CN101653047B - Plasma spraying device and method - Google Patents
Plasma spraying device and method Download PDFInfo
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- CN101653047B CN101653047B CN2007800524715A CN200780052471A CN101653047B CN 101653047 B CN101653047 B CN 101653047B CN 2007800524715 A CN2007800524715 A CN 2007800524715A CN 200780052471 A CN200780052471 A CN 200780052471A CN 101653047 B CN101653047 B CN 101653047B
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3452—Supplementary electrodes between cathode and anode, e.g. cascade
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- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
- H05H1/00—Generating plasma; Handling plasma
- H05H1/24—Generating plasma
- H05H1/26—Plasma torches
- H05H1/32—Plasma torches using an arc
- H05H1/34—Details, e.g. electrodes, nozzles
- H05H1/3484—Convergent-divergent nozzles
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Abstract
A device and a method for plasma spraying are disclosed. The device comprises, a cathode, an anode, a plasma channel formed by the anode and intermediate electrodes, and one or more flowable material injectors. The plasma channel has a throttling portion that divides the plasma channel into a high pressure portion near the cathode formed by at least one intermediate electrode and a low pressure portion near the anode. During operation, a plasma generating gas is heated by the arc maintained between the cathode and the anode, forming plasma. When the plasma passes through the throttling portion, its speed increases to a supersonic speed, and at the same time its static pressure drops. Flowable materials are injected in the plasma flow in the low pressure portion. The particles in the flowable materials are heated by the plasma and the resultant heated particles and plasma are output from the outlet of the plasma channel.
Description
Technical field
The invention belongs to the plasma spray coating technical field.The method of plasma producing apparatus and spraying flowable materials is disclosed especially.
Background technology
Plasma spraying device in many application (comprise, for example with application in conjunction with) be used to spray different flowable materials, for example pulverulent material (or simple powder).The plasma channel that such device generally includes negative electrode, anode and extends between described negative electrode and described anode.In operating process, plasma-generating gas is provided for this plasma passage.The arc heating that forms between this negative electrode and this anode flows through the gas of this plasma passage, thereby forms plasma flow (being called as plasma flow or plasma jet sometimes).This plasma stream flows out this device at the end of this plasma passage by the outlet in the anode.Known several dissimilar plasma spraying device.The position that these types can be imported (or injection) plasma flow by flowable materials characterizes.Below discuss and relate to powder spraying device.Yet, it will be appreciated by those skilled in the art that other materials also can be used for spraying.
In a class device, powder is imported into the anode region of plasma flow.In more such devices, powder is to be imported in the plasma flow by the entrance in the anode, as disclosed at U.S. Patent number 3,145,287,4,256,779 and 4,445,021 for example.In such other devices, powder is to import plasma flow by being arranged in the outer feed appliance of plasma producing apparatus, as disclosed at U.S. Patent number 4,696,855 for example.Usually, powder is injected by the mode that is approximately perpendicular to plasma flow.
An advantage relevant with this class device is that when powder was injected in the plasma flow, plasma flow was fully formed, and had some known features, as temperature, speed, energy etc.These characteristics depend on and can be by the internal geometry of plasma channel, wait to control for generation of the potential difference between the character of the gas of plasma, pressure, anode and the negative electrode that gas is provided.Providing another advantage of powder at anode region is that the formation of plasma flow is not subjected to the influence of powder.
Yet importing powder at anode region also has shortcoming.Typical powder has the particulate of different size.When such powder is injected in the plasma flow, has than the heavier particulate of kinetic energy and want low weight particulate to arrive the center of plasma flow quickly.Therefore, lighter particulate might arrive the plasma flow center but be positioned at away from the plasma flow of anode than cool region, perhaps lighter particulate also may rest on the periphery of plasma flow and can not arrive its center.This will produce two undesired effects.The first, because for lighter particulate, heavier particulate can stand the higher temperature of longer time, and therefore the homogeneity degree of powder is very low in plasma.Lighter particulate can not fully be heated so that application.The second, the distribution of coating is not homogeneous, and some particulates can miss fully and want coated surface, and this will cause very poor material effectiveness.In other words, the powder that partly is provided has only been used in the realization of powder spray coating.This seems unfavorable especially when using expensive powder.This problem can be eased to a certain extent by the powder that use has a particulate of equal in quality.But such powder production is got up more expensive, and to use such powder be not all to be feasible selection for all application.
For fear of injecting the relevant problem of powder with the anode region that is approximately perpendicular to plasma channel, attempt providing vertical powder supplies passage.The powder supplies passage is disposed in the plasma channel, and is surrounded by plasma flow in the operating process of this device.The outlet of powder supplies passage is at the anode region of plasma channel.This inside powder supplies passage that is arranged in the plasma channel prevents that plasma flow from enough being heated, and its common article on plasma body properties of flow has undesirable influence.
With import another relevant shortcoming of powder at anode be, need high temperature and the specific power (power of per unit volume) of big energy to keep plasma flow, apply highly uniformly in order to obtain.Believe that the reason that causes this problem is, the temperature of plasma flow and VELOCITY DISTRIBUTION come down to parabolical in the exit of the plasma channel that injects powder.Therefore, the diameter of the temperature of plasma flow and velocity gradient and hot entropy and plasma flow is inversely proportional to.In order to improve the uniformity of spray coating, thereby need to increase the diameter of plasma flow, thereby it needs lot of energy.
In the second class device, powder is provided at the entrance of negative electrode place plasma channel.In these devices, arc heating plasma-generating gas and powder.Cathode zone is considered to the cold-zone, and it allows powder to be imported into the center of plasma flow.The example of the second class device is for example disclosing in the U.S. Patent number 5,225,652,5,332,885 and 5,406,046.
When plasma-generating gas being offered plasma channel and producing plasma with the arc heating gas of predetermined discharge electric current, has only the center of the very high plasma flow of the gas formation temperature of a very little part.Residual gas then flows to the wall near the lower plasma channel of temperature, forms the cooling layer of plasma flow.The temperature that this cold powder particle influences plasma flow ionic medium body raises, and the powder around the plasma flow can not reach the temperature of expection again.Because this Temperature Distribution in the plasma flow, the sub-fraction powder that only is provided at the porch of plasma channel can be in the high temperature center flow of plasma flow, and is fully heated by electric arc.Residual powder then flows in the cooling layer of plasma flow.This will make that the heating of powder is inhomogeneous, thereby influence the quality of surface-coated.In addition, the danger that also exists powder that plasma channel is blocked, this can have a negative impact to the required condition of stable plasma flow.
Improving a large amount of gases and powder transfer by the turnover rate that improves gas and powder is unpractical selection to the core of plasma channel.When the mobile of gas and powder improved, it is constant that electric current keeps, and the diameter of electric arc reduces, and this exactly makes powder be accumulated in the problem worse of cooling layer along the plasma channel wall.In addition, for those particulates that are in the plasma flow center, because the speed of these particulates has improved, their time decreased in plasma flow.Therefore, constant if electric current keeps, then the amount of powder at high-temperature plasma stream center can not increase.But, improve operating current and can cause the shortcoming relevant with the design and running of plasma spraying device.
In the 3rd class device, a part of plasma channel is formed by the target with negative electrode and anode electric insulation.Powder is imported in the plasma flow in the plasma channel part that is formed by target, and this target usually is positioned in the middle of two electrodes.Therefore, powder neither is provided at the porch of plasma channel, also is not provided at the exit of plasma channel.The example of the 3rd class device is for example disclosing among U.S.'s publication application number 2006/0091116A1.
Disclosed device has two plasma channel sections in U.S. publication application number 2006/0091116A1.The plasma channel section that is positioned at powder feed appliance upstream is formed by one or more targets, and is used for creating the optimum condition of plasma flow.Particularly, in operating process, plasma is heated to the temperature that is enough to melting powder on the entire cross section of plasma channel.This has eliminated and the powder particle relevant problem of advancing in the cooling layer of plasma flow, and has reduced to be bonded on the plasma channel wall and the danger of blocking this passage when particulate.The plasma channel section that is positioned at powder feed appliance downstream also is to be formed by one or more targets, and be used for to obtain the powder particle of plasma flow height homogeneity and temperature, thereby eliminates and provide powder relevant problem at the anode place.By the character of control downstream plasma channel section, for example form length and the quantity of the target of this section, thereby obtain the optimum condition of powder.These conditions comprise in order to obtain carries out the required adhesion of spray coating, structure and the necessary speed of porosity and temperature levels for the concrete combination of dusty material and application.Yet, because plasma flow with and the speed of the powder particle that carried relatively low, powder particle has low kinetic energy when they flow out this device.
In order to obtain higher powder particle speed, some spray equipments use the throttling part.For example, so-called cold spraying or speed spray equipment are to carry pressurizeing than cold air of powder, use restriction to assign to have the gas speed-raising of powder to high speed afterwards.Such device utilizes the kinetic energy of powder particle to apply.Multiple throttling part known in the art.In brief, they are used to the pressure of air-flow is converted to speed.The throttling part at first is used for jet engine, but also is used for plasma producing apparatus now.The known variant of throttling part is superonic flow nozzzle (being also referred to as the De Laval nozzle), and it can accelerate to supersonic speed with plasma flow.Application No. 11/482,582 discloses in the multi-electrode plasma producing apparatus and has used superonic flow nozzzle, and this multi-electrode plasma producing apparatus is used for cutting, evaporation and coagulate tissue.Application No. 11/482,582 does not but relate to the feature for the throttling of paint application part, for example helps the static pressure of plasma flow of the injection of powder to descend and uses nanoparticle to be used for the ability of spraying.
Use the plasma spraying device of throttling part can fall into any of above-mentioned three class devices.Yet, because they use the throttling part, will discuss to it respectively.Disclose in the U.S. Patent Publication No. 2006/0108332 and in plasma spraying device, used the throttling part.Particularly, the disclosure has disclosed and has been arranged in the throttling part of the end of the plasma channel of close negative electrode substantially.In the operation of this device, closing in the heating chamber of negative electrode by negative electrode after the of short duration heating in plasma-generating gas, gas is by this throttling part.This throttling has partly improved the speed of gas, has surpassed the speed of sound in some embodiments, and has reduced the static pressure of gas.When plasma after certain of plasma channel is a bit divided by restriction (this plasma reaches its maximal rate and has minimum static pressure herein), powder is injected in the plasma flow.Yet, because the throttling part is disposed in the cathode terminal of plasma channel substantially, only pass the restriction timesharing by this plasma stream of arc heating at plasma flow.Therefore, when cooling off substantially, plasma reaches the speed of sound.Because the speed of sound is higher when high temperature, the absolute velocity that plasma-generating gas obtains is then lower.Because than low velocity, plasma does not have high power density.In addition because in U.S. Patent Publication No. 2006/0108332 in the disclosed device powder be injected into anode region, then this device shows usually and above-mentioned first kind device limitations associated.
U.S. Patent Publication No. 2006/0037533 discloses and used the throttling part in hot spray apparatus.This device comprises that (1) is used for heating air flow (or plasma flow, heating module in some embodiments), (2) for reducing the static pressure of air-flow and improve the formation module of its speed, (3) be used for powder is injected the powder feed module that flows, (4) for the tubbiness module of carrying powder at stream, thereby powder obtains necessary characteristic.The disclosure has disclosed the different modes of many execution heating modules.For example, in some embodiments, heating module is the burning type heating module, and it comes heated air by burning acetylene.Be heated to after 3100 ℃ at gas, this gas leads to the formation module.After the speed of air-flow and pressure were formed module converts, powder was injected in the air-flow in the powder feed module.The powder particle that is carried by air-flow obtains the required character of specific spray application in the tubbiness module.
Another execution mode of implementing as the heating part of multi-electrode plasma flare is disclosed in the U.S. Patent Publication No. 2006/0037533.This plasma torch has negative electrode, anode and a plurality of target.Anode and target form plasma channel.The disclosure has also disclosed the throttling part, and it is different from that throttling part in forming module, and essence is arranged in the end near the plasma channel of negative electrode.In the operating process of this heating module, plasma-generating gas closing in the heating chamber of negative electrode heated by negative electrode after, plasma-generating gas is by this throttling part.This throttling part accelerate plasma stream surpasses the speed of sound in some embodiments, and reduces the static pressure of gas.
Some devices as discussing, are provided for the different flowable materials of injection in U.S. Patent Publication No. 2006/0091116A1.These characteristics are that some plasma spray coatings are used desired.
Therefore, a kind of plasma spraying device of current needs, it has overcome the limitation of current known devices in the following manner: the energy density of maximization device; Can control the kinetic energy and the heat energy that carry powder particle at the exit of this device plasma flow.Particularly, need a kind of plasma spraying device and method, its generation has the plasma flow of temperature and speed, this temperature and speed can be by using relatively low pressure with in one or more flowable materials injected plasmas stream, also can control the character of this plasma and flowable materials simultaneously when plasma and flowable materials leave plasma channel.
Summary of the invention
The invention provides a kind of plasma producing apparatus, it comprises anode, negative electrode and the plasma channel of longitudinal extension between negative electrode and anode.This plasma passage has outlet and the throttling part at this device anode end place opening.Part plasma channel is formed by two or more targets and anode, and this target is electrically insulated from each other.The throttling of this device part is divided into high-pressure section and low-pressure section with plasma channel, and this high-pressure section is positioned at the side near the throttling part of negative electrode, and this low-pressure section is positioned at the side near the throttling part of anode.The cross-sectional area of the longitudinal direction of the crosscut plasma channel of the spout of this throttling part is less than the cross-sectional area of high-pressure section and the cross-sectional area of low-pressure section.Low-pressure section at plasma channel, this device also has one or more flowable materials syringes, described flowable materials syringe comprises flowable materials chamber and the flowable materials feed appliance with entrance, and this flowable materials feed appliance couples together flowable materials chamber and plasma channel.Flowable materials feed appliance and flowable materials chamber are called the flowable materials syringe jointly.
In plasma spraying device, the high-pressure section of plasma channel is by at least one but preferably select two or more targets to form.This makes the abundant heating of plasma flow quilt that arrives the throttling part to obtain to be injected into highly uniformly the given flowable materials (for example powder) of plasma flow.The low-pressure section of plasma channel is formed by at least one but preferably two or a plurality of targets.This makes flowable materials be injected into the flowable materials that is used for given paint application after the plasma flow fully to be heated.
In operating process, plasma-generating gas is supplied to plasma channel.When plasma-generating gas flow through plasma channel, this gas was formed on the arc heating between negative electrode and the anode.Arc Temperature raises and causes gas ionization and plasma to form.Plasma static pressure in the high-pressure section of plasma channel is higher relatively.When plasma by the restriction timesharing, plasma speed pressure raises and static pressure descends.Velocity pressure raises and plasma flow can be raised speed to supersonic speed.Near the end of the throttling part of anode, the static pressure of plasma is its minimum value.Flowable materials is injected in the plasma flow of low-pressure section, and wherein the low static pressure owing to plasma needs minimum pressure.
Flowable materials is injected described device obtain flowable materials highly uniformly, because plasma is fully heated by high-pressure section the time.Because the flowable materials vector gas mixes with the plasma of heat, plasma temperature descends and is lower than the temperature that flowable materials is injected into plasma before.For some paint application, may need high temperature flowable materials particulate.When remainder by low-pressure section of total stream of the plasma of the particulate that has flowable materials, the arc heating plasma, this has heated particulate.
In some embodiments, this device can inject two or more flowable materials.In the illustrative embodiments that can inject two kinds of flowable materials, this device comprises the second flowable materials syringe.But this second flow injection device is can make before second flowable materials is injected into, and the mode that first flowable materials that is injected into is fully heated is arranged.Simultaneously, the second flowable materials syringe is arranged in such a way, and the particulate of two kinds of flowable materials was fully heated for given paint application before total stream leaves this device.In some embodiments, this device can comprise other flowable materials syringes, prerequisite is that following condition is satisfied: before given flowable materials was injected in the plasma flow, the particulate of plasma and all flowable materials of injecting from given flowable materials upstream must fully be heated (1); And (2) certain some the time be injected into the particulate of all flowable materials must (i) before leaving this device for given paint application, or (ii) before the another kind of flowable materials of injection, fully heated.Note, before injecting another kind of flowable materials, do not need particulate with flowable materials to be heated to plasma flow required temperature when leaving this device, because the particulate of two kinds of flowable materials all is heated after injection second flowable materials.Therefore, the present invention has also proposed the method for one or more flowable materials of plasma spray coating, it comprises: produce and be heated to the plasma flow of 10000K at least, improve the velocity pressure that is heated plasma in the plasma flow afterwards and reduce the static pressure that is heated plasma in the plasma flow simultaneously, after this one or more flowable materials are injected in the plasma flow.In the method for the invention, after every kind of flowable materials is injected into, by heating the plasma in this plasma stream, before the output plasma, wait the particulate with all flowable materials in the gas ions stream to be heated to suitable temperature.
Description of drawings
Fig. 1 has represented to have the longitudinal cross-section view of an execution mode of the device of the present invention of single flowable materials syringe;
Fig. 2 has represented the crosscut longitudinal cross-section view of view of an execution mode of the device of the present invention with single flowable materials syringe as shown in Figure 1;
Fig. 3 has represented at the feed appliance that becomes angle with the reverse direction of plasma flow;
Fig. 4 has represented that the direction at plasma flow becomes the feed appliance of angle;
Fig. 5 has represented to have the longitudinal cross-section view of execution mode of the device of a plurality of flowable materials syringes;
Fig. 6 has represented to be used for the water dispenser of cooling throttling cooling system partly; And
Fig. 7 has represented to be used for the water dispenser of the cooling system of cooling anodes and other targets.
Embodiment
Fig. 1 and Fig. 2 have represented an execution mode according to plasma spraying device of the present invention.Execution mode illustrated in figures 1 and 2 is the powder spraying device with single flowable materials syringe.Yet, should be appreciated that this is an illustrative embodiments, and do not mean that the use that limits the scope of the present invention to powder or the use of single flowable materials or single syringe.For the purposes of the present invention, the express definitions of " flowable materials " is any material that flows in conduit under the pressure.Flowable materials includes but not limited to: liquid, gas or by the particulate of the solid material of fluid bearings.Term among the present invention " powder " should be understood that the very little particles of material that can be carried by fluid (for example, gas); For this reason, " powder " is flowable materials.Another variation of flowable materials is for example solution of nanoparticle of powder particle, in the liquid pioneer liquid that described particulate for example uses in the spraying technology that is known as suspension pioneer liquid plasma spray coating (SPPS).In operating process, such solution is atomized and as in the flowable materials injected plasma stream.
Fig. 1 has represented the longitudinal cross-section of this device.Though what following discussion related to is the use of powder, should be appreciated that the flowable materials that also can use any other type.In the execution mode of Fig. 1, sleeve pipe 2, flowable materials assembly 60, packing ring 56 and sleeve pipe 48 have formed the outer surface of plasma spraying device.In this embodiment, plasma spraying device is columniform, and all elements are annulars and are coaxially disposed.But in other embodiments, plasma spraying device can not be columniform, and can use different inside or external shape.This plasma spray coating device comprises and is arranged in the cathode branch support member 6 negative electrode 4 and the anode 8 that is preferably made by the tungsten that contains lanthanum.Insulation component 10 centers on from the part of anode 8 negative electrode 4 farthest and a part that centers on cathode branch support member 6.Insulation component 10 provides thermal insulation and the electric insulation of negative electrode 4.
From the plasma chamber 28 of anode 8 target 12 formation farthest around negative electrode point 30.Plasma chamber 28 is connected to the entrance of plasma channel 32.Space 61 provides the passage that leads to plasma chamber 28 for plasma-generating gas.
Fig. 2 has represented the longitudinal cross-section of crosscut longitudinal cross-section as shown in Figure 1.Fig. 2 has represented the part of plasma channel.Target 18 has formed throttling part 80.Throttling part 80 is divided into two parts with plasma channel 26: high-pressure section 82 and low-pressure section 84.High-pressure section 82 is formed by one or more targets.Preferably, high-pressure section 82 is formed by two or more targets.In execution mode illustrated in figures 1 and 2, the high-pressure section 82 of plasma channel 26 is formed by three targets 12,14 and 16.The length that high-pressure section has should be enough to guarantee the temperature that when powder is injected in plasma plasma has to be enough on the cross section of whole plasma channel 26 powder smelting.
Low-pressure section 84 by at least one but preferably two or more targets forms.In execution mode illustrated in figures 1 and 2, low-pressure section 84 is formed by three targets 20,22 and 24.The length that low-pressure section 84 has should be enough to guarantee be heated to the required temperature of given paint application by the powder particle that plasma carries.
Throttling part 80 has hourglass shape.The narrowest part of throttling part 80 is spouts 86, and this spout 86 partly is divided into contraction section 88 and divergent portion 90 with throttling.In a preferred embodiment, throttling part 80 is superonic flow nozzzles, is known as the De Laval nozzle.(for the sake of clarity, in the present invention, unless stated otherwise, otherwise phrase " cross-sectional area " refers to " cross-sectional area longitudinally of crosscut plasma channel 26 ".) cross-sectional area of spout 86 is less than the cross-sectional area of (a) high-pressure section 82 and (b) cross-sectional area of low-pressure section 84.In a preferred embodiment, the cross-sectional area of high-pressure section 82 is less than or equal to the cross-sectional area of low-pressure section 84.In other embodiments, the cross-sectional area of high-pressure section 82 is greater than the cross-sectional area of low-pressure section 84.
In operating process, after the initial start of plasma spraying device, the electric arc between negative electrode 4 and the anode 8 is kept.Plasma-generating gas in the plasma channel 26 flows to outlet 34 from entrance 32.The arc heating plasma-generating gas causes the ionization of plasma-generating gas, thereby produces plasma.Plasma passes the direction of plasma channel 26, namely from entrance 32 to outlet 34 direction, be called as the direction of plasma flow.
Plasma-generating gas is provided for the entrance 32 of plasma channel 26 by space 61 under pressure.The total pressure of plasma is made up of velocity pressure and static pressure.In the context of the present specification, velocity pressure refers to promote along plasma channel the pressure of plasma flow, and static pressure refers to be applied to the pressure of the plasma on the plasma channel wall.The velocity pressure of plasma be proportional to plasma flow speed square.Conversely, the speed of plasma flow is proportional to the square root of the velocity pressure of plasma.When plasma enters contraction section 88, the velocity pressure of plasma raises, because mass flow ratio (quality of time per unit) is constant.At spout 86 places, the cross-sectional area minimum of plasma channel, plasma speed becomes transonic, and Mach is 1, is called the situation of choked flow.Cross-sectional area in divergent portion 90 increases, and plasma continues expansion, and the velocity pressure of plasma improves thereby the static pressure of plasma reduces.In divergent portion 90, the speed of plasma flow is brought up to supersonic speed, Mach＞1.0.At this moment, in divergent portion 90, the static pressure of plasma reduces.It is constant that the total pressure of plasma keeps substantially.
The velocity pressure of plasma and the speed of plasma flow reach its maximum in the end near the throttling part 80 of anode 8.On the contrary, the static pressure of plasma reaches its minimum value in the end near the throttling part 80 of anode 8.The physical process that plasma experiences when its process throttling part 80 is constant entropy, and this entropy that yet just means plasma can not change.In fact, throttling part 80 is with respect to having improved the velocity pressure of plasma and reduced the static pressure of plasma for the pressure that observes in the high-pressure section 82.
Therefore, high-pressure section 82 is by following sign: the high static pressure of (1) plasma is preferably the scope of 5-100Bar; (2) the low velocity pressure of plasma, and the low speed of (3) plasma flow.The mean temperature of the plasma flow in the high-pressure section is preferably 10000-20000K.If argon is used as plasma-generating gas, the electric field of plasma is preferably 5-50V/mm.The power density of the plasma in the high-pressure section is preferably 0.5-10kW/mm
3Scope.
When plasma enters the contraction section 88 of throttling part 80, the temperature of plasma is preferably 10000-20000K.When plasma leaves the divergent portion 90 of throttling part 80, the temperature of plasma preferably drops to 8000-13000K.Be preferably 1-10km/s in the speed near the plasma of the end of the divergent portion 90 of anode 8, have the Mach number of the scope of 1.2-3.The pressure of the plasma in divergent portion 90 is preferably the 1-5Bar scope.
Low-pressure section 84 is by following sign: the low static pressure of (1) plasma, preferably near atmospheric pressure, the high-speed pressure of (2) plasma and (3) cause high average powder speed to be preferably 400-1, the high speed of the plasma flow of 000m/s.The mean temperature of plasma flow is preferably the scope of 10000-15000kK.Average powder temperature is the fusion temperature of powder.The electric field of the plasma in low-pressure section 84 is preferably 1-10V/mm.The power density of the plasma in low-pressure section 84 is preferably at 0.2-0.8kW/mm
3Scope.
In the execution mode shown in Fig. 2, powder enters plasma spraying device by two powdering inlets 94 and 95.In other embodiments, can use the powdering inlet of varying number.Powdering inlet 94 and 95 is connected to powder chambers 96.Powder chambers 96 is arranged to around target 18, and helps powder particle evenly to distribute around this device.Powder feed appliance 98 is connected to plasma channel 26 with powder chambers 96.In a preferred embodiment, powder feed appliance 98 is connected to plasma channel 26 in the end near the low-pressure section 84 of throttling part 80.In other embodiments, powder feed appliance 98 can be connected to powder chambers 96 with plasma channel 26 at other some places along the plasma channel 26 in the low-pressure section 84, prerequisite is that powder particle stays the enough time and obtains required feature in plasma channel 26, for example temperature, speed and uniformity.
In a preferred embodiment, feed appliance 98 is slits.In other embodiments, powder feed appliance 98 can be used as a plurality of passages that connect powder chambers 96 and plasma channel 26 and realizes.In other embodiments, powder feed appliance 98 can be any hole or a plurality of hole that is communicated with powder chambers 96 and plasma channel 26.Fig. 1 and Fig. 2 have represented the execution mode of slit 98 perpendicular to the axle of this device.Yet this angle can't produce the best distribution of powder particle in plasma for all types of powder.As mentioned above, for high quality coating, powder particle is preferably in plasma flow and evenly distributes.Using the execution mode shown in Fig. 1 and Fig. 2 to spray the powder with heavier particulate may cause from the particulate of the different directions Central Collisions at gas ions passage 26.Use the execution mode shown in Fig. 1 and Fig. 2 to spray to have the powder of slight grain may cause particulate before it can evenly arrive the center of plasma flow, to be pushed to the wall of plasma channel by plasma flow.In order to obtain the more uniform distribution of powder particle, feed appliance 98 can form an angle.Fig. 3 has represented execution mode, and the direction that wherein feed appliance 98 is opposite with plasma flow forms angle.This execution mode can be used for having the powder of slighter grain ideally.Fig. 4 has represented execution mode, and wherein slit 98 forms angle with the direction of plasma flow.This execution mode can be ideally for the powder with heavier particulate.
As mentioned above, the plasma in the plasma channel 26 is by the arc heating that produces between negative electrode 4 and anode 8.In a preferred embodiment, the temperature that enters the plasma of throttling part 80 is 10000K or higher.When plasma passed through high-pressure section 82, said temperature raise.The temperature that enters the plasma of throttling part will depend on the characteristic, particularly its length of high-pressure section 82, and this depends on geometry and the quantity of the target that is used to form high-pressure section 82.
When powder is injected in the plasma channel 26, it is transported by cooling carrying gas.Because cooling carrying gas be heated plasma and mix, the temperature of the plasma in plasma flow significantly reduces, and becomes also lower than the plasma temperature before being injected at powder.For some application, the plasma in plasma flow must be heated in low-pressure section 84 after powder is injected into, and causes powder particle to reach temperature required and high homogeneity when the outlet 34 of separating device.Be based upon the plasma that has the particulate that is injected into powder that the arc heating between negative electrode 4 and the anode 8 flows along low-pressure section 84.In a preferred embodiment, be 10000K or higher from exporting 34 temperature of leaving the plasma of this device.The temperature of powder particle depends on that powder particle treats the time in plasma flow, and this is by length control of low-pressure section 84.The powder particle of some types, nanoparticle for example is if be exposed on the temperature that is heated plasma and remain on this temperature a period of time afterwards then evaporate.The supersonic speed of the plasma in low-pressure section 84 makes such particulate be melted to required denseness under unvaporized situation.Yet, should be noted that powder particle is advanced with the speed lower than the speed of the plasma in the plasma flow because of the imperfect transfer of the kinetic energy from the plasma to the powder particle.For the powder of given type, the temperature that the powder particle in low-pressure section 84 is heated to, and this particulate cross the time that low-pressure section 84 spends can be by geometry and the quantity control of the target that forms low-pressure section 84.
There is other problem in the coated with nano particulate.Particularly, because the quality of nanoparticle is little, even therefore under the low static pressure of the plasma flow in low-pressure section 84, they still can not obtain the ideal infiltration that enough momentum are realized plasma flow.For such nanoparticle, the various execution modes of plasma spraying device can use SPPS.Because SPPS, the flowable materials that is injected into plasma flow are the atomized soln of nanoparticle in liquid pioneer liquid.When this atomized soln was injected in the plasma flow, pioneer's liquid was stayed in the plasma flow nanoparticle to be heated and to accelerate by rapid evaporation.
Again with reference to figure 2, in operating process, all elements, but particularly anode 8 and the target 18 that forms throttling part 80 are heated.For the cooling of target 18, cooling agent (preferably water) provides by entrance 64.Cooling agent flows through vertical coolant channel 65 in the direction of plasma flow.Vertically coolant channel 65 preferably is connected to circular coolant channel 66 (as shown in Figure 1) at the cross section of spout 86, and wherein circular coolant channel 66 is around target 18.Cooling agent flows through another the vertical coolant channel 67 that links to each other with circular channel 66 in the direction opposite with plasma flow subsequently.Cooling agent flows out this device by outlet 68.Coolant distributor 15 illustrates respectively in Fig. 6, with other element, has formed coolant channel 65,66 and 67.The coolant system of anode 8 is similar.Cooling agent, preferably water enters this device by entrance 70.Direction at plasma flow after the cooling agent flows through vertical coolant channel 71.Then, cooling agent flows through anode (as shown in Figure 1) in circular channel 72.Afterwards, cooling agent flows through another vertical passage 73 in the direction opposite with plasma flow, and flows out this device from exporting 74 again.Coolant distributor 17 illustrates respectively at Fig. 7, with other element, forms coolant channel 71,72 and 73.In some embodiments, identical cooling agent is used to cooling anodes 8 and target 18.In another embodiment, different cooling agents are used to cooling anodes 8 and target 18.
Fig. 5 has represented to have an execution mode of the plasma spraying device of two flowable materials syringes.In this embodiment, as described in above-mentioned first execution mode, high-pressure section 82 by identical target 12,14,16 and identical insulating part 36,38 and 40 form.Low-pressure section 84 is by target 20,22,24,140,142,144, and anode 8 and insulating part 42,44,46,152,154,156 form.The part of the plasma channel 160 between feed appliance 98 and feed appliance 128 is by at least one but be preferably two or more targets and form.In execution mode shown in Figure 5, part 160 is formed by three targets 20,22 and 24.The part of the plasma channel 162 between the opening 34 in feed appliance 128 and the anode 8 is also by at least one but be preferably two or more targets and form.In execution mode shown in Figure 5, part 162 by three targets 140,142,144 and anode 8 form.Usually, in the execution mode with two or more flowable materials syringes, adjacent feed appliance is by at least one but be preferably two or more targets separately.
With reference to figure 5, part 160 and 162 has cooling system again.As shown in the figure, each part has its cooling system.According to above description, cooling system comprises entrance 70, passage 71,73,72 (not shown in Figure 5) and the outlet 74 that is used for cooling off target 146.According to above description, use similar cooling system cooling electrode 8, described cooling system comprises entrance 130, passage 131,132 centers on the passage (not shown in Figure 5) of anode and exports 134.In the execution mode with two or more flowable materials syringes, can there be cooling system in every group of electrode for form the plasma channel part between every pair of adjacent feed appliance.These cooling systems can use different cooling agents, and can operate independently of one another.
In the execution mode with a plurality of flowable materials syringes, corresponding feed appliance can be in the same manner, also can not form angle in the same manner.For example, in the execution mode of Fig. 5, feed appliance 98 and feed appliance 128 are all perpendicular to the direction of plasma flow.In other execution modes, a feed appliance can form angle (as shown in Figure 4) with the direction of plasma flow, and the direction that another feed appliance can be opposite with plasma flow forms angle (as shown in Figure 3).In some other execution modes, two feed appliances can form different angles in the same direction.
The class of operation of execution mode shown in Figure 5 is similar to the operation of the execution mode shown in above-mentioned Fig. 1 and 2.In fact, the operation of feed appliance 128 upstreams is all basic identical.In operating process, after first flowable materials is injected in the plasma flow by feed appliance 98, the low-pressure section that the particulate of first flowable materials that is carried by plasma crosses plasma channel.Be heated to the point of suitable temperature at the particulate of first flowable materials, second flowable materials is injected into plasma flow by feed appliance 128.Feed appliance 128 is connected to the second flowable materials chamber 126.Second flowable materials is provided for the second flowable materials chamber 126 by entrance 124 and 125.The other parts that the particulate of second flowable materials that is carried by plasma crosses plasma channel, and flow out by the opening 34 of anode 8.
The length of the part 160 between feed appliance 98 and 128 depends on the characteristic of first flowable materials.Described length is subjected to being used to form the quantity of target of part 160 and the control of geometry.When second flowable materials is injected into plasma flow, its particulate is heated by the plasma in the plasma flow with the particulate of first flowable materials.The length of the part 162 between the opening 34 of feed appliance 128 and anode 8 depends on the characteristic of second flowable materials.Described length is subjected to being used to form the quantity of target of part 162 and the control of geometry.Select the length of part 162, use required characteristic thereby the particulate of second flowable materials (particulate with first flowable materials is heated) obtains specific spray when they arrive the opening 34 of anode 8.Select the summation of the length of part 160 and 162, use required characteristic so that the particulate of first flowable materials obtains specific spray when they arrive the opening 34 of anode 8.It should be noted that, the particulate of first flowable materials is heated in part 160, they are cooled in feed appliance 128 is connected to the zone of plasma channel 26 afterwards, again the back they in part 162 by heating (with the particulate of second flowable materials) again.The length of part 160 can be determined by the summation of the length of part 160 and 162 and the length of part 162.In the execution mode that has more than two flowable materials syringes, the length of different piece can be determined in the same manner.
Device of the present invention can be used to be different from other application of plasma spray coating coating.For example, a possible application is plasma enhanced chemical vapor deposition (PECVD).In brief, chemical vapor deposition (CVD) is the method for deposit film, and wherein particulate is heated and is advanced to coated surface, and because their high-energy, at surface generation chemical reaction that will be coated and form film.Using the application of CVD is the depositing diamond film.In order to obtain the deposition of diamond film from the teeth outwards, must create the required condition of diamond film from the teeth outwards.Plasma producing apparatus can be used to create such condition.Argon plasma for example, stands 10000K or higher temperature.Under this temperature, hydrogen and some hydrocarbon are broken down into atomic hydrogen and atomic carbon.Plasma flow accelerates atomic hydrogen and atomic carbon towards the surface, begin to form diamond film at atom plinth on this surface (in the presence of some precursor).The execution mode that use has single flowable materials syringe separates hydrocarbon and hydrogen with negative electrode, prevent cathodic corrosion afterwards, and guarantees that simultaneously these two kinds of gases have treated that in heated gas ions the abundant time is decomposed into elementary particle fully.
The key factor of CVD be diamond grow therein the layer thickness, be called as the boundary layer.The thickness in this boundary layer has been determined the growth rate of diamond film, and ideally, this film should be thin as much as possible.The square root of the thickness of this layer and the speed of plasma flow is inversely proportional to, and this plasma stream is used to send this elementary particle.With the throttling part plasma is accelerated to supersonic speed and therefore be conducive to form thinner boundary layer.
The execution mode of this device of the present invention also can be used for deleterious material or the refuse of destructing solid, liquids and gases form.For example, the execution mode of plasma producing apparatus can be integrated into waste management system or motor vehicle exhaust system.At high temperature, organic material is by pyrolysis.Then, in the colder part of system, elementary particle and ion can mix to form simple molecules before the alkaline quench method fast again.Final products comprise the gas of being made up of argon, carbon dioxide and steam, and the aqueous solution of inorganic sodium.
Also can be with function and the CVD combination of destructing deleterious material and refuse.For example, when using the execution mode of this device, the destructing chamber can comprise the substrate supports thing, wherein can generate diamond from elemental carbon.
Execution mode with device of a plurality of flowable materials syringes makes this device can be used for having the inapplicable application of execution mode of the device of single flowable materials.
For some application, for example be used for applying the thermal boundary coating (TBC) of turbine part, must have two-layer coating: top coat and adhesive coatings.This adhesive coatings is necessary because metal coated thermal coefficient of expansion and top coat are not complementary, this top coat normally the pottery.This adhesive coatings at first is applied to coated metal surface.This adhesive coatings is as the adhesive layer between top coat and the metal surface.For the bonding and thicker coating of generation better, use the method that grading function applies (Graded Functional Coating) that is known as.The use grading function applies, and two kinds of powder are injected into plasma flow.Yet the relative quantity that is injected into powder changes in time.In the incipient stage of coating procedure, only inject the powder that is used to form adhesive coatings.At leisure, increase the amount of the powder that is used to form top coat, and reduce the amount of the powder that is used to form adhesive coatings simultaneously.At last, only be provided for forming the powder of top coat.The powder that is used to form two layers of coatings has very different attributes, for example particle size, fusing point etc.It is the parameter that two kinds of different powder are optimized this device that the execution mode that use has a device of single flowable materials syringe requires.Even find satisfied parameter, the performance of such device also may not be optimal.
The device that use has a plurality of flowable materials syringes can produce the device that realization sprays the optimum condition of two kinds of powder.For example, with reference to the execution mode of device shown in Figure 5, the powder that is used to form the top ceramic layer has higher fusing point than the powder that is used to form adhesive layer.Therefore, the powder that is used to form top layer is provided for upstream flowable materials syringe by entrance 94 and 95.The powder that is used to form adhesive coatings is provided for downstream flowable materials syringe by entrance 124 and 125. Various piece 160 and 162 length can be configured to guarantee that two kinds of powder kept Best Times before the outlet 34 of flowing out anode 8 in plasma channel 26, flow out these devices from exporting 34 then under optimum temperature.
For diagram and explanation, in aforementioned content, embodiments of the present invention have been described.Be not to be exhaustive or to limit the invention to disclosed precise forms at this.Those skilled in the art are easy to carry out many modification and change.Select and describe these execution modes in order to explain principle of the present invention and practical application best, thereby make others skilled in the art can understand the present invention.Can expect different execution modes and the modification that is suitable for application-specific.And protection scope of the present invention should be determined by claims and equivalent thereof.
Claims (19)
1. plasma producing apparatus comprises:
A. anode;
B. negative electrode;
C. plasma channel, it to longitudinal extension between the described anode, and has outlet at described anode end opening at described negative electrode, and the part of described plasma channel is formed by two or more targets insulated from each other and described anode; Described plasma channel comprises the throttling part, and described throttling part is divided into described plasma channel:
I. be positioned at throttling part and the high-pressure section immediate side of described negative electrode, described high-pressure section is formed by in the described target at least one, plasma static pressure in this high-pressure section is high to passing through the restriction timesharing when plasma, plasma speed pressure raises and static pressure decline, to such an extent as to plasma is raised speed to supersonic speed;
Ii. be positioned at throttling part and the low-pressure section immediate side of described anode, wherein the static pressure of this plasma is near atmospheric pressure;
The spout of described throttling part has the cross-sectional area longitudinally of the described plasma channel of crosscut, described cross-sectional area is less than the cross-sectional area longitudinally of the described plasma channel of crosscut of (1) described high-pressure section, and less than the cross-sectional area longitudinally of the described plasma channel of crosscut of (2) described low-pressure section;
D. one or more flowable materials syringes, each syringe comprises:
I. the flowable materials chamber that has entrance; And
Ii. the described low-pressure section of described flowable materials chamber at described plasma channel connected
Flowable materials feed appliance to described plasma channel;
Wherein said low-pressure section is formed by one or more targets, and the length that low-pressure section has should be enough to guarantee be heated to the required temperature of given paint application by the powder particle that plasma carries.
2. plasma producing apparatus as claimed in claim 1, wherein said high-pressure section is formed by two or more targets.
3. plasma producing apparatus as claimed in claim 2, wherein said low-pressure section is formed by two or more targets.
4. plasma producing apparatus as claimed in claim 1, wherein said throttling partly is superonic flow nozzzle.
5. plasma producing apparatus as claimed in claim 1, the cross-sectional area longitudinally of the described plasma channel of crosscut of wherein said high-pressure section is less than or equal to the cross-sectional area longitudinally of the described plasma channel of crosscut of described low-pressure section.
6. plasma producing apparatus as claimed in claim 1, wherein said throttling part is formed by target.
7. plasma producing apparatus as claimed in claim 6 also comprises the device that cools off described anode.
8. plasma producing apparatus as claimed in claim 7 also comprises the device that is used for cooling off the target that forms the throttling part that separates with the device that is used for the described anode of cooling.
9. plasma producing apparatus as claimed in claim 1, wherein each described flowable materials feed appliance comprises in the following direction one: (a) perpendicular to described plasma channel vertically, (b) towards the angle of described anode and (c) angle of described anode dorsad.
10. plasma producing apparatus as claimed in claim 1 is wherein formed by two or more targets in the part of the described plasma channel between a pair of adjacent feed appliance arbitrarily.
11. use the method for carrying out one or more flowable materials of plasma spray coating as each described plasma producing apparatus among the claim 1-10,
Described method comprises:
A. produce plasma flow;
B. the plasma that heats in the described plasma flow arrives 10000K at least;
C. after the described plasma of heating, increase the velocity pressure that is heated plasma in the described plasma flow, and reduce to be heated in the described plasma flow static pressure of plasma simultaneously;
D. in reducing described plasma flow, be heated after the static pressure of plasma, one or more flowable materials are injected described plasma flow;
E. after every kind of flowable materials is injected into, thereby by heating the particulate that plasma in the described plasma flow heats all flowable materials in the described plasma flow; And
F. export heated particulate and the plasma that obtains.
12. method as claimed in claim 11 also is included in the speed that increases the plasma in the described plasma flow when increasing described velocity pressure.
13. method as claimed in claim 12, wherein the speed of the plasma in described plasma flow is increased to supersonic speed.
14. method as claimed in claim 11, the step of wherein carrying out heated particulate at least reaches predetermined temperature up to some particulates of at least a flowable materials.
15. method as claimed in claim 11, wherein the amount that is injected into of at least a flowable materials changes in time.
16. method as claimed in claim 11, at least a of wherein said flowable materials is nanoparticle pioneer solution.
17. method as claimed in claim 11, at least a of wherein said flowable materials is the mixture of hydrogen and hydrocarbon.
18. method as claimed in claim 11, wherein said flowable materials at least a are (a) refuse and (b) one of deleterious material.
19. method as claimed in claim 18 also comprises, at least a flowable materials, described flowable materials is decomposed into two or more elements that comprise carbon.
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/EP2007/000919 WO2008092478A1 (en) | 2007-02-02 | 2007-02-02 | Plasma spraying device and method |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101653047A CN101653047A (en) | 2010-02-17 |
| CN101653047B true CN101653047B (en) | 2013-08-14 |
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|---|---|---|---|
| CN2007800524715A Expired - Fee Related CN101653047B (en) | 2007-02-02 | 2007-02-02 | Plasma spraying device and method |
Country Status (5)
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| EP (1) | EP2116112B1 (en) |
| JP (1) | JP5161241B2 (en) |
| CN (1) | CN101653047B (en) |
| CA (1) | CA2676909C (en) |
| WO (1) | WO2008092478A1 (en) |
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| EP2150971B1 (en) | 2007-05-11 | 2018-11-28 | Umicore AG & Co. KG | Method and apparatus for making uniform and ultrasmall nanoparticles |
| US8575059B1 (en) | 2007-10-15 | 2013-11-05 | SDCmaterials, Inc. | Method and system for forming plug and play metal compound catalysts |
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| WO2011045320A1 (en) * | 2009-10-14 | 2011-04-21 | Inocon Technologie Ges.M.B.H | Heating device for polysilicon reactors |
| US9119309B1 (en) | 2009-12-15 | 2015-08-25 | SDCmaterials, Inc. | In situ oxide removal, dispersal and drying |
| US8652992B2 (en) | 2009-12-15 | 2014-02-18 | SDCmaterials, Inc. | Pinning and affixing nano-active material |
| US9126191B2 (en) | 2009-12-15 | 2015-09-08 | SDCmaterials, Inc. | Advanced catalysts for automotive applications |
| US9149797B2 (en) | 2009-12-15 | 2015-10-06 | SDCmaterials, Inc. | Catalyst production method and system |
| US8669202B2 (en) | 2011-02-23 | 2014-03-11 | SDCmaterials, Inc. | Wet chemical and plasma methods of forming stable PtPd catalysts |
| MX2014001718A (en) | 2011-08-19 | 2014-03-26 | Sdcmaterials Inc | Coated substrates for use in catalysis and catalytic converters and methods of coating substrates with washcoat compositions. |
| CN104203477A (en) * | 2012-02-28 | 2014-12-10 | 苏舍美特科（美国）公司 | Extended cascade plasma gun |
| US9511352B2 (en) | 2012-11-21 | 2016-12-06 | SDCmaterials, Inc. | Three-way catalytic converter using nanoparticles |
| US9156025B2 (en) | 2012-11-21 | 2015-10-13 | SDCmaterials, Inc. | Three-way catalytic converter using nanoparticles |
| RU2015143900A (en) * | 2013-03-14 | 2017-04-19 | ЭсДиСиМАТИРИАЛЗ, ИНК. | HIGH-PERFORMANCE SYSTEM FOR PRODUCING PARTICLES USING PLASMA |
| US9586179B2 (en) | 2013-07-25 | 2017-03-07 | SDCmaterials, Inc. | Washcoats and coated substrates for catalytic converters and methods of making and using same |
| US9517448B2 (en) | 2013-10-22 | 2016-12-13 | SDCmaterials, Inc. | Compositions of lean NOx trap (LNT) systems and methods of making and using same |
| CA2926133A1 (en) | 2013-10-22 | 2015-04-30 | SDCmaterials, Inc. | Catalyst design for heavy-duty diesel combustion engines |
| CN103648229A (en) * | 2013-11-22 | 2014-03-19 | 中国科学院力学研究所 | An electric arc plasma generator and a method for improving the stability and the security of the operation of the generator |
| EP3119500A4 (en) | 2014-03-21 | 2017-12-13 | SDC Materials, Inc. | Compositions for passive nox adsorption (pna) systems |
| CN104902666B (en) * | 2015-05-21 | 2017-08-01 | 广东省工业技术研究院(广州有色金属研究院) | A kind of pair of air-flow supersonic plasma spray gun |
| CN104936372A (en) * | 2015-06-29 | 2015-09-23 | 武汉天和技术股份有限公司 | Plasma generating device |
| US10328441B2 (en) | 2016-04-29 | 2019-06-25 | Semes Co., Ltd. | Nozzle unit and coating apparatus including the same |
| KR20180061967A (en) * | 2016-11-30 | 2018-06-08 | 한국수력원자력 주식회사 | Multi-Electrode Plasma Torch |
| CN110870388B (en) * | 2017-03-16 | 2023-03-31 | 欧瑞康美科（美国）公司 | Optimized neutral stack cooling for plasma gun |
| CN107949139A (en) * | 2017-11-29 | 2018-04-20 | 中国航天空气动力技术研究院 | A kind of serially connected arc plasma generator |
| EP3742869A1 (en) * | 2019-05-22 | 2020-11-25 | Gulhfi Consulting AG | Miniaturised plasma torch |
| CN111441045B (en) * | 2020-05-28 | 2024-03-22 | 西安建筑科技大学 | Electron beam deposition spray head and method |
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Also Published As
| Publication number | Publication date |
|---|---|
| WO2008092478A1 (en) | 2008-08-07 |
| EP2116112B1 (en) | 2015-12-30 |
| EP2116112A1 (en) | 2009-11-11 |
| JP5161241B2 (en) | 2013-03-13 |
| JP2010521042A (en) | 2010-06-17 |
| CA2676909A1 (en) | 2008-08-07 |
| CN101653047A (en) | 2010-02-17 |
| CA2676909C (en) | 2015-12-08 |
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