CN101714003B - Mass flow controller - Google Patents
Mass flow controller Download PDFInfo
- Publication number
- CN101714003B CN101714003B CN 200910238445 CN200910238445A CN101714003B CN 101714003 B CN101714003 B CN 101714003B CN 200910238445 CN200910238445 CN 200910238445 CN 200910238445 A CN200910238445 A CN 200910238445A CN 101714003 B CN101714003 B CN 101714003B
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- China
- Prior art keywords
- mass flow
- flow controller
- gas passage
- flow sensor
- gas
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- G—PHYSICS
- G05—CONTROLLING; REGULATING
- G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
- G05D7/00—Control of flow
- G05D7/06—Control of flow characterised by the use of electric means
- G05D7/0617—Control of flow characterised by the use of electric means specially adapted for fluid materials
- G05D7/0629—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means
- G05D7/0635—Control of flow characterised by the use of electric means specially adapted for fluid materials characterised by the type of regulator means by action on throttling means
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- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Automation & Control Theory (AREA)
- Flow Control (AREA)
Abstract
The invention relates to a mass flow controller for gas, which comprises a shell and a body tightly screwed with the shell, wherein a bracket is arranged in the shell, a flow sensor and a circuit board are respectively in threaded connection with the bracket, a gas passage is arranged in the body, an electromagnetic valve is fixed on the body, the flow sensor and the electromagnetic valve are respectively communicated with the gas passage, a pressure sensor is arranged in the body and is positioned on the gas passage in the body, and the turnover rate of the gas is adjusted according to the values of the flow sensor and the pressure sensor. The mass flow controller is of a pressure-insensitive type and has the advantages of all-metal hermetically-sealed construction, corrosion prevention and wide application area.
Description
Technical field
The invention provides a kind of mass flow controller, be specifically related to a kind of instrument that is used for the mass rate of gas is carried out precision measurement and control.
Background technology
Along with the development of production technology, to mass flow controller require increasingly high.Existing mass flow controller is in corrosion resistance, control accuracy, and the response time, the aspects such as stability of repeatable accuracy and control air-flow are difficult to satisfy and produce required increasingly high requirement.Existing mass flow controller generally adopts the nonmetallic materials sealing, and shortcoming is: nonmetallic materials are prone to wear out on the one hand, and reliability is low; The corrosion resistance ability is limited on the other hand, and can not be used to has the gas than severe corrosive, narrow in application range.In addition, the control accuracy of existing mass flow controller, the response time, the influence that the important parameter indexs such as stability of repeatable accuracy and control air-flow all are stressed only is suitable in less pressure limit.
Summary of the invention
The objective of the invention is to overcome defective of the prior art, design a kind of novel corrosion resistant, mass flow controller that control accuracy is high.
For realizing above-mentioned purpose, technical scheme of the present invention is: a kind of mass flow controller comprises housing and the body that closely is spirally connected with housing; Enclosure interior is provided with support, and a flow sensor and circuit board are threaded with support respectively, is provided with gas passage in the body; One solenoid valve is fixed on body top; Wherein, said flow sensor and solenoid valve communicate with gas passage respectively, and a pressure transducer is arranged in the body; Pressure transducer is positioned at the porch of the mass flow controller on the intrinsic gas passage, and the circulation of gas is adjusted according to the numerical value of flow sensor and pressure transducer.
Wherein, said flow sensor and solenoid valve all adopt the metal o-ring sealing.
Wherein, the laminar flow device is installed in the said gas passage, the laminar flow device adopts the metal o-ring sealing, and said flow sensor communicates with the laminar flow device.
Wherein, said circuit board comprises computing and control circuit.
Wherein, the front end of said gas passage inner laminar flow device is connected with a shunt, and shunt adopts the metal o-ring sealing.
Wherein, in the said laminar flow device reticular membrane is installed.
Advantage of the present invention and beneficial effect are: adopted the mode of all-metal sealing, made that the mass flow controller corrosion resistance is strong, can be applied to the gasmetry than severe corrosive, applied range.
Description of drawings
Fig. 1 is the wiring layout according to the mass flow controller of the embodiment of the invention;
Fig. 2 is the synoptic diagram according to passage in the mass flow controller of the embodiment of the invention;
Fig. 3 is the synoptic diagram according to the mass flow controller center tap of the embodiment of the invention;
Fig. 4 is the synoptic diagram according to laminar flow device in the mass flow controller of the embodiment of the invention;
Fig. 5 is the schematic diagram according to the mass flow controller of the embodiment of the invention;
Fig. 6 is the schematic perspective view according to the decomposition of the mass flow controller of the embodiment of the invention.
Among the figure:
1: gas passage; 2: circuit board; 3: flow sensor; 4: pressure transducer; 5: housing; 6: shunt; 7: the laminar flow device; 8, joint; 9, support; 10, bracing frame; 11, screw; 12, solenoid valve; 13, metal o-ring; 14, body; 15: reticular membrane.
Embodiment
Below in conjunction with accompanying drawing and embodiment, specific embodiments of the invention further describes.Following examples only are used for technical scheme of the present invention more clearly is described, and can not limit protection scope of the present invention with this.
The technical scheme of practical implementation of the present invention is:
Like Fig. 1, shown in Figure 6, a kind of mass flow controller comprises housing 5 and the body 14 that closely is spirally connected with housing 5; Housing 5 set inside have support 9 and bracing frame 10, and flow sensor 3 is threaded with support 9, and circuit board 2 is threaded respectively with support 9 and bracing frame 10; Be provided with gas passage 1 (as shown in Figure 2) in the body 14, solenoid valve 12 is fixed on body 14 tops, and flow sensor 3 communicates with gas passage 1 respectively with solenoid valve 12; Flow sensor 3 all adopts metal o-ring 13 sealings with solenoid valve 12, makes that the mass flow controller corrosion resistance is strong, and pressure transducer 4 is arranged in the body; Pressure transducer 4 is positioned at gas passage 1 top of body 14, and shunt 6 is installed in the gas passage 1, and the front end of shunt 6 is connected with laminar flow device 7 (as shown in Figure 4); Reticular membrane 15 is arranged in the laminar flow device 7, and after gas stream was crossed reticular membrane 15, reticular membrane 15 was pressed the laminar flow shape with shunt 6 assurance gases and is flowed; Circuit board 2 comprises computing and control circuit, and cushionila gas body 14 front portions are joint 8 (as shown in Figure 3).
The principle of work of this quality flow controller is: through high-precision pressure transducer 4 is installed at the inlet of mass flow controller; Measure the force value of gas; The measured force value of pressure transducer is transported on the circuit board 2, and through the CPU computing of circuit board 2, the signal that flow sensor 3 records is revised; Flow sensor 3 records flow signal and sends into the amplifier amplification earlier; Value and setting value after the amplification compare, and remove the regulating and controlling valve after difference signal being amplified again, and the flow with setting that the flow use of passage is flow through in control equates.
The advantage of present embodiment is, has reduced pressure and has changed the influence to mass flow controller, has improved control accuracy, and has strengthened the corrosion resistance of mass flow controller, thereby mass flow controller of the present invention is of wide application.
The above only is a preferred implementation of the present invention; Should be pointed out that for those skilled in the art, under the prerequisite that does not break away from know-why of the present invention; Can also make some improvement and retouching, these improvement and retouching also should be regarded as protection scope of the present invention.
Claims (6)
1. a mass flow controller comprises housing and the body that closely is spirally connected with housing, and enclosure interior is provided with support; One flow sensor and circuit board are threaded with support respectively; Be provided with gas passage in the body, a solenoid valve is fixed on body top, it is characterized in that; Said flow sensor and solenoid valve communicate with gas passage respectively; One pressure transducer is arranged in the said body, and pressure transducer is positioned at the porch of the mass flow controller on the intrinsic gas passage, and the circulation of gas is adjusted according to the numerical value of flow sensor and pressure transducer.
2. mass flow controller as claimed in claim 1 is characterized in that, said flow sensor and solenoid valve all adopt the metal o-ring sealing.
3. according to claim 1 or claim 2 mass flow controller is characterized in that, the laminar flow device is installed in the said gas passage, and said laminar flow device adopts the metal o-ring sealing, and said flow sensor communicates with the laminar flow device.
4. according to claim 1 or claim 2 mass flow controller is characterized in that said circuit board comprises computing and control circuit.
5. mass flow controller as claimed in claim 3 is characterized in that, the front end of said gas passage inner laminar flow device is connected with one deck shunt, and said shunt adopts the metal o-ring sealing.
6. mass flow controller as claimed in claim 3 is characterized in that, in the said laminar flow device reticular membrane is installed.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910238445 CN101714003B (en) | 2009-11-20 | 2009-11-20 | Mass flow controller |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 200910238445 CN101714003B (en) | 2009-11-20 | 2009-11-20 | Mass flow controller |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101714003A CN101714003A (en) | 2010-05-26 |
| CN101714003B true CN101714003B (en) | 2012-07-25 |
Family
ID=42417701
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200910238445 Active CN101714003B (en) | 2009-11-20 | 2009-11-20 | Mass flow controller |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101714003B (en) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN104329495B (en) * | 2014-10-29 | 2017-01-18 | 北京堀场汇博隆精密仪器有限公司 | Pressure flow controller |
| CN104281163A (en) * | 2014-10-29 | 2015-01-14 | 北京堀场汇博隆精密仪器有限公司 | Flow controller |
| CN110727294A (en) | 2018-07-17 | 2020-01-24 | 北京七星华创流量计有限公司 | Fluid sensor and mass flow controller |
| CN110500406B (en) * | 2019-06-27 | 2021-02-19 | 北京七星华创流量计有限公司 | Sealing structure and mass flow controller |
Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2282628Y (en) * | 1996-12-05 | 1998-05-27 | 刘智敏 | Electromagnetic valve |
| US6450200B1 (en) * | 1999-05-10 | 2002-09-17 | Parker-Hannifin Corporation | Flow control of process gas in semiconductor manufacturing |
| CN1839358A (en) * | 2004-06-21 | 2006-09-27 | 日立金属株式会社 | Flow controller and its regulation method |
| CN101441482A (en) * | 2008-12-23 | 2009-05-27 | 北京七星华创电子股份有限公司 | Rapid fluid flow control device |
| CN201311303Y (en) * | 2008-11-26 | 2009-09-16 | 北京七星华创电子股份有限公司 | Device for measuring mass flow of gas |
-
2009
- 2009-11-20 CN CN 200910238445 patent/CN101714003B/en active Active
Patent Citations (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2282628Y (en) * | 1996-12-05 | 1998-05-27 | 刘智敏 | Electromagnetic valve |
| US6450200B1 (en) * | 1999-05-10 | 2002-09-17 | Parker-Hannifin Corporation | Flow control of process gas in semiconductor manufacturing |
| CN1839358A (en) * | 2004-06-21 | 2006-09-27 | 日立金属株式会社 | Flow controller and its regulation method |
| CN201311303Y (en) * | 2008-11-26 | 2009-09-16 | 北京七星华创电子股份有限公司 | Device for measuring mass flow of gas |
| CN101441482A (en) * | 2008-12-23 | 2009-05-27 | 北京七星华创电子股份有限公司 | Rapid fluid flow control device |
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| Publication number | Publication date |
|---|---|
| CN101714003A (en) | 2010-05-26 |
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