CN103616347B - The optimal index of modulation implementation method of many gas spectral line detection and device - Google Patents
The optimal index of modulation implementation method of many gas spectral line detection and device Download PDFInfo
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- CN103616347B CN103616347B CN201310660971.4A CN201310660971A CN103616347B CN 103616347 B CN103616347 B CN 103616347B CN 201310660971 A CN201310660971 A CN 201310660971A CN 103616347 B CN103616347 B CN 103616347B
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Abstract
The invention belongs to the field of measuring technique of gas concentration, temperature, pressure or flow velocity, disclosure satisfy that many gas spectral line detects and make the method and apparatus that each spectral line all can realize optimum detection for providing, the many gas concentrations of TDLAS system, pressure, temperature or the detection sensitivity of flow velocity, the method and device can be improved be applicable to online, original position or the offline inspection of trace gas or monitor application.For this, the technical scheme is that the optimal index of modulation implementation method that many gas spectral line detects, detect the measurement to the parameter of the gas including concentration, pressure, temperature and flow velocity of the gas absorption line to laser, within a scan period of optical maser wavelength, the wavelength-modulated coefficient of laser is change, i.e. uses two or more sinusoidal amplitude within a scan period.Present invention is mainly applied to gas detection.
Description
Technical field
The invention belongs to the field of measuring technique of gas concentration, temperature, pressure or flow velocity, relate to many gas components and examine simultaneously
Survey or detect while a plurality of absorption line of pure gas, by optimal to the index of modulation of all spectral lines to be measured, real
The method and apparatus that now many gas spectral line detection sensitivity improves, specifically, relate to the detection of many gas spectral line most preferably modulates system
Number implementation method and device.
Background technology
Tunable diode laser absorption spectroscopy analyzes (Tunable diode laser absorption
Spectroscopy, TDLAS) it is a kind of high sensitivity, high-resolution and the gas detection technology of quickly response, it is widely used in work
The fields such as gas monitor, ambient air detection and scientific research in industry flow process.It utilizes the wavelength of diode laser to adjust
Humorous characteristic, i.e. by changing temperature or the Injection Current of diode laser, changes the output wavelength of laser instrument.At wavelength tuning
In the range of, detect the characteristic absorption spectrum of gas to be measured, by the Line broadening analysis to absorption spectrum, the dense of gas can be measured
Degree, temperature, pressure or flow velocity.
For the gas that high concentration or absorption coefficient are bigger, generally use direct absorption spectrum detection method.Directly absorb
Spectrum is to detect by luminous intensity after tested gas with the change of wavelength, by the intensive analysis to absorption signal, by than erlang
Bert (Beer-Lambert) law calculates the concentration of tested gas.This measuring method is by the light-intensity variation of light source, detector
Affecting with amplifier noise, external interference etc., its measure error is relatively low compared with big, sensitivity and precision.
In order to improve detection sensitivity, generally use Wavelength modulation spectroscopy (Wavelength modulation
Spectroscopy, WMS) technology.Laser is done wavelength-modulated by WMS technology, produces length scanning and high frequency modulated, inhales through gas
Laser after receipts is received by photodetector, utilizes phase-sensitive detection (generally using lock-in amplifier) technology for detection GAS ABSORPTION light
The high frequency modulated harmonic signal of spectrum.WMS can suppress the shadow of the various noises such as laser intensity fluctuating, system 1/f noise, drift
Ring, improve the signal to noise ratio of signal, more than detection sensitivity two orders of magnitude higher than direct absorption spectroanalysis technology.WMS technology
In length scanning and high frequency modulated, apply sawtooth waveforms superposition sine by signal generator to diode laser and realize,
Sawtooth waveforms corresponds to length scanning, and its sweep limits at least covers a complete gas absorption spectrum line；High frequency sinusoidal signal pair
The wavelength modulation amplitude answered is fixed with the ratio of gas absorption spectrum line half width (half width at half-maximum, HWHM)
Justice is the index of modulation, and the index of modulation is relevant with the amplitude of harmonic detecting signal and signal to noise ratio, for 2 subharmonic, it is considered that
The good index of modulation is 2.2, and the Signal-to-Noise now obtained is high, and corresponding detection sensitivity is the highest.
But, for a plurality of gas spectral line detection case simultaneously, due to these breadths of spectrum line [full width at half maximum, FWHM or half
High half-breadth, HWHM] may be different, in order to reach high signal to noise ratio, the parameter being required for each spectral line sets difference respectively
The index of modulation, i.e. use different high-frequency modulation signal amplitudes.And existing signal generator and TDLAS system constructive method,
It is the sawtooth waveforms produced respectively by signal generator and sine-wave superimposed realization, have employed certain fixing sinusoidal wave amplitude
Degree, within a sawtooch sweep cycle, it is impossible to take into account all line parameters, thus causes the sensitivity that many gas spectral line detects
Relatively low with precision.
Summary of the invention
It is contemplated that overcome the deficiencies in the prior art, it is provided that one disclosure satisfy that many gas spectral line detects and makes
Each spectral line all can realize the method and apparatus of optimum detection.Based on methods and apparatus of the present invention, TDLAS system can be improved many
The detection sensitivity of gas concentration, pressure, temperature or flow velocity, the method and device be applicable to trace gas online, in situ or
Offline inspection or monitoring application.
For reaching above-mentioned purpose, the technical scheme is that the optimal index of modulation realization side that many gas spectral line detects
Method, detects the measurement to the parameter of the gas including concentration, pressure, temperature and flow velocity of the gas absorption line to laser,
It is characterized in that, within a scan period of optical maser wavelength, the wavelength-modulated coefficient of laser is change, i.e. a scanning week
Two or more sinusoidal amplitude are used in phase.
Sinusoidal wave amplitude VmBy the modulating characteristic of diode laser, the modulation voltage-electric current conversion of laser driver
Coefficient, line parameters to be measured determine jointly:
δ=Vmαβ (1)
Wherein, δ is the wavelength-modulated degree of depth that high frequency sinusoidal signal is corresponding, unit: nm；γmIt it is half height half of spectral line to be measured
Wide HWHM, unit: nm；α is the Voltage-current conversion coefficient of laser driver, unit: mA/V；β is the electricity of diode laser
Stream tuning speed, unit: nm/mA, in the scan period, the width W of the modulated sinusoid corresponding to every gas spectral lines=
k·γm, k is constant, 4≤k≤8.
The change of laser wavelength modulation coefficient is by changing the high frequency being added on sawtooth waveforms in laser instrument Injection Current
The amplitude of sinusoidal signal realizes, and near every gas absorption spectrum line, sets the tune of optical maser wavelength according to the width of this spectral line
Coefficient processed, seamlessly transits between different modulating coefficient, no matter there being several absorption lines within a scan period, all makes institute
The index of modulation having absorption line reaches optimal.
The optimal index of modulation of many gas spectral line detection realizes device, including: laser driver, diode laser,
Signal generator, photodetector, preamplifier, lock-in amplifier, a/d converter, computer or flush bonding processor, light
Collimation lens, gas cell, the laser that laser driver drives diode laser to produce through gas cell and is arranged on gas
The light collimating lenses at two ends, pond projects photodetector, and the output signal of photodetector is through preamplifier, phase-locked amplification
Device, a/d converter export computer or flush bonding processor, and signal generator is used for producing two or more sine
The modulated signal of wave amplitude is added in the Injection Current of diode laser, and lock-in amplifier also output feedback signal is to signal
Generator.
Signal generator includes that microcontroller, program storage, logic circuit, D-A converting circuit, data store
Device, modulated signal output interface, synchronous demodulation signal output interface, microcontroller runs control according to the program in program storage
Logic circuit processed produces synchronous demodulation signal and exports synchronous demodulation signal output interface, and logic circuit is also by digital-to-analog
Change-over circuit produces modulated signal and exports modulated signal output interface, and modulated signal is by sawtooth waveforms, two or more
Sinusoidal amplitude Signal averaging forms, and synchronizing signal is the pulse signal Tong Bu with sawtooth waveforms.
The technical characterstic of the present invention and effect:
All absorption lines in sweep limits can all accomplish the optimal index of modulation, and reduce spectral line periphery is various
The response of noise, it is achieved optimal spectrum signal detection.Accordingly, improving the precision of spectrum analysis, the present invention may be used for single suction
Receive the detection of spectral line, it is also possible to for the detection of multiple absorption lines.Especially multiline modulated spectrum is analyzed (such as multiline
Temperature survey) precision raising effect bigger.
Accompanying drawing explanation
Fig. 1 is the diode laser modulated signal waveform (embodiment 1) of the present invention
A.CO2, CO, C2H2 absorption line near 1582nm
B. high frequency sinusoidal modulated signal
C. sawtooth waveforms tuning signal
D. high frequency sinusoidal signal and sawtooth signal addition of waveforms constitute the modulated signal of diode laser.
Fig. 2 is the modulated signal producing circuit block diagram of the present invention.
1 microcontroller
2 program storages
3 logic circuits
4 D-A converting circuits
5 data storages
6 modulated signal output interfaces
7 synchronous demodulation signal output interfaces.
Fig. 3 (embodiment 1), Fig. 5 (embodiment 2) are the TDLAS systems that application the inventive method and device carry out gas detection
System block diagram
8 laser drivers
9 diode lasers
10 signal generators
11 photodetectors
12 preamplifiers
13 lock-in amplifiers
14 a/d converter
15 computers (flush bonding processor)
16,17 light collimating lenses
18 gas cells.
Fig. 4 is the diode laser modulated signal waveform (embodiment 2) of the present invention
A.H2O absorption line near 1395nm
B. high frequency sinusoidal signal and sawtooth signal addition of waveforms constitute the modulated signal of diode laser.
Detailed description of the invention
Many gas spectral line: refer to the absorption line of multiple gases component or a plurality of absorption line of gas.
A kind of method and apparatus that multiple gas absorption spectrum lines do the detection of the optimal index of modulation of the present invention, in optical maser wavelength
A scan period in, voltage-to-current based on gas line parameters to be measured, laser tuning characteristic and laser driver turns
Change coefficient, multiple modulated signal amplitude is set flexibly, to ensure that the detection of each spectral line to be measured reaches the optimal index of modulation.?
More modulation signal amplitude in one period of wavelength sweep is that signal generator based on stored digital mode realizes, signal
Generator is the circuit (module) that PLD (FPGA and/or CPLD) is constituted.Present invention is mainly used for a plurality of absorption
Analyze while spectral line, detect, may be used for the measurement of gas concentration, temperature, pressure or flow velocity.
The technical scheme is that
The wavelength-modulated absorption spectrum method that a kind of index of modulation is variable, within a scan period of optical maser wavelength, swashs
The wavelength-modulated coefficient of light is change, i.e. uses two or more sinusoidal amplitude within a scan period.Just
Amplitude Vm of string ripple is by the modulating characteristic of diode laser, the modulation voltage-electric current conversion coefficient of laser driver, spectrum to be measured
Line parameter determines jointly.
δ=Vmαβ (1)
Wherein, δ is the wavelength-modulated degree of depth (unit: nm) that high frequency sinusoidal signal is corresponding；γmIt it is half height half of spectral line to be measured
Wide [HWHM (unit: nm)]；α is the Voltage-current conversion coefficient (unit: mA/V) of laser driver；β is diode laser
Electric current tuning speed (unit: nm/mA).
The wavelength-modulated absorption spectrum method that the described index of modulation is variable, the change of laser wavelength modulation coefficient is by changing
Become the amplitude realization of the high frequency sinusoidal signal being added on sawtooth waveforms in laser instrument Injection Current.At every gas absorption spectrum line
Near, set the index of modulation of optical maser wavelength according to the width of this spectral line, seamlessly transit between different modulating coefficient.No matter one
There are several absorption lines in the individual scan period, all make the index of modulation of all absorption lines reaches optimal.At deviation gas
Index of modulation during absorption spectrum reduces (less than 1/10th of traditional modulation coefficient), can eliminate doing near spectral line with this
Disturb.
The wavelength-modulated absorption spectrum device that the described index of modulation is variable, its concrete methods of realizing is, by signal generator
Or custom-designed signal generating circuit produces modulation (and/or tuning) signal.Signal generator and software thereof can be used to compile
Collect random waveform signal, export specific modulated signal by signal generating module；Custom-designed signal can also be used to send out
Raw circuit board, based on stored digital mode, the circuit (module) being made up of PLD (FPGA and/or CPLD), its
Output signal includes the am signals modulation for laser instrument Injection Current, also includes that demodulated signal exports for phase-locked inspection
Reference signal required for survey, also includes that synchronizing signal exports for data acquisition or process.
Modulated signal controls the Injection Current of diode laser by laser driver, it is achieved sweep optical maser wavelength
Retouching and high frequency modulated, laser is received by photoelectric detector and lock-in amplifier demodulates through GAS ABSORPTION, then by computer to data
It is further processed, obtains the parameters such as the concentration of gas, temperature, pressure and flow velocity.
Below in conjunction with the accompanying drawings with embodiment describe in detail the present invention detailed description of the invention:
Three kinds of gas concentrations are measured) near embodiment 1:(1580nm
In 1580.5mn～1581.0nm wave-length coverage, CO can be measured2、CO、C2H2Three kinds of gases, absorption line
Parameter can be consulted HITRAN database and be obtained.Use Distributed Feedback Laser, can cover at a period of wavelength sweep, measure this
The concentration of three kinds of gases.But to be measured three spectral line has different line parameters, as shown in table 1.
Table 1.CO2、CO、C2H2Parameter (T=296K, P=1atm, the x of absorption line near 1580nmCO2=xCO=
xC2H2=1%, the air of 97%)
| Sequence number | Gas molecule | Line wavelength/nm | Absorption Line is strong/cm/molecule | Breadth of spectrum line/nm |
| 1. | CO2 | 1580.993 | 1.13E-23 | 0.0359 |
| 2. | CO | 1580.828 | 1.57E-23 | 0.0319 |
| 3. | C2H2 | 1581.129 | 9.08E-25 | 0.0385 |
Use Distributed Feedback Laser can cover these three spectral lines in a period of wavelength sweep, with current existing method, right
The high frequency sinusoidal modulation amplitude of laser instrument is fixing, therefore, identical to the wavelength modulation amplitude of these three spectral lines, but modulation
Coefficient is different.Cannot take into account so that they can reach optimum detection.
The spectroscopic analysis methods of the multiline detection of the present invention, by arranging multiple difference in a period of wavelength sweep
Modulated signal amplitude, it is possible to achieve the optimum detection (having three spectral lines in the present embodiment) to all spectral lines.Gas to be measured
Article three, absorption line, propose put high-frequency modulation signal, sawtooch sweep signal as shown in Figure 1.What wherein Fig. 1 a was given is to treat
Survey the absorption line of three kinds of gases, Fig. 1 b be high frequency sinusoidal signal, Fig. 1 c be sawtooth signal, Fig. 1 d be high frequency sinusoidal signal and
Sawtooth signal addition of waveforms constitutes the modulated signal of diode laser.
The spectral analysis device of the detection multiline of the present invention, including diode laser 9, laser driver 8, signal
Generator 10, photodetector 11, preamplifier 12, lock-in amplifier 13, gas cell 18, computer (or embedded processing
Device) 15, light collimating lenses 16/17, the part such as gas cell 18, its principle of compositionality is as shown in Figure 3.Wherein diode laser, lock
Phase amplifier, gas cell, computer can use instrument or the module of commercialization.Signal generator can use support programming mould
The arbitrary-function generator of formula, or use custom-designed signal generating circuit (module), the present embodiment uses specially
The signal generating circuit module of door design, its schematic block circuit diagram is as shown in Figure 2.Wherein sinusoidal wave amplitude spectrum based on table 1
Line width, calculates according to formula (1), is respectively as follows:
A1=79mV
A2=70mV
A3=85mV
Amin=7mV
Seamlessly transit between the sinusoidal signal of different amplitudes, the modulated signal required for formation, and superimposed with sawtooth waveforms
Forming the modulated signal of laser driver, be written to the data storage (as shown in Figure 2) of signal generating circuit, this modulation is believed
Number output is to the modulated signal input (as shown in Figure 3) of laser driver.
The sinusoidal signal frequency f of signal generating circuit module output can be that the number hundreds of kHz of kHz (takes in the present embodiment
10kHz), it is provided that to the demodulated signal of lock-in amplifier be frequency be the square-wave signal of 2f (taking 20kHz in the present embodiment).Signal
Circuit module is occurred also to produce synchronizing signal, for the acquisition process of data.
The operation principle of the detection multiline spectral analysis device of the present invention is that laser driver controls diode laser
The temperature of device and Injection Current, Injection Current is controlled by input modulating signal, produces the laser of wavelength tuning, in gas cell
GAS ABSORPTION after, photodetector pickup spectral signal also sends into lock-in amplifier after preamplifier amplifies, and signal is sent out
Raw device provides modulated signal and the reference signal of lock-in amplifier needs of laser driver needs.The output of lock-in amplifier
Analog signal be converted to data signal through a/d converter and be sent to computer (or flush bonding processor) and carry out processing, analyzing,
The concentration of gas is calculated by Lambert-beer law.
Embodiment 2:(1.395um measures temperature, open light path)
Temperature, H near 1395.6nm is measured by measuring a plurality of absorption line of hydrone2The absorption line parameter of O can
Obtain, as shown in table 2 consulting HITRAN database.Using Distributed Feedback Laser, a period of wavelength sweep can cover two
The absorption line of H2O.Having different breadths of spectrum line yet with two spectral lines to be measured, they are respectively as follows:
Table 2.H2O is parameter (T=296K, P=1atm, the x of absorption line near 1395.6nmH2O=10%, 90%
Air)
| Sequence number | Line wavelength/nm | Wave number/cm-1 | Absorption Line is strong/cm/molecule | Breadth of spectrum line/nm |
| 1. | 1395.693 | 7164.90 | 1.47E-22 | 0.0202 |
| 2. | 1395.514 | 7165.82 | 5.93E-21 | 0.0505 |
Use Distributed Feedback Laser can cover these two spectral lines in a period of wavelength sweep, with current existing method, right
The high frequency sinusoidal modulation amplitude of laser instrument is fixing, therefore, identical to the wavelength modulation amplitude of these two spectral lines, but modulation
Coefficient is different.Cannot take into account so that they can reach optimum detection.
The spectroscopic analysis methods of the multiline detection of the present invention, by arranging multiple difference in a period of wavelength sweep
Modulated signal amplitude, it is possible to achieve the optimum detection (having two spectral lines in the present embodiment) to all spectral lines.Gas to be measured
Article two, absorption line, propose put high-frequency modulation signal, sawtooch sweep signal as shown in Figure 4.What wherein Fig. 4 a was given is to sweep
Retouch H in wave band2The absorption line of O, Fig. 4 b is high frequency sinusoidal signal and sawtooth signal addition of waveforms composition diode laser
Modulated signal.
The spectral analysis device of the detection multiline of the present invention, sends out including diode laser, laser driver, signal
The parts such as raw device, lock-in amplifier, gas cell, computer, its principle of compositionality is as shown in Figure 5.Wherein diode laser, phase-locked
Amplifier, gas cell, computer can use instrument or the module of commercialization.Signal generator can use support programming mode
Arbitrary-function generator, or use custom-designed signal generating circuit (module), the present embodiment use special
The signal generating circuit module of design, its schematic block circuit diagram is as shown in Figure 2.Wherein sinusoidal wave amplitude spectral line based on table 2
Width, calculates according to formula (1), is respectively as follows:
A1=45mV
A2=111mV
Amin=5mV
Seamlessly transit between the sinusoidal signal of different amplitudes, the modulated signal required for formation, and superimposed with sawtooth waveforms
Forming the modulated signal of laser driver, be written to the data storage (as shown in Figure 2) of signal generating circuit, this modulation is believed
Number output is to the modulated signal input (as shown in Figure 5) of laser driver.
The sinusoidal signal frequency f of signal generating circuit module output can be that the number hundreds of kHz of kHz (takes in the present embodiment
50kHz), it is provided that to the demodulated signal of lock-in amplifier be frequency be the square-wave signal of 2f (taking 100kHz in the present embodiment).Letter
Number occur circuit module also produce synchronizing signal, for the acquisition process of data.
Claims (4)
1. an optimal index of modulation implementation method for the spectral line of gas more than detection, is characterized in that, detects the gas absorption to laser
The spectral line measurement to the parameter of the gas including concentration, pressure, temperature and flow velocity, is characterized in that, in the one of optical maser wavelength
In the individual scan period, the wavelength-modulated coefficient of laser is change, i.e. uses two or more within a scan period
Sinusoidal amplitude；Wherein, the change of laser wavelength modulation coefficient is by changing the sawtooth that is added in laser instrument Injection Current
The amplitude of the high frequency sinusoidal signal on ripple realizes, and near every gas absorption spectrum line, sets according to the width of this spectral line and swashs
The index of modulation of optical wavelength, seamlessly transits between different modulating coefficient, no matter there being several absorption lines within a scan period
And spectral line is the most overlapping, all make the index of modulation of all absorption lines reaches optimal.
The optimal index of modulation implementation method of many gas spectral line the most as claimed in claim 1 detection, is characterized in that, sinusoidal wave
Amplitude VmBy the modulating characteristic of diode laser, the modulation voltage-electric current conversion coefficient of laser driver, line parameters to be measured
Jointly determine:
δ=Vmαβ (1)
Wherein, δ is the wavelength-modulated degree of depth that high frequency sinusoidal signal is corresponding, unit: nm；γmIt it is half high half-breadth of spectral line to be measured
HWHM, unit: nm；α is the Voltage-current conversion coefficient of laser driver, unit: mA/V；β is the electric current of diode laser
Tuning speed, unit: nm/mA, in the scan period, the width W of the modulated sinusoid corresponding to every gas spectral lines=
k·γm, k is constant, 4≤k≤8.
3. the optimal index of modulation of the spectral line of gas more than detection realizes a device, it is characterized in that, including: laser driver, two
Pole pipe laser instrument, signal generator, photodetector, preamplifier, lock-in amplifier, a/d converter, computer or embedding
Formula processor, light collimating lenses, gas cell, laser driver drive laser that diode laser produces through gas cell and
The light collimating lenses being arranged on gas cell two ends projects photodetector, and the premenstrual storing of output signal of photodetector is big
Device, lock-in amplifier, a/d converter export computer or flush bonding processor, and signal generator is for producing two or two
The modulated signal of above sinusoidal amplitude is added in the Injection Current of diode laser, and lock-in amplifier also exports feedback
Signal is to signal generator；Wherein, the change of laser wavelength modulation coefficient is by being added in change laser instrument Injection Current
The amplitude of the high frequency sinusoidal signal on sawtooth waveforms realizes, and near every gas absorption spectrum line, sets according to the width of this spectral line
Determine the index of modulation of optical maser wavelength, seamlessly transit between different modulating coefficient, no matter there being several absorptions within a scan period
Spectral line and spectral line are the most overlapping, all make the index of modulation of all absorption lines reaches optimal.
The optimal index of modulation of many gas spectral line the most as claimed in claim 3 detection realizes device, it is characterized in that, signal occurs
Device includes that microcontroller, program storage, logic circuit, D-A converting circuit, data storage, modulated signal export
Interface, synchronous demodulation signal output interface, microcontroller runs control logic circuit according to the program in program storage and produces
Synchronous demodulation signal exports synchronous demodulation signal output interface, and logic circuit produces also by D-A converting circuit and adjusts
Signal processed exports modulated signal output interface, and modulated signal is by sawtooth waveforms, two or more sinusoidal amplitude signal
Being formed by stacking, synchronizing signal is the pulse signal Tong Bu with sawtooth waveforms.
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