CN103196593B - Resonance type micro-machinery pressure sensor and low-stress assembling method of resonance type micro-mechanical pressure sensor chip - Google Patents
Resonance type micro-machinery pressure sensor and low-stress assembling method of resonance type micro-mechanical pressure sensor chip Download PDFInfo
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- CN103196593B CN103196593B CN201310092955.XA CN201310092955A CN103196593B CN 103196593 B CN103196593 B CN 103196593B CN 201310092955 A CN201310092955 A CN 201310092955A CN 103196593 B CN103196593 B CN 103196593B
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CN103196593B true CN103196593B (en) | 2015-02-04 |
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CN105917201A (en) * | 2015-06-02 | 2016-08-31 | 东莞传晟光电有限公司 | Pyroelectric sensor |
CN109738093B (en) * | 2019-01-31 | 2020-02-14 | 清华大学 | On-chip resonant beam structure for detecting stress of micro-electromechanical device and detection method |
CN111633589A (en) * | 2020-06-16 | 2020-09-08 | 南京沃天科技有限公司 | Sensor chip centre gripping fixed knot constructs |
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CA2121294C (en) * | 1994-04-14 | 1997-01-14 | Gerhard H. Herget | Extended range vibrating wire strain monitor |
EP1540677A2 (en) * | 2002-08-29 | 2005-06-15 | Bioscale Inc. | Resonant sensor and sensing system |
KR100688769B1 (en) * | 2004-12-30 | 2007-03-02 | 삼성전기주식회사 | Embedded chip print circuit board and method for fabricating the same by means of plating |
CN102374909A (en) * | 2010-08-11 | 2012-03-14 | 中国科学院电子学研究所 | Micromachine-based electromagnetic excitation resonant pressure sensor |
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Effective date of registration: 20210319 Address after: 100190 No. 19 West North Fourth Ring Road, Haidian District, Beijing Patentee after: Research Institute of aerospace information innovation, Chinese Academy of Sciences Address before: 100190 No. 19 West North Fourth Ring Road, Haidian District, Beijing Patentee before: Institute of Electronics, Chinese Academy of Sciences Effective date of registration: 20210319 Address after: Room 1818, 18 / F, building 3, future venture Plaza, north section of Gangxing Third Road, Jinan Comprehensive Bonded Zone, Jinan free trade Experimental Zone, Shandong Province Patentee after: Shandong zhongkesier Technology Co.,Ltd. Address before: 100190 No. 19 West North Fourth Ring Road, Haidian District, Beijing Patentee before: Research Institute of aerospace information innovation, Chinese Academy of Sciences |