CN102189617B - Surface activation treatment device - Google Patents
Surface activation treatment device Download PDFInfo
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- CN102189617B CN102189617B CN201010117058.6A CN201010117058A CN102189617B CN 102189617 B CN102189617 B CN 102189617B CN 201010117058 A CN201010117058 A CN 201010117058A CN 102189617 B CN102189617 B CN 102189617B
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- treatment device
- surface activation
- activation treatment
- urceolus
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Abstract
The invention provides a surface activation treatment device, which comprises a shell, a reaction device and a sealing device, wherein the shell comprises an inner side wall and a bottom wall; a base plate is fixedly arranged on the inner side wall; a shaft hole is formed on the bottom wall; one end of the reaction device is sealed by a bottom plate, and a rotating shaft is vertically extended from the bottom plate; the reaction device is accommodated in the shell, and the rotating shaft is extended out of the shaft hole; the reaction device comprises an outer barrel, an inner barrel and an ultraviolet light lamp tube; the outer barrel and the inner barrel are fixedly arranged on the bottom plate, and the inner barrel is accommodated in the outer barrel; a lamp tube hole for accommodating the ultraviolet light lamp tube is formed in the outer barrel; a first space is formed between the outer barrel and the inner barrel; a second space is formed by enclosing the inner barrel; the sealing device comprises a cover body which is used for sealing the first space and the second space and is rotated relative to the shell, a first air inlet pipe which is communicated with the first space and a second air inlet pipe which is communicated with the second space; and the side wall of the outer barrel is provided with a first nozzle which is communicated with the first space, a first nozzle which is communicated with the second space and a light outlet hole which is communicated with the ultraviolet light lamp tube.
Description
Technical field
The present invention relates to a kind of surface activation treatment device.
Background technology
The surface tension of general high molecule plastic is extremely low, and interface poor adherence, such as the surface of the plastics such as PET, PTFE, PC all must pass through surface pretreatment conventionally before processing, and change interfacial property, to improve the surperficial bonding force of plastics.
Traditional processing method has chemical method, electric slurry method, corona method and uv irradiation method.Chemical method has the misgivings of waste liquid in environmental protection, less use.Electricity slurry method advantage is that the gas that utilization passes into is different, can reach the object of difference, and its effect is good, shortcoming is under vacuum low-pressure, to process, vacuumize and the process of vacuum breaker consuming time, be difficult for accomplishing continuity processing, and equipment cost is higher, is also its disadvantage.Corona method advantage is that method is simple, can under atmospheric pressure, process, and equipment cost is lower; Shortcoming is inexcellent for effect after processing, and only some specific object is had to certain effect, if the parameters of equipment is adjusted when bad, can destroy object itself.Uv irradiation method advantage can be carried out continuity processing under atmospheric pressure, but can only carry out single processing to the surface of plastics, cannot reach multifarious requirement.
Summary of the invention
In view of this, being necessary to provide a kind of can carry out continuously and the surface activation treatment device of diverse processing by effects on surface.
, it is for carrying out activation processing to substrate surface; This surface activation treatment device comprises a shell, a reaction unit and a locking device; Described shell comprises a madial wall and a diapire, and described substrate is installed on described madial wall, offers an axis hole on described diapire; Described reaction unit one end is by a base plate sealing and vertically extend a rotating shaft from this base plate, and the in the enclosure accommodating and described rotating shaft of this reaction unit is stretched out in described axis hole; This reaction unit comprises a urceolus, an inner core and at least one ultraviolet tube, and described urceolus and inner core are fixedly arranged on base plate, and inner core is placed in urceolus, offers at least one fluorescent tube hole in described urceolus, and described ultraviolet tube is placed in described fluorescent tube hole; Between urceolus and inner core, form one first space, inner core surrounds a second space; Described locking device comprises the lid that rotate in sealing the first space and second space and opposite shell, the first air inlet pipe being connected with the first space and the second air inlet pipe being connected with second space; The sidewall of described urceolus is provided with a plurality of the second spouts that are communicated with the first space, the first spout being communicated with second space and the light hole being connected with ultraviolet tube.
Reaction unit in surface activation treatment device provided by the invention is when the ultraviolet light that uses ultraviolet tube transmitting carries out uv irradiation method processing to substrate, the gas electric pulp ejecting from the second spout and the first spout respectively and inert gas are processed substrate is carried out to electric slurry method, substrate surface is carried out to continuous and multifarious surface activation process.
Accompanying drawing explanation
Fig. 1 is the decomposing schematic representation of the surface activation treatment device that provides of embodiment of the present invention.
Fig. 2 is the decomposing schematic representation of another angle of the surface activation treatment device in Fig. 1.
Fig. 3 is the cut-away view of the surface activation treatment device in Fig. 1.
Main element symbol description
Surface activation treatment device 100
Shell 10
Accommodating cavity 101
Madial wall 11
Diapire 12
Loading plate 13
Urceolus 21
The first side wall 212
The first spout 212a
The second sidewall 213
The second spout 213a
The 3rd sidewall 214
Inner core 22
The first space 24
The first air inlet pipe 32
The second air inlet pipe 33
Drive division 41
The specific embodiment
Below with reference to the drawings, the present invention is described in further detail.
As shown in Figures 1 to 3, be a kind of surface activation treatment device 100 that embodiment of the present invention provides, it is for carrying out surface activation process to substrate 200; Described surface activation treatment device 100 comprises a shell 10, a reaction unit 20, a locking device 30 and a drive unit 40.
Described shell 10 is semiclosed six prism sleeves, and this shell 10 comprises a madial wall 11 and a diapire 12.Described madial wall 11 is vertically installed in the edge of described diapire 12, and forms an accommodating cavity 101 with diapire 12.The center of described diapire 12 offers an axis hole 121.Described shell 10 also comprises that one is fixedly arranged on the loading plate 13 on madial wall 11, and described loading plate 13 is strip thin plate, and on described loading plate 13, offers a plurality of for carrying the load bearing seat 131 of base material to be coated.In present embodiment, six loading plates 13 are respectively by the dismountable madial wall 11 that is installed in shell 10 of screw; Be appreciated that the mode that loading plate 13 is fixed to shell 10 has a variety of, for example, magnet attracts each other, buckle engaging etc.
Described reaction unit 20 comprises a urceolus 21, an inner core 22 and at least one ultraviolet tube 23.Described reaction unit 20 one end are by base plate 201 sealing and extend downward vertically a rotating shaft 202 from this base plate 201.Described reaction unit 20 is contained in the accommodating cavity 101 of shell 10, and described rotating shaft 202 stretches out from described axis hole 121, and described reaction unit 20 is rotationally connected by rotating shaft 202 and axis hole 121 with shell 10.Described urceolus 21 axially offers at least one fluorescent tube hole 211 along it, and described ultraviolet tube 23 is placed in described fluorescent tube hole 211.
Described urceolus 21 is approximate hexagonal prism, and it is fixedly arranged on base plate 201 and with base plate 201 and forms a semi-enclosed space.Described urceolus 21 comprises connected successively the first side wall 212, the second sidewall 213 and the 3rd sidewall 214.On described the first side wall 212, be provided with a plurality of the first spout 212a, on described the second sidewall 213, be provided with a plurality of the second spout 213a, on described the 3rd sidewall 214, offer a plurality of light hole 214a; Described a plurality of the first spout 212a, the second spout 213a and light hole 214a arrange along urceolus 21 axis directions respectively.Described inner core 22 is ring cylinder, and it is placed in urceolus 21, and one end is sealed by base plate 201.Between described inner core 22 and urceolus 21, form one first space 24, interior formation one second space 25 of described inner core 22, and described the first spout 212a is connected with described second space 25, and described the second spout 213a is connected with described the first space 24.Described light hole 214a is connected with the ultraviolet tube 23 being placed in fluorescent tube hole 211.
Described locking device 30 comprises a lid 31, two the first air inlet pipe 32, two the second air inlet pipe 33 and two escape pipes 34.Described lid 31 seals shell 10 one end relative with diapire 12, and seals the first space 24 and second space 25 simultaneously; In present embodiment, described lid 31 fixes with reaction unit 20, and relatively described shell 10 is rotatable.Described the first air inlet pipe 32, the second air inlet pipe 33 and escape pipe 34 are sheathed on respectively in lid 31.Described two the first air inlet pipe 32 are connected with described the first space 24, for to the interior conveying gas electric pulp in this first space 24.Described two the second air inlet pipe 33 are connected with described second space 25, for to the interior conveying inert gas of this second space 25.Described two escape pipes 34 are connected with described accommodating cavity 101, for the interior unnecessary gas of described accommodating cavity 101, extract out.The ultraviolet tube 23 of the corresponding described urceolus 21 of described lid 31 offers two through holes 35, and stretch out from described through hole 35 one end of described ultraviolet tube 23.
Described drive unit 40 comprises a drive division 41 and a driving section 42, and described drive division 41 is fixedly arranged in a workbench (not shown), and described driving section 42 is fixedly connected with the rotating shaft 202 of reaction unit 20.Described drive unit 40 drives reaction unit 20 opposite shell 10 to rotate.
Before surface treatment starts, the substrate 200 that operator need to carry out surface activation process is positioned in the load bearing seat 131 of loading plate 13, then uses described locking device 30 that shell 10 and reaction unit 20 are all sealed.When treating substrate 200 and carrying out surface treatment, utilize escape pipe 34 in described shell 10, to be evacuated.Described drive unit 40 drives reaction unit 20 opposite shell 10 to rotate, and in the first space 24, passes into gas electric pulp by the first air inlet pipe 32, passes into inert gas, and open ultraviolet tube 23 simultaneously by the second air inlet pipe 33 in second space 25.The described gas electric pulp from the second spout 213a ejection is ionized into ion-conductance slurry under the bombardment effect of the inert gas from described the first spout 212a ejection, and the ultraviolet light light that described ultraviolet tube 23 is launched penetrates from described light hole 214a.Be arranged in each substrate 200 on shell 10 load bearing seats 131, at described reaction unit 20 in continuous rotary course, be subject to respectively the injection of ion-conductance slurry and the irradiation of ultraviolet light light, the surface of substrate 200 is carried out to continuous and multifarious surface activation process.
Reaction unit in surface activation treatment device provided by the invention is when the ultraviolet light that uses ultraviolet tube transmitting carries out uv irradiation method processing to substrate, the gas electric pulp ejecting from the second spout and the first spout respectively and inert gas are processed substrate is carried out to electric slurry method, make to carry out continuous and multifarious surface activation process to substrate surface.
Be understandable that, for the person of ordinary skill of the art, can make change and the distortion that other various pictures are answered by technical conceive according to the present invention, and all these change and distortion all should belong to the protection domain of the claims in the present invention.
Claims (6)
1. a surface activation treatment device, it is for carrying out activation processing to substrate surface; This surface activation treatment device comprises a shell, a reaction unit and a locking device; Described shell comprises a madial wall and a diapire, and described substrate is installed on described madial wall, offers an axis hole on described diapire; Described reaction unit one end is by a base plate sealing and vertically extend a rotating shaft from this base plate, and the in the enclosure accommodating and described rotating shaft of this reaction unit is stretched out in described axis hole; This reaction unit comprises a urceolus, an inner core and at least one ultraviolet tube, and described urceolus and inner core are fixedly arranged on base plate, and inner core is placed in urceolus, offers at least one fluorescent tube hole in described urceolus, and described ultraviolet tube is placed in described fluorescent tube hole; Between urceolus and inner core, form one first space, inner core surrounds a second space; Described locking device comprises the lid that rotate in sealing the first space and second space and opposite shell, the first air inlet pipe being connected with the first space and the second air inlet pipe being connected with second space; The sidewall of described urceolus is provided with a plurality of the second spouts that are communicated with the first space, the first spout being communicated with second space and the light hole being connected with ultraviolet tube.
2. surface activation treatment device as claimed in claim 1, is characterized in that: described madial wall and diapire form an accommodating cavity, and described locking device also comprises an escape pipe, and described escape pipe is connected with accommodating cavity.
3. surface activation treatment device as claimed in claim 1, is characterized in that: described urceolus comprises connected successively the first side wall, the second sidewall and the 3rd sidewall; Described the first spout is positioned on the first side wall, and described the second spout is positioned on the second sidewall, and described light hole is positioned on the 3rd sidewall.
4. surface activation treatment device as claimed in claim 3, is characterized in that: described fluorescent tube hole is connected with light hole, and the light of described ultraviolet tube transmitting penetrates from light hole.
5. surface activation treatment device as claimed in claim 1, is characterized in that: described surface activation treatment device also comprises a drive unit, and described drive unit is connected with described rotating shaft.
6. surface activation treatment device as claimed in claim 1, is characterized in that: in described the first air inlet pipe, pass into electricity slurry gas, in described the second air inlet pipe, pass into inert gas, described electricity slurry gas forms ion-conductance slurry under the bombardment of inert gas.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010117058.6A CN102189617B (en) | 2010-03-03 | 2010-03-03 | Surface activation treatment device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201010117058.6A CN102189617B (en) | 2010-03-03 | 2010-03-03 | Surface activation treatment device |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN102189617A CN102189617A (en) | 2011-09-21 |
| CN102189617B true CN102189617B (en) | 2014-02-19 |
Family
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201010117058.6A Expired - Fee Related CN102189617B (en) | 2010-03-03 | 2010-03-03 | Surface activation treatment device |
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| CN (1) | CN102189617B (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN106483219B (en) * | 2016-10-11 | 2019-09-17 | 深圳市华星光电技术有限公司 | Photoresist atomizing treatment equipment and photoresist atomization process system |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63144513A (en) * | 1986-12-09 | 1988-06-16 | Nkk Corp | Barrel type epitaxial growth device |
| US6096998A (en) * | 1996-09-17 | 2000-08-01 | Micron Technology, Inc. | Method and apparatus for performing thermal reflow operations under high gravity conditions |
| JP4478849B2 (en) * | 2000-07-17 | 2010-06-09 | 東洋紡績株式会社 | Method for producing laminated biaxially oriented polyamide film |
| US7115304B2 (en) * | 2004-02-19 | 2006-10-03 | Nanosolar, Inc. | High throughput surface treatment on coiled flexible substrates |
| US7462246B2 (en) * | 2005-04-15 | 2008-12-09 | Memc Electronic Materials, Inc. | Modified susceptor for barrel reactor |
| CN101481789B (en) * | 2008-01-11 | 2012-03-21 | 财团法人工业技术研究院 | Film coating system and isolation device thereof |
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2010
- 2010-03-03 CN CN201010117058.6A patent/CN102189617B/en not_active Expired - Fee Related
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| Publication number | Publication date |
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| CN102189617A (en) | 2011-09-21 |
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