CN102182899A - Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof - Google Patents
Large-stroke three-translation orthogonal decoupling-type precise micromotion platform and control method thereof Download PDFInfo
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Abstract
The invention relates to a large-stroke three-translation orthogonal decoupling-type precise micromotion platform and a control method thereof. A laser displacement transducer of a precise micromotion platform system is connected with the input end of a central control unit; the laser displacement transducer is positioned outside of the precise micromotion platform; a displacement detection baffle is mounted on the precise micromotion platform; the laser displacement transducer is corresponding with the displacement detection baffle; the output end of the central control unit is connected with the input end of a power supply of a driver; a multi-path output end of the power supply of the driver is connected with each micro displacement driver; and each micro displacement driver is mounted in the precise micromotion platform. A symmetrical structure is adopted for the precise micromotion platform, the decoupling at the motion direction and 'temperature drift effect' are effectively avoided, moreover the structure is simple and compact, the positioning accuracy is high, the working range of 1mm*1mm*50mu m can be realized, the precise micromotion platform and the control method thereof can be widely used in the fields requiring precise operation and manufacturing, such as bioengineering, optical fiber butt joint.
Description
Technical field
The present invention relates to a kind of three translation micromotion platforms and square controlling method thereof, particularly a kind of big stroke three-translation orthogonal decoupling type precise jiggle platform and controlling method thereof.
Background technique
Precision positioning technology is one of key technology of modern advanced manufacturing technique, is widely used in the field that ultraprecise processing, micromanipulation, biomedical engineering etc. require accurate operation.The precise jiggle platform has extremely important status as one of key equipment in Precision Position Location System.
The mechanism form of paralleling mechanism as piezoelectric constant micromanipulator platform adopted in foreign scholar Ellis suggestion in 1962, and carried out correlation test in microsurgery and biotechnology.Hara and Hemini have studied planar three freedom and six-freedom micro displacement platform.Domestic, relevant units such as Tsing-Hua University, BJ University of Aeronautics ﹠ Astronautics, Harbin Institute of Technology have carried out correlative study to the micromanipulator platform technology.The Sun Lining of Harbin Institute of Technology professor discloses " Six-degree-of-freedom Large Stroke, High Precision Flexible Parallel Connection Robot " in publication number is the patent document of CN 1562579A; The peak professor of Hebei University of Technology discloses " vernier robot with decoupled parallel three freedoms and three-axle structure ", " four-freedom four-shaft structure decoupling parallel jiggle robot ", " vernier robot with decoupled parallel five freedoms and five-axle structure ", " six-freedom parallel decoupling-structure jogging robot " in publication number is the patent document of CN1257772A, CN1257771A, CN1257770A and CN1258589A.The Zhang Yanfei of Shandong Technology Univ discloses " three platform orthogonal decoupling parallel micromotion platforms " in the patent document of publication number CN100999080A.
Although there are numerous scholars that the precise jiggle platform technology is studied both at home and abroad, but these achievements and technology have been considered the requirement of precision mostly, the range of movement of whole platform, rigidity etc. are considered not enough, in addition, some mechanism is too complicated, and some mechanism kinematic decoupling zero difficulty; Aspect the displacement detection means, many at present employing grating sensors, capacitive transducer or laser interferometer are measured, but these detecting methods are subjected to the restriction of installing space more or environment is had harsh requirement.
Summary of the invention
The objective of the invention is to provide a kind of big stroke three-translation orthogonal decoupling type precise jiggle platform and controlling method thereof, solve the precise jiggle platform and adopt grating sensor, capacitive transducer or laser interferometer to measure more, but these detecting methods are subjected to the restriction of installing space more or environment is had the harsh problem that requires.
The object of the present invention is achieved like this: this precise jiggle plateform system comprises precise jiggle platform, micro-displacement driver, drive power supply, central unit, laser displacement sensor and displacement detecting baffle plate, laser displacement sensor links to each other with the input end of central unit, laser displacement sensor is positioned at outside the precise jiggle platform, the displacement detecting baffle plate is installed on the precise jiggle platform, and laser displacement sensor is corresponding with the displacement detecting baffle plate; The output terminal of central unit links to each other with the input end of drive power supply, and the multi-channel output of drive power supply links to each other with each micro-displacement driver, and micro-displacement driver is installed in the precise jiggle platform.
Described precise jiggle platform comprises object table, XY two dimension base platform, fixed platform, bridge-type micro displacement magnifying mechanism and flexible side chain, on XY two dimension base platform, be connected with object table, object table is the Z shaft platform, is connected with the fixed platform and the bridge-type micro displacement magnifying mechanism of X-axis and Y-axis in XY two dimension base platform four sides; Described micro-displacement driver has the micro-displacement driver of X-axis and Y-axis, the micro-displacement driver of X-axis and Y-axis is installed in respectively in the bridge-type micro displacement magnifying mechanism of X-axis or Y-axis, X-axis links to each other with X-axis or Y-axis fixed platform respectively with Y-axis bridge-type micro displacement magnifying mechanism, the parallel four-bar guide mechanism that the limit of XY two dimension base platform and flexible side chain are formed X-axis and Y-axis, micro-displacement driver, fixed platform and bridge-type micro displacement magnifying mechanism are positioned at parallelogram lindage.
The controlling method of plateform system is: central unit (27) converts the displacement amount of default object table (13) the correspondent voltage signal to and sends to drive power supply (26), drive power supply (26) amplifies the voltage signal that receives, and then drive XY two dimension base platform (1) and object table (13), to realize the Three Degree Of Freedom translational motion of object table along X, Y and Z-direction; Simultaneously, be located at X-axis laser displacement sensor (5), the Y-axis laser displacement sensor (22) on XY two dimension base platform (1) axial direction and be located at the position information that the Z axle laser displacement sensor (14) above the object table (13) will be gathered the precise jiggle platform, and the position information that collects fed back to central unit (27), central unit (27) location information is handled and drive power supply (26) is done further control, thereby realizes closed loop control.
Beneficial effect: big stroke three-translation orthogonal decoupling type precise jiggle plateform system of the present invention comprises central unit, drive power supply, laser displacement sensor and the precise jiggle platform that can realize three translation functions; Wherein object table is arranged on the XY two dimension base platform by Z axle compliant mechanism, XY two dimension base platform links to each other with 4 fixed platforms respectively by 4 flexible side chains, integrated bridge-type micro displacement magnifying mechanism in every flexible side chain, and in the bridge-type micro displacement magnifying mechanism embedded micro-displacement driver; On the axial direction of XY two dimension base platform, be furnished with X-axis laser displacement sensor, Y-axis laser displacement sensor and corresponding with it X-axis displacement detecting baffle plate, Y-axis displacement detecting baffle plate respectively, above object table, be provided with Z axle laser displacement sensor.XY two dimension base platform and 4 flexible side chains are holohedral symmetry and arrange.Every flexible side chain also is a symplex structure, and integrated bridge-type micro displacement magnifying mechanism.XY two dimension base platform is two the driving on X-axis and Y-axis moving direction.The parallel four-bar guide mechanism of flexible side chain formation Y-axis after flexible side chain, the X-axis before XY two dimension base platform and the X-axis, flexible side chain constitutes the parallel four-bar guide mechanism of X-axis after the preceding flexible side chain of XY two dimension base platform and Y-axis, the Y-axis.Solved the precise jiggle platform and adopted grating sensor, capacitive transducer or laser interferometer to measure more, but these detecting methods are subjected to the restriction of installing space more or environment is had the harsh problem that requires, reach purpose of the present invention.
Advantage: (1) XY two dimension base platform and flexible side chain are the holohedral symmetry arrangement of mechanism, on X-axis and Y-axis moving direction, made up flexible guiding mechanism respectively based on parallel four-bar, object table is arranged on the XY two dimension base platform, can realize full decoupled Three Degree Of Freedom translation; (2) the bridge-type micro displacement magnifying mechanism can increase the output displacement of piezoelectric ceramic actuator significantly, and the form of having taked two drivings in X-axis and Y direction has simultaneously greatly been expanded the working stroke of micromotion platform; (3) whole platform links to each other with fixed platform by many flexible side chains, has improved the rigidity and the bearing capacity of whole platform effectively; (4) the precise jiggle platform adopts symplex structure, the coupling on the moving direction and " temperature is floated effect " have effectively been avoided, and simple and compact for structure, Location accuracy is high, can realize the operating range of 1mm * 1mm * 50um, can be widely used in the field that biomedical engineering, fiber alignment etc. need accurate operation and processing.
Description of drawings
Fig. 1 is a structural drawing of the present invention.
Fig. 2 is a controlling method block diagram of the present invention.
Among the figure, 1, XY two dimension base platform; 2, X-axis displacement detecting baffle plate; 3, displacement driver before the X-axis; 4, fixed platform before the X-axis; 5, X-axis laser displacement sensor; 6, the X-axis propons displacement amplifying mechanism that declines; 7, flexible side chain before the X-axis; 8, Z axle compliant mechanism; 9, flexible side chain after the Y-axis; 10, displacement driver after the Y-axis; 11, fixed platform after the Y-axis; 12, the Y-axis back axle displacement amplifying mechanism that declines; 13, object table; 14, Z axle laser displacement sensor; 15, the X-axis back axle displacement amplifying mechanism that declines; 16, displacement driver after the X-axis; 17, fixed platform after the X-axis; 18, flexible side chain after the X-axis; 19, displacement driver before the Y-axis; 20, the Y-axis propons displacement amplifying mechanism that declines; 21, flexible side chain before the Y-axis; 22, Y-axis laser displacement sensor; 23, fixed platform before the Y-axis; 24, Y-axis displacement detecting baffle plate, 25, the X-axis status of a sovereign moves driver; 26, drive power supply; 27, central unit.
Embodiment
Embodiment 1: this precise jiggle plateform system comprises precise jiggle platform, micro-displacement driver, drive power supply, central unit, laser displacement sensor and displacement detecting baffle plate, laser displacement sensor links to each other with the input end of central unit, laser displacement sensor is positioned at outside the precise jiggle platform, the displacement detecting baffle plate is installed on the precise jiggle platform, and laser displacement sensor is corresponding with the displacement detecting baffle plate; The output terminal of central unit links to each other with the input end of drive power supply, and the multi-channel output of drive power supply links to each other with each micro-displacement driver, and micro-displacement driver is installed in the precise jiggle platform.
Described precise jiggle platform comprises object table, XY two dimension base platform, fixed platform, bridge-type micro displacement magnifying mechanism, flexible side chain, on XY two dimension base platform, be connected with object table, object table is the Z shaft platform, is connected with the fixed platform and the bridge-type micro displacement magnifying mechanism of X-axis and Y-axis in XY two dimension base platform four sides; Described micro-displacement driver has the micro-displacement driver of X-axis and Y-axis, the micro-displacement driver of X-axis and Y-axis is installed in respectively in the bridge-type micro displacement magnifying mechanism of X-axis or Y-axis, X-axis links to each other with X-axis or Y-axis fixed platform respectively with Y-axis bridge-type micro displacement magnifying mechanism, the parallel four-bar guide mechanism that the limit of XY two dimension base platform and flexible side chain are formed X-axis and Y-axis, micro-displacement driver, fixed platform and bridge-type micro displacement magnifying mechanism are positioned at parallelogram lindage.
The controlling method of plateform system is: central unit 27 converts the displacement amount of default object table 13 the correspondent voltage signal to and sends to drive power supply 26,26 pairs of voltage signals that receive of drive power supply amplify, and then drive XY two dimension base platform 1 and object table 13, to realize the Three Degree Of Freedom translational motion of object table along X, Y and Z-direction; Simultaneously, be located at X on XY two dimension base platform 1 axial direction to laser displacement sensor 5, Y to laser displacement sensor 22 be located at the Z of object table 13 tops will gather position information from the precise jiggle platform to laser displacement sensor 14, and the position information that collects fed back to central unit 27, central unit 27 location information are handled and drive power supply 26 are done further control, thereby realize closed loop control.
Big stroke three-translation orthogonal decoupling type precise jiggle plateform system of the present invention comprises central unit 27, drive power supply 26, laser displacement sensor and the precise jiggle platform that can realize three translation functions; Wherein object table 13 is arranged on the XY two dimension base platform 1 by Z axle compliant mechanism 8, XY two dimension base platform 1 links to each other with 4 fixed platforms respectively by 4 flexible side chains, integrated bridge-type micro displacement magnifying mechanism in every flexible side chain, and in the bridge-type micro displacement magnifying mechanism embedded micro-displacement driver; On the axial direction of XY two dimension base platform 1, be furnished with X-axis laser displacement sensor 5, Y-axis laser displacement sensor 22 and X-axis displacement detecting baffle plate 2, Y-axis displacement detecting baffle plate 24 respectively, directly over object table 13, be provided with Z axle laser displacement sensor 14.
XY two dimension base platform 1 and 4 flexible side chains are holohedral symmetry and arrange.Every gentle side chain also is a symplex structure, and integrated bridge-type micro displacement magnifying mechanism.XY two dimension base platform 1 is two the driving on X-axis and Y-axis moving direction.The parallel four-bar guide mechanism of flexible side chain 18 formation Y-axis after flexible side chain 7, the X-axis before two-dimentional base platform 1 of XY and the X-axis, flexible side chain 9 constitutes the parallel four-bar guide mechanism of X-axis after the preceding flexible side chain 21 of XY two dimension base platform 1 and Y-axis, the Y-axis.
Big stroke three-translation orthogonal decoupling type precise jiggle platform comprises central unit 27, drive power supply 26, X-axis laser displacement sensor 5, Y-axis laser displacement sensor 14, Z axle laser displacement sensor 22, object table 13, XY two dimension base platform 1, Z axle compliant mechanism 8, is connected in 4 constituent elements such as flexible side chain between XY two dimension base platform 1 and the fixed platform.Object table 13 is arranged on the XY two dimension base platform 1 by Z axle compliant mechanism 8, XY two dimension base platform 1 is by flexible side chain 7 before the X-axis, flexible side chain 18 after the X-axis, flexible side chain 21 before the Y-axis, after the Y-axis flexible side chain 9 respectively with X-axis before fixed platform 4, fixed platform 17 after the X-axis, fixed platform 23 before the Y-axis, fixed platform 11 links to each other after the Y-axis, the X-axis propons displacement amplifying mechanism 6 that declines, the X-axis back axle displacement amplifying mechanism 15 that declines, the Y-axis propons displacement amplifying mechanism 20 that declines, the Y-axis back axle displacement amplifying mechanism 12 that declines is integrated in flexible side chain 7 before the X-axis respectively, flexible side chain 18 after the X-axis, flexible side chain 21 before the Y-axis, after the Y-axis among the flexible side chain 9, and micro-displacement driver 3 before embedded the X-axis, micro-displacement driver 16 after the X-axis, micro-displacement driver 19 before the Y-axis, micro-displacement driver 10 after the Y-axis.Before XY two dimension base platform 1 and the X-axis after flexible side chain 7, the X-axis before flexible side chain 18, the Y-axis after flexible side chain 21, the Y-axis flexible side chain 9 be holohedral symmetry and arrange.Simultaneously, before the X-axis after flexible side chain 7, the X-axis before flexible side chain 18, the Y-axis after flexible side chain 21, the Y-axis flexible side chain 9 self be symplex structure.XY two dimension base platform 1 is two the driving on X-axis and Y direction.
Precise jiggle platform of the present invention is integrated, object table 13, XY two dimension base platform 1, flexible side chain and fixed platform etc. are one, the parallel four-bar guide mechanism that flexible side chain 18 constitutes along Y direction after flexible side chain 7, the X-axis before two-dimentional base platform 1 of XY and the X-axis, the parallel four-bar guide mechanism that flexible side chain 9 constitutes along X-axis direction after the preceding flexible side chain 21 of XY two dimension base platform 1 and Y-axis, the Y-axis.Before the X-axis after micro-displacement driver 3, the X-axis micro-displacement driver 16 by the X-axis propons decline displacement amplifying mechanism 6, X-axis back axle decline displacement amplifying mechanism 15 drive flexible side chain 7 before the X-axis, X-axis respectively after flexible side chain 18 realized of the translation of precise jiggle platform along X-axis direction; Before the Y-axis after micro-displacement driver 19, the Y-axis micro-displacement driver 10 by the Y-axis propons decline displacement amplifying mechanism 20, Y-axis back axle decline displacement amplifying mechanism 12 drive flexible side chain 21 before the Y-axis, Y-axis respectively after flexible side chain 9 realized of the translation of precise jiggle platform along Y direction; Piezoelectric ceramic actuator 25 drives Z axle compliant mechanisms 8, has realized the translation of object table 13 along the Z axle, unites driving on the three-dimensional, can make object table 13 to move in the space range of 1mm * 1mm * 50um.
In Fig. 2, form cover close-loop feedback control system by central unit 27, drive system and displacement detection system.Drive system comprises the displacement driver of driving power 26 and three coordinate directions, displacement detection system comprises along the laser displacement sensor of three coordinate directions and detects baffle plate, displacement transducer can adopt LK-G30 type laser displacement sensor, the laser displacement sensor of X-axis and Y direction is arranged on the axial direction, and the distance that distance detects baffle plate is 10 ± 2cm, and the displacement sensor of Z-direction is arranged in apart from directly over object table 13 10 ± 2cm; During work, at first open central unit 27, central unit 27 converts the displacement amount of default object table 13 along three coordinate directions respectively to the correspondent voltage signal and sends to drive power supply 26,26 pairs of voltage signals that receive of drive power supply amplify, and drive respectively in the precise jiggle platform X to, Y to Z to displacement driver, realize the Three Degree Of Freedom translational motion of object table 13 along X, Y and Z-direction; Simultaneously, the position information that X-axis laser displacement sensor 5, Y-axis laser displacement sensor 22 and Z axle laser displacement sensor 14 are gathered the precise jiggle platform respectively, and the position information that measures fed back to central unit 27, central unit 27 location information are carried out computing, comparison, and then draw the further required magnitude of voltage of control of precise jiggle platform, send to drive power supply 26 again, thereby realize closed loop control.
Claims (3)
1. one kind big stroke three-translation orthogonal decoupling type precise jiggle platform, it is characterized in that: this precise jiggle plateform system comprises precise jiggle platform, micro-displacement driver, drive power supply, central unit, laser displacement sensor and displacement detecting baffle plate, laser displacement sensor links to each other with the input end of central unit, laser displacement sensor is positioned at outside the precise jiggle platform, the displacement detecting baffle plate is installed on the precise jiggle platform, and laser displacement sensor is corresponding with the displacement detecting baffle plate; The output terminal of central unit links to each other with the input end of drive power supply, and the multi-channel output of drive power supply links to each other with each micro-displacement driver, and micro-displacement driver is installed in the precise jiggle platform.
2. big stroke three-translation orthogonal decoupling type precise jiggle platform according to claim 1, it is characterized in that: described precise jiggle platform comprises object table, XY two dimension base platform, fixed platform, bridge-type micro displacement magnifying mechanism and flexible side chain, on XY two dimension base platform, be connected with object table, object table is the Z shaft platform, is connected with the fixed platform and the bridge-type micro displacement magnifying mechanism of X-axis and Y-axis in XY two dimension base platform four sides; Described micro-displacement driver has the micro-displacement driver of X-axis and Y-axis, the micro-displacement driver of X-axis and Y-axis is installed in respectively in the bridge-type micro displacement magnifying mechanism of X-axis or Y-axis, X-axis links to each other with X-axis or Y-axis fixed platform respectively with Y-axis bridge-type micro displacement magnifying mechanism, the parallel four-bar guide mechanism that the limit of XY two dimension base platform and flexible side chain are formed X-axis and Y-axis, micro-displacement driver, fixed platform and bridge-type micro displacement magnifying mechanism are positioned at parallelogram lindage.
3. the controlling method of one kind big stroke three-translation orthogonal decoupling type precise jiggle platform, it is characterized in that: the controlling method of plateform system is: central unit converts the displacement amount of default object table the correspondent voltage signal to and sends to drive power supply, drive power supply amplifies the voltage signal that receives, and then drive XY two dimension base platform and object table, to realize the Three Degree Of Freedom translational motion of object table along X, Y and Z-direction; Simultaneously, be located at X-axis laser displacement sensor, the Y-axis laser displacement sensor on the XY two dimension base platform axial direction and be located at the position information that the Z axle laser displacement sensor of object table top will be gathered the precise jiggle platform, and the position information that collects fed back to central unit, the central unit location information is handled and drive power supply is done further control, thereby realizes closed loop control.
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Application publication date: 20110914 |