CN102967289B - Device for calibrating static and dynamic characteristics of contact probe type contourgraph sensor - Google Patents
Device for calibrating static and dynamic characteristics of contact probe type contourgraph sensor Download PDFInfo
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- CN102967289B CN102967289B CN 201210428665 CN201210428665A CN102967289B CN 102967289 B CN102967289 B CN 102967289B CN 201210428665 CN201210428665 CN 201210428665 CN 201210428665 A CN201210428665 A CN 201210428665A CN 102967289 B CN102967289 B CN 102967289B
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Abstract
The invention discloses a device for calibrating static and dynamic characteristics of a contact probe type contourgraph sensor. The device comprises a static displacement performing device, a dynamic displacement performing device and a displacement measuring device, wherein the static displacement performing device comprises a base, a right bearing seat, left bearing seat, a ball screw, an oblique block, an x-direction linear guide rail sliding block, a first linear guide rail, a second linear guide rail, a z-direction working table and a z-direction support frame. The oblique block is fixed on the x-direction linear guide rail sliding block, the sliding block is installed on the first linear guide rail, and the first linear guide rail is fixedly connected with the base. The ball screw penetrates through the center of the oblique block, and two ends of the ball screw are respectively fixed on the right bearing seat and the left bearing seat. The second linear guide rail is fixed on an oblique plane of the oblique block. The z-direction working table is connected with the z-direction support frame, and the z-direction support frame is connected with the base. The z-direction working table and the second linear guide rail convert x-direction movement into z-direction movement through sliding friction. The device for calibrating the static and dynamic characteristics of the contact probe type contourgraph sensor has the advantages of being high in calibrating accuracy, large in calibrating range, high in calibrating speed, simple in structure and low in cost.
Description
Technical field
The invention belongs to measurement mechanism calibrating technical field, more specifically, relate to the calibrating installation of a kind of contact pin type contourgraph sensor static state and dynamic perfromance.
Background technology
At present, the detection of high-end surface topography need reach the level of several mm scopes, nanometer resolution.The contact pin type sensor is in the input end of contact pin type contourgraph, is the primary link of whole profile instrument system, and its performance directly influences the instrument system precision characteristic.In order to adapt to the detection requirement of high-end surface topography, the dynamic and static characteristic of contact pin type contourgraph sensor requires also more and more higher.
According to contact pin type surfagauge calibrating standard, there are 3 weak points in the school inspection for contact pin type contourgraph sensor in the school inspection project.The first, in the school inspection project, to the calibrating of contact pin type contourgraph Sensor's Static characteristic, adopt the groove model, its calibrating scope is little.Second, during static the calibrating, adopt the error of indication of roughness parameter such as Ra (the wide arithmetic average deviation of Ra finger wheel) as error evaluation, data itself have adopted average effect when handling, and lack the error evaluation to a plurality of spot measurements of contact pin type contourgraph sensor gamut.The 3rd, whole school inspection project is not enough to the dynamic property of detecting sensor, namely follows the fast-changing performance of surface topography.The kinetic measurement correcting device of contact pin type surfagauge, employing be many grooves roughness standards model.Many grooves roughness standards model has high precision, but the surface topography of many grooves roughness sample plate is single, big with reality surface topography difference to be detected, can not the trace performance of complete reaction contact pin type contourgraph sensor when measuring actual surface topography in the process of school inspection.
Summary of the invention
Defective at prior art, the object of the present invention is to provide the calibrating installation of a kind of contact pin type contourgraph sensor static state and dynamic perfromance, be intended to solve in the prior art to contact pin type contourgraph sensor calibrating and adopt the groove model, its calibrating scope is little, during dynamic calibration the trace performance calibrating insufficient and lack problem to a plurality of single-point error evaluations of contact pin type contourgraph sensor gamut.
The embodiment of the invention provides the calibrating installation of a kind of contact pin type contourgraph sensor static state and dynamic perfromance, the displacement measuring device that comprises the static displacement generating means, is embedded in the dynamic displacement generating means on the described static displacement generating means and is used for the change in displacement signal of static displacement generating means and dynamic displacement generating means is converted into optical signalling; Described static displacement generating means comprises: base, right bearing seat, left shaft holder, ball-screw, skewback, x to line slideway slide block, first line slideway, second line slideway, z to worktable and z to bracing frame; Skewback is fixed on x on the line slideway slide block, and x is installed on first line slideway to the line slideway slide block, and first line slideway is fixedlyed connected with base; Ball-screw passes from the center of skewback and two ends are separately fixed on right bearing seat and the left shaft holder; Second line slideway is fixed on the inclined-plane of skewback; Z is connected to bracing frame with z to worktable, and z is connected with base to bracing frame; Z between worktable and second line slideway by sliding friction with the x of second line slideway to movement be converted into z to the z of worktable to motion.
Further, ball-screw comprises screw rod, nut and ball, and an end of screw rod is connected with the motor of outside, and the other end is fixed on the left shaft holder after passing from the center of skewback, and nut is fixedlyed connected with skewback by flexible hinge.
Further, described skewback comprises: inclined-plane, former and later two L type sidewalls of below that are positioned at the center, inclined-plane and the rear wall that connects described two L type sidewalls; Has the threaded hole of fixedlying connected for second line slideway on the inclined-plane; Have N through hole on the rear wall, through hole is positioned at the center of rear wall and is used for described screw rod is passed; N-1 through hole is around a described through hole symmetric arrangement and for fixedlying connected with flexible hinge in addition; Described N is the odd number more than or equal to 5; The lower end of former and later two L type sidewalls is stretched out surface width part and is had a through hole respectively, two through holes be positioned at L type sidewall left and right directions the center and with the fore-and-aft direction of skewback on symmetric arrangement.
Further, the degree of tilt on the inclined-plane of described skewback is 1: 3～1: 50.
Further, described z comprises flexible portion and the peripheral rigid element that is positioned at the center to worktable; Described rigid element is connected by flexible hinge with described flexible portion; Described rigid element has two centrosymmetric rectangle boss; The outside of described rectangle boss is vertical to the back side of worktable with z.
Further, described dynamic displacement generating means comprises piezoelectric ceramics, piezoelectric ceramics is set in z in worktable, and the lower surface of piezoelectric ceramics and z glued joint to the rigid element of worktable, and the upper surface of piezoelectric ceramics and z glued joint to the lower surface of the flexible portion of worktable.
Further, described displacement measuring device comprises: the light path back up pad, be positioned at first catoptron and second catoptron of light path back up pad both sides, diffraction grating, be positioned at the 3rd catoptron and the 4th catoptron on the two-way diffraction light light path of diffraction grating, the prism mount pad, successively with fixing quarter wave plate, first Amici prism and second Amici prism of prism mount pad, be installed in quarter wave plate and the 3rd Amici prism of the first Amici prism both sides respectively, and the photelectric receiver that lays respectively at four road emergent light positions; Described the 3rd catoptron and L type supporting seat are bonding, and described the 4th catoptron and adjustable support seat are bonding, described the 3rd Amici prism rotation 45.
The invention provides calibrating installation and can realize that the contact pin type sensor of high-end surface topography contourgraph carries out quiet, detection of dynamic; Fill up domestic blank in the calibrating of contact pin type contourgraph sensor dynamic following performance, increased the scope of calibrating simultaneously greatly.The measured value of this calibrating installation can directly be traceable to length standard, has characteristics such as calibration accuracy height, detection speed is fast, simple in structure, cost is low.Can be used for high-precision contact pin type contourgraph sensor check by calibrating installation, static calibrating scope reaches 10mm, and vertical resolution reaches 5nm, and positional precision reaches 5nm, and the dynamic calibration frequency is smaller or equal to 200Hz, and the dynamic calibration amplitude reaches 8 μ m.
Description of drawings
The theory diagram of the contact pin type contourgraph sensor static state that Fig. 1 provides for the embodiment of the invention and the calibrating installation of dynamic perfromance;
The structural representation of the contact pin type contourgraph sensor static state that Fig. 2 provides for the embodiment of the invention and the calibrating installation of dynamic perfromance;
The structural representation of static displacement generating means in the contact pin type contourgraph sensor static state that Fig. 3 provides for the embodiment of the invention and the calibrating installation of dynamic perfromance;
The three-dimensional structure diagram of skewback in the static displacement generating means that Fig. 4 provides for the embodiment of the invention;
Z is to the partial schematic diagram of worktable in the static displacement generating means that Fig. 5 provides for the embodiment of the invention;
Z is to the front view of worktable in the static displacement generating means that Fig. 6 (a) provides for the embodiment of the invention; Z is to the vertical view of worktable in the static displacement generating means that Fig. 6 (b) provides for the embodiment of the invention;
The vertical view of displacement measuring device in the contact pin type contourgraph sensor static state that Fig. 7 (a) provides for the embodiment of the invention and the calibrating installation of dynamic perfromance; The left view of displacement measuring device in the contact pin type contourgraph sensor static state that Fig. 7 (b) provides for the embodiment of the invention and the calibrating installation of dynamic perfromance;
The light path principle figure of displacement measuring device in the contact pin type contourgraph sensor static state that Fig. 8 provides for the embodiment of the invention and the calibrating installation of dynamic perfromance.
Embodiment
In order to make purpose of the present invention, technical scheme and advantage clearer, below in conjunction with drawings and Examples, the present invention is further elaborated.Should be appreciated that specific embodiment described herein only in order to explaining the present invention, and be not used in restriction the present invention.
The embodiment of the invention is specifically related to the calibrating of quiet, the dynamic perfromance of contact pin type contourgraph sensor, and quiet, the dynamic perfromance that relate in particular to the contact pin type contourgraph sensor that high-end surface topography detects detect; Fig. 1 shows the structure of the calibrating installation that the embodiment of the invention provides, and this calibrating installation comprises: static displacement generating means 110, dynamic displacement generating means 120 and displacement measuring device 130; Static displacement generating means 110 is that total system supports, dynamic displacement generating means 120 is embedded on the static displacement generating means 110, share z to worktable 31 with static generating means, the diffraction grating 30 of displacement measuring device 130 is installed in z on worktable 31, and change in displacement signal quiet, the dynamic displacement generating means is converted into optical signalling.Being in this calibrating installation can examine and determine static position accuracy of detection, the dynamic following performance of high precision contact pin type contourgraph sensor.During static the calibrating, drive static displacement generating means 110 by x to stepper motor 2 and produce displacement, this moment, dynamic displacement generating means 120 remained unchanged with static displacement generating means 110 relative positions, displacement measuring device 130 is measured the displacement of diffraction grating 30 as standard signal, compare with coloured light grid 30 displacement signals that spread out of contact pin type contourgraph sensor measurement, realize static calibrating.During dynamic calibration, produce continuous displacement curve by dynamic displacement generating means 120, displacement measuring device 130 is measured the displacement curve signal of diffraction grating as standard signal, compares with the spread out displacement curve signal of coloured light grid of the measurement of contact pin type contourgraph sensor, realizes dynamic calibration.
Contact pin type contourgraph sensor is quiet, dynamic perfromance calibrating installation principle of work: during the static characteristics calibrating, send the static drive displacement signal by computing machine, drive diffraction grating by the static displacement generating means and arrive assigned address, displacement measuring device is measured standard displacement output, relatively the measurement numerical value of contact pin type contourgraph sensor draws verification result; During the dynamic perfromance calibrating, send the dynamic driving displacement signal by computing machine, drive the diffraction grating motion by the dynamic displacement generating means, displacement measuring device is measured the displacement output of standard, relatively the measurement numerical value of contact pin type contourgraph sensor draws verification result.
Contact pin type contourgraph sensor disclosed by the invention is quiet, the calibrating installation of dynamic perfromance is made up of static displacement generating means, dynamic displacement generating means, displacement measuring device and photelectric receiver.Quiet, dynamic displacement that displacement generating device produces are measured by displacement measuring device, export as the standard displacement.During calibrating, quiet, the dynamic displacement of displacement generating device generation standard, and respectively by contact pin type contourgraph sensor sensing to be checked, sensor sensing result and standard displacement output contrast draw that sensor is quiet, the verification result of dynamic perfromance.Advantage of the present invention is: characteristics such as simple in structure, that calibration accuracy is high, the calibrating scope is big, cost is low.Static calibrating scope 0～10mm, vertical resolution can reach 5nm, and positional precision reaches 5nm, and the dynamic calibration frequency range is smaller or equal to 200Hz, and the dynamic calibration amplitude reaches 8 μ m.
In embodiments of the present invention, as Fig. 2, shown in Figure 3, static displacement generating means 110 is by base 1, electric machine support 2, motor 3, spring coupling 4, right bearing seat cushion piece 5, right bearing seat 6, ball-screw 7, ball-screw nut 35, flexible hinge 36, skewback 37, line slideway slide block 38, first line slideway 39, left shaft holder 40, left shaft holder cushion block 41, second line slideway 34, z is to worktable 31, decussation roller guide rail 42, z forms to bracing frame 33, ball-screw 7 two ends are supported by left shaft holder 40 and right bearing seat 6, the left side of left shaft holder 40 alignment bases 1, be connected with base 1 by left shaft holder cushion block 41, right bearing seat 6 is connected with base 1 by right bearing seat cushion piece 5, the right-hand member of ball-screw 7 is connected by spring coupling 4 with the output terminal of motor 3, fixedly connected with base 1 upper end in front side, electric machine support 2 lower end, electric machine support 2 right-hand members are fixedlyed connected with motor 3, ball-screw 7 constitutes screw pair with ball-screw nut 35, and flexible hinge 36 both ends of the surface are fixing with skewback 37 and ball-screw nut 35 respectively.Skewback 37 strides across ball-screw 7 and flexible hinge 36 is fixed on the line slideway slide block 38, line slideway slide block 38 and first line slideway 39 constitute rolling pair, first line slideway 39 is fixedlyed connected with base 1, line slideway 34 and z are to constituting the linear slide pair between the worktable 31, line slideway 34 is fixedlyed connected with skewback 37, to being connected by intersecting spherical guide 42 between the bracing frame 33, fixedly connected with base 1 to bracing frame 33 by z to worktable 31 and z for z.
In embodiments of the present invention, ball-screw 7 passes from flexible hinge 36 and the center of skewback, takes full advantage of the space, has reduced the size of total.Ball-screw nut 35 drives skewback 37 by flexible hinge 36 and is x to motion.Skewback 37 is fixed on the line slideway slide block 38, and line slideway slide block 38 is installed on first line slideway 39, and first line slideway 39 links to each other with base 1 by screw.Flexible hinge 36 flexibly connects being connected between ball-screw nut 35 and the skewback 37, can eliminate the kinematic error that ball-screw 7 distortion are introduced, improve the stationarity of transmission, flexible hinge 36 can also be eliminated the error that part is introduced because of workpiece processing simultaneously, is convenient to integrally-built installation.In addition, can also guarantee that skewback 37 is only determined by the rolling pair between line slideway 39 and the line slideway slide block 38 along x to the linearity that moves, thereby improve kinematic accuracy and the robust motion of skewback 37.That utilizes ball-screw drives the requirement on a large scale reach whole static displacement generating means on a large scale, by selecting the ball-screw of little helical pitch for use, can improve the driving resolution of static displacement generating means.Second line slideway 34 is fixed on the skewback 37, utilizes the high-performance surface of second line slideway 34 to carry out high-precision guiding, has reduced the manufacturing procedure of skewback, the response speed improving from x to z direction motion commutation process simultaneously and stability.The degree of tilt of skewback not only plays the commutation effect, has also carried out the segmentation of physical construction to driving signal, with x to motion be subdivided into z to motion, improve the resolution that drives.Z between worktable 31 and second line slideway 34 by sliding friction pair, with the x of guide rail to movement be converted into z to the z of worktable 31 to motion.Z is connected by screw to bracing frame 33 and base 1.Decussation roller guide rail 42 is connected z with z to bracing frame 33 to worktable 31, z is play the guiding role to worktable 31, guarantees that z is to working range and the kinematic accuracy of worktable 31.
Static displacement generating means 110 adopts ball-screw to drive and realizes x to the feeding on a large scale of worktable, relies on the guide effect of line slideway to keep linearity and the robust motion that x moves.Straight line adjutant x on the skewback between line slideway and the Z-direction worktable 31 to conversion of motion be z to motion, the high flatness of line slideway guarantees the stationarity that commutates and the controllability of motion.Simultaneously, the physical construction segmentation by the electronic fine-grained and skewback of stepper motor realizes that the height of z direction drives resolution.Solved the little problem of traditional detection means calibrating scope, realized that Static Detection drives the type of drive of resolution on a large scale with height.The dynamic displacement generating means is by the motion of Piezoelectric Ceramic diffraction grating, and whole dynamic displacement generating means is simple in structure, drives reliable.Utilize the driving curve characteristics similar to the driving voltage curve of piezoelectric ceramics, can produce changeable controlled displacement drive, thereby make contact pin type contourgraph sensor in testing process with the actual measurement process in operating mode more approaching, better reaction calibrating contact pin type contourgraph sensor is in the dynamic perfromance of actual measurement state.The drive displacement measurement mechanism realizes based on optical grating diffraction displacement measurement principle, and grating signal is designed to phase differential and differs 90 ° four road signals, improves phase accuracy and the electronics frequency multiplication ability of photosignal, improved precision and the reliability of whole detection system.
In embodiments of the present invention, ball-screw 7 is made up of screw rod 71, nut 35 and ball 73; Screw rod 71 passes from the center of flexible hinge and skewback, takes full advantage of the space, has reduced the size of total.Ball-screw nut 35 drives skewback 37 by flexible hinge 36 and is x to motion.Skewback 37 is fixed on the line slideway slide block 38, and line slideway slide block 38 is installed on first line slideway 39, and line slideway 39 links to each other with base 1 by screw.Flexible hinge 36 flexibly connects being connected between ball-screw nut 35 and the skewback 37, can eliminate the kinematic error that ball-screw 7 distortion are introduced, improve the stationarity of transmission, flexible hinge 36 can also be eliminated the error that part is introduced because of workpiece processing simultaneously, is convenient to integrally-built installation.In addition, can also guarantee that skewback 37 is only determined by the rolling pair between line slideway 39 and the line slideway slide block 38 along x to the linearity that moves, thereby improve kinematic accuracy and the robust motion of skewback 37.That utilizes ball-screw drives the requirement on a large scale reach whole static displacement generating means on a large scale, by selecting the ball-screw of little helical pitch for use, can improve the driving resolution of static displacement generating means.
In embodiments of the present invention, static displacement generating means 110 courses of work are: computing machine sends displacement signal, and the stepper motor rotation drives the ball-screw rotation, and under the effect of screw pair, ball-screw nut produces the movement of x direction.Skewback connects ball-screw nut by flexible hinge, under the driving of ball-screw nut, is led by the line slideway below the skewback, carries out the motion of x direction.Line slideway of skewback upper fixed, guide rail upper surface constitutes the straight line pair with the cylinder of fixing.Thereby, realize z to worktable 31 along intersecting spherical guide 42 moving on the z direction.Utilize the stroke on a large scale of ball-screw, reach the requirement of driving on a large scale of static displacement generating means.Select the ball-screw of little helical pitch simultaneously for use, to the physical construction segmentation of the driving segmentation of stepper motor and skewback, make whole static displacement generating means satisfy the requirement that drives resolution on a large scale with height.Therefore but whole measurement all gamut, single-point is carried out, and can evaluate the gamut multimetering precision of contact pin type contourgraph sensor, has solved the deficiency of the error of indication evaluation that traditional detection can only be in the roughness scope.
As shown in Figure 4, the inclined-plane degree of tilt of skewback 37 is the degree that the inclined-plane tilts, and measures its size with tangent value; The scope of the inclined-plane degree of tilt of skewback 37 is 1: 3～1: 50; When degree of tilt during less than 1: 3, though the scope of static drive is bigger, the physical construction segmentation effect that skewback plays is limited, thereby the static drive resolution in the static drive process is low, does not reach the high resolving power requirement of requirement.Degree of tilt is greater than 1: 50 o'clock, and the segmentation effect is more obvious, however the difficulty of machining increase, and can reduce the working range of whole static drive, can not satisfy the large-scale requirement of static drive.
The end face of skewback 37 is inclined-plane A, and degree of tilt is chosen in the gradient scope.Process 2 threaded holes on the inclined-plane, be used for the installation of line slideway.The below of center, inclined-plane is made up of the rear wall C of preceding L type sidewall B, back L type sidewall D and connection L type.1 big 4 five little through holes are arranged on the rear wall C.Macropore is positioned at the center of rear wall C, 4 apertures around macropore arrange and about about macropore, symmetry in twos up and down.Leading screw passes from the macropore center during assembling, and four apertures are used for and the fixedlying connected of flexible hinge 36.See that from top to bottom the lower end of front and back L type sidewall B, C is stretched out the surface width part and processed a through hole respectively.The position of two through holes is about symmetry on the fore-and-aft direction of skewback, and is positioned at the center of L type sidewall left and right directions.
Shown in Fig. 5,6 (a), 6 (b), Z-direction worktable 31 is made up of the rigid element of periphery and the flexible portion at center; Rigid element be connected by the flexible hinge structure shown in Fig. 6 (a) between the flexible portion.Wherein flexible portion can produce relative displacement with respect to rigid element, and its principle is by thin steel plate generation elastic deformation, and by the beam type structure elastic deformation is amplified.As can be known, z has two outstanding rectangle boss to worktable 31 from Fig. 6 (b), and boss is with respect to the center symmetry.The outside of boss is vertical to the back side of worktable 31 with z.
Motor 3 links to each other with base 1 by electric machine support 2, finishes the fixing of motor by screw.Spring coupling 4 is connected motor 3 with ball-screw 7, the rotation of motor 3 is converted into the rotation of ball-screw 7, and ball-screw 7 is supported by left shaft holder 40 and right bearing seat 6.Left shaft holder cushion block 41 and right bearing seat cushion piece 5 are adjusted the distance of left and right bearing seat central axis and base respectively, make the central axes of ball-screw 7 and motor 3, guarantee the kinematic accuracy of rotation process.
In embodiments of the present invention, the dynamic displacement generating means 120 of contact pin type contourgraph sensor is made of to bracing frame 33 etc. to worktable 31, z piezoelectric ceramics 32, z.As shown in Figure 4, piezoelectric ceramics 32 is set in z in worktable 31, lower surface and z glued joint to the rigid structure place of worktable 31, upper surface and z glued joint to the lower surface of the flexible portion of worktable 31, and z is identical with static calibrating installation to the connection of bracing frame 33 and base 1 to worktable 31, decussation roller guide rail 42, z.
Dynamic displacement generating means 120 courses of work are: according to dynamic driving curve (dextrorotation ripple curve, triangular wave curve, square-wave curve etc.), send corresponding driving instruction by computing machine, PZT drives according to Computer signal and drives piezoelectric ceramics 32, make piezoelectric ceramics 32 carry out stretching motion up and down according to driving curve, by the flexible portion connection diffraction grating 30 of z to worktable 31, carry out the motion identical with driving curve thereby drive diffraction grating 30 jointly with flexible portion.The displacement curve of piezoelectric ceramics 32 and drive voltage signal class of a curve are seemingly in the kinetic measurement process, therefore can adjust the driving curve of kinetic measurement flexibly, compare with many grooves model during calibrating, more can reflect piece surface pattern characteristics complicated and changeable, thereby more comprehensively, the dynamic perfromance of more reliable, more accurate calibrating contact pin type contourgraph sensor.
As Fig. 7 (a), 7 (b), shown in Figure 8, the structure of displacement measuring device 130 is: laser instrument 44 places light path back up pad 11 rear sides, first catoptron 45, second catoptron 27 is installed in light path back up pad 11 both sides respectively, diffraction grating 30 lower ends are connected to the flexible portion upper end of worktable 31 with z, the 3rd catoptron 10, the 4th catoptron 24 places respectively on the two-way diffraction light light path, the 3rd catoptron 10 is bonding with L type supporting seat 9, the 4th catoptron 24 is bonding with adjustable support seat 23, quarter wave plate 22, first Amici prism 14, second Amici prism 15 is fixing with prism mount pad 12 successively, quarter wave plate 25, the 3rd Amici prism 21 is installed on the both sides of first Amici prism 14 respectively, and wherein 21 rotations of the 3rd Amici prism are 45 °; Photelectric receiver 13,17,19,20 is installed on four road emergent light positions respectively.
Laser instrument 44 is fixed on the light path base 11 by v type fixture block 43.Inner sleeve 28 places outer sleeve 26 inside, and outer sleeve 26 is fixed on the light path base 11 by screw 29.First catoptron 45 and second catoptron 27 are installed in respectively on the end face of outer sleeve 26 and inner sleeve 28, and the minute surface of two catoptrons and the central axis of sleeve are 45 °.By two-face mirror laser optical path base 11 back sides that laser instrument 44 sends are moved on to the front, finish the translation of surface level.The 3rd catoptron 10 is bonded on the L type supporting seat 9, changes the direction of propagation of-1 order diffraction light.Quarter wave plate 25 is adjusted-1 order diffraction polarisation of light polarisation of light direction.The 4th catoptron 24 is bonded on the adjustable support seat 23, make the angle generation minor alteration of the 4th catoptron by adjusting 23, thereby make+1 order diffraction light and-1 order diffraction light do not have intersecting of optical path difference at the Amici prism place.Quarter wave plate 22 plays the phase modulation effect, make+1 order diffraction light is consistent with the phase place of arrival first Amici prism 14 of-1 order diffraction light.Quarter wave plate 25,22 is fixed on the prism mount pad 12 by screw, and the prism mount pad is fixed on the light path base 11.Second Amici prism 15 and the 14 parallel placements of first Amici prism, the light path of sending from first Amici prism is divided into two-way and sends behind second Amici prism, 15 light splitting surfaces.The installation of the 3rd Amici prism 21 and first Amici prism, 14 angles at 45 are divided into two-way behind another Lu Guangjing the 3rd Amici prism 21 that sends from first Amici prism and send. Photelectric receiver 13,16 is leaned against on the two outgoing optical planes of second Amici prism by L type clamping plate 17 folders, and photelectric receiver 19,20 is leaned against on the two outgoing optical planes of the 3rd Amici prism by L type clamping plate 18 folders, receives four road light signals respectively.
The principle of work of displacement measuring device 130 is: the light from semiconductor laser 44 sends, shine on the diffraction grating through catoptron 45,27, and be divided into two-way behind the optical diffraction.One curb catoptron 10 shines quarter wave plate 25, carries out the phase place modulation.Another curb catoptron 24 shines quarter wave plate 22, carries out the phase place modulation.Become two opposite circularly polarized lights of rotation direction by orthogonal linearly polarized light, two-way light arrives Amici prism 14 places after the phase place modulation, becomes the interference signal that four tunnel positions differ 90 ° for interdependent time behind Amici prism 15,21.The separation of four road signals has improved precision and the reliability of whole detection.Four road signals (a, b, c, d) carry out differential amplification in twos, import follow-up treatment circuit, can obtain the displacement information that grating moves.
The invention provides calibrating installation and can realize that the contact pin type sensor of high-end surface topography contourgraph carries out quiet, detection of dynamic; Fill up domestic blank in the calibrating of contact pin type contourgraph sensor dynamic following performance, increased the scope of calibrating simultaneously greatly.The measured value of this calibrating installation can directly be traceable to length standard, has characteristics such as calibration accuracy height, detection speed is fast, simple in structure, cost is low.Can be used for high-precision contact pin type contourgraph sensor check by calibrating installation, static calibrating scope reaches 10mm, and vertical resolution reaches 5nm, and positional precision reaches 5nm, and the dynamic calibration frequency is smaller or equal to 200Hz, and the dynamic calibration amplitude reaches 8 μ m.
Those skilled in the art will readily understand; the above only is preferred embodiment of the present invention; not in order to limiting the present invention, all any modifications of doing within the spirit and principles in the present invention, be equal to and replace and improvement etc., all should be included within protection scope of the present invention.
Claims (7)
1. the calibrating installation of a contact pin type contourgraph sensor static state and dynamic perfromance, it is characterized in that the displacement measuring device that comprises the static displacement generating means, is embedded in the dynamic displacement generating means on the described static displacement generating means and is used for the change in displacement signal of static displacement generating means and dynamic displacement generating means is converted into optical signalling;
Described static displacement generating means (110) comprising: base (1), right bearing seat (6), left shaft holder (40), ball-screw (7), skewback (37), x to line slideway slide block (38), first line slideway (39), second line slideway (34), z to worktable (31) and z to bracing frame (33);
Skewback (37) is fixed on x on line slideway slide block (38), and x is installed on first line slideway (39) to line slideway slide block (38), and first line slideway (39) is fixedlyed connected with base (1); Ball-screw (7) passes from the center of skewback (37) and two ends are separately fixed on right bearing seat (6) and the left shaft holder (40); Second line slideway (34) is fixed on the inclined-plane of skewback (37); Z is connected to bracing frame (33) with z to worktable (31), and z is connected with base (1) to bracing frame (33); Z between worktable (31) and second line slideway (34) by sliding friction with the x of second line slideway to movement be converted into z to the z of worktable (31) to motion.
2. calibrating installation as claimed in claim 1, it is characterized in that, ball-screw comprises screw rod (71), nut (35) and ball (73), one end of screw rod (71) is connected with the motor of outside, be fixed on the left shaft holder (40) after the other end passes from the center of skewback (37), nut (35) is fixedlyed connected with skewback (37) by flexible hinge (36).
3. calibrating installation as claimed in claim 2 is characterized in that, described skewback (37) comprising: inclined-plane, former and later two L type sidewalls of below that are positioned at the center, inclined-plane and the rear wall that connects described two L type sidewalls;
Has the threaded hole of fixedlying connected for second line slideway (34) on the inclined-plane; Have N through hole on the rear wall, through hole is positioned at the center of rear wall and is used for described screw rod (71) is passed; N-1 through hole is around a described through hole symmetric arrangement and for fixedlying connected with flexible hinge (36) in addition; Described N is the odd number more than or equal to 5;
The lower end of former and later two L type sidewalls is stretched out surface width part and is had a through hole respectively, two through holes be positioned at L type sidewall left and right directions the center and with the fore-and-aft direction of skewback on symmetric arrangement.
4. calibrating installation as claimed in claim 2 is characterized in that, the degree of tilt on the inclined-plane of described skewback is 1: 3～1: 50.
5. calibrating installation as claimed in claim 1 is characterized in that, described z comprises flexible portion and the peripheral rigid element that is positioned at the center to worktable (31); Described rigid element is connected by flexible hinge with described flexible portion; Described rigid element has two centrosymmetric rectangle boss; The outside of described rectangle boss is vertical to the back side of worktable (31) with z.
6. calibrating installation as claimed in claim 5, it is characterized in that, described dynamic displacement generating means (120) comprises piezoelectric ceramics (32), piezoelectric ceramics (32) is set in z in worktable (31), the lower surface of piezoelectric ceramics (32) and z glued joint to the rigid element of worktable (31), and the upper surface of piezoelectric ceramics (32) and z glued joint to the lower surface of the flexible portion of worktable (31).
7. calibrating installation as claimed in claim 5, it is characterized in that, described displacement measuring device (130) comprising: light path back up pad (11), be positioned at first catoptron (45) and second catoptron (27) of light path back up pad (11) both sides, diffraction grating (30), be positioned at the 3rd catoptron (10) and the 4th catoptron (24) on the two-way diffraction light light path of diffraction grating (30), prism mount pad (12), successively with the fixing quarter wave plate (22) of prism mount pad (12), first Amici prism (14) and second Amici prism (15), be installed in the quarter wave plate (25) of first Amici prism (14) one sides and the 3rd Amici prism (21) of opposite side respectively, and the photelectric receiver (13) that lays respectively at four road emergent light positions, (17), (19), (20); Described the 3rd catoptron (10) is bonding with L type supporting seat (9), and described the 4th catoptron (24) is bonding with adjustable support seat (23), described the 3rd Amici prism (21) rotation 45.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201210428665 CN102967289B (en) | 2012-11-01 | 2012-11-01 | Device for calibrating static and dynamic characteristics of contact probe type contourgraph sensor |
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201210428665 CN102967289B (en) | 2012-11-01 | 2012-11-01 | Device for calibrating static and dynamic characteristics of contact probe type contourgraph sensor |
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| CN102967289A CN102967289A (en) | 2013-03-13 |
| CN102967289B true CN102967289B (en) | 2013-08-07 |
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| CN104197825B (en) * | 2014-09-26 | 2016-10-26 | 南车株洲电机有限公司 | A kind of bearing outer ring profile tolerance detection method |
| CN109186498B (en) * | 2018-02-11 | 2024-04-30 | 上海机动车检测认证技术研究中心有限公司 | Comprehensive calibration device |
| CN108844497A (en) * | 2018-06-07 | 2018-11-20 | 东北大学 | A kind of numerical control machine slide rail mounting surface linearity testing apparatus and method |
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| EP2219010A1 (en) * | 2009-02-11 | 2010-08-18 | Leica Geosystems AG | Coordinate measuring machine (CMM) and method of compensating errors in a CMM |
| CN101813499B (en) * | 2010-03-30 | 2011-06-08 | 上海市计量测试技术研究院 | Method and device for calibrating three-dimensional micro tactile sensor |
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