CN103645347B - The single-point tracking measurement method of micro-nano-scale Dynamic Coupling vibration - Google Patents
The single-point tracking measurement method of micro-nano-scale Dynamic Coupling vibration Download PDFInfo
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- CN103645347B CN103645347B CN201310642439.XA CN201310642439A CN103645347B CN 103645347 B CN103645347 B CN 103645347B CN 201310642439 A CN201310642439 A CN 201310642439A CN 103645347 B CN103645347 B CN 103645347B
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Abstract
A kind of single-point tracking measurement method of micro-nano-scale Dynamic Coupling vibration.First making AFM probe in the case of not in contact with flat-bed scanner surface, driving pressure electrical scanner drives probe to carry out X-direction shuttle-scanning motion with certain frequency and amplitude, and real time record probe Z-direction deflects to obtain piezoelectric scanner Z-direction mode of oscillation；Then making probe contact with flat-bed scanner surface by automatic inserting needle and scanning device fine setting, then control flat-bed scanner and be synchronized with the movement with probe in X-direction, record probe Z-direction deflects and is synchronized with the movement mode of oscillation with acquisition piezoelectric scanner and flat-bed scanner；Finally by record be synchronized with the movement mode of oscillation and piezoelectric scanner mode of oscillation subtracts each other, flat-bed scanner a certain location point X-direction is moved the Z-direction coupled vibrations mode caused.
Description
Technical field
The present invention relates to a kind of micro-nano-scale Dynamic Coupling based on quick-speed large-scale atomic force microscope vibration high-resolution single-point
Tracking measurement method.
Background technology
Atomic force microscope (Atomic Force Microscope, AFM) fast scanning techniques is the hot topic developed rapidly in recent years
Research direction (T.Ando, " High-speed atomic force microscopy coming of age ", Nanotechnology, 2012,
23:06200-062028.).The raising of sweep speed can not only reduce sweep time, improves operational efficiency, it is often more important that energy
Make up common AFM due to sweep speed slowly (1 second/frame), it is impossible to the deficiency that real-time monitored biological specimen dynamically changes.By
Expand sweep limits on the basis of AFM fast scanning techniques further, can realize that such as living cells, flesh tissue etc. are had phase
The large scale biological specimen of, vital movement change big to numerous and diverse structure, the geometric scale span feature such as quickly measures analysis.
Flat micrometric displacement scanning device (abbreviation flat-bed scanner) (Yu Jingjun, Pei Xu, Bi Shusheng, ancestor of based on flexible hinge structure
Brilliance, Zhang Xianmin. the progress of flexure hinge mechanism method for designing. mechanical engineering journal, 46,13,2-13, (2010) .), by
In having mechanical friction, gapless, nano-grade displacement resolving power, autokinesis is high, range of movement big and processing is simple etc.
Advantage, gradually replaces conventional piezoelectric ceramic pipe type scanning device conventional in AFM, and for having the shear stress pressure of specific use
Electroceramics formula scanning device (M.J.Rost, L.Crama, P.Schakel, E.van Tol, etc. " Scanning probe microscopes
Go video rate and beyond, " Rev.Sci.Instrument, 76,5,053710-1-053710-9, (2005) .) and tuning-fork type sweep
Retouch device (L.M.Picco, L.Bozec, M.A.Horton, andM.J.Miles, " Breaking the speed limit with atomic
Force microscopy, " Nanotechnology, 18,4,044030-1 044030-4, (2007). for), it has the most logical
The property used.Having quick and large area scanning ability AFM at present concurrently and typically use double scanner structure, scanning device one uses tradition
Scanning tubular type (X, Y, Z-direction) or scanning heap formula (Z-direction) piezoelectric scanner, main drive probe is scanned motion,
Quickly scan for realizing；Second scanning device uses flat-bed scanner (X, Y, Z-direction), and main drive sample is scanned
Motion, is used for realizing large area scanning.
But up-to-date achievement in research shows, flat-bed scanner is during fast reciprocating scanning motion, due between centers Dynamic Coupling
The pattern distortion that is uneven with sample effect power and that cause of the needle point that causes of vibration be still a urgent problem (Yan, Y.,
Wang,H.,&Zou,Q..A decoupled inversion-based iterative control approach to multi-axis
Precision positioning:3D nanopositioning example.Automatica, 48 (1), 167 176. (2012)).Flat board is swept
The between centers Dynamic Coupling vibration amplitude retouching device is in micro-nano magnitude, in addition to by its mode of oscillation of finite element stimulation, and one
As use capacitance sensor (Huang eastwards, Liu Lifeng, Tan Jiubin, Ma Biao. the peak-detector circuit of amplitude modulation capacitance displacement sensor
Design. optical precision engineering, 20,11,2444-2449, (2012) .) or laser vibration measurer (Chinese patent 201310257681.5,
Chinese patent 201310252759.4) measure its real mode of oscillation.But the actual measurement of capacitance sensor is plane vibration,
And responsive bandwidth relatively low (less than 100kHz)；Laser vibration measurer is affected by focal beam spot size, and planar point resolving power is typically micro-
Rice magnitude, and cause Z-direction coupling to shake for Dynamic Coupling vibration processes, such as flat-bed scanner X-direction rapid movement
Swinging, vialog body is when measuring Z-direction coupled vibrations, it is difficult to the motion of synchronized tracking X-direction, say, that
The actual measurement of laser vibration measurer is not the single-point coupled vibrations state in Z-direction.
Atomic force microscope micro-cantilever beam probe has nanoscale three-dimensional resolving power and resonant frequency is up to more than 100kHz,
AFM in addition to characterizing for sample surface morphology three-dimensional it can also be used to vibration measurement, such as (Xu Linyan, Li great such as Xu Linyan
Super, Liu Ruipeng etc., Nanometer vibration characterizing method based on tapping-mode AFM. piezoelectricity and acousto-optic, 32,4,677-681,2010.)
Utilizing AFM to achieve Z-direction 1MHz frequency nanoscale microvibration measuring under tapping-mode, it applies to sample Z-direction
1MHz high frequency pumping, obtains sample Z-direction mode of oscillation by the amplitude and phase place measuring probe.AFM vibration measuring side at present
Method is just for the vibration measuring of single shaft direction (such as Z-direction), for multiaxis Dynamic Coupling (the Z axis side caused such as X-direction motion
To vibration) single-point dynamic tracking measurement under state then has no report.
Show for having the quick-speed large-scale atomic force of scanning tubular type piezoelectric scanner and the double scanner structure of flat-bed scanner simultaneously
For micro mirror AFM system, piezoelectric scanner and the flat-bed scanner that can realize carry probe easily are synchronized with the movement, thus protect
Hold probe and flat-bed scanner in horizontal plane direction relative to invariant position, carry out the vibration of single-point Z-direction Dynamic Coupling high-resolution
Measure.
Summary of the invention
It is an object of the invention to overcome prior art can not synchronize lacking of single-point tracking measurement scanning device inter-axis coupling micrometric displacement vibration
Point, proposes a kind of micro-nano-scale Dynamic Coupling vibration high-resolution single-point tracking measurement method.
Measuring method of the present invention is based on quick-speed large-scale atomic force microscope, by high-resolution synchronized tracking flat-bed scanner X-axis side
To single-point dynamic movement process, measure the micro-nano-scale coupled vibrations of Z-direction.
Concretely comprising the following steps of the inventive method:
1) atomic force microscope piezoelectric scanner Z-direction mode of oscillation is determined；
2) atomic force microscope automatic inserting needle process and probe original state are set；
3) determine that piezoelectric scanner and flat-bed scanner are synchronized with the movement mode of oscillation；
4) flat-bed scanner Z-direction coupled vibrations mode is determined.
Described atomic force microscope is quick-speed large-scale atomic force microscope, and described atomic force microscope includes photoelectric sensor
(PSD), LASER Light Source, probe, motor, piezoelectric scanner, controller and flat-bed scanner.
Described mode of oscillation is energized object shift value at a time under a certain external drive.
Described step 1) determines that the method for atomic force microscope piezoelectric scanner Z-direction mode of oscillation is:
Atomic force microscope controller control piezoelectric scanner drive probe not in contact with under flat-bed scanner surface condition, with necessarily
Frequency fxWith amplitude SxCarry out X-direction shuttle-scanning motion, by photoelectric sensor sensing from swashing that probe backside reflection is returned
Light beam measures the Z-direction deflection situation of probe, thus obtains piezoelectric scanner Z-direction mode of oscillation and beIn formula, t is the time, and A ' is the deflection amplitude of probe Z-direction, and ω is the angle speed of probe Z-direction
Degree,Starting phase angle for probe Z-direction.
Described step 2) method that arranges AFM automatic inserting needle process and probe original state is:
Probe is driven to approach to flat-bed scanner surface, when photoelectric sensor detects from probe backside reflection mistake by motor
When the spot signal come deflects, stopping motor, the automatic inserting needle process of atomic force microscope completes.For preventing probe
Depart from the probe self-oscillation impact caused during vibration measuring with flat-bed scanner surface, stretch by adjusting piezoelectric scanner Z-direction
Long amount, makes probe contact flat-bed scanner surface all the time.
Described step 3) determines that piezoelectric scanner and the flat-bed scanner mode of oscillation method that is synchronized with the movement is:
Controlling piezoelectric scanner respectively drives probe and flat-bed scanner in X-direction with frequency fxWith amplitude SxSynchronous reciprocating is swept
Retouch motion, keep probe to be fixed as x in X-direction relative to position with flat-bed scanneri, sensed from probe by photoelectric sensor
The laser beam that backside reflection is returned deflects situation to the Z-direction measuring probe, measures piezoelectric scanner fortune Tong Bu with flat-bed scanner
Dynamic mode of oscillation isIn formula, the Z-direction coupled vibrations of A flat-bed scanner causes
The Z-direction deflection amplitude of probe,The initial phase that the Z-direction of probe deflects is caused for the Z-direction coupled vibrations of flat-bed scanner
Parallactic angle.
Described step 4) determines that the method for flat-bed scanner Z-direction coupled vibrations mode is:
Mode of oscillation S ' ' (t) that piezoelectric scanner and flat-bed scanner is synchronized with the movement subtracts each other with piezoelectric scanner mode of oscillation S ' (t),
I.e. can determine that flat-bed scanner Z-direction coupled vibrations mode S (t)=S ' ' (t)-S ' (t).
The principle of the invention is: in the case of atomic force microscope probe does not contacts with flat-bed scanner surface, by controlling piezoelectricity
Scanning device drives probe to carry out the shuttle-scanning motion of X-direction, determines piezoelectric scanner Z-direction mode of oscillation, waits to visit
After pin contacts with flat-bed scanner surface, control piezoelectric scanner and drive probe to transport in X-direction synchronous scanning with flat-bed scanner
Dynamic, the piezoelectric scanner recorded and flat-bed scanner synchronous vibration mode are subtracted each other with piezoelectric scanner mode of oscillation, can draw
The Z-direction coupled vibrations mode that a certain location point of flat-bed scanner causes because of X-direction motion.
Present invention have the advantage that
The present invention utilizes AFM probe to have the features such as horizontal and vertical nano level high resolution power and high resonant frequency, can be to tool
There is the micro-displacement actuator of micro-nano-scale Dynamic Coupling oscillation phenomenon, such as flat-bed scanner etc., it is achieved the high-resolution of coupled vibrations
Single-point tracking measurement.This measuring method has flexible, simple, precision advantages of higher.The coupled vibrations mode measured is permissible
For eliminating the pattern distortion caused in the quick scanning process of flat-bed scanner, improve quick-speed large-scale atomic force microscope further
Imaging precision.This measuring method for the vibration measurement of precision instrument, especially inter-axis coupling vibration measurement, have the heaviest
The using value wanted.
Accompanying drawing explanation
Fig. 1 is quick-speed large-scale AFM piezoelectric scanner mode of oscillation instrumentation plan；
Fig. 2 is that piezoelectric scanner drives probe synchronous detecting flat-bed scanner Z-direction coupled vibrations mode schematic diagram；
In figure: 1 photoelectric sensor (PSD), 2 LASER Light Sources, 3AFM probe, 4 motors, 5 piezoelectric scanners, 6
Controller, 7 flat-bed scanners.
Detailed description of the invention
The present invention is further illustrated below in conjunction with the drawings and specific embodiments.
The step of the inventive method is as follows:
1) AFM piezoelectric scanner Z-direction mode of oscillation is determined:
As it is shown in figure 1, at probe 3 not in contact with under flat-bed scanner 7 surface condition, atomic force microscope controller 6 controls pressure
Electrical scanner 5 drives probe 3 to carry out the motion of X-direction 100um shuttle-scanning with 100Hz frequency, and photoelectric sensor 1 senses
The laser beam from LASER Light Source 2 is launched, by measuring the Z-direction deflection situation of probe 3 from what probe 3 backside reflection came
The Z-direction mode of oscillation obtaining piezoelectric scanner 5 is S ' (t)=0.027sin (200 π t-2.750) um.
2) AFM automatic inserting needle process and probe original state be set:
Motor 4 drives probe 3 to approach to flat-bed scanner 7 surface, when photoelectric sensor 1 detects with 0.5um/s speed
To the spot signal come from probe 3 backside reflection be deflected over 100mv time, stop motor 4, atomic force microscope from
Dynamic inserting needle process completes.For departing from, with flat-bed scanner 7 surface, probe 3 self-oscillation caused during preventing probe 3 vibration measuring
Impact, by adjusting the Z-direction elongation of piezoelectric scanner 5, makes photoelectric sensor 1 deflection voltage reach about 400mv,
Ensure that probe 3 contacts flat-bed scanner 7 surface all the time.
3) determine that piezoelectric scanner and flat-bed scanner are synchronized with the movement mode of oscillation:
As in figure 2 it is shown, controller 6 control respectively piezoelectric scanner 5 drive probe 3 and flat-bed scanner 7 X-direction with
100Hz frequency and 100um amplitude synchronous reciprocating scanning motion, keep probe 3 relative in X-direction with flat-bed scanner 7
An x is fixed in positioni, measured the Z-direction deflection situation of probe 3 by photoelectric sensor 1, measure piezoelectric scanner 5 with flat
The Z-direction mode of oscillation that scanner plate 7 is synchronized with the movement in X-direction is:
S′′(t)=0.027sin(200πt-2.750)+0.018sin(200πt-2.930)um；
4) flat-bed scanner Z-direction coupled vibrations mode is determined:
Be synchronized with the movement mode of oscillation by piezoelectric scanner 5 and flat-bed scanner 7With piezoelectric scanner 5 mode of oscillation
Subtract each other, i.e. can determine that the Z-direction coupled vibrations mode of flat-bed scanner 7:
S (t)=0.018sin (200 π t-2.930) um.
Claims (2)
1. the single-point tracking measurement method of a micro-nano-scale Dynamic Coupling vibration, it is characterized in that, described measuring method, based on atomic force microscope, by synchronized tracking flat-bed scanner X-direction single-point dynamic movement process, measures the micro-nano-scale coupled vibrations of Z-direction；Concretely comprising the following steps of described method:
1) atomic force microscope piezoelectric scanner Z-direction mode of oscillation is determined；
2) atomic force microscope automatic inserting needle process and probe original state are set；
3) determine that piezoelectric scanner and flat-bed scanner are synchronized with the movement mode of oscillation；
4) flat-bed scanner Z-direction coupled vibrations mode is determined；
Described step 1) method that determines atomic force microscope piezoelectric scanner Z-direction mode of oscillation is:
Atomic force microscope controller (6) control piezoelectric scanner (5) drive probe (3) when not in contact with the surface of flat-bed scanner (7), with frequency fxWith amplitude SxCarry out X-direction shuttle-scanning motion, the Z-direction deflection situation of probe (3) is measured in the transmitting returned from probe (3) backside reflection by photoelectric sensor (1) sensing from the laser beam of LASER Light Source (2), thus obtains piezoelectric scanner (5) Z-direction mode of oscillation and beIn formula: t is the time, A ' is the deflection amplitude of probe (3) Z-direction, and ω is the angular velocity of probe (3) Z-direction deflection,Starting phase angle for the deflection of probe (3) Z-direction；
Described step 2) method that arranges AFM automatic inserting needle process and probe original state is:
Motor (4) drives probe (3) to approach to the surface of flat-bed scanner (7), when photoelectric sensor (1) detects that the spot signal come from probe (3) backside reflection deflects more than 100mv, stopping motor (4), the automatic inserting needle process of atomic force microscope completes；For preventing owing to probe (3) departs from the probe self-oscillation impact caused during vibration measuring with flat-bed scanner surface, by adjusting the Z-direction elongation of piezoelectric scanner (5), make photoelectric sensor (1) deflection voltage reach 400mv, make probe contact flat-bed scanner surface all the time；
Described step 3) piezoelectric scanner and the flat-bed scanner mode of oscillation method that is synchronized with the movement that determines is:
Atomic force microscope controller (6) controls piezoelectric scanner (5) respectively and drives probe (3) and flat-bed scanner (7) in X-direction with frequency fxWith amplitude SxSynchronous reciprocating scanning motion, keeps probe (3) to be fixed on an x with flat-bed scanner (7) relative to position in X-directioni, by the Z-direction deflection situation of photoelectric sensor (1) detection probe (3), measuring piezoelectric scanner (5) and flat-bed scanner (7) mode of oscillation that is synchronized with the movement isIn formula: A is the Z-direction deflection amplitude that the Z-direction coupled vibrations of flat-bed scanner (7) causes probe (3),The starting phase angle that the Z-direction of probe (3) deflects is caused for the Z-direction coupled vibrations of flat-bed scanner (7)；
Described step 4) method that determines flat-bed scanner (7) Z-direction coupled vibrations mode is:
Be synchronized with the movement mode of oscillation S by piezoelectric scanner and flat-bed scanner, and " (t) subtracts each other with piezoelectric scanner mode of oscillation S ' (t), i.e. obtains flat-bed scanner Z-direction coupled vibrations mode S (t)=S " (t)-S ' (t).
2. the single-point tracking measurement method vibrated according to the micro-nano-scale Dynamic Coupling described in claim 1, it is characterized in that, described step 1) in, the Z-direction mode of oscillation of described piezoelectric scanner (5) is S ' (t)=0.027sin (200 π t-2.750) μm；
Described step 3) in, the Z-direction mode of oscillation that piezoelectric scanner (5) is synchronized with the movement in X-direction with flat-bed scanner (7) is:
S " (t)=[0.027sin (200 π t-2.750)+0.018sin (200 π t-2.930)] μm；
Described step 4) in, the Z-direction coupled vibrations mode of flat-bed scanner (7) is:
S (t)=0.018sin (200 π t-2.930) μm.
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| CN105115432A (en) * | 2015-09-01 | 2015-12-02 | 武汉华星光电技术有限公司 | Detection system and method of coating membrane thickness |
| CN105137126B (en) * | 2015-09-16 | 2018-10-30 | 中北大学 | A kind of scanning magnetometer of nitrogen vacancy colour center diamond |
| CN105258786A (en) * | 2015-11-03 | 2016-01-20 | 中国科学院半导体研究所 | Rapid measurement of resonant frequency and quality factor of high-frequency harmonic oscillator |
| WO2018039246A1 (en) * | 2016-08-22 | 2018-03-01 | Bruker Nano, Inc. | Infrared characterization of a sample using peak force tapping |
| US11333661B2 (en) | 2017-06-28 | 2022-05-17 | Cixi Institute Of Biomedical Engineering Ningbo Institute Of Industrial Technology, Chinese Academy Of Sciences | Detection analyzer |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3087202B2 (en) * | 1993-03-25 | 2000-09-11 | セイコーインスツルメンツ株式会社 | Amplitude detection method |
| CN1587981A (en) * | 2004-08-04 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Light-spot tracking device of atomic force microscope |
| CN101403680A (en) * | 2008-11-12 | 2009-04-08 | 中国科学院上海光学精密机械研究所 | Beam tracking apparatus of needle point scanning type atomic force microscope |
| CN101839924A (en) * | 2010-05-28 | 2010-09-22 | 北京工业大学 | Atomic-force acoustic microscopy cantilever beam contact resonance frequency tracking system |
| US7861577B2 (en) * | 2006-08-30 | 2011-01-04 | Seiko Instruments Inc. | Electric potential difference detection method and scanning probe microscope |
| CN202599977U (en) * | 2012-06-12 | 2012-12-12 | 浙江大学 | Twin-tube scanner linkage tracking type atomic force microscopy (AFM) detection system |
-
2013
- 2013-12-03 CN CN201310642439.XA patent/CN103645347B/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3087202B2 (en) * | 1993-03-25 | 2000-09-11 | セイコーインスツルメンツ株式会社 | Amplitude detection method |
| CN1587981A (en) * | 2004-08-04 | 2005-03-02 | 中国科学院上海光学精密机械研究所 | Light-spot tracking device of atomic force microscope |
| US7861577B2 (en) * | 2006-08-30 | 2011-01-04 | Seiko Instruments Inc. | Electric potential difference detection method and scanning probe microscope |
| CN101403680A (en) * | 2008-11-12 | 2009-04-08 | 中国科学院上海光学精密机械研究所 | Beam tracking apparatus of needle point scanning type atomic force microscope |
| CN101839924A (en) * | 2010-05-28 | 2010-09-22 | 北京工业大学 | Atomic-force acoustic microscopy cantilever beam contact resonance frequency tracking system |
| CN202599977U (en) * | 2012-06-12 | 2012-12-12 | 浙江大学 | Twin-tube scanner linkage tracking type atomic force microscopy (AFM) detection system |
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