CN103472512B - The debugging device of holographic Variable line-space gratings exposure light path - Google Patents
The debugging device of holographic Variable line-space gratings exposure light path Download PDFInfo
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- CN103472512B CN103472512B CN201310449542.2A CN201310449542A CN103472512B CN 103472512 B CN103472512 B CN 103472512B CN 201310449542 A CN201310449542 A CN 201310449542A CN 103472512 B CN103472512 B CN 103472512B
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Abstract
The debugging device of holographic Variable line-space gratings exposure light path, belonging to spectral technique field, debuging in process for solving present holographic Variable line-space gratings exposure system, and the problem that measurement difficulty is large, precision is low, comprises detection light source and grating substrate clamps detection platform; Described detection light source is used for providing two coherent parallel lights; Be made up of laser instrument, incident optical collimating mirror, Y type single-mode fiber, the first outgoing optical fiber collimating mirror and the second outgoing optical fiber collimating mirror, the laser that laser instrument produces, assembled by incident optical collimating mirror and enter Y type single-mode fiber, laser becomes directional light through the first outgoing optical fiber collimating mirror after the outgoing of Y type single-mode fiber after the second fiber optic collimator mirror; Described substrate clamping detection platform is for generation of reference light, and the interference fringe of light-metering and reference light treated in record, be made up of base, angle scale, locating slot, fine setting slide block, swing arm, pipe clamp, beam expanding lens, semi-transparent semi-reflecting lens and CCD camera, column, one dimension adjustment jig and self-centering mirror holder.
Description
Technical field
The invention belongs to spectral technique field, be specifically related to the debugging device of holographic Variable line-space gratings exposure light path.
Background technology
Holographic Variable line-space gratings has the bending groove of unequal-interval.By optimizing the groove function of groove, certain aberration can be eliminated, and then improve the image quality of optical system.Apply the performance that holographic Variable line-space gratings can greatly improve spectral instrument.
The producing principle of holographic Variable line-space gratings is the interference fringe utilizing photoresist record two to restraint relevant spherical wave or aspherical wavefront, is then converted into embossment profile through development.In the manufacturing process of holographic Variable line-space gratings, the parameter of exposure light path determines the groove function of the groove of grating.The bottleneck restricting the application of holographic Variable line-space gratings is mainly large in its exposure process resetting difficulty.
Holographic Variable line-space gratings comprises two kinds, the grating utilizing the grating of two spherical waves interfere making and utilize two aspherical wavefronts to interfere and make.The exposure device of the holographic Variable line-space gratings utilizing two aspherical wavefronts to make comprises laser instrument, beam expanding lens, beam splitter, two plane mirrors, two spatial filters, two nonplanar reflectors, grating substrate, and play the mirror holder of fixed adjustment effect, lifting pole socket and magnetic bases.Determine that the exposure parameter of grating line spacing and degree of crook comprises the distance of pin hole to respective mirror center of two spatial filters, two mirror center to the angle of the distance at grating substrate center, two incident lights and respective catoptron normal, mirror center and the angle of base center line and substrate normal and the curvature parameters of catoptron.Utilize two aspherical wavefronts to interfere the grating made to have more how optimizable parameter, thus there is better application prospect.But due to parameter in light path more, and comprise nonplanar reflector, bring great difficulty to debuging of light path.Meanwhile, on the grating quality impact of producing greatly, the making of debugging device to holographic Variable line-space gratings of therefore developing exposure light path is most important for the error of exposure light path parameter.
Summary of the invention
The present invention debugs in process for solving present holographic Variable line-space gratings exposure system, measures the problem that difficulty is large, precision is low, proposes a kind of device can measuring exposure system parameter in holographic Variable line-space gratings manufacturing process in real time.
The debugging device of holographic Variable line-space gratings exposure light path, comprises detection light source and grating substrate clamps detection platform;
Described detection light source is used for providing two coherent parallel lights; Be made up of laser instrument, incident optical collimating mirror, Y type single-mode fiber, the first outgoing optical fiber collimating mirror and the second outgoing optical fiber collimating mirror, the laser that laser instrument produces, assembled by incident optical collimating mirror and enter Y type single-mode fiber, laser becomes directional light through the first outgoing optical fiber collimating mirror after the outgoing of Y type single-mode fiber after the second fiber optic collimator mirror;
Described substrate clamping detection platform is for generation of reference light, and the interference fringe of light-metering and reference light treated in record, be made up of base, angle scale, locating slot, fine setting slide block, swing arm, pipe clamp, beam expanding lens, semi-transparent semi-reflecting lens and CCD camera, column, one dimension adjustment jig and self-centering mirror holder;
Angle scale is horizontally set on base, and locating slot is established at the edge of angle scale, and the home position of angle scale arranges rotating shaft;
Fine setting slide block is set in locating slot; Swing arm may be stuck on fine setting slide block, and fine setting slide block can drive swing arm along the circular arc minute movement of locating slot;
Swing arm is "L" shaped, and one end arranges CCD camera, and the other end sets gradually pipe clamp, beam expanding lens and semi-transparent semi-reflecting lens from outer end to interior; First outgoing optical fiber collimating mirror can be fixed on pipe clamp, and the directional light of generation points to semi-transparent semi-reflecting lens center after beam expanding lens, then through semi-transparent semi-reflecting lens reflection after directive CCD camera;
The object plane of CCD camera is above angle scale axis;
Column is fixed on base, column is arranged one dimension adjustment jig; The one dimension adjustment jig other end fixes self-centering mirror holder, and grating substrate will be fixed on self-centering mirror holder; The axis orientation angle dish forward of self-centering mirror holder, and crossing with angle scale central shaft;
Beam expanding lens, semi-transparent semi-reflecting lens, CCD camera are identical with the level height at self-centering mirror holder center.
The invention has the beneficial effects as follows: the known change function treating light-metering and reference light interference fringe, by calculating the accurate parameters that can draw exposure light path, and then debuging of exposure system can be realized; Present invention utilizes this thinking, do not change the intrinsic device of holographic Variable line-space gratings exposure system, add the detection light source that can produce two coherent parallel lights; Grating substrate Gripping platform adds the element such as swing arm, fine setting slide block, spatial filter, collimating mirror, semi-transparent semi-reflecting lens and angle scale, and in order to produce the known reference light of parameter, swing arm one end adds CCD camera, can record the interference fringe of two light paths; The method can effectively increase exposure light path and debug precision.
In the making of holographic Variable line-space gratings, by utilizing the debugging device of the holographic Variable line-space gratings exposure light path of the present invention can accomplish in real time, obtain concrete data exactly, that improves holographic Variable line-space gratings debugs efficiency and precision.
Accompanying drawing explanation
Fig. 1 is the debugging device schematic diagram of the holographic Variable line-space gratings exposure light path of the present invention.
Fig. 2 is another angle schematic diagram of debugging device of the holographic Variable line-space gratings exposure light path of the present invention.
Fig. 3 is the debugging device application schematic diagram of the holographic Variable line-space gratings exposure light path of the present invention.
Fig. 4 is fine motion slide block structure schematic diagram of the present invention.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further details.
As shown in Figure 1, 2, the debugging device of holographic Variable line-space gratings exposure light path, comprises detection light source and grating substrate clamps detection platform.
Described detection light source is used for providing two coherent parallel lights; Be made up of laser instrument 1, incident optical collimating mirror 2, Y type single-mode fiber 3, first outgoing optical fiber collimating mirror 4 and the second outgoing optical fiber collimating mirror 5, the laser that laser instrument 1 produces, assembled by incident optical collimating mirror 2 and enter Y type single-mode fiber 3, laser becomes directional light through the first outgoing optical fiber collimating mirror 4 after the outgoing of Y type single-mode fiber 3 after the second fiber optic collimator mirror 5.
Described substrate clamping detection platform is for generation of reference light, and the interference fringe of light-metering and reference light treated in record, be made up of base 6, angle scale 7, locating slot 8, fine setting slide block 9, swing arm 11, pipe clamp 12, beam expanding lens 13, semi-transparent semi-reflecting lens 14 and CCD camera 15, column 16, one dimension adjustment jig 17 and self-centering mirror holder 18.
Angle scale 7 is horizontally set on base 6, and locating slot 8 is established at the edge of angle scale 7, and the home position of angle scale 7 arranges rotating shaft.
Fine setting slide block 9 is set in locating slot 8; Swing arm 11 may be stuck on fine setting slide block 9, and fine setting slide block 9 can drive swing arm 11 along the circular arc minute movement of locating slot.
Swing arm 11 is in "L" shaped, and one end arranges CCD camera 15, and the other end sets gradually pipe clamp 12, beam expanding lens 13 and semi-transparent semi-reflecting lens 14 from outer end to interior; First outgoing optical fiber collimating mirror 4 can be fixed on pipe clamp 12, and the directional light of generation points to semi-transparent semi-reflecting lens 14 center after beam expanding lens 13, then through semi-transparent semi-reflecting lens 14 reflect after directive CCD camera 15.
The object plane of CCD camera 15 is above angle scale 7 axis.
Column 16 is fixed on base 6, column 16 is arranged one dimension adjustment jig 17; One dimension adjustment jig 17 other end fixes self-centering mirror holder 18, and grating substrate will be fixed on self-centering mirror holder 18; The forward of the same orientation angle dish 7 of axis of self-centering mirror holder 18, and crossing with its central shaft.
The level height at beam expanding lens 13, semi-transparent semi-reflecting lens 14, CCD camera 15, self-centering mirror holder 18 center is identical.
As shown in Figure 3, grating substrate is fixed on self-centering mirror holder, utilizes milscale, protractor to adjust roughly grating substrate 21, two nonplanar reflector 20, two spatial filter 19 position.
The directional light access pipe clamp 12 produced by first outgoing optical fiber collimating mirror 4 of detection light source, incident light is radiated in CCD camera 15 through half-reflecting half mirror 14 after beam expanding lens 13 expands.
The directional light access produced by second outgoing optical fiber collimating mirror 5 is wherein in an exposure light path, spatial filter 19 filtering in exposure light path, aspherical wavefront is become after nonplanar reflector 20 reflects, adjustment swing arm 11 angle, make the aspherical wavefront of CCD camera 15 plane vertical incidence as far as possible, record swing arm 11 is relative to the corner of angle scale 7.
By the interference fringe that CCD camera 15 records, the misalignment rate of exposure light path parameter and ideal parameters is gone out by process computations such as image procossing, matching, calculating, by misalignment rate adjustment exposure light path parameter, circulation is until draw satisfactory result successively, then by this method adjustment another light path.
Laser instrument 1 in detection light source adopts solid state laser, and wavelength is 543.8nm.
Y type single-mode fiber 3 mode field diameter is 3.5 ± 0.5 μm.
The enlargement ratio of beam expanding lens 13 is 20 times.
10 ° to 170 ° of corresponding angles scale 7 bottom locating slot 8, every 5 ° of places arrange pilot hole, and precision is 0.001 °.
CCD camera 15 is high sensitivity scientific grade CCD, pixel count >=2000 × 2000, and pixel is not more than 5 μm.
As shown in Figure 4, finely tune slide block 9 to comprise slide block base 9-1, slide block upper cover 9-2, pilot hole 9-3, stablize gear 9-4, adjust gear 9-5, fixed gear 9-6, swing arm draw-in groove 9-7, angle display panel 9-8 and knob 9-9; Three fixed gear 9-6 are arranged on slide block base 9-1, for limiting stable gear 9-4 and adjustment gear 9-5.Swing arm 11 is positioned at swing arm draw-in groove 9-7.Slide block upper cover 9-2 is between swing arm 11 and slide block base 9-1.Pilot hole 9-3 is fixed in locating slot 8 pilot hole by register pin 10, plays fixing slide block base 9-1.Stablize gear 9-4 and play restriction slide block upper cover 9-2 motion track; Knob 9-9 coordinates with adjustment gear 9-5, adjustment gear 9-5 can be driven to rotate, slide block upper cover 9-2 is moved relative to slide block base 9-1.Angle display panel 9-8, on swing arm draw-in groove 9-7 left side, is connected with adjustment gear 9-5, and can show the adjustment gear 9-5 anglec of rotation, angle display panel 9-8 has 5 scales, and each scale angular separation is 1 °, and precision is 0.001 °.
Claims (6)
1. the debugging device of holographic Variable line-space gratings exposure light path, is characterized in that, comprises detection light source and grating substrate clamps detection platform;
Described detection light source is used for providing two coherent parallel lights; Be made up of laser instrument (1), incident optical collimating mirror (2), Y type single-mode fiber (3), the first outgoing optical fiber collimating mirror (4) and the second outgoing optical fiber collimating mirror (5), the laser that laser instrument (1) produces, assembled by incident optical collimating mirror (2) and enter Y type single-mode fiber (3), laser becomes directional light through the first outgoing optical fiber collimating mirror (4) respectively after Y type single-mode fiber (3) outgoing after the second outgoing optical fiber collimating mirror (5);
Described grating substrate clamping detection platform is for generation of reference light, and the interference fringe of light-metering and reference light treated in record, be made up of base (6), angle scale (7), locating slot (8), fine setting slide block (9), swing arm (11), pipe clamp (12), beam expanding lens (13), semi-transparent semi-reflecting lens (14) and CCD camera (15), column (16), one dimension adjustment jig (17) and self-centering mirror holder (18);
Angle scale (7) is horizontally set on base (6), and locating slot (8) is established at the edge of angle scale (7), and the home position of angle scale (7) arranges rotating shaft;
Fine setting slide block (9) is set in locating slot (8); Swing arm (11) may be stuck in fine setting slide block (9), and fine setting slide block (9) can drive swing arm (11) along the circular arc minute movement of locating slot;
Swing arm (11) is in "L" shaped, and one end arranges CCD camera (15), and the other end sets gradually pipe clamp (12), beam expanding lens (13) and semi-transparent semi-reflecting lens (14) from outer end to interior; First outgoing optical fiber collimating mirror (4) can be fixed on pipe clamp (12), produce directional light after beam expanding lens (13), point to semi-transparent semi-reflecting lens (14) center, then through semi-transparent semi-reflecting lens (14) reflection after directive CCD camera (15);
The object plane of CCD camera (15) is above angle scale (7) axis;
Column (16) is fixed on base (6), column (16) is arranged one dimension adjustment jig (17); Self-centering mirror holder (18) is fixed in one dimension adjustment jig (17) one end, and grating substrate will be fixed on self-centering mirror holder (18); Axis orientation angle dish (7) forward of self-centering mirror holder (18), and crossing with angle scale central shaft;
Beam expanding lens (13), semi-transparent semi-reflecting lens (14), CCD camera (15) are identical with the level height at self-centering mirror holder (18) center.
2. the debugging device of holographic Variable line-space gratings exposure light path according to claim 1, it is characterized in that, fine setting slide block (9) comprises slide block base (9-1), slide block upper cover (9-2), pilot hole (9-3), stablizes gear (9-4), adjusts gear (9-5), fixed gear (9-6), swing arm draw-in groove (9-7), angle display panel (9-8) and knob (9-9); Fixed gear (9-6) is arranged on slide block base (9-1), for limiting stable gear (9-4) and adjustment gear (9-5); Swing arm (11) is positioned at swing arm draw-in groove (9-7); Slide block upper cover (9-2) is between swing arm (11) and slide block base (9-1); Pilot hole (9-3) is fixed in the pilot hole of locating slot by register pin (10), plays fixing slide block base (9-1); Stablize gear (9-4) and play restriction slide block upper cover (9-2) motion track; Knob (9-9) coordinates with adjustment gear (9-5), adjustment gear (9-5) can be driven to rotate, slide block upper cover (9-2) is moved relative to slide block base (9-1); Angle display panel (9-8), on swing arm draw-in groove (9-7) left side, is connected with adjustment gear (9-5).
3. the debugging device of holographic Variable line-space gratings exposure light path according to claim 1, is characterized in that, laser instrument (1) adopts solid state laser, and wavelength is 543.8nm.
4. the debugging device of holographic Variable line-space gratings exposure light path according to claim 1, is characterized in that, the mode field diameter of Y type single-mode fiber (3) is 3.5 ± 0.5 μm.
5. the debugging device of holographic Variable line-space gratings exposure light path according to claim 1, is characterized in that, the enlargement ratio of beam expanding lens (13) is 20 times.
6. the debugging device of holographic Variable line-space gratings exposure light path according to claim 1, is characterized in that, locating slot used (8) bottom, 10 ° to 170 ° of corresponding angles scale (7), every 5 ° of places arrange pilot hole, and precision is 0.001 °.
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| CN201310449542.2A CN103472512B (en) | 2013-09-27 | 2013-09-27 | The debugging device of holographic Variable line-space gratings exposure light path |
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| CN201310449542.2A CN103472512B (en) | 2013-09-27 | 2013-09-27 | The debugging device of holographic Variable line-space gratings exposure light path |
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| CN109030383A (en) * | 2017-06-12 | 2018-12-18 | 北京金泰祁氏光电科技有限公司 | A kind of Method of Adjustment of middle ladder fiber spectrometer |
| CN113050211B (en) * | 2021-03-17 | 2022-11-18 | 江苏奥格视特信息科技有限公司 | Reality-fused holographic grating manufacturing device |
Citations (3)
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|---|---|---|---|---|
| CN101430395A (en) * | 2008-12-29 | 2009-05-13 | 中国科学院长春光学精密机械与物理研究所 | Real-time monitoring device for light exposure in holographic grating production |
| CN102279532A (en) * | 2011-07-27 | 2011-12-14 | 中国科学院长春光学精密机械与物理研究所 | Device for assembling and regulating lens of projection objective of lithography machine |
| CN103064140A (en) * | 2012-12-26 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Adjustment method of holographic variable spacing grating exposure light path |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS6433580A (en) * | 1987-07-29 | 1989-02-03 | Shimadzu Corp | Method for exposing holographic grating |
| JP2005010585A (en) * | 2003-06-20 | 2005-01-13 | Tdk Corp | Holographic optical element, its manufacturing method, and holographic recording system |
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Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101430395A (en) * | 2008-12-29 | 2009-05-13 | 中国科学院长春光学精密机械与物理研究所 | Real-time monitoring device for light exposure in holographic grating production |
| CN102279532A (en) * | 2011-07-27 | 2011-12-14 | 中国科学院长春光学精密机械与物理研究所 | Device for assembling and regulating lens of projection objective of lithography machine |
| CN103064140A (en) * | 2012-12-26 | 2013-04-24 | 中国科学院长春光学精密机械与物理研究所 | Adjustment method of holographic variable spacing grating exposure light path |
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| 变线距全息光栅的在线检测;何世平 等;《实验力学》;20050630;第161-165页 * |
| 高频可变间距全息光栅的制作方法的计算机模拟研究;朱化凤 等;《物理学报》;20050228;第682-686页 * |
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