CN103792268B - A kind of differential capacitance type hydrogen gas sensor - Google Patents
A kind of differential capacitance type hydrogen gas sensor Download PDFInfo
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Abstract
The invention discloses a kind of differential capacitance type hydrogen gas sensor and comprise substrate, fixed fingers electrode, activity comb electrodes, the first folding spring, the second folding spring and hydrogen sensitive strained layer; One end of first folding spring is connected with the upper end of activity comb electrodes, and the other end is fixed on substrate; One end of second folding spring is connected with the lower end of activity comb electrodes, and the other end is fixed on substrate; Three forms cantilever beam structure, is suspended at the top of substrate; Fixed fingers electrode and activity comb electrodes interlaced formation differential type electric capacity; Hydrogen sensitive strained layer is arranged in the first or second folding spring, makes hydrogen sensitive strained layer after absorption hydrogen expander, cantilever beam structure can be driven to move, the spacing of change activity comb electrodes and fixed fingers electrode.The working temperature that embodiment of the present invention technical scheme overcomes conventional hydrogen sensor is high, and serviceable life, short grade was not enough.
Description
Technical field
The present invention relates to hydrogen gas sensor technical field, particularly relate to a kind of differential capacitance type hydrogen gas sensor.
Background technology
Hydrogen, as one of a kind of free of contamination clean secondary energy, receives much concern in worldwide.But the molecular weight of hydrogen is very little, in production, use and very easily leak in transportation, and the explosion limits of hydrogen is 4.0 ~ 74.2%, thus carries out in site measurement fast and accurately to the hydrogen content in air and specific environment, has broad application prospects.Existing hydrogen gas sensor comprises semi-conductor type, electrothermic type, optical type etc.The working temperature of semi-conductor type and electrothermic type is often very high, both consumes energy, and also can bring potential safety hazard in actual applications.It is β phase that optical type hydrogen gas sensor utilizes palladium to absorb after hydrogen by α phase transformation, and its optical property changes to measure, and without the need to heating, compares semi-conductor type safer.But up to the present, also there are some shortcomings in optical type hydrogen gas sensor, and as easily there is delamination, foaming in palladium layers after repeatedly circulating, thus serviceable life is shorter, and it measures the optical device often relying on complexity, and cost of manufacture is very high.According to the mechanism that the precious metal adsorption hydrogen physical characteristicss such as palladium change, hydrogen gas sensor based on surperficial bulk acoustic wave was also proposed in recent years, hydrogen gas sensor as micro-in patent surface acoustic wave and preparation technology's (application number: the hydrogen gas sensor 200710025221.4) is made up of palladium-silver film and tin dioxide thin film thereof, tin dioxide thin film depends in piezoelectric substrate, palladium-silver film depends on above tin dioxide thin film, thus form double-deck sensitive thin film, its working temperature is also normal temperature, but its shortcoming is the same with optical type, and the life-span is shorter.
Summary of the invention
For the defect of hydrogen gas sensor in prior art, the embodiment of the present invention proposes a kind of differential capacitance type hydrogen gas sensor, and the working temperature overcoming conventional hydrogen sensor is high, and serviceable life, short grade was not enough.
The embodiment of the present invention provides a kind of differential capacitance type hydrogen gas sensor, comprises substrate, fixed fingers electrode, activity comb electrodes, the first folding spring, the second folding spring and hydrogen sensitive strained layer; Described first folding spring one end in telescopic direction is connected with the upper end of described activity comb electrodes, and the other end in telescopic direction is fixing over the substrate; Described second folding spring one end in telescopic direction is connected with the lower end of described activity comb electrodes, and the other end in telescopic direction is fixing over the substrate; Described first folding spring, described second folding spring and described activity comb electrodes composition cantilever beam structure, is suspended at the top of described substrate; Described fixed fingers electrode is fixing over the substrate, and described fixed fingers electrode and activity comb electrodes interlaced formation differential type electric capacity; Described hydrogen sensitive strained layer is arranged in described first folding spring or described second folding spring, make described hydrogen sensitive strained layer after absorption hydrogen expander, described first folding spring, described second folding spring and described activity comb electrodes can be driven to move, change the spacing of described activity comb electrodes and described fixed fingers electrode; Described hydrogen sensitive strained layer comprises: palladium or palldium alloy sense hydrogen layer; Described first folding spring, the second folding spring and fixed fingers electrode are provided with the metal electrode of the capacitance for measuring described differential type electric capacity.
Further, described activity comb electrodes comprises coupling shaft, the first float electrode unit and the second float electrode unit; Described first float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Described second float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Wherein, X > 0; Each comb electrodes in described first float electrode unit is connected to the left side of described coupling shaft, and perpendicular to described coupling shaft; Each comb electrodes in described second float electrode unit is connected to the right side of described coupling shaft, and perpendicular to described coupling shaft; Each comb electrodes in each comb electrodes in described first float electrode unit and described second float electrode unit is mutually staggered, and the spacing staggered is Y; Y < X.
Further, described fixed fingers electrode comprises: the first fixed electorde unit and the second fixed electorde unit; Described first fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Described second fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Comb electrodes interlaced formation first electric capacity in comb electrodes in described first fixed electorde unit and described first float electrode unit; Comb electrodes interlaced formation second electric capacity in comb electrodes in described second fixed electorde unit and described second float electrode unit; Comb electrodes in comb electrodes in described first fixed fingers electrode unit and described second fixed fingers unit is symmetrical about described coupling shaft, makes the first electric capacity and the second electric capacity form described differential type electric capacity.
Further, described first folding spring one end in telescopic direction is connected with the upper end of described activity comb electrodes, is specially: described first folding spring one end in telescopic direction is connected with the upper end of described coupling shaft; Described second folding spring one end in telescopic direction is connected with the lower end of described activity comb electrodes, is specially: described second folding spring one end in telescopic direction is connected with the lower end of described coupling shaft.
Further, described fixed fingers electrode is fixing over the substrate by pressure welding bar, and described pressure welding bar is also for connecting each comb electrodes in described fixed fingers electrode.
Further, the other end of described first folding spring in telescopic direction and the other end of described second folding spring in telescopic direction fixing over the substrate respectively by anchor point.
Further, described hydrogen sensitive strained layer is arranged in described first folding spring or the second folding spring, be specially: be provided with outstanding frame in described first folding spring or the second folding spring, described hydrogen sensitive strained layer is arranged in described outstanding frame.
Further, described fixed fingers electrode and described activity comb electrodes are N-type and mix silicon comb electrodes; Described first folding spring and described second folding spring are N-type and mix silicon spring.
Further, described substrate is glass, quartz or one side oxidized silicon chip substrate.
Further, described metal electrode is aluminium or gold electrode.
Therefore, the differential capacitance type hydrogen gas sensor that the embodiment of the present invention provides, fixed fingers electrode and the interlaced formation differential capacitance of activity comb electrodes, the top and bottom of activity comb electrodes are respectively arranged with the first folding spring and the second folding spring, and three forms a cantilever beam structure.When be arranged on the hydrogen sensitive strained layer in the first or second folding spring absorb hydrogen and volumetric expansion time, folding spring can in telescopic spring side upwardly activity comb electrodes, spacing between fixed fingers electrode and activity comb electrodes is changed, thus generation differential capacitance, then calculate corresponding density of hydrogen according to differential capacitance.Compared with three kinds of capacitive transducers of the prior art, the present embodiment technical scheme is without the need to heating, and its hydrogen sensitive strained layer adopts the palladium of block or its alloy, avoid adopt the solution of palladium film repeatedly circulate after the defect of bubbling or coming off.And adopt MEMS technology to make, also have volume little, response is fast, and cost is low, is easy to integrated and the advantage such as large-scale production.
Further, activity comb electrodes comprises the first float electrode unit and the second float electrode unit, fixed fingers electrode comprises the first fixed electorde unit and the second fixed electorde unit, first float electrode unit and the first fixed electorde unit interlaced composition first electric capacity, the second float electrode unit and the second fixed electorde unit interlaced composition second electric capacity.When hydrogen sensitive strained layer is subject to density of hydrogen and changes volume, as volumetric expansion makes activity comb electrodes move up, because the first float electrode unit and the second float electrode unit exist the spacing Y staggered, the first electric capacity is reduced, second electric capacity increases, thus produces differential capacitance.Calculated density of hydrogen value by the capacitance of differential capacitance again, improve the accuracy of measuring further.
Accompanying drawing explanation
Fig. 1 is the structural representation of a kind of differential capacitance type hydrogen gas sensor provided by the invention.
Embodiment
Below in conjunction with the accompanying drawing in the embodiment of the present invention, be clearly and completely described the technical scheme in the embodiment of the present invention, obviously, described embodiment is only the present invention's part embodiment, instead of whole embodiments.Based on the embodiment in the present invention, those of ordinary skill in the art, not making the every other embodiment obtained under creative work prerequisite, belong to the scope of protection of the invention.
See Fig. 1, be the structural representation of differential capacitance type hydrogen gas sensor provided by the invention, this differential capacitance type hydrogen gas sensor comprises by substrate 10, fixed fingers electrode 2 and activity comb electrodes 1, first folding spring 31, second folding spring 32, hydrogen sensitive strained layer 4, contact conductor 9 and metal electrode 5 and 8.
Wherein, first folding spring 31 one end in telescopic direction is connected with the upper end of activity comb electrodes 1, and the other end in telescopic direction is fixing over the substrate 10; Second folding spring 21 one end in telescopic direction is connected with the lower end of activity comb electrodes 1, and the other end in telescopic direction to be fixed on substrate 10; First folding spring 31, second folding spring 32 and activity comb electrodes 1 form cantilever beam structure, are suspended at the top of substrate 10.Fixed fingers electrode 2 is fixing over the substrate, and fixed fingers electrode 2 and activity comb electrodes 1 interlaced formation differential type electric capacity.Hydrogen sensitive strained layer 4 is arranged in the first folding spring 31 or described second folding spring 32, make hydrogen sensitive strained layer 4 after moisture expantion, the first folding spring 31, second folding spring 32 and activity comb electrodes 1 can be driven to move, the spacing of change activity comb electrodes 1 and fixed fingers electrode 2.First folding spring 31, second folding spring 32 and fixed fingers electrode 2 are provided with the metal electrode 5 and 8 of the capacitance for measuring described differential type electric capacity.
In the present embodiment, hydrogen sensitive layer 4 is arranged in the second folding spring 32, and hydrogen sensitive layer 4 can be, but not limited to as palladium or palldium alloy sense hydrogen layer.
In the present embodiment, activity comb electrodes 1 comprises coupling shaft, the first float electrode unit and the second float electrode unit; First float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Second float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Wherein, X > 0.As shown in Figure 1, each comb electrodes in the first float electrode unit is connected to the left side of coupling shaft, and perpendicular to coupling shaft.Each comb electrodes in second float electrode unit is connected to the right side of coupling shaft, and perpendicular to coupling shaft; Each comb electrodes in each comb electrodes in first float electrode unit and the second float electrode unit is mutually staggered, and the spacing staggered is Y; And Y < X.
In the present embodiment, fixed fingers electrode 2 comprises: the first fixed electorde unit and the second fixed electorde unit; First fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X.Second fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X.Comb electrodes interlaced formation first electric capacity (left side electric capacity as shown in Figure 1) in comb electrodes in first fixed electorde unit and the first float electrode unit.Comb electrodes interlaced formation second electric capacity (right side electric capacity as shown in Figure 1) in comb electrodes in second fixed electorde unit and described second float electrode unit.Comb electrodes in comb electrodes in first fixed fingers electrode unit and the second fixed fingers unit is symmetrical about coupling shaft, makes the first electric capacity and the second electric capacity form described differential type electric capacity.
In the present embodiment, because each comb electrodes in each comb electrodes of the first movable comb unit and the second float electrode unit is mutually staggered, as shown in Figure 1, the spacing of each activity comb electrodes in left side and each fixed fingers electrode below it is less, is designated as A; B is designated as more greatly with the spacing of the fixed fingers electrode above it.B can be, but not limited to the arbitrary numerical value equaled between 2A to 5A.The spacing of each activity comb electrodes on right side and each fixed fingers electrode below it is comparatively large, is designated as C; D is designated as with the spacing of the fixed fingers electrode above it is less.C can be, but not limited to the arbitrary numerical value equaled between 2D to 5D.The capacitance of the first electric capacity depends on the size of A, and the capacitance of the second electric capacity depends on the size of D.When hydrogen sensitive strained layer 4 moisture expantion, when driving the first folding spring 31, activity comb electrodes 1 and the second folding spring 32 to move up, A increases, and D reduces, and the first electric capacity is reduced, and the second electric capacity increases, thus produces differential capacitance.
In the present embodiment, first folding spring 31 one end in telescopic direction is connected with the upper end of activity comb electrodes 1, is specially: first folding spring 31 one end in telescopic direction is connected with the upper end of coupling shaft.Second folding spring 32 one end in telescopic direction is connected with the lower end of activity comb electrodes 1, is specially: second folding spring 32 one end in telescopic direction is connected with the lower end of coupling shaft.
In the present embodiment, the other end of the first folding spring 31 in telescopic direction and the other end of the second folding spring 32 in telescopic direction fixing over the substrate 10 respectively by anchor point 7.
In the present embodiment, the bearing of fixed fingers electrode 2 and substrate 10 is provided with pressure welding bar 6, to be connected and fixed each comb electrodes in comb electrodes 2.
In the present embodiment, be provided with outstanding frame in the first folding spring 31 or the second folding spring 32, hydrogen sensitive strained layer 4 is arranged in outstanding frame.
In the present embodiment, metal electrode 5 is connected with fixed fingers 2, first folding spring 31 and the second folding spring 32 by contact conductor 9 respectively with 8.This metal electrode can connect external circuit for measuring the capacitance of differential type electric capacity, thus calculates corresponding density of hydrogen.The measuring method of this capacitance is prior art, does not repeat them here.
In the present embodiment, the layout of contact conductor 9 as shown in Figure 1 and metal electrode 5 and 8 is in order to balance inductance, can be, but not limited to the connected mode adopting other.
In the present embodiment, fixed fingers 2 and movable comb 1 are N-type and mix silicon comb.First folding spring 31 and the second folding spring 32 are N-type and mix silicon spring.
In the present embodiment, substrate 10 is glass, quartz or one side oxidized silicon chip substrate.
In the present embodiment, metal electrode is aluminium or gold electrode; Contact conductor is aluminium or gold wire.
Therefore, the differential capacitance type hydrogen gas sensor that the embodiment of the present invention provides, fixed fingers electrode 2 and the interlaced formation differential capacitance of activity comb electrodes 1, the top and bottom of activity comb electrodes 1 are respectively arranged with the first folding spring 31 and the second folding spring 32, and three forms a cantilever beam structure.When be arranged on the hydrogen sensitive strained layer 4 in the first or second folding spring and absorb hydrogen and volumetric expansion time, folding spring can move up in telescopic spring side activity comb electrodes 1, spacing between fixed fingers electrode 2 and activity comb electrodes 1 is changed, thus generation differential capacitance, then calculate corresponding density of hydrogen according to differential capacitance.Compared with three kinds of capacitive transducers of the prior art, the present embodiment technical scheme is without the need to heating, and its hydrogen sensitive strained layer adopts palladium or its alloy of block, avoids the defect adopting palladium film solution (repeatedly bubble after circulation or come off).And adopt MEMS technology to make, also have volume little, response is fast, and cost is low, is easy to integrated and the advantage such as large-scale production.
Further, activity comb electrodes 1 comprises the first float electrode unit and the second float electrode unit, fixed fingers electrode 2 comprises the first fixed electorde unit and the second fixed electorde unit, first float electrode unit and the first fixed electorde unit interlaced composition first electric capacity, the second float electrode unit and the second fixed electorde unit interlaced composition second electric capacity.When hydrogen sensitive strained layer 4 is subject to density of hydrogen and changes volume, as expanded, activity comb electrodes being moved up, because the first float electrode unit and the second float electrode unit exist the spacing Y staggered, the first electric capacity being reduced, second electric capacity increases, thus produces differential capacitance.Calculate density of hydrogen by the capacitance of differential capacitance again, improve the accuracy of measuring further.
The above is the preferred embodiment of the present invention; it should be pointed out that for those skilled in the art, under the premise without departing from the principles of the invention; can also make some improvements and modifications, these improvements and modifications are also considered as protection scope of the present invention.
Claims (10)
1. a differential capacitance type hydrogen gas sensor, is characterized in that, comprises substrate, fixed fingers electrode, activity comb electrodes, the first folding spring, the second folding spring and hydrogen sensitive strained layer;
Described first folding spring one end in telescopic direction is connected with the upper end of described activity comb electrodes, and the other end in telescopic direction is fixing over the substrate; Described second folding spring one end in telescopic direction is connected with the lower end of described activity comb electrodes, and the other end in telescopic direction is fixing over the substrate; Described first folding spring, described second folding spring and described activity comb electrodes composition cantilever beam structure, is suspended at the top of described substrate;
Described fixed fingers electrode is fixing over the substrate, and described fixed fingers electrode and activity comb electrodes interlaced formation differential type electric capacity;
Described hydrogen sensitive strained layer is arranged in described first folding spring or described second folding spring, make described hydrogen sensitive strained layer after absorption hydrogen expander, described first folding spring, described second folding spring and described activity comb electrodes can be driven to move, change the spacing of described activity comb electrodes and described fixed fingers electrode;
Described hydrogen sensitive strained layer comprises: palladium or palldium alloy sense hydrogen layer;
Described first folding spring, the second folding spring and fixed fingers electrode are provided with the metal electrode of the capacitance for measuring described differential type electric capacity.
2. differential capacitance type hydrogen gas sensor according to claim 1, is characterized in that,
Described activity comb electrodes comprises coupling shaft, the first float electrode unit and the second float electrode unit; Described first float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Described second float electrode unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Wherein, X > 0;
Each comb electrodes in described first float electrode unit is connected to the left side of described coupling shaft, and perpendicular to described coupling shaft; Each comb electrodes in described second float electrode unit is connected to the right side of described coupling shaft, and perpendicular to described coupling shaft; Each comb electrodes in each comb electrodes in described first float electrode unit and described second float electrode unit is mutually staggered, and the spacing staggered is Y; Y < X.
3. differential capacitance type hydrogen gas sensor according to claim 2, is characterized in that,
Described fixed fingers electrode comprises: the first fixed electorde unit and the second fixed electorde unit; Described first fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X; Described second fixed electorde unit comprises multiple comb electrodes, and the spacing between adjacent fingers electrode is X;
Comb electrodes interlaced formation first electric capacity in comb electrodes in described first fixed electorde unit and described first float electrode unit;
Comb electrodes interlaced formation second electric capacity in comb electrodes in described second fixed electorde unit and described second float electrode unit;
Comb electrodes in comb electrodes in described first fixed fingers electrode unit and described second fixed fingers unit is symmetrical about described coupling shaft, makes the first electric capacity and the second electric capacity form described differential type electric capacity.
4. differential capacitance type hydrogen gas sensor according to claim 2, is characterized in that,
Described first folding spring one end in telescopic direction is connected with the upper end of described activity comb electrodes, is specially: described first folding spring one end in telescopic direction is connected with the upper end of described coupling shaft;
Described second folding spring one end in telescopic direction is connected with the lower end of described activity comb electrodes, is specially: described second folding spring one end in telescopic direction is connected with the lower end of described coupling shaft.
5. differential capacitance type hydrogen gas sensor according to claim 3, is characterized in that,
Described fixed fingers electrode is fixing over the substrate by pressure welding bar, and described pressure welding bar is also for connecting each comb electrodes in described fixed fingers electrode.
6. differential capacitance type hydrogen gas sensor according to claim 1, is characterized in that,
The other end of described first folding spring in telescopic direction and the other end of described second folding spring in telescopic direction fixing over the substrate respectively by anchor point.
7., according to the arbitrary described differential capacitance type hydrogen gas sensor of claim 1 to 6, it is characterized in that,
Described hydrogen sensitive strained layer is arranged in described first folding spring or the second folding spring, is specially:
Be provided with outstanding frame in described first folding spring or the second folding spring, described hydrogen sensitive strained layer is arranged in described outstanding frame.
8., according to the arbitrary described differential capacitance type hydrogen gas sensor of claim 1 to 6, it is characterized in that,
Described fixed fingers electrode and described activity comb electrodes are N-type and mix silicon comb electrodes;
Described first folding spring and described second folding spring are N-type and mix silicon spring.
9., according to the arbitrary described differential capacitance type hydrogen gas sensor of claim 1 to 6, it is characterized in that,
Described substrate is glass, quartz or one side oxidized silicon chip substrate.
10., according to the arbitrary described differential capacitance type hydrogen gas sensor of claim 1 to 6, it is characterized in that,
Described metal electrode is aluminium or gold electrode.
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| JP6279464B2 (en) | 2014-12-26 | 2018-02-14 | 株式会社東芝 | Sensor and manufacturing method thereof |
| CN108226235B (en) * | 2016-12-21 | 2020-12-15 | 中国矿业大学 | Capacitive MEMS gas sensor |
| CN107589155A (en) * | 2017-09-12 | 2018-01-16 | 华南师范大学 | A kind of capacitance type sensor and preparation method thereof |
| CN110086376B (en) * | 2019-05-07 | 2020-03-17 | 湖南工程学院 | Small wind energy collector with frequency and displacement amplification function |
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Inventor after: Shen Fangping Inventor after: Qi Mingfeng Inventor after: Liu Rui Inventor after: Ding Haiyan Inventor before: Shen Fangping Inventor before: Zhang Ting Inventor before: Qi Mingfeng Inventor before: Liu Rui Inventor before: Ding Haiyan |