CN103516253A - Piezoelectric cantilever type ultrasonic motor - Google Patents

Piezoelectric cantilever type ultrasonic motor Download PDF

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Publication number
CN103516253A
CN103516253A CN201310454931.4A CN201310454931A CN103516253A CN 103516253 A CN103516253 A CN 103516253A CN 201310454931 A CN201310454931 A CN 201310454931A CN 103516253 A CN103516253 A CN 103516253A
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China
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piezoelectric
cantilever beam
piezoelectric bimorph
gauge block
beam oscillator
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CN201310454931.4A
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Chinese (zh)
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王光庆
展永政
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Zhejiang Gongshang University
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Zhejiang Gongshang University
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Abstract

The invention relates to a piezoelectric cantilever type ultrasonic motor, and belongs to the technical field of ultrasonic motor manufacturing. The piezoelectric cantilever type ultrasonic motor comprises a cantilever piezoelectric stator, taper rotors, an output shaft, springs, adjusting nuts, radial bearings, thrust bearings and a base. The cantilever piezoelectric stator is composed of four piezoelectric bimorph cantilever oscillators of the same structure and a center mass block. The four piezoelectric bimorph cantilever oscillators are evenly distributed on the four side faces of the center mass block. The two opposite corners of the upper surface of the center mass block are respectively provided with a right-angle taper convex tooth. The taper rotors are installed on the output shaft through screws and are pressed on the inner top faces of the right-angle taper convex teeth through the action of the output shaft, the springs, the adjusting nuts and the thrust bearings, and pretightening force between the taper rotors and the cantilever piezoelectric stator can be adjusted according to the adjusting nuts and the springs. The motor has the advantages of being simple in structure and high in response speed, only needing one drive signal source and the like.

Description

A kind of piezoelectric cantilever beam type supersonic motor
Technical field
The present invention relates to a kind of piezoelectric cantilever beam type supersonic motor, can realize accurate driving and positioning function, belong to the technical field that supersonic motor is manufactured.
Technical background
Supersonic motor utilizes the vibration that the inverse piezoelectric effect of piezoelectric ceramic is motor stator by electric energy conversion, then by the friction couple drive rotor between motor stator and rotor, rotates (or straight line) motion.Supersonic motor have compact conformation, low-speed and large-torque, fast response time, control characteristic good, be not subject to electromagnetic interference, positioning precision is high, noise is little, can directly drive the advantages such as load, is widely used in the every field such as national defence, military affairs, industry, medical treatment and national product life.
There is more patent application to relate to piezoelectric ultrasonic motor both at home and abroad, typical piezoelectric ultrasonic motor structure is mainly the mechanisms such as travelling-wave type, longitudinal-torsional compound of going in ring, these piezoelectric vibrator complex structures, processing technology is loaded down with trivial details, as the piezoelectric vibrator Surface Machining of the traveling wave type ultrasonic that goes in ring tens dentalations, the piezoelectric vibrator of Hybrid Longitudinal-Torsional Ultrasonic Motor by project organization complexity is so that the frequency invariance of tuning longitudinal vibration mode and torsional oscillation mode.The piezoelectric vibrator of labyrinth makes above-mentioned supersonic motor be difficult to microminiaturization, is unfavorable for requiring in bulk the application in stricter field (as micro-Driving technique).
Summary of the invention
The present invention proposes a kind of piezoelectric cantilever beam type supersonic motor, to solve existing supersonic motor piezoelectric vibrator complex structure, is difficult to microminiaturization, is unfavorable for requiring in bulk the application problem in stricter field (as micro-Driving technique).
The embodiment that the present invention adopts is: supersonic motor is comprised of cantilever beam piezoelectric stator (1), taper shaft (2), output shaft (3), spring (4), adjusting nut (5), journal bearing (6), thrust bearing (7) and pedestal (8).Piezoelectric bimorph cantilever beam oscillator (101,102,103,104) and centroplasm gauge block (105) that cantilever beam piezoelectric stator (1) has identical structure by A, two groups four of B form, each piezoelectric bimorph cantilever beam oscillator is bonded in the upper and lower surface of metallic matrix by two contrary piezoelectric ceramic of polarised direction by adhesive, form sandwich structure.One end and the pedestal of four piezoelectric bimorph cantilever beam oscillators are fixed, and the other end is separately fixed on the Si Ge side of centroplasm gauge block (105).On the upper surface Liang Ge diagonal angle of centroplasm gauge block (105), respectively process a perpendicular type double wedge (106,107), perpendicular type double wedge (106,107) medial surface is the conical surface.Journal bearing (6) is installed on the centre bore of centroplasm gauge block (105), and thrust bearing (7) is installed in the dead eye of base bottom surface.Taper shaft (2) is fixed into one by hold-down screw and output shaft (3), output shaft (3) is through the dead eye of journal bearing (6) and thrust bearing (7), and by the spring (4) of base bottom surface and the effect of adjusting nut (5), taper shaft (2) is pressed on the interior conical surface of right angle double wedge (106,107) of piezoelectric stator (1), the pretightning force between taper shaft (2) and cantilever beam piezoelectric stator (1) can pass through adjusting nut (5) and spring (4) regulates.The radial position of taper shaft (2) is by output shaft (3) and journal bearing (6) common guarantee.
In embodiment of the present invention, cantilever beam piezoelectric stator (1) is comprised of (101) and (102) piezoelectric bimorph cantilever beam oscillator cantilever beam piezoelectric stator A group, and B group is comprised of (103) and (104) piezoelectric bimorph cantilever beam oscillator.Piezoelectric bimorph cantilever beam oscillator (101) horizontal arrangement is on the right side of centroplasm gauge block (5), and (102) horizontal arrangement is in the left side of centroplasm gauge block (5).The polarised direction of piezoelectric bimorph cantilever beam oscillator (101) metallic matrix (1011) upper surface piezoelectric patches (1012) is contrary with the polarised direction of piezoelectric bimorph cantilever beam oscillator (102) metallic matrix (1021) upper surface piezoelectric patches (1022).Piezoelectric bimorph cantilever beam oscillator (103) horizontal arrangement is in the front side of centroplasm gauge block (5), the rear side of (104) horizontal arrangement centroplasm gauge block (5).The polarised direction of piezoelectric bimorph cantilever beam oscillator (103) metallic matrix (1031) upper surface piezoelectric patches (1032) is contrary with the polarised direction of piezoelectric bimorph cantilever beam oscillator (104) metallic matrix (1041) upper surface piezoelectric patches (1042).The polarised direction of piezoelectric bimorph cantilever beam oscillator (103) metallic matrix (1031) upper surface piezoelectric patches (1032) is identical with the polarised direction of piezoelectric bimorph cantilever beam oscillator (101) metallic matrix (1011) upper surface piezoelectric patches (1012).
In embodiment of the present invention, respectively process a perpendicular type cone double wedge (106,107) on the upper surface Liang Ge diagonal angle of cantilever beam piezoelectric stator (1) centroplasm gauge block (105), the tapered double wedge in right angle (106,107) medial surface is the conical surface.
In embodiment of the present invention, when the piezoelectric patches to A group piezoelectric bimorph cantilever beam oscillator (101) and (102) applies an ac voltage signal V 0during sinwt, one in two cantilever beam piezoelectric vibrators produces expansion flexural vibrations, one produces contraction flexural vibrations, make centroplasm gauge block (5) produce the vibration around Z axis, particle on perpendicular type double wedge (106), (107) inner side conical surface produces the vibration displacement along OX and OY direction, both form elliptical trajectory, and then promotion taper shaft (4) is made clockwise rotation.When the piezoelectric patches to B group piezoelectric bimorph cantilever beam oscillator (103) and (104) applies same alternating voltage, one in two cantilever beam piezoelectric vibrators produces expansion flexural vibrations, one produces contraction flexural vibrations, make centroplasm gauge block (5) produce the vibration around X-axis, particle on perpendicular type double wedge (106), (107) inner side conical surface produces the vibration displacement of OZ and OY direction, both form elliptical trajectory, and then promotion taper shaft (4) is rotated counterclockwise motion.
Accompanying drawing explanation
Fig. 1 is general structure generalized section of the present invention;
Fig. 2 is piezoelectric cantilever beam type piezoelectric stator stereogram, and in figure, "+", "-" symbol represent the polarised direction of piezoelectric ceramic;
Fig. 3 is two mode of oscillation figure of piezoelectric stator (1).Fig. 3 (a) is when piezoelectric bimorph cantilever beam oscillator (101), (102) are subject to voltage drive, and piezoelectric stator (1) produces the flexural vibration mode figure around Z axis; Fig. 3 (b) is when piezoelectric bimorph cantilever beam oscillator (103), (104) are subject to voltage drive, and piezoelectric stator (1) produces the flexural vibration mode figure around X-axis.
Fig. 4 is that motor is made clockwise rotation and is rotated counterclockwise the elliptical trajectory of when motion tapered tooth in right angle (106), (107) inner side conical surface particle.Elliptical trajectory when Fig. 4 (a) is clockwise rotation; Fig. 4 (b) is the elliptical trajectory while being rotated counterclockwise motion.
Embodiment
As shown in Figure 1, 2, supersonic motor is comprised of cantilever beam piezoelectric stator (1), taper shaft (2), output shaft (3), spring (4), adjusting nut (5), journal bearing (6) and thrust bearing (7).Cantilever beam piezoelectric stator (1) consists of four piezoelectric bimorph cantilever beam oscillator (101,102,103,104) and centroplasm gauge blocks (105) with identical structure, each piezoelectric bimorph cantilever beam oscillator is bonded in the upper and lower surface of metallic matrix by two contrary piezoelectric ceramic of polarised direction by adhesive, form sandwich structure.One end of four piezoelectric bimorph cantilever beam oscillators and pedestal (8) are fixing, and the other end is separately fixed on the Si Ge side of centroplasm gauge block (105).On the upper surface Liang Ge diagonal angle of centroplasm gauge block (105), respectively process a perpendicular type double wedge (106,107), the tapered double wedge in right angle (106,107) medial surface is the conical surface.Journal bearing (6) is installed on the centre bore of centroplasm gauge block (105), and thrust bearing (7) is installed in the dead eye of pedestal (8) bottom surface.Taper shaft (2) is fixed into one by hold-down screw and output shaft (3), output shaft (3) is through the dead eye of journal bearing (6) and thrust bearing (7), and by the spring (4) of pedestal (8) bottom surface and the tensioning function of adjusting nut (5), taper shaft (2) is pressed on the interior conical surface of right angle double wedge (106,107) of piezoelectric stator (1), the pretightning force between taper shaft (2) and cantilever beam piezoelectric stator (1) can pass through adjusting nut (5) and spring (4) regulates; The radial position of taper shaft (2) is by output shaft (3) and journal bearing (6) common guarantee.
In embodiment of the present invention, cantilever beam piezoelectric stator (1) is total to by two groups piezoelectric bimorph cantilever beam oscillator (101,102,103,104) and centroplasm gauge block (105) formation that A, tetra-of B have identical structure.Piezoelectric bimorph cantilever beam oscillator (101) is bonded in the upper and lower surface of metallic matrix (1013) by two contrary piezoelectric ceramic (1011,1012) of polarised direction by adhesive, form sandwich structure.Piezoelectric bimorph cantilever beam oscillator (102) is bonded in the upper and lower surface of metallic matrix (1023) by two contrary piezoelectric ceramic (1021,1022) of polarised direction by adhesive, form sandwich structure.Piezoelectric bimorph cantilever beam oscillator (103) is bonded in the upper and lower surface of metallic matrix (1033) by two contrary piezoelectric ceramic (1031,1032) of polarised direction by adhesive, form sandwich structure.Piezoelectric bimorph cantilever beam oscillator (104) is bonded in the upper and lower surface of metallic matrix (1043) by two contrary piezoelectric ceramic (1041,1042) of polarised direction by adhesive, form sandwich structure.Piezoelectric bimorph cantilever beam oscillator (101) forms A group with (102), (101) horizontal arrangement is on the right side of centroplasm gauge block (5), (102) horizontal arrangement is in the left side of centroplasm gauge block (5), and the polarised direction of piezoelectric bimorph cantilever beam oscillator (101) metallic matrix upper surface piezoelectric patches (1011) is contrary with the polarised direction of piezoelectric bimorph cantilever beam oscillator (102) metallic matrix upper surface piezoelectric patches (1021).Piezoelectric bimorph cantilever beam oscillator (103) forms B group with (104), and (103) horizontal arrangement is in the front side of centroplasm gauge block (5), and (104) horizontal arrangement is at the rear side of centroplasm gauge block (5).The polarised direction of piezoelectric bimorph cantilever beam oscillator (103) metallic matrix upper surface piezoelectric patches (1031) is contrary with the polarised direction of piezoelectric bimorph cantilever beam oscillator (104) metallic matrix upper surface piezoelectric patches (1041), identical with the polarised direction of (101) metallic matrix upper surface piezoelectric patches (1011).
In embodiment of the present invention, respectively process the tapered double wedge in Yi Ge right angle (106,107) on the upper surface Liang Ge diagonal angle of cantilever beam piezoelectric stator (1) centroplasm gauge block (105), perpendicular type double wedge (106,107) medial surface is the conical surface.
In embodiment of the present invention, when the piezoelectric patches to A group piezoelectric bimorph cantilever beam oscillator (101) and (102) applies an ac voltage signal V 0during sinwt, one in two cantilever beam piezoelectric vibrators produces expansion flexural vibrations, one produces contraction flexural vibrations, make centroplasm gauge block (5) produce the vibration around Z axis, particle on perpendicular type double wedge (106), (107) inner side conical surface produces the vibration displacement along OX and OY direction, both form elliptical trajectory, and then promotion taper shaft (4) is made clockwise rotation.When the piezoelectric patches to B group piezoelectric bimorph cantilever beam oscillator (103) and (104) applies same alternating voltage, one in two cantilever beam piezoelectric vibrators produces expansion flexural vibrations, one produces contraction flexural vibrations, make centroplasm gauge block (5) produce the vibration around X-axis, particle on perpendicular type double wedge (106), (107) inner side conical surface produces the vibration displacement of OZ and OY direction, both form elliptical trajectory, and then promotion taper shaft (4) is rotated counterclockwise motion.

Claims (5)

1. a piezoelectric cantilever beam type supersonic motor, is characterized in that: this supersonic motor is comprised of cantilever beam piezoelectric stator (1), taper shaft (2), output shaft (3), spring (4), adjusting nut (5), journal bearing (6), thrust bearing (7) and pedestal (8).Piezoelectric bimorph cantilever beam oscillator (101,102,103,104) and centroplasm gauge block (105) that cantilever beam piezoelectric stator (1) has identical structure by A, two groups four of B form, each piezoelectric bimorph cantilever beam oscillator is bonded in the upper and lower surface of metallic matrix by two contrary piezoelectric ceramic of polarised direction by adhesive, form sandwich structure.One end of four piezoelectric bimorph cantilever beam oscillators and pedestal (8) are fixing, and the other end is separately fixed on the Si Ge side of centroplasm gauge block (105).On the Liang Ge diagonal angle of centroplasm gauge block (105) upper surface, respectively process the tapered double wedge in Yi Ge right angle (106,107), the tapered double wedge in right angle (106,107) inner side end face is the conical surface.Taper shaft (2) is arranged on output shaft (3) by screw.Taper shaft (2) is pressed on the interior end face of the tapered double wedge in right angle (106,107) by the effect of output shaft (3), spring (4), adjusting nut (5) and thrust bearing (7), by adjusting nut (5) and spring (4), can regulate the pretightning force between taper shaft (2) and cantilever beam piezoelectric stator (1).The radial position of output shaft (3) is guaranteed by journal bearing (6), prevents that output shaft (3) from occurring radially to rock when rotated.
2. piezoelectric cantilever beam type supersonic motor according to claim 1, it is characterized in that: cantilever beam piezoelectric stator A group is comprised of (101) and (102) piezoelectric bimorph cantilever beam oscillator, B group is comprised of (103) and (104) piezoelectric bimorph cantilever beam oscillator.Piezoelectric bimorph cantilever beam oscillator (101) horizontal arrangement is on the right side of centroplasm gauge block (5), and (102) horizontal arrangement is in the left side of centroplasm gauge block (5).The polarised direction of piezoelectric bimorph cantilever beam oscillator (101) metallic matrix (1011) upper surface piezoelectric patches (1012) is contrary with the polarised direction of piezoelectric bimorph cantilever beam oscillator (102) metallic matrix (1021) upper surface piezoelectric patches (1022).Piezoelectric bimorph cantilever beam oscillator (103) horizontal arrangement is in the front side of centroplasm gauge block (5), the rear side of (104) horizontal arrangement centroplasm gauge block (5).The polarised direction of piezoelectric bimorph cantilever beam oscillator (103) metallic matrix (1031) upper surface piezoelectric patches (1032) is contrary with the polarised direction of piezoelectric bimorph cantilever beam oscillator (104) metallic matrix (1041) upper surface piezoelectric patches (1042).The polarised direction of piezoelectric bimorph cantilever beam oscillator (103) metallic matrix (1031) upper surface piezoelectric patches (1032) is identical with the polarised direction of piezoelectric bimorph cantilever beam oscillator (101) metallic matrix (1011) upper surface piezoelectric patches (1012).
3. piezoelectric cantilever beam type supersonic motor according to claim 1, it is characterized in that: on the upper surface Liang Ge diagonal angle of cantilever beam piezoelectric stator (1) centroplasm gauge block (105), respectively process the tapered double wedge in Yi Ge right angle (106,107), perpendicular type double wedge (106,107) medial surface is the conical surface.
4. piezoelectric cantilever beam type supersonic motor according to claim 1, is characterized in that: when the piezoelectric patches to A group piezoelectric bimorph cantilever beam oscillator (101) and (102) applies an ac voltage signal V 0during sinwt, one in two cantilever beam piezoelectric vibrators produces expansion flexural vibrations, one produces contraction flexural vibrations, make centroplasm gauge block (5) produce the vibration around Z axis, particle on perpendicular type double wedge (106), (107) inner side conical surface produces the vibration displacement along OX and OY direction, both form elliptical trajectory, and then promotion taper shaft (4) is made clockwise rotation.When the piezoelectric patches to B group piezoelectric bimorph cantilever beam oscillator (103) and (104) applies same alternating voltage, one in two cantilever beam piezoelectric vibrators produces expansion flexural vibrations, one produces contraction flexural vibrations, make centroplasm gauge block (5) produce the vibration around X-axis, particle on perpendicular type double wedge (106), (107) inner side conical surface produces the vibration displacement of OZ and OY direction, both form elliptical trajectory, and then promotion taper shaft (4) is rotated counterclockwise motion.
5. according to the piezoelectric cantilever beam type supersonic motor described in claim 1 and 4, it is characterized in that: only need a drive voltage signal just can realize motor and produce rotatablely moving of counterclockwise and clockwise both direction, the operating frequency of motor is 20kHz.
CN201310454931.4A 2013-09-27 2013-09-27 Piezoelectric cantilever type ultrasonic motor Pending CN103516253A (en)

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103753603A (en) * 2014-01-29 2014-04-30 哈尔滨工业大学 Single-freedom-degree rotating mechanical arm driven by piezoelectric ultrasonic vibrator
CN106685260A (en) * 2016-11-23 2017-05-17 同济大学 M-phase driving stepping supersonic motor
CN107809146A (en) * 2016-09-08 2018-03-16 丰田自动车株式会社 The manufacture method of rotary motor rotor and rotary motor rotor
CN109510507A (en) * 2018-12-12 2019-03-22 南京工程学院 Bearing-free double-rotation type standing wave type linear ultrasonic electric machine in parallel
CN113300632A (en) * 2021-05-13 2021-08-24 杭州电子科技大学 Cantilever beam type ultrasonic motor for focusing of optical lens and driving method thereof

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103753603A (en) * 2014-01-29 2014-04-30 哈尔滨工业大学 Single-freedom-degree rotating mechanical arm driven by piezoelectric ultrasonic vibrator
CN107809146A (en) * 2016-09-08 2018-03-16 丰田自动车株式会社 The manufacture method of rotary motor rotor and rotary motor rotor
CN107809146B (en) * 2016-09-08 2019-07-26 丰田自动车株式会社 The manufacturing method of rotary motor rotor and rotary motor rotor
CN106685260A (en) * 2016-11-23 2017-05-17 同济大学 M-phase driving stepping supersonic motor
CN106685260B (en) * 2016-11-23 2018-10-26 同济大学 A kind of m phases drive ultrasonic step wave motor
CN109510507A (en) * 2018-12-12 2019-03-22 南京工程学院 Bearing-free double-rotation type standing wave type linear ultrasonic electric machine in parallel
CN113300632A (en) * 2021-05-13 2021-08-24 杭州电子科技大学 Cantilever beam type ultrasonic motor for focusing of optical lens and driving method thereof

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