CN103176226A - Dodging special-shaped lens used for shaping semiconductor laser leams, dodging laser source and optical system - Google Patents
Dodging special-shaped lens used for shaping semiconductor laser leams, dodging laser source and optical system Download PDFInfo
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- CN103176226A CN103176226A CN2013100586649A CN201310058664A CN103176226A CN 103176226 A CN103176226 A CN 103176226A CN 2013100586649 A CN2013100586649 A CN 2013100586649A CN 201310058664 A CN201310058664 A CN 201310058664A CN 103176226 A CN103176226 A CN 103176226A
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Abstract
The invention provides a dodging special-shaped lens used for shaping semiconductor laser leams. The lens comprises an entrance face receiving laser injection and an exit face allowing laser ejection, the entrance face which is a half-cylindrical curved surface and the exit face which is an aspheric surface are arranged oppositely, and the distance between two ends of a generatrix of the aspheric surface is larger than that of the half-cylindrical surface, so that lasers injected through the entrance face are enabled to be wholly injected onto the exit face. The dodging special-shaped lens is simple in structure, easy for batch processing, low in cost and especially capable of well realizing adjusting of divergence angles of laser beams output by semiconductor lasers of various wavelengths and homogenized adjusting of Gaussian curve distribution of light energy output by lasers, and utilization rate of laser energy is improved while good dodging and aberration-eliminating performances are provided.
Description
Technical field
The present invention relates to a kind of laser optics, relate in particular to a kind of for to the even smooth special-shaped lens of semiconductor laser beam shaping, even ray laser light source and optical system.
Background technology
At present, the light beam that semiconductor laser LD exports as light source, its cross section hot spot level with vertically form the different angles of divergence on both direction, be horizontal divergence angle θ ∥ on horizontal direction and the vertical divergence angle θ ⊥ on vertical direction, usually just intercept in use center spot, the luminous energy loss ratio is larger.Distribute because semiconductor laser is Gaussian curve, pass through general optical alignment or expand, its hot spot light energy distribution is inhomogeneous, has affected the products such as application, especially Photoelectric Detection in the field that the even light field of semiconductor laser is required to the requirement of even light field.
For existing semiconductor laser light resource, usually adopt general spherical lens or lens combination to carry out optical processing, its defective is: the 1) processing of common spherical lens to semiconductor laser light resource, be used for expanding, the even equal property of its light field is poor; Be used for collimation, the point-sourcre imaging quality is only applicable to general identification application product, does not reach the application requirements of precision measurement quasi-instrument.2) in order to reach certain imaging effect, adopt the multi-disc spherical lens to be used in combination, not only optical power loss is larger, and is difficult to eliminate aberration.3) though traditional spherical glass eyeglass is easy to batch machining, and manufacturing procedure is long, as corase grind, fine grinding, Throwing light etc., operation is many, material is many, and cost is high, and the assembling accumulated error is large, and constant product quality is also relatively poor.
Summary of the invention
Purpose one of the present invention is that the angle of divergence of adjusting the Output of laser light beam of semiconductor laser LD (is namely carried out shaping to the hot spot of its Output of laser, the hot spot here refers to the cross sectional shape of laser, also can be understood as the projection of laser beam), its angle of divergence is approached consistent, process the LASER Light Source that a better quality is provided for subsequent optical, and improve the utilization factor of luminous energy.
Purpose two is to provide LASER Light Source or the module with even light and the poor performance of disappearing image.
Purpose three is to provide the light path system with even light and the poor performance of disappearing image.
For achieving the above object, the invention provides a kind of for the even smooth special-shaped lens to the semiconductor laser beam shaping, comprise and have the exit facet that the plane of incidence that the described laser of the reception that is oppositely arranged injects and this laser penetrate, its special character is, the described plane of incidence is the semi-cylinder curved surface, and exit facet is aspheric surface; And this aspheric bus two ends distance is greater than the two ends distance of described semi-cylinder surface bus, all incides on described exit facet through the laser that the described plane of incidence is injected guaranteeing.
The convex surface of the above-mentioned plane of incidence for outwards arching upward, described exit facet is the concave surface that caves inward.
The convex surface of the above-mentioned plane of incidence for outwards arching upward, the convex surface of described exit facet for outwards arching upward.
The above-mentioned plane of incidence is the concave surface that caves inward, and described exit facet is the concave surface that caves inward.
The above-mentioned plane of incidence is the concave surface that caves inward, the convex surface of described exit facet for outwards arching upward.
Above-mentioned even smooth special-shaped lens is formed by first lens and the second lens combination, and this first lens has semi-cylinder curved surface and first plane relative with this semi-cylinder curved surface; These second lens have aspheric surface and second plane relative with this aspheric surface, and this first plane and the second plane are oppositely arranged, and this semi-cylinder curved surface and this aspheric surface consist of respectively the described plane of incidence and exit facet.
Above-mentioned first lens comprises respectively a relative plane with the second lens.
Above-mentioned relative plane adheres to each other or spacing is no more than 50mm.
a kind of even ray laser light source that contains above-mentioned even smooth special-shaped lens, comprise lens mount, be arranged on the laser socket that is fixed for lasing semiconductor laser LD chip of an end in lens mount, its special character is, described even smooth special-shaped lens is arranged on the optical axis of described semiconductor laser LD chip, spacing between the Laser output face of its plane of incidence and this semiconductor laser LD chip is in 0～100mm scope, the cylindricality diameter of the semi-cylinder curved surface of this plane of incidence is in 0.005～10mm, the axis of the plane of incidence is vertical with horizontal section or the vertical cross-section of the shoot laser of described semiconductor laser LD chip.
A kind of laser beam expanding light path system that contains above-mentioned even ray laser light source comprises the extender lens or the extender lens group that are placed between LASER Light Source and lens or lens combination, and its special character is, described LASER Light Source is described even ray laser light source; Described extender lens is sphere or aspheric surface extender lens; Described extender lens group is sphere or aspheric surface extender lens group.
A kind of laser alignment light path system that contains above-mentioned even ray laser light source, comprise LASER Light Source and be arranged on collimation lens or collimation lens set on the emitting light path of this LASER Light Source, its special character is, described LASER Light Source is described even ray laser light source, and described collimation lens is sphere or aspheric collimation lens; Described collimation lens set is sphere or aspheric collimation lens group.
a kind of focusing type laser beam expanding module that contains above-mentioned even ray laser light source, comprise and expand module casing, be arranged on the LASER Light Source that expands in module casing, slide and zoom extender lens, even optical alignment lens, LASER Light Source is arranged on slide, even optical alignment lens are arranged on the light hole place that expands module casing, the zoom extender lens is arranged between LASER Light Source and even optical alignment lens, this side that expands module casing is provided with the focusing wheel, this focusing wheel meshes by gear by being arranged on slide outer sliding pin and this slide, its special character is, described LASER Light Source is even ray laser light source, described zoom extender lens is sphere or non-spherical lens, described even optical alignment lens are sphere or aspheric simple lens, balsaming lens or lens combination.
A kind of laser alignment module that contains above-mentioned even ray laser light source, comprise the collimation module casing, be arranged at the long focus collimation lens on the emitting light path that collimates the LASER Light Source in module casing and be arranged on this LASER Light Source, its special character is, described LASER Light Source is described even ray laser light source; Described long focus collimation lens are sphere or aspheric simple lens, balsaming lens or lens combination.
A kind of reflective linear beam light path system of axicon lens that contains above-mentioned even ray laser light source, comprise LASER Light Source, be successively set on collimating optics components and parts and conical reflector on the emitting light path of this LASER Light Source, its special character is, described LASER Light Source is described even ray laser light source; Described collimating optics components and parts are sphere or aspheric simple lens, balsaming lens or lens combination.
A kind of pentaprism light path system that contains above-mentioned even ray laser light source, comprise LASER Light Source, be successively set on collimating optics components and parts and pentaprism on the emitting light path of this LASER Light Source, its special character is, described LASER Light Source is described even ray laser light source, and described collimating optics components and parts are sphere or aspheric simple lens, balsaming lens or lens combination; Described pentaprism is reflective or the Transflective pentaprism, and these reflective five rib lens are the monomer pentaprism, and Transflective five rib lens are gummed five rib lens.
A kind of conduction-type focused light passages system that contains above-mentioned even ray laser light source, comprise LASER Light Source, be successively set on collimating optics components and parts and light beam conductive medium on the emitting light path of this LASER Light Source, its special character is, described LASER Light Source is even ray laser light source; Described collimating optics components and parts are sphere or aspheric simple lens, balsaming lens or lens combination; Described light beam conductive medium is optical fiber or GRIN Lens.
A kind of high-velocity scanning galvanometer light path system that contains above-mentioned even ray laser light source, comprise LASER Light Source, be successively set on collimating optics components and parts and galvanometer on the emitting light path of this LASER Light Source, its special character is, described LASER Light Source is even ray laser light source; Described collimating optics components and parts are sphere or aspheric simple lens, balsaming lens or lens combination.
Advantage of the present invention is: simple in structure, make easily, and with low cost.Horizontal divergence θ ∥ and the vertical divergence angle θ ⊥ of a noise spectra of semiconductor lasers Output of laser light beam especially are provided, have carried out shaping, even light and eliminate the even ray laser light source that aberration is processed.The semiconductor lasers such as accurate laser measurement, scanning are used provides one to take full advantage of basic light source laser light energy, that beam energy is evenly distributed.The basic light source of the field application products such as mapping, construction and decoration, geodetic surveying, optoelectronic scanning and laser medicine is surveyed, is measured in the laser lighting that is applicable to various occasions.Can well realize the adjustment of the semiconductor laser Output of laser beam divergence angle of various wavelength and Laser output luminous energy Gaussian curve are distributed and carry out the homogenising adjustment, when improving the utilization factor of laser light energy, have good even light and the poor performance of disappearing image.
Description of drawings
Fig. 1 is that the plane of incidence is convex surface, and exit facet is the diagrammatic cross-section of the even smooth special-shaped lens of concave surface.
Fig. 2 is the schematic perspective view of Fig. 1.
Fig. 3 is that the plane of incidence is convex surface, and exit facet is the diagrammatic cross-section of the even smooth special-shaped lens of convex surface.。
Fig. 4 is the schematic perspective view of Fig. 3.
Fig. 5 is that the plane of incidence is concave surface, and exit facet is the diagrammatic cross-section of the even smooth special-shaped lens of concave surface.Fig. 6 is the schematic perspective view of Fig. 5.
Fig. 7 is that the plane of incidence is concave surface, and exit facet is the diagrammatic cross-section of the even smooth special-shaped lens of convex surface.
Fig. 8 is the schematic perspective view of Fig. 7.
Fig. 9 is that the plane of incidence is that semi-cylinder curved surface, the exit facet of convex surface is the diagrammatic cross-section of the first lens on the first plane.
Figure 10 is the schematic perspective view of Fig. 9.
Figure 11 is that the plane of incidence is that semi-cylinder curved surface, the exit facet of concave surface is the diagrammatic cross-section of the first lens on the first plane.
Figure 12 is the schematic perspective view of Figure 11.
Figure 13 is that the plane of incidence is that semi-cylinder curved surface and this semi-cylinder curved surface of convex surface is that semicircle, exit facet are the diagrammatic cross-section of the first lens on the first plane.
Figure 14 is the schematic perspective view of Figure 13.
Figure 15 is that the plane of incidence is that the second plane, exit facet are the diagrammatic cross-section of the second lens of aspheric surface (convex surface).
Figure 16 is the schematic perspective view of Figure 15.
Figure 17 is that the plane of incidence is that the second plane, exit facet are the diagrammatic cross-section of the second lens of aspheric surface (concave surface).
Figure 18 is the schematic perspective view of Figure 17.
Figure 19 is the diagrammatic cross-section that first lens shown in Figure 13 and the second lens shown in Figure 17 glue together the Combined even-lighting special-shaped lens that forms.
Figure 20 is the schematic perspective view of Figure 19.
Figure 21 is the diagrammatic cross-section that first lens shown in Figure 13 and the second lens shown in Figure 15 glue together the Combined even-lighting special-shaped lens that forms.
Figure 22 is the schematic perspective view of Figure 21.
Figure 23 is the schematic diagram of even ray laser light source.
Figure 24 is the angle of divergence schematic diagram of the shoot laser of unjustified semiconductor laser LD.
Figure 25 is the angle of divergence schematic diagram of the shoot laser of the semiconductor laser LD after shaping.
Figure 26 is the electric vector schematic diagram along the basement membrane Gaussian beam of Z direction propagation.
Figure 27 is the Gaussian distribution curve figure at the vertical divergence angle of unjustified semiconductor laser LD Output of laser.
Figure 28 is the Gaussian distribution curve figure at the horizontal divergence angle of unjustified semiconductor laser LD Output of laser.
Figure 29 is the horizontal divergence angle Gaussian distribution schematic diagram of semiconductor laser beam Output of laser after first surface or first lens shaping.
Figure 30 is the vertical divergence angle Gaussian distribution schematic diagram of semiconductor laser beam Output of laser after first surface or first lens shaping.
Figure 31 is the horizontal divergence angle Gaussian distribution curve figure of even ray laser light source.
Figure 32 is the vertical divergence angle Gaussian distribution curve figure of even ray laser light source.
Figure 33 is the beam cross section Gaussian distribution curve figure of even ray laser light source.
Figure 34 is the laser beam expanding light path system schematic diagram that contains the compound lens collimation of even ray laser light source.
Figure 35 is the laser beam expanding light path system schematic diagram that contains the simple lens collimation of even ray laser light source.
Figure 36 is the laser alignment light path system schematic diagram that contains the compound lens collimation of even ray laser light source.
Figure 37 is the laser alignment light path system schematic diagram that contains the simple lens collimation of even ray laser light source.
Figure 38 is the focusing type laser beam expanding module schematic diagram that contains even ray laser light source.
Figure 39 is the laser alignment module schematic diagram that contains even ray laser light source.
Figure 40 is the reflective linear beam light path system of the axicon lens schematic diagram that contains even ray laser light source.
Figure 41 is the pentaflex light path system schematic diagram that contains even ray laser light source.
Figure 42 is the pentaprism Transflective light path system schematic diagram that contains even ray laser light source.
Figure 43 is the conduction-type focused light passages system schematic that contains even ray laser light source.
Figure 44 is the high-velocity scanning galvanometer light path system schematic diagram that contains even ray laser light source.
In figure: 1, the plane of incidence; 2, exit facet; 3, even ray laser light source; 4, laser socket; 5, semiconductor laser LD chip; 6, even smooth special-shaped lens or Combined even-lighting special-shaped lens; 7, lens mount; 8, semi-cylinder curved surface; 9, the first plane; 10, aspheric surface; 11, the second plane; 12, Laser output face; 13, extender lens; 14, expand compound lens; 15, expand simple lens; 16 converge combination or balsaming lens; 17, money order lens; 18, even optical alignment lens; 19, zoom extender lens; 20, slide; 21, sliding pin; 22 expand module casing; 23, focusing wheel; 24, collimation module casing; 25, long focus collimation lens; 26, collimation lens; 27, conical reflector; 28, reflective pentaprism; 29, Transflective pentaprism; 30, light beam conductive medium; 31, galvanometer.
Embodiment
for the ratio of the vertical divergence angle θ ⊥ of the laser that overcomes semiconductor laser emission and horizontal divergence angle θ ∥ excessive, the low formed Light Energy of the Gaussian distribution phenomenon pockety that reaches of utilization ratio of optical energy, to improve the luminous power utilization factor and a relative light source light field uniformly be provided, the present embodiment provides a kind of Fig. 1 to the even smooth special-shaped lens that is used for noise spectra of semiconductor lasers Output of laser spot shaping shown in Figure 22, comprise and have the exit facet 2 that the plane of incidence 1 that the described laser of the reception that is oppositely arranged injects and this laser penetrate, and this plane of incidence 1 is the semi-cylinder curved surface, exit facet 2 is aspheric surface, this aspheric bus two ends distance is greater than the two ends distance of the bus of this semi-cylinder curved surface, all incide on exit facet 2 through the laser that the plane of incidence 1 is injected guaranteeing, the so greatly waste of the minimizing laser of degree, thereby be conducive to improve the utilization factor of laser.
Wherein, Fig. 1 be the even smooth special-shaped lens of monomer of same dielectric material making, and the specific constructive form of the even smooth special-shaped lens shown in Fig. 1,2 is the convex surface of its plane of incidence 1 for outwards arching upward to shown in Figure 8, the concave surface of exit facet 2 for caving inward.
The specific constructive form of the even smooth special-shaped lens shown in Fig. 3,4 is that the convex surface of its plane of incidence 1 for outwards arching upward, exit facet 2 are also the convex surface that outwards arches upward.
The specific constructive form of the even smooth special-shaped lens shown in Fig. 5,6 is the concave surface that caves inward in its plane of incidence 1 and exit facet 2 are.
The specific constructive form of the even smooth special-shaped lens shown in Fig. 7,8 is the concave surface of its plane of incidence 1 for caving inward, the convex surface of exit facet 2 for outwards arching upward.
consider because optical maser wavelength is different, adjust the angle of divergence and even light to the not equal factor of the requirement of the technical parameters such as refractive index of medium, the Combined even-lighting special-shaped lens of being made by same dielectric material or different medium material also is provided, be that above-mentioned even smooth special-shaped lens can be formed by different monomer lens combinations, the Combined even-lighting special-shaped lens that the present embodiment provides can by Fig. 9 to monomer lens shown in Figure 14 be first lens (have half cylindrical curved surface 8 and first plane 9 relative with this semi-cylinder curved surface 8 as the carrying mirror body of the plane of incidence 1 and Figure 15 to monomer lens shown in Figure 180 namely the second lens (having aspheric surface 10 and second plane 11 relative with this aspheric surface 10) as the carrying mirror body formation of exit facet 2, the mode that concrete constituted mode can adopt the first plane 9 that has each other also spacing relative to the second plane 11 to be no more than 50mm is relatively arranged together, the even smooth special-shaped lens that also can adopt Figure 19 namely to be formed by first lens and the second lens by bonding the first plane 9 and the second plane 11 formation to mode shown in Figure 22.
Above-described even smooth special-shaped lens is optical glass lens, and the Combined even-lighting special-shaped lens is combined by the optical glass lens of identical or different dielectric material.
The present embodiment also provides a kind of even ray laser light source 3 shown in Figure 23, comprise lens mount 7, be arranged on the laser socket 4 that is fixed for lasing semiconductor laser LD chip 5 of ends in lens mount 7, even smooth special-shaped lens 6 is arranged on the optical axis of semiconductor laser LD chip 5, spacing between the Laser output face 12 of its plane of incidence 1 and this semiconductor laser LD chip 5 is in 0～100mm scope, and the cylindricality diameter of the semi-cylinder curved surface of this plane of incidence 1 is in 0.005～10mm.
The horizontal divergence of the horizontal section for semiconductor laser LD chip 5 Output of laser light beams shown in Figure 25 is θ ∥, and the vertical divergence angle of vertical direction is primary light shape of spot and the angle of divergence of θ ⊥.
In conjunction with Figure 26, the electric vector expression formula of the basement membrane Gaussian beam of as seen propagating along the Z direction is as follows:
E(x,y,z)=A
0/W(z)exp[-(x
2+y
2)/w
2(z)]gexp{-ik?[z+?(x
2+y
2)/2R(z)?]+iφ(z)?}（1）
Wherein:
E-electric field intensity
A
0Amplitude during-z=0
The spot size that W (z)-z is ordered
The radius-of-curvature of R (z)-z point wave front
The phase place that φ (z)-z is ordered
A
0/ W (z) exp[-(x
2+ y
2)/w
2(z)]-amplitude part
Exp{-ik [z+ (x
2+ y
2)/2R (z)]+i φ (z) }-position phase part
Electric vector expression formula when z=0:
E(x,y)=A
0/W
0exp[-(x
2+y
2)/w
2 0]（2）
(2) figure of formula is seen Figure 34, can be found out by (2) formula: the 1) position relevant with x, y part disappearance mutually, and namely the plane of z=0 is cophasal surface, it is the same with the wave front of plane wave.2) amplitude is partly an exponential expression, and this exponential function claims this Gaussian distribution that is distributed as of amplitude usually Gaussian function.
Above content can be referring to: " application of laser in delicate metering " Ye Shenghua of University Of Tianjin chief editor China Machine Press first published.
Basically identical in the angle of divergence of cross section X-axis and Y direction in order to adjust laser beam, as shown in figure 25, by the even smooth special-shaped lens of even ray laser light source or the plane of incidence 1(semi-cylinder curved surface of Combined even-lighting special-shaped lens 6) dwindle Y-axis angle of divergence θ ⊥, or enlarge X-axis angle of divergence θ ∥.Wherein, the plane of incidence 1 of even smooth special-shaped lens or Combined even-lighting special-shaped lens 6 is that the cylindricality axis of semi-cylinder curved surface is vertical with the cross section Y-axis of Output of laser, to reach the purpose of dwindling Y-axis angle of divergence θ ⊥.Adjust laser beam divergence θ ∥ and θ ⊥, the perpendicular angle of divergence in horizontal divergence angle in the laser beam cross section of expection is substantially equal.
As seen from Figure 25, the present embodiment is by the cylindricality axis and vertical setting of Output of laser cross section Y-axis of the semi-cylinder curved surface of the plane of incidence 1 of even smooth special-shaped lens or Combined even-lighting special-shaped lens 6, the plane of incidence 1 semi-cylinder curved surface dwindles Y-axis angle of divergence θ ⊥, can obviously be seen by Figure 29,30, the edge laser light energy in the laser beam cross section after shaping increases.Make the Gaussian distribution curve of the semiconductor laser LD Output of laser shown in Figure 27,28, after shaping, its laser energy be Gaussian distribution curve as shown in Figure 29,30, can find out: 1) amplitude part is no longer therefrom mind-set landing smoothly outward, but a projection is arranged in the marginal portion.2) when aperture diaphragm is circle or symmetrical structure, the edge jut is also symmetrical.
as Figure 33, shown in Figure 34, above-mentioned even ray laser light source 3, in order to reach Output of laser in the uniform purpose of cross section light field light energy distribution, it is arranged at even smooth special-shaped lens on the Output of laser light path of semiconductor laser LD chip 5 or the exit facet 2 of Combined even-lighting special-shaped lens 6 is aspheric surface, adjust the Gaussian distribution curve of semiconductor laser LD Output of laser shown in Figure 27 and adjust angle of divergence θ ⊥ and form the edge-light energy, to reach Figure 31, even ray laser energy of light source scatter chart shown in 32 and even ray laser light source shown in Figure 33 cross section energy profile, and then the even all distributions of Output of laser cross section light field luminous energy of realization expection, can find out: it is protruding that 1) amplitude partly becomes approximate rectangular or middle recessed a little both sides.2) energy distribution is more even.
Simultaneously, the present embodiment also provides Figure 34 severally to expand and the collimated light path system for basic typical case take even ray laser light source 3 to shown in Figure 37.
Shown in Figure 34 is a kind of laser beam expanding light path system that contains even ray laser light source 3, comprises even ray laser light source 3, extender lens 13, expands compound lens 14, and wherein, extender lens 13 is arranged on the Laser output light path of even ray laser light source 3; Expand on the output light path that compound lens 14 is arranged at extender lens 13, extender lens 13 is sphere or non-spherical lens; Expand compound lens 14 and be sphere or aspheric balsaming lens or lens combination.
Shown in Figure 35 is the laser beam expanding light path system that contains even ray laser light source 3, comprises even ray laser light source 3, extender lens 13 and expands simple lens 15.Wherein: extender lens 13 is arranged on the Laser output light path of even ray laser light source 3; Expand on the output light path that simple lens 15 is arranged at extender lens 13.Extender lens 13 is sphere or non-spherical lens; Expand simple lens 15 and be aspheric surface or spherical lens.
Shown in Figure 36 is the laser alignment light path system that contains even ray laser light source 3, comprises even ray laser light source 3, converges combination or balsaming lens 16, converges combination or balsaming lens 16 and is arranged on the Laser output light path of even ray laser light source 3; Converge combination or balsaming lens 16 and be sphere or aspheric combination or balsaming lens.
Shown in Figure 37 is the laser alignment light path system that contains even ray laser light source 3, comprises even ray laser light source 3, money order lens 17, and money order lens 17 are arranged on the Laser output light path of even ray laser light source 3; Money order lens 17 are aspheric surface or aspheric simple lens.
Figure 38, shown in Figure 39 is that two kinds of providing of the present embodiment are take even ray laser light source 3 typically expanding and the collimation laser module as the basis.
Shown in Figure 38 is with the focusing type laser beam expanding module of even ray laser light source 3 as basic light source, is adjustable as the uniform light field of formed objects hot spot on different distance for Laser output.This focusing type laser beam expanding module mainly comprises and expands module casing 22, focusing wheel 23, sliding pin 21 and be arranged on even ray laser light source 3, the slide 20 and zoom extender lens 19, even optical alignment lens 18 that expands in module casing 22.This focusing type laser beam expanding module also includes the back-up systems such as driving circuit, power supply and operation control.Wherein: zoom extender lens 19 is arranged on the Laser output light path of even ray laser light source 3; Even optical alignment lens 18 are arranged at and specifically are arranged on the light hole place that expands in module casing 23 on the output light path of zoom extender lens 19.The zoom extender lens 19 here is sphere or non-spherical lens; Even optical alignment lens 18 are sphere or aspheric simple lens, balsaming lens or lens combination.
The principle of work of focusing type laser beam expanding module is mounted in the zoom extender lens 10 that is placed in the slide 20 that expands in module casing 22, by the sliding pin 21 of slide 20 outer setting, is meshed with the interior side guidance of the focusing wheel 23 of module casing 22 outer setting.Rotation is focused and is taken turns 23, and the zoom extender lenses 19 that drive in slides 20 and slide 20 by sliding pin 21 move back and forth along optical axis, with the position of change zoom extender lens 20, thereby makes Output of laser at the different operating even light field hot spot identical apart from maintenance.The driving of focusing wheel 23 is manual drives or motorized motions.
Shown in Figure 39 is with the laser alignment module of even ray laser light source 3 as basic light source, comprises collimation module casing 24 and is arranged at collimation module casing 24 interior even ray laser light source 3 and long focus collimation lens 25.This laser alignment module also includes the back-up systems such as driving circuit, power supply and operation control.Wherein, long focus collimation lens 25 are arranged on the Laser output light path of even ray laser light source 3.Generally, even ray laser light source 3 is arranged at an end of collimation module casing 25, and long focus collimation lens 25 are relatively arranged on the other end (being the light hole place) of collimation module casing 24, and its spacing distance depends on the focal length of long focus collimation lens 25.With the laser alignment module of even ray laser light source 3 as basic light source, can export the reasonable circular light spot of light shape by general collimation lens, or be formed on the basically identical circular light spot of certain distance scope inner diameter size by long focus collimation lens 25.The long focus collimation lens 25 here are sphere or aspheric simple lens, balsaming lens or lens combination.
Simultaneously, the present embodiment also provides Figure 36, Figure 37, Figure 38, Figure 39, shown in Figure 40 several take the even ray laser light source 3 typical light path system as the application example on basis.
Shown in Figure 40 be with even ray laser light source 3 as the reflective linear beam light path system of the axicon lens of basic light source, comprise even ray laser light source 3, collimation lens 26 and conical reflector 27.Wherein, collimation lens 26 is arranged on the Laser output light path of even ray laser light source 3; Conical reflector 27 is arranged on the output light path of collimation lens 26.The Output of laser of even ray laser light source 3 forms collimation laser by collimation lens 26, through conical reflector 27 reflections, forms the linear beam of 360 ° vertical with optical axis.Here the collimation lens 26 that relates to is sphere or aspheric simple lens, balsaming lens or lens combination.
Be with the pentaprism light path system of even ray laser light source 3 as basic light source shown in Figure 41,42, comprise even ray laser light source 3, collimation lens 26 and reflective pentaprism 28 or Transflective pentaprism 29.Wherein, collimation lens 26 is arranged on the Laser output light path of even ray laser light source 3.As shown in figure 41, reflective pentaprism 28 is arranged on the output light path of collimation lens 26.The Output of laser of even ray laser light source 3 forms collimation laser by collimation lens 26, through reflective pentaprism 28, collimation laser is changed 90 ° of direction outputs.In Figure 42, Transflective pentaprism 29 is arranged on the output light path of collimation lens 26 equally.The Output of laser of even ray laser light source 3 forms collimation laser by collimation lens 26, through Transflective pentaprism 29, a part of collimation laser is exported along the output optical axis transmission, and a part of collimation laser changes 90 ° of directions outputs.
Here the collimation lens 26 that relates to is sphere or aspheric simple lens, balsaming lens or lens combination.Reflective five rib lens 28 are the monomer pentaprism; Transflective five rib lens 29 are gummed five rib lens.
Shown in Figure 43 is with the conduction-type focused light passages system of even ray laser light source 3 as basic light source, comprises that even ray laser light source 3, collimation lens 26 and light beam conductive medium 30(are actual here to be optical fiber).Wherein, collimation lens 26 is arranged on the Laser output light path of even ray laser light source 3; Light beam conductive medium 30 is arranged on the output light path of collimation lens 26.The Output of laser of even ray laser light source 3 after forming collimation laser focusing by collimation lens 26, enters light beam conductive medium 30 and carries out conduct far (as optical fiber) or the application of other zooms.The collimation lens 26 that relates in this light path system also is sphere or aspheric simple lens, balsaming lens or lens combination.Light beam conductive medium 30 can be the light beam transmitters such as optical fiber, GRIN Lens.
Shown in Figure 44 is with the high-velocity scanning galvanometer light path system of even ray laser light source 3 as basic light source, comprises even ray laser light source 3, collimation lens 26 and galvanometer 31.Wherein, collimation lens 26 is arranged on the Laser output light path of even ray laser light source 3; Galvanometer 31 is arranged on the output light path of collimation lens 26.The Output of laser of even ray laser light source 3 forms collimation laser by collimation lens 26, is applicable to laser scanning through galvanometer 31.The collimation lens 26 that relates in this light path system is sphere or aspheric simple lens, balsaming lens or lens combination; Galvanometer 31 is for being applicable to the galvanometer of high-velocity scanning.
In sum, the special-shaped lens that is applicable to semiconductor laser or special-shaped compound lens that the present embodiment provides are simple in structure, be easy to make, use-pattern is flexible and varied, can be applied in multiple light path system, overcome the luminous energy loss that common spherical lens can't be adjusted laser beam divergence, and design by special aspheric surface for different wave length, not only be conducive to eliminate aberration, and the light energy distribution homogenising can be processed.Can be used as the basic light source of semiconductor laser with the even ray laser light source of special-shaped lens or special-shaped compound lens and semiconductor laser encapsulation, be applicable to the collimation of classes of semiconductors laser, the application that expands, modulates light path system, also be applicable to the application of each domain-specific laser devices such as laser designation, sign, detection, measurement, illumination, medical treatment, scanning.
More than exemplifying is only to illustrate of the present invention, does not consist of the restriction to protection scope of the present invention, within the every and same or analogous design of the present invention all belongs to protection scope of the present invention.
Claims (17)
1. even smooth special-shaped lens that is used for the semiconductor laser beam shaping comprises having the exit facet that the plane of incidence that the described laser of the reception that is oppositely arranged injects and this laser penetrate, and it is characterized in that: the described plane of incidence is the semi-cylinder curved surface, and exit facet is aspheric surface; And this aspheric bus two ends distance is greater than the two ends distance of described semi-cylinder surface bus, all incides on described exit facet through the laser that the described plane of incidence is injected guaranteeing.
2. even smooth special-shaped lens as claimed in claim 1, is characterized in that: the convex surface of the described plane of incidence for outwards arching upward, the concave surface that described exit facet caves inward in being.
3. even smooth special-shaped lens as claimed in claim 1, is characterized in that: the convex surface of the described plane of incidence for outwards arching upward, the convex surface of described exit facet for outwards arching upward.
4. even smooth special-shaped lens as claimed in claim 1, it is characterized in that: the described plane of incidence is the concave surface that caves inward, described exit facet is the concave surface of sunken inside.
5. even smooth special-shaped lens as claimed in claim 1, it is characterized in that: the described plane of incidence is the concave surface that caves inward, the convex surface of described exit facet for outwards arching upward.
6. even smooth special-shaped lens as claimed in claim 1, it is characterized in that: formed by first lens and the second lens combination, this first lens has semi-cylinder curved surface and first plane relative with this semi-cylinder curved surface; These second lens have aspheric surface and second plane relative with this aspheric surface, and this first plane and the second plane are oppositely arranged, and this semi-cylinder curved surface and this aspheric surface consist of respectively the described plane of incidence and exit facet.
7. even smooth special-shaped lens as claimed in claim 6, it is characterized in that: described first lens comprises respectively a relative plane with the second lens.
8. even smooth special-shaped lens as claimed in claim 7, it is characterized in that: described relative plane adheres to each other or spacing is no more than 50mm.
9. even ray laser light source that contains the described even smooth special-shaped lens of arbitrary claim in claim 1 to 8, comprise lens mount, be arranged on the laser socket that is fixed for lasing semiconductor laser LD chip of an end in lens mount, it is characterized in that: described even smooth special-shaped lens is arranged on the optical axis of described semiconductor laser LD chip, spacing between the Laser output face of its plane of incidence and this semiconductor laser LD chip is in 0～100mm scope, the cylindricality diameter of the semi-cylinder curved surface of this plane of incidence is in 0.005～10mm, the axis of the plane of incidence is vertical with horizontal section or the vertical cross-section of the shoot laser of described semiconductor laser LD chip.
10. a laser beam expanding light path system that contains even ray laser light source claimed in claim 9, comprise the extender lens or the extender lens group that are placed between LASER Light Source and lens or lens combination, it is characterized in that: described LASER Light Source is described even ray laser light source; Described extender lens is sphere or aspheric surface extender lens; Described extender lens group is sphere or aspheric surface extender lens group.
11. laser alignment light path system that contains even ray laser light source claimed in claim 9, comprise LASER Light Source and be arranged on collimation lens or collimation lens set on the emitting light path of this LASER Light Source, it is characterized in that: described LASER Light Source is described even ray laser light source, and described collimation lens is sphere or aspheric collimation lens; Described collimation lens set is sphere or aspheric collimation lens group.
12. focusing type laser beam expanding module that contains even ray laser light source claimed in claim 9, comprise and expand module casing, be arranged on the LASER Light Source that expands in module casing, slide and zoom extender lens, even optical alignment lens, LASER Light Source is arranged on slide, even optical alignment lens are arranged on the light hole place that expands module casing, the zoom extender lens is arranged between LASER Light Source and even optical alignment lens, this side that expands module casing is provided with the focusing wheel, this focusing wheel meshes by gear by being arranged on slide outer sliding pin and this slide, it is characterized in that: described LASER Light Source is even ray laser light source, described zoom extender lens is sphere or non-spherical lens, described even optical alignment lens are sphere or aspheric simple lens, balsaming lens or lens combination.
13. laser alignment module that contains even ray laser light source claimed in claim 9, comprise the collimation module casing, be arranged at the long focus collimation lens on the emitting light path that collimates the LASER Light Source in module casing and be arranged on this LASER Light Source, it is characterized in that: described LASER Light Source is described even ray laser light source; Described long focus collimation lens are sphere or aspheric simple lens, balsaming lens or lens combination.
14. reflective linear beam light path system of axicon lens that contains even ray laser light source claimed in claim 9, comprise LASER Light Source, be successively set on collimating optics components and parts and conical reflector on the emitting light path of this LASER Light Source, it is characterized in that: described LASER Light Source is described even ray laser light source; Described collimating optics components and parts are sphere or aspheric simple lens, balsaming lens or lens combination.
15. pentaprism light path system that contains even ray laser light source claimed in claim 9, comprise LASER Light Source, be successively set on collimating optics components and parts and pentaprism on the emitting light path of this LASER Light Source, it is characterized in that: described LASER Light Source is described even ray laser light source, and described collimating optics components and parts are sphere or aspheric simple lens, balsaming lens or lens combination; Described pentaprism is reflective or the Transflective pentaprism, and these reflective five rib lens are the monomer pentaprism, and Transflective five rib lens are gummed five rib lens.
16. conduction-type focused light passages system that contains even ray laser light source claimed in claim 9, comprise LASER Light Source, be successively set on collimating optics components and parts and light beam conductive medium on the emitting light path of this LASER Light Source, it is characterized in that: described LASER Light Source is even ray laser light source; Described collimating optics components and parts are sphere or aspheric simple lens, balsaming lens or lens combination; Described light beam conductive medium is optical fiber or GRIN Lens.
17. high-velocity scanning galvanometer light path system that contains even ray laser light source claimed in claim 9, comprise LASER Light Source, be successively set on collimating optics components and parts and galvanometer on the emitting light path of this LASER Light Source, it is characterized in that: described LASER Light Source is even ray laser light source; Described collimating optics components and parts are sphere or aspheric simple lens, balsaming lens or lens combination.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100586649A CN103176226A (en) | 2012-11-03 | 2013-02-26 | Dodging special-shaped lens used for shaping semiconductor laser leams, dodging laser source and optical system |
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|---|---|---|---|
| CN201210432861.8 | 2012-11-03 | ||
| CN201210432861 | 2012-11-03 | ||
| CN2013100586649A CN103176226A (en) | 2012-11-03 | 2013-02-26 | Dodging special-shaped lens used for shaping semiconductor laser leams, dodging laser source and optical system |
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| CN103176226A true CN103176226A (en) | 2013-06-26 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN2013100586649A Pending CN103176226A (en) | 2012-11-03 | 2013-02-26 | Dodging special-shaped lens used for shaping semiconductor laser leams, dodging laser source and optical system |
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Application publication date: 20130626 |