CN103162722A - Microfiber Fabry-Perot microcavity sensor and manufacturing method - Google Patents
Microfiber Fabry-Perot microcavity sensor and manufacturing method Download PDFInfo
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Abstract
The invention provides a microfiber Fabry-Perot (F-P) microcavity sensor with high sensitivity, convenience in manufacturing, integrated miniature, low cost and high applicability and a manufacturing method thereof. A section of microfiber is fused in the middle of a single mode fiber according to the specific geometric direction and used as a supporting arm, and two parallel fiber end faces supported by the microfiber form an open ring cavity of which the end face fiber core is completely naked and the cross section is eccentric, namely an F-P microcavity. The diameter d of the microfiber serving as the supporting arm satisfies the condition that d is smaller than the difference between b and a, wherein a and b are the fiber core radius and the cladding radius of the single mode fiber respectively. The microfiber F-P microcavity sensor has smooth surface and high mechanical strength; the microcavity is open, so the sensor is easily in real-time contact with the surrounding environment, is very sensitive to the refractive index (or concentration) and the axial load (stress or strain), and is not sensitive to the temperature; and the sensor can be applied in the fields of environmental monitoring, biochemical detection, structural health monitoring and the like, and can also be applied in the field of fiber communication such as high-precision tuning filtration.
Description
Technical field
The invention belongs to field of sensing technologies, be specifically related to a kind of Fabry-perot optical fiber (F-P) microcavity sensors and method for making of making based on the micro optical fiber welding.
Background introduction
Along with the fast development in the fields such as environment, the energy, biology, medical science, science and techniques of defence, people to microminiaturization, the lightweight of sensor, restrain oneself rugged surroundings pursuit power pure, researching and developing novel microsensor is the hot topic of present sensory field.Have anti-electromagnetic interference (EMI), corrosion-resistant, easily Fibre Optical Sensor multiplexing, highly sensitive, the advantage such as measurement range is large is developed rapidly.
Optical fibre Fabry-perot (F-P) interferometer is a kind of important FIBER OPTIC SENSORS spare, and light beam is interfered from F-P two, chamber end face reflection formation, and its interference spectum is the function of refractive index in chamber length and chamber.During variations in refractive index, its interference spectum can produce movement because of the change of phase place in extraneous factor causes long or chamber, chamber.By surveying the phase shifts of interference signal, can demodulate the numerical value of environment parameter (causing the extraneous factor of phase change) and the careful information of character thereof.The measurement of concentration, refractive index is used very extensive for chemistry, the field such as biological and medical, the character of many materials can be determined by measuring its refractive index.Stress, strain, displacement, crooked isoparametric detection have very important significance at the monitoring structural health conditions of the heavy constructions such as high building, bridge, tunnel, dam and early warning field.
At present, the method for making fiber F-P interferometer is mainly as follows:
1, end face coating method: one section optical fiber is welded on two the middle F-P of formation chambeies that are coated with highly reflecting films optical fiber;
2, grating coelosis method: write two identical Fiber Bragg Gratings and form the F-P chamber in optical fiber;
3, bubble coelosis method: utilize chemical etching and welding combined technology, form air bubble and form the F-P chamber in optical fiber;
4, femtosecond etching method: utilize femto-second laser pulse to form F-P chamber etc. at optical fiber surface or inner etching cavity;
5, hollow optic fibre method: hollow optic fibre or microstructured optical fibers (comprising photonic crystal fiber) are formed the F-P chamber with the conventional fiber welding.
For above-mentioned method for making, because manufacturing system and technology require very highly, cause fiber F-P interferometer cost of manufacture higher, F-P chamber quality is subject to the impact of process technology, and the fiber F-P interferometer is very limited in engineering is used.
Summary of the invention
The invention provides a kind of high sensitivity, simple for production, integrated micro, the micro optical fiber F-P microcavity sensors that with low cost, applicability is strong and preparation method thereof, we are referred to as the micro optical fiber method; The fiber F-P microcavity sensors of making based on the micro optical fiber welding is referred to as micro optical fiber F-P microcavity sensors.
The feature of micro optical fiber F-P microcavity sensors is: by one section micro optical fiber is fused in the middle of single-mode fiber as sway brace according to the particular geometric orientation, it be the open annulus F-P microcavity of bias that two parallel fiber end faces that micro optical fiber supports form the fully exposed and xsect of an end face fibre core.Micro optical fiber diameter d as sway brace satisfies d＜b-a, and wherein a, b are respectively fiber core radius and the cladding radius of single-mode fiber.
The method for making of micro optical fiber F-P microcavity sensors is as follows: 1) general single mode fiber is drawn taper to become to set the micro optical fiber of diameter d; 2) micro optical fiber end face and the single-mode fiber that cuts off carried out welding according to the geometrical orientation of setting; 3) under the precision micro-displacement device is controlled, the micro optical fiber of welding is pressed set the long L in chamber along its axial vertical direction cut-out; 4) the micro optical fiber end face that cuts off is carried out welding with single-mode fiber by setting the orientation again, thereby form micro optical fiber F-P sensor.The requirement of manufacturing process: the one, step 2), welding bonding mode fiber end face 4) is indeformable; The 2nd, step 2) welding guarantee micro optical fiber and the single-mode fiber fibre core not overlapping.
Technique effect of the present invention is: micro optical fiber F-P microcavity sensors is except having high sensitivity, simple for production, integrated micro, the advantage such as with low cost, applicability is strong, the more important thing is refractive index (or concentration), the very responsive and extremely low temperature control of axial load (stress or strain).In 1.332-1.383 refractive index and the 0-0.23N range of stress, this sensor has good linear sensing characteristic, and refractive index and strain sensitivity reach respectively 1184.68nm/RIU and 38.5nm/N.Simultaneously, in 20-80 ℃ of temperature range, wavelength temperature-responsive corresponding to this sensor interferometer peak is less than 0.2nm.
Description of drawings
Fig. 1 is the fiber F-P microcavity sensors object construction figure of the long 173 μ m in chamber.Wherein, Fig. 1 (a) is sensor side view and vertical view, and Fig. 1 (b) is the geometrical orientation figure of micro optical fiber and single-mode fiber welding;
Fig. 2 is the interference spectum that micro optical fiber F-P microcavity sensors shown in Figure 1 is measured in air and different refractivity liquation;
Fig. 3 is the micro optical fiber F-P microcavity sensors response of refractive index family curve of the long 173 μ m in chamber;
Fig. 4 is the micro optical fiber F-P microcavity sensors axial stress resonse characteristic of the long 173 μ m in chamber;
Fig. 5 is the micro optical fiber F-P microcavity sensors temperature response characteristics curve of the long 173 μ m in chamber.
Below in conjunction with accompanying drawing, the specific embodiment of the present invention is described further:
This micro optical fiber F-P microcavity sensors is namely one section micro optical fiber 1-3 of welding on ordinary optic fibre 1-1, is eccentric open annulus F-P microcavity (interference cavity) 1-2 thereby form the fully exposed and xsect of an end face fibre core.Micro optical fiber diameter d as the microcavity sway brace satisfies d＜b-a, and wherein a, b are respectively fiber core radius and the cladding radius of single-mode fiber.
The feature of micro optical fiber F-P microcavity sensors is: by one section micro optical fiber is fused in the middle of single-mode fiber as sway brace according to the particular geometric orientation, it be the open annulus F-P microcavity of bias that two parallel fiber end faces that micro optical fiber supports form the fully exposed and xsect of an end face fibre core.Micro optical fiber diameter d as sway brace satisfies d＜b-a, and wherein a, b are respectively fiber core radius and the cladding radius of single-mode fiber.
The making step of micro optical fiber F-P microcavity sensors: 1) general single mode fiber is drawn taper become to set the micro optical fiber of diameter d; 2) micro optical fiber end face and the single-mode fiber that cuts off carried out welding according to the geometrical orientation of setting; 3) under the precision micro-displacement device is controlled, the micro optical fiber of welding is pressed set the long L in chamber along its axial vertical direction cut-out; 4) the micro optical fiber end face that cuts off is carried out welding with single-mode fiber by setting the orientation again, thereby form micro optical fiber F-P microcavity sensors.
When utilizing the oxyhydrogen flame heating to draw micro optical fiber, the employing flame mode of sweeping again makes the micro optical fiber homogeneous heating, and the flame slew rate is controlled between 1000-2000 μ m/s.Optical fiber draws the cone motor speed to be controlled between 150-200 μ m/s, can be according to the corresponding parameter of flame situation regulation and control.For the cutting of optical fiber and micro optical fiber, need make end face with axially vertical, to guarantee the smooth of fiber end face.In the fused fiber splice process, need to guarantee that the fibre core of micro optical fiber and single-mode fiber is not overlapping; Single-core fiber heat sealing machine (Furukawa S178A) strength of discharge parameter is controlled between 50～70, discharge period is controlled between 150-500ms, and can adjust according to the micro optical fiber diameter (as little in diameter, discharge capacity is also little, and is indeformable with bonding mode fiber end face).
Utilize method for making of the present invention, can make at general single mode fiber (as healthy and free from worry SMF-28), doubly clad optical fiber, polarization maintaining optical fibre, multimode optical fiber, hollow optic fibre, photonic crystal fiber, microstructured optical fibers etc. the micro optical fiber F-P microcavity sensors of Different structural parameters, its chamber length can be controlled between 10-900 μ m, and sway brace micro optical fiber diameter can regulate and control between 10～57 μ m.This micro optical fiber F-P microcavity sensors structural design is flexible, manufacture craft is easy, device surface is smooth, physical strength is large, cost of manufacture is cheap, and is applied widely, and refractive index and axial stress are extremely sensitive to external world, can be used for the fields such as environmental monitoring, biochemistry detection and monitoring structural health conditions, also can be used for the fiber optic communication fields such as hair-breadth tuning filtering.
Fig. 1 (a) is depicted as at the upper micro optical fiber F-P microcavity sensors structural drawing of making of general single mode fiber (healthy and free from worry SMF-28e), and its interference cavity length is 173 μ m, and sway brace fento diameter is 55 μ m.As seen from the figure, consisted of the interference cavity of F-P microcavity sensors perpendicular to two fiber end faces of shaft axis of optic fibre direction.
Fig. 1 (a) is side view and the vertical view at the upper micro optical fiber F-P microcavity sensors of making of general single mode fiber (healthy and free from worry SMF-28e), its interference cavity length L=173 μ m, sway brace micro optical fiber diameter d=55 μ m have consisted of the little interference cavity of F-P by two end faces perpendicular to the shaft axis of optic fibre direction; Fig. 1 (b) is the geometrical orientation figure of micro optical fiber and single-mode fiber welding.When light beam transmits in optical fiber along fibre core, can be interfered when satisfying phase matching by the light beam of two end face reflections, Fig. 2 is the typical interference spectum that micro optical fiber F-P microcavity sensors shown in Figure 1 is measured in air and different refractivity liquation.
Fig. 3 is the micro optical fiber F-P microcavity sensors response of refractive index family curve of the long 173 μ m in chamber.The glycerite of variable concentrations is dropped on this micro optical fiber F-P microcavity, whole microcavity is immersed among solution, this interference spectum raises (perhaps glycerol concentration increase) with the glycerine refractive index, and the wavelength that its interference peak is corresponding drifts about to the long wave direction.Measure by spectrometer, obtain the interference peaks wavelength shift of micro optical fiber F-P microcavity sensors and the relation curve between the sample refractive index.As seen from Figure 3, in the 1.332-1.383 ranges of indices of refraction, this sensor has good linear relationship between the interference spectum drift value of 1400-1600nm wave band and refractive index, and its Linear Quasi is right greater than 0.999.For the interference peak at 1598nm place, its wavelength shift reaches 60.4nm, and the corresponding corresponding sensitivity of refractive index is 1184.7nm/RIU (refractive index unit).
Fig. 4 is the micro optical fiber F-P microcavity sensors axial stress resonse characteristic of the long 173 μ m in chamber.One end tail optical fiber of micro optical fiber F-P microcavity sensors is fixed, and the other end is loading stress vertically, and the stressed zone calibration is 0.0098N, and wavelength corresponding to this micro optical fiber F-P microcavity interference peaks drifts about to the long wave direction with the increase of axial stress.Measure by spectrometer, obtain the wavelength shift of micro optical fiber F-P microcavity sensors and apply relation curve between axial stress.As seen from Figure 4, in 0.05-0.23N axial stress scope, this sensor has good linear relationship between the interference peaks wavelength shift of 1400-1600nm wave band and axial stress, and its Linear Quasi is right greater than 0.999.For the interference peaks at 1589 places, its wavelength shift reaches 6.7nm, and the corresponding corresponding sensitivity of axial stress is 38.5nm/N.
Fig. 5 is the micro optical fiber F-P microcavity sensors temperature response characteristics curve of the long 173 μ m in chamber.Micro optical fiber F-P microcavity sensors is placed in the thermostatic control casing, and the temperature by in the regulation and control casing obtains its temperature response characteristics curve.As seen from Figure 5, in 20-80 ℃ of temperature range, wavelength temperature-responsive corresponding to this sensor interferometer peak has the temperature-insensitive characteristic less than 0.2nm.
Although in conjunction with thinking that at present most realistic and best embodiment has described the present invention, the invention is not restricted to the disclosed embodiments, and be intended to cover multiple modification included within the spirit and scope of claims and equivalence setting.
Application prospect: according to the micro optical fiber F-P microcavity sensors that the present invention makes, have microminiaturization, cost low, can be applicable to the advantages such as rugged surroundings, sensitivity height.In addition, the opening optical fiber microcavity that adopts fusion technology to make, its smooth surface, physical strength is large, and be easy to and the surrounding environment real-time contact, can be used for the sensory field such as environmental monitoring, biochemistry detection based on refractive index sensing, and based on the fields such as monitoring structural health conditions of stress sensing.In addition, because micro optical fiber F-P microcavity sensors interference fringe contrast is large, refractive index, stress response are very sensitive, therefore also can be used for the fiber optic communication fields such as hair-breadth tuning filtering.
Claims (7)
1. micro optical fiber F-P microcavity sensors, it is characterized in that: by one section micro optical fiber is fused in the middle of single-mode fiber as sway brace according to the particular geometric orientation, it be the open annulus F-P microcavity of bias that two parallel fiber end faces that micro optical fiber supports form the fully exposed and xsect of an end face fibre core.Micro optical fiber diameter d as sway brace satisfies d＜b-a, and wherein a, b are respectively fiber core radius and the cladding radius of single-mode fiber.
2. micro optical fiber F-P microcavity sensors according to claim 1, its method for making is: the method for making of micro optical fiber F-P microcavity sensors is as follows: 1) general single mode fiber is drawn taper to become to set the micro optical fiber of diameter d; 2) micro optical fiber end face and the single-mode fiber that cuts off carried out welding according to the geometrical orientation of setting; 3) under the precision micro-displacement device is controlled, the micro optical fiber of welding is pressed set the long L in chamber along its axial vertical direction cut-out; 4) the micro optical fiber end face that cuts off is carried out welding with single-mode fiber by setting the orientation again, thereby form micro optical fiber F-P sensor.The requirement of manufacturing process: the one, step 2), welding bonding mode fiber end face 4) is indeformable; The 2nd, step 2) welding guarantee micro optical fiber and the single-mode fiber fibre core not overlapping.
3. micro optical fiber F-P microcavity sensors according to claim 1, it is characterized in that: micro optical fiber used is to adopt the oxyhydrogen flame heating to melt the pull technology made; Optical fiber cutter is used in the cutting of micro optical fiber, and micro optical fiber and single-mode fiber welding are used the single-core fiber heat sealing machine to carry out arc discharge and completed.
4. micro optical fiber F-P microcavity sensors according to claim 1, it is characterized in that: be used for to make the optical fiber of F-P microcavity and as the micro optical fiber of microcavity sway brace, they can be respectively standard single-mode fiber, perhaps doubly clad optical fiber, polarization maintaining optical fibre, multimode optical fiber, hollow optic fibre, photonic crystal fiber, microstructured optical fibers.
5. micro optical fiber F-P microcavity sensors according to claim 1, it is characterized in that: the micro optical fiber diameter d of using is between 10～57 μ m, length L is between 10～900 μ m, and the microcavity that micro optical fiber supports is that the fully exposed and xsect of end face fibre core is eccentric open annulus F-P microcavity.
6. micro optical fiber F-P microcavity sensors according to claim 1, when being used for refractive index and stress sensing, it is characterized in that: when the sample refractive index in microcavity increased, its interference fringe peak was linearity and drifts about to long wave; When the axial stress on acting on sensor became large, its interference fringe peak also was linear and drifts about to long wave.
7. micro optical fiber F-P microcavity sensors according to claim 1, it is characterized in that: in 20 ℃～80 ℃ temperature ranges, the wavelength temperature-responsive of this sensor interferometer peak value has the temperature-insensitive characteristic less than 0.2nm.
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| CN103557960A (en) * | 2013-11-06 | 2014-02-05 | 重庆科技学院 | Fabry-Perot fiber-optic temperature sensing system and method |
| CN103956640A (en) * | 2014-05-20 | 2014-07-30 | 天津理工大学 | Wavelength switchable fiber laser based on graphene and core shift structure |
| CN106017343A (en) * | 2016-06-06 | 2016-10-12 | 南京工程学院 | Optical fiber bending sensor having air gap and bending measurement method |
| CN106249353A (en) * | 2016-07-27 | 2016-12-21 | 北京航空航天大学 | A kind of high intensity hollow-core photonic crystal fiber welding process |
| CN106643908A (en) * | 2017-01-16 | 2017-05-10 | 深圳大学 | Method for preparing temperature-pressure sensor, temperature-pressure sensor structure and temperature-pressure measuring system and method |
| CN106643830A (en) * | 2016-09-30 | 2017-05-10 | 电子科技大学 | Optical fiber micro-bubble Fabry-Perot sensor and sensing method thereof |
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| CN103557960A (en) * | 2013-11-06 | 2014-02-05 | 重庆科技学院 | Fabry-Perot fiber-optic temperature sensing system and method |
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| CN106643830B (en) * | 2016-09-30 | 2019-05-10 | 电子科技大学 | Optical fiber microvesicle Fabry-Perot sensor and its method for sensing |
| CN106643908A (en) * | 2017-01-16 | 2017-05-10 | 深圳大学 | Method for preparing temperature-pressure sensor, temperature-pressure sensor structure and temperature-pressure measuring system and method |
| CN107505065A (en) * | 2017-08-11 | 2017-12-22 | 暨南大学 | High-order mode F P interfere the preparation method and device of pyrometric probe sensor |
| CN108332654A (en) * | 2018-01-25 | 2018-07-27 | 东北大学 | A kind of chamber grows controllable mini optical fibre Fabry-platinum Luo Gan's interferometer production method |
| CN109060203A (en) * | 2018-08-06 | 2018-12-21 | 上海大学 | Intrinsical Fabry-Perot pull sensing device and its manufacturing method based on Modulation Based on Optical Fiber Fused Taper |
| CN109596243A (en) * | 2018-11-06 | 2019-04-09 | 天津大学 | Sapphire fiber Fabry-Perot sensor and preparation method thereof based on femtosecond laser etching |
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