CN103707428A - Monitoring device of silicon wafer collection equipment - Google Patents
Monitoring device of silicon wafer collection equipment Download PDFInfo
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- CN103707428A CN103707428A CN201310754109.XA CN201310754109A CN103707428A CN 103707428 A CN103707428 A CN 103707428A CN 201310754109 A CN201310754109 A CN 201310754109A CN 103707428 A CN103707428 A CN 103707428A
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Abstract
The invention relates to a monitoring device of silicon wafer collection equipment. The monitoring device of the silicon wafer collection equipment comprises a signal collection module, a signal processing module, a storage module, a displaying module, an alarm module and a reset module, wherein the signal collection module comprises a temperature sensor, a humidity sensor, a hardness sensor and a counting sensor; the signal processing module is a CPU; the storage module is a rom storage; the displaying module is an LCD; the alarm module is a signal alarm; the reset module is a reset key. According to the monitoring device of the silicon wafer collection equipment, operation personnel can clearly see the specific number of silicon wafers in a collection tank, problems caused by manpower are reduced greatly, operation is easy, and working efficiency is improved.
Description
Technical field
The present invention relates to a kind of monitoring device, be specifically related to a kind of monitoring device of silicon chip collecting device.
Background technology
In silicon chip working process, in order to guarantee the designing requirement of silicon chip, require silicon chip cutting.Silicon chip after cutting is collected by gathering-device.In collection process, silicon chip may drop to outside while falling, thereby silicon chip surface is caused to damage, thereby affects the crudy of silicon chip.Adopt at present artificial mode to replace and may cause like this silicon chip of collection too much feeder, or lack, be difficult to control neat quantity, be unfavorable for the collection of silicon chip.
Summary of the invention
Technical problem to be solved by this invention is that a kind of monitoring device of silicon chip collecting device is provided for above drawback, and this apparatus structure is simple, simple to operate, the monitoring device of a kind of silicon chip collecting device of complete function.
For solving the problems of the technologies described above, technical scheme of the present invention is:
The monitoring device of silicon chip collecting device comprises a signal acquisition module, signal processing module, memory module, display module, alarm module, reseting module; Wherein said signal acquisition module comprises temperature sensor, humidity sensor, hardness transducer, sensor for countering; Described signal processing module is CPU; Described memory module is rom memory.Described display module is LCD display; Described alarm module is signal alarm; Described reseting module comprises reset key.
Described signal acquisition module is connected successively with signal processing module, memory module, display module, and described signal processing module is connected with alarm module, and described alarm module is connected with reseting module.
During work, signal acquisition module is by each sensor collection signal in signal acquisition module, then CPU signal being passed in signal processing module processes through row, after finishing dealing with, transfer data to the rom memory in memory module, then data in memory are demonstrated to result by the LCD display in display module.When the sensor for countering in signal acquisition module collects silicon chip quantity and reaches specified quantity soon, by CPU, handle the rear signal alarm being directly transferred in alarm module, thereby send chimes of doom, after artificial treatment is complete, by reset key, recover normal operation.
Beneficial effect of the present invention:
Described signal acquisition module is for gathering state and the parameter of the monitoring device of silicon chip collecting device; Described signal processing module is for the treatment of the data in acquisition module; Described memory module is used for the data in storage of collected module and signal processing module; Described counting module is for calculating the silicon chip quantity of collection; Described display module is for showing the data of silicon chip quantity and memory module; Described alarm module, for when quantity reaches the heap(ed) capacity of feeder soon, is reported to the police; Described reseting module is used for eliminating warning, and allows monitoring device work on.The present invention can make operating personnel clearly see the concrete quantity of silicon chip in feeder, has greatly reduced the problem of manually bringing, and this is simple to operate, has strengthened operating efficiency.
Accompanying drawing explanation
Fig. 1 is structural representation of the present invention
The specific embodiment
A kind of monitoring device of silicon chip collecting device comprises signal acquisition module 1 as shown in the figure, signal processing module 2, memory module 3, display module 4, alarm module 5, reseting module 6; 1 of described signals collecting mould comprises temperature sensor 11, humidity sensor 12, hardness transducer 13, sensor for countering 14; Described signal processing module 2 is CPU21; Described memory module 3 is rom memory 31.Described display module 4 is LCD display 41; Described alarm module 5 is signal alarm 51; Described reseting module 6 comprises reset key 61.
Described signal acquisition module 1 is connected successively with signal processing module 2, memory module 3, display module 4, and described signal processing module 2 is connected with alarm module 5, and described alarm module 5 is connected with reseting module 6.
During work, signal acquisition module 1 is by each sensor collection signal in signal acquisition module 1, then CPU21 signal being passed in signal processing module processes through row, after finishing dealing with, transfer data to the rom memory in memory module, 31 demonstrate result by data in memory by the LCD display 41 in display module again.When the sensor for countering 14 in signal acquisition module collects silicon chip quantity and reaches specified quantity soon, by CPU21, handle the rear signal alarm 51 being directly transferred in alarm module 5, thereby send chimes of doom, after artificial treatment is complete, by reset key 61, recover normal operation.
The present invention can make operating personnel clearly see the concrete quantity of silicon chip in feeder, has greatly reduced the problem of manually bringing, and this is simple to operate, has strengthened operating efficiency.
Here description of the invention and application is illustrative, not wants that therefore, the present invention is not subject to the restriction of the present embodiment by scope restriction of the present invention in the above-described embodiments, and the technical scheme that any employing equivalence replacement obtains is all in the scope of protection of the invention.
Claims (3)
1. the monitoring device of silicon chip collecting device comprises a signal acquisition module, signal processing module, memory module, display module, alarm module, reseting module; Wherein said signal acquisition module comprises temperature sensor, humidity sensor, hardness transducer, sensor for countering; Described signal processing module is CPU; Described memory module is rom memory; Described display module is LCD display; Described alarm module is signal alarm; Described reseting module comprises reset key.
2. the monitoring device of a kind of silicon chip collecting device as claimed in claim 1 is characterized in that described signal acquisition module is connected successively with signal processing module, memory module, display module, described signal processing module is connected with alarm module, and described alarm module is connected with reseting module.
3. when the monitoring device of a kind of silicon chip collecting device as claimed in claim 1 is characterized in that work, signal acquisition module is by each sensor collection signal in signal acquisition module, then CPU signal being passed in signal processing module processes through row, after finishing dealing with, transfer data to the rom memory in memory module, then data in memory are demonstrated to result by the LCD display in display module; When the sensor for countering in signal acquisition module collects silicon chip quantity and reaches specified quantity soon, by CPU, handle the rear signal alarm being directly transferred in alarm module, thereby send chimes of doom, after artificial treatment is complete, by reset key, recover normal operation.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310754109.XA CN103707428A (en) | 2013-12-31 | 2013-12-31 | Monitoring device of silicon wafer collection equipment |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201310754109.XA CN103707428A (en) | 2013-12-31 | 2013-12-31 | Monitoring device of silicon wafer collection equipment |
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| CN103707428A true CN103707428A (en) | 2014-04-09 |
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| CN201310754109.XA Pending CN103707428A (en) | 2013-12-31 | 2013-12-31 | Monitoring device of silicon wafer collection equipment |
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Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101030076A (en) * | 2006-03-03 | 2007-09-05 | 株式会社电装 | Operation time display device and production control system |
| CN101209572A (en) * | 2007-12-24 | 2008-07-02 | 湖南宇晶机器实业有限公司 | Multi-line cutting machine |
| CN101495080A (en) * | 2006-01-06 | 2009-07-29 | 阿塞尔Rx制药有限公司 | Drug storage and dispensing devices and systems comprising the same |
| CN101513752A (en) * | 2009-04-10 | 2009-08-26 | 江西省新华仁科技有限公司 | Antioxidant cutting method and device |
| CN201408116Y (en) * | 2009-06-02 | 2010-02-17 | 中能电力科技开发有限公司 | Condition monitoring device of wind power machine set |
| CN102135744A (en) * | 2010-01-25 | 2011-07-27 | 村田机械株式会社 | Image forming device and image forming method |
| CN102343634A (en) * | 2010-08-02 | 2012-02-08 | 北京中电科电子装备有限公司 | Overheat protecting device and method of motorized spindle and cutter |
| CN102626953A (en) * | 2012-02-14 | 2012-08-08 | 上海五同机械制造有限公司 | Servo control system of linear cutting machine |
| CN102629142A (en) * | 2012-02-14 | 2012-08-08 | 上海五同机械制造有限公司 | Wire cutting pressure control system |
| CN102744796A (en) * | 2012-06-20 | 2012-10-24 | 常州天合光能有限公司 | Silicon ingot slicing quality monitoring system and monitoring method |
| CN102756431A (en) * | 2012-03-23 | 2012-10-31 | 镇江市港南电子有限公司 | Silicon chip cutting device |
| CN202870560U (en) * | 2012-11-20 | 2013-04-10 | 湖南四菱工控技术有限公司 | Lithium battery production line control device with intelligent monitoring system |
| CN103182752A (en) * | 2011-12-29 | 2013-07-03 | 镇江市港南电子有限公司 | State monitoring device for silicon wafer cutting equipment |
-
2013
- 2013-12-31 CN CN201310754109.XA patent/CN103707428A/en active Pending
Patent Citations (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101495080A (en) * | 2006-01-06 | 2009-07-29 | 阿塞尔Rx制药有限公司 | Drug storage and dispensing devices and systems comprising the same |
| CN101030076A (en) * | 2006-03-03 | 2007-09-05 | 株式会社电装 | Operation time display device and production control system |
| CN101209572A (en) * | 2007-12-24 | 2008-07-02 | 湖南宇晶机器实业有限公司 | Multi-line cutting machine |
| CN101513752A (en) * | 2009-04-10 | 2009-08-26 | 江西省新华仁科技有限公司 | Antioxidant cutting method and device |
| CN201408116Y (en) * | 2009-06-02 | 2010-02-17 | 中能电力科技开发有限公司 | Condition monitoring device of wind power machine set |
| CN102135744A (en) * | 2010-01-25 | 2011-07-27 | 村田机械株式会社 | Image forming device and image forming method |
| CN102343634A (en) * | 2010-08-02 | 2012-02-08 | 北京中电科电子装备有限公司 | Overheat protecting device and method of motorized spindle and cutter |
| CN103182752A (en) * | 2011-12-29 | 2013-07-03 | 镇江市港南电子有限公司 | State monitoring device for silicon wafer cutting equipment |
| CN102626953A (en) * | 2012-02-14 | 2012-08-08 | 上海五同机械制造有限公司 | Servo control system of linear cutting machine |
| CN102629142A (en) * | 2012-02-14 | 2012-08-08 | 上海五同机械制造有限公司 | Wire cutting pressure control system |
| CN102756431A (en) * | 2012-03-23 | 2012-10-31 | 镇江市港南电子有限公司 | Silicon chip cutting device |
| CN102744796A (en) * | 2012-06-20 | 2012-10-24 | 常州天合光能有限公司 | Silicon ingot slicing quality monitoring system and monitoring method |
| CN202870560U (en) * | 2012-11-20 | 2013-04-10 | 湖南四菱工控技术有限公司 | Lithium battery production line control device with intelligent monitoring system |
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Application publication date: 20140409 |