CN101871043B - Steam generator of annealing furnace and control method thereof - Google Patents

Steam generator of annealing furnace and control method thereof Download PDF

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Publication number
CN101871043B
CN101871043B CN201010210846XA CN201010210846A CN101871043B CN 101871043 B CN101871043 B CN 101871043B CN 201010210846X A CN201010210846X A CN 201010210846XA CN 201010210846 A CN201010210846 A CN 201010210846A CN 101871043 B CN101871043 B CN 101871043B
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discharge
group
water
combustion method
dry combustion
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CN101871043A (en
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周开勇
李国栋
张红
刘文明
刘太明
张益彬
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DONGGUAN KANGHUIJU WIRE MATERIAL TECHNOLOGY Co Ltd
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DONGGUAN KANGHUIJU WIRE MATERIAL TECHNOLOGY Co Ltd
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Abstract

The invention relates to the technical field of steam generators, in particular to a steam generator of an annealing furnace and a control method thereof. The steam generator of the annealing furnace comprises an electric heating device twisted with resistance wires, a built-in dry combustion liner, a PLC controller, a water supply device, a thermocouple, and a steam distributor communicated with an inner chamber of a steam oven. The steam generator of the annealing furnace can better utilize heat brought by wires, avoids the waste of water and electric energy caused by overflow, improves the stability of steam, simplifies structure, is easy to operate, and reduces manufacturing cost and maintenance cost.

Description

A kind of steam generator of annealing furnace and control method thereof
Technical field:
The present invention relates to the vapour generator technical field, relate in particular to a kind of steam generator of annealing furnace and control method thereof.
Background technology:
When wire rod is annealed in lehre, at high temperature oxidized in order to prevent wire rod, adopt steam that wire rod is protected usually.The steam of lehre is generally from the external electric vapour generator, perhaps from the enameling machine oven HRSG.
External electric vapour generator commonly used comprises steam generating chamber and regulation of level water tank; The water level of electric heating steam generator is provided with the electric heating tube of certain power with upper/lower positions; Be connected with two pipelines between steam generating chamber and the regulation of level water tank; One is communicated with underwater portion, and one is communicated with above water.Because the maintenance issues of regulation of level water tank is more, usually enough thermal insulation layers can not be set, the energy consumption of this electric heating steam generator is bigger.
Enameling machine oven HRSG structure and electric heating steam generator commonly used are similar, and different is to have replaced electrically heated with the heat that absorbs baker waste discharge gas.The inventor is to propose the anhydrous gland steam protector of a kind of lehre in the Chinese utility model patent of " 200920059267.2 " at application number; It comprises built-in steam generator; Built-in steam generator has been cancelled the regulation of level water tank; And built-in steam generator is installed in heat-insulating property preferably in the lehre body of heater; Solved energy-conservation and reliability problems preferably, in control, some difficult problems also occurred: 1) steam in the built-in steam generator is communicated with atmosphere through the lehre boiler tube, and resistance is still little though boiler tube has longer path; So in built-in steam generator, can not set up bigger vapor pressure; Saturated-steam temperature can only reach about 100.5 degree, adopts the method for control saturated-steam temperature just to need very high-precision temperature control, though adopt the inventor to control the control accuracy that can reach required at application number for the control method of a kind of thereof using PID algorithm of proposing in the Chinese invention patent of " 200910038926.9 "; But find during secular practice is used still to receive the influence that drift takes place the thermopair precision inadequately, should not in industrial production, use; 2) built-in steam generator is installed in the lehre zone of having accomplished heating anneal corresponding to wire rod and need cool; Built-in steam generator can absorb the wire rod heat to help the wire rod cooling; Built-in steam generator also can reduce the electrically heated power consumption simultaneously; So if can not adopt the method for control saturated-steam temperature, and adopt the method that adds heat of setting, change the interference that brings with production status with receiving absorption wire rod heat; 3) control that adds discharge toward built-in steam generator does not have the scientific and reliable method, guarantee that the water level in the built-in steam generator also needs scientific and reliable overflow detection method.
It approximately is 1~6 kilogram/hour that the quantity of steam that lehre needs is calculated by weight, and just needs and can add discharge 1~6 liter/hour flow range inner control.The method of adding liquid usually is to adopt pump, especially when dominant discharge, can adopt the frequency transformer driving pump to realize.Vanepump commonly used, the rated flow of pumps such as toothed gear pump is lower than the scope that this flow has just got into volume pump all more than 150 liters/hour, but volume pump not only cost is high, can't adapt to long-term operation under industrial environment.
The inventor is at a kind of lehre anhydrous gland steam protector of application number for proposing in the Chinese utility model patent of " 200920059267.2 "; Must keep certain water level in its built-in steam generator inner bag, therefore must control has certain spillway discharge.The size of spillway discharge depends on and adds discharge and add heat; Adding discharge can control; But add heat except that the controlled heating source of electrothermal tube; Also have to pass from the lehre boiler tube and come and the wire rod heat that band is come from the high-temperature zone, this part origin of heat particularly wire rod band heat of coming should utilize, but it is can not expect and uncontrollable.For this reason, the spillway discharge proofing unit must be set, the inventor has proposed following spillway discharge proofing unit:
This spillway discharge proofing unit is provided with a measuring cup and accepts the effusive liquid of upflow tube.Measuring cup bottom connects one and goes up bend pipe, and last bend pipe import is connected bottom measuring cup, leads to outlet downwards after being bent-up to crankle point, and outlet must be lower than import, and last crankle point is not higher than the measuring cup rim of a cup, equals the liquid level upper limit of measuring cup.After overflow liquid was injected measuring cup, liquid level constantly raise in the measuring cup, and the liquid level in the last bend pipe also constantly raises.When the liquid level in the last bend pipe reaches crankle point; Because the liquid level in the last bend pipe can not rise with the liquid level in the measuring cup synchronously; Though two liquid levels have born same barometric point, the difference of altitude of two liquid levels has formed pressure difference, makes the flow direction outlet in the bend pipe.Because the outlet of last bend pipe is lower than the import that is positioned at the measuring cup bottom; And the caliber of putting outlet from last crankle is less; The surface tension of liquid in pipe is enough to stop air breakthrough liquid in pipe to flow to the crankle point from outlet; So cross flex point and will move on to winding pipe exit fast in case go up liquid level in the bend pipe, the liquid in the measuring cup on passing through under the pressure difference effect that the liquid level difference forms bend pipe from the winding pipe exit outflow, the liquid level in measuring cup is reduced to bend pipe ingress; Last bend pipe import forms new liquid level after getting into air, obtains balance again and stops outflow after the liquid level difference disappears.So, when overflow liquid is filled measuring cup, liquid all emptyings fast in the measuring cup, and accept next cup again, as long as calculate the timed interval that measuring cup is filled the effusive volume in back and filled at every turn at every turn, just can detect the flow of overflow.Measuring cup by sky to full and can be used to drive the closed and disconnected of a switch by full weight change to sky; Switch closure and the needed power of disconnection and error thereof are if be positioned at the weight difference scope; Can guarantee that PLC is from timed interval that switch obtains filling accurately basically at every turn; The power error required as if switch closure and disconnection is very little, then can obtain the timed interval of at every turn filling accurately.
Through overtesting, more than device can make the information of PLC acquisition spillway discharge, but it is higher to make accuracy requirement, and real-time is not strong.Have to during practical application make that to add discharge bigger than normal, keep bigger spillway discharge, the heat of avoiding the wire rod band to come makes water level reduce more for a long time, causes the accident of dryouting.The result who does like this is that when the overflow water outflow caused the waste of water, overflow water had also been taken away some heats, causes waste of electric energy.
Summary of the invention:
One of them purpose of the present invention is the deficiency to prior art; A kind of heat that can utilize the wire rod band to come better is provided; Water and the waste of energy of avoiding overflow to bring, the stability of raising steam, simplified construction; Easy handling, the steam generator of annealing furnace of reduction manufacturing cost and maintenance cost.
Another object of the present invention is the deficiency to prior art; A kind of heat that can utilize the wire rod band to come better is provided, water and the waste of energy of avoiding overflow to bring, the stability of raising steam; Simplified construction; Easy handling, safety is high, can realize energy-conservation to greatest extent steam generator of annealing furnace control method.
For realizing above-mentioned purpose, the present invention realizes through following technical scheme:
A kind of steam generator of annealing furnace, it comprises the electric heater unit that is provided with stranded wire spiral, it also comprises built-in dry combustion method inner bag, PLC unit, priming apparatus, thermopair, and the vapour distributor that is communicated with the steam oven inner room;
Said built-in dry combustion method inner bag comprises dry combustion method pot and the Stainless steel pot cover that is covered on dry combustion method pot top; Dry combustion method pot and Stainless steel pot cover form the internal bladder cavity of built-in dry combustion method inner bag; The dry combustion method pot bottom is provided with conductive sole plate, and the conductive sole plate bottom is provided with the heat conduction bending clamp that is used to wrap up annealing boiler tube row;
Said priming apparatus comprises two-position three way magnetic valve, tubulose measuring cup, and the permanent liquid level water tank that is communicated with the water source; The common interface of two-position three way magnetic valve up, and common interface is equipped with said tubulose measuring cup; The normal open interface of two-position three way magnetic valve is communicated with the bottom of permanent liquid level water tank, and the normal off interface of two-position three way magnetic valve is communicated with the internal bladder cavity of built-in dry combustion method inner bag through water inlet pipe mouth;
The stranded wire spiral of said electric heater unit is wound in the outer wall of dry combustion method pot; The left and right sides of dry combustion method pot is equipped with said thermopair; Vapour distributor is communicated with the internal bladder cavity of built-in dry combustion method inner bag, and internal bladder cavity is provided with the water-accepting board that is obliquely installed, and water-accepting board is positioned at the water inlet pipe mouth below; PLC unit control linkage electric heater unit, thermopair and priming apparatus.
Further, said dry combustion method pot is iron pan or aluminum pot.
Further, said priming apparatus comprises that also pipe adds bend pipe under water, and the SV arrangement for adjusting height of band scale; Said permanent liquid level water tank is provided with float(ing)valve water level control unit; Bend pipe connects water inlet pipe mouth to the normal off interface of two-position three way magnetic valve through adding under water; The SV arrangement for adjusting height comprises SV mounting seat, altitude mixture control screw, base plate lock screw; Two-position three way magnetic valve is connected with the SV mounting seat through the base plate lock screw, and the altitude mixture control screw passes two-position three way magnetic valve and the SV mounting seat touches.
Further; The dry combustion method pot of said built-in dry combustion method inner bag is provided with flange; Be evenly equipped with screw hole on the flange; Be provided with gasket between flange and the Stainless steel pot cover, the position of the corresponding gasket of Stainless steel pot cover is provided with pressure strip, and Stainless steel pot cover passes pressure strip through forcing screw and compresses Stainless steel pot cover and gasket; The dry combustion method outer wall of wall is enclosed with insulation layer.
Further, the stranded wire spiral of said electric heater unit is wound in the periphery of said insulation layer, and stranded wire spiral is with the insulation porcelain bead.
Further, said dry combustion method pot tilts to place, and thermopair is arranged at the position of dry combustion method pot near the bottom of a pan.
Further; Said vapour distributor comprises the steam inlet tube that equates with annealing boiler tube row's boiler tube quantity; And the steam that is opened in every boiler tube corresponding position gets into the hole; The lower end vertical weld of steam inlet tube is connected to steam and gets into the hole, and the flange of dry combustion method pot is inserted in the upper end of steam inlet tube, and the upper end of steam inlet tube penetrates internal bladder cavity; The upper end of steam inlet tube is provided with sealing-ring or gasket, and sealing-ring or gasket are provided with pressure strip, and pressure strip passes the flange that sealing-ring or gasket are connected in the dry combustion method pot through forcing screw; Correspondence position at Stainless steel pot cover is provided with the steam distribution cavity, and the steam distribution cavity is communicated with the steam oven inner room with the endoporus top of steam inlet tube.
Further, be positioned at the side of built-in dry combustion method inner bag away from lehre high temperature annealing district, the corresponding position of heat conduction bending clamp is provided with phase-transition heat-preserving district heating unit.
Further, between priming apparatus and built-in dry combustion method inner bag, be provided with enamel-cover roasting oven waste heating device; Enamel-cover roasting oven waste heating device comprises second water inlet pipe mouth, is installed on afterheat steam dry combustion method pot and waste heat Stainless steel pot cover in the enamel-cover roasting oven waste discharge air channel, is provided with gasket between the flange of afterheat steam dry combustion method pot and the waste heat Stainless steel pot cover; The pot mouth of afterheat steam dry combustion method pot is installed to the side, and the bottom side plate of afterheat steam dry combustion method pot is low inside and high outside shape; Second water inlet pipe mouth is inserted into the top near the afterheat steam dry combustion method pot the bottom of a pan from the waste heat Stainless steel pot cover, and the below of second water inlet pipe mouth is provided with second water-accepting board; The bottom of waste heat Stainless steel pot cover is communicated with the internal bladder cavity of built-in dry combustion method inner bag through water inlet pipe mouth, and the periphery bag of water inlet pipe mouth is provided with muff; Said priming apparatus is communicated with second water inlet pipe mouth.
A kind of steam generator of annealing furnace control method, it may further comprise the steps:
Steps A, the parameter of setting PLC unit, said parameter comprises built-in dry combustion method inner bag design temperature, adds the discharge master mode; Setting adds discharge, SV maximum frequency, SV minimum frequency, SV group number; Every group of SV number, measuring cup dress volume of water, wherein:
Built-in dry combustion method inner bag design temperature is represented the controlled target of the pot wall temperature that the thermopair of dry combustion method pot left and right sides setting records, the controlled target of promptly built-in dry combustion method inner bag actual temperature;
Adding the discharge master mode, to represent to add discharge be manual mode or automatic mode;
Setting adds discharge and representes the discharge that adds set; Under manual mode, the execution that the PLC unit is carried out adds discharge=setting and adds discharge; Under automatic mode, surpass the amplitude of built-in dry combustion method inner bag design temperature according to built-in dry combustion method inner bag actual temperature, calculate with pid algorithm and add the discharge increment, the execution that the PLC unit is carried out adds discharge=setting and adds discharge+add discharge increment;
The SV maximum frequency is represented the two-position three way magnetic valve water cycle number of times of adding most hourly;
The SV minimum frequency is represented the two-position three way magnetic valve minimum water cycle number of times that adds hourly;
SV group numerical table shows the two-position three way magnetic valve group number that PLC unit output point can be controlled respectively; The PLC unit changes and adds discharge through changing two-position three way magnetic valve break-make frequency in same group number; When the break-make frequency can not be reached by the restriction of SV minimum frequency and SV maximum frequency to change to add discharge and requires; Can change the two-position three way magnetic valve group number that comes into operation and change and add discharge, on the same group two-position three way magnetic valve can not use different break-make frequencies;
Every group of SV number represented the two-position three way magnetic valve number of each output point control of PLC unit;
When representing that tubulose measuring cup water level maintains an equal level with permanent liquid level water storage tank water level, measuring cup dress volume of water adorns the volume of water in the tubulose measuring cup;
Step B; When the PLC unit receive begin to provide steam instruction after; If add the discharge master mode is manual mode, the PLC unit according to about the minimum temperature that records of two thermopairs be the calculating that benchmark carries out pid algorithm with built-in dry combustion method inner bag design temperature; When temperature is low the calculation result of pid algorithm is converted into and adds heat and control electric heater unit, when temperature is high electric heater unit add heat=0, carry out in any case and add discharge=setting and add discharge;
Simultaneously, the PLC unit calculates and adds the discharge adjustable extent:
Minimum adds discharge=list group SV minimum and adds discharge=SV minimum frequency * every group of SV number * measuring cup dress volume of water;
Single group SV is discharge=SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly;
Discharge=SV group number * list is organized SV discharge=SV group number * SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly the most greatly;
Simultaneously, add discharge and add discharge less than minimum if carry out, the order of PLC unit is carried out and is added discharge and equal minimum and add heat flux; Add discharge greater than discharge the most greatly if carry out, then the order of PLC unit is carried out and is added discharge and equal discharge the most greatly; Output alarm when exceeding the situation of variable range more than the appearance, prompting manual regulation measuring cup dress volume of water is also imported new measuring cup dress volume of water;
Simultaneously; If execution adds discharge and adds discharge * SV group number more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/SV group number/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of these all SVs of break-make frequency control; If execution adds discharge and adds discharge * SV group number less than single group SV minimum; Then should reduce by one group of SV; If execution adds discharge and adds discharge * (SV group number-1) more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/(SV group number-1)/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of this break-make frequency control (SV group number-1) group SV; So till only remaining one group of SV;
Step C; When the PLC unit receive begin to provide steam instruction after; If add the discharge master mode is automatic mode, the PLC unit according to about the medial temperature that records of two thermopairs be the calculating that benchmark carries out pid algorithm with built-in dry combustion method inner bag design temperature; When temperature is low the calculation result of pid algorithm is converted into and adds heat and control electric heater unit, add discharge=setting and add discharge and carry out; When temperature is high the calculation result of pid algorithm is converted into and adds the discharge increment, make to carry out to add discharge=setting and add discharge+add the discharge increment, and electric heater unit add heat=0;
Simultaneously, the PLC unit calculates and adds the discharge adjustable extent:
Minimum adds discharge=list group SV minimum and adds discharge=SV minimum frequency * every group of SV number * measuring cup dress volume of water;
Single group SV is discharge=SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly;
Discharge=SV group number * list is organized SV discharge=SV group number * SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly the most greatly;
Simultaneously, add discharge and add discharge less than minimum if carry out, the order of PLC unit is carried out and is added discharge and equal minimum and add heat flux; Add discharge greater than discharge the most greatly if carry out, then the order of PLC unit is carried out and is added discharge and equal discharge the most greatly; Output alarm when exceeding the situation of variable range more than the appearance, prompting manual regulation measuring cup dress volume of water is also imported new measuring cup dress volume of water;
Simultaneously; If execution adds discharge and adds discharge * SV group number more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/SV group number/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of these all SVs of break-make frequency control; If execution adds discharge and adds discharge * SV group number less than single group SV minimum; Then should reduce by one group of SV; If execution adds discharge and adds discharge * (SV group number-1) more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/(SV group number-1)/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of this break-make frequency control (SV group number-1) group SV; So till only remaining one group of SV.
Beneficial effect of the present invention is:
A kind of steam generator of annealing furnace of the present invention, it comprises the electric heater unit that is provided with stranded wire spiral, built-in dry combustion method inner bag, PLC unit, priming apparatus, thermopair, and the vapour distributor that is communicated with the steam oven inner room; Built-in dry combustion method inner bag receives the heat that annealing boiler tube row is transmitted, and takes away the heat of built-in dry combustion method inner bag during from the liquid water evaporation of internal bladder cavity that water inlet pipe mouth gets into built-in dry combustion method inner bag; When the annealing boiler tube was arranged the shortage of heat that transmits, the discharge that adds of priming apparatus was set at the minimum value that meets the demands, and controls built-in dry combustion method inner bag temperature a little more than saturated-steam temperature through electric heater unit and thermopair; When the heat that annealing boiler tube row is transmitted exceeded demand, electric heater unit stopped heating, through the temperature that discharge is controlled built-in dry combustion method inner bag temperature to needs that adds of control priming apparatus; Vapour distributor makes the steam of internal bladder cavity lead to many lehre boiler tubes equably; The two-position three way magnetic valve of PLC unit control priming apparatus is pressed certain frequency and is carried out, and the water injection tubulose measuring cup with permanent liquid level water tank circulates the water in the tubulose measuring cup again through the internal bladder cavity that water inlet pipe mouth injects built-in dry combustion method inner bag; Adding discharge can regulate through three kinds of methods of height that adjusting adds the frequency of water cycle, the two-position three way magnetic valve quantity that comes into operation and the permanent relatively liquid level water tank of two-position three way magnetic valve.Adopt the steam generator of annealing furnace of said structure, because the dry combustion method pot the bottom of a pan is approached the dry combustion method pot temperature through carrying out heat transmission preferably between conductive sole plate and heat conduction bending clamp and the annealing boiler tube row by the annealing boiler tube row temperature of heat conduction bending clamp parcel; When wire rod comes out to get into this regional annealing boiler tube row from lehre high temperature annealing district; The high temperature wire rod can pass to the dry combustion method pot fast through the heat that steam passes to the lehre boiler tube; Not only can reduce this regional envrionment temperature, accelerate to have accomplished the cooling of annealing wire rod, also can reduce producing the electric energy that steam needs; Reach energy-conservation purpose, more obvious when the production wire gauge is big especially; Adopt the dry combustion method pot, after particularly the dry combustion method pot is provided with water-accepting board, significantly reduced the destruction of expanding with heat and contract with cold, make dry combustion method steam become possibility inner bag; Because the thermal conductivity of dry combustion method pot (like iron pan or aluminum pot) is much higher than stainless steel, thermal expansivity is significantly smaller than stainless steel, and wall thickness is bigger, so the thermal stresses that liquid cold water causes is less, is difficult for producing be full of cracks; Water-accepting board also can bear bigger cold shock for it, and cold shock point is disperseed and the position is fixing, also can protect not generation of cracks seepage of dry combustion method pot well; After adopting the dry combustion method inner bag, temperature control requirement reduces greatly, only need be higher than saturated-steam temperature and get final product; Temperature slightly height can not increase power consumption yet, stays in the inner bag because will add the unnecessary heat insulation layer in water evaporation back of discharge, and how many heats the rising of vapor temperature itself do not consume, and vapor temperature still will raise in the lehre boiler tube; After in the employing being built-in dry combustion method inner bag, without any need for overflow, not only reduced the waste of power and water ability, also made control become simpler, steam flow just is equal to and has added discharge; The structure control of employing two-position three way magnetic valve and tubulose measuring cup adds discharge and has higher accuracy and safety, and is simple in structure, easy to maintenance.
A kind of steam generator of annealing furnace control method of the present invention is the pairing control method of a kind of steam generator of annealing furnace according to the invention; The heat that can utilize the wire rod band to come better, water and the waste of energy of avoiding overflow to bring, the stability of raising steam; Simplified construction; Easy handling, safety is high, can realize energy-conservation to greatest extent; But three kinds of control method independent assortments that add discharge only need be provided with one group of two-position three way magnetic valve usually, and the two-position three way magnetic valve height also only need be adjusted once when changing rule; When production contains black metal wire material, many group two-position three way magnetic valves can be set, the two-position three way magnetic valve height also only need be adjusted once when changing rule; Under the extreme case, also can adopt automatic positioning control system to regulate the two-position three way magnetic valve height automatically, but this system is complicated, and cost is higher, solves then more economic and reliable through increasing two-position three way magnetic valve group number.
Description of drawings:
Fig. 1 is the structural representation of the embodiment of the invention one;
Fig. 2 is that the A of Fig. 1 is to structural representation;
Fig. 3 is the C portion enlarged diagram of Fig. 2;
Fig. 4 is the B portion enlarged diagram of Fig. 2;
Fig. 5 is the structural representation of the embodiment of the invention two;
Fig. 6 is the structural representation of the embodiment of the invention three;
Fig. 7 is the structural representation of the embodiment of the invention four.
Embodiment:
Below in conjunction with accompanying drawing and embodiment the present invention is further described:
Embodiment one:
Extremely shown in Figure 4 like Fig. 1, a kind of steam generator of annealing furnace, it comprises electric heater unit 2, built-in dry combustion method inner bag 1, PLC unit, priming apparatus 3, the thermopair 22 that is provided with stranded wire spiral 21, and the vapour distributor 4 that is communicated with the steam oven inner room; Said built-in dry combustion method inner bag 1 comprises dry combustion method pot 10 and the Stainless steel pot cover 11 that is covered on dry combustion method pot 10 tops; The internal bladder cavity 12 of dry combustion method pot 10 and the built-in dry combustion method inner bag 1 of Stainless steel pot cover 11 formation; Dry combustion method pot 10 bottoms are provided with conductive sole plate 13, and conductive sole plate 13 bottoms are provided with the heat conduction bending clamp 14 that is used to wrap up annealing boiler tube row 20; Said priming apparatus 3 comprises two-position three way magnetic valve 31, tubulose measuring cup 30, and the permanent liquid level water tank 5 that is communicated with the water source; The common interface of two-position three way magnetic valve 31 up, and common interface is equipped with said tubulose measuring cup 30; The normal open interface of two-position three way magnetic valve 31 is communicated with the bottom of permanent liquid level water tank 5, and the normal off interface of two-position three way magnetic valve 31 is communicated with the internal bladder cavity 12 of built-in dry combustion method inner bag 1 through water inlet pipe mouth 50; The stranded wire spiral 21 of said electric heater unit 2 is wound in the outer wall of dry combustion method pot 10; The left and right sides of dry combustion method pot 10 is equipped with said thermopair 22; Vapour distributor 4 is communicated with the internal bladder cavity 12 of built-in dry combustion method inner bag 1; Internal bladder cavity 12 is provided with the water-accepting board 15 that is obliquely installed, and water-accepting board 15 is positioned at water inlet pipe mouth 50 belows; PLC unit control linkage electric heater unit 2, thermopair 22 and priming apparatus 3.Dry combustion method pot 10 of the present invention is iron pan or aluminum pot.Adding discharge can regulate through three kinds of methods of height that adjusting adds the frequency of water cycle, two-position three way magnetic valve 31 quantity that come into operation and the permanent relatively liquid level water tank 5 of two-position three way magnetic valve 31 SVs.
As preferred implementation; In the present embodiment one; The dry combustion method pot 10 of said built-in dry combustion method inner bag 1 is provided with flange, is evenly equipped with screw hole on the flange, is provided with gasket 16 between flange and the Stainless steel pot cover 11; The position of Stainless steel pot cover 11 corresponding gaskets 16 is provided with pressure strip 17, and Stainless steel pot cover 11 passes pressure strip 17 through forcing screw and compresses Stainless steel pot cover 11 and gasket 16; Dry combustion method pot 10 outer walls are enclosed with insulation layer 18.Heat conduction bending clamp 14 can extend back forward, and the annealing boiler tube row 20 that heat conduction bending clamp 14 is wrapping to all can pass to dry combustion method pot 10 with the heat of high temperature wire rod, all can quicken the cooling of high temperature wire rod simultaneously; The stranded wire spiral 21 of said electric heater unit 2 is wound in the periphery of said insulation layer 18, and stranded wire spiral 21 is with the insulation porcelain bead, the heating of under PLC control, can switching on of stranded wire spiral 21; If dry combustion method pot 10 tilts to place, promptly dry combustion method pot 10 tilts to place with annealing boiler tube row 20, and thermopair 22 is arranged at the position of dry combustion method pot 10 near the bottom of a pan, and is concrete, and thermopair 22 is arranged on the lowest part of dry combustion method pot 10 ponding positions; Water-accepting board 15 tilts to place makes current direction dry combustion method pot 10 the bottom of a pan higher positions from water inlet pipe mouth 50, and stops cold water directly to stimulate the bottom of a pan.
As preferred implementation; In the present embodiment one; Said vapour distributor 4 comprises the steam inlet tube 41 that equates with annealing boiler tube row 20 boiler tube 201 quantity, and the steam entering hole 42 that is opened in every boiler tube 201 corresponding positions, and the lower end vertical weld of steam inlet tube 41 is connected to steam and gets into hole 42; The flange of dry combustion method pot 10 is inserted in the upper end of steam inlet tube 41; And expose 10 ~ 30 millimeters, and make the upper end of steam inlet tube 41 penetrate internal bladder cavity 12, the upper end of steam inlet tube 41 is provided with sealing-ring or gasket 16; Sealing-ring or gasket 16 are provided with pressure strip 17, and pressure strip 17 passes the flange that sealing-ring or gasket 16 are connected in dry combustion method pot 10 through forcing screw; Correspondence position at Stainless steel pot cover 11 is provided with the steam distribution cavity, and the steam distribution cavity is communicated with the steam oven inner room with the endoporus top of steam inlet tube 41.
As preferred implementation, in the present embodiment one, said priming apparatus 3 comprises that also pipe adds bend pipe 32 under water, and the SV arrangement for adjusting height of band scale 33; Said permanent liquid level water tank 5 is provided with float(ing)valve water level control unit 51; Bend pipe 32 connects water inlet pipe mouth 50 to the normal off interface of two-position three way magnetic valve 31 through adding under water; The SV arrangement for adjusting height comprises SV mounting seat 34, altitude mixture control screw 35, base plate lock screw 36; Two-position three way magnetic valve 31 is connected with SV mounting seat 34 through base plate lock screw 36, and altitude mixture control screw 35 passes two-position three way magnetic valve 31 and touches with SV mounting seat 34.Two-position three way magnetic valve 31 no powers connect mouth often and are communicated with common interface, and the water in the permanent liquid level water tank 5 flows into tubulose measuring cups 30 through two-position three way magnetic valve 31, makes tubulose measuring cup 30 liquid levels identical with permanent liquid level water tank 5 liquid levels; Switch on often that the disconnecting mouth is communicated with common interface, the water in the tubulose measuring cup 30 all flows into built-in dry combustion method inner bag 1 through two-position three way magnetic valve 31; When two above two-position three way magnetic valves 31 are arranged, can adopt the one positive one anti-mode that is cross-linked, the break-make of two-position three way magnetic valve 31 can adopt unified control; During two-position three way magnetic valve 31 no powers; The two-position three way magnetic valve 31 normal open interfaces that just connecing are communicated with common interface, water filling in tubulose measuring cup 30, and the two-position three way magnetic valve 31 normal off interfaces of reversal connection are communicated with common interface; Water in the tubulose measuring cup 30 is emitted; During two-position three way magnetic valve 31 energisings, the two-position three way magnetic valve 31 normal off interfaces that just connecing are communicated with common interface, and the water in the tubulose measuring cup 30 is emitted; The two-position three way magnetic valve 31 normal open interfaces of reversal connection are communicated with water filling in tubulose measuring cup 30 with common interface; Two-position three way magnetic valve 31 is installed on the SV arrangement for adjusting height; The high highly more then tubulose of two-position three way magnetic valve 31 measuring cup 30 moisture storage capacitys are few more; The water that injects built-in dry combustion method vapour generator after 31 1 actuation cycle of two-position three way magnetic valve is few more, otherwise then many more; Dress volume of water when tubulose measuring cup 30 water levels in the time of can indicating respective heights on the scale 33 and permanent liquid level water tank 5 highly maintain an equal level;
A kind of steam generator of annealing furnace of the present invention; When steam inlet tube 41 is positioned at 6 one sides away from the high temperature annealing district; And dry combustion method pot 10 is from the high temperature annealing district 6 when far away, near the heat in high temperature annealing district 6 difficulty be delivered to dry combustion method pot 10, and get into steam that lehre boiler tubes 201 flow to high temperature annealing district 6 from steam inlet tube 41 and passed through preheating earlier and just get into high temperature annealing district 6; So it is can reduce the calorific loss in high temperature annealing district 6, but slightly poor to the cooling performance of wire rod.A kind of steam generator of annealing furnace of the present invention, its principle of work and control method: it may further comprise the steps:
Steps A, the parameter of setting PLC unit, said parameter comprises built-in dry combustion method inner bag design temperature, adds the discharge master mode; Setting adds discharge, SV maximum frequency, SV minimum frequency, SV group number; Every group of SV number, measuring cup dress volume of water, wherein:
Built-in dry combustion method inner bag design temperature is represented the controlled target of the pot wall temperature that the thermopair 22 of dry combustion method pot 10 left and right sides setting records, the controlled target of promptly built-in dry combustion method inner bag actual temperature;
Adding the discharge master mode, to represent to add discharge be manual mode or automatic mode;
Setting adds discharge and representes the discharge that adds set; Under manual mode, the execution that the PLC unit is carried out adds discharge=setting and adds discharge; Under automatic mode, surpass the amplitude of built-in dry combustion method inner bag design temperature according to built-in dry combustion method inner bag actual temperature, calculate with pid algorithm and add the discharge increment, the execution that the PLC unit is carried out adds discharge=setting and adds discharge+add discharge increment;
The SV maximum frequency is represented the two-position three way magnetic valve water cycle number of times of adding most hourly;
The SV minimum frequency is represented the two-position three way magnetic valve minimum water cycle number of times that adds hourly;
SV group numerical table shows the two-position three way magnetic valve group number that PLC unit output point can be controlled respectively; The PLC unit changes and adds discharge through changing two-position three way magnetic valve break-make frequency in same group number; When the break-make frequency can not be reached by the restriction of SV minimum frequency and SV maximum frequency to change to add discharge and requires; Can change the two-position three way magnetic valve group number that comes into operation and change and add discharge, on the same group two-position three way magnetic valve can not use different break-make frequencies;
Every group of SV number represented the two-position three way magnetic valve number of each output point control of PLC unit;
When representing that tubulose measuring cup water level maintains an equal level with permanent liquid level water storage tank water level, measuring cup dress volume of water adorns the volume of water in the tubulose measuring cup;
Step B; When the PLC unit receive begin to provide steam instruction after; If add the discharge master mode is manual mode, the PLC unit according to about the minimum temperature that records of two thermopairs 22 be the calculating that benchmark carries out pid algorithm with built-in dry combustion method inner bag design temperature; When temperature is low the calculation result of pid algorithm is converted into and adds heat and control electric heater unit 2, when temperature is high electric heater unit 2 add heat=0, carry out in any case and add discharge=setting and add discharge;
Simultaneously, the PLC unit calculates and adds the discharge adjustable extent:
Minimum adds discharge=list group SV minimum and adds discharge=SV minimum frequency * every group of SV number * measuring cup dress volume of water;
Single group SV is discharge=SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly;
Discharge=SV group number * list is organized SV discharge=SV group number * SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly the most greatly;
Simultaneously, add discharge and add discharge less than minimum if carry out, the order of PLC unit is carried out and is added discharge and equal minimum and add heat flux; Add discharge greater than discharge the most greatly if carry out, then the order of PLC unit is carried out and is added discharge and equal discharge the most greatly; Output alarm when exceeding the situation of variable range more than the appearance, prompting manual regulation measuring cup dress volume of water is also imported new measuring cup dress volume of water;
Simultaneously; If execution adds discharge and adds discharge * SV group number more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/SV group number/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of these all SVs of break-make frequency control; If execution adds discharge and adds discharge * SV group number less than single group SV minimum; Then should reduce by one group of SV; If execution adds discharge and adds discharge * (SV group number-1) more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/(SV group number-1)/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of this break-make frequency control SV group number-1 group SV; So till only remaining one group of SV;
Step C; When the PLC unit receive begin to provide steam instruction after; If add the discharge master mode is automatic mode, the PLC unit according to about the medial temperature that records of two thermopairs 22 be the calculating that benchmark carries out pid algorithm with built-in dry combustion method inner bag design temperature; When temperature is low the calculation result of pid algorithm is converted into and adds heat and control electric heater unit 2, add discharge=setting and add discharge and carry out; When temperature is high the calculation result of pid algorithm is converted into and adds the discharge increment, make to carry out to add discharge=setting and add discharge+add the discharge increment, and electric heater unit 2 add heat=0;
Simultaneously, the PLC unit calculates and adds the discharge adjustable extent:
Minimum adds discharge=list group SV minimum and adds discharge=SV minimum frequency * every group of SV number * measuring cup dress volume of water;
Single group SV is discharge=SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly;
Discharge=SV group number * list is organized SV discharge=SV group number * SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly the most greatly;
Simultaneously, add discharge and add discharge less than minimum if carry out, the order of PLC unit is carried out and is added discharge and equal minimum and add heat flux; Add discharge greater than discharge the most greatly if carry out, then the order of PLC unit is carried out and is added discharge and equal discharge the most greatly; Output alarm when exceeding the situation of variable range more than the appearance, prompting manual regulation measuring cup dress volume of water is also imported new measuring cup dress volume of water;
Simultaneously; If execution adds discharge and adds discharge * SV group number more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/SV group number/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of these all SVs of break-make frequency control; If execution adds discharge and adds discharge * SV group number less than single group SV minimum; Then should reduce by one group of SV; If execution adds discharge and adds discharge * (SV group number-1) more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/(SV group number-1)/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of this break-make frequency control SV group number-1 group SV; So till only remaining one group of SV.
Embodiment two:
As shown in Figure 5; Be with the difference of embodiment one; Present embodiment two described a kind of steam generator of annealing furnace; Its steam inlet tube 41 is arranged on the side of dry combustion method pot 10 near high temperature annealing district 6, makes dry combustion method pot 10 near high temperature annealing district 6, and this structure is applicable to that the cooling performance of high temperature wire rod is the situation of main focus.Dry combustion method pot 10 is arranged on high temperature annealing district 6 and exports the side wire rod capable of using heat that band is come from the high-temperature zone near lehre and produce steam, and can help the wire rod cooling.But what need most steam protection is lehre import one side, has to strengthen quantity of steam when vapour source is positioned at outlet one side and guarantees that ingress is effectively protected.For most of wire rods, the heat that band is come from the high-temperature zone is more, and needs better cooling effect, and dry combustion method pot 10 is arranged on high temperature annealing district 6 and exports a side near lehre the advantages outweigh the disadvantages.For thinner wire rod, because the volume or weight that the unit time passes through is less, the band heat of coming is less, and cooling is also than being easier to, and dry combustion method pot 10 is arranged on high temperature annealing district 6 and just becomes near lehre import one side that the advantages outweigh the disadvantages.
Embodiment three:
As shown in Figure 6; Be with the difference of embodiment one; Present embodiment three described a kind of steam generator of annealing furnace also are being positioned at the side of built-in dry combustion method inner bag 1 away from lehre high temperature annealing district 6, and the corresponding position of heat conduction bending clamp 14 is provided with phase-transition heat-preserving district heating unit 7.When this structure is used to contain black metal wire material annealing; Stronger means control phase-transition heat-preserving district temperature is arranged; When if the annealing boiler tube is arranged 20 shortages of heat; Can add thermogenesis steam and make dry combustion method pot 10 temperature remain on temperature a little less than transformation temperature; The insulation heating zone is set on the pipe row after inner bag again can guarantees better to be in transformation temperature by lehre boiler tube 201 temperature of heat conduction bending clamp 14 parcels, the length sufficiently long of heat conduction bending clamp 14 parcels can guarantee that wire rod has time enough to carry out phase transformation at a slow speed; If the annealing boiler tube is arranged 20 heats when too many; Can adding greatly, discharge remains on than the low more temperature of transformation temperature dry combustion method pot 10 temperature; More effectively make wire rod be cooled fast to transformation temperature; And the insulation of the transformation temperature after making it heating zone is controlled, and this existing lehre can't be realized, also is that existing lehre can't be to carrying out the annealed reason than blister copper Baogang wire rod.
Embodiment four:
As shown in Figure 7, the structure applications of present embodiment four described a kind of steam generator of annealing furnace is in enamelling machine.Be that with the difference of embodiment one when being applied to enamelling machine, for saves energy further, present embodiment four described a kind of steam generator of annealing furnace are provided with enamel-cover roasting oven waste heating device 8 between priming apparatus 3 and built-in dry combustion method inner bag 1; Enamel-cover roasting oven waste heating device 8 comprises second water inlet pipe mouth 84, is installed on afterheat steam dry combustion method pot 80 and waste heat Stainless steel pot cover 81 in the enamel-cover roasting oven waste discharge air channel, is provided with gasket 16 between the flange of afterheat steam dry combustion method pot 80 and the waste heat Stainless steel pot cover 81; The pot mouth of afterheat steam dry combustion method pot 80 is installed to the side, and the bottom side plate of afterheat steam dry combustion method pot 80 is low inside and high outside shape; Second water inlet pipe mouth 84 is inserted into the top near afterheat steam dry combustion method pot 80 thes bottom of a pan from waste heat Stainless steel pot cover 81, and the below of second water inlet pipe mouth 84 is provided with second water-accepting board 82; The bottom of waste heat Stainless steel pot cover 81 is through the internal bladder cavity 12 of the built-in dry combustion method inner bag 1 of water inlet pipe mouth 50 connections, and the periphery bag of water inlet pipe mouth 50 is provided with muff 83; Said priming apparatus 3 is communicated with second water inlet pipe mouth 84.Liquid water is heated and produces steam under the heat effect of waste gas residual heat; Formed ponding when steam that produces and heat are not enough; Flow into the import of leading to internal bladder cavity 12 from the outlet that is positioned at waste heat Stainless steel pot cover 81 bottoms along water inlet pipe mouth 50; Curved equivalance aqua region down must not be arranged in the way, and water inlet pipe mouth 50 peripheries are provided with muff 83; Built-in dry combustion method inner bag 1 temperature is higher than saturated-steam temperature, and enamel-cover roasting oven waste heating device 8 unevaporated surplus water all are converted into steam, guarantees that steam flow equals to add discharge.Because temperature and the flow of enamel-cover roasting oven waste gas all change in process of production, can provide the heat that produces steam unstable, differ at enamel-cover roasting oven waste heating device 8 and all evaporate surely so setting adds the water of discharge; The present invention is all led to built-in dry combustion method inner bag 1 with steam in the enamel-cover roasting oven waste heating device 8 and unevaporated water; Unevaporated liquid water stream can guarantee whole evaporations behind built-in dry combustion method inner bag 1; So both utilized the waste heat of enamel-cover roasting oven, guaranteed the stability of steam again.Among Fig. 7, the wavy line arrow is represented the flow direction of waste gas.
Embodiment five:
A kind of steam generator of annealing furnace control method of the present invention, this method is the control method of the above-mentioned a kind of steam generator of annealing furnace of the present invention, it may further comprise the steps:
Steps A, the parameter of setting PLC unit, said parameter comprises built-in dry combustion method inner bag design temperature, adds the discharge master mode; Setting adds discharge, SV maximum frequency, SV minimum frequency, SV group number; Every group of SV number, measuring cup dress volume of water, wherein:
Built-in dry combustion method inner bag design temperature is represented the controlled target of the pot wall temperature that the thermopair 22 of dry combustion method pot 10 left and right sides setting records, the controlled target of promptly built-in dry combustion method inner bag actual temperature; For example: built-in dry combustion method inner bag 1 is communicated with lehre boiler tube 201 through vapour distributor 4; Again through 201 imports of lehre boiler tube and outlet and atmosphere; The saturated-steam temperature of accessible vapor pressure correspondence is 100.5 degree normally; Built-in dry combustion method inner bag design temperature is 105 can guarantee that built-in dry combustion method inner bag 1 is in the unsaturated steam state when spending, and guarantees that all liquid waters are converted into steam fast, so establish: built-in dry combustion method inner bag design temperature=105 degree;
Adding the discharge master mode, to represent to add discharge be manual mode or automatic mode; It is little that manual mode is used for the wire rod heat, also needs electrically heated could produce the situation of enough steam after the long-time ordinary production, and this moment, built-in dry combustion method inner bag design temperature was a little more than saturated-steam temperature; It is bigger that automatic mode is used for the wire rod heat; Do not need electrically heated can produce enough steam after the long-time ordinary production; And do not increase the situation that built-in dry combustion method inner bag actual temperature when adding discharge can surpass design temperature, this moment, built-in dry combustion method inner bag design temperature should be higher than saturated-steam temperature significantly; For example: when the production wire gage was little, the shortage of heat that the wire rod band is come needed electrically heated could produce enough steam to produce necessary steam all the time, can select manual state;
Setting adds discharge and representes the discharge that adds set; Under manual mode, the execution that the PLC unit is carried out adds discharge=setting and adds discharge; Under automatic mode, surpass the amplitude of built-in dry combustion method inner bag design temperature according to built-in dry combustion method inner bag actual temperature, calculate with pid algorithm and add the discharge increment, the execution that the PLC unit is carried out adds discharge=setting and adds discharge+add discharge increment; For example: guarantee that the not oxidized minimum steam flow of wire rod is 4.5 liters/hour, set and add discharge=2.5 liter/hour;
The SV maximum frequency is represented the two-position three way magnetic valve 31 water cycle number of times of adding most hourly; The frequency too high work-ing life that can reduce two-position three way magnetic valve 31, and possibly make 30 filling time of tubulose measuring cup deficiency cause the actual discharge that adds to be lower than theory and to add discharge; For example: for the protection two-position three way magnetic valve 31 require its operating frequency be no faster than 2 seconds/inferior; And 2 second time was enough to fill it up with or the tubulose measuring cup 30 of turning; Two-position three way magnetic valve 31 is switched on and is cut off the power supply two for moving just to accomplish and once adds water cycle; Once add the minimum needs of water cycle 4 seconds, i.e. SV maximum frequency=3600/4=900 time/hour;
The SV minimum frequency is represented the two-position three way magnetic valve 31 minimum water cycle number of times that add hourly; Frequency is too low possibly to make that being interrupted more greatly appears in the steam generation in the built-in dry combustion method inner bag 1, makes its vapor pressure unstable, to the wire rods in the lehre boiler tube 201 stable protection can not be provided; For example: adopting two two-position three way magnetic valves 31 is one group; During two-position three way magnetic valve 31 energisings, one of them two-position three way magnetic valve 31 corresponding tubulose measuring cup 30 is in and adds water state, and another two-position three way magnetic valve 31 corresponding tubulose measuring cups 30 are in the state of discharging water; During two-position three way magnetic valve 31 outages; The tubulose measuring cup 30 of one of them two-position three way magnetic valve 31 is in the state of discharging water, and the tubulose measuring cup 30 of another two-position three way magnetic valve 31 is in and adds water state, for built-in dry combustion method inner bag 1; Once add water cycle and accepted the water that adds that twice time staggers; If add the water timed interval require 5 seconds/inferior, then add water cycle can be made as at interval 10 seconds/inferior, that is: minimum adds water frequency=3600/10=360 time/hour;
SV group numerical table shows 31 groups of numbers of two-position three way magnetic valve that PLC unit output point can be controlled respectively; The PLC unit changes and adds discharge through changing two-position three way magnetic valve 31 break-make frequencies in same group number; When the break-make frequency can not be reached by the restriction of SV minimum frequency and SV maximum frequency to change to add discharge and requires; Can change the 31 groups of numbers of two-position three way magnetic valve that come into operation and change and add discharge, on the same group two-position three way magnetic valve 31 can not use different break-make frequencies; The production range of common a kind of type is little, and the variation range that adds discharge when producing same specification is littler, so many group control only is used to have the situation of particular requirement; For example: when the specification of production wire rod is little; Need not strengthen quantity of steam cools off; All be provided with the porcelain bead hole that dwindles bore for 201 imports of lehre boiler tube and outlet, the lehre of 40 lehre boiler tubes 201 arranged approximately, one group of two two-position three way magnetic valves, 31 accessible discharge that add; Be enough to reach the purpose of steam protection, so one group of two-position three way magnetic valve 31 only is set.
Every group of SV number represented two-position three way magnetic valve 31 numbers of each output point control of PLC unit; Usually can adopt two one group, one of them just connects, another reversal connection; For example: one group is provided with two two-position three way magnetic valves 31.
When representing that tubulose measuring cup 30 water levels maintain an equal level with permanent liquid level water tank 5 water levels, measuring cup dress volume of water adorns the volumes of water in the tubulose measuring cup 30; This volume can be regulated the SV height through two-position three way and regulate, and two-position three way magnetic valve 31 arrangement for adjusting height are provided with through the volume scale of demarcating 33, after the manual regulation scale 33 readings are imported the PLC unit; For example: tubulose measuring cup 30 dress volume of water are 5 milliliters/glass when being transferred to certain height;
Step B; When the PLC unit receive begin to provide steam instruction after; If add the discharge master mode is manual mode, the PLC unit according to about the minimum temperature that records of two thermopairs 22 be the calculating that benchmark carries out pid algorithm with built-in dry combustion method inner bag design temperature; When temperature is low the calculation result of pid algorithm is converted into and adds heat and control electric heater unit 2, when temperature is high electric heater unit 2 add heat=0, carry out in any case and add discharge=setting and add discharge; For example: pid algorithm calculation result is converted into that to add heat be 15%, in a sampling period, carries out the heating of 15% time, carries out to add discharge=setting and add discharge=4.5 liter/hour;
Simultaneously, the PLC unit calculates and adds the discharge adjustable extent:
Minimum adds discharge=list group SV minimum and adds discharge=SV minimum frequency * every group of SV number * measuring cup dress volume of water; For example: minimum add discharge=list group SV minimum add discharge=SV minimum frequency * every group SV number * measuring cup dress volume of water=360 * 2 * 5=3600 milliliter/hour=3.6 liters/hour;
Single group SV is discharge=SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly; For example: single group SV the most greatly discharge=SV maximum frequency * every group SV number * measuring cup dress volume of water=900 * 2 * 5=9000 milliliter/hour=9 liters/hour;
Discharge=SV group number * list is organized SV discharge=SV group number * SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly the most greatly; For example: the most greatly discharge=SV group number * list group SV the most greatly discharge=SV group number * SV maximum frequency * every group SV number * measuring cup dress volume of water=1 * 900 * 2 * 5=9000 milliliter/hour=9 liters/hour;
Simultaneously, add discharge and add discharge less than minimum if carry out, the order of PLC unit is carried out and is added discharge and equal minimum and add heat flux; Add discharge greater than discharge the most greatly if carry out, then the order of PLC unit is carried out and is added discharge and equal discharge the most greatly; Output alarm when exceeding the situation of variable range more than the appearance, prompting manual regulation measuring cup dress volume of water is also imported new measuring cup dress volume of water; For example: carry out and to add discharge=4.5 liter/hour>minimum and add discharge=3.6 liter/hour, and carry out and add discharge=9, discharge=4.5 liter/hour<the most greatly liter/hour, do not exceed variable range, not output alarm;
Simultaneously; If execution adds discharge and adds discharge * SV group number more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/SV group number/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of these all SVs of break-make frequency control; If execution adds discharge and adds discharge * SV group number less than single group SV minimum; Then should reduce by one group of SV; If execution adds discharge and adds discharge * (SV group number-1) more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/(SV group number-1)/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of this break-make frequency control SV group number-1 group SV; So till only remaining one group of SV; For example: carry out add discharge=4.5 liter/hour>SV minimum add discharge * SV group number=3.6 * 1=3.6 liter/hour, SV break-make frequency=executions adds discharge/SV group number/every group SV number/measuring cup and adorns volume of water=4500/1/2/5=450 time/hour;
Step C; When the PLC unit receive begin to provide steam instruction after; If add the discharge master mode is automatic mode, the PLC unit according to about the medial temperature that records of two thermopairs 22 be the calculating that benchmark carries out pid algorithm with built-in dry combustion method inner bag design temperature; When temperature is low the calculation result of pid algorithm is converted into and adds heat and control electric heater unit 2, add discharge=setting and add discharge and carry out; When temperature is high the calculation result of pid algorithm is converted into and adds the discharge increment, make to carry out to add discharge=setting and add discharge+add the discharge increment, and electric heater unit 2 add heat=0; As to add the discharge master mode be manual mode, do not carry out this step control;
Simultaneously, the PLC unit calculates and adds the discharge adjustable extent:
Minimum adds discharge=list group SV minimum and adds discharge=SV minimum frequency * every group of SV number * measuring cup dress volume of water;
Single group SV is discharge=SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly;
Discharge=SV group number * list is organized SV discharge=SV group number * SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly the most greatly;
Simultaneously, add discharge and add discharge less than minimum if carry out, the order of PLC unit is carried out and is added discharge and equal minimum and add heat flux; Add discharge greater than discharge the most greatly if carry out, then the order of PLC unit is carried out and is added discharge and equal discharge the most greatly; Output alarm when exceeding the situation of variable range more than the appearance, prompting manual regulation measuring cup dress volume of water is also imported new measuring cup dress volume of water;
Simultaneously; If execution adds discharge and adds discharge * SV group number more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/SV group number/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of these all SVs of break-make frequency control; If execution adds discharge and adds discharge * SV group number less than single group SV minimum; Then should reduce by one group of SV; If execution adds discharge and adds discharge * (SV group number-1) more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/(SV group number-1)/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of this break-make frequency control (SV group number-1) group SV; So till only remaining one group of SV.
Above-mentioned pid algorithm, promptly Proportion Integration Differentiation algorithm in the engineering practical application, is used control theory the most widely, and those skilled in the art all can realize.
The temperature control method of heating and cooling can use the inventor to control for " a kind of control method of thereof using PID algorithm " that propose in the Chinese invention patent of " 200910038926.9 " at application number.
In sum, a kind of steam generator of annealing furnace control method of the present invention is the pairing control method of a kind of steam generator of annealing furnace according to the invention, the heat that can utilize the wire rod band to come better; Water and the waste of energy of avoiding overflow to bring; Improve the stability of steam, simplified construction, easy handling; Safety is high, can realize energy-conservation to greatest extent; But three kinds of control method independent assortments that add discharge only need be provided with one group of two-position three way magnetic valve 31 usually, and two-position three way magnetic valve 31 highly also only need be adjusted once when changing rule; When production contains black metal wire material, many group two-position three way magnetic valves 31 can be set, two-position three way magnetic valve 31 highly also only need be adjusted once when changing rule; Under the extreme case, also can adopt automatic positioning control system to regulate two-position three way magnetic valve 31 height automatically, but this system is complicated, and cost is higher, solves then more economic and reliable through increasing by 31 groups of numbers of two-position three way magnetic valve.
The above only is preferred embodiment of the present invention, so all equivalences of doing according to the described structure of patent claim of the present invention, characteristic and principle change or modify, includes in patent claim of the present invention.

Claims (10)

1. steam generator of annealing furnace; It comprises the electric heater unit (2) that is provided with stranded wire spiral (21); It is characterized in that: it also comprises built-in dry combustion method inner bag (1), PLC unit, priming apparatus (3), thermopair (22), and the vapour distributor (4) that is communicated with the steam oven inner room;
Said built-in dry combustion method inner bag (1) comprises dry combustion method pot (10) and is covered on the Stainless steel pot cover (11) at dry combustion method pot (10) top; Dry combustion method pot (10) and Stainless steel pot cover (11) form the internal bladder cavity (12) of built-in dry combustion method inner bag (1); Dry combustion method pot (10) bottom is provided with conductive sole plate (13), and conductive sole plate (13) bottom is provided with the heat conduction bending clamp (14) that is used for parcel annealing boiler tube row (20);
Said priming apparatus (3) comprises two-position three way magnetic valve (31), tubulose measuring cup (30), and the permanent liquid level water tank (5) that is communicated with the water source; The common interface of two-position three way magnetic valve (31) up, and common interface is equipped with said tubulose measuring cup (30); The normal open interface of two-position three way magnetic valve (31) is communicated with the bottom of permanent liquid level water tank (5), and the normal off interface of two-position three way magnetic valve (31) is communicated with the internal bladder cavity (12) of built-in dry combustion method inner bag (1) through water inlet pipe mouth (50);
The stranded wire spiral (21) of said electric heater unit (2) is wound in the outer wall of dry combustion method pot (10); The left and right sides of dry combustion method pot (10) is equipped with said thermopair (22); Vapour distributor (4) is communicated with the internal bladder cavity (12) of built-in dry combustion method inner bag (1); Internal bladder cavity (12) is provided with the water-accepting board (15) that is obliquely installed, and water-accepting board (15) is positioned at water inlet pipe mouth (50) below; PLC unit control linkage electric heater unit (2), thermopair (22) and priming apparatus (3).
2. a kind of steam generator of annealing furnace according to claim 1 is characterized in that: said dry combustion method pot (10) is iron pan or aluminum pot.
3. a kind of steam generator of annealing furnace according to claim 1 is characterized in that: said priming apparatus (3) comprises that also pipe adds bend pipe (32) under water, and the SV arrangement for adjusting height of band scale (33); Said permanent liquid level water tank (5) is provided with float(ing)valve water level control unit (51); Bend pipe (32) connects water inlet pipe mouth (50) to the normal off interface of two-position three way magnetic valve (31) through adding under water; The SV arrangement for adjusting height comprises SV mounting seat (34), altitude mixture control screw (35), base plate lock screw (36); Two-position three way magnetic valve (31) is connected with SV mounting seat (34) through base plate lock screw (36), and altitude mixture control screw (35) passes two-position three way magnetic valve (31) and touches with SV mounting seat (34).
4. a kind of steam generator of annealing furnace according to claim 1; It is characterized in that: the dry combustion method pot (10) of said built-in dry combustion method inner bag (1) is provided with flange; Be evenly equipped with screw hole on the flange; Be provided with gasket (16) between flange and the Stainless steel pot cover (11); The position of the corresponding gasket of Stainless steel pot cover (11) (16) is provided with pressure strip (17), and Stainless steel pot cover (11) passes pressure strip (17) through forcing screw and compresses Stainless steel pot cover (11) and gasket (16); Dry combustion method pot (10) outer wall is enclosed with insulation layer (18).
5. a kind of steam generator of annealing furnace according to claim 4 is characterized in that: the stranded wire spiral (21) of said electric heater unit (2) is wound in the periphery of said insulation layer (18), and stranded wire spiral (21) is with the insulation porcelain bead.
6. a kind of steam generator of annealing furnace according to claim 1 is characterized in that: said dry combustion method pot (10) tilts to place, and thermopair (22) is arranged at the position of dry combustion method pot (10) near the bottom of a pan.
7. a kind of steam generator of annealing furnace according to claim 4; It is characterized in that: said vapour distributor (4) comprises the steam inlet tube (41) that equates with annealing boiler tube row's (20) boiler tube (201) quantity; And the steam that is opened in every boiler tube (201) corresponding position gets into hole (42); The lower end vertical weld of steam inlet tube (41) is connected to steam and gets into hole (42); The flange of dry combustion method pot (10) is inserted in the upper end of steam inlet tube (41), and the upper end of steam inlet tube (41) penetrates internal bladder cavity (12); The upper end of steam inlet tube (41) is provided with sealing-ring or gasket (16); Sealing-ring or gasket (16) are provided with pressure strip (17), and pressure strip (17) passes the flange that sealing-ring or gasket (16) are connected in dry combustion method pot (10) through forcing screw; Correspondence position at Stainless steel pot cover (11) is provided with the steam distribution cavity, and the steam distribution cavity is communicated with the endoporus top of steam oven inner room with steam inlet tube (41).
8. a kind of steam generator of annealing furnace according to claim 1; It is characterized in that: be positioned at the side of built-in dry combustion method inner bag (1) away from lehre high temperature annealing district (6), the corresponding position of heat conduction bending clamp (14) is provided with phase-transition heat-preserving district heating unit (7).
9. a kind of steam generator of annealing furnace according to claim 1 is characterized in that: between priming apparatus (3) and built-in dry combustion method inner bag (1), be provided with enamel-cover roasting oven waste heating device (8); Enamel-cover roasting oven waste heating device (8) comprises second water inlet pipe mouth (84), is installed on afterheat steam dry combustion method pot (80) and waste heat Stainless steel pot cover (81) in the enamel-cover roasting oven waste discharge air channel, is provided with gasket (16) between the flange of afterheat steam dry combustion method pot (80) and the waste heat Stainless steel pot cover (81); The pot mouth of afterheat steam dry combustion method pot (80) is installed to the side, and the bottom side plate of afterheat steam dry combustion method pot (80) is low inside and high outside shape; Second water inlet pipe mouth (84) is inserted into the top near afterheat steam dry combustion method pot (80) the bottom of a pan from waste heat Stainless steel pot cover (81), and the below of second water inlet pipe mouth (84) is provided with second water-accepting board (82); The bottom of waste heat Stainless steel pot cover (81) is through the internal bladder cavity (12) of water inlet pipe mouth (50) the built-in dry combustion method inner bag of connection (1), and the periphery bag of water inlet pipe mouth (50) is provided with muff (83); Said priming apparatus (3) is communicated with second water inlet pipe mouth (84).
10. the control method of a steam generator of annealing furnace as claimed in claim 1 is characterized in that, it may further comprise the steps:
Steps A, the parameter of setting PLC unit, said parameter comprises built-in dry combustion method inner bag design temperature, adds the discharge master mode; Setting adds discharge, SV maximum frequency, SV minimum frequency, SV group number; Every group of SV number, measuring cup dress volume of water, wherein:
Built-in dry combustion method inner bag design temperature is represented the controlled target of the pot wall temperature that the thermopair (22) of dry combustion method pot (10) left and right sides setting records, the controlled target of promptly built-in dry combustion method inner bag actual temperature;
Adding the discharge master mode, to represent to add discharge be manual mode or automatic mode;
Setting adds discharge and representes the discharge that adds set; Under manual mode, the execution that the PLC unit is carried out adds discharge=setting and adds discharge; Under automatic mode, surpass the amplitude of built-in dry combustion method inner bag design temperature according to built-in dry combustion method inner bag actual temperature, calculate with pid algorithm and add the discharge increment, the execution that the PLC unit is carried out adds discharge=setting and adds discharge+add discharge increment;
The SV maximum frequency is represented two-position three way magnetic valve (31) the water cycle number of times of adding most hourly;
The SV minimum frequency is represented two-position three way magnetic valve (31) the minimum water cycle number of times that adds hourly;
SV group numerical table shows two-position three way magnetic valve (31) the group number that PLC unit output point can be controlled respectively; The PLC unit changes through change two-position three way magnetic valve (31) break-make frequency and adds discharge in same group number; When the break-make frequency can not be reached by the restriction of SV minimum frequency and SV maximum frequency to change to add discharge and requires; Can change two-position three way magnetic valve (31) the group number that comes into operation and change and add discharge, on the same group two-position three way magnetic valve (31) can not use different break-make frequencies;
Every group of SV number represented two-position three way magnetic valve (31) number of each output point control of PLC unit;
When representing that tubulose measuring cup (30) water level maintains an equal level with permanent liquid level water tank (5) water level, measuring cup dress volume of water adorns the volume of water in the tubulose measuring cup (30);
Step B; When the PLC unit receive begin to provide steam instruction after; If add the discharge master mode is manual mode, the PLC unit according to about the minimum temperature that records of two thermopairs (22) be the calculating that benchmark carries out pid algorithm with built-in dry combustion method inner bag design temperature; When temperature is low the calculation result of pid algorithm is converted into and adds heat and control electric heater unit (2), electric heater unit when temperature is high (2) add heat=0, carry out in any case and add discharge=setting and add discharge;
Simultaneously, the PLC unit calculates and adds the discharge adjustable extent:
Minimum adds discharge=list group SV minimum and adds discharge=SV minimum frequency * every group of SV number * measuring cup dress volume of water;
Single group SV is discharge=SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly;
Discharge=SV group number * list is organized SV discharge=SV group number * SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly the most greatly;
Simultaneously, add discharge and add discharge less than minimum if carry out, the order of PLC unit is carried out and is added discharge and equal minimum and add heat flux; Add discharge greater than discharge the most greatly if carry out, then the order of PLC unit is carried out and is added discharge and equal discharge the most greatly; Output alarm when exceeding the situation of variable range more than the appearance, prompting manual regulation measuring cup dress volume of water is also imported new measuring cup dress volume of water;
Simultaneously; If execution adds discharge and adds discharge * SV group number more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/SV group number/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of these all SVs of break-make frequency control; If execution adds discharge and adds discharge * SV group number less than single group SV minimum; Then should reduce by one group of SV; If execution adds discharge and adds discharge * (SV group number-1) more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/(SV group number-1)/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of this break-make frequency control (SV group number-1) group SV; So till only remaining one group of SV;
Step C; When the PLC unit receive begin to provide steam instruction after; If add the discharge master mode is automatic mode, the PLC unit according to about the medial temperature that records of two thermopairs (22) be the calculating that benchmark carries out pid algorithm with built-in dry combustion method inner bag design temperature; When temperature is low the calculation result of pid algorithm is converted into and adds heat and control electric heater unit (2), add discharge=setting and add discharge and carry out; When temperature is high the calculation result of pid algorithm is converted into and adds the discharge increment, make to carry out to add discharge=setting and add discharge+add the discharge increment, and electric heater unit (2) add heat=0;
Simultaneously, the PLC unit calculates and adds the discharge adjustable extent:
Minimum adds discharge=list group SV minimum and adds discharge=SV minimum frequency * every group of SV number * measuring cup dress volume of water;
Single group SV is discharge=SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly;
Discharge=SV group number * list is organized SV discharge=SV group number * SV maximum frequency * every group of SV number * measuring cup dress volume of water the most greatly the most greatly;
Simultaneously, add discharge and add discharge less than minimum if carry out, the order of PLC unit is carried out and is added discharge and equal minimum and add heat flux; Add discharge greater than discharge the most greatly if carry out, then the order of PLC unit is carried out and is added discharge and equal discharge the most greatly; Output alarm when exceeding the situation of variable range more than the appearance, prompting manual regulation measuring cup dress volume of water is also imported new measuring cup dress volume of water;
Simultaneously; If execution adds discharge and adds discharge * SV group number more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/SV group number/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of these all SVs of break-make frequency control; If execution adds discharge and adds discharge * SV group number less than single group SV minimum; Then should reduce by one group of SV; If execution adds discharge and adds discharge * (SV group number-1) more than or equal to single group SV minimum; Then SV break-make frequency=execution adds discharge/(SV group number-1)/every group of SV number/measuring cup dress volume of water, and the PLC unit is by the break-make of this break-make frequency control (SV group number-1) group SV; So till only remaining one group of SV.
CN201010210846XA 2010-06-25 2010-06-25 Steam generator of annealing furnace and control method thereof Expired - Fee Related CN101871043B (en)

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Families Citing this family (26)

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JP7179172B6 (en) 2018-10-30 2022-12-16 アプライド マテリアルズ インコーポレイテッド Method for etching structures for semiconductor applications
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WO2020117462A1 (en) 2018-12-07 2020-06-11 Applied Materials, Inc. Semiconductor processing system
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Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN201447489U (en) * 2009-06-26 2010-05-05 周开勇 Water spraying device of annealing furnace outlet
CN201756573U (en) * 2010-06-25 2011-03-09 东莞市康汇聚线材科技有限公司 Steam generator of annealing furnace

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