CN103041978A - Focusing ultrasonic transducer and producing method thereof - Google Patents
Focusing ultrasonic transducer and producing method thereof Download PDFInfo
- Publication number
- CN103041978A CN103041978A CN2013100252332A CN201310025233A CN103041978A CN 103041978 A CN103041978 A CN 103041978A CN 2013100252332 A CN2013100252332 A CN 2013100252332A CN 201310025233 A CN201310025233 A CN 201310025233A CN 103041978 A CN103041978 A CN 103041978A
- Authority
- CN
- China
- Prior art keywords
- ultrasonic transducer
- focus type
- piezoelectric
- layer
- type ultrasonic
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Images
Abstract
The invention discloses a focusing ultrasonic transducer which sequentially comprises a matching layer, a piezoelectric vibrator layer and a backing block. The piezoelectric vibrator layer is made of a piezoelectric single crystal/polymer 1-3 composite material; the piezoelectric single crystal is lead magnesium niobate-lead titanate with a chemical composition of (1-x) Pb (mg1/3Nb2/3) O3-xPbTiO3, the crystallographic direction is the (001) direction; or a lead indium niobate-lead magnesium niobate-lead titanate with a chemical composition of xPb (In1/2Nb1/2) O3-yPb (Mg1/3Nb2/3) O3- (1-x-y) PbTiO3, the crystallographic direction is the (001) direction; wherein 0<x<1, 0<y<1, and 0<x+y<1. The focusing ultrasonic transducer is simple in structure, convenient to prepare and low in manufacturing cost, can obtain high sensitivity, bandwidth and resolution ratio, and has a broad application prospect in the technical fields of medical ultrasonic imaging and industrial nondestructive testing.
Description
Technical field
The present invention relates to a kind of focus type ultrasonic transducer and preparation method thereof.
Background technology
Ultrasonic transducer is the key components of ultrasonic imaging and ultrasonic testing system, is realizing the conversion between electric energy and the acoustic energy (mechanical energy), often ultrasonic transducer is called probe in the medical science.Piezoelectric is the inverting element of ultrasonic transducer, and is most important to the performance of the performance of ultrasonic transducer and even whole ultrasonic image-forming system.In the past few decades, ultrasonic transducer has had many improvement and raising in structural design, but on transductive material, adopt the PZT series piezoelectric ceramics more all the time, this is because PZT pottery piezoelectric property preferably on the one hand, is on the other hand to be easy to the large-scale production supply because the PZT Production of Ceramics is with low cost.But, along with constantly advancing of modern information technologies and medical skill, ultrasonic transducer is had higher requirement, obtain the imaging data of fine definition in the urgent need to high sensitivity, high bandwidth and high-resolution ultrasonic transducer, for medical diagnosis and industrial lossless detection provide more horn of plenty testing result accurately of content.(chemical composition is as (1-x) Pb (Mg take PMN-PT
1/3Nb
2/3) O
3-xPbTiO
3, referred to as PMNT) and piezoelectric monocrystal is that the high-performance piezoelectric of representative has very excellent piezoelectricity and mechanical-electric coupling performance, d near accurate homotype phase boundary
33, d
312000pC/N, k
33, k
3190%, these performances all are higher than piezoceramic material commonly used far away.The domestic people such as Luo Hao Sue have adopted improved Bridgman method successfully to realize the batch production (China Patent No. ZL99113472.9) of high-quality large scale PMNT monocrystalline, for the novel piezoelectric monocrystalline provides the assurance on the material in the application on the ultrasonic transducer.
The focus type ultrasonic transducer can obtain higher bandwidth and resolution ratio, and the resolution ratio that improves transducer can the Effective Raise image quality.Traditional ultrasonic transducer adopts the PZT pottery as piezoelectric, and the PZT pottery can obtain the focus type piezoelectric vibrator by static pressure method, injection molding, polishing etc., thereby for the preparation of the focus type ultrasonic transducer.And the novel piezoelectric monocrystal material is (such as PMNT, the PIMNT monocrystalline) easily embrittlement on the structure, the plane piezoelectric vibrator that cuts out can't obtain the focus type piezoelectric vibrator by simply applying external force, show anisotropy on the performance of crystalline material in addition, by grinding the monocrystalline piezoelectric oscillator that can obtain focus type, but radiating surface departs from the crystal face of piezoelectric property optimum, the performance of piezoelectric vibrator is inevitable to be reduced greatly, therefore, the application of novel piezoelectric monocrystalline on the focus type ultrasonic transducer is also relatively more difficult, needs a kind of new designing and making method to realize.
Summary of the invention
The sensitivity, bandwidth and the resolution ratio that the present invention is directed to ultrasonic transducer in the prior art are not high enough, and the imaging data of fine definition can not be provided, and the spy provides a kind of focus type ultrasonic transducer.
Focus type ultrasonic transducer of the present invention includes matching layer, piezoelectric vibrator layer and backing piece successively, and the material of described piezoelectric vibrator layer is piezoelectric monocrystal/polymer 1-3 composite; The piezoelectric monocrystal of described piezoelectric monocrystal/polymer 1-3 composite is PMN-PT, and its chemical composition is (1-x) Pb (Mg
1/3Nb
2/3) O
3-xPbTiO
3, the PMN-PT crystallographic direction is＜001〉direction; Or lead niobate lead indate-lead-PMN-PT, its chemical composition is xPb (In
1/2Nb
1/2) O
3-yPb (Mg
1/3Nb
2/3) O
3-(1-x-y) PbTiO
3, lead niobate lead indate-lead-PMN-PT crystallographic direction is＜001〉direction; Wherein, 0 ﹤ x ﹤, 1,0 ﹤ y ﹤ 1, and 0 ﹤ x+y ﹤ 1; Preferably, 0.2≤x≤0.4,0.2≤y≤0.4.
Preferably, adopt the cutting completion method to prepare piezoelectric monocrystal/polymer 1-3 composite, the volume ratio of piezoelectric monocrystal is between 0.2 ~ 0.8 scope in the composite.
Preferably, described piezoelectric monocrystal/polymer 1-3 composite is piezoelectric monocrystal/epoxy resin or piezoelectric monocrystal/epoxy resin 1-3 composite.
Described matching layer comprises outer matching layer and interior matching layer; Described interior matching layer adopts polymer such as epoxy resin recently to allocate according to different fillings with filler (such as tungsten powder, zirconia ceramics powder etc.) and makes; Described outer matching layer adopts the lower epoxy resin cure of acoustic impedance to make.
The face that contacts with described piezoelectric vibrator layer on the described backing piece is cylindrical curved surface; Described backing piece adopts the composite of the high acoustic attenuation of acoustic impedance, as insert the tungsten powder preparation of high packing ratio in epoxy resin, for improving acoustic attenuation coefficient, suitably increases the flexibility of base-material, namely carries out modification, realizes by the method that adds polysulfide rubber.
Described focus type ultrasonic transducer has the transducer array element that is parallel to each other of some same structures, and an end of each transducer array element is independently drawn holding wire, and in order to apply pumping signal and to receive echo-signal, the other end can be used for connecting common ground.
The present invention is directed to PMNT in the prior art, the easy embrittlement of PIMNT mono-crystalline structures, existing method is difficult to be made into the focus type ultrasonic transducer, and the spy provides the preparation method of new focus type ultrasonic transducer, and it comprises the steps:
1) provides respectively matching layer, piezoelectric vibrator layer and backing piece;
2) matching layer and piezoelectric vibrator layer are carried out the ultrasonic lamination of bonding formation;
3) ultrasonic lamination and a cylinder bloom are toasted in high temperature;
4) ultrasonic lamination neatly is positioned on the curved surface of backing piece;
5) under the external carbuncle effect of cylinder bloom, ultrasonic lamination is bent to required curve form and be bonded on the backing piece;
6) cooling curing;
7) some coaxial cables are emitted on a side of piezoelectric vibrator layer according to a determining deviation, and heart yearn is connected upper end electrode electricity connects with the piezoelectric vibrator layer, ground wire is connected with the lower end electrode electricity of piezoelectric vibrator layer;
8) cut with the hi-precision cutting machine, form the focus type array element of a series of separation, namely obtain the focus type ultrasonic transducer.
Be preferably, in the step 3), ultrasonic lamination and cylinder bloom toast more than half an hour in 80 ℃ of high temperature.
Positive progressive effect of the present invention is: the present invention can be applied to the piezoelectric property of novel piezoelectric monocrystalline (PMNT, PIMNT) superelevation in the focus type ultrasonic transducer, electrical stimuli can produce the sound field of focus type, improve resolution ratio and frequency bandwidth, thereby improve the quality of ultrasonic imaging; Transducer architecture of the present invention is simple, and is easy to make, low cost; Be widely used, can be widely used in the harmless ultrasound detection of medical supersonic diagnosis and industry.
Description of drawings
Fig. 1 shows the ultrasonic lamination combination schematic diagram of outer matching layer 1, interior matching layer 2,3 formation of piezoelectric vibrator layer;
Fig. 2 shows the structural representation of the backing piece 4 of cylindrical surface structure;
Fig. 3 shows the structural representation of cylinder bloom 5;
Fig. 4 shows the radiating surface schematic diagram that pressure sintering prepares the focusing structure shape;
Fig. 5 shows the ultrasonic lamination of focusing structure shape and the combining structure schematic diagram of backing piece 4;
Fig. 6 shows the schematic diagram behind Fig. 5 combining structure winding displacement;
Fig. 7 shows the focus type ultrasonic transducer schematic diagram that forms after the cutting.
The specific embodiment
As shown in Figure 1, be followed successively by from top to bottom outer matching layer 1, interior matching layer 2, piezoelectric vibrator layer 3.Outer matching layer 1 directly adopts the lower epoxy resin cure of acoustic impedance to make.Interior matching layer 2 adopts epoxy resin and filler (such as tungsten powder, zirconia ceramics powder etc.) to require to mix according to certain acoustic impedance and makes.Piezoelectric vibrator layer 3 adopts novel piezoelectric monocrystalline/polymer 1-3 composite to make, and the novel piezoelectric monocrystalline is as being PMNT{ (1-x) Pb (Mg
1/3Nb
2/3) O
3-xPbTiO
3Monocrystal material, with improved Bridgman method growth, be oriented to＜001, component is 0.20≤x≤0.40; The novel piezoelectric monocrystalline also can be PIMNT{xPb (In
1/2Nb
1/2) O
3-yPb (Mg
1/3Nb
2/3) O
3-(1-x-y) PbTiO
3Monocrystal material, be oriented to＜001, component is 0.20≤x≤0.40 and 0.20≤y≤0.40.Adopt the cutting completion method to prepare piezoelectric monocrystal/polymer 1-3 composite, the volume ratio of piezoelectric monocrystal is in 0.2 ~ 0.8 scope in the composite.Outer matching layer 1, interior matching layer 2 and piezoelectric vibrator layer 3 are bonding by epoxy resin cure, and solidification process carries out under certain external carbuncle effect, the thickness of assurance adhesive linkage≤0.5 μ m.So, form ultrasonic lamination.
As shown in Figure 2, backing piece 4 adopts epoxy resin and tungsten powder to prepare according to high packing ratio, be solidificated in cylinder bloom 5(Fig. 3) on carry out, the subsequent corrosion Φ after backing piece 4 solidifies is the radius of cylinder bloom 5, also is the design focal length of focus type ultrasonic linear-array transducer.
As shown in Figure 4, ultrasonic lamination and cylinder bloom 5 that outer matching layer 1 after bonding, interior matching layer 2, piezoelectric vibrator layer 3 form toast half an hour in 80 ℃ of high temperature, taking out afterwards ultrasonic lamination neatly is positioned on the backing piece 4, under the external carbuncle effect of cylinder bloom 5, ultrasonic lamination bends to required subsequent corrosion and is bonded on the backing piece 4, can form radiating surface behind the cooling curing is the focusing structure shape, as shown in Figure 5.
As shown in Figure 6, coaxial cable 7 is emitted on piezoelectric vibrator layer 3 one side according to a determining deviation, and with the upper end electrode electricity connection that heart yearn is connected with the piezoelectric vibrator layer, ground wire is connected with the lower end electrode electricity of piezoelectric vibrator layer 3, electricity connects employing conducting resinl 6 or conductive epoxy resin is finished.
As shown in Figure 7, the transducer behind the winding displacement forms the focus type array element of a series of separation under the cutting of hi-precision cutting machine, namely obtain focus type ultrasonic linear-array transducer.
Claims (10)
1. focus type ultrasonic transducer, it includes matching layer, piezoelectric vibrator layer and backing piece successively, it is characterized in that, and the material of described piezoelectric vibrator layer is piezoelectric monocrystal/polymer 1-3 composite; The piezoelectric monocrystal of described piezoelectric monocrystal/polymer 1-3 composite is PMN-PT, and its chemical composition is (1-x) Pb (Mg
1/3Nb
2/3) O
3-xPbTiO
3, the PMN-PT crystallographic direction is＜001〉direction; Or lead niobate lead indate-lead-PMN-PT, its chemical composition is xPb (In
1/2Nb
1/2) O
3-yPb (Mg
1/3Nb
2/3) O
3-(1-x-y) PbTiO
3, lead niobate lead indate-lead-PMN-PT crystallographic direction is＜001〉direction; Wherein, 0 ﹤ x ﹤, 1,0 ﹤ y ﹤ 1, and 0 ﹤ x+y ﹤ 1.
2. focus type ultrasonic transducer as claimed in claim 1 is characterized in that, 0.2≤x≤0.4,0.2≤y≤0.4.
3. focus type ultrasonic linear-array transducer as claimed in claim 1 is characterized in that, adopts the cutting completion method to prepare piezoelectric monocrystal/polymer 1-3 composite, and the volume ratio of piezoelectric monocrystal is between 0.2 ~ 0.8 scope in the composite.
4. focus type ultrasonic transducer as claimed in claim 1 is characterized in that, described piezoelectric monocrystal/polymer 1-3 composite is piezoelectric monocrystal/epoxy resin or piezoelectric monocrystal/epoxy resin 1-3 composite.
5. focus type ultrasonic transducer as claimed in claim 1 is characterized in that, described matching layer comprises outer matching layer and interior matching layer.
6. focus type ultrasonic transducer as claimed in claim 5 is characterized in that, described interior matching layer adopts epoxy resin and filler allotment to make; Described outer matching layer adopts the lower epoxy resin cure of acoustic impedance to make; Described backing piece adopts epoxy resin and tungsten powder preparation to obtain.
7. focus type ultrasonic transducer as claimed in claim 1 is characterized in that, the face that contacts with described piezoelectric vibrator layer on the described backing piece is cylindrical curved surface.
8. focus type ultrasonic transducer as claimed in claim 1, it is characterized in that, described focus type ultrasonic transducer has the transducer array element that is parallel to each other of some same structures, one end of each transducer array element is independently drawn holding wire, in order to apply pumping signal and to receive echo-signal, the other end can be used for connecting common ground.
9. the preparation method of a focus type ultrasonic transducer claimed in claim 1, it comprises the steps:
1) provides respectively matching layer, piezoelectric vibrator layer and backing piece;
2) matching layer and piezoelectric vibrator layer are carried out the ultrasonic lamination of bonding formation;
3) ultrasonic lamination and a cylinder bloom are toasted in high temperature;
4) ultrasonic lamination neatly is positioned on the curved surface of backing piece;
5) under the external carbuncle effect of cylinder bloom, ultrasonic lamination is bent to required curve form and be bonded on the backing piece;
6) cooling curing;
7) some coaxial cables are emitted on a side of piezoelectric vibrator layer according to a determining deviation, and heart yearn is connected upper end electrode electricity connects with the piezoelectric vibrator layer, ground wire is connected with the lower end electrode electricity of piezoelectric vibrator layer;
8) cut with the hi-precision cutting machine, form the focus type array element of a series of separation, namely obtain the focus type ultrasonic transducer.
10. preparation method as claimed in claim 1 is characterized in that, in the step 3), ultrasonic lamination and cylinder bloom toast more than half an hour in 80 ℃ of high temperature.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100252332A CN103041978A (en) | 2013-01-23 | 2013-01-23 | Focusing ultrasonic transducer and producing method thereof |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN2013100252332A CN103041978A (en) | 2013-01-23 | 2013-01-23 | Focusing ultrasonic transducer and producing method thereof |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN103041978A true CN103041978A (en) | 2013-04-17 |
Family
ID=48054972
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2013100252332A Pending CN103041978A (en) | 2013-01-23 | 2013-01-23 | Focusing ultrasonic transducer and producing method thereof |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN103041978A (en) |
Cited By (11)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105411623A (en) * | 2015-12-25 | 2016-03-23 | 中国科学院深圳先进技术研究院 | Two-dimensional area array ultrasonic transducer and manufacturing method thereof |
| CN106098928A (en) * | 2016-07-25 | 2016-11-09 | 北京信息科技大学 | A kind of preparation method of Two-dimensional Surfaces piezo-electricity composite material element |
| CN106273491A (en) * | 2016-08-22 | 2017-01-04 | 吉林大学 | The controlled ultrasonic droplet ejection of spray angle increases material and manufactures device and method |
| CN106622924A (en) * | 2016-12-29 | 2017-05-10 | 中国科学院深圳先进技术研究院 | Making method of piezoelectric composite materials |
| CN106856401A (en) * | 2015-12-08 | 2017-06-16 | 中国科学院上海硅酸盐研究所 | A kind of piezoelectric vibrator and its preparation method and application |
| CN106890783A (en) * | 2017-03-17 | 2017-06-27 | 华中科技大学 | One-Dimensional Ultrasonic phased array probe and preparation method based on PIN PMN PT ternary system piezoelectric monocrystalline |
| CN108076424A (en) * | 2016-11-17 | 2018-05-25 | 苏州声阵电子科技有限公司 | A kind of design method and preparation method of omni-directional high-gain lens energy converter |
| CN108593783A (en) * | 2017-11-16 | 2018-09-28 | 浙江大学 | A kind of double-frequency confocal ultrasonic transducer |
| CN111347221A (en) * | 2020-03-09 | 2020-06-30 | 中科绿谷（深圳）医疗科技有限公司 | Manufacturing process of ultrasonic transducer and ultrasonic transducer |
| CN114308600A (en) * | 2021-12-16 | 2022-04-12 | 国网山东省电力公司烟台供电公司 | Air coupling ultrasonic transducer for non-contact detection of insulation defects of switch cabinet |
| US20220199895A1 (en) * | 2020-12-21 | 2022-06-23 | Hyundai Motor Company | Piezoelectric Element for Untact Haptic and Method for Manufacturing the Same |
Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6278224B1 (en) * | 1998-07-31 | 2001-08-21 | Olympus Optical Co., Ltd. | Ultrasonic transducer and method for manufacturing the same |
| US6406433B1 (en) * | 1999-07-21 | 2002-06-18 | Scimed Life Systems, Inc. | Off-aperture electrical connect transducer and methods of making |
| CN101524682A (en) * | 2009-03-31 | 2009-09-09 | 广州多浦乐电子科技有限公司 | High-frequency ultrasonic transducer made of piezoelectric monocrystalline composite material as well as manufacturing method and application thereof |
-
2013
- 2013-01-23 CN CN2013100252332A patent/CN103041978A/en active Pending
Patent Citations (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6278224B1 (en) * | 1998-07-31 | 2001-08-21 | Olympus Optical Co., Ltd. | Ultrasonic transducer and method for manufacturing the same |
| US6406433B1 (en) * | 1999-07-21 | 2002-06-18 | Scimed Life Systems, Inc. | Off-aperture electrical connect transducer and methods of making |
| CN101524682A (en) * | 2009-03-31 | 2009-09-09 | 广州多浦乐电子科技有限公司 | High-frequency ultrasonic transducer made of piezoelectric monocrystalline composite material as well as manufacturing method and application thereof |
Non-Patent Citations (1)
| Title |
|---|
| WEI WANG 等: "Cylindrically shaped ultrasonic linear array fabricated using PIMNT/epoxy 1-3 piezoelectric composite", 《SENSORS AND ACTUATORS A: PHYSICAL》 * |
Cited By (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106856401B (en) * | 2015-12-08 | 2020-10-23 | 中国科学院上海硅酸盐研究所 | Piezoelectric vibrator and preparation method and application thereof |
| CN106856401A (en) * | 2015-12-08 | 2017-06-16 | 中国科学院上海硅酸盐研究所 | A kind of piezoelectric vibrator and its preparation method and application |
| CN105411623A (en) * | 2015-12-25 | 2016-03-23 | 中国科学院深圳先进技术研究院 | Two-dimensional area array ultrasonic transducer and manufacturing method thereof |
| CN106098928B (en) * | 2016-07-25 | 2019-06-18 | 北京信息科技大学 | A kind of preparation method of Two-dimensional Surfaces piezo-electricity composite material element |
| CN106098928A (en) * | 2016-07-25 | 2016-11-09 | 北京信息科技大学 | A kind of preparation method of Two-dimensional Surfaces piezo-electricity composite material element |
| CN106273491B (en) * | 2016-08-22 | 2018-09-18 | 吉林大学 | The controllable ultrasonic droplet ejection increasing material manufacturing device and method of spray angle |
| CN106273491A (en) * | 2016-08-22 | 2017-01-04 | 吉林大学 | The controlled ultrasonic droplet ejection of spray angle increases material and manufactures device and method |
| CN108076424A (en) * | 2016-11-17 | 2018-05-25 | 苏州声阵电子科技有限公司 | A kind of design method and preparation method of omni-directional high-gain lens energy converter |
| CN106622924A (en) * | 2016-12-29 | 2017-05-10 | 中国科学院深圳先进技术研究院 | Making method of piezoelectric composite materials |
| CN106622924B (en) * | 2016-12-29 | 2019-03-01 | 中国科学院深圳先进技术研究院 | A kind of production method of piezo-electricity composite material |
| CN106890783A (en) * | 2017-03-17 | 2017-06-27 | 华中科技大学 | One-Dimensional Ultrasonic phased array probe and preparation method based on PIN PMN PT ternary system piezoelectric monocrystalline |
| CN108593783B (en) * | 2017-11-16 | 2021-01-01 | 浙江大学 | Dual-frequency confocal ultrasonic transducer |
| CN108593783A (en) * | 2017-11-16 | 2018-09-28 | 浙江大学 | A kind of double-frequency confocal ultrasonic transducer |
| CN111347221A (en) * | 2020-03-09 | 2020-06-30 | 中科绿谷（深圳）医疗科技有限公司 | Manufacturing process of ultrasonic transducer and ultrasonic transducer |
| CN111347221B (en) * | 2020-03-09 | 2021-08-27 | 中科绿谷（深圳）医疗科技有限公司 | Manufacturing process of ultrasonic transducer and ultrasonic transducer |
| US20220199895A1 (en) * | 2020-12-21 | 2022-06-23 | Hyundai Motor Company | Piezoelectric Element for Untact Haptic and Method for Manufacturing the Same |
| CN114308600B (en) * | 2021-12-16 | 2022-11-04 | 国网山东省电力公司烟台供电公司 | Air coupling ultrasonic transducer for non-contact detection of insulation defects of switch cabinet |
| CN114308600A (en) * | 2021-12-16 | 2022-04-12 | 国网山东省电力公司烟台供电公司 | Air coupling ultrasonic transducer for non-contact detection of insulation defects of switch cabinet |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN103041978A (en) | Focusing ultrasonic transducer and producing method thereof | |
| JP6073600B2 (en) | Ultrasonic probe and piezoelectric vibrator | |
| JP6091951B2 (en) | Piezoelectric vibrator, ultrasonic probe, piezoelectric vibrator manufacturing method and ultrasonic probe manufacturing method | |
| Zhou et al. | Lead-free piezoelectric single crystal based 1–3 composites for ultrasonic transducer applications | |
| CN101524682B (en) | High-frequency ultrasonic transducer made of piezoelectric monocrystalline composite material as well as manufacturing method and application thereof | |
| Jiang et al. | Fabrication of a (K, Na) NbO3-based lead-free 1-3 piezocomposite for high-sensitivity ultrasonic transducers application | |
| US20190386200A1 (en) | Shear vibration-based piezoelectric composite material and preparation method thereof | |
| Taghaddos et al. | Lead-free piezoelectric materials and ultrasonic transducers for medical imaging | |
| Wang et al. | Cylindrically shaped ultrasonic linear array fabricated using PIMNT/epoxy 1-3 piezoelectric composite | |
| CN106058040B (en) | A kind of piezo-electricity composite material preparation method | |
| CN108493328B (en) | Piezoelectric vibrator and transducer based on shearing vibration and bending vibration and manufacturing method | |
| Chen et al. | High frequency PMN–PT single crystal focusing transducer fabricated by a mechanical dimpling technique | |
| JP5691627B2 (en) | Ultrasonic probe and ultrasonic diagnostic apparatus | |
| Zhang et al. | Fabrication of PIMNT/Epoxy 1-3 composites and ultrasonic transducer for nondestructive evaluation | |
| CN203508355U (en) | Phased array transducer | |
| Tressler et al. | A comparison of the underwater acoustic performance of single crystal versus piezoelectric ceramic-based “cymbal” projectors | |
| CN103526292A (en) | In-plane shearing type piezoelectric sensing element and manufacturing method thereof | |
| JP2022132883A (en) | Piezoelectric vibrator and manufacturing method thereof | |
| US20200128333A1 (en) | Diagonal resonance sound and ultrasonic transducer | |
| CN106856401B (en) | Piezoelectric vibrator and preparation method and application thereof | |
| CN108807658B (en) | 1-3 type piezoelectric composite material with low mechanical quality factor and preparation method thereof | |
| JP2003309297A (en) | Composite piezoelectric body and its manufacturing method | |
| CN110012402A (en) | A kind of extensional vibration composite transducers | |
| JP3943731B2 (en) | Piezoelectric plate for ultrasonic transducer and manufacturing method thereof | |
| Ren et al. | The Dielectric and Piezoelectric Properties of the 1-3 Model PMN-PT/PVDF Composite Materials |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Application publication date: 20130417 |