CN102980534B - The non-contact measurement method of a kind of hidden rotating shaft and end face squareness and system - Google Patents
The non-contact measurement method of a kind of hidden rotating shaft and end face squareness and system Download PDFInfo
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- CN102980534B CN102980534B CN201210473542.1A CN201210473542A CN102980534B CN 102980534 B CN102980534 B CN 102980534B CN 201210473542 A CN201210473542 A CN 201210473542A CN 102980534 B CN102980534 B CN 102980534B
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Abstract
The invention discloses the non-contact measurement method of a kind of hidden rotating shaft and end face squareness, belong to mechanical measurement technique field.The present invention fixedly mounts a plane mirror on hidden rotating shaft end face, and this plane mirror minute surface is vertical with hidden rotating shaft end face; Irradiate described plane mirror with laser, and at the uniform velocity rotate described hidden rotating shaft, utilize the light spot position signal of face battle array photoelectrical position sensor acquisition plane catoptron reflection, light spot position signal track is on a timeline a string; Determine described hidden rotating shaft and end face squareness according to the height of described string and the corresponding relation that exists between hidden rotating shaft and end face squareness, the height of string is larger, hidden rotating shaft and end face squareness less.The invention also discloses the non-contact measurement system of a kind of hidden rotating shaft and end face squareness.The present invention quick and precisely can measure the end face squareness of the hidden rotating shaft cannot carrying out contact type measurement, and structure is simple, realizes with low cost.
Description
Technical field
The present invention relates to a kind of verticality measuring method, particularly relate to a kind of method utilizing the hidden rotating shaft of the untouchable measurement of optical measurement means and end face squareness, belong to mechanical measurement technique field.
Background technology
Between mechanical rotating shaft and end face, the measurement of verticality is one of project the most basic in dimensional measurement field, usually the measuring method of contact can be adopted directly to measure obtain, but for some special mechanical hook-ups, as scanning imaging optical system, its rotating shaft is hidden in inside configuration, this parameter cannot be measured by the method for contact, must by means of non-contact methods such as optics.For the rotating shaft of the scan module in electro-optic radar system and the non-parallelism measurement installing end face, galvanometer motor is often used in the middle of infrared imaging guidance technology as critical component.The sharpness of infrared imaging is except the impact by optical system, infrared eye, also relevant with scanister.When galvanometer motor is the critical component of imaging system, except the requirement for material and size, the nonparallelism of scanning field of view and rotating shaft and installation end face has direct relation, the only high stability of guaranteed galvanometer motor, namely good repeatability, image formed by forward scan and reverse scanning just can be made superimposed together, guarantee the stable of imaging system, reach the object of precise guidance.Therefore, carrying out Measurement accuracy to galvanometer motor rotating shaft end face squareness, is the basis ensureing accurately image.
Because galvanometer motor is more and more higher for the requirement of location and controlling angle precision, and the frequency swung more and more faster (more than 100Hz), the pivot angle information of mode to galvanometer motor that contact can not have been adopted to measure is measured.Along with the development of photoelectron technology and device, non-contact type photoelectricity detection technique becomes the preferably selection of test galvanometer motor pivot angle feature.Circular gratings method, laser interferance method, laser auto-collimation method are the methods of dynamic angle measurement conventional at present.The above two have the high advantage of measuring accuracy when carrying out measurement of angle, but their complex structure, and scene property, dynamic and economy are undesirable.Laser auto-collimation method utilizes laser as autocollimatic straight line, using quadrant detector CCD or PSD as Position-Sensitive Detector, when the change of testee generation angle, the light reflected will produce the change of displacement, but can ensure that angle information is constant, utilize the change of displacement that the real-time Static and dynamic realizing angle can be facilitated to measure like this.
Summary of the invention
Technical matters to be solved by this invention is to overcome prior art deficiency, non-contact measurement method and the system of a kind of hidden rotating shaft and end face squareness are provided, can carry out fast and accurate measurement to the verticality of hidden rotating shaft end face, and structure is simple, realizes with low cost.
The present invention specifically solves the problems of the technologies described above by the following technical solutions:
A non-contact measurement method for hidden rotating shaft and end face squareness, described hidden rotating shaft end face fixedly mounts a plane mirror, and this plane mirror minute surface is vertical with hidden rotating shaft end face; Irradiate described plane mirror with laser, and at the uniform velocity rotate described hidden rotating shaft, utilize the light spot position signal of face battle array photoelectrical position sensor acquisition plane catoptron reflection, light spot position signal track is on a timeline a string; Determine described hidden rotating shaft and end face squareness according to the height of described string and the corresponding relation that exists between hidden rotating shaft and end face squareness, the height of string is larger, hidden rotating shaft and end face squareness less.
A non-contact measurement system for hidden rotating shaft and end face squareness, comprising:
Plane mirror, be fixedly installed on described hidden rotating shaft end face, this plane mirror minute surface is vertical with hidden rotating shaft end face;
Laser instrument, for described plane mirror Emission Lasers;
Face battle array photoelectrical position sensor, for gathering the position signalling of the laser spot of described plane mirror reflection.
Further, this system also comprises the lens combination on the reflected light path that is arranged between described plane mirror and face battle array photoelectrical position sensor; Described lens combination comprises the first piano convex cylindrical lens and the second piano convex cylindrical lens that be arranged in parallel, and the photocentre of the first piano convex cylindrical lens is greater than the focal distance f of the first piano convex cylindrical lens to the distance at plane mirror center
1, be less than 2f
1; The photocentre of the second convex cylindrical lens equals the focal distance f of the second convex cylindrical lens to the distance between the battle array photoelectrical position sensor photosurface of face
2.
The present invention quick and precisely can measure the end face squareness of the hidden rotating shaft cannot carrying out contact type measurement, and structure is simple, realizes with low cost.
Accompanying drawing explanation
Fig. 1 is hidden rotating shaft and end face squareness schematic diagram;
Fig. 2 is the light path schematic diagram of measuring system of the present invention;
Fig. 3 is the principle schematic of measuring system of the present invention;
Fig. 4 is the reflected light path schematic diagram of measuring system of the present invention in embodiment;
Fig. 5 is the reflection light point track that face battle array photoelectrical position sensor receives;
In figure, each label implication is as follows:
1 is plane mirror, and 2 is laser instrument, and 3 is the first piano convex cylindrical lens, and 4 is the second piano convex cylindrical lens, and 5 is face battle array photoelectrical position sensor, and 6 is hidden shaft axis, and 7 is the normal direction of plane mirror 1.
Embodiment
Below in conjunction with accompanying drawing, technical scheme of the present invention is described in detail:
As shown in Figure 1, in figure, dotted line represents the axis of hidden rotating shaft to the structure of hidden rotating shaft, the angle of shaft axis and rotating shaft end face
reflect this hidden rotating shaft and end face squareness, ideally
angle be 90 °.As shown in the figure, because rotating shaft is hidden in external structure, the mode of traditional contact measurement therefore cannot be adopted to obtain hidden rotating shaft and end face squareness.
Thinking of the present invention is the non-cpntact measurement utilizing laser auto-collimation measuring principle to realize hidden rotating shaft and end face squareness, is specially: on hidden rotating shaft end face to be measured, fixedly mount a plane mirror, this plane mirror minute surface is vertical with hidden rotating shaft end face; Described plane mirror is irradiated with laser, and at the uniform velocity rotate described hidden rotating shaft, utilize face battle array photoelectrical position sensor (Position Sensitive Detector, be called for short PSD) acquisition plane catoptron reflection light spot position signal, light spot position signal track is on a timeline a string; Determine described hidden rotating shaft and end face squareness according to the height of described string and the corresponding relation that exists between hidden rotating shaft and end face squareness, the height of string is larger, hidden rotating shaft and end face squareness less.
The non-contact measurement system of hidden rotating shaft of the present invention and end face squareness, as shown in Figure 2, comprising: plane mirror 1, laser instrument 2, face battle array photoelectrical position sensor 5, wherein, plane mirror 1 is fixedly installed on hidden rotating shaft end face to be measured, and its minute surface is vertical with hidden rotating shaft end face; Face battle array photoelectrical position sensor 5, for gathering the position signalling of laser spot of described plane mirror reflection, its signal output part press signal move towards successively with photoelectrical position sensor modulate circuit, data collecting card, computing machine (not shown).The laser that laser instrument 2 is launched is radiated on the sensitive area of face battle array photoelectrical position sensor 5 after plane mirror 1 reflects, and the reflected light light spot position irradiated thereon is converted to electric signal and transfers to computing machine through photoelectrical position sensor modulate circuit, data collecting card by photoelectrical position sensor 5.
As shown in Figure 3, in figure, 6 is hidden rotating shaft to the test philosophy of this system, and 7 for being fixed on the normal of the plane mirror 1 of rotating shaft end face, if the angle of rotating shaft and rotating shaft end face is
, when the minute surface (as shown in phantom in FIG.) of plane mirror 1 is adjusted to vertical, namely the normal parallel of minute surface is in surface level, then axes of rotation skew
, ideally, angle
be 0.As shown in the figure, when rotating shaft 6, the minute surface normal of plane mirror 1 will draw a circle in space, work as angle
when not being 0, this circle is also not parallel to surface level, namely reflection ray can produce the corner of different vertical direction components with the diverse location of rotating shaft, the mathematical relation that the size of this corner has monodrome corresponding with rotating shaft with the non-perpendicularity of end face, can as the relevant parameter of non-perpendicularity measuring rotating shaft and end face.
Generally, angle (the i.e. angle of the normal direction of rotating shaft and end face
) very little, in order to improve the resolution of test macro, usually by extending light path, the method namely increasing light arm realizes.But in order to reduce system cost, the area of the sensitive area of normally used photoelectrical position sensor 5 is less, the test of larger area cannot be met, so need to increase a piano convex cylindrical lens 3 in reflected light path, reflected light is compressed in the horizontal scanning region compared with small size.Simultaneously due to the increasing of light path, it is excessive and affect measuring accuracy that the angle of divergence of laser can cause dropping on facula area on the sensitive area of photoelectrical position sensor 5, for this reason, the present invention is provided with piano convex cylindrical lens 4 again between piano convex cylindrical lens 3 and photoelectrical position sensor 5, distance between photoelectrical position sensor 5 and piano convex cylindrical lens 4 is one times of focal length of piano convex cylindrical lens 4, thus the light beam dispersed is converged at again on the focal plane of piano convex cylindrical lens 4.Measuring system in this embodiment, as shown in Figure 2, also comprises the lens combination on the reflected light path that is arranged between described plane mirror and face battle array photoelectrical position sensor; Described lens combination comprises the piano convex cylindrical lens 3 and piano convex cylindrical lens 4 that be arranged in parallel, and the photocentre of piano convex cylindrical lens 3 is greater than the focal distance f of piano convex cylindrical lens 3 to the distance at plane mirror 1 center
1, be less than 2f
1; The photocentre of convex cylindrical lens 4 equals the focal distance f of convex cylindrical lens 4 to the distance between battle array photoelectrical position sensor 5 photosurface of face
2; Whole reflected light path as shown in Figure 4.
When using this measuring system to measure, can in accordance with the following methods:
Steps A, tested rotating shaft and each parts of test macro are installed: be arranged on same optical table by laser instrument 2, piano convex cylindrical lens 3, piano convex cylindrical lens 4, face battle array photoelectrical position sensor 5; The tested rotating shaft being connected with plane mirror 1 is arranged on one can adjust on position, the angle platform of luffing angle.Angle between the verticality rotating shaft of rotating shaft and end face and end face characterizes.
The pose of step B, adjustment laser instrument 2, make the laser sent from laser instrument 2 be parallel to optical table table top, and be radiated on plane mirror 1, the angle of the normal of incident light and mirror surface exists
between, regulated the angle of pitch of plane mirror 1 by position, angle platform, make reflection ray also be parallel to optical table table top.The piano convex cylindrical lens 3 installed meets following two conditions:
1) axis of symmetry in the cylinder direction of piano convex cylindrical lens 3 is perpendicular to optical table table top;
2) photocentre of piano convex cylindrical lens 3 is greater than the focal distance f of piano convex cylindrical lens 3 to the distance of plane mirror 1
1, be less than 2f
1;
The piano convex cylindrical lens 4 installed meets following three conditions:
1) axis of symmetry in piano convex cylindrical lens 4 cylinder direction is perpendicular to optical table table top;
2) after piano convex cylindrical lens 3 in the horizontal direction scanning angle scope by the light that compresses to piano convex cylindrical lens 3 time, the width range of piano convex cylindrical lens 3 can not be exceeded;
3) vertical range of photocentre distance face battle array photoelectrical position sensor 5 sensitive area of piano convex cylindrical lens 4 equals the focal distance f of piano convex cylindrical lens 4
2.
Step C, at the uniform velocity reciprocating rotation rotating shaft, the scope of rotational angle is the surface that the light ensureing to reflex to piano convex cylindrical lens 3 drops on lens, namely the width range of lens is not exceeded, within dropping on the width range of piano convex cylindrical lens 4 through the light of piano convex cylindrical lens 3, this can be realized by the distance between adjustment two lens.Light through piano convex cylindrical lens 4 continues to be compressed on the one hand, in addition on the one hand, because the light through piano convex cylindrical lens 4 directly drops on the sensitive area of photoelectrical position sensor 5, and sensitive area is just positioned on the focal plane of piano convex cylindrical lens 4, luminous point is converged, thus improve the test specification of photoelectrical position sensor 5, because luminous point is large, easily run out of the sensitizing range of sensor.Light is compressed in the horizontal direction, and vertical direction obtains amplification due to the increase of light path.The output signal of the reflection vertical direction luminous point information of photoelectrical position sensor 5 is through the amplification of modulate circuit, division arithmetic, obtain the output voltage signal relevant with light spot position, this signal outputs to data collecting card and computing machine, carries out data processing, calculates characteristic parameter.As ideally, when namely rotating shaft and end face are completely vertical, output voltage signal should be rendered as straight line on a timeline; And when rotating shaft and end face out of plumb, as shown in Figure 5, its track is on a timeline a string, calculates the height of string, and according to the height of string and the relation of rotating shaft and end face squareness, calculate the verticality of rotating shaft and end face.
Claims (2)
1. a non-contact measurement method for hidden rotating shaft and end face squareness, is characterized in that, described hidden rotating shaft end face fixedly mounts a plane mirror, and this plane mirror minute surface is vertical with hidden rotating shaft end face; Irradiate described plane mirror with laser, and at the uniform velocity rotate described hidden rotating shaft, utilize the light spot position signal of face battle array photoelectrical position sensor acquisition plane catoptron reflection, light spot position signal track is on a timeline a string; Determine described hidden rotating shaft and end face squareness according to the height of described string and the corresponding relation that exists between hidden rotating shaft and end face squareness, the height of string is larger, hidden rotating shaft and end face squareness less.
2. the non-contact measurement method of hidden rotating shaft and end face squareness as claimed in claim 1, is characterized in that, the reflected light path between described plane mirror and face battle array photoelectrical position sensor is provided with a lens combination; Described lens combination comprises the first piano convex cylindrical lens and the second piano convex cylindrical lens that be arranged in parallel, and the photocentre of the first piano convex cylindrical lens is greater than the focal distance f of the first piano convex cylindrical lens to the distance at plane mirror center
1, be less than 2f
1; The photocentre of the second convex cylindrical lens equals the focal distance f of the second convex cylindrical lens to the distance between the battle array photoelectrical position sensor photosurface of face
2.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201210473542.1A CN102980534B (en) | 2012-11-21 | 2012-11-21 | The non-contact measurement method of a kind of hidden rotating shaft and end face squareness and system |
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| CN201210473542.1A CN102980534B (en) | 2012-11-21 | 2012-11-21 | The non-contact measurement method of a kind of hidden rotating shaft and end face squareness and system |
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| CN108152011A (en) * | 2017-11-16 | 2018-06-12 | 上海微波技术研究所（中国电子科技集团公司第五十研究所） | The measuring method of scanning mirror dynamic return difference in scanning imaging system |
| CN108153116A (en) * | 2017-12-27 | 2018-06-12 | 四川大学 | The alignment methods of aperture and CCD in a kind of optical exposure lithographic equipment telecentricity measuring device |
| CN108037642A (en) * | 2017-12-27 | 2018-05-15 | 四川大学 | The calibration method of excimer lithography lighting system coherence factor |
| CN108181093A (en) * | 2018-02-12 | 2018-06-19 | 中国科学院西安光学精密机械研究所 | A kind of high speed pendulum mirror performance index detection device and method |
| CN109596070A (en) * | 2018-12-20 | 2019-04-09 | 西安交通大学 | A kind of the optical parallel calibrating installation and method of universal face formula non-contact sensor |
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| CN100342210C (en) * | 2005-05-10 | 2007-10-10 | 北京航空航天大学 | Laser self-collimation zero reference error angle measuring method |
| CN102322795B (en) * | 2011-05-19 | 2013-06-05 | 浙江大学 | Optical measurement method and optical measurement device for five-degree-of-freedom rotation errors of spindle |
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