CN102162938B - Optical structure for improving output frequency of pulsed laser - Google Patents
Optical structure for improving output frequency of pulsed laser Download PDFInfo
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- CN102162938B CN102162938B CN 201110093670 CN201110093670A CN102162938B CN 102162938 B CN102162938 B CN 102162938B CN 201110093670 CN201110093670 CN 201110093670 CN 201110093670 A CN201110093670 A CN 201110093670A CN 102162938 B CN102162938 B CN 102162938B
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Abstract
The invention discloses an optical structure for improving the output frequency of a pulsed laser. The optical structure comprises two polarization beam splitting (PBS) prisms, two tunable wave plates made of electro-optic crystals or magneto-optic crystals, and two cavity mirrors. An original pulsed laser beam is introduced to the cavity of the above optical structure by an electro-optical switch, and the laser output energy can be controlled by adjusting the waveform of the electro-optic wave plate or the magneto-optic wave plate at the rotation time so as to improve the output frequency of the pulsed laser and reduce the single-pulse energy without influencing the average power of the original pulse. The output new pulses are of the same sequence in the space.
Description
Technical field
The present invention relates to laser technology field, relate in particular to a kind of optical texture that improves the pulsed laser output frequency.
Background technology
Success of Ultra-Violet Laser be applied in field of microelectronic fabrication, such as the check of wafer, microcircuit etc.An advantage of ultraviolet light is that it can realize very high spatial resolution.In commercial Application, the average power of Ultra-Violet Laser is very important, and output is directly proportional with average power; And high-peak power is harmful to application, and it causes the damage of device easily.Therefore, continuous Ultra-Violet Laser just becomes people's a selection.
Yet Ultra-Violet Laser generally is that the method by frequency transformation obtains, and the nonlinear frequency transformation efficient of continuous light is low-down, will expect that therefore continuous Ultra-Violet Laser just needs huge fundamental frequency luminous power.This causes the structure of laser instrument very complicated, and expensive, is unfavorable for the reduction of industrial cost and popularizing of application.The pulsed ultraviolet laser device is another selection of commercial Application, and its frequency transformation efficient is higher, and structure is relatively simple, and cost is also much lower, but it has the shortcoming of above-mentioned easy damage device.Therefore, need a kind of relatively low peak power that has, the ultraviolet laser of high-average power is to satisfy the demand of commercial Application.
A kind of method that reduces the ultraviolet light peak power is to utilize the pulse segmenting device that the primary light pulse with high-peak power is divided into two or more new pulses that have than low peak power, improves pulsed frequency in the situation that does not reduce average power.
August 14 calendar year 2001, the disclosed patent No. was US6,275, the said method that 514 United States Patent (USP) " Laser repetition rate multiplier (laser repetition rate multiplier) " is used, the deielectric-coating that this patent has different transmitances a substrate plating, make laser pulse when the diverse location by substrate, be divided into the different new pulse of energy, these new pulses are not on same spatial sequence, and the new pulse that needs a bundling device that diverse location is separated is closed bundle and is the pulse of same sequence.This method not only has very high requirement to plated film, and the use of bundling device increases the loss of device, the average power of reduction laser pulse.
Summary of the invention
The object of the present invention is to provide a kind of optical texture that improves the pulsed laser output frequency, by regulating adjustable wave plate rotation time Waveform Control Laser output energy, thereby improve the frequency of pulse laser output, and under the prerequisite of not losing laser original pulse average power, reduce its peak power.
For achieving the above object, technical scheme proposed by the invention is: a kind of optical texture that improves the pulsed laser output frequency, it is characterized in that, and comprising: two polarization splitting prisms: the first polarization splitting prism 1 and the second polarization splitting prism 2; Two adjustable wave plates: the first adjustable wave plate 3 and the second adjustable wave plate 4; Two chamber mirrors: the first chamber mirror 5 and the second chamber mirror 6; The described first adjustable wave plate 3 is between the first polarization splitting prism 1 and the second polarization splitting prism 2; The described second adjustable wave plate 4 is between the second polarization splitting prism 2 and the first chamber mirror 5; Described the second chamber mirror 6 is positioned on the reflected light path of the first polarization splitting prism 1.
Further, the light path (L1+L2) between the described first adjustable wave plate 3 to first chamber mirrors 5 is greater than the time width of original pulse.
Preferably, the described first adjustable wave plate 3 and the second adjustable wave plate 4 are electro-optic crystal or magneto-optical crystal.
Preferably, described the first chamber mirror 5 and the second chamber mirror 6 are the flat-concave cavity mirror.
Beneficial effect of the present invention: this optical texture has reduced single pulse energy in the situation of not losing the original pulse average power, improved pulsed frequency; And the new pulse that produces through above-mentioned optical texture spatially becomes same sequence.
Description of drawings
Fig. 1 is the structural principle synoptic diagram of prior art;
Fig. 2 is structure and the light path synoptic diagram of the embodiment of the invention.
Embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
Be illustrated in figure 2 as a specific embodiment of the present invention, a kind of optical texture that improves the pulsed laser output frequency comprises two polarization splitting prisms (PBS): the first polarization splitting prism 1 and the second polarization splitting prism 2; Two adjustable wave plates: the first adjustable wave plate 3 and the second adjustable wave plate 4; Two chamber mirrors: the first chamber mirror 5 and the second chamber mirror 6.Two adjustable wave plates 3,4 can be electro-optic crystal, also can be magneto-optical crystal; Two chamber mirrors 5,6 can be the flat-concave cavity mirror.
Its course of work is as follows, and when original pulse laser a entered into this optical texture through the first polarization splitting prism 1, the first adjustable wave plate 3 was in the state of λ/2 wave plates, and after the first adjustable wave plate 3 was passed through in this pulse, this wave plate was converted to the full-wave plate state.Pulse arrives the first chamber mirror 5 through 2 reflections of the second polarization splitting prism by the second adjustable wave plate 4, regulate the phase delay degree of the second adjustable wave plate 4, so that the original pulse polarization state of returning through 5 total reflections of the first chamber mirror changes, make its part energy transmission cross 2 outputs of the second polarization splitting prism, become new pulse b, another part light is in the full-wave plate state by the reflection of the second polarization splitting prism 2 through first adjustable wave plate 3(the first adjustable wave plate 3 this moment) after entered the second chamber mirror 6, the second chamber mirrors 6 by 1 total reflection of the first Amici prism and again this part light total reflection returned in the original optical path.So, original pulse will vibrate between the first chamber mirror 5 and the second chamber mirror 6, regulate the phase delay degree of the second adjustable wave plate, so that above-mentioned original pulse is once exported by the second polarization splitting prism 2 with regard to some energy in every vibration, become new pulse b.For preventing energy loss, light path (L1+L2) between the first adjustable wave plate 3 to first chamber mirrors 5 is set greater than the time width of original pulse a.
The present invention adopts electrooptical switching that original pulse laser is incorporated in the above-mentioned optical texture chamber, by regulating electric light wave plate or magneto-optic wave plate rotation time Waveform Control Laser output energy, thereby improve the frequency of pulse laser output, and reduced single pulse energy in the situation of the average power of not losing original pulse, the new pulse of output spatially becomes same sequence.
Although specifically show and introduced the present invention in conjunction with preferred embodiment; but the those skilled in the art should be understood that; within not breaking away from the spirit and scope of the present invention that appended claims limits; in the form and details the present invention is made a variety of changes, be protection scope of the present invention.
Claims (4)
1. an optical texture that improves the pulsed laser output frequency is characterized in that, comprising: two polarization splitting prisms: the first polarization splitting prism and the second polarization splitting prism; Two adjustable wave plates: the first adjustable wave plate and the second adjustable wave plate; Two chamber mirrors: the first chamber mirror and the second chamber mirror; The described first adjustable wave plate is between the first polarization splitting prism and the second polarization splitting prism; The described second adjustable wave plate is between the second polarization splitting prism and the first chamber mirror; Described the second chamber mirror is positioned on the reflected light path of the first polarization splitting prism; When original pulse laser a enters into this optical texture through the first polarization splitting prism, the first adjustable wave plate is in the state of λ/2 wave plates, after the first adjustable wave plate is passed through in this pulse, this wave plate is converted to the full-wave plate state, pulse arrives the first chamber mirror through the reflection of the second polarization splitting prism by the second adjustable wave plate, regulate the phase delay degree of the second adjustable wave plate, so that the original pulse polarization state of returning through the first chamber mirror total reflection changes, make its part energy transmission cross the output of the second polarization splitting prism, become new pulse b, another part light is reflected through being entered the second chamber mirror by the first Amici prism total reflection behind the first adjustable wave plate that is in the full-wave plate state by the second polarization splitting prism, the second chamber mirror returns this part light total reflection in the original optical path again, so, original pulse will vibrate between the first chamber mirror and the second chamber mirror, regulate the phase delay degree of the second adjustable wave plate, so that above-mentioned original pulse is once exported by the second polarization splitting prism with regard to some energy in every vibration, become new pulse b; Described output frequency is the output pulse repetition rate.
2. a kind of optical texture that improves the pulsed laser output frequency as claimed in claim 1, it is characterized in that: the described first adjustable wave plate is to the time width of the light path between the first chamber mirror greater than original pulse.
3. a kind of optical texture that improves the pulsed laser output frequency as claimed in claim 1, it is characterized in that: the described first adjustable wave plate and the second adjustable wave plate are electro-optic crystal or magneto-optical crystal.
4. a kind of optical texture that improves the pulsed laser output frequency as claimed in claim 1, it is characterized in that: described the first chamber mirror and the second chamber mirror are the flat-concave cavity mirror.
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| Application Number | Priority Date | Filing Date | Title |
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| CN 201110093670 CN102162938B (en) | 2011-04-14 | 2011-04-14 | Optical structure for improving output frequency of pulsed laser |
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| CN 201110093670 CN102162938B (en) | 2011-04-14 | 2011-04-14 | Optical structure for improving output frequency of pulsed laser |
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| Publication Number | Publication Date |
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| CN102162938A CN102162938A (en) | 2011-08-24 |
| CN102162938B true CN102162938B (en) | 2013-01-30 |
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| CN103427316B (en) * | 2013-08-22 | 2015-09-16 | 中国科学院上海光学精密机械研究所 | Laser pulse stretching device |
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| US5327338A (en) * | 1990-01-31 | 1994-07-05 | Etec Systems, Inc. | Scanning laser lithography system alignment apparatus |
| IL141487A (en) * | 1998-08-20 | 2004-07-25 | Orbotech Ltd | Laser repetition rate multiplier |
| US6689985B2 (en) * | 2001-01-17 | 2004-02-10 | Orbotech, Ltd. | Laser drill for use in electrical circuit fabrication |
| US7483146B1 (en) * | 2006-01-19 | 2009-01-27 | Kla-Tencor Technologies Corp. | Systems configured to provide illumination of a specimen or to inspect a specimen |
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