CN103575624A - Optical particle measurement device - Google Patents
Optical particle measurement device Download PDFInfo
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- CN103575624A CN103575624A CN201210278005.1A CN201210278005A CN103575624A CN 103575624 A CN103575624 A CN 103575624A CN 201210278005 A CN201210278005 A CN 201210278005A CN 103575624 A CN103575624 A CN 103575624A
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Abstract
The invention provides an optical particle measurement device which is characterized by comprising a measurement chamber, a plurality of light source parts, a plurality of light detection parts, a light eliminating part and a plurality of checking calculation parts, wherein the measurement chamber is provided with an suction hole for sucking air into a measurement space and a discharging hole for discharging the air passing through the measurement space to the outside; the light source parts are used for irradiating light beams with different wavelengths to the measurement space of the measurement chamber; the light detection parts are capable of sensing light, scattered by particles contained in the air, passing through the measurement space, in the measurement space, in the light beams irradiated from the plurality of light source parts, and sending electric signals according to light quantity; the light eliminating part is capable of eliminating non-scattered light in the light beams irradiated from the plurality of light source parts; the checking calculation parts are used for calculating size distribution of particles and number concentration of particles with various sizes according to values and frequencies of the electric signals sent from the plurality of light detection parts.
Description
Technical field
The present invention relates to a kind of optical particle measurement mechanism, say more in detail relate to a kind of to being suspended in illumination beam in airborne particle, then measure the energy because of this particle scattering light out, measure the optical particle measurement mechanism of population concentration and size distribution.
Background technology
The particle being suspended in atmosphere not only exerts an influence to the respiratory apparatus of human body, also can also can exert an adverse impact to the throughput rate of the most advanced industry of semiconductor or LCD and so on, and the particle being therefore suspended in atmosphere has become the object being managed.Especially measuring the minuteness particle existing in the dust free room of picture production semiconducter engineering is a very important link.Such a minuteness particle, because its diameter is very little, is difficult to the naked eye distinguish out.Therefore can only utilize as the special measurement mechanism of optical particle measurement mechanism and so on and measure.
Optical particle measurement mechanism is to particle-irradiation light beam, and the light that recycles now scattering is measured the mode of particle concentration, and scattered light is understood directly or process mirror (mirror, catoptron) reflects and focus on light absorbing part; The light quantity of again focusing being come utilizes electric signal to measure, and just can measure size and the population concentration of particle.
For this reason, the particle measurement device of the companies such as Lighthouse, PMS, Metone is in order to manage dust free room, and measures the device that is suspended in the particle in atmosphere; Utilize these devices can measure the size and number concentration of particle.Although be quite outstanding for the efficiency of measuring low concentration and the following particle of 5.0 μ m; When but the diameter of the particle that maybe will measure for high concentration is large, just there will be the problem of the inefficiency of measurement.
Particle measurement device is divided into banded filtering type particle measurement device substantially, β ray particle measuring appliance, the saturating formula particle measurement of light scattering type particle measuring appliance and light device, wherein, the particle measurement device of the light scattering mode that the present invention is relevant is to suspended particles illumination beam, relies on the light now produce scattering to measure the mode of particle concentration.The light of scattering is understood directly or is passed through mirror (mirror, catoptron) reflect focalization to light absorbing part; The light quantity of again focusing being come utilizes electric signal to measure, and can measure population concentration and particle size.The advantages such as the particle measurement utensil of light scattering mode has, and the size distribution that is applicable to not need loaded down with trivial details operation in measuring in real time, measuring, can measure particle, the volume of measuring equipment are little and cheap.
The optical particle measuring appliance now being circulated is on the market all to use single light quantity, because use single light quantity can make product become in the use simply, easily control, can also make cost become cheap.But when having the particle varying in size in a large number to flow into, there will be the problem that produces measuring error.When if the particle in all scopes all uses a kind of light quantity to measure, there will be the scattered light of small-particle covered and cannot measure by the scattered light of macroparticle; This can cause the error of measuring to occur.
Summary of the invention
(technical matters that will solve)
The present invention proposes in order to solve as mentioned above problem, the object of the present invention is to provide a kind of optical particle measurement mechanism, to the field internal radiation light beam of particle process, measures and is measured population concentration and size distribution by this particle scattering luminous energy out; And according to the density of this particle, measure real-time size distribution and the concentration of particle.Not only can measure exactly low concentration or minuteness particle (size is below 0.5 μ m); Can also measure high concentration or when having the particle (size is at 0.3 to tens μ m) varying in size in a large number simultaneous, also there will not be the problem of measuring inefficiency.
(means of dealing with problems)
In order to reach object as mentioned above, optical particle measurement mechanism of the present invention, is characterized in that, comprising: have to the suction inlet of the inside air amount of measurement space, with the measuring chamber of the escape hole that the air that has passed through measurement space inside is discharged; A plurality of light source portion to each different wave length light beam of measurement space internal irradiation of described measuring chamber; Described in can sensing, a plurality of light source portion irradiate out in each light beam, by described measurement space by the light after the particle scattering being comprised in inner air, and according to this light quantity, send a plurality of optical detection parts of electric signal; Can eliminate in each light beam that described a plurality of light source portion irradiates out the light elimination portion of the light not being scattered; And a plurality of checking computations portion of the size of the electric signal sending according to described a plurality of optical detection parts and the frequency size distribution of calculating particle and each big or small population concentration.
Optical particle measurement mechanism of the present invention, is characterized in that, also comprises pump, to can realize the suction inlet of described measuring chamber, flows into air, and by discharge the Air Flow of air after measurement space from escape hole.
Described a plurality of checking computations portion, is characterized in that, from several concentration of each calculated particle and particle concentration, calculates weight concentration.
Optical particle measurement mechanism of the present invention, is characterized in that, also comprises data memory device, and described data memory device is connected with described a plurality of checking computations portion, for storing the population concentration that described checking computations portion calculates, density and the weight concentration of particle.
Described a plurality of light source portion, is characterized in that, comprises long wavelength's infrared laser diode as light source.
Described a plurality of light source portion, is characterized in that, comprises short wavelength's ultraviolet laser diode as light source.
The internal circuit of described a plurality of light source portion, optical detection part and light elimination portion is by megohmite insulant coating.
Described optical particle measurement mechanism, is characterized in that being connected with automatic regulating apparatus, and described automatic regulating apparatus can be adjusted light wavelength and the intensity that described a plurality of light source portion irradiates according to reference value after the assembling of optical particle measurement mechanism.
Optical particle measurement mechanism of the present invention, is characterized in that, also comprises a plurality of mirrors in described measuring chamber, makes the light of scattering to a plurality of mirrors of the direction reflection of described optical detection part.
(effect of invention)
Optical particle measurement mechanism according to the present invention, can obtain following effect: size distribution and the concentration that can measure in real time particle; Not only can correct measurement low concentration or minuteness particle, the measurement efficiency when particle that can also improve high concentration or all size exists simultaneously.
Accompanying drawing explanation
Fig. 1 means according to the general view of the principle of the optical particle measurement mechanism of one embodiment of the invention.
Fig. 2 means according to frequency and size, the population concentration showing and the summary figure of size distribution of the electric signal measuring.
Fig. 3 means according to the constructional general profile chart of the optical particle measurement mechanism of one embodiment of the invention.
Fig. 4 means according to the constructional skeleton diagram of the optical particle measurement mechanism of one embodiment of the invention.
Fig. 5 means that this is according to the constructional skeleton diagram of the optical particle measurement mechanism of another embodiment of invention.
(description of reference numerals)
10: 11: the first individual paths of inflow path
Within 12: the second, individual path 121: particle-capture device
122: the 10' of flow control portion: discharge path
121': particle-capture device 20: measuring chamber
21: suction inlet 22: escape hole
Within 30: the first, light source portion 32: secondary light source portion
41: the second optical detection parts of 40: the first optical detection parts
The 40 ', 42,43: mirror 30': first light elimination portion
32': second 50: the first checking computations portions of light elimination portion
51: the second checking computations portions 60: pump
70: data memory device
D, D': particle
Embodiment
Below, with reference to accompanying drawing, optical particle measurement mechanism of the present invention is described in more details.
Fig. 1 means according to the general view of the principle of the optical particle measurement mechanism of one embodiment of the invention.Fig. 2 means according to frequency and size, the population concentration showing and the summary figure of size distribution of the electric signal measuring.
With reference to Fig. 1 and Fig. 2, according to the optical particle measurement mechanism of one embodiment of the invention, comprise light source portion 30, optical detection part 40, the light elimination 30' of portion, checking computations portion 50 and data memory device 70.From described light source portion 30, can to the light elimination 30' of portion, irradiate the light beam of provision wavelengths, if light reaches on the particle existing, scattering will occur on this path.A part in the light of scattering can focus on optical detection part 40.
On the one hand, in order to improve the sensing efficiency of 40 pairs of scattered lights of optical detection part, preferably possesses the mirror 40' to described optical detection part 40 direction reflections by scattered light.Described light source portion 30 is irradiated light beam out because particle D occurs after scattering, when not have directly towards optical detection part 40, can rely on the mirror 40' being placed on described optical detection part 40 relative positions, after will light reflecting, focus on described optical detection part 40.
Population concentration in the size distribution of particle D and its magnitude range can be calculated according to the electric signal size that focuses on the light on described optical detection part 40 and frequency by the checking computations portion 50 being connected with described optical detection part 40.
Described data memory device 70 is to be connected with described checking computations portion 50, can store several concentration of particle D that described checking computations portion 50 calculates, density and the weight concentration of particle D.
With reference to Fig. 2, according to the relation that focuses on the electric signal size of the light on optical detection part 40 and the frequency of electric signal, be that to follow the relation of the size distribution of particle D and several concentration of particle D be corresponding.That is, particle D is larger, and the scattering of generation is just larger, and the electric signal detecting on optical detection part 40 will be stronger; Particle D is less, and the scattering of generation is just less, and the electric signal detecting on optical detection part 40 will be more weak.Therefore the size of particle D and the size of electric signal are corresponding.And the frequency of the electric signal that displays is the number that can represent particle D on optical detection part 40.Therefore,, if can know the size of the electric signal displaying on optical detection part 40 and the frequency of electric signal, just can know the size distribution of existing particle D and several concentration of particle D.
Fig. 3 means according to the constructional general profile chart of the optical particle measurement mechanism of one embodiment of the invention.With reference to Fig. 3, particle D sucks from the suction inlet 21 in measuring chamber 20, and particle D discharges from escape hole (not shown).In measuring chamber 20 one is sidelong and put light source portion 30, placed the light elimination 30' of portion in corresponding opposite location.The lower end of measuring chamber 20 inside can arrange mirror 40', and light source portion 30 is irradiated to the upper light that scattering occurs of particle D and focuses on and be positioned in the corresponding opposite location of described mirror 40' on optical detection part 40.
Fig. 4 means according to the constructional skeleton diagram of the optical particle measurement mechanism of one embodiment of the invention.Shown in giving an example in Fig. 4, it possesses each two light source portion, optical detection part, light elimination portion and checking computations portion, but it can be respectively to possess plural structure.With reference to Fig. 4, according to the optical particle measurement mechanism of one embodiment of the invention, comprise measuring chamber 10, first and second light source portion 30,32, first and second optical detection part 40,41, first and second light elimination 30' of portion, 32' and first and second checking computations portion 50,51.
Described measuring chamber 20 has can arrive air intake the suction inlet 21 of measurement space 20a inside, and will pass through the escape hole 22 of the Bas Discharged of measurement space 20a inside.Described first and second light source portion the 30, the 32nd, can irradiate the light beam of different wave length separately.Illustrate and be, described the first light source portion 30 can be to the measurement space 20a internal irradiation long wavelength's of described measuring chamber 20 light beam, and short wavelength's light beam can be irradiated in described secondary light source portion 32.
Described the first optical detection part 40 can detect described the first light source portion 30 is irradiated to the upper light that produces scattering of the particle D comprising in the air of measurement space 20a inside, and sends electric signal according to its light quantity; Described the second optical detection part 41 can detect described secondary light source portion 32 is irradiated to the upper light that produces scattering of the particle D' comprising in the air of measurement space 20a inside, and sends electric signal according to its light quantity.
Described first and second light elimination 30' of portion, 32' can eliminate described first and second light source portion 30,32 to irradiate, but do not have because particle D, D' produce the light of scattering.Described first and second checking computations portion the 50, the 51st, according to size and the frequency of the upper detected electric signal of described first and second optical detection part (40,41), calculates the size distribution of particle D, D' and several concentration of its magnitude range interior particle D, D'.
On the one hand, want the particle D, the D' that measure before putting into measuring chamber by suction inlet, can drop into from inflow path, and through the first individual path 11 and the second individual path.That is, described inflow path 10 is effects of playing the passage of air inflow, can be divided into the first individual path 11 and the second individual path 12, finally condenses together and is connected on the suction inlet 21 of described measuring chamber 20.
On the one hand, in described the second individual path 12, can be provided with particle-capture device 121 and flow control portion 122.Described particle-capture device 121 is provided with and particle D, D' can be filtered to the filtrator 121a catching; Particle D, the D' comprising in air through the second individual path 12 can be caught by described filtrator 121a, and measures the particle D being caught by described filtrator 121a, the weight of D'; Particle D, the D' size of calculating according to described checking computations portion 50,51 again counts with particle D, D' the density that concentration is calculated described particle D, D'.
On the one hand, particle D, D' before the shunting of inflow inflow path 10 can be diverted in described the first individual path 11 and the second individual path 12, and the particle D, the D' that flow into described the second individual path 12 will be caught by described particle-capture device.Therefore, even if described the first individual path 11 and the second individual path 12 can be in conjunction with before the suction inlet 21 of described measuring chamber 20, particle D, the D' number that enters into the suction inlet 21 of described measuring chamber 20 also can become and flow into the particle D of described inflow path 10, half of D' number.
Described flow control portion 122 is devices of controlling by the air mass flow of the second individual path 12, has possessed differential pressure pick-up 122a, flowrate control valve 122b and controller 122c.
Described differential pressure pick-up 122a can sensing air mass flow by the second individual path 12 change; Described flowrate control valve 122b can regulate by the flow of the air of described the second individual path 12.
Described controller 122c is when described differential pressure pick-up 122a detects air mass flow by the second individual path 12 and changes, control described flowrate control valve 122b make air mass flow by described the second individual path 12 maintain a certain amount of on.
The flow of the air by described the second individual path 12 is according to the passing of time, and the increase meeting of the amount of particle D, D' that the filtrator 121a of described particle-capture device 121 catches reduces relatively; Being flow control portion 122, is a certain amount of upper for the air mass flow by described the second individual path 12 is maintained, and makes to improve the precision of real-time measurement.
Described measuring chamber 20 has the effect that forms measurement space 20a, possesses the suction inlet 21 of air intake measurement space 20a inside, and by the escape hole 22 of the Bas Discharged through measurement space inside.
Described suction inlet 21 is connected with described inflow path 10, described escape hole 22 is connected with pump 60, the inner Air Flow that forms of measurement space 20a that makes described measuring chamber 20, makes air be flowed into, discharge to described measurement space 20a by described suction inlet 21 and described escape hole 22.That is, described pump 60 can form suction inlet 21 air amounts from described measuring chamber 20, the circulation of air discharging from escape hole 22 again through measurement space 20a.
As mentioned above, first and second light source portion the 30, the 32nd, light shines the effect in the measurement space 20a of described measuring chamber 20, in one embodiment of this invention, and respectively at a side of described measuring chamber 20.
The light source of described first and second light source portion 30,32 can be used laser diode.Illustrate, the light source of described the first light source portion 30 can be used long wavelength's infrared laser diode.Now, in the time of can particle D is large, the contingent radiation of institute (emission) be controlled at Min..That is, when particle-like substance and light collide, there is scattering (scattering) in part meeting, and a part can be absorbed (absorption) by particle D, and the light being absorbed by particle D also can be radiated (emission) in atmosphere again.Once such radiation is perceived by optical detection part, may produce the impact of fabricating counting.The light that uses long wavelength (840nm), can control to Min. the effects of radiation of light, simultaneously because optical detection part shows optimum sensitivity in infrared ray field, therefore can raise the efficiency.
On the one hand, the light source of secondary light source portion 32 can be used short wavelength's ultraviolet laser diode.Because short wavelength's (500 ~ 600nm) luminous energy is very strong, even also can produce more scattering because of little particle D'; Therefore,, in small-particle D' existence or low-density situation, also can with high sensitivity, there is a large amount of scattered lights to collect on optical detection part.
On the one hand, in described first and second light source portion 30,32, possess respectively lens 31,33, to focus on the light irradiating; Preferably the corresponding other end at described measuring chamber 20 arranges first and second light elimination 30' of portion, 32', so that the light that first and second light source portion 30,32 that a side of described measuring chamber 20 is possessed is irradiated, when there is no the particle D of 20a inside, measured space, D' scattering, directly receive and eliminate.This is because if be not eliminated from 30,32 irradiations of described light source portion light out, can produce the impact of fabricating counting to described optical detection part 40,41.
In addition,, for reflection of light is reduced to minimum value, preferably unglazed anodic oxidation or frosted processing are carried out in the surface of described first and second light elimination 30' of portion, 32'.
Described optical detection part the 40, the 41st,, sensing is irradiated to from described light source portion 30,32 the particle D, the D' that the air of the inside by described measurement space 20a, comprise the light of scattering occurs, and sends electric signal according to its light quantity.
On the one hand, in order to improve the sensing efficiency of 40,41 pairs of scattered lights of described optical detection part, preferred described measuring chamber 20 inside have can be by the light of scattering the mirror 42,43 to the direction reflection of optical detection part 40,41.
; as represented according to as shown in the general view of the principle of the optical particle measurement mechanism of one embodiment of the invention in Fig. 1; the light that described light source portion 30,32 irradiates is being occurred after scattering by particle D, D', and the light of scattering can directly or pass through described mirror 42,43 reflect focalizations to described optical detection part 40,41.
Described checking computations portion the 50, the 51st, according to size and the frequency of described optical detection part 40,41 detected electric signal, calculate the size distribution of particle D, D', with and several concentration of particle D, the D' of different particle size distribution, by several concentration of particle D, D' and the density of particle D, D', calculate weight concentration.
On the one hand, the density of described particle D, D' is, by measuring the particle D capturing on the described filtrator 121a of described particle-capture device 121, the weight of D', and the particle D calculating, the size of D', and several concentration of particle D, D' calculate.
According to the optical particle measurement mechanism of one embodiment of the invention, also comprise data memory device 70, described data memory device 70 is connected in described checking computations portion 50,51, and several concentration of particle D, D' and density and the weight concentration of particle D, D' that described checking computations portion 50,51 is calculated store.
In addition, the internal circuit of described light source portion 30,32, optical detection part 40,41 and the light elimination 30' of portion, 32' is by megohmite insulant coating; Described optical particle measurement mechanism, after assembling, and adjusts the light intensity that described light source portion 30,32 irradiates and is connected with the automatic regulating apparatus of the sequencing of wavelength according to reference value.
Fig. 5 means the constructional skeleton diagram of optical particle measurement mechanism according to another embodiment of the present invention.With reference to Fig. 5, according to the optical measuring device of the embodiment of Fig. 4, the textural inflow path 10 that is provided with the suction inlet 21 that is connected in described measuring chamber 20, split into the first individual path 11 and the second rear interflow of individual path 12, on the second individual path 12, be provided with particle-capture device 121 and flow control portion 122; But in the present embodiment, replace inflow path 10, possess the discharge path 10' that is connected in escape hole 22, on discharge path 10', arrange to possess and filter the also particle-capture device 121' of the filtrator 121a' of trapped particle D, D'.
Other assemblies are because of identical with one embodiment of the invention, so omit detailed description.
The upper particle-capture device 121' arranging of described discharge road 10' combines with the escape hole 22 of described measuring chamber 20; In described measuring chamber 20, measure after the several concentration and size distribution of particle D, D', by described particle-capture device 121', catch particle D, the D' comprising the air of discharging from the escape hole 22 of described measuring chamber 20, on filtrator 121a', set again caught particle D, the weight of D', then the particle D, the D' that calculate according to described checking computations portion 50,51 size counts with particle D, D' the density that concentration is calculated described particle D, D'.
As mentioned above, though take light source portion, optical detection part, light elimination portion and checking computations portion respectively as the embodiment of two is illustrated, should only not be confined to this, can possess each two above a plurality of.By the structure of the described optical particle measurement mechanism of picture, can measure in real time size distribution and the concentration of particle; Because applied the light source of multiple light quantity, so not only can correctly measure low concentration or minuteness particle, the measurement efficiency in the time of can also improving high concentration or multiple sized particles and exist simultaneously.
With reference to the embodiment shown in accompanying drawing, describe the present invention above, the those of skill in the art of the technical field of the invention are to be understood that, within not exceeding the thought of the present invention and field that these claims record, can realize multiple modification and distortion.
Claims (9)
1. an optical particle measurement mechanism, is characterized in that, comprising:
Measuring chamber, described measuring chamber has to the suction inlet of the inside air amount of measurement space, with the escape hole that the air through measurement space inside is discharged;
A plurality of light source portion, described light source portion is to the measurement space internal irradiation of the described measuring chamber light beam of different wave length separately;
A plurality of optical detection parts, described optical detection part can irradiate out each light beam from described a plurality of light source portion by sensing, by described measurement space by the light after the particle scattering being comprised in inner air, and send electric signal according to this light quantity;
Light elimination portion, described light elimination portion can eliminate in each light beam that described a plurality of light source portion irradiates out, the light not being scattered; And,
A plurality of checking computations portion, the size of the electric signal that described checking computations portion sends according to described a plurality of optical detection parts and size distribution and each the big or small population concentration that frequency is calculated particle.
2. optical particle measurement mechanism according to claim 1, is characterized in that, also comprises pump, and the suction inlet that can realize described measuring chamber flows into air, and by discharge the Air Flow of air after measurement space from escape hole.
3. optical particle measurement mechanism according to claim 1, is characterized in that, from each calculated population concentration and particle concentration, calculates weight concentration.
4. optical particle measurement mechanism according to claim 2, it is characterized in that, also comprise data memory device, described data memory device is connected with described a plurality of checking computations portion, for storing the population concentration that described checking computations portion calculates, density and the weight concentration of particle.
5. optical particle measurement mechanism according to claim 1, is characterized in that, comprises long wavelength's infrared laser diode as light source.
6. optical particle measurement mechanism according to claim 1, is characterized in that, comprises short wavelength's ultraviolet laser diode as light source.
7. optical particle measurement mechanism according to claim 1, is characterized in that, the internal circuit of described a plurality of light source portion, optical detection part and light elimination portion is by megohmite insulant coating.
8. optical particle measurement mechanism according to claim 1, it is characterized in that being connected with automatic regulating apparatus, described automatic regulating apparatus can be adjusted light wavelength and the intensity that described a plurality of light source portion irradiates according to reference value after the assembling of optical particle measurement mechanism.
9. optical particle measurement mechanism according to claim 1, is characterized in that, also comprises a plurality of mirrors in described measuring chamber, makes the light of scattering to a plurality of mirrors of the direction reflection of described optical detection part.
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