CN101813806B - Miniature steering and coupling element between optical interconnected chips - Google Patents
Miniature steering and coupling element between optical interconnected chips Download PDFInfo
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- CN101813806B CN101813806B CN2010101486521A CN201010148652A CN101813806B CN 101813806 B CN101813806 B CN 101813806B CN 2010101486521 A CN2010101486521 A CN 2010101486521A CN 201010148652 A CN201010148652 A CN 201010148652A CN 101813806 B CN101813806 B CN 101813806B
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Abstract
The invention discloses a miniature steering and coupling element between optical interconnected chips, aiming to provide a miniature steering and coupling element with better alignment and positioning when interconnected with a standard connector. The miniature steering and coupling element comprises two micro-lens arrays and one right-angle reflecting prism, wherein the two micro-lens arrays are respectively stuck on the mutually perpendicular outer surfaces of the right-angle reflecting prism and respectively comprise a lens array and a cuboid substrate, and the lens arrays are stamped or stuck on the cuboid substrates; each lens array comprises 12 lenses arranged into a straight line, and the lower surfaces of the cuboid substrates are stuck together with the right-angle reflecting prism; positioning holes are respectively dug at both ends of the lens arrays on the cuboid substrates; and the sloping side face of the right-angle reflecting prism is coated with a reflecting film. The invention can ensure to have better alignment and positioning when interconnected with the standard connector, reduce the transmission loss of a light path and enable the parameters comprising focal lengths, lens diameters and the like to be easy to change, and different moulds do not need to be designed when the parameters are changed, thereby reducing cost.
Description
Technical field
The present invention relates to optical coupling element in the propagation path of light, be specifically related to the miniature steering and coupling element of high-speed optical interconnection chip chamber.
Background technology
In recent years, the high-speed optical interconnection technology has obtained development fast, and application such as array fibre, light source module and detection receiver module receive great concern.For example, Vcsel VCSEL (Vertical Cavity Surface-emitting Laser) has obtained application commercial.The linear array that VCSEL is made up of the generating laser that 12 spacings are 250 μ m.Optical devices such as VCSEL, array fibre and photo-detector utilize the interconnection of 12 array fibre bands and form the directional light interconnection.A key issue of directional light interconnection is how to make effectively to aim between VCSEL array and the array fibre band.At present, laser is that the light source VSCEL transmitting aperture (diameter is 2-3 μ m) of 850nm is injected fiber core (core diameter is generally 50 μ m) from wavelength, it is unpractical orientating fibre core as direct aligning VSCEL transmitting aperture, because the angle of divergence of VCSEL emitted laser is very big, usually greater than 30 °, make the spot diameter that is transferred on the fiber end face substantially exceed core diameter, cause coupling efficiency low; Simultaneously, also can not use normalized optical connector (as MPO, MT) to come directly the VSCEL transmitting aperture to be linked to each other with photo-detector, because even the normalized optical connector makes fiber end face very near the VSCEL transmitting aperture, also because cause optical loss with Optical Fiber Numerical Aperture and VSCEL transmitting aperture coupling inefficacy etc.
Because the development of micro-electromechanical technology MEMS, when carrying out the chip chamber optical communication, the transmission of light wave need turn to light beam.Fig. 1 is 90 ° of steering and coupling elements that carry out beam steering of fibre-optical bending, but this steering and coupling element uses integrated optics and take up room greatlyyer, is not easy to integral application.When the fibre ribbon bending radius was too small, loss seriously increased simultaneously.Therefore, the bending radius of fibre ribbon also is conditional, and in more and more microminiaturized light interconnection, the range of application of this steering and coupling element is limited, has influenced the finally application in the light interconnection turns to.
Fig. 2 is for adopting the steering and coupling element of 45 ° of sloping optical fiber bands.This element is enough become by the array fibre band.Carry out 45 ° of bevel grindings at end face of optical fiber, make it to become angled end-face, and angled end-face plates the steering and coupling element of reflectance coating structure sloping optical fiber band at 45 on 45 °.The major defect of this product is that the making of sloping optical fiber band is very difficult, makes precision and is difficult for guaranteeing that do not have lens to be coupled, coupling efficiency is very low, so final range of application is not very extensive.
The patent No. is that 200330120772.1 Chinese patent discloses a kind of beam propagation steering and coupling element, this steering and coupling element utilizes injection molding technology to make lens arra in template, can solve effectively that light path turns to and the loss problem in the optical transmission process.Its structure as shown in Figure 3, this optical path change type coupling element is made up of right-angle prism, two lens arras, protection steps.The inclined-plane of right-angle prism and two right angle face angles at 45, two right angle faces are vertical mutually, and each right angle face size is identical, is rectangle.The compression molding of two lens arra difference is 250um by diameter on two right angle faces of right-angle prism, lens center spacing 250um, and the surface is 12 spherical lens arrangement.The parameter of two lens arras is identical, and lens are lined up linear lens arra can guarantee that VCSEL laser laser facula in transmission course do not disperse, and can be good at the standard coupling element simultaneously and is coupled.A pilot hole has been dug at the lens arra two ends respectively on two right angle faces of right-angle prism, the center line of pilot hole and lens arra central lines, and diameter is that 0.7mm, hole depth are 1.2mm.Because pilot hole is directly to carry out borehole at right-angle prism, the degree of depth of pilot hole is to be determined to the distance the right angle face by right-angle prism inclined-plane mid point.This on right-angle prism borehole technical difficulty height, and the pilot hole degree of depth limits by right-angle prism right angle face thickness, do not satisfy international standard.It is too big that pilot hole has when preventing to be connected with the optical standard element alignment error, causes the VCSEL loss and the increase of crosstalking.On the right-angle prism two right angle faces 4 square prisms are arranged respectively; these square prisms are positioned near four right angles of right angle face; this square prism is used for protecting the spherical surface of optical path change type coupling element lens arra when being connected with the normalized optical element not to be subjected to the damage of external force, is called the protection step.In the middle of the rib that two right angle faces intersect, excised a right-angle prism that proportionally dwindles.Optical path change type coupling element after cutting away has good looking appearance, easy to assembly etc., does not also influence actual light path and turns to and coupling.This steering and coupling element adopts that polymeric material is once molding formed to form.
The axis normal of the axis of 2 pilot holes on the right-angle prism first right angle face among Fig. 3 and last 2 pilot holes of the second right angle face, because the center line and the lens arra central lines of 2 pilot holes on the same right angle face, when 4 pilot holes dug the inclined-plane from the right angle face of right-angle prism, the pilot hole on the first right angle face intersected in twos mutually with pilot hole on the second right angle face.The pilot pin of international standard is long at present is 2mm, and the emplacement depth among Fig. 3 only is 1.2mm, this can cause from the first right angle face pilot pin of inserting and the pilot pin of inserting from the second right angle face and collide mutually on the right-angle prism inclined-plane, cause the spatial joint clearance between the microlens array on the two right angle faces of the connection end face of AN connector and steering and coupling element excessive, the distance that causes light beam to be propagated in free space increases, and finally causes coupling efficiency to reduce.
In addition, parameters such as the focal length of the lens arra in this optical path change type coupling element, lens diameter, lenticular spacing are fixed, make in different LASER Light Source,, need to revise the lens parameter of lens arra as under VCSEL LASER Light Source and LED LASER Light Source; And in the interconnection of different light, the interconnection space size has specific restriction, so the profile of optical path change type coupling element also is restricted, and the optical path change type coupling element can not well satisfy the requirement of interconnection space size aspect among Fig. 3.The 3rd, at different optical element demands of applications, need different parameters optical path change type coupling elements such as focal length, lens diameter, lenticular spacing, and this optical path change type coupling element manufacture craft is the integral die moulding, therefore need the various mould of design to realize the steering and coupling element of different parameters, the die cost height is made a kind of mould at each parameter, can cause the waste on the too high and resource of cost.
Summary of the invention
The technical problem to be solved in the present invention provides the miniature steering and coupling element between a kind of optical interconnected chips, assurance has better the aligning and the location when interconnecting with AN connector, reduce the optic path loss, and make parameters such as focal length, lens diameter, bulk change easily, thereby make that not needing to design different moulds reduces cost.
The present invention is made up of two microlens arrays and a right-angle reflecting prism, two microlens arrays are adhesive on two orthogonal outside surfaces of right-angle reflecting prism with ultraviolet light respectively, constitute to have the micro-optical component that light path focuses on, collimates and turn to function.
Microlens array is made up of lens arra and rectangular parallelepiped substrate, lens arra mold pressing or stick in the rectangular parallelepiped substrate.Lens arra is in alignment by the individual lens arrangement of N (N=12) by international standard, and lens diameter is M, and M is 210～250um, and the adjacent lens center distance is 250um.
Lens can adopt the polymeric material identical with background technology to carry out mold pressing and make, the surface profile of this lens is planoconvexs of sphere, and the size of height, diameter and the lens substrate of the face type profile by changing lens can change focal length, the diameter of lens.When adopting this lens, lens are embossed in the rectangular parallelepiped substrate.
Lens also can adopt graded index fiber to make.Graded index fiber has the gradual change refracting characteristic according to the length of optical fiber to light path, can make the lens of different parameters according to the length of optical fiber.The fiber segment of these cuttings is lens, and the length of fiber segment has determined the focal length of lens; The diameter of fiber segment is the diameter of lens; Fiber segment is cylindrical, and these columniform lens are arranged in linearity according to the cylinder vertical direction, and the lower surface of columniform lens sticks in the rectangular parallelepiped substrate, forms microlens array.
The rectangular parallelepiped substrate is a rectangular parallelepiped that adopts polymkeric substance or quartz material to make.The rectangular parallelepiped upper surface of substrate has lens arra, and rectangular parallelepiped substrate lower surface and right-angle reflecting prism bond together.A pilot hole has been dug at the lens arra two ends respectively in the rectangular parallelepiped substrate, and the rectangular parallelepiped substrate thickness has determined the degree of depth of pilot hole.The rectangular parallelepiped substrate thickness is big more, and the degree of depth of pilot hole is just dark more.In order to satisfy international connector standards, adopting thickness is the rectangular parallelepiped substrate of 2.0mm.The pilot hole diameter is 0.7mm, hole centre line and lens arra central lines.Because the rectangular parallelepiped substrate thickness of microlens array is 2.0mm, so the hole depth of pilot hole is 2.0mm also, satisfies present AN connector connection request, guaranteed accurate location and technique of alignment.And because borehole in the rectangular parallelepiped substrate has only been avoided the difficulty at the direct borehole of right-angle reflecting prism.
When lens arra parameter (focal length of lens, diameter) changes and during rectangular parallelepiped substrate parameter constant, the microlens array parameter also changes, the focusing power of microlens array can change; When the lens arra parameter constant, and during rectangular parallelepiped substrate parameter change, the microlens array parameter also can change, and the microlens array volume also can change.Two microlens arrays are called first microlens array and second microlens array.The parameter of the parameter of first microlens array and second microlens array can be identical, also can be different.Because lens arra and rectangular parallelepiped substrate are pasted together, rectangular parallelepiped substrate and right-angle reflecting prism also bond together, therefore can change the microlens array parameter by the parameter that changes lens arra or rectangular parallelepiped substrate, and then the parameter of change steering and coupling element, and need not make a kind of mould at each parameter, do not need to make again right-angle reflecting prism yet.
Right-angle reflecting prism two oblique angles are 45 °, and its hypotenuse face is coated with reflectance coating.Reflectance coating is a metal film, preferred golden film.Because the reflectivity of metal film reaches 99%, light wave carries out 90 ° turning at place, right-angle reflecting prism inclined-plane when the miniature right-angle reflecting prism transmits, can reduce the loss in the light wave transmissions effectively.
Adopt when of the present invention, when the light beam that LASER Light Source is sent arrives first microlens array surface, the total reflection of microlens array focusing and process right-angle reflecting prism hypotenuse face, finishing 90 ° turns to and enters second microlens array, from second microlens array surface outgoing, be coupled in fibre ribbon or the AN connector.
Adopt the present invention can reach following technique effect:
1. the present invention makes the pilot hole degree of depth can reach 2.0mm because the rectangle substrate thickness of microlens array can reach 2.0mm, satisfies international standard, has better the aligning and the location in the time of can guaranteeing to interconnect with AN connector.
2. the parameter of the present invention's first microlens array and second microlens array can be different, and can carry out any bonding combination with right-angle reflecting prism, forms to have multiple different light beam focal length ability, the isoparametric light path steering and coupling element of different spaces size.Can change the microlens array parameter by the parameter that changes lens arra or rectangular parallelepiped substrate, and then the parameter of change steering and coupling element, and need not make a kind of mould at each parameter, do not need to make again right-angle reflecting prism yet, thereby make that not needing to design different moulds has reduced cost.
3. can adopt different materials at first to produce the element of separation at different devices, paste again, make the loss of steering component right-angle reflecting prism and coupling element microlens array obtain further reduction.
4. be coated with reflectance coating on the hypotenuse face of miniature right-angle prism of the present invention, can improve the coupling efficiency of light beam.
5. adopt and in the rectangular parallelepiped substrate of microlens array, dig pilot hole, avoid borehole on the right-angle reflecting prism, make easy to process, succinct.
Description of drawings
Fig. 1 is 90 ° of steering and coupling element synoptic diagram that carry out beam steering of the described fibre-optical bending of background technology.
Fig. 2 is the steering and coupling element synoptic diagram of the described 45 ° of sloping optical fiber bands of background technology.
Fig. 3 is that the background technology patent No. is the optical path change type optical coupling element synoptic diagram of the routine of 200330120772.1 patents announcement.
Fig. 4 is an overall construction drawing of the present invention.Wherein, Fig. 4 (a) is the front elevation of general structure.Fig. 4 (b) is the vertical view of general structure.Fig. 4 (c) is the side view of general structure.
Fig. 5 is a light path synoptic diagram of the present invention.Black arrow among the figure is represented direction of beam propagation.
Embodiment
Fig. 1 is 90 ° of steering and coupling elements that carry out beam steering of fibre-optical bending.Optical fiber 1 bending, light source (laser instrument) 5 are sent laser and are transferred to detector 4 through optical fiber 1, and light path takes place 90 ° at fibre-optical bending 2 places and turns to.This steering and coupling element is used integrated optics and is taken up room greatlyyer, is not easy to integral application.When fibre ribbon bending radius 2 was too small, loss seriously increased simultaneously.Therefore, the bending radius of fibre ribbon also is conditional, and in more and more microminiaturized light interconnection, the range of application of this steering and coupling element is limited, has influenced the finally application in the light interconnection turns to.
Fig. 2 is for adopting the steering and coupling element of 45 ° of sloping optical fiber bands.Sloping optical fiber 8 on the inclined-plane 6 place's bevel grindings at 45, and on the inclined-plane 6 places are coated with reflectance coating.The light wave that light source 5 sends enters optical fiber 8 from 45, through transmission in inclined-plane 6 coupled into optical fibres 8.The major defect of this product is that the making of sloping optical fiber band is very difficult, makes precision and is difficult for guaranteeing that do not have lens to be coupled, coupling efficiency is very low, so final range of application is not very extensive.
Fig. 3 is a kind of beam propagation steering and coupling element that 200330120772.1 patents are announced for the patent No..This optical path change type coupling element is made up of right-angle prism 9, two lens arras 11, protection steps.The inclined-plane of right-angle prism 9 and two right angle face angles at 45, two right angle faces are vertical mutually, and each right angle face size is identical, is rectangle.Two lens arra 11 difference compression moldings are 250um by diameter on two right angle faces of right-angle prism 9, lens center spacing 250um, and the surface forms for 12 spherical lens arrangement.On 9 liang of right angle faces of right-angle prism 4 square prisms 12 are arranged respectively, these square prisms 12 are positioned near four right angles of right angle face, are called the protection step.A pilot hole 10 has been dug at lens arra 11 two ends respectively on two right angle faces of right-angle prism 9, the center line of pilot hole 10 and lens arra 11 central lines, and diameter is that 0.7mm, hole depth are 1.2mm.The folded light beam that is used at the inclined-plane of right-angle prism 9 takes place 90 ° and turns to.
Fig. 4 is an overall construction drawing of the present invention.Wherein, Fig. 4 (a) is the front elevation of general structure.Fig. 4 (b) is the vertical view of general structure.Fig. 4 (c) is the side view of general structure.
The present invention is made up of two microlens arrays 21 and a right-angle reflecting prism 19, and two microlens arrays 21 are adhesive on two orthogonal surfaces of right-angle reflecting prism 19 with ultraviolet light respectively.
Microlens array 21 is made up of lens arra 11 and rectangular parallelepiped substrate 13, and lens arra 11 is embossed in the rectangular parallelepiped substrate 13.
Rectangular parallelepiped substrate 13 is rectangular parallelepipeds that adopt polymkeric substance or quartz material to make.Dug two pilot holes 10 at the two ends of rectangular parallelepiped substrate 13 lens arras 11, the thickness of rectangular parallelepiped substrate 13 is 2.0mm.The center line of pilot hole 10 and lens arra 11 central lines, diameter is 0.7mm.The hole depth of pilot hole 10 is 2.0mm.Rectangular parallelepiped substrate 13 upper surfaces have N lens arrangement, and rectangular parallelepiped substrate 13 lower surfaces are used for carrying out bonding with right-angle reflecting prism 19.
19 liang of oblique angles of right-angle reflecting prism are 45 °, and its hypotenuse face is coated with reflectance coating.Reflectance coating is a metal film, preferred golden film.
Fig. 5 is a light path synoptic diagram of the present invention.Black arrow among the figure is represented direction of beam propagation.Adopt when of the present invention, when the light beam that light source 5 sends arrives first microlens array, 211 surfaces, the total reflection on lens arra 111 focusing and process right-angle reflecting prism 19 inclined-planes, finishing 90 ° turns to and enters second microlens array 212, from lens arra 112 surperficial outgoing, be coupled in fibre ribbon or the AN connector 4.
Claims (7)
1. the miniature steering and coupling element between an optical interconnected chips, it is characterized in that this miniature steering and coupling element is made up of two microlens arrays (21) and a right-angle reflecting prism (19), two microlens arrays (21) are adhesive on two orthogonal outside surfaces of right-angle reflecting prism (19) with ultraviolet light respectively; Microlens array (21) is made up of lens arra (11) and rectangular parallelepiped substrate (13), lens arra (11) mold pressing or stick in the rectangular parallelepiped substrate (13); Lens arra (11) is in alignment by N lens arrangement, N=12; Lens employing polymeric material carries out mold pressing and makes or adopt graded index fiber to make, when adopting polymeric material to carry out lens that mold pressing makes, the surface profile of lens is planoconvexs of sphere, lens are embossed in the rectangular parallelepiped substrate (13), when adopting the lens of graded index fiber making, lens are the fiber segment of cutting, fiber segment is cylindrical, these columniform lens are arranged in linearity according to the cylinder vertical direction, and the lower surface of columniform lens sticks in the rectangular parallelepiped substrate (13); Rectangular parallelepiped substrate (13) is a rectangular parallelepiped that adopts polymkeric substance or quartz material to make, and rectangular parallelepiped substrate (13) upper surface has lens arra (11), and rectangular parallelepiped substrate (13) lower surface and right-angle reflecting prism (19) bond together; Go up lens arra (11) two ends in rectangular parallelepiped substrate (13) and dug a pilot hole (10) respectively, the degree of depth of rectangular parallelepiped substrate (13) thickness decision pilot hole (10), pilot hole (10) diameter is 0.7mm, pilot hole (10) center line and lens arra (11) central lines; Right-angle reflecting prism (19) two oblique angles are 45 °, and its hypotenuse face is coated with reflectance coating, and reflectance coating is a metal film.
2. the miniature steering and coupling element between optical interconnected chips as claimed in claim 1 is characterized in that described lens diameter is M, and M is 210～250um, and the adjacent lens center distance is 250um.
3. the miniature steering and coupling element between optical interconnected chips as claimed in claim 1 is characterized in that described rectangular parallelepiped substrate (13) thickness is 2.0mm, and the hole depth of pilot hole (10) also is 2.0mm.
4. the miniature steering and coupling element between optical interconnected chips as claimed in claim 1 is characterized in that described reflectance coating is golden film.
5. the miniature steering and coupling element between optical interconnected chips as claimed in claim 1, the parameter that it is characterized in that two microlens arrays (21) are that focal length, the diameter of lens can be identical, also can be different.
6. the miniature steering and coupling element between optical interconnected chips as claimed in claim 1, it is characterized in that described lens to adopt polymeric material to carry out mold pressing and when making, the size of height, diameter and the lens substrate of the face type profile by changing lens changes focal length, the diameter of lens.
7. the miniature steering and coupling element between optical interconnected chips as claimed in claim 1, when it is characterized in that described lens adopt graded index fiber to make, the diameter of lens is the diameter of fiber segment, and the focal length of lens is by the length decision of fiber segment.
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| Application Number | Priority Date | Filing Date | Title |
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| CN2010101486521A CN101813806B (en) | 2010-04-16 | 2010-04-16 | Miniature steering and coupling element between optical interconnected chips |
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| CN2010101486521A CN101813806B (en) | 2010-04-16 | 2010-04-16 | Miniature steering and coupling element between optical interconnected chips |
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| CN101813806A CN101813806A (en) | 2010-08-25 |
| CN101813806B true CN101813806B (en) | 2011-08-31 |
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Families Citing this family (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| TWI572931B (en) * | 2013-01-28 | 2017-03-01 | 鴻海精密工業股份有限公司 | Optical communication module |
| CN104155728B (en) * | 2013-05-14 | 2018-05-04 | 爱普迪光通讯科技(深圳)有限公司 | photoelectric coupling lens module |
| US11143820B2 (en) * | 2017-06-16 | 2021-10-12 | Kyocera Corporation | Optical connector module |
| CN110609353B (en) * | 2019-09-10 | 2020-10-02 | 武汉博昇光电股份有限公司 | Corner lens optical fiber array and manufacturing method thereof |
| CN111367020B (en) * | 2020-03-20 | 2022-05-20 | 中航光电科技股份有限公司 | On-board optical fiber vertical interconnection optical connector |
| CN113093342A (en) * | 2021-03-24 | 2021-07-09 | 中航光电科技股份有限公司 | Light steering structure and light steering system |
| CN113232342A (en) * | 2021-05-07 | 2021-08-10 | 广景视睿科技（深圳）有限公司 | Method for manufacturing compound eye lens module |
| CN113320089A (en) * | 2021-05-07 | 2021-08-31 | 广景视睿科技（深圳）有限公司 | Method for manufacturing compound eye lens module |
| CN113267838A (en) * | 2021-05-17 | 2021-08-17 | 苏州苏纳光电有限公司 | Integrated assembly of micro lens integrated micro light path reflector and manufacturing method thereof |
| CN113948958B (en) * | 2021-10-18 | 2023-04-18 | 中国工程物理研究院电子工程研究所 | Preparation method of integrated light source |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN1820215A (en) * | 2003-07-10 | 2006-08-16 | 欧姆龙株式会社 | Optical path change type optical coupling element |
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| DE10319274A1 (en) * | 2003-04-29 | 2004-12-02 | Osram Opto Semiconductors Gmbh | light source |
| WO2004097477A2 (en) * | 2003-04-30 | 2004-11-11 | Tyco Electronics Raychem Nv | A connector device for coupling optical fibres, and method of production thereof |
| KR100749528B1 (en) * | 2005-09-30 | 2007-08-16 | 주식회사 두산 | Optical interconnection module and manufacturing method thereof |
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| CN1820215A (en) * | 2003-07-10 | 2006-08-16 | 欧姆龙株式会社 | Optical path change type optical coupling element |
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