CN101414656A - 带有压电薄膜的基板 - Google Patents
带有压电薄膜的基板 Download PDFInfo
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- CN101414656A CN101414656A CNA2008101281242A CN200810128124A CN101414656A CN 101414656 A CN101414656 A CN 101414656A CN A2008101281242 A CNA2008101281242 A CN A2008101281242A CN 200810128124 A CN200810128124 A CN 200810128124A CN 101414656 A CN101414656 A CN 101414656A
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- piezoelectric membrane
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/20—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators
- H10N30/204—Piezoelectric or electrostrictive devices with electrical input and mechanical output, e.g. functioning as actuators or vibrators using bending displacement, e.g. unimorph, bimorph or multimorph cantilever or membrane benders
- H10N30/2041—Beam type
- H10N30/2042—Cantilevers, i.e. having one fixed end
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/076—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing by vapour phase deposition
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/01—Manufacture or treatment
- H10N30/07—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base
- H10N30/074—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing
- H10N30/079—Forming of piezoelectric or electrostrictive parts or bodies on an electrical element or another base by depositing piezoelectric or electrostrictive layers, e.g. aerosol or screen printing using intermediate layers, e.g. for growth control
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N30/00—Piezoelectric or electrostrictive devices
- H10N30/80—Constructional details
- H10N30/85—Piezoelectric or electrostrictive active materials
- H10N30/853—Ceramic compositions
- H10N30/8542—Alkali metal based oxides, e.g. lithium, sodium or potassium niobates
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- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Ceramic Engineering (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Physical Vapour Deposition (AREA)
- Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)
Abstract
Description
成膜条件 | 第一实施方式 | 比较例 |
基板温度(℃) | 540 | 680 |
放电功率(W) | 100 | 100 |
导入气体氛围气 | Ar | Ar |
压力(Pa) | 0.4 | 0.4 |
成膜时间(小时) | 4 | 4 |
靶 | (K0.5Na0.5)NbO3烧结体 | (K0.5Na0.5)NbO3烧结体 |
压电元件 | 压电常数d31降低率(%) |
第一实施方式 | 3.3 |
比较例 | 7.4 |
压电元件 | 压电常数d31降低率(%) |
第二实施方式(Ge基板) | 2.2 |
第二实施方式(GeAs基板) | 2.9 |
比较例 | 7.4 |
Claims (14)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2007-267858 | 2007-10-15 | ||
JP2007267858 | 2007-10-15 | ||
JP2007267858 | 2007-10-15 |
Related Child Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010101975674A Division CN101867014B (zh) | 2007-10-15 | 2008-07-03 | 带有压电薄膜的基板 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN101414656A true CN101414656A (zh) | 2009-04-22 |
CN101414656B CN101414656B (zh) | 2012-01-25 |
Family
ID=40533516
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010101975674A Active CN101867014B (zh) | 2007-10-15 | 2008-07-03 | 带有压电薄膜的基板 |
CN2008101281242A Active CN101414656B (zh) | 2007-10-15 | 2008-07-03 | 带有压电薄膜的基板 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CN2010101975674A Active CN101867014B (zh) | 2007-10-15 | 2008-07-03 | 带有压电薄膜的基板 |
Country Status (3)
Country | Link |
---|---|
US (2) | US7710003B2 (zh) |
JP (2) | JP5391395B2 (zh) |
CN (2) | CN101867014B (zh) |
Cited By (7)
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CN101931046A (zh) * | 2009-06-22 | 2010-12-29 | 日立电线株式会社 | 压电性薄膜元件及压电性薄膜元件的制造方法、压电薄膜设备 |
CN102152630A (zh) * | 2010-01-05 | 2011-08-17 | 精工爱普生株式会社 | 液体喷射头、液体喷射装置和压电元件 |
CN102959752A (zh) * | 2010-08-12 | 2013-03-06 | 株式会社村田制作所 | 压电薄膜元件的制造方法、压电薄膜元件以及压电薄膜元件用部件 |
CN103325937A (zh) * | 2012-03-22 | 2013-09-25 | 日立电线株式会社 | 带压电体膜的基板、压电体膜元件及其制造方法 |
CN106025059A (zh) * | 2015-03-27 | 2016-10-12 | 精工爱普生株式会社 | 压电元件、压电元件应用器件以及压电元件的制造方法 |
CN107830877A (zh) * | 2017-10-23 | 2018-03-23 | 大连理工大学 | 一种椭圆柔性基底的压电薄膜传感器 |
CN114019674A (zh) * | 2021-09-29 | 2022-02-08 | 北京理工大学 | 一种透射式光开关、阵列透射式光开关及电子设备 |
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JP2007181185A (ja) * | 2005-12-01 | 2007-07-12 | Sony Corp | 音響共振器およびその製造方法 |
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US8022604B2 (en) * | 2007-10-19 | 2011-09-20 | Ngk Insulators, Ltd. | (Li, Na, K)(Nb, Ta)O3 type piezoelectric/electrostrictive ceramic composition containing 30-50 mol% Ta and piezoelectric/electrorestrictive device containing the same |
JP5267082B2 (ja) * | 2008-01-24 | 2013-08-21 | 日立電線株式会社 | 圧電薄膜素子及びそれを用いたセンサ並びにアクチュエータ |
KR100984333B1 (ko) * | 2008-07-18 | 2010-09-30 | 국방과학연구소 | 전기 기계 변환기 및 그 제작방법 |
DE102008055123B3 (de) * | 2008-12-23 | 2010-07-22 | Robert Bosch Gmbh | Ultraschallwandler zum Einsatz in einem fluiden Medium |
JP5035374B2 (ja) | 2009-06-10 | 2012-09-26 | 日立電線株式会社 | 圧電薄膜素子及びそれを備えた圧電薄膜デバイス |
CN101924179B (zh) * | 2009-06-10 | 2013-12-25 | 日立电线株式会社 | 压电薄膜元件及具备其的压电薄膜设备 |
JP5024399B2 (ja) * | 2009-07-08 | 2012-09-12 | 日立電線株式会社 | 圧電薄膜素子、圧電薄膜デバイス及び圧電薄膜素子の製造方法 |
JP5531529B2 (ja) * | 2009-09-24 | 2014-06-25 | 日立金属株式会社 | 圧電薄膜付基板、圧電薄膜素子、アクチュエータ、及びセンサ |
JP5515675B2 (ja) * | 2009-11-20 | 2014-06-11 | 日立金属株式会社 | 圧電薄膜素子及び圧電薄膜デバイス |
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JP5556514B2 (ja) | 2010-09-06 | 2014-07-23 | 日立金属株式会社 | 圧電体薄膜ウェハの製造方法、圧電体薄膜素子、及び圧電体薄膜デバイス |
JP5350418B2 (ja) * | 2011-02-28 | 2013-11-27 | 富士フイルム株式会社 | 共振振動子、共振振動子の製造方法およびこの共振振動子を有する超音波処置具 |
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2007
- 2007-12-13 JP JP2007321592A patent/JP5391395B2/ja active Active
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2008
- 2008-03-03 US US12/073,237 patent/US7710003B2/en active Active
- 2008-07-03 CN CN2010101975674A patent/CN101867014B/zh active Active
- 2008-07-03 CN CN2008101281242A patent/CN101414656B/zh active Active
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2010
- 2010-02-22 US US12/656,975 patent/US8004163B2/en active Active
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- 2013-09-18 JP JP2013192519A patent/JP5801364B2/ja active Active
Cited By (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN101931046A (zh) * | 2009-06-22 | 2010-12-29 | 日立电线株式会社 | 压电性薄膜元件及压电性薄膜元件的制造方法、压电薄膜设备 |
CN101931046B (zh) * | 2009-06-22 | 2014-03-12 | 日立电线株式会社 | 压电性薄膜元件及压电性薄膜元件的制造方法、压电薄膜设备 |
CN102152630A (zh) * | 2010-01-05 | 2011-08-17 | 精工爱普生株式会社 | 液体喷射头、液体喷射装置和压电元件 |
CN102152630B (zh) * | 2010-01-05 | 2014-06-25 | 精工爱普生株式会社 | 液体喷射头、液体喷射装置和压电元件 |
CN102959752A (zh) * | 2010-08-12 | 2013-03-06 | 株式会社村田制作所 | 压电薄膜元件的制造方法、压电薄膜元件以及压电薄膜元件用部件 |
CN102959752B (zh) * | 2010-08-12 | 2015-09-02 | 株式会社村田制作所 | 压电薄膜元件的制造方法、压电薄膜元件以及压电薄膜元件用部件 |
CN103325937A (zh) * | 2012-03-22 | 2013-09-25 | 日立电线株式会社 | 带压电体膜的基板、压电体膜元件及其制造方法 |
CN103325937B (zh) * | 2012-03-22 | 2017-03-01 | 住友化学株式会社 | 带压电体膜的基板、压电体膜元件及其制造方法 |
CN106025059A (zh) * | 2015-03-27 | 2016-10-12 | 精工爱普生株式会社 | 压电元件、压电元件应用器件以及压电元件的制造方法 |
CN107830877A (zh) * | 2017-10-23 | 2018-03-23 | 大连理工大学 | 一种椭圆柔性基底的压电薄膜传感器 |
CN114019674A (zh) * | 2021-09-29 | 2022-02-08 | 北京理工大学 | 一种透射式光开关、阵列透射式光开关及电子设备 |
Also Published As
Publication number | Publication date |
---|---|
US20100156247A1 (en) | 2010-06-24 |
CN101867014A (zh) | 2010-10-20 |
JP5801364B2 (ja) | 2015-10-28 |
JP2014030037A (ja) | 2014-02-13 |
US20090096328A1 (en) | 2009-04-16 |
CN101414656B (zh) | 2012-01-25 |
JP5391395B2 (ja) | 2014-01-15 |
US8004163B2 (en) | 2011-08-23 |
CN101867014B (zh) | 2012-11-28 |
US7710003B2 (en) | 2010-05-04 |
JP2009117785A (ja) | 2009-05-28 |
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