

The weak point that the present invention exists for fear of prior art, provides a kind of based on multi-angle plane transmission mirrorMicro-cantilever deflection and scanning system and the scan method of micro-cantilever array sensor, this scanning system is not being movedUnder the prerequisite of moving laser instrument and solvent cell, can realize the free-ended scanning of all micro-cantilevers, be micro-cantileverBeam deflection situation detects the sweep signal that unified light beam is provided.

Technical solution problem of the present invention adopts following technical scheme:

A kind of micro-cantilever deflection scanning system of the micro-cantilever array sensor based on multi-angle plane transmission mirrorSystem, its design feature is to comprise:

One for the laser instrument of Emission Lasers bundle vertically downward;

One is installed in the plane transmission mirror group being arranged in a linear in horizontal displacement platform side front, described plane transmissionMirror group is by the 1st plane transmission mirror, the 2nd plane transmission mirror ... with N plane transmission mirror composition, described N with treatThe micro-cantilever quantity M surveying on sensor micro-cantilever array equates, described plane transmission mirror and micro-cantilever oneOne correspondence;

In the time that M is even number, described plane transmission mirror groupPlane transmission mirror is and is horizontally disposed with; FromFlatFace diaphotoscope is being obliquely installed that angle increases progressively left; FromPlane transmission mirror is also that angle increases progressively to the rightBe obliquely installed, and contrary with the plane transmission mirror incline direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and horizontal plane form meets following equation group:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

In the time that M is odd number, described plane transmission mirror groupPlane transmission mirror is and is horizontally disposed with; FromPlane transmission mirror is being obliquely installed that angle increases progressively left successively; FromPlane transmission mirror to the rightAlso be being obliquely installed that angle increases progressively, and contrary with the plane transmission mirror incline direction in left side; Each plane transmission mirrorBetween shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and horizontal plane form meets following equation group:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M+1}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

In above formula, α (N) represents the sharp angle that N plane transmission mirror and horizontal plane form, and β (N) is for swashingThe laser beam irradiation of light device transmitting is to the angle of emergence after N plane transmission mirror; N is the refractive index of plane transmission mirror;H is the thickness of plane transmission mirror; M is the quantity of micro-cantilever to be measured; N is plane transmission mirror sequential bits; dFor the spacing of micro-cantilever to be measured;

Design feature of the present invention is also:

The above-mentioned plane transmission mirror group being arranged in a linear being installed on horizontal displacement platform is replaced with and is installed inOn horizontal rotary pedestal, and array changes into centered by the rotating shaft of rotatable platform and is circumferential arrangement.

Described horizontal rotary pedestal is round-meshed shadow shield, and circular hole respectively correspondence is positioned at each plane transmission mirrorDead ahead, circular hole size makes laser instrument can be irradiated to plane transmission mirror, after plane transmission mirror, can realizeTo the scanning of micro-beam.

Described laser instrument is semiconductor laser, and LASER Light Source is the monochromatic source within the scope of 632nm-780nm.

Described micro-cantilever array is placed on the matrix grain-clamping table in solvent cell, and solvent cell is by inlet tube and going outThe turnover of mouth management and control solvent processed; Described solvent cell top is provided with transparent glass window.

The table top of described matrix grain-clamping table and horizontal plane form the inclination angle within the scope of 00-100.

Described solvent cell bottom is provided with the thermostat for controlling solvent temperature.

A kind of micro-cantilever deflection scanning system of the micro-cantilever array sensor based on multi-angle plane transmission mirrorThe scan method of system, its feature is to comprise the steps:

1) micro-cantilever array sensor to be measured is placed on the matrix grain-clamping table in solvent cell to matrix clampingPlatform makes micro-cantilever be incline direction arrangement, and described solvent cell is airtight, and top is provided with transparent glass window, solvent cellBy the turnover of inlet tube and outlet control solvent;

2) adjust the also initial position of fixed laser, adjust horizontal displacement platform or horizontal rotary pedestal simultaneouslyInitial position, make unique horizontally disposed plane transmission mirror in plane transmission mirror group be positioned at laser instrument just underSide, the initial position of adjustment solvent cell, makes in micro-cantilever array sensor corresponding to described unique being horizontally disposed withThe micro-cantilever of plane transmission mirror under laser instrument, thereby make the laser beam of laser instrument through plane transmissionAfter mirror transmission, be radiated at the free end of this micro-cantilever, thereby complete the free-ended scanning of this micro-cantilever;

3) utilize voice coil motor to drive horizontal displacement platform move reciprocatingly or utilize stepper motor drive level to turnMoving platform rotates, make each plane transmission mirror all pass through laser instrument under, establish by different angleThe plane transmission mirror of putting make laser beam that laser instrument is launched after transmission, be irradiated to corresponding micro-cantilever fromBy holding, thereby under the prerequisite of not mobile laser instrument and solvent cell, complete the scanning to all micro-cantilevers.

Compared with the prior art, beneficial effect of the present invention is embodied in:

The present invention drives 8 groups of different angles by the voice coil motor (or stepper motor of rotation) of linear reciprocating motionThe plane transmission mirror of degree can be realized and utilize a laser instrument to the every free-ended irradiation of micro-cantilever, has eliminatedThe systematic error of bringing while detection due to various lasers by regulating the angle of plane transmission mirror, makes to swash simultaneouslyThe position that light beam is radiated on every micro-cantilever is at every turn fixed, and has realized the higher detection of accuracy. With circleThe shadow shield in hole can be realized fixed point scanning to micro-beam array, and the light path of avoiding continuous sweep micro-beam array to bring is dryDisturb.

Brief description of the drawings

The application principle figure of Fig. 1 embodiment of the present invention 1 scanning system.

Fig. 2 is that micro-cantilever array sensor is fixed on the view on the matrix grain-clamping table of inclination.

Fig. 3 is plane transmission mirror inclined design schematic diagram.

Fig. 4 a, 4b are the embodiment of the present invention 1 scanning system midplane diaphotoscope group and scanning process schematic diagrames

Fig. 5 a, 5b are the embodiment of the present invention 2 scanning system midplane diaphotoscope group schematic diagrames.

In figure: 1 moveable platform, 2 laser instruments, 3 horizontal displacement platforms, 4, plane transmission mirror, 41 the 1stPlane transmission mirror, 42 the 2nd plane transmission mirrors, 4N N plane transmission mirror, 51 the 1st micro-cantilevers, 52The 2nd micro-cantilever, 5M M micro-cantilever, 6 inlet tubes, 7 outlets, 8 solvent cells, 9 matrix clampingsPlatform, 10 thermostats, 11 Optoelectronic Position Sensitive Detectors, 12 data collecting cards, 13 computers, 14 glassWindow, 15 horizontal rotary pedestals, 16 shadow shields, 17 micro-cantilevers.

Detailed description of the invention

Below in conjunction with accompanying drawing, patent of the present invention is described in detail, so that technical staff understands.

Embodiment 1

As shown in Figure 1, micro-cantilever deflection and scanning system, comprising:

One for the laser instrument 2 of Emission Lasers bundle vertically downward; Laser instrument 2 is located at its initial position of capable of regulatingOn moveable platform 1; Laser instrument is semiconductor laser, and LASER Light Source is the list within the scope of 632nm-780nmColor light source.

One is installed in the plane transmission mirror group being arranged in a linear in horizontal displacement platform 3 side fronts, plane transmission mirrorGroup is from left to right by the 1st plane transmission mirror the 41, the 2nd plane transmission mirror 42 ... with N plane transmission mirror 4NComposition, N equates sensor micro-cantilever with the micro-cantilever quantity M on sensor micro-cantilever array to be measuredArray is from left to right by the 1st micro-cantilever the 51, the 2nd micro-cantilever 52 ... with 5M micro-cantilever composition, flatFace diaphotoscope is corresponding one by one with micro-cantilever; The 1st plane transmission mirror 41 corresponding with the 1st micro-cantilever 51,The 2nd plane transmission mirror 42 is corresponding with the 2nd micro-cantilever 52, by that analogy, N plane transmission mirror 4N with5M micro-cantilever correspondence.

In the time that M is even number, described plane transmission mirror groupPlane transmission mirror is and is horizontally disposed with; FromFlatFace diaphotoscope is being obliquely installed that angle increases progressively left; FromPlane transmission mirror is also that angle increases progressively to the rightBe obliquely installed, and contrary with the plane transmission mirror incline direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and horizontal plane form meets following equation group:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

In the time that M is odd number, described plane transmission mirror groupPlane transmission mirror is and is horizontally disposed with; FromPlane transmission mirror is being obliquely installed that angle increases progressively left successively; FromPlane transmission mirror to the rightAlso be being obliquely installed that angle increases progressively, and contrary with the plane transmission mirror incline direction in left side; Each plane transmission mirrorBetween shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and horizontal plane form meets following equation group:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M+1}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

In above formula, as shown in Figure 3, α (N) represents the sharp angle that N plane transmission mirror and horizontal plane form,Reality is also the incidence angle that the laser beam that sends of laser instrument and N plane transmission mirror form, and β (N) is laserThe laser beam irradiation of device transmitting is to the angle of emergence after N plane transmission mirror; N is the refractive index of plane transmission mirror;H is the thickness of plane transmission mirror; M is the quantity of micro-cantilever to be measured; N is plane transmission mirror sequential bits; dFor the spacing of micro-cantilever to be measured.

As shown in Figure 1, micro-cantilever array is placed on the matrix grain-clamping table 9 in solvent cell 8, solvent cellControl the turnover of solvent by inlet tube 6 and outlet 7; Solvent cell top is provided with transparent glass window 14; MoltenBottom, agent pond is provided with the thermostat 10 for controlling solvent temperature.

As shown in Figure 2, the table top of matrix grain-clamping table and horizontal plane form 0⁰-10⁰Inclination angle in scope.

Embodiment 2

The plane transmission mirror group being arranged in a linear that embodiment 1 is installed on horizontal displacement platform replaces with solidBe located on horizontal rotary pedestal 15, and array changes into centered by the rotating shaft of rotatable platform and is circumferential arrangement, waterFlat turn moving platform is round-meshed shadow shield, and circular hole respectively correspondence is positioned at each plane transmission mirror dead ahead, circular holeSize makes laser instrument can be irradiated to plane transmission mirror, after plane transmission mirror, can realize sweeping micro-beamRetouch; As shown in Fig. 5 a, 5b.

Embodiment 3

The scan method of the scanning system of embodiment 1 or 2, comprises the steps:

1) micro-cantilever array sensor to be measured is placed on the matrix grain-clamping table in solvent cell to matrix clampingPlatform makes micro-cantilever array be incline direction arrangement, and described solvent cell is airtight, and top is provided with transparent glass window, moltenAgent pond is by the turnover of inlet tube and outlet control solvent;

2) adjust the also initial position of fixed laser, adjust horizontal displacement platform or horizontal rotary pedestal simultaneouslyInitial position, make unique horizontally disposed plane transmission mirror in plane transmission mirror group be positioned at laser instrument just underSide, the initial position of adjustment solvent cell, makes in micro-cantilever array sensor corresponding to described unique being horizontally disposed withThe micro-cantilever of plane transmission mirror under laser instrument, thereby make the laser beam of laser instrument through plane transmissionAfter mirror transmission, be radiated at the free end of this micro-cantilever, thereby complete the free-ended scanning of this micro-cantilever;

3) utilize voice coil motor to drive horizontal displacement platform move reciprocatingly or utilize stepper motor drive level to turnMoving platform rotates, make each plane transmission mirror all pass through laser instrument under, establish by different angleThe plane transmission mirror of putting make laser beam that laser instrument is launched after transmission, be irradiated to corresponding micro-cantilever fromBy holding, thereby under the prerequisite of not mobile laser instrument and solvent cell, complete the scanning to all micro-cantilevers.

And the hot spot that scanning micro-cantilever free end reflects receive by Optoelectronic Position Sensitive Detector 11 after warpCross and enter computer 13 after data collecting card 12 and process, receive by Optoelectronic Position Sensitive Detector sequentialEach micro-cantilever deflection of beam signal in micro-cantilever array, thus monitor the real time reaction occurring on each micro-cantileverInformation. Above-described Optoelectronic Position Sensitive Detector, capture card and computer are processed and are all adopted this area public affairsThe prior art of knowing.

Embodiment 4

To scan the micro-cantilever array sensor that detects 8 micro-cantilevers as example, the spacing of micro-cantilever (d)=0.25mm, 8, the plane transmission mirror of selection thickness (h)=3mm, refractive index (n)=1.5, then by itBy arranged in a straight line on horizontal displacement platform, then calculate according to following equation group:

$\frac{h*\sin [\mathrm{\α}\left(N\right)-\mathrm{\β}\left(N\right)]}{\cos \left[\mathrm{\β}\left(N\right)\right]}=|\frac{M}{2}-N|d---\left(1\right)$

$n=\frac{\sin \mathrm{\α}\left(N\right)}{\sin \mathrm{\β}\left(N\right)}---\left(2\right)$

The sharp angle that obtains the 1st to the 8th plane transmission mirror and horizontal plane formation is followed successively by: 36.7923 °,26.4182°、14.0033°、0°、14.0033°、26.4182°、36.7923°、45.4221°。When scanning, adjust the also initial position of fixed laser by moveable platform 1, adjust horizontal displacement flat simultaneouslyThe initial position of platform, make the 4th plane transmission mirror in plane transmission mirror group be positioned at laser instrument under, adjustThe initial position of solvent cell, makes in micro-cantilever array sensor the 4th micro-cantilever under laser instrument;

Then open laser instrument, the laser beam of laser instrument transmitting is radiated at the 4th after the 4th plane transmission mirror transmissionThe free end of micro-cantilever, thus complete the free-ended scanning of micro-cantilever; The 4th micro-cantilever reflectionLaser beam enters computer 13 after receiving by Optoelectronic Position Sensitive Detector 11 after data collecting card 12Carry out analyzing and processing;

Then drive horizontal displacement platform to move right by voice coil motor, the 3rd plane transmission mirror, the 2nd planeDiaphotoscope, the 1st plane transmission mirror pass through successively laser instrument under, complete respectively to the 3rd micro-cantilever fromBy end, the 2nd micro-cantilever free end, the free-ended scanning of the 1st micro-cantilever, the 3rd micro-cantilever, the 2ndAfter the laser beam of micro-cantilever, the 1st micro-cantilever reflection receives by Optoelectronic Position Sensitive Detector 11 throughAfter data collecting card 12, enter computer 13 and carry out analyzing and processing.

When the 1st plane transmission mirror is after under laser instrument, voice coil motor drives horizontal displacement platform to moving to leftMoving, the 1st plane transmission mirror, the 2nd plane transmission mirror, the 3rd plane transmission mirror ... the 8th plane transmission mirror is complied withInferior under laser instrument, complete respectively to the 1st micro-cantilever free end, the 2nd micro-cantilever free end,The 3rd micro-cantilever free end ... the free-ended scanning of the 8th micro-cantilever, the 1st micro-cantilever free end,2 micro-cantilever free ends, the 3rd micro-cantilever free end ... the laser beam of the 8th micro-cantilever free end reflectionAfter receiving by Optoelectronic Position Sensitive Detector 11, entering computer 13 after data collecting card 12 dividesAnalyse processing.

When the 8th plane transmission mirror is after under laser instrument, voice coil motor drives horizontal displacement platform more to the rightMobile, and so forth, complete the quick Multiple-Scan to each micro-cantilever.

Claims (9)

1. a micro-cantilever deflection and scanning system for the micro-cantilever array sensor based on multi-angle plane transmission mirror, is characterized in that comprising:

One for the laser instrument of Emission Lasers bundle vertically downward;

One is installed in the plane transmission mirror group being arranged in a linear in horizontal displacement platform side front, described plane transmission mirror group is by the 1st plane transmission mirror, the 2nd plane transmission mirror ... form with N plane transmission mirror, described N equates with the micro-cantilever quantity M on sensor micro-cantilever array to be measured, and described plane transmission mirror is corresponding one by one with micro-cantilever;

In the time that M is even number, described plane transmission mirror groupPlane transmission mirror is and is horizontally disposed with; FromPlane transmission mirror is left and being obliquely installed that horizontal plane angle increases progressively; FromPlane transmission mirror is also being obliquely installed that angle increases progressively to the right, and contrary with the plane transmission mirror incline direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and horizontal plane form meets following equation group:

In the time that M is odd number, described plane transmission mirror groupPlane transmission mirror is and is horizontally disposed with; FromPlane transmission mirror is being obliquely installed that angle increases progressively left successively; FromPlane transmission mirror is also being obliquely installed that angle increases progressively to the right, and contrary with the plane transmission mirror incline direction in left side; Between each plane transmission mirror, shadow shield is set;

The sharp angle α (N) that described plane transmission mirror and horizontal plane form meets following equation group:

In above formula, α (N) represents the sharp angle that N plane transmission mirror and horizontal plane form, and the laser beam irradiation that β (N) launches for laser instrument is to the angle of emergence after N plane transmission mirror; N is the refractive index of plane transmission mirror; H is the thickness of plane transmission mirror; M is the quantity of micro-cantilever to be measured; N is plane transmission mirror sequential bits; D is the spacing of micro-cantilever to be measured.

2. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 1, is characterized in that: described in the plane transmission mirror group that is arranged in a linear replace with the plane transmission mirror group that is circumferential arrangement centered by the rotating shaft of stepper motor.

3. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 2, it is characterized in that: described plane transmission mirror group front arranges horizontal rotary pedestal, horizontal rotary pedestal is round-meshed shadow shield, circular hole respectively correspondence is positioned at each plane transmission mirror dead ahead, circular hole size makes laser instrument can be irradiated to plane transmission mirror, after plane transmission mirror, can realize the scanning to micro-beam.

4. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 3, is characterized in that: described horizontal rotary pedestal is connected with the turning cylinder of stepper motor.

5. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 1 and 2, it is characterized in that: described laser instrument is semiconductor laser, LASER Light Source is the monochromatic source within the scope of 632nm-780nm.

6. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 1 and 2, it is characterized in that: described micro-cantilever array is placed on the matrix grain-clamping table in solvent cell, solvent cell is by the turnover of inlet tube and outlet control solvent; Described solvent cell top is provided with transparent glass window.

7. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 6, is characterized in that: the table top of described matrix grain-clamping table and horizontal plane form 0⁰-10⁰Inclination angle in scope.

8. the micro-cantilever deflection and scanning system of a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror according to claim 6, is characterized in that: described solvent cell bottom is provided with the thermostat for controlling solvent temperature.

9. a scan method for the micro-cantilever deflection and scanning system of claim 1 or a kind of micro-cantilever array sensor based on multi-angle plane transmission mirror claimed in claim 2, is characterized in that comprising the steps:

1) micro-cantilever array sensor to be measured is placed on the matrix grain-clamping table in solvent cell, matrix grain-clamping table makes micro-cantilever array be incline direction arrangement, described solvent cell is airtight, and top is provided with transparent glass window, and solvent cell is by the turnover of inlet tube and outlet control solvent;

2) adjust the also initial position of fixed laser, adjust the initial position of horizontal displacement platform or horizontal rotary pedestal simultaneously, make unique horizontally disposed plane transmission mirror in plane transmission mirror group be positioned at laser instrument under, adjust the initial position of solvent cell, make in micro-cantilever array sensor micro-cantilever corresponding to described unique horizontally disposed plane transmission mirror under laser instrument, thereby make the laser beam of laser instrument be radiated at the free end of this micro-cantilever after the transmission of plane transmission mirror, thereby complete the free-ended scanning of this micro-cantilever;

3) utilize voice coil motor to drive horizontal displacement platform to move reciprocatingly or utilize stepper motor to drive horizontal rotary pedestal to rotate, make each plane transmission mirror all pass through laser instrument under, the plane transmission mirror arranging by different angle makes laser beam that laser instrument is launched after transmission, be irradiated to the free end of corresponding micro-cantilever, thereby under the prerequisite of not mobile laser instrument and solvent cell, complete the scanning to all micro-cantilevers.