CN102527450A - Micro-fluidic chip capable of measuring fluid properties and working method of micro-fluidic chip - Google Patents
Micro-fluidic chip capable of measuring fluid properties and working method of micro-fluidic chip Download PDFInfo
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- CN102527450A CN102527450A CN2010106158951A CN201010615895A CN102527450A CN 102527450 A CN102527450 A CN 102527450A CN 2010106158951 A CN2010106158951 A CN 2010106158951A CN 201010615895 A CN201010615895 A CN 201010615895A CN 102527450 A CN102527450 A CN 102527450A
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Abstract
The invention relates to a micro-fluidic chip capable of measuring fluid properties, characterized by comprising a micro-tube provided with a cantilever, a drive electrode, an induction electrode and a substrate, wherein the micro-tube is provided with an inner passage, the micro-tube extends from the substrate, and an inlet and an outlet of the micro-tube are arranged on the substrate; the cantilever is positioned at the part of the micro-tube opposite to the substrate and connected on the substrate; the drive electrode is connected with the cantilever; the induction electrode is arranged on the surface of the substrate and connected with the micro-tube, and the fluid properties are determined by vibration deviation of the micro-tube; and the cantilever has a phase difference of 180 DEG with the micro-tube. The working method of the micro-fluidic chip capable of measuring fluid properties comprises the steps: the drive electrode drives the cantilever on the micro-tube to vibrate so that the vibration of the cantilever is close to that of the micro-tube or a sympathetic vibration is realized, and the induction electrode on the substrate determines fluid properties through inducting the deviation of the micro-tube relative to the substrate. According to the micro-fluidic chip capable of measuring fluid properties, disclosed by the invention, the micro-tube provided with a resonant structure is additionally provided, and the micro-fluidic chip capable of determining at least one fluid property is designed and realized, and has the advantages of more excellent performance and less mechanic loss.
Description
(1) technical field:
The present invention relates to the structure and the application of micro-fluidic chip, especially a kind of micro-fluidic chip and the method for work thereof that can measure fluid properties.
(2) background technology:
At present, along with the development and the exploitation of micro-fluidic chip, its application not only is confined to biochemistry, biomedical sector, and it also is penetrated into fields such as clinical, medical, food and environmental health monitoring and surveilliance gradually.Micro-fluidic chip is expected to replace the function of Routine Test Lab, and integrated and microminiaturized through analytic process finally realized " individualizing " and " family expensesization " of micro-fluidic chip, and therefore, the practicability of its Application Research is a matter of time just.Now, abroad some well-known universities and research institution are actively developing the research-and-development activity of integrated microfluidic chip.Manage native university, Canadian University of Alberta, U.S. Lao Lunsi (Lawrence livemore) National Laboratory etc. and some other country like Harvard University, the Massachusetts Institute of Technology, the University of Pennsylvania, Stanford University, University of California Berkeley, University of Maryland, the state university of Louisiana, Michigan State University, London kingdom, also carried out the research work in this field like universities such as Japan, Korea S, Australia, Germany and research institution.
See that from present development level microfluidic analysis chip has been broken through the main difficulty of its early stage of development on process technology and basic fluidics, getting into one and carrying out more deep basic research, extensively the transitional period of expanding application field and degree of depth industrialization.At present, micro-fluidic chip has been widely used in the every field, and it is micro-total analysis system (one of requisite parts among the μ-TAS).Traditional micro-fluidic chip has begun to be applied to numerous areas such as life science, agricultural, clinical medicine, medical jurisprudence, materia medica, preventive medicine, environmental science, military affairs through development in recent years.The application of micro-fluidic chip constantly enlarges, and various application improve constantly the requirement of micro-fluidic chip.Therefore, the function of micro-fluidic chip is strengthened and improved is necessary, also is inexorable trend.
Though just all in all; China the progress in this field with compared big gap abroad; But should see that also micro-fluidic chip also has a lot of problems to fail to be well solved in the character context of detection (like quality, density, relative density, flow velocity etc.) for fluid; We need further investigate and face the challenge, and this is again our opportunity simultaneously.
(3) summary of the invention:
The object of the present invention is to provide a kind of micro-fluidic chip and the method for work thereof that can measure fluid properties, it can solve the deficiency of prior art, is a kind of more excellent performance, the micro-fluidic chip that mechanical loss is littler.
Technical scheme of the present invention: a kind of micro-fluidic chip that can measure fluid properties is characterized in that it is made up of the microtubule that cantilever is arranged, drive electrode, induction electrode and substrate; Said microtubule has the inner passage, and microtubule extends from substrate, and its outlet and inlet are in substrate; Said cantilever is placed in the part of the relative substrate of microtubule and is connected on the substrate; Said drive electrode is connected with cantilever; Said induction electrode is installed in substrate surface and links to each other with microtubule, confirms the character of fluid through the skew of microtubule vibration; Said cantilever and microtubule vibration have 180 ° of phase differences.
Above-mentioned said microtubule be shaped as C type, U type or linear pattern.
Above-mentioned said microtubule is a micro-processing technology manufacturing, and it is of a size of length 0.5mm, sectional area 250 μ m
2
A kind of above-mentioned method of work that can measure the micro-fluidic chip of fluid properties is characterized in that it may further comprise the steps:
(1) when fluid flows through the microtubule that the inner passage is arranged, drive electrode drives the cantilever vibration on the microtubule, makes itself and microtubule approaching or reach resonance;
(2) induction electrode on substrate is confirmed the character of fluid with respect to the deviation of substrate through the induction microtubule;
(3) it is relevant that drive electrode is measured the skew of the cantilever that flow rate of fluid and induction electrode sense, and the vibration frequency of the microtubule that the density of fluid is then sensed with induction electrode is relevant.
Superiority of the present invention: 1, the present invention adds the microtubule with resonant structure, has designed and Implemented the micro-fluidic chip that can confirm at least one fluid properties, its more excellent performance, the micro-fluidic chip that mechanical loss is littler; 2, microtubule does not have to be connected so that can make microtubule do the vibration from usual state to substrate with substrate; 3, the micro-fluidic chip that can measure fluid properties of the present invention's proposition all obtains using in a lot of fields; For example, medicine injection and anesthesia in the medical system, propellant transfer system in the energy and the fuel system and fuel cell; And the consumer goods comprise refractometer, ultrasonic drilling machine electric transducer etc.
(4) description of drawings:
Fig. 1 is the structural representation of C type for the related a kind of microtubule that can measure the micro-fluidic chip of fluid properties of the present invention.
Fig. 2 is linear structural representation for the related a kind of microtubule that can measure the micro-fluidic chip of fluid properties of the present invention.
Wherein, microtubule 1, substrate 2, drive electrode 3, induction electrode 4, cantilever 5.
(5) specific embodiment:
Embodiment 1: a kind of micro-fluidic chip (see figure 1) that can measure fluid properties is characterized in that it is made up of the microtubule that cantilever 5 is arranged 1, drive electrode 3, induction electrode 4 and substrate 2; Said microtubule 1 has the inner passage, and microtubule 1 extends from substrate 2, and its outlet and inlet are in substrate 2; Said cantilever 5 is placed in the part of the relative substrate of microtubule and is connected on the substrate; Said drive electrode 3 is connected with cantilever 5; Said induction electrode 4 is installed in substrate surface and links to each other with microtubule 1, confirms the character of fluid through the skew of microtubule 1 vibration; Said outstanding 5 arms and microtubule 1 vibration have 180 ° of phase differences.
The C type that is shaped as of above-mentioned said microtubule 1.(see figure 1)
Above-mentioned said microtubule 1 is a micro-processing technology manufacturing, and it is of a size of length 0.5mm, sectional area 250 μ m
2
A kind of method of work that can measure the micro-fluidic chip of fluid properties is characterized in that it may further comprise the steps:
(1) when fluid flows through the microtubule 1 that the inner passage is arranged, drive electrode 3 drives cantilever 5 vibrations on the microtubules, makes itself and microtubule 1 approaching or reach resonance;
(2) induction electrode on substrate 4 is confirmed the character of fluid with respect to the deviation of substrate through induction microtubule 1;
(3) it is relevant that drive electrode 3 is measured the skew of the cantilever 5 that flow rate of fluid and induction electrode 4 sense, and the vibration frequency of the microtubule 1 that the density of fluid is then sensed with induction electrode 4 is relevant.
Embodiment 2: a kind of micro-fluidic chip (see figure 2) that can measure fluid properties is characterized in that it is made up of the microtubule that cantilever 5 is arranged 1, drive electrode 3, induction electrode 4 and substrate 2; Said microtubule 1 has the inner passage, and microtubule 1 extends from substrate 2, and its outlet and inlet are in substrate 2; Said cantilever 5 is placed in the part of the relative substrate of microtubule and is connected on the substrate; Said drive electrode 3 is connected with cantilever 5; Said induction electrode 4 is installed in substrate surface and links to each other with microtubule 1, confirms the character of fluid through the skew of microtubule 1 vibration; Said outstanding 5 arms and microtubule 1 vibration have 180 ° of phase differences.
Above-mentioned said microtubule 1 be shaped as linear pattern.(see figure 2)
Above-mentioned said microtubule 1 is a micro-processing technology manufacturing, and it is of a size of length 0.5mm, sectional area 250 μ m
2
A kind of method of work that can measure the micro-fluidic chip of fluid properties is characterized in that it may further comprise the steps:
(1) when fluid flows through the microtubule 1 that the inner passage is arranged, drive electrode 3 drives cantilever 5 vibrations on the microtubules, makes itself and microtubule 1 approaching or reach resonance;
(2) induction electrode on substrate 4 is confirmed the character of fluid with respect to the deviation of substrate through induction microtubule 1;
(3) it is relevant that drive electrode 3 is measured the skew of the cantilever 5 that flow rate of fluid and induction electrode 4 sense, and the vibration frequency of the microtubule 1 that the density of fluid is then sensed with induction electrode 4 is relevant.
Claims (4)
1. the micro-fluidic chip that can measure fluid properties is characterized in that it is made up of the microtubule that cantilever is arranged, drive electrode, induction electrode and substrate; Said microtubule has the inner passage, and microtubule extends from substrate, and its outlet and inlet are in substrate; Said cantilever is placed in the part of the relative substrate of microtubule and is connected on the substrate; Said drive electrode is connected with cantilever; Said induction electrode is installed in substrate surface and links to each other with microtubule, confirms the character of fluid through the skew of microtubule vibration; Said cantilever and microtubule vibration have 180 ° of phase differences.
2. according to the said a kind of micro-fluidic chip that can measure fluid properties of claim 1, what it is characterized in that said microtubule is shaped as C type, U type or linear pattern.
3. according to claim 1 or the 2 said a kind of micro-fluidic chips that can measure fluid properties, it is characterized in that said microtubule is a micro-processing technology manufacturing, it is of a size of length 0.5mm, sectional area 250 μ m
2
4. the said method of work that can measure the micro-fluidic chip of fluid properties of claim 1 is characterized in that it may further comprise the steps:
(1) when fluid flows through the microtubule that the inner passage is arranged, drive electrode drives the cantilever vibration on the microtubule, makes itself and microtubule approaching or reach resonance;
(2) induction electrode on substrate is confirmed the character of fluid with respect to the deviation of substrate through the induction microtubule;
(3) it is relevant that drive electrode is measured the skew of the cantilever that flow rate of fluid and induction electrode sense, and the vibration frequency of the microtubule that the density of fluid is then sensed with induction electrode is relevant.
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Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104668003A (en) * | 2015-01-20 | 2015-06-03 | 天津农学院 | Micro-fluidic chip |
| CN105665042A (en) * | 2015-01-20 | 2016-06-15 | 天津农学院 | Micro-fluidic chip use method |
| CN112649076A (en) * | 2020-12-21 | 2021-04-13 | 合肥京东方显示技术有限公司 | Standard flow element, preparation method thereof and standard flow system |
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| US6477901B1 (en) * | 1999-12-21 | 2002-11-12 | Integrated Sensing Systems, Inc. | Micromachined fluidic apparatus |
| JP3689738B2 (en) * | 2002-02-26 | 2005-08-31 | 独立行政法人産業技術総合研究所 | Coriolis flow meter |
| WO2009102763A1 (en) * | 2008-02-11 | 2009-08-20 | Integrated Sensing Systems, Inc. | Microfluidic device and method of operation |
| US7581429B2 (en) * | 2006-01-06 | 2009-09-01 | Integrated Sensing Systems, Inc. | Microfluidic device and method of operation |
| CN101842668A (en) * | 2007-06-25 | 2010-09-22 | 集成感应系统公司 | Microfluidic device and microtube therefor |
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- 2010-12-30 CN CN2010106158951A patent/CN102527450A/en active Pending
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6477901B1 (en) * | 1999-12-21 | 2002-11-12 | Integrated Sensing Systems, Inc. | Micromachined fluidic apparatus |
| JP3689738B2 (en) * | 2002-02-26 | 2005-08-31 | 独立行政法人産業技術総合研究所 | Coriolis flow meter |
| US7581429B2 (en) * | 2006-01-06 | 2009-09-01 | Integrated Sensing Systems, Inc. | Microfluidic device and method of operation |
| CN101842668A (en) * | 2007-06-25 | 2010-09-22 | 集成感应系统公司 | Microfluidic device and microtube therefor |
| WO2009102763A1 (en) * | 2008-02-11 | 2009-08-20 | Integrated Sensing Systems, Inc. | Microfluidic device and method of operation |
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104668003A (en) * | 2015-01-20 | 2015-06-03 | 天津农学院 | Micro-fluidic chip |
| CN105665042A (en) * | 2015-01-20 | 2016-06-15 | 天津农学院 | Micro-fluidic chip use method |
| CN104668003B (en) * | 2015-01-20 | 2016-06-29 | 天津农学院 | Micro-fluidic chip |
| CN105665042B (en) * | 2015-01-20 | 2017-06-27 | 天津农学院 | The application method of micro-fluidic chip |
| CN112649076A (en) * | 2020-12-21 | 2021-04-13 | 合肥京东方显示技术有限公司 | Standard flow element, preparation method thereof and standard flow system |
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Application publication date: 20120704 |