CN101408514B - Gas sensor based on gas discharge spectral analysis and method for testing gas thereof - Google Patents
Gas sensor based on gas discharge spectral analysis and method for testing gas thereof Download PDFInfo
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- CN101408514B CN101408514B CN2008100424785A CN200810042478A CN101408514B CN 101408514 B CN101408514 B CN 101408514B CN 2008100424785 A CN2008100424785 A CN 2008100424785A CN 200810042478 A CN200810042478 A CN 200810042478A CN 101408514 B CN101408514 B CN 101408514B
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Abstract
The invention discloses a gas sensor which is based on the aerial discharge spectroscopic analysis and a method for detecting gas, wherein, the sensor comprises a polarizing electrode, a grid electrode, a bandpass spectral filter and a light-sensitive unit; the grid electrode and the bandpass spectral filter are positioned between the polarizing electrode and the light-sensitive unit, and a discharge region is formed by a gas clearance between the grid electrode and the polarizing electrode; the grid electrode has a hollow-out structure, which can cause the gas inside and outside the discharge region to communicate; the bandpass spectral filter can selectively cause that characteristic light radiation generated by target gas passes through the discharge region; the light-sensitive unit can not only receive the characteristic radiation generated by the target gas, but also convert the characteristic radiation into electric signals; and by detecting the electric signal output of the light-sensitive unit, the ingredients and the concentration of the target gas can be qualitatively or quantificationally analyzed. The sensor can be manufactured on chip integrally so that an on-chip arrayed and minimized aerial discharge spectroscopic analyzing device can be formed.
Description
Technical field
What the present invention relates to is the gas sensor and the detection method in a kind of detection technique field, and specifically, what relate to is a kind of based on the gas sensor of gas discharge spectral analysis and the method for detected gas thereof.
Background technology
The gas discharge spectroscopic analysis methods is one of the highest gas componant check and analysis method of accuracy of detection and degree of confidence, in such as Aero-Space, national defence, public safety, air environment monitoring and soil resource monitoring or the like key areas, bringing into play important effect.Through certain repacking, the gas discharge spectral analysis device can also be used for solid-state and constituent analysis liquid sample usually simultaneously, and therefore, its multifunctionality is further widened its range of application.Yet, being accompanied by the development trend of gas sensor microminiaturization, the gas discharge spectroscopic analysis methods is but because pick-up unit is difficult to miniaturization, in recent years development very slowly and lag behind.
Find through literature search prior art, Application No.: US 7,361,514, B2, title " System and method for gas discharge spectroscopy " (method and system of gas discharge spectral analysis), introduced the system and method that a kind of optical radiation that utilizes gas discharge to launch realizes gas composition analysis, utilization is similar to the plasma producing apparatus of plasma scope and the light-sensitive unit of array, and many feature identification are carried out in the characteristic light radiation that gas gives off in discharge process.This technology can be so that the advantage of gas discharge spectroscopic analysis methods pinpoint accuracy be further improved, and still, this system still can only rely on relatively large equipment to realize, and is difficult to carry out miniaturization, more is difficult to realize the integrated manufacturing of changing on the sheet.
Also find in the retrieval, Ashish Modi etc. are at " Nature (London) " (the 424th volume, the 171-174 page or leaf, 2003) on " Miniaturized Ionization Gas Sensors using CarbonNanotubes " (the carbon nano-tube ionized gas sensor of miniaturization) delivered, having introduced a kind of is the gas sensor of electrode with the multi-walled carbon nano-tubes, compare with the metal plate electrode that does not have carbon nano-tube, the operating voltage of this sensor has descended more than the several times, thereby provides the foundation for changing on the microminiaturization of this type of device, the sheet.The sensitive range of this type of sensor is very wide, on the principle any ionized gas that can take place is all had susceptibility, has for example just reported the susceptibility to inert gas in this article, this be the absorption type gas sensor sensitive range can't be obtained.On the other hand, there is the poisoning problem hardly in this type of device, if the short time air-supply, just can be so that the residual dissipation of space charge of last discharge.But only detect or local self-maintained discharge current amplitude detects the level that this type of device can't reach the gas discharge spectral analysis to the susceptibility and the accuracy of detection of mixed gas by existing gap breakdown critical voltage in the literary composition.In addition, statistics as a large amount of neutral molecules and charged particle inelastic collision, only detect or the detection of local self-maintained discharge current amplitude by existing gap breakdown critical voltage in the literary composition, this type of device is not good for the selectivity of two kinds of less gases of ionization constant difference.
Summary of the invention
The objective of the invention is to overcome the deficiencies in the prior art, provide a kind of based on the gas sensor of gas discharge spectral analysis and the method for detected gas thereof, with monodimension nanometer material as electrode material, and the discharging gap of formation gas discharge, reduce the operating voltage of device, bandpass filter can optionally make region of discharge be passed through by the characteristic light radiation that object gas produces, light-sensitive unit only receives this radiation and is converted into electric signal, by detecting the electric signal output of light-sensitive unit, can analyze the composition and the concentration of object gas qualitative or quantitatively.This sensor can be made on the integrated ground sheet, can form the gas discharge spectral analysis device of change on the sheet, array, microminiaturization.
The present invention is achieved by the following technical solutions:
A kind of gas sensor based on the gas discharge spectral analysis involved in the present invention comprises: polarized electrode, grid electrode, bandpass filter and light-sensitive unit.Grid electrode, bandpass filter are between polarized electrode and the light-sensitive unit, and the gas gap between grid electrode and the polarized electrode constitutes region of discharge, and grid electrode has the structure of hollow out, and the inside and outside gas of region of discharge is communicated with; Bandpass filter can optionally make region of discharge be passed through by the characteristic light radiation that object gas produces; Light-sensitive unit only can receive the characteristic radiation that is produced by object gas, and can be converted into electric signal;
Grid electrode is arranged on two different substrates with bandpass filter, has gas gap between the two, perhaps is arranged on the substrate;
Light-sensitive unit is arranged on two different substrates with bandpass filter, has gas gap between the two, perhaps is arranged on the substrate;
At polarized electrode towards grid electrode one side surface, be furnished with the monodimension nanometer material of conductor or semiconductive or quasi-one-dimensional nanometer material electrode material as polarized electrode, if the polarized electrode electrode material is not when being prepared by the original position manufacturing process, then be furnished with the metal level of single or multiple lift between polarized electrode electrode material and the substrate.
Described grid electrode and bandpass filter if two parts that are separated from each other are arranged on two different substrates, by changing the bandpass filter of different passband wavelength, can be realized the qualitative and quantitative analysis to different target gas.
If described grid electrode and bandpass filter are arranged on the substrate, bandpass filter has engraved structure, make the inside and outside gas of region of discharge be communicated with, by changing the bandpass filter that is manufactured in passband wavelength on the same substrate, different with grid electrode, can realize qualitative and quantitative analysis to different target gas.
If described grid electrode and bandpass filter are arranged on the substrate, grid electrode or belong to one or more layers film in the bandpass filter, in such cases, bandpass filter is the multilayer membrane type, and grid electrode or do not belong to one or more layers film of bandpass filter is in such cases, grid electrode is arranged in all surfaces of bandpass filter, perhaps, grid electrode is arranged in the part surface of bandpass filter, thereby increases the transmitance of object gas characteristic light radiation.
If described light-sensitive unit is arranged on the substrate with bandpass filter, light-sensitive unit is arranged at the bandpass filter part surface of polarized electrode one side dorsad.
Described monodimension nanometer material, its diameter between tens nanometers, comprises carbon nano-tube, silicon carbide nanometer line, metal nanometer line, metal nitride nano wire or metal oxide nano-wire in several nanometers.
The method of a kind of gas sensor detected gas based on the gas discharge spectral analysis involved in the present invention, be region of discharge to be converted to electric signal by the characteristic light radiation that object gas produces by light-sensitive unit, whether have electric signal output, judge having or not of object gas qualitatively if detecting light-sensitive unit;
Under the condition that concerns between the electrical signal intensity of known light-sensitive unit output and the object gas concentration, by the electrical signal intensity of the light-sensitive unit output electrical signal intensity with the object gas of concentration known is compared, thereby realization is to the quantitative test of object gas concentration.
Said method of the present invention comprises following concrete steps:
The first step: sensor is exposed in the gas, and on-load voltage between polarized electrode and grid electrode makes region of discharge generation gas discharge;
Second step: measure the output signal of light-sensitive unit, if there is effective output signal, illustrate to have object gas, if there is no effective output signal illustrates there is not object gas that perhaps explanation exists concentration to exceed the object gas of sensitivity range; Perhaps contrast the electrical signal intensity of the object gas of effective output signal strength and concentration known,, determine the concentration of object gas according to the electrical signal intensity of light-sensitive unit output and the relation between the object gas concentration.
Effective output signal of described light-sensitive unit is defined as follows: do not take place at region of discharge under the condition of gas discharge, the output signal of light-sensitive unit is defined as airborne signals, when the output signal of light-sensitive unit during greater than its airborne signals, the output signal of light-sensitive unit is defined as effective output signal.
The electrical signal intensity of described light-sensitive unit output and the relation between the object gas concentration, determine that a kind of implementation method of this relation is:
At first, the intensity of the pairing light-sensitive unit output of the individual object gas concentration of measuring N (N＞3) electric signal;
Then data are carried out match, thereby obtain the electrical signal intensity of light-sensitive unit output and the relation between the object gas concentration.
For identical target gas species and concentration range, identical sensor, determine that this relation belongs to the process of demarcation, need not repeat before the quantitative test each time.
Compared with prior art, the present invention has following beneficial effect:
At first, the process gas discharge that the optical emitter of sensor is dominated by 1-dimention nano pole provides, because the adding of 1-dimention nano pole, with respect to traditional sparking electrode, energy conversion efficiency in the discharge process can improve greatly, thereby can obtain higher light radiation intensity under lower on-load voltage.
Secondly, because the characteristic light radiation that use object gas molecule or atom produce in discharge process is as the foundation of identification gas componant, and signal of sensor is an electric signal, can detect the qualitative analysis of realization gas componant and the quantitative test of concentration by electrical quantities simply, therefore, method with respect to traditional gas discharge spectral analysis, sensor provided by the present invention can be simplified on detection method and hardware greatly, can realize portable spectral analysis gas sensor system fully.
Once more, because the bandpass filter that can use the based thin film processes to make, again because many light-sensitive units also can be by film and graphical technology manufacturing, for example can work in infrared band and ultraviolet band, with the monodimension nanometer material is the photosensitive field effect transistor of back of the body grid type of channel material, and, manufacturing based on the gas discharge electrode of monodimension nanometer material also can be by film and graphical technology manufacturing, therefore, sensor provided by the invention can realize changing on the sheet integrated manufacturing, therefore, can realize the micro spectral analytical gas sensing system changed on the sheet.
At last, owing to comprise independently gas discharge unit in the gas sensor provided by the invention, can realize the detection of gas discharge gas-sensitivity and electric quantity independently, for example voltage breakdown, local self-maintained discharge electric current etc., therefore, can increase the characteristic quantity of demarcating with identification gas, thereby increase Selectivity of Sensor, because the principle of the detection of gas discharge gas-sensitivity and electric quantity and spectral analysis is different, therefore can enlarge the sensitive range of sensor again.
Description of drawings
Fig. 1 is the sensor construction synoptic diagram of the embodiment of the invention 1;
Among the figure: grid electrode and bandpass filter are two parts that are separated from each other.
Fig. 2 is the sensor construction synoptic diagram of the embodiment of the invention 2;
Among the figure: grid electrode and bandpass filter are manufactured on the same substrate, and grid electrode is arranged at the surface of bandpass filter.
Fig. 3 is the sensor construction synoptic diagram of the embodiment of the invention 3;
Among the figure: grid electrode and bandpass filter are manufactured on the same substrate, and grid electrode is the one deck in the multilayer film that constitutes bandpass filter;
Fig. 4 is the sensor construction synoptic diagram of the embodiment of the invention 4.
Embodiment
Below in conjunction with accompanying drawing embodiments of the invention are elaborated: present embodiment is being to implement under the prerequisite with the technical solution of the present invention, provided detailed embodiment and concrete operating process, but protection scope of the present invention is not limited to following embodiment.
As shown in Figure 1, a kind of gas sensor based on the gas discharge spectral analysis comprises polarized electrode 1, grid electrode 3, bandpass filter 4 and light-sensitive unit 5;
Light-sensitive unit 5 is with bandpass filter 4 or be arranged on two different substrates, has gas gap between the two;
At polarized electrode 1 towards grid electrode 3 one side surfaces, be furnished with the electrode material 2 of the monodimension nanometer material of conductor or semiconductive as polarized electrode, polarized electrode electrode material 2 by the preparation of original position manufacturing process, is not furnished with the multiple layer metal layer between polarized electrode electrode material and substrate;
Gas gap between grid electrode 3 and the polarized electrode 1 constitutes region of discharge;
Light-sensitive unit 5 only can receive the characteristic radiation that is produced by object gas, and can be converted into electric signal;
The detection method of this sensor is: described light-sensitive unit 5 is converted to electric signal with region of discharge by the characteristic light radiation that object gas produces, by detecting light-sensitive unit 5 whether electric signal output is arranged, judge having or not of object gas qualitatively, under the condition that concerns between the electrical signal intensity of known light-sensitive unit 5 outputs and the object gas concentration, by the electrical signal intensity of the light-sensitive unit 5 output electrical signal intensity with the object gas of concentration known is compared, thereby realization is to the quantitative test of object gas concentration.
Above-mentioned gas sensor based on the gas discharge spectral analysis is used for the method for detected gas composition qualitatively, and its concrete steps are as follows:
The first step: sensor is exposed in the gas, and on-load voltage between polarized electrode 1 and grid electrode 3 makes region of discharge generation gas discharge;
Second step: measure the output signal of light-sensitive unit 5, if there is effective output signal, illustrate to have object gas, if there is no effective output signal illustrates there is not object gas that perhaps explanation exists concentration to exceed the object gas of sensitivity range.
Above-mentioned gas sensor based on the gas discharge spectral analysis is used for the method for detected gas composition quantitatively, and its concrete steps are as follows:
The first step: sensor is exposed in the gas, and on-load voltage between polarized electrode 1 and grid electrode 3 makes region of discharge generation gas discharge;
Second step: the output signal of measuring light-sensitive unit 5, if there is effective output signal, contrast the electrical signal intensity of the object gas of effective output signal strength and concentration known, according to the electrical signal intensity of light-sensitive unit 5 outputs and the relation between the object gas concentration, determine the concentration of object gas.
Effective output signal of described light-sensitive unit 5 is defined as follows: do not take place at region of discharge under the condition of gas discharge, the output signal of light-sensitive unit 5 is defined as airborne signals, when the output signal of light-sensitive unit 5 during greater than its airborne signals, the output signal of light-sensitive unit 5 is defined as effective output signal.
The electrical signal intensity of described light-sensitive unit 5 outputs and the relation between the object gas concentration, determine a kind of implementation method of this relation, its concrete steps are: at first, and the intensity of the pairing light-sensitive unit 5 output electric signal of the individual object gas concentration of measuring N (N＞3); Then data are carried out match, thereby obtain the electrical signal intensity of light-sensitive unit 5 outputs and the relation between the object gas concentration, for identical target gas species and concentration range, identical sensor, determine that this relation belongs to the process of demarcation, need not repeat before the quantitative test each time.
Described grid electrode 3 and bandpass filter 4 are two parts that are separated from each other, and are arranged on two different substrates, by the bandpass filter 4 of changing different passband wavelength, can realize the qualitative and quantitative analysis to different target gas.
Described monodimension nanometer material has used a kind of as the polarized electrode electrode material among carbon nano-tube, the silicon carbide nanometer line respectively.
Each parts of entire device are all realized by changing microelectronic manufacturing technology processing on the sheet, have four layers, finally form spatial structure by bonding techniques, but bandpass filter is set to the state that can be replaced, finally obtain microdevice by cutting into slices, its physical dimension is 5mm * 5mm * 0.3mm, employed various monodimension nanometer material---carbon nano-tube, silicon carbide nanometer line, all can be implemented in the optical radiation that makes gas discharge under the low pressure less than 36V and take place, and can make light-sensitive unit detect effective radiation signal.In the experiment, the passband of bandpass filter is in the characteristic radiation of acetone and ethanol discharge back generation, by changing two bandpass filters, to two kinds of gases minimum 10 in air
1The mixed gas of ppm magnitude can both detect the watt current output signal in light-sensitive unit, thereby has realized the sensing to two kinds of gases.This example explanation, technical scheme provided by the present invention, can realize qualitative and quantitative analysis to minimum gas in the various mixed gases, general features with gas discharge spectral analysis device, and its operating voltage reduces greatly, be in tens volts level, the device profile is dwindled greatly, and therefore realized changing on the gas discharge spectral analysis sheet on the sheet of microsensor and changed design, manufacturing, and essential characteristic microminiaturized, that portability is used.This embodiment is minimum with respect to other embodiment to making desired technology difficulty on each parts sheet.
As shown in Figure 2, a kind of gas sensor based on the gas discharge spectral analysis comprises polarized electrode 1, grid electrode 3, bandpass filter 4 and light-sensitive unit 5;
Light-sensitive unit 5 is arranged on two different substrates with bandpass filter 4, has gas gap between the two;
At polarized electrode 1 towards grid electrode 3 one side surfaces, be furnished with the electrode material 2 of the monodimension nanometer material of conductor or semiconductive as polarized electrode, polarized electrode electrode material 2 does not have metal level by the preparation of original position manufacturing process between polarized electrode electrode material and substrate;
Gas gap between grid electrode 3 and the polarized electrode 1 constitutes region of discharge;
Light-sensitive unit 5 only can receive the characteristic radiation that is produced by object gas, and can be converted into electric signal;
The detection method of this sensor, effectively output signal definition, determine light-sensitive unit 5 outputs electrical signal intensity and object gas concentration between the method for relation identical with specific embodiment 1.
Described grid electrode 3 and bandpass filter 4 are arranged on the substrate, bandpass filter 4 has engraved structure, make the inside and outside gas of region of discharge be communicated with, by changing the bandpass filter 4 that is manufactured in passband wavelength on the same substrate, different with grid electrode 3, can realize qualitative and quantitative analysis to different target gas.
Described grid electrode 3 does not belong to the skim of bandpass filter 4, and grid electrode 3 is arranged in the part surface of bandpass filter 4.
Described monodimension nanometer material comprises metal nanometer line.
Each parts of entire device are all realized by changing microelectronic manufacturing technology processing on the sheet, the final spatial structure that forms only is made up of three substrates, but bandpass filter is set to the state that can be replaced, finally obtain microdevice by cutting into slices, its physical dimension is 5mm * 5mm * 0.1mm, satisfies the demand to device miniaturization.Device can be implemented in the optical radiation that makes gas discharge under the low pressure less than 36V and takes place, and can make light-sensitive unit detect effective radiation signal.In the experiment, the passband of bandpass filter is in the characteristic radiation that acetone and ethanol discharge back takes place, and is manufactured in an on-chip bandpass filter by changing two with grid electrode, to two kinds of gases in air minimum 10
1The mixed gas of ppm magnitude can both detect the watt current output signal in light-sensitive unit, thereby has realized the sensing to two kinds of gases.This example explanation, technical scheme provided by the present invention, can realize qualitative and quantitative analysis to minimum gas in the various mixed gases, general features with gas discharge spectral analysis device, and, its operating voltage reduces greatly, therefore be in tens volts level, the device profile is dwindled greatly, has realized changing on the gas discharge spectral analysis sheet on the sheet of microsensor and has changed design, make, and it is microminiaturized, the essential characteristic that portability is used, with respect to embodiment 1, because grid electrode is made on the identical substrate, therefore with bandpass filter, this embodiment can further simplify technology, and helps reducing the physical dimension of device.
As shown in Figure 3, a kind of gas sensor based on the gas discharge spectral analysis comprises polarized electrode 1, grid electrode 3, bandpass filter 4 and light-sensitive unit 5;
Light-sensitive unit 5 is arranged on two different substrates with bandpass filter 4, has gas gap between the two;
At polarized electrode 1 towards grid electrode 3 one side surfaces, be furnished with the electrode material 2 of the monodimension nanometer material of conductor or semiconductive as polarized electrode, polarized electrode electrode material 2 does not have metal level by the preparation of original position manufacturing process between polarized electrode electrode material and substrate;
Gas gap between grid electrode 3 and the polarized electrode 1 constitutes region of discharge;
Light-sensitive unit 5 only can receive the characteristic radiation that is produced by object gas, and can be converted into electric signal;
The detection method of this sensor, effectively output signal definition, determine light-sensitive unit 5 outputs electrical signal intensity and object gas concentration between the method for relation identical with specific embodiment 1.
Described grid electrode 3 and bandpass filter 4 are arranged on the substrate, and bandpass filter 4 has engraved structure, by changing bandpass filter, can realize the qualitative and quantitative analysis to different target gas.Described bandpass filter is the multilayer membrane type, and grid electrode 3 belongs to the skim in the bandpass filter 4.
Described monodimension nanometer material uses metal nitride nano wire or metal oxide nano-wire.
The described device of present embodiment, its basic structural feature is similar to specific embodiment 2 with the processing technology feature, and the key property feature of micro-alcohol and acetone concentration is also similar to the device described in the specific embodiment 2 in its detection air.Different is, for above-mentioned two kinds of gases, and under same concentrations, same operation condition, output signal strength in the gas sensitive devices, present embodiment institute outlines device is lower.This causes owing to transmittance descends.But the described scheme of present embodiment obviously can further be simplified the manufacturing process of device, because can omit the manufacturing step of grid electrode.
As shown in Figure 4, a kind of gas sensor based on the gas discharge spectral analysis comprises polarized electrode 1, grid electrode 3, bandpass filter 4 and light-sensitive unit 5;
At polarized electrode 1 towards grid electrode 3 one side surfaces, be furnished with the electrode material 2 of the monodimension nanometer material of conductor or semiconductive as polarized electrode, polarized electrode electrode material 2 has the multiple layer metal layer by the preparation of ex situ manufacturing process between polarized electrode electrode material and substrate;
Gas gap between grid electrode 3 and the polarized electrode 1 constitutes region of discharge;
Light-sensitive unit 5 only can receive the characteristic radiation that is produced by object gas, and can be converted into electric signal;
The detection method of this sensor, effectively output signal definition, determine light-sensitive unit 5 outputs electrical signal intensity and object gas concentration between the method for relation identical with specific embodiment 1.
Described grid electrode 3 and bandpass filter 4 are arranged on the substrate, and bandpass filter 4 has engraved structure, by changing bandpass filter, can realize the qualitative and quantitative analysis to different target gas.Described bandpass filter is the multilayer membrane type, and grid electrode 3 belongs to the skim in the bandpass filter 4.
Described light-sensitive unit 5 is arranged on the substrate with bandpass filter 4, and light-sensitive unit 5 is arranged at bandpass filter 4 part surface of polarized electrode 1 one sides dorsad.
Described monodimension nanometer material has used metal nanometer line.
The described device of present embodiment, its basic structural feature is similar to specific embodiment 3 with the processing technology feature, and the key property feature of micro-alcohol and acetone concentration is also similar to the device described in the specific embodiment 3 in its detection air.Different is, for above-mentioned two kinds of gases, and under same concentrations, same operation condition, output signal strength in the gas sensitive devices, present embodiment institute outlines device is higher, and this is because the gas discharge UV radiation intensity that light-sensitive unit receives is higher.And, the described scheme of present embodiment obviously can further be simplified the manufacturing process of device, be fabricated on the substrate effect that this also can play further reduction of device physical dimension and reduce bonding-packaging technology difficulty because be in three parts of three locus.But the described device of present embodiment is changed different bandpass filters and is undoubtedly among four embodiment the highest to increase the needed cost of gas componant sensitive range.
By above embodiment as can be seen, the present invention with monodimension nanometer material as electrode material, and the discharging gap of formation gas discharge, because the gas discharge phenomenon that this special electrode material is dominated has higher luminescence efficiency, therefore can greatly reduce the operating voltage of device.On the other hand, the optical radiation that utilizes bandpass filter that object gas molecule or atom are formed in discharge process sees through, and make other gas molecule or the optical radiation conductively-closed that in discharge process, forms of atom, by a light-sensitive unit that optical radiation can be converted into electric signal output is set, make it to receive optical radiation, thereby realize a kind of object gas is discerned and quantitative measurement of concetration qualitatively by bandpass filter.Because bandpass filter can use the technology of piling up of multilayer dielectric film or conductive film to realize, therefore can be used as a part that constitutes the gas discharge gap, again owing to there is such light-sensitive unit, its manufacturing technology can realize the integrated manufacturing of the thin-film technique of changing on the sheet, therefore, entire device can be created on the sheet with changing, because monodimension nanometer material reduces the effect of discharge operating voltage, overall optical analysis of spectrum gas sensor is suitable for changing on miniaturization, the sheet again.In addition because spectral analysis has higher analytical precision, higher selectivity, bigger sensitive range, therefore with compare based on the sensor of other air-sensitive scale effects of monodimension nanometer material, have bigger performance advantage.By adjusting the manufacturing process of bandpass filter, make the bandpass filter of different passband wavelength, thereby can make the sensor array that to discern different target gas.
Claims (9)
1. gas sensor based on the gas discharge spectral analysis, it is characterized in that, comprise polarized electrode, grid electrode, bandpass filter and light-sensitive unit, grid electrode, bandpass filter are between polarized electrode and the light-sensitive unit, gas gap between grid electrode and the polarized electrode constitutes region of discharge, grid electrode has the structure of hollow out, and the inside and outside gas of region of discharge is communicated with; Bandpass filter can optionally make region of discharge be passed through by the characteristic light radiation that object gas produces; Light-sensitive unit only can receive the characteristic radiation that is produced by object gas, and can be converted into electric signal;
Grid electrode is arranged on two different substrates with bandpass filter, exists gas gap and light-sensitive unit and bandpass filter also to be arranged on two different substrates between the two, has gas gap between the two, perhaps:
Grid electrode and bandpass filter are arranged on the substrate and light-sensitive unit and bandpass filter also are arranged on the substrate;
Towards grid electrode one side surface, be furnished with the monodimension nanometer material of conductor or semiconductive or quasi-one-dimensional nanometer material electrode material at polarized electrode as polarized electrode;
When described polarized electrode was prepared by the original position manufacturing process, polarized electrode electrode material and substrate did not have metal level;
When described polarized electrode is not when being prepared by the original position manufacturing process, then be furnished with the metal level of single or multiple lift between polarized electrode electrode material and the substrate.
2. the gas sensor based on the gas discharge spectral analysis as claimed in claim 1, it is characterized in that, if described grid electrode and bandpass filter are arranged on the substrate, when grid electrode belonged to one or more layers film in the bandpass filter, bandpass filter was the multilayer membrane type; Perhaps grid electrode is arranged in all surfaces of bandpass filter, and perhaps, grid electrode is arranged in the part surface of bandpass filter.
3. the gas sensor based on the gas discharge spectral analysis as claimed in claim 1, it is characterized in that, if described light-sensitive unit is arranged on the substrate with bandpass filter, light-sensitive unit is arranged at the bandpass filter part surface of polarized electrode one side dorsad.
4. the gas sensor based on the gas discharge spectral analysis as claimed in claim 1, it is characterized in that, described monodimension nanometer material comprises in carbon nano-tube, silicon carbide nanometer line, metal nanometer line, metal nitride nano wire or the metal oxide nano-wire a kind of.
5. the detection method of the gas sensor based on the gas discharge spectral analysis according to claim 1, it is characterized in that, on-load voltage between polarized electrode and grid electrode, make region of discharge generation gas discharge, and the further characteristic light radiation that produces of the object gas that filter to obtain by bandpass filter, by light-sensitive unit region of discharge is converted to electric signal by the characteristic light radiation that object gas produces, detect light-sensitive unit whether electric signal output is arranged, judge having or not of object gas qualitatively, thereby realize detecting qualitatively object gas;
Under the condition that concerns between the electrical signal intensity of known light-sensitive unit output and the object gas concentration, by the electrical signal intensity of the light-sensitive unit output electrical signal intensity with the object gas of concentration known is compared, thereby realization detects object gas quantitatively;
Concern between the electrical signal intensity of described light-sensitive unit output and the object gas concentration and be meant: at first, the intensity of the pairing light-sensitive unit output of the individual object gas concentration of measuring N (N＞3) electric signal; Then data are carried out match, thereby obtain the electrical signal intensity of light-sensitive unit output and the relation between the object gas concentration.
6. the detection method of the gas sensor based on the gas discharge spectral analysis as claimed in claim 5 is characterized in that the described object gas that detects qualitatively comprises the steps:
The first step: sensor is exposed in the gas, and on-load voltage between polarized electrode and grid electrode makes region of discharge generation gas discharge;
Second step: measure the output signal of light-sensitive unit, if there is effective output signal, illustrate to have object gas, if there is no effective output signal illustrates there is not object gas that perhaps explanation exists concentration to exceed the object gas of sensitivity range.
7. the detection method of the gas sensor based on the gas discharge spectral analysis as claimed in claim 5 is characterized in that the described object gas that detects quantitatively comprises the steps:
The first step: sensor is exposed in the gas, and on-load voltage between polarized electrode and grid electrode makes region of discharge generation gas discharge;
Second step: the output signal of measuring light-sensitive unit, if there is effective output signal, contrast the electrical signal intensity of the object gas of effective output signal strength and concentration known,, determine the concentration of object gas according to the electrical signal intensity of light-sensitive unit output and the relation between the object gas concentration.
8. as the detection method of claim 6 or 7 described gas sensors based on the gas discharge spectral analysis, it is characterized in that, effective output signal of described light-sensitive unit, be meant: do not take place at region of discharge under the condition of gas discharge, the output signal of light-sensitive unit is defined as airborne signals, when the output signal of light-sensitive unit during greater than its airborne signals, the output signal of light-sensitive unit is defined as effective output signal.
9. as the detection method of claim 6 or 7 described gas sensors based on the gas discharge spectral analysis, it is characterized in that, the electrical signal intensity of described light-sensitive unit output and the relation between the object gas concentration, the method for realization is:
At first, the intensity of the pairing light-sensitive unit output of measuring N object gas concentration electric signal, N＞3;
Then data are carried out match, thereby obtain the electrical signal intensity of light-sensitive unit output and the relation between the object gas concentration;
For identical target gas species and concentration range, identical sensor, determine that this relation belongs to the process of demarcation, need not repeat before the quantitative test each time.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| TWI385030B (en) * | 2010-12-22 | 2013-02-11 | Univ Nat Chiao Tung | Microfluidic system and gas discharge method and gas reaction method thereof |
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| CN101408514A (en) | 2009-04-15 |
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