CN103438816A - High-precision measuring device for measuring joint type equipment member bar deformation - Google Patents
High-precision measuring device for measuring joint type equipment member bar deformation Download PDFInfo
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- CN103438816A CN103438816A CN2013103596337A CN201310359633A CN103438816A CN 103438816 A CN103438816 A CN 103438816A CN 2013103596337 A CN2013103596337 A CN 2013103596337A CN 201310359633 A CN201310359633 A CN 201310359633A CN 103438816 A CN103438816 A CN 103438816A
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Abstract
The invention discloses a high-precision measuring device for measuring joint type equipment member bar deformation. The high-precision measuring device for measuring joint type equipment member bar deformation is a real-time error compensation device aiming at solving the problem that an armed lever member bar deforms elastically in the measuring process of the geometric dimension of a parallel dual-joint coordinate measuring machine. The high-precision measuring device for measuring joint type equipment member bar deformation is based on the laser detection principle and combined with the elastic deformation of an electronic circuit detection armed lever relative to a reference beam, and on-line correction of the error is achieved. The high-precision measuring device for measuring joint type equipment member bar deformation is easy to assemble, convenient and fast to use, light and handy in structure and easy to operate. By means of the high-precision measuring device for measuring joint type equipment member bar deformation, the measuring error of the parallel dual-joint coordinate measuring machine can be well corrected, and therefore measuring precision is improved.
Description
Technical field
The present invention relates to the error measuring means field of parallel double joint coordinates measuring machine, be specially a kind of high precision measuring device of measuring joint class equipment Deformation Member.
Background technology
Parallel double joint coordinates measuring machine is united based on non-orthogonal coordinate system, and the main mobile platform by the vertical direction and displacement scale and the gage beam that can rotate freely in X-Y plane form.Wherein the Z axis system mainly is comprised of parts such as motor, leading screw, two closed slide, long gratings, and motor drives gage beam by leading screw and moves at vertical direction along guide rail, and long grating records its displacement; Measurement in the XY plane needs instrument that 2 degree of freedom are arranged in surface level, and this just realizes by 2 rotary joints in gage beam.Whole gage beam partly is comprised of 2 rotary joints, power sensor, handpiece, gauge head etc., wherein joint 1 and joint 2 can be respectively around self vertical axis rotation, the high precision angular encoder is installed at its top, is used for respectively measuring the relative rotation angle between the building block in joint 1 and joint 2.Base is fixed on mobile device, can realize measuring in workshop moving among a small circle, embodies the dirigibility of coordinate measuring machine application.When actual measurement operates, measure people's the handpiece that holds, the downward pulling force that the power sensor sensing transmits to staff or the thrust made progress, send signal to subsequent conditioning circuit, controls the rotating of motor, thereby control the displacement up or down of whole gage beam.Yet due to its motion structure flexibly, that error is controlled is complicated, precision is difficult to ensure card, and CMM can produce kinematic error, encoder errors, elastic deformation, hot error, joint error etc. in measuring process.Wherein, the problem of elastic deformation is particularly important, because CMM adopts hand-held, during design, weight reaches the lightest, responsive mechanical system also can be subject to the impact of operating physical force, and its position, size and Orientation, the acceleration that rubs even etc. all are difficult to prediction, so can not compensate easily.
The error compensating method of parallel double joint coordinates measuring machine is divided into off-line compensation and online compensation at present.The off-line compensation improves precision by the calibration data of setting up error model or measured, and as the joint device for elimination of axial-and radial-play, it is online compensation that stochastic error etc. need a kind of real-time compensation method.
Now, the compensation of elastic deformation mainly contains two kinds of methods.A kind of is traditional Stress Analysis Method, first by stress ga(u)ge (meter), is recorded the data of local stress, on the basis of these data, calculates amount of deflection.This method is very complicated and precision is inadequate.Another kind is the Sensor Model method, utilizes sensing device, analyzes deformation point by three position sensitive detectors (PSD), at the line computation round-off error.Its shortcoming is that sampling rate and bandwidth are limited by the specification of PSD, the site error of end-effector, and three-dimensional Deflection Model is very complicated equally.Therefore, up to now, still can not there is a kind of good method to revise the error that elastic deformation that parallel double joint coordinates measuring machine produces in measuring process causes.
Summary of the invention
The purpose of this invention is to provide a kind of high precision measuring device of measuring joint class equipment Deformation Member, the problem existed to solve prior art.
In order to achieve the above object, the technical solution adopted in the present invention is:
A kind of high precision measuring device of measuring joint class equipment Deformation Member, it is characterized in that: include the optical head that is arranged on parallel double joint coordinates measuring machine rod member one end top, and the photosurface that is arranged on parallel double joint coordinates measuring machine rod member other end top, described optical head is relative with the photosurface position, also comprise governor circuit, laser drive unit, laser diode, signal deteching circuit, described signal deteching circuit, laser drive unit adopts respectively the mode of iic bus to access governor circuit, described photosurface access signal deteching circuit input end, laser diode input end access laser drive unit output terminal, the outgoing beam process coupling fiber of laser diode output terminal is to optical head, by optical head, the outgoing beam of laser diode is exposed on photosurface.
Described a kind of high precision measuring device of measuring joint class equipment Deformation Member, it is characterized in that: the driving circuit that described laser drive unit is laser diode, comprise power driving circuit and signaling conversion circuit, wherein after the control signal of signaling conversion circuit reception governor circuit, export to power driving circuit and produce high-power signal, then send into laser diode.
Described a kind of high precision measuring device of measuring joint class equipment Deformation Member, it is characterized in that: described optical head and photosurface are in the same level height.
Described a kind of high precision measuring device of measuring joint class equipment Deformation Member, it is characterized in that: described optical head is that the optical fiber material is made, be provided with the optical autocollimating camera lens in optical head, the laser beam of laser diode after optical autocollimating camera lens collimation in optical head from the optical head outgoing.
Described a kind of high precision measuring device of measuring joint class equipment Deformation Member, it is characterized in that: described photosurface is a Two-dimensional PSD device.
The present invention be directed to the elastic deformation error produced when parallel double joint coordinates measuring machine is measured and compensate, revise measuring error, improve measuring accuracy.The present invention is based on laser measuring technology, in the time of can measuring parallel double joint coordinates measuring machine, rod member is because the elastic deformation of the generations such as gravity, hand-held power, friction, acceleration is carried out real-time online measuring compensation, better revise its measuring error, making a breakthrough aspect raising CMM precision.
Beneficial effect of the present invention is embodied in:
1, the present invention in conjunction with associated electronic circuits, has designed a kind of real-time measurement apparatus of mechanical arm Material Bar Member by optical component.Utilize testing circuit to detect the elastic deformation of rod member with respect to reference beam, round-off error.
2, apparatus of the present invention self-sufficient, be easy to integrated, lightweight, structure is small and exquisite, have real-time fast high resolving power.
3, the present invention is when components and parts are chosen and design, optical head is used the optical fiber material, the space drift that this provides higher-quality light beam and has effectively reduced light beam, and high accurate designing requirement is arranged to guarantee the stability of operating system as reference light source laser diode and laser drive unit, and laser diode and laser drive unit are designed to dislocate from optical head, in addition, the connection of a plurality of LASER Light Source such as supporting detector and governor circuit.
4, chief component in the present invention, as optical head, testing circuit etc., because its volume is small, can be placed in easily the rod member top, not only convenient, and it is positioned in carbon fiber pipe to environment sensitive devices such as making light beam avoids better the factors such as air turbulence, illumination, environmental impact drops to and minimizes.
5, the present invention, when measuring elastic deformation, can carry out the synchronous processing of data acquisition accurately, measures sampling rate and can surpass 1kHz.
The accompanying drawing explanation
Fig. 1 is apparatus of the present invention system composition diagram.
Fig. 2 is measurement mechanical arm elastic deformation schematic diagram of the present invention.
Embodiment
As shown in Figure 1.A kind of high precision measuring device of measuring joint class equipment Deformation Member, include the optical head 2 that is arranged on parallel double joint coordinates measuring machine rod member 1 one end tops, and the photosurface 3 that is arranged on parallel double joint coordinates measuring machine rod member 1 other end top, optical head 2 is relative with photosurface 3 positions, also comprise governor circuit 4, laser drive unit 5, laser diode 6, signal deteching circuit 7, signal deteching circuit 7, laser drive unit 5 adopts respectively the mode of iic bus 9 to access governor circuit 4, photosurface 3 access signal deteching circuit 7 input ends, laser diode 6 input end access laser drive unit 5 output terminals, the outgoing beam of laser diode 6 output terminals is coupled to optical head 2 through optical fiber 8, by optical head 2, the outgoing beam of laser diode 6 is exposed on photosurface 3.
The driving circuit that laser drive unit 5 is laser diode, comprise power driving circuit and signaling conversion circuit, wherein after the control signal of signaling conversion circuit reception governor circuit 4, export to power driving circuit and produce high-power signal, then send into laser diode 6.
Photosurface 3 is a Two-dimensional PSD device.
In the present invention, governor circuit is exactly the control section of whole system, be responsible for to the control of system and with the communication function of external device, wherein governor circuit is connected the responsible laser drive unit of controlling by specifying requirement to produce laser beam with laser drive unit, such as the intensity of controlling laser beam, pulse width, pulsed frequency etc., governor circuit receives the signal of signal deteching circuit output simultaneously.
In the present invention, photosurface is connected with signal deteching circuit, and photosurface is responsible for receiving the laser beam that laser diode sends.Photosurface is a Two-dimensional PSD device, it is a very little luminous point that the light beam that laser diode sends shines on photosurface by optical head, photosurface is a plane, export different signals according to luminous point at this device of diverse location of photosurface, comprise the coordinate information of luminous point in plane in signal, this signal is electric signal.Signal deteching circuit detects this electric signal, the coordinate information in signal is extracted, and export to governor circuit in digital mode.
In the present invention, the connection of governor circuit and laser drive unit, signal deteching circuit adopts the mode of iic bus.Laser Driven power supply and signal deteching circuit all as iic bus from equipment, the iic bus interface chip is arranged on it, draw the iic bus port by interface chip, same iic bus port is also arranged on governor circuit, bus port on three circuit is interconnected, the line that is communicated with them is exactly iic bus, when whole system and external device are connected such as PC or other smart machines, is also directly this iic bus to be connected on the equipment of needs.
In the present invention, the driving circuit that laser drive unit is laser diode, this is an electronic circuit, comprise power driving circuit and signaling conversion circuit, its major function is controlled laser diode exactly, namely laser head, control laser diode by the current switching of controlling laser diode and send pulsed light, and the power of controlling electric current is controlled the intensity of laser.By the various control of the electric current to flowing through diode, come the driving laser diode to produce the laser beam that various parameters are different exactly in a word.
Apparatus of the present invention are applied to the elastic deformation of mechanical arm rod member part generation when measuring of parallel double joint coordinates measuring machine.During measurement, laser drive unit driving laser diode produces laser beam as the linear datum light beam, through coupling fiber, to the optical head with the optical autocollimating camera lens, because the optical head size is very little, allows to use the optical fiber material to obtain the high-quality light source.The laser beam that optical head sends is exactly the reference line light beam, projects on the photosurface of testing circuit connection.Testing circuit is sent to testing result on number bus, and number bus is connected with governor circuit, and governor circuit can send order to laser drive unit by number bus and control laser pulse parameters.Bus structure can allow a plurality of laser drive unit to connect simultaneously, are easy to integrated and synchronous processing data.
Laser projection can calculate the two-dimensional coordinate (X, Z) of projected spot on light-sensitive surface to testing circuit after the photosurface of testing circuit, according to the brachium of this coordinate and mechanical arm rod member to be measured, can draw and treat the degree of crook of test arm with respect to reference line.As shown in Figure 2, suppose that the coordinate of hot spot on light-sensitive surface is for (x, z), mechanical arm end face circle center line connecting with respect to the deflection angle of reference line is
mechanical arm length is L, and formula is arranged:
Claims (5)
1. measure the high precision measuring device that the joint class is equipped Deformation Member for one kind, it is characterized in that: include the optical head that is arranged on parallel double joint coordinates measuring machine rod member one end top, and the photosurface that is arranged on parallel double joint coordinates measuring machine rod member other end top, described optical head is relative with the photosurface position, also comprise governor circuit, laser drive unit, laser diode, signal deteching circuit, described signal deteching circuit, laser drive unit adopts respectively the mode of iic bus to access governor circuit, described photosurface access signal deteching circuit input end, laser diode input end access laser drive unit output terminal, the outgoing beam process coupling fiber of laser diode output terminal is to optical head, by optical head, the outgoing beam of laser diode is exposed on photosurface.
2. a kind of high precision measuring device of measuring joint class equipment Deformation Member according to claim 1, it is characterized in that: the driving circuit that described laser drive unit is laser diode, comprise power driving circuit and signaling conversion circuit, wherein after the control signal of signaling conversion circuit reception governor circuit, export to power driving circuit and produce high-power signal, then send into laser diode.
3. a kind of high precision measuring device of measuring joint class equipment Deformation Member according to claim 1, it is characterized in that: described optical head and photosurface are in the same level height.
4. a kind of high precision measuring device of measuring joint class equipment Deformation Member according to claim 1, it is characterized in that: described optical head is that the optical fiber material is made, be provided with the optical autocollimating camera lens in optical head, the laser beam of laser diode after optical autocollimating camera lens collimation in optical head from the optical head outgoing.
5. a kind of high precision measuring device of measuring joint class equipment Deformation Member according to claim 1, it is characterized in that: described photosurface is a Two-dimensional PSD device.
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| CN2013103596337A CN103438816A (en) | 2013-08-16 | 2013-08-16 | High-precision measuring device for measuring joint type equipment member bar deformation |
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| CN2013103596337A CN103438816A (en) | 2013-08-16 | 2013-08-16 | High-precision measuring device for measuring joint type equipment member bar deformation |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103791880A (en) * | 2014-01-23 | 2014-05-14 | 中国科学院长春光学精密机械与物理研究所 | Device for accurate measurement of micro deformation of composite rod for space |
| CN103868466A (en) * | 2014-02-08 | 2014-06-18 | 合肥工业大学 | Comprehensive measuring device for deformation of parallel double-joint coordinate measuring machine rotating arm |
| CN107131824A (en) * | 2017-06-22 | 2017-09-05 | 湖南帝星智能科技有限公司 | Deformation Member monitoring device and scaffold monitor and alarm system |
| CN109945781A (en) * | 2019-04-01 | 2019-06-28 | 合肥工业大学 | A kind of Z axis Abbe error modification method of parallel doublejointed coordinate measuring machine |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103791880A (en) * | 2014-01-23 | 2014-05-14 | 中国科学院长春光学精密机械与物理研究所 | Device for accurate measurement of micro deformation of composite rod for space |
| CN103791880B (en) * | 2014-01-23 | 2016-08-17 | 中国科学院长春光学精密机械与物理研究所 | Device for accurate measurement space composite rod member micro-strain amount |
| CN103868466A (en) * | 2014-02-08 | 2014-06-18 | 合肥工业大学 | Comprehensive measuring device for deformation of parallel double-joint coordinate measuring machine rotating arm |
| CN103868466B (en) * | 2014-02-08 | 2017-05-17 | 合肥工业大学 | Comprehensive measuring device for deformation of parallel double-joint coordinate measuring machine rotating arm |
| CN107131824A (en) * | 2017-06-22 | 2017-09-05 | 湖南帝星智能科技有限公司 | Deformation Member monitoring device and scaffold monitor and alarm system |
| CN109945781A (en) * | 2019-04-01 | 2019-06-28 | 合肥工业大学 | A kind of Z axis Abbe error modification method of parallel doublejointed coordinate measuring machine |
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Application publication date: 20131211 |
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