CN102967365B - Method and system for expanding spectral measurement range of spectrograph - Google Patents
Method and system for expanding spectral measurement range of spectrograph Download PDFInfo
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- CN102967365B CN102967365B CN201210378650.0A CN201210378650A CN102967365B CN 102967365 B CN102967365 B CN 102967365B CN 201210378650 A CN201210378650 A CN 201210378650A CN 102967365 B CN102967365 B CN 102967365B
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Abstract
The invention provides a method and a system for expanding the spectral measurement range of a spectrograph. The method includes generating two or more beams of parallel lights by using a segmentation spherical mirror, enabling the parallel lights to be emitted into a grating at different angles, obtaining different diffraction wavelength ranges within the same diffraction angle range, placing the normal of two or more spherical mirrors through segmentation with a small inclination angle relative to a sagittal surface upwards and downwards respectively to obtain two or more sections of spectrum staggered up and down; and mounting two or more gratings at different angles to enable the parallel lights emitting the grating to be emitted into the grating at different angles, obtaining different diffraction wavelength ranges within the same diffraction angle range, placing the normal of two or more gratings through segmentation with a small inclination angle relative to the sagittal surface upwards and downwards respectively to obtain two or more sections of spectrum staggered up and down and probed by a probe. The method and system expand the spectral measurement range under the condition that the spectral resolution is unchanged basically.
Description
Technical field
The present invention relates to spectral instrument and spectral measurement methods field, particularly, relate to a kind of method of spread spectrum instrument spectral measurement ranges and realize system accordingly.
Background technology
Spectral instrument is the important component part of optical instrument, and it is applied optics technology and spectral technique principle, observes, the basic equipment for the treatment of and analysis to the structure of matter and composition, the feature such as have that analysis precision is high, measurement range is large and amount of samples is few.The spectral instrument of space light splitting type is mainly divided into mechanic scanning mode and array detection pattern structure.The spectral instrument of mechanic scanning mode adopts stepper motor to add the structure of screw mandrel usually, the information of different wave length spectrum is obtained by rotating shutter timesharing, detector adopts photoelectric cell or photomultiplier usually, the spectrometer measurement precision of mechanic scanning mode is high, resolution is high, dynamic range is large, signal to noise ratio (S/N ratio) high, but measuring speed is comparatively slow, full spectrum is generally several minutes sweep time.And the spectral instrument of array detection pattern adopts fixed light path system structure, without the need to mechanical motion and scanning, array type detector is used to carry out electric signal scanning fast and measure, its maximum advantage is that structure is simply firm, measuring speed is very fast, is very suitable for making portable and microminaturization spectral instrument.
Array optical spectrometer adopts charge coupled device ccd (Charge-coupled Device) detector array or photodiode array (Photodiode Array mostly, PDA) detector, also has employing face battle array CMOS sensor detector.
Ccd sensor has high sensitivity, low-dark current and low noise and other advantages, shortcoming is that the system power dissipation of ccd sensor is large, be difficult to realize monolithic system integrated, CCD photosensitive-cell array is difficult to and driving circuit and signal processing circuit single-chip integration, not easily process some analog-and digital-functions, these functions comprise the function of the elements such as A/D converter, precision amplifier, memory, arithmetic element; Ccd array driving pulse is complicated, needs to use relatively high operating voltage.
CMOS (the complementary metal oxide semiconductor) technology of employing standard can sensor array, driving is fully-integrated with control circuit, signal processing circuit, A/D converter, all-digital interface circuit etc. together with, can system-on-a-chip be realized.Therefore, cmos sensor compared with ccd sensor, have low in energy consumption, system dimension is little, can by signal processing circuit and the sensor integration advantage such as on a single die, but its dark current and noise are comparatively large, and sensitivity is lower.Owing to having These characteristics, cmos sensor is applicable to large-scale mass production, be applicable to the application requiring small size, low price, pickup quality without excessive demand, if security personnel are by a large amount of commercial kitchen area such as small/micro camera, mobile phone, computer network-based video conference system, wireless hand-held video conferencing system, bar code scanner, facsimile recorder, toy, biology microscope counting, some automobile-used camera system.
Current fiber spectrometer is all detector substantially with CCD, and as marine optics, must to reach the fiber spectrometer such as Tyke, Ai Wantisi be all detector with CCD, great majority line array CCD, minority area array CCD.
Under array spectral detection mode, spectral range and spectral resolution are conflicts, owing to being subject to the restriction of detector array own dimensions and resolution, be generally that array spectral instrument or the spectral range of detector is less with CCD/PDA/CMOS, or spectral resolution is lower.
Summary of the invention
For defect of the prior art, the object of this invention is to provide a kind of spread spectrum instrument spectral measurement ranges method and system, the method is spread spectrum measurement range when spectral resolution is substantially constant.
In order to reach such object, the present invention by the following technical solutions:
A kind of spread spectrum instrument spectral measurement ranges method of the present invention, cutting spherical reflector is adopted to produce the directional light of two bundles or multi beam, make it with the incident grating of different angles, different diffraction wavelength scopes is obtained in identical angle of diffraction scope, the normal of the two or more spherical reflector that simultaneously cutting obtains has a very little angle of inclination to place relative to sagittal surface respectively up and down, can obtain staggered up and down two sections or more spectrum like this; Or the grating of two pieces or more is installed by different angles, the directional light of incident grating is made to be incident in grating with different angles, different diffraction wavelength scopes is obtained in identical angle of diffraction scope, simultaneously the normal of two pieces or more gratings has a very little angle of inclination to place relative to sagittal surface respectively up and down, to obtain staggered up and down two sections or more with polishing wax, detected by planar array detector or multiple linear array detector.The present invention when spectral preservation resolution is substantially constant, spread spectrum instrument spectral measurement ranges.
According to optical grating diffraction equation d (sini ± sin β)=k λ, wherein, d is grating constant, i is incident angle (angle of incident light and grating normal), and β is angle of diffraction (angle of diffraction light and grating), therefore, when other conditions are identical, change incident angle i or grating constant, different diffraction wavelength λ can be obtained in identical angle of diffraction β position, namely can obtain different diffraction wavelength scopes in identical angle of diffraction scope.The directional light of two bundles or multi beam can be produced in application by cutting catoptron, make it with the incident grating of different angles, obtain different diffraction wavelength scopes in identical angle of diffraction scope; Also can be installed by different angles by cutting grating, make the directional light of incident grating with the incident grating of different angles, obtain different diffraction wavelength scopes in identical angle of diffraction scope.
Preferably, a kind of method of spread spectrum instrument spectral measurement ranges, described method comprises the steps:
The first step, the light sent by measured light converges at entrance slit through spherical reflector, and light is radiated on two or more collimating mirror after entrance slit;
Second step, two or more collimating mirror carries out collimation to incident light and becomes two bundles or more directional light, and two bundles or more directional light is radiated on grating respectively at a certain angle;
3rd step, grating pair incident light carries out diffraction, and the light after diffraction enters focus lamp;
4th step, focus lamp carries out focusing to incident light and forms two rows staggered up and down or more spectrum, and this spectrum is detected by planar array detector or multiple linear array detector.
The system of a kind of spread spectrum instrument spectral measurement ranges of the present invention, this system comprises: spherical reflector, entrance slit, two or more collimating mirror, grating, focus lamp and detector; The light that measured light sends converges at entrance slit through spherical reflector, light is radiated on two or more collimating mirror after entrance slit, two bundles or more directional light is become through two or more collimating mirror collimation, two bundles or more directional light is radiated on grating respectively at a certain angle, light via optical grating diffraction is focused mirror and is focused into two rows staggered up and down or more spectrum, and this spectrum is detected by planar array detector or multiple linear array detector.
Preferably, in order to obtain stagger up and down two row or more spectrum, two or more collimating mirror need stagger the placement that has a certain degree, make the directional light exported with the incident grating of different angles, two sections or more different spectrum segments can be obtained like this in identical angle of diffraction, and the normal of two or more collimating mirror has a very little angle of inclination respectively up and down relative to sagittal surface, staggered up and down two sections or more spectrum can be obtained like this.
Preferably, a kind of method of spread spectrum instrument spectral measurement ranges, described method comprises the steps:
The first step, the light sent by measured light converges at entrance slit through spherical reflector, and light is radiated on collimating mirror after entrance slit;
Second step, collimating mirror carries out collimation to incident light and becomes a branch of directional light, and directional light is radiated on two or more grating with different angles;
3rd step, two or more grating pair incident light carries out diffraction, and the light after diffraction enters focus lamp;
4th step, focus lamp carries out two rows that focus line becomes to stagger up and down or more spectrum to incident light, and this spectrum is detected by planar array detector or multiple linear array detector.
The system of a kind of spread spectrum instrument spectral measurement ranges of the present invention, this system comprises: spherical reflector, entrance slit, collimating mirror, two or more grating, focus lamp and detector; The light that measured light sends converges at entrance slit through spherical reflector, light is radiated on collimating mirror after entrance slit, a branch of directional light is become through collimating mirror collimation, directional light is radiated on two or more grating with different angles, light via two or more optical grating diffraction is focused mirror and is focused into two rows staggered up and down or more spectrum, and this spectrum is detected by planar array detector or multiple linear array detector.
Preferably, in order to obtain stagger up and down two row or more spectrum, two or more grating need stagger the placement that has a certain degree, make directional light with the incident two or more grating of different angles, the spectrum of two sections or more different spectral ranges can be obtained like this at a certain shooting angle, and the normal of two or more grating has a very little angle of inclination respectively up and down relative to sagittal surface, staggered up and down two sections or more spectrum can be obtained like this.
Compared with prior art, the present invention has following beneficial effect: when spectral preservation resolution is substantially constant, spread spectrum instrument spectral measurement ranges.Because matrix-like spectrometer does not have Wavelength scanning mechanism, full spectral limit is measured simultaneously, measure spectrum scope and the spectral resolution of the spectrometer of this structure are conflicts, for selected detector, in order to obtain wider spectral range, often to spectral resolution be sacrificed, otherwise, in order to obtain higher spectral resolution, spectral range can only be reduced.The present invention, can by more than spectrometer spectral measurement ranges expansion roughly 2 times even when spectral preservation resolution is substantially constant.
Accompanying drawing explanation
By reading the detailed description done non-limiting example with reference to the following drawings, other features, objects and advantages of the present invention will become more obvious:
Fig. 1 is the spectral measurement light path schematic diagram of cutting collimating mirror of the present invention.
In Fig. 1,1 is light source, and 2 is spherical reflector, and 3 is slit, and 4-1 is collimating mirror A, 4-1 is collimating mirror B, and 6 is focus lamp, and 7 is planar array detector, and 8 is spectrum face.
Fig. 2 is the spectral measurement light path schematic diagram of cutting grating of the present invention.
In Fig. 2,1 is light source, and 2 is spherical reflector, and 3 is slit, and 4 is collimating mirror, and 5-1 is grating A, 5-2 is grating B, and 6 is focus lamp, and 7 is planar array detector, and 8 is spectrum face.
Fig. 3 is embodiment of the present invention cutting collimating mirror cross path spectral measurement light path schematic diagram.
In Fig. 3,1 is light source, and 2 is spherical reflector, and 3 is slit, and 4-1 is collimating mirror A, 4-1 is collimating mirror B, and 6 is focus lamp, and 7 is planar array detector.
Fig. 4 is the cutting collimating mirror cross path spectral measurement light path schematic diagram of embodiment of the present invention by optical fiber light-guiding.
In Fig. 4,1 is light source, and 2 is optical fibers, and 3 is slit, and 4-1 is collimating mirror A, 4-1 is collimating mirror B, and 6 is focus lamp, and 7 is planar array detector.
Fig. 5 is embodiment of the present invention grating scheme of installation.
Fig. 6 is the spectrum picture of the mercury lamp spectrum that embodiment of the present invention records.
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.Following examples will contribute to those skilled in the art and understand the present invention further, but not limit the present invention in any form.It should be pointed out that to those skilled in the art, without departing from the inventive concept of the premise, some distortion and improvement can also be made.These all belong to protection scope of the present invention.
Embodiment 1
As shown in Figure 1, cutting collimating mirror is adopted to carry out spectral measurement in the present embodiment.
In the present embodiment, the light that measured light 1 sends converges at entrance slit 3 through spherical reflector 2, light is radiated on collimating mirror 4-1 and 4-2 after entrance slit 3, two bundle directional lights are become through collimating mirror 4-1 and 4-2 collimation, two bundle directional lights are radiated on grating respectively at a certain angle, light via optical grating diffraction is focused mirror and is focused into the two row's spectrum staggered up and down, and this spectrum is detected by planar array detector.
In the present embodiment, in order to obtain the two row's spectrum staggered up and down, collimating mirror 4-1 and 4-2 need stagger the placement that has a certain degree, make the directional light exported with the incident grating of different angles, two sections of different spectrum segments can be obtained like this in identical angle of diffraction, and the normal of collimating mirror 4-1 and 4-2 has a very little angle of inclination respectively up and down relative to sagittal surface, can obtain two sections of staggered up and down spectrum like this.Collimating mirror 4 is generally spherical reflector, also can be paraboloidal mirror, and collimating mirror 4-1 and 4-2 is two parts of same spherical reflector or paraboloidal mirror.Both can adopt parallel light path, namely focus lamp and detector are positioned at the same side of grating normal, also can adopt cross path, and namely focus lamp and detector are positioned at the both sides of grating normal, and the arrangement mode of cross path is conducive to the miniaturization of spectrometer architecture.
By reference to the accompanying drawings 1, the angle that collimating mirror 4-1 and 4-2 staggers certain is placed, and the directional light of output is respectively with i
1and i
2the incident grating 5 of angle, after the light line focus mirror 6 of angle beta diffraction, converge on planar array detector 7, because the normal of collimating mirror 4-1 and 4-2 has a very little angle of inclination respectively up and down relative to sagittal surface, after the light line focus mirror 6 of angle beta diffraction, in fact converge on the differing heights position of planar array detector 7, if the front elevation of planar array detector 7 is shown in 8.
According to the technology adopted in the present embodiment, the quantity of cutting catoptron can be not limited to two pieces.
Embodiment 2
As shown in Figure 2, cutting grating is adopted to carry out spectral measurement in the present embodiment.
In the present embodiment, the light that measured light 1 sends converges at entrance slit 3 through spherical reflector 2, light is radiated on collimating mirror 4 after entrance slit 3, a branch of directional light is become through collimating mirror 4 collimation, directional light is radiated on grating 5-1 and 5-2 with different angles, light via grating 5-1 and 5-2 diffraction is focused mirror and is focused into the two row's spectrum staggered up and down, and this spectrum is detected by planar array detector.
In the present embodiment, in order to obtain the two row's spectrum staggered up and down, grating 5-1 and 5-2 need stagger the placement that has a certain degree, make directional light with incident grating 5-1 and 5-2 of different angles, the spectrum of two sections of different spectral ranges can be obtained like this at a certain shooting angle, and the normal of grating 5-1 and 5-2 has a very little angle of inclination respectively up and down relative to sagittal surface, can obtain two sections of staggered up and down spectrum like this.
In the present embodiment, grating 5 is generally plane reflection grating, and grating 5-1 with 5-2 is two blocks of gratings that grating constant is identical, blaze wavelength is different with blazing angle; Also can be two blocks of gratings that grating constant, blaze wavelength and blazing angle are all identical; Also can be all different two blocks of gratings of grating constant, blaze wavelength and blazing angle; Or two blocks of gratings that grating constant, blaze wavelength and blazing angle are all different; Also can be two optical grating elements be produced in same substrate of glass, between two grating planars, there is certain angle, and the normal of two grating planars is not coplanar yet, a very little angle of inclination is had respectively up and down relative to sagittal surface, as shown in Figure 5, grating constant, the blaze wavelength of this two grating can be identical with blazing angle, also can be different.Light path both can adopt parallel light path, and namely focus lamp and detector are positioned at the same side of grating normal, also can adopt cross path, and namely focus lamp and detector are positioned at the both sides of grating normal.
2, grating 5-1 and 5-2 stagger the placement that has a certain degree by reference to the accompanying drawings, make directional light respectively with different angle i
1and i
2incident grating 5-1 and 5-2, with angle beta
1and β
2light line focus mirror 6 post-concentration of diffraction on planar array detector 7, because the normal of grating 5-1 and 5-2 has a very little angle of inclination, with angle beta respectively up and down relative to sagittal surface
1and β
2after the light line focus mirror 6 of diffraction, in fact converge on the differing heights position of planar array detector 7, if the front elevation of planar array detector 7 is shown in 8.
According to the technology adopted in the present embodiment, grating quantity can be not limited to two pieces.
Embodiment 3
In the present embodiment, a kind of light path of embodiment of high-resolution spectra optical path is as accompanying drawing 3, the light that measured light 1 sends focuses on entrance slit 3 through spherical reflector 2, light is radiated on collimating mirror 4-1 and 4-2 after entrance slit 3, two bundle directional lights are become through collimating mirror 4-1 and 4-2 collimation, two bundle directional lights are radiated on grating respectively at a certain angle, and the light via optical grating diffraction is focused mirror and is focused into the two row's spectrum staggered up and down, and this spectrum is detected by planar array detector.In order to obtain the two row's spectrum staggered up and down, collimating mirror 4-1 and 4-2 need stagger the placement that has a certain degree, make the directional light exported with the incident grating of different angles, two sections of different spectrum segments can be obtained like this in identical angle of diffraction, and the normal of collimating mirror 4-1 and 4-2 has a very little angle of inclination respectively up and down relative to sagittal surface, can obtain two sections of staggered up and down spectrum like this.Collimating mirror 4 is generally spherical reflector, also can be paraboloidal mirror, and collimating mirror 4-1 and 4-2 is two parts of same spherical reflector or paraboloidal mirror.This embodiment have employed cross path, and namely focus lamp and detector are positioned at the both sides of grating, and this arrangement mode is conducive to the miniaturization of spectrometer architecture.
The present embodiment have employed the light channel structure as accompanying drawing 3, the spectrum picture of the mercury lamp spectrum recorded is as accompanying drawing 6, light source 1 selects 5w mercury lamp, assembling spherical reflector 1 focal length is f=5cm, the focal length of collimation spherical reflector 4-1 and 4-2 is f=10cm, grating 5 selects the plane grating of 300 grooves/mm, and focusing on spherical reflector 6 focal length is f=5cm.That face battle array cmos detector 7 adopts is MT9M001C12STM, and pixel size is 5.2 μm × 5.2 μm, totally 1280 × 1024 pixels.The spectral measurement ranges of this measurement mechanism is 380nm-800nm, and spectral bandwidth is about 6nm.
Embodiment 4
In the present embodiment, the light path of the embodiment of another kind of high-resolution spectra optical path is as accompanying drawing 4, be to have employed with the difference of accompanying drawing 3 light that light source sends by light transmitting fiber 2 and import spectrometer, the placement location of this mode to light source does not limit, and has greater flexibility.
Above specific embodiments of the invention are described.It is to be appreciated that the present invention is not limited to above-mentioned particular implementation, those skilled in the art can make various distortion or amendment within the scope of the claims, and this does not affect flesh and blood of the present invention.
Claims (11)
1. the method for a spread spectrum instrument spectral measurement ranges, it is characterized in that, cutting spherical reflector is adopted to produce the directional light of two bundles or multi beam, make it with the incident grating of different angles, different diffraction wavelength scopes is obtained in identical angle of diffraction scope, the normal of simultaneously cutting two pieces of obtaining or more spherical reflector has a very little angle of inclination to place relative to sagittal surface respectively up and down, staggered up and down two sections or more spectrum can be obtained like this, detected by planar array detector or multiple linear array detector.
2. the method for spread spectrum instrument spectral measurement ranges according to claim 1, it is characterized in that, described method comprises the steps:
The first step, the light sent by measured light converges at entrance slit through spherical reflector, and light is radiated on two or more collimating mirror after entrance slit;
Second step, two or more collimating mirror carries out collimation to incident light and becomes two bundles or more directional light, and two bundles or more directional light is radiated on grating respectively at a certain angle;
3rd step, grating pair incident light carries out diffraction, and the light after diffraction enters focus lamp;
4th step, focus lamp carries out focusing to incident light and forms two rows staggered up and down or more spectrum, and this spectrum is detected by planar array detector or multiple linear array detector.
3. requiring a system for method described in 2 for realizing profit, it is characterized in that, this system comprises: spherical reflector, entrance slit, two or more collimating mirror, grating, focus lamp and detector; The light that measured light sends converges at entrance slit through spherical reflector, light is radiated on two or more collimating mirror after entrance slit, two bundles or more directional light is become through two or more collimating mirror collimation, two bundles or more directional light is radiated on grating respectively at a certain angle, light via optical grating diffraction is focused mirror and is focused into two rows staggered up and down or more spectrum, and this spectrum is detected by planar array detector or multiple linear array detector.
4. system according to claim 3, it is characterized in that, described two or more collimating mirror staggers the placement that has a certain degree, make the directional light exported with the incident grating of different angles, two sections or more different spectrum segments are obtained like this in identical angle of diffraction, and the normal of two or more collimating mirror has a very little angle of inclination respectively up and down relative to sagittal surface, staggered up and down two sections or more spectrum can be obtained like this.
5. the system according to claim 3 or 4, is characterized in that, described two or more collimating mirror is spherical reflector or paraboloidal mirror, and two or more collimating mirror is the two or more parts of same spherical reflector or paraboloidal mirror; Described two or more collimating mirror adopts parallel light path, and namely focus lamp and detector are positioned at the same side of grating normal; Or employing cross path, namely focus lamp and detector are positioned at the both sides of grating normal.
6. the method for a spread spectrum instrument spectral measurement ranges, it is characterized in that, the grating of two pieces or more is installed by different angles, the directional light of incident grating is made to be incident in grating with different angles, different diffraction wavelength scopes is obtained in identical angle of diffraction scope, simultaneously the normal of two pieces or more gratings has a very little angle of inclination to place relative to sagittal surface respectively up and down, to obtain staggered up and down two sections or more spectrum, detected by planar array detector or multiple linear array detector.
7. the method for spread spectrum instrument spectral measurement ranges according to claim 6, it is characterized in that, described method comprises the steps:
The first step, the light sent by measured light converges at entrance slit through spherical reflector, and light is radiated on collimating mirror after entrance slit;
Second step, collimating mirror carries out collimation to incident light and becomes a branch of directional light, and directional light is radiated on two or more grating with different angles;
3rd step, two or more grating pair incident light carries out diffraction, and the light after diffraction enters focus lamp;
4th step, focus lamp carries out two rows that focus line becomes to stagger up and down or more spectrum to incident light, and this spectrum is detected by planar array detector or multiple linear array detector.
8. for realizing a system for method described in claim 7, it is characterized in that, this system comprises: spherical reflector, entrance slit, collimating mirror, two or more grating, focus lamp and detector; The light that measured light sends converges at entrance slit through spherical reflector, light is radiated on collimating mirror after entrance slit, a branch of directional light is become through collimating mirror collimation, directional light is radiated on two or more grating with different angles, light via two or more optical grating diffraction is focused mirror and is focused into two rows staggered up and down or more spectrum, and this spectrum is detected by planar array detector or multiple linear array detector.
9. system according to claim 8, it is characterized in that, described two or more grating staggers the placement that has a certain degree, make directional light with the incident two or more grating of different angles, the spectrum of two sections or more different spectral ranges is obtained like this at a certain shooting angle, and the normal of two or more grating has a very little angle of inclination respectively up and down relative to sagittal surface, staggered up and down two sections or more spectrum can be obtained like this.
10. system according to claim 8 or claim 9, it is characterized in that, described grating is plane reflection grating, two or more grating two pieces of being that grating constant is identical, blaze wavelength is different with blazing angle or more grating; Or grating constant, blaze wavelength and blazing angle all identical two pieces or more grating; Or grating constant, blaze wavelength and blazing angle all different two pieces or more grating; Or be produced in same substrate of glass two pieces or more optical grating elements, between two pieces or more grating planars, there is certain angle, and the normal of two pieces or more grating planars is not coplanar yet, have a very little angle of inclination respectively up and down relative to sagittal surface, the grating constant of these two pieces or more gratings, blaze wavelength and blazing angle are identical or different.
11. systems according to claim 10, is characterized in that, described two pieces or more grating light paths adopt parallel light path, and namely focus lamp and detector are positioned at the same side of grating normal; Or employing cross path, namely focus lamp and detector are positioned at the both sides of grating normal.
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| CN103528971A (en) * | 2013-10-22 | 2014-01-22 | 长春长光思博光谱技术有限公司 | Optical path system in optical grating type near infrared analyzer |
| US10288868B2 (en) | 2014-01-31 | 2019-05-14 | Canon U.S.A., Inc. | Optical probe, light intensity detection, imaging method and system |
| CN106896058A (en) * | 2015-12-18 | 2017-06-27 | 无锡市金义博仪器科技有限公司 | A kind of many matrix analytical equipments |
| JP2018128326A (en) * | 2017-02-07 | 2018-08-16 | 大塚電子株式会社 | Optical spectrum measuring device and method of measuring optical spectrum |
| CN108106729B (en) * | 2017-12-01 | 2019-09-10 | 中国科学院长春光学精密机械与物理研究所 | A kind of total CCD spectrometer of double grating |
| CN108151626B (en) * | 2018-01-19 | 2023-11-28 | 天活松林光学（广州）有限公司 | Spherical surface normal angle quick measuring device of spherical prism |
| CN108760244B (en) * | 2018-04-17 | 2019-11-26 | 武汉光迅科技股份有限公司 | A kind of high-resolution optical information networks device and method |
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