CN102220627A - Single-motor and wide-speed-regulation range crucible rod operation speed regulating system and speed regulation method - Google Patents
Single-motor and wide-speed-regulation range crucible rod operation speed regulating system and speed regulation method Download PDFInfo
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- CN102220627A CN102220627A CN2011101323783A CN201110132378A CN102220627A CN 102220627 A CN102220627 A CN 102220627A CN 2011101323783 A CN2011101323783 A CN 2011101323783A CN 201110132378 A CN201110132378 A CN 201110132378A CN 102220627 A CN102220627 A CN 102220627A
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Abstract
The invention discloses a single-motor and wide-speed-regulation range crucible rod operation speed regulating system and a speed regulation method. The system comprises a base, a crucible rod operation device arranged on the top end of the base, a power and speed regulating system connected with the crucible rod operation device, and an operation and speed control system connected with the crucible rod operation device and the power and speed regulating system, wherein the power and speed regulating system comprises a direct-current speed measuring torque machine set and a speed regulating device which consists of two electromagnetic clutches, a harmonic wave reducer and a timing belt pulley 2. The method comprises the following step: calibrating a speedometer V before use; in a charging stage, allowing the crucible rod to operate upward in an actually required quick operation speed direction; in a crystal normal growth section, allowing the crucible rod to operate downward in an actually required slow operation speed direction; and in a discharge stage, allowing the crucible rod to operate upward in the actually required quick operation speed direction. In the invention, the structure is simple, the design is reasonable, the speed regulation range is wide, the manufacturing cost is low, the use and operation are convenient and quick, and the promotion and use are convenient.
Description
Technical field
The invention belongs to the movement control technology field, relate to the velocity control system and the speed regulating method of crucible pole operation in the crystal growing process, especially relate to a kind of crucible pole operation velocity control system and speed regulating method of single motor wide speed regulating range.
Background technology
Falling crucible method is a kind of growing method commonly used, to be used for the crucible that material that crystal growth uses is contained in cylinder shape, descend lentamente, and by a process furnace with certain temperature gradient, Control for Kiln Temperature is near the fusing point a little more than material, by heating region the time, material in the crucible is melted, and when crucible continued to descend, the temperature of crucible bottom dropped to below the fusing point earlier, and the beginning crystallization, crystal descends with crucible and continues to grow up.In this kind growing method, crucible pole is used for promoting crucible and moves up and down, and the crystalline growth technique requires the crucible pole travelling speed low and steadily even., reduce production costs simultaneously in order to enhance productivity, require again carry out shove charge, come out of the stove, in the maintenance process, crucible pole can move with comparatively faster speed.The separate unit stepper-motors that adopt promote the crucible pole motion more in the prior art, this mechanism has the double speed function, but velocity range is narrow, has only 0.2mm/h～5.6mm/h at a slow speed, the speed adjustable range of quick 0.2cm/min～4.7cm/min, and stepper-motor is when low cruise, exist operation not steadily, not smooth, discontinuous shortcoming; And adopting bi-motor to realize this function, mechanical mechanism complexity and processing and manufacturing cost are big.
And, the cycle of crystal growth is all long, in crystal growing process, does not allow the generation that has a power failure, if have a power failure suddenly, crystal growth will be interrupted, and the crystalline quality that has grown will be had a strong impact on, if having a power failure because of unforeseen circumstancess such as thunder and lightning, heavy rains, cause crucible pole to glide automatically, whole crystal will be scrapped, and this will not only bring the huge waste of the energy, and can bring the financial loss that is difficult to remedy to manufacturer.
Summary of the invention
Technical problem to be solved by this invention is at above-mentioned deficiency of the prior art, and the crucible pole operation velocity control system of a kind of simple in structure, reasonable in design, speed-regulating range width, low cost of manufacture, single motor wide speed regulating range that result of use is good is provided.
For solving the problems of the technologies described above, the technical solution used in the present invention is: a kind of crucible pole operation velocity control system of single motor wide speed regulating range, it is characterized in that: comprise pedestal, operation and speed-adjusting and control system that the top of described pedestal is provided with crucible pole running gear, the power that is connected with the crucible pole running gear and velocity control system and is connected with power and velocity control system with the crucible pole running gear;
Described crucible pole running gear comprises column that bottom and pedestal connect, be fixedly connected on ball line slideway on the column sidewall, be rotatably connected on the column and with the parallel ball screw of ball line slideway, be socketed in ball screw on the ball screw, be connected with the ball line slideway and the slide block that moves up and down at ball screw upper edge ball line slideway with the ball screw and the crucible pole that is connected with slide block and moves with slide block with the ball screw; The bottom of described ball screw is connected with the timing belt pulley one that is used to connect crucible pole running gear and power and velocity control system; The fixedly connected drift stop that prevents that ball screw is rotated further when power down that is useful in the top of described column, described drift stop comprises and is fixedly connected on the vertical brake of column, is integrated in the electro-magnet in the brake and is arranged on brake interior friction plate and the retarding disc of cavity that constitutes with the column top, described retarding disc and friction plate are installed on the ball screw from top to bottom successively, are provided with many embeddings between described friction plate and the brake and are installed to holddown spring in the brake; Described power and velocity control system comprise DC velocity measuring moment unit and join with DC velocity measuring moment unit and be installed in speed regulation device in the velocity control system install bin, harmonic speed reducer that described speed regulation device comprise the electromagnetic clutch one that is connected with DC velocity measuring moment unit and electromagnetic clutch two, be connected with DC velocity measuring moment unit by electromagnetic clutch one and the timing belt pulley two that is connected with harmonic speed reducer or is connected with DC velocity measuring moment unit by electromagnetic clutch two; Described power and velocity control system are by timing belt pulley one, timing belt pulley two and be connected across belt pulley one and be connected with the crucible pole running gear with the synchronous cog belt of belt pulley two and drive crucible running gear operation;
Described operation and speed-adjusting and control system comprise the operation driving that is connected with drift stop with DC velocity measuring moment unit and alignment circuit and the change-over circuit at a slow speed soon that is connected with electromagnetic clutch two with electromagnetic clutch one; Described operation driving and alignment circuit by PWM DC servo driving mechanism 12A8, servo-driver power supply, reverser SB1, speed-regulating potentiometer R1, fast speed calibration potentiometer R2, speed calibration potentiometer R3, speed indicator gauge V and two groups of contacts having among the electromagnetic relay K of four groups of contacts constitute at a slow speed, four groups of contacts of described electromagnetic relay K are respectively normally opened contact K1-1 and normally closed contact K1-2, normally opened contact K2-1 and normally closed contact K2-2, normally opened contact K3-1 and normally closed contact K3-2 and normally opened contact K4-1 and normally closed contact K4-2; The power interface pin 5 of the positive output end of described servo-driver power supply and PWM DC servo driving mechanism 12A8 and the positive supply input terminus of drift stop join, the power interface pin 4 of the negative output terminal of described servo-driver power supply and PWM DC servo driving mechanism 12A8 and the negative supply input terminus of drift stop join, the signaling interface pin 6 of described PWM DC servo driving mechanism 12A8, signaling interface pin 7, the velodyne negative input end of power interface pin 1 and power interface pin 2 difference correspondences and DC velocity measuring moment unit, the velodyne positive input terminal, motor negative input end and motor positive input terminal join, the signaling interface pin 1 of described PWM DC servo driving mechanism 12A8 and signaling interface pin 3 correspondence respectively join with an end of the normally opened contact of reverser SB1 and an end of normally closed contact, the other end of the normally opened contact of described reverser SB1 and the other end of normally closed contact all join with the inboardend of speed-regulating potentiometer R1, the signaling interface pin 5 of described PWM DC servo driving mechanism 12A8 and the sliding end of speed-regulating potentiometer R1, the end of the end of the normally opened contact K1-1 of electromagnetic relay K and the normally closed contact K1-2 of electromagnetic relay K joins, the other end of the other end of the normally opened contact K1-1 of described electromagnetic relay K and the normally closed contact K1-2 of electromagnetic relay K respectively with inboardend of quick speed calibration potentiometer R2 and at a slow speed the inboardend of speed calibration potentiometer R3 join, another inboardend of described quick speed calibration potentiometer R2 and at a slow speed another inboardend of speed calibration potentiometer R3 join with the end of the normally closed contact K2-2 of the end of the normally opened contact K2-1 of electromagnetic relay K and electromagnetic relay K respectively, the other end of the other end of the normally opened contact K2-1 of electromagnetic relay K and the normally closed contact K2-2 of electromagnetic relay K all joins the sliding end of described quick speed calibration potentiometer R2 with the input terminus of speed indicator gauge V, the output terminal of the sliding end of speed calibration potentiometer R3 and speed indicator gauge V all joins with the signaling interface pin 2 of PWM DC servo driving mechanism 12A8 and another inboardend of speed-regulating potentiometer R1 at a slow speed; Described fast change-over circuit at a slow speed is made of electromagnetic clutch power, fast transfer lever SB2 at a slow speed and one group of contact having among the electromagnetic relay K of four groups of contacts, described fast transfer lever SB2 at a slow speed and the two ends that are connected in parallel on electromagnetic clutch power after the coil of electromagnetic relay K is connected, the normally opened contact K3-1 of described electromagnetic relay K is connected on electromagnetic clutch power and gives in the current supply circuit of electromagnetic clutch one power supply, and the normally closed contact K3-2 of described electromagnetic relay K is connected on electromagnetic clutch power and gives in the current supply circuit of electromagnetic clutch two power supplies.
The crucible pole operation velocity control system of above-mentioned single motor wide speed regulating range, it is characterized in that: described electromagnetic clutch one by be installed on the DC velocity measuring moment unit output shaft gear one be installed in electromagnetic clutch one input shaft on and be connected with DC velocity measuring moment unit with gear one meshed gears two, described electromagnetic clutch two by be installed on the DC velocity measuring moment unit output shaft gear one be installed in electromagnetic clutch two input shafts on and be connected with DC velocity measuring moment unit with gear one meshed gears three, described harmonic speed reducer is crossed on the output shaft that key is connected electromagnetic clutch one, described timing belt pulley two is by being installed in the transmission shaft on the velocity control system install bin, be installed on the transmission shaft gear four be installed in the harmonic speed reducer output shaft on and be connected with harmonic speed reducer with gear four meshed gears five, perhaps described timing belt pulley two is by being installed in the transmission shaft on the velocity control system install bin, the gear four that is installed on the transmission shaft is connected with electromagnetic clutch two with gear six on being installed in electromagnetic clutch two output shafts.
The crucible pole operation velocity control system of above-mentioned single motor wide speed regulating range, it is characterized in that: described servo-driver power supply is that output voltage is the direct supply of 36V.
The crucible pole operation velocity control system of above-mentioned single motor wide speed regulating range, it is characterized in that: described electromagnetic clutch power is that output voltage is the direct supply of 24V.
The crucible pole operation velocity control system of above-mentioned single motor wide speed regulating range, it is characterized in that: described holddown spring is two or four.
The present invention also provides a kind of and has used simple operation, speed-regulating range width, can make and it is characterized in that this method may further comprise the steps by crucible pole crucible pole operation steady, smooth, single motor wide speed regulating range of operation continuously speed regulating method:
Before step 1, the use, V calibrates to the speed indicator gauge, makes crucible pole when quick operation and slow running, and speed indicator gauge V goes up speed of displaying and equates that with the speed of crucible pole actual motion its detailed process is as follows:
101, by transfer lever SB2 at a slow speed soon, make it be in the state of upspringing, the normally opened contact K3-1 of electromagnetic relay K is in off-state, the normally closed contact K3-2 of electromagnetic relay K is in closure state, the current supply circuit of electromagnetic clutch one disconnects, the current supply circuit of electromagnetic clutch two is connected, DC velocity measuring moment unit drives timing belt pulley two by electromagnetic clutch two and rotates, timing belt pulley two drives timing belt pulley one and ball screw rotation by synchronous cog belt, and ball wire master tape movable slider and crucible pole on the ball screw move along the ball line slideway on ball screw fast up or down;
102, the electric current of regulating on the PWM DC servo driving mechanism 12A8 limits potentiometer, and the maximum current that PWM DC servo driving mechanism 12A8 is exported is 8A;
103, the resistance of adjusting speed-regulating potentiometer R1 is maximum;
104, regulate reference gain potentiometer on the PWM DC servo driving mechanism 12A8, with the miles of relative movement of optical grating ruler measurement crucible pole, one of making minute miles of relative movement is 10cm;
105, by regulating quick speed calibration potentiometer R2 speed indicator gauge V is calibrated, make on the speed indicator gauge V and be shown as 10cm/min;
106, by transfer lever SB2 at a slow speed soon, make it be in down state, the normally opened contact K3-1 of electromagnetic relay K is in closure state, the normally closed contact K3-2 of electromagnetic relay K is in off-state, the current supply circuit of electromagnetic clutch one is connected, the current supply circuit of electromagnetic clutch two disconnects, DC velocity measuring moment unit drives timing belt pulley two by electromagnetic clutch one and harmonic speed reducer and rotates, timing belt pulley two drives timing belt pulley one and ball screw rotation by synchronous cog belt, and ball wire master tape movable slider and crucible pole on the ball screw move along the ball line slideway at a slow speed on ball screw up or down;
107, the resistance of adjusting speed-regulating potentiometer R1 is
Wherein, R is the maximum value of speed-regulating potentiometer R1;
108,, calculate the translational speed of crucible pole with one hour miles of relative movement of optical grating ruler measurement crucible pole;
109, speed calibration potentiometer R3 calibrates speed indicator gauge V by regulating at a slow speed, and it is identical to make speed indicator gauge V go up the translational speed of the crucible pole that is calculated in speed of displaying and the step 108;
110, regulate speed-regulating potentiometer R1, making speed indicator gauge V go up speed of displaying is 0.2mm/h;
111, use one hour miles of relative movement of optical grating ruler measurement crucible pole once more, and speed calibration potentiometer R3 recalibrates to speed indicator gauge V by regulating at a slow speed, making speed indicator gauge V go up stabilized presentation is 0.2mm/h;
112, according to the actual motion state of crucible pole, adjust the loop gain on the PWM DC servo driving mechanism 12A8, make steadily operation equably of crucible pole;
201, press reverser SB1, make it be in down state, PWM DC servo driving mechanism 12A8 drives DC velocity measuring moment unit and rotates counterclockwise;
202, by transfer lever SB2 at a slow speed soon, make it be in the state of upspringing, the normally opened contact K3-1 of electromagnetic relay K is in off-state, the normally closed contact K3-2 of electromagnetic relay K is in closure state, the current supply circuit of electromagnetic clutch one disconnects, the current supply circuit of electromagnetic clutch two is connected, DC velocity measuring moment unit drives timing belt pulley two by electromagnetic clutch two and rotates, timing belt pulley two drives timing belt pulley one and ball screw rotation by synchronous cog belt, and ball wire master tape movable slider on the ball screw and crucible pole upwards move along the ball line slideway on ball screw fast;
203, regulate speed-regulating potentiometer R1, observation speed indicator gauge V goes up shown speed, when speed indicator gauge V goes up shown speed and is the actual needed quick travelling speed of crucible pole, stop to regulate speed-regulating potentiometer R1, crucible pole upwards moves at ball screw upper edge ball line slideway with the needed quick travelling speed of reality on ball screw;
301, press reverser SB1, make it be in the state of upspringing, PWM DC servo driving mechanism 12A8 drives DC velocity measuring moment unit and clockwise rotates;
302, by transfer lever SB2 at a slow speed soon, make it be in down state, the normally opened contact K3-1 of electromagnetic relay K is in closure state, the normally closed contact K3-2 of electromagnetic relay K is in off-state, the current supply circuit of electromagnetic clutch one is connected, the current supply circuit of electromagnetic clutch two disconnects, DC velocity measuring moment unit drives timing belt pulley two by electromagnetic clutch one and harmonic speed reducer and rotates, timing belt pulley two drives timing belt pulley one and ball screw rotation by synchronous cog belt, and ball wire master tape movable slider and crucible pole on the ball screw move downwards along the ball line slideway at a slow speed on ball screw;
303, regulate speed-regulating potentiometer R1, observation speed indicator gauge V goes up shown speed, as speed indicator gauge V when to go up shown speed be actual needed crucible pole slow running speed, stop to regulate speed-regulating potentiometer R1, crucible pole moves downwards at ball screw upper edge ball line slideway with the needed slow running speed of reality on ball screw;
Step 4, go out heater stage, regulate described operation and speed-adjusting and control system according to step 201～step 203, make crucible pole with the needed quick travelling speed of reality in the upwards operation of ball screw upper edge ball line slideway, run to correct position after, take out the good crystal of growth.
The crucible pole operation speed regulating method of above-mentioned single motor wide speed regulating range, it is characterized in that: in step 101, step 202 and the step 4 crucible pole fast in the speed of operation and the step 203 the actual needed quick travelling speed of crucible pole be 0.2cm/min～10cm/min, in step 106 and the step 302 in the speed of crucible pole slow running and the step 303 the actual needed slow running speed of crucible pole be 0.2mm/h～10mm/h.
The present invention compared with prior art has the following advantages:
1, the present invention selects for use PWM DC servo driving mechanism 12A8 to drive DC velocity measuring moment unit operation, DC velocity measuring moment unit is through the transmission of electromagnetic clutch one, harmonic speed reducer, synchronous cog belt and timing belt pulley, the motion of drive ball-screw can move up and down crucible pole in the low speed wide speed regulating range; Perhaps DC velocity measuring moment unit drives the ball-screw motion through the transmission of electromagnetic clutch two, synchronous cog belt and timing belt pulley, and crucible pole can be moved up and down in the high speed wide speed regulating range; Simple in structure, reasonable in design, low cost of manufacture.
2, speed-regulating range width of the present invention can move up and down with the movement velocity of 0.2cm/min～10cm/min when crucible pole is quick, can move up and down with the movement velocity of 0.2mm/h～10mm/h in the time of at a slow speed.
When 3, adopting PWM DC servo driving mechanism 12A8 driving DC velocity measuring moment unit to move under the low cruise state among the present invention, the output torque characteristic is outstanding, operates steadily evenly, and crucible pole moves up and down evenly, do not have and creep, and helps the crystalline growth.
4, the present invention by to the adhesive of two electromagnetic clutch with disconnect control, the disconnection that realizes DC velocity measuring moment unit and harmonic speed reducer be connected, reach the purpose that realizes fast conversion at a slow speed and wide-range-timing, the use simple operation.
5, designed drift stop among the present invention, can reduce crystal growth producer to the full extent when having a power failure because of unforeseen circumstancess such as thunder and lightning, heavy rain cause, crucible pole glides automatically because of load and deadweight, causes whole crystal to scrap the massive losses that is brought.
In sum, the present invention is simple in structure, and is reasonable in design, speed-regulating range width, low cost of manufacture has not only guaranteed the characteristic that the crucible pole operational process is desired steadily, reliable in the crystal growing process, nothing is creeped, and promptly carries out crystal growth with the speed of 0.2mm/h～10mm/h; Guaranteed again simultaneously shove charge, come out of the stove and maintenance process in, crucible pole can move with the fast speed of 0.2～10cm/min; 0.2mm/h～5.6mm/h at a slow speed in the step speed-adjusting system compared to existing technology, the speed adjustable range of 0.2mm/h～4.7cm/min has increased significantly fast; When having overcome the stepper-motor low cruise simultaneously, operation not steadily, not smooth, discontinuous shortcoming, use simple operation, result of use is good, is convenient to promote the use of.
Below by drawings and Examples, technical scheme of the present invention is described in further detail.
Description of drawings
Fig. 1 is a structural representation of the present invention.
Fig. 2 moves the schematic circuit diagram of driving and alignment circuit for the present invention.
Fig. 3 is the fast schematic circuit diagram of change-over circuit at a slow speed of the present invention.
Description of reference numerals:
The 1-pedestal; The 2-column; The 3-ball screw;
4-ball screw; The 5-slide block; The 6-crucible pole;
The 7-drift stop; The 7-1-brake; The 7-2-electro-magnet;
The 7-3-friction plate; The 7-4-retarding disc; The 7-5-holddown spring;
8-DC velocity measuring moment unit; 9-velocity control system install bin; 10-electromagnetic clutch one;
11-electromagnetic clutch two; The 12-harmonic speed reducer; 13-1-timing belt pulley one;
13-2-timing belt pulley two; The 13-3-synchronous cog belt; The 14-1-operation drives and speed governing
Circuit;
14-2-changes electric 15-servo-driver power supply soon at a slow speed; The 16-electromagnetic clutch power;
The road;
17-1-gear one; 17-2-gear two; 17-3-gear three;
17-4-gear four; 17-5-gear five; 17-6-gear six;
The 18-transmission shaft; 19-ball line slideway.
Embodiment
As Fig. 1, Fig. 2 and shown in Figure 3, the crucible pole operation velocity control system of single motor wide speed regulating range of the present invention, comprise pedestal 1, operation and speed-adjusting and control system that the top of described pedestal 1 is provided with crucible pole running gear, the power that is connected with the crucible pole running gear and velocity control system and is connected with power and velocity control system with the crucible pole running gear;
Described crucible pole running gear comprises the column 2 that the bottom is connected with pedestal 1, be fixedly connected on the ball line slideway 19 on column 2 sidewalls, be rotatably connected on the column 2 and the ball screw 3 parallel with ball line slideway 19, be socketed in the ball screw 4 on the ball screw 3, the slide block 5 that is connected with ball line slideway 19 and moves up and down at ball screw 3 upper edge ball line slideways 19 with ball screw 4 with ball screw 4, and connect and with the crucible pole 6 of slide block 5 operations with slide block 5; The bottom of described ball screw 3 is connected with timing belt pulley one 13-1 that is used to connect crucible pole running gear and power and velocity control system; The fixedly connected drift stop 7 that prevents that ball screw 3 is rotated further when power down that is useful in the top of described column 2, described drift stop 7 comprises and is fixedly connected on column 2 vertical brake 7-1, be integrated in the electro-magnet 7-2 in the brake 7-1, and interior friction plate 7-3 and the retarding disc 7-4 of cavity that is arranged on brake 7-1 and column 2 tops formation, described retarding disc 7-4 and friction plate 7-3 are installed on the ball screw 3 from top to bottom successively, are provided with many embeddings between described friction plate 7-3 and the brake 7-1 and are installed to holddown spring 7-5 among the brake 7-1;
Described power and velocity control system comprise DC velocity measuring moment unit 8 and join with DC velocity measuring moment unit 8 and be installed in speed regulation device in the velocity control system install bin 9, the harmonic speed reducer 12 that described speed regulation device comprise the electromagnetic clutch 1 that is connected with DC velocity measuring moment unit 8 and electromagnetic clutch 2 11, be connected with DC velocity measuring moment unit 8 by electromagnetic clutch 1 and be connected with harmonic speed reducer 12 or pass through timing belt pulley two 13-2 that electromagnetic clutch 2 11 is connected with DC velocity measuring moment unit 8; Described power and velocity control system by timing belt pulley one 13-1, timing belt pulley two 13-2 be connected across belt pulley one 13-1 and be connected with the crucible pole running gear with synchronous cog belt 13-3 on belt pulley two 13-2 and drive the operation of crucible running gear;
Described operation and speed-adjusting and control system comprise the operation driving that is connected with drift stop 7 with DC velocity measuring moment unit 8 and alignment circuit 14-1 and the change-over circuit 14-2 at a slow speed soon that is connected with electromagnetic clutch 2 11 with electromagnetic clutch 1; Described operation driving and alignment circuit 14-1 by PWM DC servo driving mechanism 12A8, servo-driver power supply 15, reverser SB1, speed-regulating potentiometer R1, fast speed calibration potentiometer R2, speed calibration potentiometer R3, speed indicator gauge V and two groups of contacts having among the electromagnetic relay K of four groups of contacts constitute at a slow speed, four groups of contacts of described electromagnetic relay K are respectively normally opened contact K1-1 and normally closed contact K1-2, normally opened contact K2-1 and normally closed contact K2-2, normally opened contact K3-1 and normally closed contact K3-2 and normally opened contact K4-1 and normally closed contact K4-2; The power interface pin 5 of the positive output end of described servo-driver power supply 15 and PWM DC servo driving mechanism 12A8 and the positive supply input terminus of drift stop 7 join, the power interface pin 4 of the negative output terminal of described servo-driver power supply 15 and PWM DC servo driving mechanism 12A8 and the negative supply input terminus of drift stop 7 join, the signaling interface pin 6 of described PWM DC servo driving mechanism 12A8, signaling interface pin 7, the velodyne negative input end of power interface pin 1 and power interface pin 2 difference correspondences and DC velocity measuring moment unit 8, the velodyne positive input terminal, motor negative input end and motor positive input terminal join, the signaling interface pin 1 of described PWM DC servo driving mechanism 12A8 and signaling interface pin 3 correspondence respectively join with an end of the normally opened contact of reverser SB1 and an end of normally closed contact, the other end of the normally opened contact of described reverser SB1 and the other end of normally closed contact all join with the inboardend of speed-regulating potentiometer R1, the signaling interface pin 5 of described PWM DC servo driving mechanism 12A8 and the sliding end of speed-regulating potentiometer R1, the end of the end of the normally opened contact K1-1 of electromagnetic relay K and the normally closed contact K1-2 of electromagnetic relay K joins, the other end of the other end of the normally opened contact K1-1 of described electromagnetic relay K and the normally closed contact K1-2 of electromagnetic relay K respectively with inboardend of quick speed calibration potentiometer R2 and at a slow speed the inboardend of speed calibration potentiometer R3 join, another inboardend of described quick speed calibration potentiometer R2 and at a slow speed another inboardend of speed calibration potentiometer R3 join with the end of the normally closed contact K2-2 of the end of the normally opened contact K2-1 of electromagnetic relay K and electromagnetic relay K respectively, the other end of the other end of the normally opened contact K2-1 of electromagnetic relay K and the normally closed contact K2-2 of electromagnetic relay K all joins the sliding end of described quick speed calibration potentiometer R2 with the input terminus of speed indicator gauge V, the output terminal of the sliding end of speed calibration potentiometer R3 and speed indicator gauge V all joins with the signaling interface pin 2 of PWM DC servo driving mechanism 12A8 and another inboardend of speed-regulating potentiometer R1 at a slow speed; Described soon at a slow speed change-over circuit 14-2 by electromagnetic clutch power 16, transfer lever SB2 at a slow speed soon, and the one group of contact that has among the electromagnetic relay K of four groups of contacts constitutes, described fast transfer lever SB2 at a slow speed and the two ends that are connected in parallel on electromagnetic clutch power 16 after the coil of electromagnetic relay K is connected, the normally opened contact K3-1 of described electromagnetic relay K is connected on electromagnetic clutch power 16 and gives in the current supply circuit of electromagnetic clutch one 10 power supplies, and the normally closed contact K3-2 of described electromagnetic relay K is connected on electromagnetic clutch power 16 and gives in the current supply circuit of electromagnetic clutch 2 11 power supplies.
As Fig. 1, Fig. 2 and shown in Figure 3, in the present embodiment, described electromagnetic clutch 1 by be installed on DC velocity measuring moment unit 8 output shafts gear one 17-1 be installed in electromagnetic clutch one 10 input shafts on and be connected with DC velocity measuring moment unit 8 with gear one 17-1 meshed gears 17-2, described electromagnetic clutch 2 11 by be installed on DC velocity measuring moment unit 8 output shafts gear one 17-1 be installed in electromagnetic clutch 2 11 input shafts on and be connected with DC velocity measuring moment unit 8 with gear one 17-1 meshed gears three 17-3, described harmonic speed reducer 12 is connected on the output shaft of electromagnetic clutch 1 by key, described timing belt pulley two 13-2 are by being installed in the transmission shaft 18 on the velocity control system install bin 9, be installed on the transmission shaft 18 gear four 17-4 be installed in harmonic speed reducer 12 output shafts on and be connected with harmonic speed reducer 12 with gear 17-4 meshed gears 17-5, perhaps described timing belt pulley two 13-2 are by being installed in the transmission shaft 18 on the velocity control system install bin 9, the gear 17-4 that is installed on the transmission shaft 18 is connected with electromagnetic clutch 2 11 with gear six 17-6 on being installed in electromagnetic clutch 2 11 output shafts.Described servo-driver power supply 15 is the direct supply of 36V for output voltage.Described electromagnetic clutch power 16 is the direct supply of 24V for output voltage.Described holddown spring 7-5 is two or four.
The crucible pole operation speed regulating method of single motor wide speed regulating range of the present invention may further comprise the steps:
Before step 1, the use, V calibrates to the speed indicator gauge, makes crucible pole 6 when quick operation and slow running, and speed indicator gauge V goes up speed of displaying and equates that with the speed of crucible pole actual motion its detailed process is as follows:
101, by transfer lever SB2 at a slow speed soon, make it be in the state of upspringing, the normally opened contact K3-1 of electromagnetic relay K is in off-state, the normally closed contact K3-2 of electromagnetic relay K is in closure state, the current supply circuit of electromagnetic clutch 1 disconnects, the current supply circuit of electromagnetic clutch 2 11 is connected, DC velocity measuring moment unit 8 drives timing belt pulley two 13-2 by electromagnetic clutch 2 11 and rotates, timing belt pulley two 13-2 drive timing belt pulley one 13-1 and ball screw 3 rotations by synchronous cog belt 13-3, and the ball screw 4 on the ball screw 3 drives slide block 5 and crucible pole 6 moves along ball line slideway 19 on ball screw 3 fast up or down;
102, the electric current of regulating on the PWM DC servo driving mechanism 12A8 limits potentiometer, and the maximum current that PWM DC servo driving mechanism 12A8 is exported is 8A;
103, the resistance of adjusting speed-regulating potentiometer R1 is maximum;
104, regulate reference gain potentiometer on the PWM DC servo driving mechanism 12A8, with the miles of relative movement of optical grating ruler measurement crucible pole 6, one of making minute miles of relative movement is 10cm;
105, by regulating quick speed calibration potentiometer R2 speed indicator gauge V is calibrated, make on the speed indicator gauge V and be shown as 10cm/min;
106, by transfer lever SB2 at a slow speed soon, make it be in down state, the normally opened contact K3-1 of electromagnetic relay K is in closure state, the normally closed contact K3-2 of electromagnetic relay K is in off-state, the current supply circuit of electromagnetic clutch 1 is connected, the current supply circuit of electromagnetic clutch 2 11 disconnects, DC velocity measuring moment unit 8 drives timing belt pulley two 13-2 by electromagnetic clutch 1 and harmonic speed reducer 12 and rotates, timing belt pulley two 13-2 drive timing belt pulley one 13-1 and ball screw 3 rotations by synchronous cog belt 13-3, and the ball screw 4 on the ball screw 3 drives slide block 5 and crucible pole 6 moves along ball line slideway 19 at a slow speed on ball screw 3 up or down;
107, the resistance of adjusting speed-regulating potentiometer R1 is
Wherein, R is the maximum value of speed-regulating potentiometer R1;
108,, calculate the translational speed of crucible pole 6 with 6 one hours miles of relative movement of optical grating ruler measurement crucible pole;
109, speed calibration potentiometer R3 calibrates speed indicator gauge V by regulating at a slow speed, and it is identical to make speed indicator gauge V go up the translational speed of the crucible pole 6 that is calculated in speed of displaying and the step 108;
110, regulate speed-regulating potentiometer R1, making speed indicator gauge V go up speed of displaying is 0.2mm/h;
111, use 6 one hours miles of relative movement of optical grating ruler measurement crucible pole once more, and speed calibration potentiometer R3 recalibrates to speed indicator gauge V by regulating at a slow speed, making speed indicator gauge V go up stabilized presentation is 0.2mm/h;
112, according to the actual motion state of crucible pole 6, adjust the loop gain on the PWM DC servo driving mechanism 12A8, make steadily operation equably of crucible pole 6;
201, press reverser SB1, make it be in down state, PWM DC servo driving mechanism 12A8 drives DC velocity measuring moment unit 8 and rotates counterclockwise;
202, by transfer lever SB2 at a slow speed soon, make it be in the state of upspringing, the normally opened contact K3-1 of electromagnetic relay K is in off-state, the normally closed contact K3-2 of electromagnetic relay K is in closure state, the current supply circuit of electromagnetic clutch 1 disconnects, the current supply circuit of electromagnetic clutch 2 11 is connected, DC velocity measuring moment unit 8 drives timing belt pulley two 13-2 by electromagnetic clutch 2 11 and rotates, timing belt pulley two 13-2 pass through synchronous cog belt 13-3 and drive timing belt pulley one 13-1 and ball screw 3 rotations, and the ball screw 4 on the ball screw 3 drives slide blocks 5 and crucible pole 6 upwards moves along ball line slideway 19 on ball screw 3 fast;
203, regulate speed-regulating potentiometer R1, observation speed indicator gauge V goes up shown speed, when speed indicator gauge V goes up shown speed and is the actual needed quick travelling speed of crucible pole 6, stop to regulate speed-regulating potentiometer R1, crucible pole 6 upwards moves at ball screw 3 upper edge ball line slideways 19 with the needed quick travelling speed of reality on ball screw 3;
301, press reverser SB1, make it be in the state of upspringing, PWM DC servo driving mechanism 12A8 drives DC velocity measuring moment unit 8 and clockwise rotates;
302, by transfer lever SB2 at a slow speed soon, make it be in down state, the normally opened contact K3-1 of electromagnetic relay K is in closure state, the normally closed contact K3-2 of electromagnetic relay K is in off-state, the current supply circuit of electromagnetic clutch 1 is connected, the current supply circuit of electromagnetic clutch 2 11 disconnects, DC velocity measuring moment unit 8 drives timing belt pulley two 13-2 by electromagnetic clutch 1 and harmonic speed reducer 12 and rotates, timing belt pulley two 13-2 drive timing belt pulley one 13-1 and ball screw 3 rotations by synchronous cog belt 13-3, and the ball screw 4 on the ball screw 3 drives slide block 5 and crucible pole 6 moves downwards along ball line slideway 19 at a slow speed on ball screw 3;
303, regulate speed-regulating potentiometer R1, observation speed indicator gauge V goes up shown speed, as speed indicator gauge V when to go up shown speed be actual needed crucible pole 6 slow running speed, stop to regulate speed-regulating potentiometer R1, crucible pole 6 moves downwards at ball screw 3 upper edge ball line slideways 19 with the needed slow running speed of reality on ball screw 3;
Step 4, go out heater stage, regulate described operation and speed-adjusting and control system according to step 201～step 203, make crucible pole 6 with the needed quick travelling speed of reality in the upwards operation of ball screw 3 upper edge ball line slideways 19, run to correct position after, take out the good crystal of growth.
Wherein, in step 101, step 202 and the step 4 crucible pole 6 fast in the speed of operation and the step 203 crucible pole 6 actual needed quick travelling speed be 0.2cm/min～10cm/min, in step 106 and the step 302 in the speed of crucible pole 6 slow runnings and the step 303 crucible pole 6 actual needed slow running speed be 0.2mm/h～10mm/h.
In addition, among the present invention, be provided with the drift stop 7 that is connected with ball screw 3 on the top of column 2, after the energising, electro-magnet 7-2 adhesive friction plate 7-3 in the brake 7-1, friction plate 7-3 is separated with retarding disc 7-4, and ball screw 3 freely rotated and drove crucible pole 6 by ball screw 4 and slide block 5 and moves up and down this moment; After the outage, electro-magnet 7-2 outage in the brake 7-1, friction plate 7-3 is under the effect of holddown spring 7-5, hold out against friction plate 7-5, friction plate 7-5 is pressed on the end face of retarding disc 7-4, frictional force can not be rotated retarding disc 7-4, thereby makes ball screw 3 stop operating, and reaches braking effect.This drift stop 7 can reduce crystal growth producer when having a power failure because of unforeseen circumstancess such as thunder and lightning, heavy rain cause to the full extent, and crucible pole 6 glides automatically because of load and deadweight, causes whole crystal to scrap the massive losses that is brought.
The above; it only is preferred embodiment of the present invention; be not that the present invention is imposed any restrictions, everyly any simple modification that above embodiment did, change and equivalent structure changed, all still belong in the protection domain of technical solution of the present invention according to the technology of the present invention essence.
Claims (7)
1. the crucible pole of a single motor wide speed regulating range moves velocity control system, it is characterized in that: comprise pedestal (1), operation and speed-adjusting and control system that the top of described pedestal (1) is provided with crucible pole running gear, the power that is connected with the crucible pole running gear and velocity control system and is connected with power and velocity control system with the crucible pole running gear;
Described crucible pole running gear comprises the column (2) that the bottom is connected with pedestal (1), be fixedly connected on the ball line slideway (19) on column (2) sidewall, being rotatably connected on column (2) goes up and the ball screw (3) parallel with ball line slideway (19), be socketed in the ball screw (4) on the ball screw (3), the slide block (5) that is connected with ball line slideway (19) and moves up and down at ball screw (3) upper edge ball line slideway (19) with ball screw (4) with ball screw (4), and connect and with the crucible pole (6) of slide block (5) operation with slide block (5); The bottom of described ball screw (3) is connected with the timing belt pulley one (13-1) that is used to connect crucible pole running gear and power and velocity control system; The fixedly connected drift stop (7) that prevents that ball screw when power down (3) is rotated further that is useful in the top of described column (2), described drift stop (7) comprises and is fixedly connected on the vertical brake of column (2) (7-1), be integrated in the electro-magnet (7-2) in the brake (7-1), and interior friction plate (7-3) and the retarding disc (7-4) of cavity that is arranged on brake (7-1) and column (2) top formation, described retarding disc (7-4) and friction plate (7-3) are installed on the ball screw (3) from top to bottom successively, are provided with many embeddings between described friction plate (7-3) and the brake (7-1) and are installed to holddown spring (7-5) in the brake (7-1);
Described power and velocity control system comprise DC velocity measuring moment unit (8) and join with DC velocity measuring moment unit (8) and be installed in speed regulation device in the velocity control system install bin (9) that described speed regulation device comprise electromagnetic clutch one (10) and the electromagnetic clutch two (11) that is connected with DC velocity measuring moment unit (8), the harmonic speed reducer (12) that is connected with DC velocity measuring moment unit (8) by electromagnetic clutch one (10), and the timing belt pulley two (13-2) that is connected with harmonic speed reducer (12) or is connected with DC velocity measuring moment unit (8) by electromagnetic clutch two (11); Described power and velocity control system are by timing belt pulley one (13-1), timing belt pulley two (13-2) and be connected across belt pulley one (13-1) and be connected with the crucible pole running gear with synchronous cog belt (13-3) on the belt pulley two (13-2) and drive the operation of crucible running gear;
Described operation and speed-adjusting and control system comprise the operation driving that is connected with drift stop (7) with DC velocity measuring moment unit (8) and alignment circuit (14-1) and the change-over circuit (14-2) at a slow speed soon that is connected with electromagnetic clutch two (11) with electromagnetic clutch one (10); Described operation driving and alignment circuit (14-1) are by PWM DC servo driving mechanism 12A8, servo-driver power supply (15), reverser SB1, speed-regulating potentiometer R1, quick speed calibration potentiometer R2, speed calibration potentiometer R3 at a slow speed, speed indicator gauge V and two groups of contacts that have among the electromagnetic relay K of four groups of contacts constitute, and four groups of contacts of described electromagnetic relay K are respectively normally opened contact K1-1 and normally closed contact K1-2, normally opened contact K2-1 and normally closed contact K2-2, normally opened contact K3-1 and normally closed contact K3-2, and normally opened contact K4-1 and normally closed contact K4-2; The power interface pin 5 of the positive output end of described servo-driver power supply (15) and PWM DC servo driving mechanism 12A8 and the positive supply input terminus of drift stop (7) join, the power interface pin 4 of the negative output terminal of described servo-driver power supply (15) and PWM DC servo driving mechanism 12A8 and the negative supply input terminus of drift stop (7) join, the signaling interface pin 6 of described PWM DC servo driving mechanism 12A8, signaling interface pin 7, the velodyne negative input end of power interface pin 1 and power interface pin 2 difference correspondences and DC velocity measuring moment unit (8), the velodyne positive input terminal, motor negative input end and motor positive input terminal join, the signaling interface pin 1 of described PWM DC servo driving mechanism 12A8 and signaling interface pin 3 correspondence respectively join with an end of the normally opened contact of reverser SB1 and an end of normally closed contact, the other end of the normally opened contact of described reverser SB1 and the other end of normally closed contact all join with the inboardend of speed-regulating potentiometer R1, the signaling interface pin 5 of described PWM DC servo driving mechanism 12A8 and the sliding end of speed-regulating potentiometer R1, the end of the end of the normally opened contact K1-1 of electromagnetic relay K and the normally closed contact K1-2 of electromagnetic relay K joins, the other end of the other end of the normally opened contact K1-1 of described electromagnetic relay K and the normally closed contact K1-2 of electromagnetic relay K respectively with inboardend of quick speed calibration potentiometer R2 and at a slow speed the inboardend of speed calibration potentiometer R3 join, another inboardend of described quick speed calibration potentiometer R2 and at a slow speed another inboardend of speed calibration potentiometer R3 join with the end of the normally closed contact K2-2 of the end of the normally opened contact K2-1 of electromagnetic relay K and electromagnetic relay K respectively, the other end of the other end of the normally opened contact K2-1 of electromagnetic relay K and the normally closed contact K2-2 of electromagnetic relay K all joins the sliding end of described quick speed calibration potentiometer R2 with the input terminus of speed indicator gauge V, the output terminal of the sliding end of speed calibration potentiometer R3 and speed indicator gauge V all joins with the signaling interface pin 2 of PWM DC servo driving mechanism 12A8 and another inboardend of speed-regulating potentiometer R1 at a slow speed; Described soon at a slow speed change-over circuit (14-2) by electromagnetic clutch power (16), transfer lever SB2 at a slow speed soon, and the one group of contact that has among the electromagnetic relay K of four groups of contacts constitutes, described fast transfer lever SB2 at a slow speed and the two ends that are connected in parallel on electromagnetic clutch power (16) after the coil of electromagnetic relay K is connected, the normally opened contact K3-1 of described electromagnetic relay K is connected on electromagnetic clutch power (16) and gives in the current supply circuit of electromagnetic clutch one (10) power supply, and the normally closed contact K3-2 of described electromagnetic relay K is connected on electromagnetic clutch power (16) and gives in the current supply circuit of electromagnetic clutch two (11) power supplies.
2. the crucible pole according to the described single motor wide speed regulating range of claim 1 moves velocity control system, it is characterized in that: described electromagnetic clutch one (10) by be installed on DC velocity measuring moment unit (8) output shaft gear one (17-1) be installed in electromagnetic clutch one (10) input shaft on and be connected with DC velocity measuring moment unit (8) with gear one (17-1) meshed gears two (17-2), described electromagnetic clutch two (11) by be installed on DC velocity measuring moment unit (8) output shaft gear one (17-1) be installed in electromagnetic clutch two (11) input shafts on and be connected with DC velocity measuring moment unit (8) with gear one (17-1) meshed gears three (17-3), described harmonic speed reducer (12) is connected on the output shaft of electromagnetic clutch one (10) by key, described timing belt pulley two (13-2) is by being installed in the transmission shaft (18) on the velocity control system install bin (9), be installed on the transmission shaft (18) gear four (17-4) be installed in harmonic speed reducer (12) output shaft on and be connected with harmonic speed reducer (12) with gear four (17-4) meshed gears five (17-5), perhaps described timing belt pulley two (13-2) is by being installed in the transmission shaft (18) on the velocity control system install bin (9), the gear four (17-4) that is installed on the transmission shaft (18) is connected with electromagnetic clutch two (11) with gear six (17-6) on being installed in electromagnetic clutch two (11) output shafts.
3. according to the crucible pole operation velocity control system of claim 1 or 2 described single motor wide speed regulating ranges, it is characterized in that: described servo-driver power supply (15) is the direct supply of 36V for output voltage.
4. according to the crucible pole operation velocity control system of claim 1 or 2 described single motor wide speed regulating ranges, it is characterized in that: described electromagnetic clutch power (16) is the direct supply of 24V for output voltage.
5. according to the crucible pole operation velocity control system of claim 1 or 2 described single motor wide speed regulating ranges, it is characterized in that: described holddown spring (7-5) is two or four.
6. method of utilizing velocity control system according to claim 1 to carry out crucible pole operation speed governing is characterized in that this method may further comprise the steps:
Before step 1, the use, V calibrates to the speed indicator gauge, makes crucible pole (6) when quick operation and slow running, and speed indicator gauge V goes up speed of displaying and equates that with the speed of crucible pole actual motion its detailed process is as follows:
101, by transfer lever SB2 at a slow speed soon, make it be in the state of upspringing, the normally opened contact K3-1 of electromagnetic relay K is in off-state, the normally closed contact K3-2 of electromagnetic relay K is in closure state, the current supply circuit of electromagnetic clutch one (10) disconnects, the current supply circuit of electromagnetic clutch two (11) is connected, DC velocity measuring moment unit (8) drives timing belt pulley two (13-2) by electromagnetic clutch two (11) and rotates, timing belt pulley two (13-2) drives timing belt pulley one (13-1) and ball screw (3) rotation by synchronous cog belt (13-3), and the ball screw (4) on the ball screw (3) drives slide block (5) and crucible pole (6) moves along ball line slideway (19) on ball screw (3) fast up or down;
102, the electric current of regulating on the PWM DC servo driving mechanism 12A8 limits potentiometer, and the maximum current that PWM DC servo driving mechanism 12A8 is exported is 8A;
103, the resistance of adjusting speed-regulating potentiometer R1 is maximum;
104, regulate reference gain potentiometer on the PWM DC servo driving mechanism 12A8, with the miles of relative movement of optical grating ruler measurement crucible pole (6), one of making minute miles of relative movement is 10cm;
105, by regulating quick speed calibration potentiometer R2 speed indicator gauge V is calibrated, make on the speed indicator gauge V and be shown as 10cm/min;
106, by transfer lever SB2 at a slow speed soon, make it be in down state, the normally opened contact K3-1 of electromagnetic relay K is in closure state, the normally closed contact K3-2 of electromagnetic relay K is in off-state, the current supply circuit of electromagnetic clutch one (10) is connected, the current supply circuit of electromagnetic clutch two (11) disconnects, DC velocity measuring moment unit (8) drives timing belt pulley two (13-2) by electromagnetic clutch one (10) and harmonic speed reducer (12) and rotates, timing belt pulley two (13-2) drives timing belt pulley one (13-1) and ball screw (3) rotation by synchronous cog belt (13-3), and the ball screw (4) on the ball screw (3) drives slide block (5) and crucible pole (6) moves along ball line slideway (19) at a slow speed on ball screw (3) up or down;
107, the resistance of adjusting speed-regulating potentiometer R1 is
Wherein, R is the maximum value of speed-regulating potentiometer R1;
108,, calculate the translational speed of crucible pole (6) with (6) one hours miles of relative movement of optical grating ruler measurement crucible pole;
109, speed calibration potentiometer R3 calibrates speed indicator gauge V by regulating at a slow speed, and it is identical to make speed indicator gauge V go up the translational speed of the crucible pole (6) that is calculated in speed of displaying and the step 108;
110, regulate speed-regulating potentiometer R1, making speed indicator gauge V go up speed of displaying is 0.2mm/h;
111, use (6) one hours miles of relative movement of optical grating ruler measurement crucible pole once more, and speed calibration potentiometer R3 recalibrates to speed indicator gauge V by regulating at a slow speed, making speed indicator gauge V go up stabilized presentation is 0.2mm/h;
112, according to the actual motion state of crucible pole (6), adjust the loop gain on the PWM DC servo driving mechanism 12A8, make steadily operation equably of crucible pole (6);
Step 2, shove charge stage, install raw materials for production after, regulate described operation and speed-adjusting and control system, make crucible pole (6) with the needed quick travelling speed of reality in upwards operation of ball screw (3) upper edge ball line slideway (19), its detailed process is as follows:
201, press reverser SB1, make it be in down state, PWM DC servo driving mechanism 12A8 drives DC velocity measuring moment unit (8) and rotates counterclockwise;
202, by transfer lever SB2 at a slow speed soon, make it be in the state of upspringing, the normally opened contact K3-1 of electromagnetic relay K is in off-state, the normally closed contact K3-2 of electromagnetic relay K is in closure state, the current supply circuit of electromagnetic clutch one (10) disconnects, the current supply circuit of electromagnetic clutch two (11) is connected, DC velocity measuring moment unit (8) drives timing belt pulley two (13-2) by electromagnetic clutch two (11) and rotates, timing belt pulley two (13-2) passes through synchronous cog belt (13-3) and drives timing belt pulley one (13-1) and ball screw (3) rotation, and the ball screw (4) on the ball screw (3) drives slide block (5) and crucible pole (6) upwards moves along ball line slideway (19) on ball screw (3) fast;
203, regulate speed-regulating potentiometer R1, observation speed indicator gauge V goes up shown speed, when speed indicator gauge V goes up shown speed and is the actual needed quick travelling speed of crucible pole (6), stop to regulate speed-regulating potentiometer R1, crucible pole (6) is gone up with the needed quick travelling speed of reality in upwards operation of ball screw (3) upper edge ball line slideway (19) at ball screw (3);
Step 3, crystal normal growth stage, regulate described operation and speed-adjusting and control system, crucible pole (6) is moved downwards at ball screw (3) upper edge ball line slideway (19) with the needed slow running speed of reality, its detailed process is as follows:
301, press reverser SB1, make it be in the state of upspringing, PWM DC servo driving mechanism 12A8 drives DC velocity measuring moment unit (8) and clockwise rotates;
302, by transfer lever SB2 at a slow speed soon, make it be in down state, the normally opened contact K3-1 of electromagnetic relay K is in closure state, the normally closed contact K3-2 of electromagnetic relay K is in off-state, the current supply circuit of electromagnetic clutch one (10) is connected, the current supply circuit of electromagnetic clutch two (11) disconnects, DC velocity measuring moment unit (8) drives timing belt pulley two (13-2) by electromagnetic clutch one (10) and harmonic speed reducer (12) and rotates, timing belt pulley two (13-2) passes through synchronous cog belt (13-3) and drives timing belt pulley one (13-1) and ball screw (3) rotation, and the ball screw (4) on the ball screw (3) drives slide block (5) and crucible pole (6) moves downwards along ball line slideway (19) at a slow speed on ball screw (3);
303, regulate speed-regulating potentiometer R1, observation speed indicator gauge V goes up shown speed, when the last shown speed of speed indicator gauge V is actual needed crucible pole (6) slow running speed, stop to regulate speed-regulating potentiometer R1, crucible pole (6) is gone up with the needed slow running speed of reality in ball screw (3) upper edge ball line slideway (19) operation downwards at ball screw (3);
Step 4, go out heater stage, regulate described operation and speed-adjusting and control system according to step 201～step 203, crucible pole (6) is upwards moved at ball screw (3) upper edge ball line slideway (19) with the needed quick travelling speed of reality, after running to correct position, take out the good crystal of growth.
7. the crucible pole according to the described single motor wide speed regulating range of claim 6 moves speed regulating method, it is characterized in that: the actual needed quick travelling speed of crucible pole (6) is 0.2cm/min～10cm/min in speed that crucible pole in step 101, step 202 and the step 4 (6) moves fast and the step 203, and the actual needed slow running speed of crucible pole (6) is 0.2mm/h～10mm/h in the speed of crucible pole in step 106 and the step 302 (6) slow running and the step 303.
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| CN 201110132378 CN102220627B (en) | 2011-05-23 | 2011-05-23 | Single-motor and wide-speed-regulation range crucible rod operation speed regulating system and speed regulation method |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105016027A (en) * | 2015-06-23 | 2015-11-04 | 贵州银泰铝业有限公司 | Aluminum plate carrying device |
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| EP1739210A1 (en) * | 2005-07-01 | 2007-01-03 | Freiberger Compound Materials GmbH | Method for production of doped semiconductor single crystal, and III-V semiconductor single crystal |
| CN1920116A (en) * | 2006-08-04 | 2007-02-28 | 嘉兴学院 | Growth system of crystal by resistance heating vertical multi-crucible descent method |
| CN101970728A (en) * | 2008-03-24 | 2011-02-09 | 信越半导体股份有限公司 | Single-crystal manufacturing apparatus and method for manufacturing single crystal |
| US20090249994A1 (en) * | 2008-04-07 | 2009-10-08 | Axt Technology, Inc. | Crystal growth apparatus and method |
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