CN101989524A - Impedance matcher and plasma processing equipment - Google Patents
Impedance matcher and plasma processing equipment Download PDFInfo
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- CN101989524A CN101989524A CN2009100891128A CN200910089112A CN101989524A CN 101989524 A CN101989524 A CN 101989524A CN 2009100891128 A CN2009100891128 A CN 2009100891128A CN 200910089112 A CN200910089112 A CN 200910089112A CN 101989524 A CN101989524 A CN 101989524A
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Abstract
The invention provides an impedance matcher, which is arranged between a radio frequency generator and an inductive coupling coil and comprises an input end, an impedance detection unit, a current detection unit, a control unit, an adjusting unit and at least tow output ends, wherein the adjusting unit comprises a variable impedance element and a corresponding actuating mechanism, and the control unit indicates the actuating mechanism to adjust the impedance value of the variable impedance element according to data detected by the impedance detection unit and the current detection unit, can adjust the current corresponding to each output end and realize the matching between the output impedance of the radio frequency generator and the input impedance of the impedance matcher. In addition, the invention further provides plasma processing equipment applying the impedance matcher. The impedance matcher and the plasma processing equipment, provided by the invention, can be used for adjusting the radio frequency current flowing through the inductive coupling coil at the same time of effectively carrying out impedance matching so as to improve the distribution uniformity of plasma density in a process chamber.
Description
Technical field
The present invention relates to technical field of plasma, particularly, the apparatus for processing plasma that relates to a kind of impedance matching box and use this impedance matching box.
Background technology
Along with scientific and technological progress, large scale integrated circuit is applied to producing and various fields in life.In recent years, wafer size increases to 300mm by original 200mm, and meanwhile, the user requires more and more higher to the integrated level of integrated circuit.Therefore, the associated production enterprise production equipment that must update self could adapt to the new market demand.
At present, many using plasmas of the processing treatment facility for semiconductor device carries out.When carrying out the processed technology of big substrate, height integrated device, apparatus for processing plasma can provide highdensity plasma with and whether evenly be one of key technical index of weighing this equipment quality to the processing of wafer.Inductively coupled plasma (InductivelyCoupled Plasma, hereinafter to be referred as ICP) treatment facility is simple in structure, cost is low, and can under lower operating air pressure, obtain highdensity plasma, thereby be widely used in plasma etching, deposition and other plasma processes.
See also Fig. 1, be a kind of operation principle block diagram of ICP treatment facility commonly used, it is widely used in making in the processing technology of integrated circuit or MEMS (Micro Electro Mechanicalsystems, microelectromechanical systems) device.Detailed process is that radio freqnency generator provides radio-frequency current for coupling coil; Coupling coil is arranged on processing chamber top, can produce time-varying magnetic field from the radio-frequency current of radio freqnency generator in processing chamber by coupling coil, and the induced electric field along with changes of magnetic field is plasma thereby the reacting gas in the processing chamber excited; Then finish corresponding processing technology by formed plasma.
Yet in actual process, the resistance value in the above-mentioned processing chamber is not constant, but is nonlinear change in time, and radio freqnency generator has constant output impedance.This just causes the impedance of radio freqnency generator and processing chamber to mate, and makes to have bigger reflection power on the radio-frequency transmission line, and then causes the power output of radio freqnency generator can't all act on processing chamber.Therefore, also need an impedance matching box be set between radio freqnency generator and processing chamber, it is connected between radio freqnency generator and the coupling coil, is used to mate the impedance between radio freqnency generator and the processing chamber.
See also Fig. 2, be the structural representation of Fig. 1 middle impedance adaptation, this impedance matching box comprises transducer, control unit and the actuator of mutual electrical connection.Wherein, actuator specifically comprises adjustable impedance element and the corresponding impedance adjustment module in the impedance matching box.Transducer can detect relevant parameters such as magnitude of voltage on the radio-frequency transmission line, current value, and above-mentioned parameter is sent to control unit; Impedance adjustment module in the control unit indication actuator is carried out corresponding impedance adjustment to the adjustable impedance element, and makes and the constant output impedance that equals radio freqnency generator in the radio-frequency transmission line from the input impedance of matching network realize the two coupling.
Yet because above-mentioned impedance matching box has only an output, and the current constant of this output is non-adjustable.Therefore, this impedance matching box only can connect an inductance-coupled coil, and the electric current in this coil also is constant and nonadjustable, and this technical scheme tends to cause formed plasma density in the processing chamber problem pockety that directly makes progress.Be embodied in, the plasma density that is positioned at chamber approximate centre and fringe region is relatively low, and between chamber center and fringe region the plasma density maximum in the off-center certain radius regional extent.This problem will further have a strong impact on the stability and the uniformity of processing technologys such as etching, deposition.
Summary of the invention
For addressing the above problem, the invention provides a kind of impedance matching box and use the apparatus for processing plasma of this impedance matching box, it can be when effectively carrying out impedance matching, radio-frequency current to the inductance-coupled coil of flowing through is regulated, to improve the distributing homogeneity of plasma density in the processing chamber.
For this reason, the invention provides a kind of impedance matching box, be arranged between radio freqnency generator and the inductance-coupled coil, described impedance matching box comprises input, impedance detection unit, current detecting unit, control unit, regulon and at least two outputs.Wherein, described input connects radio freqnency generator, in order to introducing impedance matching box from the radio-frequency power of described radio freqnency generator.Each described output connects described inductance-coupled coil respectively, in order to radio-frequency power is led to described inductance-coupled coil from impedance matching box.Described impedance detection unit is used to detect the input impedance of impedance matching box, and the actual input impedance value of the impedance matching box that detection is obtained transfers to described control unit.Described current detecting unit is used to detect the pairing electric current of described each output, and the pairing actual current value of each output that detection obtains is transferred to described control unit.Described control unit is carried out following operation: produce first control signal according to the actual input impedance value of described impedance matching box and the output impedance of radio freqnency generator, and described first control signal is transferred to regulon; And produce second control signal, and described second control signal is transferred to described regulon according to the current value of pairing actual current value of each output and the expectation of each output.Described regulon comprises the adjustable impedance element and moves to realize the driving mechanism of change in impedance value in order to the adjustable side that drives the adjustable impedance element, described driving mechanism changes the resistance value of the adjustable impedance element that is attached thereto according to described first control signal and/or second control signal, adjusting the pairing electric current of each output, and realize coupling between radio freqnency generator output impedance and the impedance matching box input impedance.
Wherein, described each output all converges at the main line radio-frequency transmission line by the branch road radio-frequency transmission line that is attached thereto, and is connected to described input via described main line radio-frequency transmission line.
Wherein, described impedance detection unit detects electric current and the voltage on the radio-frequency transmission line of main line, calculates the actual input impedance of this impedance matching box in view of the above, and described actual input impedance value is transferred to described control unit.
Wherein, described impedance detection unit comprises independently voltage sensor and current sensor, perhaps comprises the voltage/current combination sensor.
Wherein, described current detecting unit comprises current sensor, and corresponding to each branch road radio-frequency transmission line a current sensor is set, to detect the pairing electric current of each branch road radio-frequency transmission line.
Wherein, described adjustable impedance element comprises tunable capacitor and/or the controllable impedance that is arranged on main line radio-frequency transmission line and each branch road radio-frequency transmission line.
Wherein, described driving mechanism changes the resistance value of the adjustable impedance element that is arranged on the radio-frequency transmission line of main line according to described first control signal; And change the resistance value that is arranged on the adjustable impedance element on each branch road radio-frequency transmission line according to described second control signal.
Wherein, described driving mechanism comprises motor and/or dial, and described motor comprises stepping motor and/or servomotor.
In addition, the present invention also provides a kind of apparatus for processing plasma, at least two inductance-coupled coils that comprise radio freqnency generator, processing chamber and be arranged at the processing chamber top, and, between described radio freqnency generator and inductance-coupled coil, be provided with the impedance matching box that the invention described above provides, with the coupling between realization radio freqnency generator output impedance and the impedance matching box input impedance, and in described processing chamber, form equally distributed plasma.
The present invention has following beneficial effect:
At first, impedance matching box provided by the present invention has at least two outputs that can be used for connecting inductance-coupled coil, and current detecting unit can detect the pairing current value of each output, control unit then sends second control signal according to the current value of above-mentioned each output, change the resistance value of the adjustable impedance element on each branch road radio-frequency transmission line with the indication respective drive mechanism, thereby regulate the electric current allocation situation of each output, so that the distribution in processing chamber of magnetic field that inductance-coupled coil produced and electric field strength is tending towards even, thereby improve the radial symmetry of the plasma that is produced, and then effectively improve the stability and the uniformity of processing technology.
Secondly, impedance matching box provided by the present invention is regulated the resistance value that is arranged on the adjustable impedance element in main line radio-frequency transmission line and/or the branch road radio-frequency transmission line by regulon, can make and obtain coupling between radio freqnency generator output impedance and the impedance matching box input impedance, thereby the reflection power in reduction even the elimination radio-frequency transmission line is utilized effectively the power output of radio freqnency generator.
In addition, apparatus for processing plasma provided by the present invention, comprise radio freqnency generator, processing chamber and at least two inductance-coupled coils that are arranged at the processing chamber top, and between its radio freqnency generator and inductance-coupled coil, also be provided with the impedance matching box that the invention described above provides.Therefore, apparatus for processing plasma provided by the present invention can form the plasma that is evenly distributed equally in processing chamber, and radio freqnency generator output impedance and impedance matching box input impedance are effectively mated.
Description of drawings
Fig. 1 is a kind of operation principle block diagram of inductively coupled plasma treatment facility commonly used;
Fig. 2 is the structural representation of Fig. 1 middle impedance adaptation;
Fig. 3 is the structural representation of a specific embodiment of impedance matching box provided by the present invention; And
Fig. 4 is the operation principle and the structural representation of apparatus for processing plasma provided by the present invention.
Embodiment
For making those skilled in the art understand technical scheme of the present invention better, impedance matching box provided by the present invention and apparatus for processing plasma are described in detail below in conjunction with accompanying drawing.
See also Fig. 3, impedance matching box provided by the present invention, be arranged between radio freqnency generator and the inductance-coupled coil, be used for carrying out impedance matching and Current Regulation at the radio-frequency transmission line of apparatus for processing plasma, it comprises input, impedance detection unit, current detecting unit, control unit, regulon and at least two outputs of electrical connection.Here, described regulon comprises the adjustable impedance element 11 that is connected in series mutually with output 10, the actuator 12 of control adjustable impedance element 11; The actuator 22 of the adjustable impedance element 21 that is connected in series mutually with output 20, control adjustable impedance element 21; And, the actuator 32 of the adjustable impedance element 31 that is connected in series mutually with the impedance detection unit, control adjustable impedance element 31.Each actuator links to each other with the adjustable side of corresponding adjustable impedance element respectively, in order to change the resistance value of adjustable impedance element.
Wherein, adjustable impedance element 32 1 ends are connected with input, and the other end links to each other with adjustable impedance element 11 and adjustable impedance element 21 simultaneously.Thereby input, adjustable impedance element 31 constitute the main line radio-frequency transmission line; Adjustable impedance element 11, output 10 constitute and output 10 corresponding branch road radio-frequency transmission lines; And adjustable impedance element 21, output 20 constitute and output 20 corresponding branch road radio-frequency transmission lines.Therefore, radio-frequency transmission line in the present embodiment specifically be by above-mentioned main line radio-frequency transmission line and with output one to one two branch road radio-frequency transmission lines constitute, and each output all converges at the main line radio-frequency transmission line by the branch road radio-frequency transmission line that is attached thereto, and is connected to described input via described main line radio-frequency transmission line.
Each part to impedance matching box provided by the invention is described in detail below.
Input is used to connect radio freqnency generator, introducing impedance matching box from the radio-frequency power of radio freqnency generator.Radio freqnency generator described in the present invention for example can adopt radio-frequency power supply etc.
Output is used to connect inductance-coupled coil, so that radio-frequency power is led to corresponding inductance-coupled coil from impedance matching box.In the practical application, can make each output connect an inductance-coupled coil respectively, also can make each output connect two inductance-coupled coils that are connected in parallel.
The impedance detection unit is connected in the radio-frequency transmission line of main line, is used to detect the input impedance of impedance matching box, and the actual input impedance value of the impedance matching box that detection is obtained transfers to control unit.Particularly, the impedance detection unit detects electric current and the voltage on the radio-frequency transmission line of main line, calculate forward power and backward power in the radio-frequency transmission line in view of the above, and according to this forward power and backward power and the actual input impedance that further draws this impedance matching box transfers to control unit with above-mentioned actual input impedance value then.Here, the impedance detection unit can comprise independently voltage sensor and current sensor, also can comprise the voltage/current combination sensor.
Current detecting unit, be connected in the branch road radio-frequency transmission line, and a current detecting unit is set corresponding to each branch road radio-frequency transmission line, be used to detect the pairing electric current of each output (promptly, electric current on each output place branch road radio-frequency transmission line), and with the pairing actual current value of each output that detection obtains transfer to control unit.In the practical application, this current detecting unit can adopt current sensor.
Control unit, be used to carry out following operation: according to the actual input impedance value of impedance matching box and the output impedance of radio freqnency generator, calculate the difference between the two, and produce first control signal that can indicate regulon to regulate operation according to this difference, then described first control signal is transferred to regulon; And, calculate the back generation by analysis and can indicate regulon to regulate second control signal of operation, and this second control signal is transferred to regulon according to the current value of the pairing actual current value of each output with each output expectation.In the practical application, control unit can adopt data processing modules such as CPU, single-chip microcomputer and Programmable Logic Controller to realize its controlled function.
Regulon comprises the adjustable impedance element that is separately positioned in above-mentioned main line radio-frequency transmission line and each branch road radio-frequency transmission line and moves to realize the driving mechanism of change in impedance value in order to the adjustable side that drives the adjustable impedance element.
Described driving mechanism changes the resistance value of the adjustable impedance element that is attached thereto according to described first control signal and/or second control signal, adjusting the pairing electric current of each output, and realize coupling between radio freqnency generator output impedance and the impedance matching box input impedance.Detailed process is that driving mechanism 32 changes the resistance value of the adjustable impedance element 31 that is arranged on the radio-frequency transmission line of main line according to described first control signal; Driving mechanism 12 and driving mechanism 22 change the adjustable impedance element 11 that is arranged on the two branch road radio-frequency transmission lines and the resistance value of adjustable impedance element 21 according to described second control signal.Wherein, adjustable impedance element (11,21,31) can adopt the adjustable impedance element of tunable capacitor and/or controllable impedance etc.; Driving mechanism (12,22,32) is specially motor and/or dial, and can be that stepping motor, servomotor and other are any can control the motor that the adjustable impedance element is regulated action with described motor.
In actual applications, impedance matching box provided by the invention can adopt following manner to carry out impedance matching and branch current adjusting.
For example, at first detect the input impedance of impedance matching box, and detected data are sent to control unit by the impedance detection unit; Control unit draws the desirable resistance value that is arranged in main line radio-frequency transmission line adjustable impedance then according to above-mentioned input impedance value, and first control signal of indicating corresponding driving mechanism to regulate action; Thereby being positioned at driving mechanism on the radio-frequency transmission line of main line drives adjustable impedance element regulation end and moves its resistance value is adjusted to above-mentioned desirable resistance value; Meanwhile, the pairing electric current of current sensor senses two outputs in two branch road radio-frequency transmission lines, and detected current value is sent to control unit; Control unit compares the current value in above-mentioned two outputs and the predefined current value of user and draws the two difference, if the two is identical, illustrate and reach customer requirements, and need not regulate again, calculate second control signal that indication corresponding driving mechanism regulates action if this difference is non-vanishing according to this difference, and indicate this driving mechanism that the adjustable impedance element in two branch road radio-frequency transmission lines is regulated operation accordingly, so that the current division ratio example of two outputs satisfies user's requirement.In actual applications, can regulate simultaneously two branch road adjustable impedance elements, also can be according to the concrete analysis result of control unit, the resistance value of only regulating the adjustable impedance element in one of them branch road gets final product.
For another example, also can be earlier the actual current value of two output correspondences be detected, and draw second control signal in view of the above and indicate driving mechanism that the adjustable impedance element that is arranged in the branch road radio-frequency transmission line is regulated, to obtain rational current division ratio example; And then detect the actual input impedance value of this impedance matching box, and draw first control signal in view of the above and indicate driving mechanism that the adjustable impedance element that is arranged in the main line radio-frequency transmission line is regulated, to realize the coupling between radio freqnency generator output impedance and the impedance matching box input impedance.
Certainly, the regulative mode of impedance matching box provided by the invention is not limited to aforesaid way, in actual applications also can be simultaneously the actual input impedance value and the pairing current value of two outputs of impedance matching box be detected, and draw first and second control signals simultaneously, with the indication regulon adjustable impedance element that is arranged in main line radio-frequency transmission line and branch road radio-frequency transmission line is regulated simultaneously.
It is pointed out that no matter adopt above-mentioned any regulative mode, its adjustment process often is not one step completed, after usually branch road radio frequency transmission line current being adjusted, tends to make impedance for matching generation mismatch or mismatch originally slightly; Otherwise, when originally the impedance of mismatch is adjusted into coupling, branch road radio frequency transmission line current is changed and departs from its desired value, so this just requires the current value realizing impedance matching and obtain expectation by further fine setting again.And, carrying out along with technology, each inductance-coupled coil (promptly, on the branch road radio-frequency transmission line) the electric current desired value may change, like this, just need constantly to detect the input impedance value in the radio-frequency transmission line and the current value of two outputs, and regulate operation in real time, realize that with this impedance matching of whole technical process and the reasonable distribution of electric current regulate.
Further it is to be noted, although the output quantity of the impedance matching box in the present embodiment is two, but be not limited thereto in actual applications, under the prerequisite that does not break away from the present invention's spirit and essence, can more a plurality of outputs be set and include current detecting unit and the respective branch radio-frequency transmission line of adjustable impedance element according to actual needs, thereby make impedance matching box provided by the invention can connect and control a plurality of inductance-coupled coils simultaneously.
In sum, impedance matching box provided by the present invention can connect two inductance-coupled coils at least, control unit then changes the resistance value of the adjustable impedance element in each branch road radio-frequency transmission line according to the current value indication respective drive mechanism of each output, to regulate the current division ratio example of each output, thereby in processing chamber, form the plasma that is evenly distributed diametrically, and then effectively improve the stability and the uniformity of processing technology.In addition, impedance matching box provided by the present invention is arranged on the resistance value of the adjustable impedance element in main line radio-frequency transmission line and/or the branch road radio-frequency transmission line by adjusting, can make between the input impedance of the output impedance of radio freqnency generator and impedance matching box and obtain coupling, thereby the power output of radio freqnency generator is utilized effectively.
In addition, the present invention also provides a kind of apparatus for processing plasma, and for example Fig. 4 just shows a specific embodiment of apparatus for processing plasma provided by the invention.Two inductance-coupled coils (coil 1 and coil 2) that this plasma treatment facility comprises radio freqnency generator, processing chamber and is arranged at the processing chamber top, between radio freqnency generator and two inductance-coupled coils, be provided with above-mentioned impedance matching box provided by the present invention, with the coupling between realization radio freqnency generator output impedance and the impedance matching box input impedance, and in described processing chamber, form equally distributed plasma.
It is pointed out that the apparatus for processing plasma that the invention described above provides can also be provided with a plurality of inductance-coupled coils according to arts demand, at this moment, quantity that can corresponding required coil and the quantity of the output of impedance matching box provided by the invention is set; Certainly, also two or more inductance-coupled coils can be connected simultaneously on the output; And, without departing from the spirit and substance in the present invention, can make various deformation and combination to the connected mode of coil, and all should be considered as the scope that the present invention protects.
Above-mentioned apparatus for processing plasma is owing to be provided with the impedance matching box that the invention described above provides between its radio freqnency generator and inductance-coupled coil.Therefore, apparatus for processing plasma provided by the present invention can form the plasma that is evenly distributed equally in processing chamber, and radio freqnency generator output impedance and impedance matching box input impedance are effectively mated.
Be understandable that above execution mode only is the illustrative embodiments that adopts for principle of the present invention is described, yet the present invention is not limited thereto.For those skilled in the art, without departing from the spirit and substance in the present invention, can make various modification and improvement, these modification and improvement also are considered as protection scope of the present invention.
Claims (10)
1. an impedance matching box is arranged between radio freqnency generator and the inductance-coupled coil, it is characterized in that, described impedance matching box comprises input, impedance detection unit, current detecting unit, control unit, regulon and at least two outputs, wherein
Described input connects radio freqnency generator, in order to introducing impedance matching box from the radio-frequency power of described radio freqnency generator;
Each described output connects described inductance-coupled coil respectively, in order to radio-frequency power is led to described inductance-coupled coil from impedance matching box;
Described impedance detection unit is used to detect the input impedance of impedance matching box, and the actual input impedance value of the impedance matching box that detection is obtained transfers to described control unit;
Described current detecting unit is used to detect the pairing electric current of described each output, and the pairing actual current value of each output that detection obtains is transferred to described control unit;
Described control unit is carried out following operation: produce first control signal according to the actual input impedance value of described impedance matching box and the output impedance of radio freqnency generator, and described first control signal is transferred to regulon; And produce second control signal, and described second control signal is transferred to described regulon according to the current value of pairing actual current value of each output and the expectation of each output;
Described regulon comprises the adjustable impedance element and moves to realize the driving mechanism of change in impedance value in order to the adjustable side that drives the adjustable impedance element, described driving mechanism changes the resistance value of the adjustable impedance element that is attached thereto according to described first control signal and/or second control signal, adjusting the pairing electric current of each output, and realize coupling between radio freqnency generator output impedance and the impedance matching box input impedance.
2. impedance matching box according to claim 1 is characterized in that, described each output all converges at the main line radio-frequency transmission line by the branch road radio-frequency transmission line that is attached thereto, and is connected to described input via described main line radio-frequency transmission line.
3. impedance matching box according to claim 1, it is characterized in that, described impedance detection unit detects electric current and the voltage on the radio-frequency transmission line of main line, calculates the actual input impedance of this impedance matching box in view of the above, and described actual input impedance value is transferred to described control unit.
4. impedance matching box according to claim 3 is characterized in that, described impedance detection unit comprises independently voltage sensor and current sensor, perhaps comprises the voltage/current combination sensor.
5. impedance matching box according to claim 1, it is characterized in that, described current detecting unit comprises current sensor, and corresponding to each branch road radio-frequency transmission line a current sensor is set, to detect the pairing electric current of each branch road radio-frequency transmission line.
6. impedance matching box according to claim 1 is characterized in that, described adjustable impedance element comprises tunable capacitor and/or the controllable impedance that is arranged on main line radio-frequency transmission line and each branch road radio-frequency transmission line.
7. impedance matching box according to claim 6 is characterized in that, described driving mechanism changes the resistance value of the adjustable impedance element that is arranged on the radio-frequency transmission line of main line according to described first control signal; And change the resistance value that is arranged on the adjustable impedance element on each branch road radio-frequency transmission line according to described second control signal.
8. impedance matching box according to claim 1 is characterized in that described driving mechanism comprises motor and/or dial.
9. impedance matching box according to claim 8 is characterized in that described motor comprises stepping motor and/or servomotor.
10. apparatus for processing plasma, at least two inductance-coupled coils that comprise radio freqnency generator, processing chamber and be arranged at the processing chamber top, it is characterized in that, between described radio freqnency generator and inductance-coupled coil, be provided with as any described impedance matching box in the claim 1 to 9, with the coupling between realization radio freqnency generator output impedance and the impedance matching box input impedance, and in described processing chamber, form equally distributed plasma.
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