CN102538650A - Nanoscale micro-displacement measurement device - Google Patents
Nanoscale micro-displacement measurement device Download PDFInfo
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- CN102538650A CN102538650A CN2010106110806A CN201010611080A CN102538650A CN 102538650 A CN102538650 A CN 102538650A CN 2010106110806 A CN2010106110806 A CN 2010106110806A CN 201010611080 A CN201010611080 A CN 201010611080A CN 102538650 A CN102538650 A CN 102538650A
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Abstract
The invention relates to a nanoscale micro-displacement measurement device. The nanoscale micro-displacement measurement device comprises a time sequence and charging circuit, a sensing circuit, an integration and amplification circuit, a differential sampling circuit and a filter circuit which are sequentially connected with each other, wherein the time sequence and charging circuit produces charging impulses required by the sensing circuit and time sequence signals required by the differential sampling circuit; the sensing circuit receives a micro-displacement signal and outputs the corresponding micro current signal to the integration and amplification circuit; the integration and amplification circuit receives the micro current signal and outputs a voltage signal to the differential sampling circuit; and the differential sampling circuit performs differential processing on the voltage signal input by the integration and amplification circuit; and the filter circuit performs filtering processing on the signal subjected to differential processing to obtain a final detection signal. The nanoscale micro-displacement measurement can be realized by a small measurement mechanism, and the nanoscale micro-displacement measurement device is simple in structure, low in cost, stable in performance and high in sensitivity.
Description
Technical field
The present invention relates to the accurate displacement measurement mechanism in the nanometer micropositioner closed-loop control passage, a kind of specifically nanoscale micro-displacement measurement device.
Background technology
In MEMS (MEMS, Micro-Electro-Mechanical Systems) and the processing of IC ultraprecises such as (integrated circuit), the nanoscale precision measurement system is a key equipment wherein; At present; Measurement to nano-grade displacement mainly relies on devices such as atomic force microscope, laser interferometer and linear grating chi to realize, these apparatus structures are complicated, and system is huge; Be fit to carry out the measurement of large stroke and high precision, and be not suitable for little stroke, high-precision nanoscale micro-displacement are measured.
Summary of the invention
Complicated to the surface nanometer-displacement apparatus structure that exists in the prior art; Weak points such as system is huge, it is little that the technical matters that the present invention will solve provides a kind of volume of carrying, and precision is high; Be fit to little stroke the sensing circuit of high-precision measurement nanoscale micro-displacement.
For solving the problems of the technologies described above, the technical scheme that the present invention adopts is:
The present invention measures nanoscale micro-displacement measurement device and comprises sequential and charging circuit, sensing circuit, integration and amplifying circuit, difference sample circuit and filtering circuit; Foregoing circuit is electrically connected in proper order; Wherein: sequential and charging circuit produce required charging pulse and the required clock signal of difference sample circuit of sensing circuit; Sensing circuit receives the micro-displacement signal, exports corresponding Weak current signal to integration and amplifying circuit; Integration and amplifying circuit receive the Weak current signal, output voltage signal to the difference sample circuit; The difference sample circuit carries out difference processing to the voltage signal of integration and amplifying circuit input; Filtering circuit to carrying out Filtering Processing through signal after the difference processing, gets detection signal to the end.
Said sensing circuit comprises timing unit and acquisition of signal unit; Wherein sequential circuit produce the high-frequency drive pulse through follow and reverse process after with the acquisition of signal unit in the first terminal and the first terminal of reference capacitance of measurement capacitive transducer be connected; Second terminal of measuring capacitive transducer is exported the Weak current signal with after second terminal of reference capacitance directly links to each other.
Said driving pulse is produced by CPLD CS element.
Discharging and recharging by high frequency square wave of said measurement capacitive transducer and reference capacitance drives.
Control clock in the said difference sample circuit is provided by sequential circuit, 90 ° of phase phasic differences, and the differential signal of generation is done subtraction by subtraction circuit and is amplified.
The present invention has following beneficial effect and advantage:
1. the present invention can realize the nano level measurement of micro-displacement through less measuring mechanism; It is simple in structure to compare measurement mechanisms such as laser interferometer, linear grating chi; Cost is low, and with respect to bridge-type, differential capacitance location circuit, there is not instability problem in the present invention; Highly sensitive, can realize less than the 1mm stroke, be superior to the measuring accuracy of 5nm.
Description of drawings
Fig. 1 is a structured flowchart of the present invention;
Fig. 2 is the sequential and the charging circuit of invention;
Fig. 3 is the sensing circuit of invention;
Fig. 4 is the integration and the amplifying circuit of invention;
Fig. 5 is the difference sample circuit of invention;
Fig. 6 is the filtering circuit of invention.
Embodiment
As shown in Figure 1; The present invention measures nanoscale micro-displacement measurement device and comprises sensing circuit, integration and amplifying circuit, difference sample circuit and filtering circuit; Foregoing circuit is electrically connected in proper order; Wherein: sensing circuit, receive the micro-displacement signal, export corresponding Weak current signal to integration and amplifying circuit; Integration and amplifying circuit receive the Weak current signal, output voltage signal to the difference sample circuit; The difference sample circuit carries out difference processing to the voltage signal of integration and amplifying circuit input; Filtering circuit to carrying out Filtering Processing through signal after the difference processing, gets detection signal to the end.
Said sensing circuit comprises timing unit and acquisition of signal unit, wherein sequential circuit produce the high-frequency drive pulse through follow and reverse process after with the acquisition of signal unit in measurement capacitive transducer C
sThe first terminal and reference capacitance C
rThe first terminal connect, measure capacitive transducer C
sSecond terminal and reference capacitance C
rSecond terminal directly link to each other after, output Weak current signal is measured capacitive transducer C
sWith reference capacitance C
rDischarge and recharge by high frequency square wave and drive; Control clock in the said difference sample circuit differs 90 ° of phase places.Sensing circuit includes
In Fig. 1, apparatus of the present invention comprise sensing circuit, integration and amplifying circuit, difference sample circuit and filtering circuit, and the input end of sensing circuit receives the micro-displacement signal, through measuring capacitive transducer C
sBecome electric current after the detection and send integration and amplifying circuit to; Pass through the integration and the amplification of integration and amplifying circuit again; The voltage signal that is converted into amplification sends the difference sample circuit to; The difference sample circuit passes through the sampling of specific time sequence, send filtering circuit after voltage signal is extracted, and it is final output voltage signal that signal is handled the back through filtering circuit.
Circuit shown in Figure 2 is sequential and charging circuit, and CPLD is the high frequency charging signals driving sensing circuit work that benchmark produces high frequency clock signal CS circuit generations+10V and-10V with active crystal oscillator.CPLD produces the two-way clock signal and offers the difference sample circuit simultaneously.
Circuit shown in Figure 3 is sensing circuit (also being the micro-displacement sensing circuit); The charging pulse process that charging circuit produces two passages is up and down charged to electric capacity, and in upper channel, charging pulse is through resistance R 1; The follow circuit that constitutes with UA links to each other, and is capacitor C through resistance R 4
rCharging is through regulating R4 and C
rSize can control time constant for charging and discharging; In lower channel, charging pulse is through resistance R 2, R3, and the anti-phase follow circuit that constitutes with UB links to each other, and is capacitor C through resistance R 5
sCharging is through regulating R4 and C
rSize can control time constant for charging and discharging.The time constant that discharges and recharges of lower channel equates on the original state, is in to discharge and recharge equilibrium state, and when unit under test generation micro-displacement, the capacitive transducer capacitance changes, under the driving of charging pulse, and reference capacitance C
rWith capacitive transducer C
sThe balance that discharges and recharges broken, will have weak current and flow through from Current end.
Circuit shown in Figure 4 is integration and amplifying circuit; Be the electric current that sensing circuit is exported to be carried out Integral Transformation through integrating capacitor Ci become voltage signal Signal; Very big with integrating capacitor Ci parallel resistor value; Can ignore, electric current is amplified by the amplifying circuit of back level through becoming voltage signal behind the integration.
Circuit shown in Figure 5 is the difference sample circuit; The voltage signal Signal of integration and amplifying circuit output becomes two-way output through the difference sample circuit; Export to the positive-negative input end of amplifier respectively, handle the back output voltage signal through amplifier and give filtering circuit.The sampling of two paths of signals keeps by clock control end A-strode and B-strode control, and A-strode and B-strode relative time clock signal phase difference are 90 °.The sampling holding signal inputs to amplifying circuit by the control of Clock clock signal.
Circuit shown in Figure 6 is the fertile scholar's second-order filter circuit of Bart, and filtering circuit carries out just having obtained after the filtering voltage signal that finally converts to the voltage signal of prime, and the size of this voltage signal has been reacted the situation of change of micro-displacement.
Claims (5)
1. measure nanoscale micro-displacement measurement device for one kind, it is characterized in that: comprise sequential and charging circuit, sensing circuit, integration and amplifying circuit, difference sample circuit and filtering circuit, foregoing circuit is electrically connected in proper order, wherein:
Sequential and charging circuit produce required charging pulse and the required clock signal of difference sample circuit of sensing circuit;
Sensing circuit receives the micro-displacement signal, exports corresponding Weak current signal to integration and amplifying circuit;
Integration and amplifying circuit receive the Weak current signal, output voltage signal to the difference sample circuit;
The difference sample circuit carries out difference processing to the voltage signal of integration and amplifying circuit input;
Filtering circuit to carrying out Filtering Processing through signal after the difference processing, gets detection signal to the end.
2. by the described measurement nanoscale of claim 1 micro-displacement measurement device; It is characterized in that: said sensing circuit comprises timing unit and acquisition of signal unit, wherein sequential circuit produce the high-frequency drive pulse through follow and reverse process after with the acquisition of signal unit in measurement capacitive transducer (C
s) the first terminal and reference capacitance (C
r) the first terminal connect, measure capacitive transducer (C
s) second terminal and reference capacitance (C
r) second terminal directly link to each other after, output Weak current signal.
3. by the described measurement nanoscale of claim 2 micro-displacement measurement device, it is characterized in that: said driving pulse is produced by CPLD CS element.
4. by the described measurement nanoscale of claim 1 micro-displacement measurement device, it is characterized in that: said measurement capacitive transducer (C
s) and reference capacitance (C
r) discharge and recharge by high frequency square wave and drive.
5. by the described measurement nanoscale of claim 1 micro-displacement measurement device, it is characterized in that: the control clock in the said difference sample circuit is provided by sequential circuit, 90 ° of phase phasic differences, and the differential signal of generation is done subtraction by subtraction circuit and is amplified.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010106110806A CN102538650A (en) | 2010-12-29 | 2010-12-29 | Nanoscale micro-displacement measurement device |
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| CN2010106110806A CN102538650A (en) | 2010-12-29 | 2010-12-29 | Nanoscale micro-displacement measurement device |
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| CN102538650A true CN102538650A (en) | 2012-07-04 |
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| CN2010106110806A Pending CN102538650A (en) | 2010-12-29 | 2010-12-29 | Nanoscale micro-displacement measurement device |
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105446366A (en) * | 2015-12-29 | 2016-03-30 | 武汉嘉铭激光有限公司 | Position control system and method based on capacitance-type sensor |
| CN108572147A (en) * | 2018-04-25 | 2018-09-25 | 中国科学院南海海洋研究所 | Optic probe and optical measuring system |
| CN109520403A (en) * | 2017-09-20 | 2019-03-26 | 上海微电子装备（集团）股份有限公司 | Point of capacitance transducer measuring circuit and method |
| CN109975819A (en) * | 2017-12-28 | 2019-07-05 | 沈阳新松机器人自动化股份有限公司 | A kind of optimization method of cost laser measurement data |
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| US6292001B1 (en) * | 1998-11-13 | 2001-09-18 | Mitutoyo Corporation | Capacitance-type displacement measuring apparatus |
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2010
- 2010-12-29 CN CN2010106110806A patent/CN102538650A/en active Pending
Patent Citations (5)
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| CN2165415Y (en) * | 1993-07-17 | 1994-05-18 | 张湘平 | Sensor |
| US6292001B1 (en) * | 1998-11-13 | 2001-09-18 | Mitutoyo Corporation | Capacitance-type displacement measuring apparatus |
| CN2854506Y (en) * | 2005-11-24 | 2007-01-03 | 南通大学 | Electric balance differential capacitance minimeter |
| CN1866142A (en) * | 2006-04-29 | 2006-11-22 | 北京工业大学 | Experiment apparatus for magnetic levitation ball control system |
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Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105446366A (en) * | 2015-12-29 | 2016-03-30 | 武汉嘉铭激光有限公司 | Position control system and method based on capacitance-type sensor |
| CN105446366B (en) * | 2015-12-29 | 2018-03-06 | 武汉嘉铭激光有限公司 | A kind of position control system and its control method based on capacitance type sensor |
| CN109520403A (en) * | 2017-09-20 | 2019-03-26 | 上海微电子装备（集团）股份有限公司 | Point of capacitance transducer measuring circuit and method |
| CN109975819A (en) * | 2017-12-28 | 2019-07-05 | 沈阳新松机器人自动化股份有限公司 | A kind of optimization method of cost laser measurement data |
| CN108572147A (en) * | 2018-04-25 | 2018-09-25 | 中国科学院南海海洋研究所 | Optic probe and optical measuring system |
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Application publication date: 20120704 |