CN102566076B - Multifocal light beam generation apparatus and multifocal confocal scan microscope - Google Patents
Multifocal light beam generation apparatus and multifocal confocal scan microscope Download PDFInfo
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- CN102566076B CN102566076B CN201210030310.9A CN201210030310A CN102566076B CN 102566076 B CN102566076 B CN 102566076B CN 201210030310 A CN201210030310 A CN 201210030310A CN 102566076 B CN102566076 B CN 102566076B
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Abstract
The invention discloses a multifocal light beam generation apparatus and a multifocal confocal scan microscope. The multifocal light beam generation apparatus comprises a light source, a polarizer and a polarization filtering optical path. The polarization filtering optical path is provided with a first polarizing beam splitting mirror at an optical path after light source emission light beams pass through the polarizer, and after the light beams pass through the first polarizing beam splitting mirror, a part of the beams is reflected, and a part of the beams is transmitted; on a reflection optical path, a first reflecting mirror, a first filter plate and a second polarizing beam splitting mirror are arranged in order; on a transmission optical path, a second filter plate, a second reflecting mirror and the second polarizing beam splitting mirror are arranged in order, and a reflection light beam and a transmission light beam are joined at the second polarizing beam splitting mirror to form a light beam. After focusing of the light beams which are generated through the multifocal light beam generation apparatus, an obtained focus has the characteristics of high uniformity, small dimension and circular symmetry distribution of a shape. According to the scan microscope, a fast imaging speed under the premise of a high resolution can be ensured, or a higher resolution is provided with the same imaging speed.
Description
Technical field
The invention belongs to optical technical field, relate to a kind of beam generated device, relate in particular to a kind of multifocal some beam generated device; Meanwhile, the invention still further relates to a kind of multifocal some confocal scan microscope that comprises above-mentioned multifocal some beam generated device.
Background technology
Confocal microscopy is to provide the prior art of high-definition picture of one or more aspects of object, the light beam that pointolite sends focuses on body surface through object lens, light beam after object reflection or transmission again line focus lens focus to pin hole is laggard, enter photodetector.
In order to improve the image taking speed of laser scanning confocal microscopy, conventionally adopt multifocal some light beam to form a plurality of focuses that there is diffraction limit quality and can disperse to focus on excited sample simultaneously.Multifocal spot scan microtechnic and the single beam excitation scanning microtechnic key distinction are that multifocal spot scan microtechnic needs a multifocal some beam generated device and multifocal some light beam detection device, and existing multifocal some microtechnic mainly adopts the methods such as microlens array, beam splitter and diffraction optical element to realize the light splitting of laser beam and produce a plurality of focuses.Above-mentioned multifocal some microtechnic utilizes the method for multi-beam parallel excited sample to improve laser cofocus scanning image taking speed, to realize the quick Excited Fluorescence Combined micro-imaging of three-dimensional of sample.
For the focal spot of realizing after multifocal some light beam line focus of the confocal surface sweeping microtechnic of multifocal point, should meet following three conditions: first, each focus should have highland homogeneity as far as possible, the intensity that is each focus should be consistent, and object is the error during for fear of Image Reconstruction; Secondly, consider imaging resolution, the size of each focus should be as far as possible little; Finally, the shape of each focus is should be as far as possible symmetrical for circle, and object is that the resolution in order to ensure all directions on focal plane is identical.
Yet existing multifocal some microtechnic all cannot meet above-mentioned three conditions simultaneously.
Summary of the invention
Technical matters to be solved by this invention is: a kind of multifocal some beam generated device is provided, can presents the light beam of a plurality of focuses after line focus.
In addition, the present invention also provides a kind of multifocal some confocal scan microscope, can guarantee that under high-resolution prerequisite, image taking speed is fast.
For solving the problems of the technologies described above, the present invention adopts following technical scheme:
A multifocal some beam generated device, comprises light source, polarizer and polarization filtering light path;
Described polarization filtering light path is provided with the first polarization spectroscope in the light path after polarizer at light source outgoing beam, light beam reflects through the first polarization spectroscope rear portion, and transmission occurs a part;
On reflected light path, be disposed with the first catoptron, the first filter plate and the second polarization spectroscope;
On transmitted light path, be disposed with the second filter plate, the second catoptron and the second polarization spectroscope, folded light beam and transmitted light beam merge into a branch of light beam at the second polarization spectroscope place.
As a preferred embodiment of the present invention, between described polarizer and the first polarization spectroscope, be provided with annular beam generation device, along axisymmetric the first external reflection type circular conical surface catoptron, the first reflection type circular conical surface catoptron, the second reflection type circular conical surface catoptron and the second external reflection type circular conical surface catoptron of being provided with of light path.
As a preferred embodiment of the present invention, the amplitude filtered function of described the first filter plate is
the amplitude filtered function of described the second filter plate is
wherein,
for the position angle on beam cross-section, n is positive integer, and m is greater than 0 integer.
As a preferred embodiment of the present invention, wherein, n is positive odd number.
As a preferred embodiment of the present invention, wherein, n is positive odd number, and m is greater than 1 integer.
As a preferred embodiment of the present invention, wherein, n is positive even numbers, m=1.
A multifocal some confocal scan microscope, described microscope comprises:
Multifocal above-mentioned beam generated device;
Focus regulation assembly, is configured to regulate and control multifocal locus;
Sample assembly, for keeping the sample through the beam flying of multifocal some beam generated device generation;
Photoelectric detector, is configured to survey the light being reflected by described sample;
Control Component, for controlling above-mentioned each assembly.
The multifocal some beam generated device that the present invention proposes and the beneficial effect of multifocal some confocal scan microscope are: the focus obtaining after the light beam line focus producing by multifocal some beam generated device has high uniformity (intensity is consistent) simultaneously, size is little and shape is the symmetrical feature of circle.The multifocal some confocal scan microscope that comprises multifocal some beam generated device has the fast feature of image taking speed under the high-resolution prerequisite of assurance, or under same image taking speed, has more high-resolution feature.
Accompanying drawing explanation
Fig. 1 is multifocal some beam generated device schematic diagram of the embodiment of the present invention.
Fig. 2 is the annular beam generation device schematic diagram of the embodiment of the present invention.
Fig. 3 is multifocal some confocal scan microscope schematic diagram of the embodiment of the present invention.
Embodiment
Below in conjunction with accompanying drawing, describe the preferred embodiments of the present invention in detail.
Embodiment mono-
Fig. 1 is multifocal some beam generated device schematic diagram of the embodiment of the present invention, in light source 1 light beam exit direction, be disposed with collimator and extender mirror 2, polaroid 3 and the first polarization spectroscope 5, light beam collimates by collimator and extender mirror 2 from laser instrument 1 outgoing, after expanding, incide polaroid 3, incident beam becomes linearly polarized light after polaroid 3 modulation, linearly polarized light incides the first polarization spectroscope 5, light beam is divided into folded light beam and transmitted light beam after the first polarization spectroscope 5, folded light beam and transmitted light beam are two bundle orhtogonal linear polarizaiton light, on transmitted light path, be disposed with the first filter plate 6, the first plane mirror 7, transmitted light beam enters first face catoptron 7 after the first filter plate 6 filtering, after the first plane mirror 7 reflections, incide the second polarization spectroscope 10 again, on reflected light path, be provided with the first plane mirror 8, folded light beam incides the second filter plate 9 after the first plane mirror 8 reflections, after the second filter plate 9 filtering, incide on the second polarization spectroscope 10, the folded light beam after being modulated respectively by different filter plates and transmitted light beam merge into a branch of light beam at the second polarization spectroscope 10 places again.Wherein, the filter function of the first filter plate 6 and the second filter plate 9 is respectively
with
for the position angle on beam cross-section.
In the present embodiment, light source 1 is He-Ni laser instrument, and wavelength is 632.8nm.Focus number situation after this multifocal some light beam line focus is described as follows: the n in filter function is positive odd number, and when m is integer and m > 1, focus number is 2 (m-1); When n is positive odd number, when m is integer and m < 0, focus number is (2|m|+1); The situation that is positive even numbers for n, can obtain the bifocus of high-contrast while only having m=1, other m values cannot obtain multifocal point.
In above-described embodiment, between polaroid 3 and the first polarization spectroscope 5, be provided with an annular beam generator 4, light beam becomes annular beam after annular beam generator 4, can improve the separation degree between multifocal each focus and improve multifocal performance, the schematic diagram of annular beam generator 4 as shown in Figure 2, light beam incides annular beam generator 4 from left to right, along the axisymmetric first external reflection type circular conical surface catoptron 4.1 that is provided with of light path, the first reflection type circular conical surface catoptron 4.2, the second reflection type circular conical surface catoptron 4.3 and the second external reflection type circular conical surface catoptron 4.4, the reflection conical surface of the reflection conical surface of the first external reflection type circular conical surface catoptron 4.1 and the first reflection type circular conical surface catoptron 4.2 parallel and with optical axis angle at 45 °, the reflection conical surface of the reflection conical surface of the second external reflection type circular conical surface catoptron 4.3 and the second reflection type circular conical surface catoptron 4.4 parallel and with optical axis angle at 45 °.
Fig. 3 is the multifocal some confocal scan microscope schematic diagram that comprises multifocal some beam generated device shown in Fig. 1, on multifocal some light beam emitting light path of multifocal some beam generated device generation, be provided with focus regulation assembly 11, multifocal some light beam is through 11 reflections of focus regulation assembly, after focusing, incide sample assembly 12, the sample of sample assembly 12 is positioned on the focal plane of multifocal some light beam, light beam incides photoelectric sensor assembly 13 after sample reflection, and by 13 pairs of sample reflected light detection imagings of photoelectric sensor assembly, focus regulation assembly 11, sample assembly 12 and photoelectric sensor assembly 13 all have Control Component 14 to control.Wherein said focus regulation assembly 11, sample assembly 12, photoelectric sensor assembly 13 and Control Component 14 are prior art, after multifocal some light beam produces via multifocal some beam generated device, the scanning of sample, imaging and control all can be passed through existing techniques in realizing.
In sum, the focus obtaining after the light beam line focus producing by multifocal some beam generated device has high uniformity (intensity is consistent) simultaneously, size is little and shape is the symmetrical feature of circle.The multifocal some confocal scan microscope that comprises multifocal some beam generated device has the fast feature of image taking speed under the high-resolution prerequisite of assurance, or under same image taking speed, has more high-resolution feature.
Here description of the invention and application is illustrative, not wants by scope restriction of the present invention in the above-described embodiments.Here the distortion of disclosed embodiment and change is possible, and for those those of ordinary skill in the art, the various parts of the replacement of embodiment and equivalence are known.Those skilled in the art are noted that in the situation that not departing from spirit of the present invention or essential characteristic, and the present invention can be with other form, structure, layout, ratio, and realizes with other assembly, material and parts.In the situation that not departing from the scope of the invention and spirit, can carry out other distortion and change to disclosed embodiment here.
Claims (3)
1. a multifocal some beam generated device, comprises light source, polarizer and polarization filtering light path; It is characterized in that:
Described polarization filtering light path is provided with the first polarization spectroscope in the light path after polarizer at light source outgoing beam, light beam reflects through the first polarization spectroscope rear portion, and transmission occurs a part;
On reflected light path, be disposed with the first catoptron, the first filter plate and the second polarization spectroscope;
On transmitted light path, be disposed with the second filter plate, the second catoptron and the second polarization spectroscope, folded light beam and transmitted light beam merge into a branch of light beam at the second polarization spectroscope place;
The amplitude filtered function of described the first filter plate is cos
n 
; The amplitude filtered function of described the second filter plate is sin
n 
, wherein,
for the position angle on beam cross-section, n is positive integer, and m is greater than 0 integer; Wherein, when n is positive odd number, m is greater than 1 integer; When n is positive even numbers, m=1.
2. multifocal some beam generated device according to claim 1, is characterized in that:
Between described polarizer and the first polarization spectroscope, be provided with annular beam generation device, along axisymmetric the first external reflection type circular conical surface catoptron, the first reflection type circular conical surface catoptron, the second reflection type circular conical surface catoptron and the second external reflection type circular conical surface catoptron of being provided with of light path.
3. a multifocal some confocal scan microscope, is characterized in that, described microscope comprises:
Multifocal some beam generated device as described in one of claim 1 to 2;
Focus regulation assembly, is configured to regulate and control multifocal locus;
Sample assembly, for keeping the sample through the beam flying of multifocal some beam generated device generation;
Photoelectric detector, is configured to survey the light being reflected by described sample;
Control Component, for controlling above-mentioned each assembly.
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| CN103336368A (en) * | 2013-06-17 | 2013-10-02 | 中国航空工业集团公司北京航空制造工程研究所 | Energy regulation and control device for ring laser beams |
| DE102016119727A1 (en) * | 2016-10-17 | 2018-04-19 | Carl Zeiss Microscopy Gmbh | Device for beam manipulation for a scanning microscope and microscope |
| CN106950706A (en) * | 2017-04-26 | 2017-07-14 | 深圳迈进自动化科技有限公司 | A kind of light path device for being used to produce multiple depths of focus |
| CN108982455B (en) * | 2018-07-31 | 2020-08-18 | 浙江大学 | Multi-focus light section fluorescence microscopic imaging method and device |
| CN108802989B (en) * | 2018-08-17 | 2020-06-02 | 华中科技大学 | Parallel multizone image device |
| CN112130330A (en) * | 2020-10-28 | 2020-12-25 | 南京爱奇艺智能科技有限公司 | Bifocal and multifocal flat display system and VR or AR equipment using same |
| CN116540504B (en) * | 2023-07-04 | 2024-04-26 | 之江实验室 | Variable wavelength laser direct-writing lithography system based on continuous spectrum light source and application |
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