CN102251241A - Method and apparatus for micro-nano particle implanting with laser shockwave induction - Google Patents

Method and apparatus for micro-nano particle implanting with laser shockwave induction Download PDF

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Publication number
CN102251241A
CN102251241A CN2011101724365A CN201110172436A CN102251241A CN 102251241 A CN102251241 A CN 102251241A CN 2011101724365 A CN2011101724365 A CN 2011101724365A CN 201110172436 A CN201110172436 A CN 201110172436A CN 102251241 A CN102251241 A CN 102251241A
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China
Prior art keywords
micro
nano granules
laser
nano
farr pipe
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Pending
Application number
CN2011101724365A
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Chinese (zh)
Inventor
张永康
李应红
戴峰泽
任旭东
汪诚
楚维
何卫峰
周鑫
阮亮
皇甫喁卓
张田
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Jiangsu University
Air Force Engineering University of PLA
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Jiangsu University
Air Force Engineering University of PLA
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Publication date
Application filed by Jiangsu University, Air Force Engineering University of PLA filed Critical Jiangsu University
Priority to CN2011101724365A priority Critical patent/CN102251241A/en
Priority to PCT/CN2011/077738 priority patent/WO2012174768A1/en
Publication of CN102251241A publication Critical patent/CN102251241A/en
Pending legal-status Critical Current

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    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C24/00—Coating starting from inorganic powder
    • C23C24/02—Coating starting from inorganic powder by application of pressure only
    • C23C24/04—Impact or kinetic deposition of particles
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05B—SPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/14—Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas designed for spraying particulate materials
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/144—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor the fluid stream containing particles, e.g. powder
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/14—Working by laser beam, e.g. welding, cutting or boring using a fluid stream, e.g. a jet of gas, in conjunction with the laser beam; Nozzles therefor
    • B23K26/1462—Nozzles; Features related to nozzles
    • B23K26/1464—Supply to, or discharge from, nozzles of media, e.g. gas, powder, wire
    • B23K26/1476—Features inside the nozzle for feeding the fluid stream through the nozzle
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/16—Removal of by-products, e.g. particles or vapours produced during treatment of a workpiece
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/34—Laser welding for purposes other than joining
    • B23K26/342—Build-up welding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B23—MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23K—SOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00—Working by laser beam, e.g. welding, cutting or boring
    • B23K26/70—Auxiliary operations or equipment
    • B23K26/702—Auxiliary equipment

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Mechanical Engineering (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Powder Metallurgy (AREA)
  • Other Surface Treatments For Metallic Materials (AREA)
  • Medicines That Contain Protein Lipid Enzymes And Other Medicines (AREA)

Abstract

The invention relates to a method and an apparatus for micro-nano particle implanting with laser shockwave induction, which are especially suitable in a situation of carrying out surface strengthening on local complex workpiece surfaces. The apparatus comprises a laser, a focusing lens, a spectralite, a nozzle, an Laval accelerating tube, a powder spraying system, a powder recovery system, and a metal to be treated, and the spectralite is used for permeating laser beams and sealing a large end of the Laval accelerating tube to prevent micro-nano particles from polluting environment. The powder spraying system sprays the micro-nano particles, high repetition rate and high energy pulse lasers interact with the micro-nano particles to break down the micro-nano particles to generate shockwaves, the shockwaves promote partial micro-nano particles to axially move along the Laval accelerating tube, micro-nano ions in the Laval accelerating tube which are continuously accelerated under the effect of the shockwaves because of an Laval effect with the continuous interaction of the lasers and the micro-nano particles flying to the workpieces at a high speed, material sputtering caused by bumping allows the micro-nano particles to be implanted into surfaces of the metal to be treated to obtain a micro-nano particle implanted reinforcement layer. The method of the present invention has the advantages of substantial improvement of hardness, wear resistance and corrosion resistance of the metal surface layer, and wide application prospect.

Description

The method and apparatus that a kind of laser blast wave inductive micro-nano granules is implanted
Technical field
The present invention relates to a kind of method and apparatus of metal surface properties modification, refer in particular to a kind of method and apparatus of implanting based on the micro-nano granules of laser blast wave, be specially adapted to carry out the occasion of surface strengthening at the complex part surface local.
Background technology
The metallic surface performance is for the hardness of structural part, wear-resisting and corrosion resistance nature is most important, micro-nano granules strengthens metal composite and has a series of having a few, can improve friction and wear behavior greatly, generate the micro-nano granules reinforced composite in the metallic surface original position all is Materials science research focus all the time, method commonly used mainly contains friction stir welding and laser melting coating etc., these methods all relate to the high temperature melt process, can cause defectives such as pore, crackle to the metallic surface, perhaps cause the variation of original condition of surface.Therefore, develop the significant and wide application prospect of method that a kind of new type of metal surface in situ generates particulate reinforced composite.
Summary of the invention
The method and apparatus that the object of the present invention is to provide a kind of laser blast wave inductive micro-nano granules to implant; enforcement the inventive system comprises laser apparatus; condenser lens; daraf(reciprocal of farad) that acceleration tube; powder spraying system; powder recovery system and pending metal; its principle is: the micro-nano granules of high repetition frequency high-energy ultra-short pulse laser and powder spraying system ejection interacts; micro-nano granules is punctured form plasma body; the plasma body blast forms shockwave (plasma body inside can produce the pressure of several GPa); shockwave promotes the part micro-nano granules along la farr pipe axis direction high-speed motion; the continuous irradiation micro-nano granules stream of follow-up high repeat frequency pulsed laser; because daraf(reciprocal of farad) that effect; the shockwave of its generation constantly quickens the micro-and nano-particles of the place ahead motion in la farr pipe; at last clash into pending metallic surface with high speed; make metallic surface material sputter, make micro-nano granules implant pending metallic surface.
The described high high-energy ultrashort pulse laser that repeats can make working medium puncture after it focuses on, and repetition rate can reach tens of hertz.
Described la farr pipe, its axis is horizontal, and prevents that micro-nano granules is scattered from the mouth of pipe; Tube wall has less roughness, is beneficial to micro-nano granules and quickens along tube wall; La farr pipe is equipped with opticglass sealing than larger diameter end, is used for seeing through laser beam, makes the micro-nano granules can be in not being scattered in environment; The la farr pipe tube wall is equipped with nozzle, and nozzle ejection pressurized air is used for protecting opticglass not to be subjected to the pollution of micro-nano granules; The la farr pipe tube wall offers the local dent feature, makes the micro-nano granules of not ejection concentrate on the local dent feature bottom; The la farr pipe smaller diameter end is open, and points to pending metallic surface, and its tube wall is equipped with powder spraying system and powder recovery system.The tube wall place that is right against powder recovery system (7) is equipped with powder spraying system
Described powder recovery system is installed on the local dent feature bottom, is beneficial to recovery and does not spray micro-nano granules; Powder recovery system also provides certain negative pressure to la farr pipe inside, the not enough micro-nano granules of initial velocity is recovered under suction function, and the enough micro-nano granules of speed moves along axis direction.
Described powder spraying system is installed on the tube wall over against powder recovery system, is used for spraying micro-nano granules.
Described micro-nano granules comprises hard particles such as wolfram varbide, silicon carbide, aluminum oxide, and its yardstick is 1～100 nanometer or 0.1～100 micron.
Advantage of the present invention is:
1) shock wave energy of laser-(produced)plasma generation is high, can promote micro-nano granules with very high-speed motion.
2) owing to daraf(reciprocal of farad) that effect, the micro-nano granules of the place ahead motion is constantly quickened by the shockwave of rear line focus in the pipe, can reach high speed.
3) owing to la farr pipe pipeline sufficiently long, and along the pipeline direction micro-nano granules is arranged all the time, therefore, the utilization ratio of laser is almost 100%.
4) the not enough micro-nano granules of speed is had certain screening effect, clash into pending metallic surface thereby obtain the enough micro-nano granules of kinetic energy
5) can carry out micro-nano granules to any zone, complex part surface implants.
Description of drawings
The invention will be further described below in conjunction with accompanying drawing:
Fig. 1 is the structural representation of laser blast wave inductive micro-nano granules implanted device of the present invention, and Fig. 2 is the vertical view of Fig. 1.
The pending metal 9-of 1-laser apparatus 2-condenser lens 3-opticglass 4-la farr pipe 5-powder spraying system 6-micro-nano granules 7-powder recovery system 41-local dent feature 8-nozzle
Embodiment
Describe the details and the working condition of the concrete device of the present invention's proposition in detail below in conjunction with accompanying drawing.
As shown in Figure 1, la farr pipe 4 is in horizontal state; Nozzle 9 ejection pressurized air; Powder spraying system 5 ejection micro-nano granules 6, powder recovery system 7 reclaims the not micro-nano granules 6 of ejection at local dent feature 41 places of la farr pipe 4; Laser apparatus 1 sends high repetition frequency high-energy ultra-short pulse laser, line focus lens 2 focus on, see through opticglass 3, interact with micro-nano granules stream 6, micro-nano granules 6 is punctured, produce plasma shockwave (plasma body inside can produce the pressure of several GPa), shockwave promotes part micro-nano granules 6 along la farr pipe 4 high-speed motions, follow-up pulse laser is with micro-and nano-particles 6 effects, produce the pulse laser shockwave, constantly promote the place ahead micro-nano granules 6 and travel forward, under your effect effect of daraf(reciprocal of farad), the place ahead micro-nano granules 6 is constantly quickened, at last clash into pending metal 8 surfaces with high speed, make the material sputter of pending metallic surface 8, micro-nano granules 6 is implanted to pending metal 8 surfaces, forms the micro-nano granules surface strengthen layer.

Claims (6)

1. the method and apparatus that laser blast wave inductive micro-nano granules is implanted is characterized by: comprise laser apparatus (1), condenser lens (2), opticglass (3), la farr pipe (4), powder spraying system (5), micro-nano granules (6), powder recovery system (7), pending metal (8) and nozzle (9); Laser apparatus (1) is aimed at condenser lens (2); Opticglass (3) is installed on la farr pipe, and its focus is positioned at la farr pipe (4), and (4) than larger diameter end, la farr pipe (4) smaller diameter end is open, and points to metal to be treated (8); La farr pipe (4) offers local dent feature (41) than the larger diameter end tube wall, be equipped with and be equipped with powder recovery system (7) in the local dent feature bottom, the tube wall place that is right against powder recovery system (7) is equipped with powder spraying system (5), in tube wall 90 degree positions nozzle (9) is installed, nozzle points to opticglass (3); Micro-nano granules (6) sprays from powder spraying system (5).
2. according to the method and apparatus of the right 1 laser blast wave inductive micro-nano granules that requires implantation, it is characterized by: la farr pipe (4) axis is horizontal, and prevents that micro-nano granules is scattered from the mouth of pipe; La farr pipe (4) tube wall has less roughness, is beneficial to micro-nano granules (6) and quickens along tube wall; La farr pipe (4) is equipped with opticglass (3) sealing than larger diameter end, is used for seeing through laser beam, makes the micro-nano granules (6) can be in not being scattered in environment; La farr pipe (4) tube wall is equipped with nozzle (9), and nozzle (9) ejection pressurized air is used for protecting opticglass (3) not to be subjected to the pollution of micro-nano granules (6); La farr pipe (4) tube wall offers local dent feature (41), makes the micro-nano granules (6) of not ejection concentrate on local dent feature (41) bottom; La farr pipe (4) smaller diameter end is open, and points to pending metal (8) surface.
3. according to right 2 la farr pipe that requires (4), it is characterized by: the length sufficiently long of la farr pipe (4), the laser beam the place ahead after focusing have micro-nano granules (6) to exist all the time, so the utilization ratio height of laser.
4. according to the method and apparatus of the right 1 laser blast wave inductive micro-nano granules that requires implantation, it is characterized by: laser apparatus (1) is a high repetition frequency high energy ultrashort pulse laser; Micro-nano granules (5) comprises hard particles such as wolfram varbide, silicon carbide, aluminum oxide, and its yardstick is 1～100 nanometer or 0.1～100 micron.
5. the method and apparatus of implanting according to the desired laser blast wave inductive micro-nano granules of right 1, it is characterized by: micro-nano granules (6) is under the laser blast wave effect, in la farr pipe (4) since your effect of daraf(reciprocal of farad) constantly quickened, and high speed rushes at the surface of pending metal (8), cause the sputter of material at impingement region, make micro-nano granules (6) be welded on workpiece surface, obtain nano particle and implant strengthening layer.
6. the method and apparatus of implanting according to the right 1 laser blast wave inductive micro-nano granules that requires, it is characterized by: powder recovery system (7) provides certain negative pressure to la farr pipe (4) inside, the not enough micro-nano granules of initial velocity (6) is recovered under suction function, and the enough micro-nano granules of speed move along axis direction.Powder recovery system (7) is installed on local dent feature (41) bottom, is beneficial to the recovery of micro-nano granules (6).
CN2011101724365A 2011-06-24 2011-06-24 Method and apparatus for micro-nano particle implanting with laser shockwave induction Pending CN102251241A (en)

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CN2011101724365A CN102251241A (en) 2011-06-24 2011-06-24 Method and apparatus for micro-nano particle implanting with laser shockwave induction
PCT/CN2011/077738 WO2012174768A1 (en) 2011-06-24 2011-07-28 Method and apparatus for micro-nano particle implanting with laser shockwave induction

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Cited By (8)

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CN103264226A (en) * 2013-05-23 2013-08-28 广东工业大学 Method for implanting carbon nano tube based on laser cavitation
CN107523824A (en) * 2016-06-22 2017-12-29 中国科学院沈阳自动化研究所 It is a kind of using reiforcing laser impact technology workpiece surface prepares coating method
CN108962525A (en) * 2018-06-25 2018-12-07 山西师范大学 A kind of preparation method of Sintered NdFeB magnet surface layer magnetic gradient nanostructure
CN109207910A (en) * 2018-10-25 2019-01-15 广东工业大学 A kind of method for carburizing based on laser-impact
CN109935563A (en) * 2019-04-03 2019-06-25 深圳第三代半导体研究院 A kind of more dimensional hybrids nano particle lotions and preparation method thereof
CN109979904A (en) * 2019-04-03 2019-07-05 深圳第三代半导体研究院 A kind of more sized nanostructures particle mixed metal films and preparation method thereof
CN110034090A (en) * 2019-04-24 2019-07-19 深圳第三代半导体研究院 A kind of nanoporous metal membrane assisting base plate and preparation method thereof
CN110060973A (en) * 2019-04-24 2019-07-26 深圳第三代半导体研究院 A kind of nanoporous metal membrane block preparation method and its base plate preparation method

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CN110904447B (en) * 2019-12-27 2024-03-26 浙江工业大学 Inner wall supersonic laser composite deposition device
CN114247992A (en) * 2021-12-14 2022-03-29 武汉大学 Laser hot stamping welding method

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US20050079286A1 (en) * 2001-12-26 2005-04-14 Kashirin Alexandr Ivanovich Method of applying coatings
CN1608145A (en) * 2001-12-26 2005-04-20 有限责任公司奥布宁斯基粉末喷涂中心 Method of applying coatings
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Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN103264226A (en) * 2013-05-23 2013-08-28 广东工业大学 Method for implanting carbon nano tube based on laser cavitation
CN107523824A (en) * 2016-06-22 2017-12-29 中国科学院沈阳自动化研究所 It is a kind of using reiforcing laser impact technology workpiece surface prepares coating method
CN108962525A (en) * 2018-06-25 2018-12-07 山西师范大学 A kind of preparation method of Sintered NdFeB magnet surface layer magnetic gradient nanostructure
CN108962525B (en) * 2018-06-25 2020-04-21 山西师范大学 Preparation method of magnetic gradient nanostructure on surface layer of sintered neodymium-iron-boron magnet
CN109207910A (en) * 2018-10-25 2019-01-15 广东工业大学 A kind of method for carburizing based on laser-impact
CN109935563A (en) * 2019-04-03 2019-06-25 深圳第三代半导体研究院 A kind of more dimensional hybrids nano particle lotions and preparation method thereof
CN109979904A (en) * 2019-04-03 2019-07-05 深圳第三代半导体研究院 A kind of more sized nanostructures particle mixed metal films and preparation method thereof
CN110034090A (en) * 2019-04-24 2019-07-19 深圳第三代半导体研究院 A kind of nanoporous metal membrane assisting base plate and preparation method thereof
CN110060973A (en) * 2019-04-24 2019-07-26 深圳第三代半导体研究院 A kind of nanoporous metal membrane block preparation method and its base plate preparation method
CN110060973B (en) * 2019-04-24 2021-07-30 深圳第三代半导体研究院 Nano metal film module preparation method and substrate preparation method thereof

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Application publication date: 20111123