CN101350575A - Actuator - Google Patents
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- CN101350575A CN101350575A CNA2008101336635A CN200810133663A CN101350575A CN 101350575 A CN101350575 A CN 101350575A CN A2008101336635 A CNA2008101336635 A CN A2008101336635A CN 200810133663 A CN200810133663 A CN 200810133663A CN 101350575 A CN101350575 A CN 101350575A
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Abstract
The present invention discloses an actuator. A cylindrical piezoelectric element (3) is arranged to share an axis with a cylindrical vibrator (2) having different diameters at central and end portions to fix the vibrator (2) forming a gap (2a) at the central portion. Vibration voltages are applied across first electrodes (4a, 4b) on the piezoelectric element (3) and the vibrator (2), namely, a second electrode, to vibrate the vibrator (2) and bring a wave front of a traveling wave into contact with a tubular member (1), i.e., a supporting member fitted to the vibrator (2). Friction at a contact portion of the vibrator (2) moves a mover including the vibrator (2) and the piezoelectric element (3) in an axial direction of the tubular member (1). By amplifying the vibration amplitude using the vibrator (2) provided separately from the piezoelectric element (3), a small actuator capable of performing high-speed driving is realized.
Description
Technical field
The present invention relates to be used to the linear-motion actuator (linear actuator) of utilization vibration of the finger tip etc. of driving device hand.
Background technology
About using the actuator of vibrating body (vibrator) and piezoelectric element, more known configurations are such as ultrasonic motor (motor).Especially, use actuator to realize that the movement requirement of the finger tip of manipulator realizes the little straight-line motion mechanism corresponding to people's muscle.
Japan Patent publication No.4-72471 discloses a kind of structure of rotary ultrasonic ripple motor.Utilization disclosed rotation motor in Japan Patent publication No.4-72471 realize manipulator finger tip movement requirement such as screw rotate to linear motion conversion mechanism, this makes and is difficult to reduce size.
In this respect, because use the linear-motion actuator of ultrasonic vibration enough little structures to realize that straight line moves, so for the finger tip of controlling manipulator, actuator is preferred.Especially, utilize elongated tubular product such (cylindric) linear-motion actuator of the vibration of piezoelectric element can deal with the increase of the translational speed of robot, the increase of stroke (stroke) and the raising of precision.Research to such linear-motion actuator makes progress recently.
So cylindric linear-motion actuator is below described.
The ultrasonic motor and the electronic installation that comprises it of disclosed rotation and rectilinear motion integrated-type among Figure 14 A and the open No.10-210776 of 14B demonstration Japan Patent.Described ultrasonic motor comprise cylindric stator 101 with the interior of stator 101 or cylindric mover (mover) 102 that outer surface contacts.Stator 101 has cylindric piezoelectric element 103, is arranged in a plurality of polarization (polarization) electrode 104 on one of the inner surface of piezoelectric element 103 and outer surface and be provided at another lip-deep full surface electrode 107 regularly.Mover 102 is driven by the ultrasonic vibration that produces in the stator 101.In this case, can come freely to drive mover 102 to polarizing electrode 104 by applying multiple out-phase (out-of-phase) alternating voltage selectively in rotation and rectilinear direction.
Figure 15 shows disclosed ultrasonic wave line motor among the open No.5-49273 of Japan Patent.This ultrasonic wave line motor comprises: be parallel to direct of travel vibration the first piezoelectric element 203a, pass the axle 201 of the first piezoelectric element 203a and be arranged to the first piezoelectric element 203a is clipped in the middle and can control axle 201 and perpendicular to the second and the 3rd piezoelectric element 203b and 203c of direct of travel vibration.Between the first piezoelectric element 203a and axle 201, radially providing the gap.The second and the 3rd piezoelectric element 203b and 203c is set, tightens surplus (tighteningmargin) and gap so that when shrinking and expand, between the overall diameter of piezoelectric element 203b and 203c and axle 201, exist respectively.Can change actuating speed by the phase difference that change is applied to the alternating voltage of piezoelectric element.
Usually, mover or stator are vibrated as vibrating body, to produce actuating force (thrust) at direct of travel based on friction in the contact portion of mover and stator according to the oscillation actuator of relevant technologies.
In the open No.10-210776 of Japan Patent in the ultrasonic motor of disclosed rotation and rectilinear motion integrated-type, can by apply selectively multiple alternating voltage to piezoelectric element so that piezoelectric element, and freely at rotation and rectilinear direction driving mover.
In addition, in the open disclosed ultrasonic wave line motor of No.5-49273 of Japan Patent, come to realize driving in rectilinear direction by the alternating voltage that is applied to first piezoelectric element.
Yet,, therefore have following an open question because vibrating body is to construct by the piezoelectric element in the disclosed ultrasonic motor among open No.10-210776 of Japan Patent and the No.5-49273.
1) design flexibility
When designing and make the actuator of the vibration that utilizes vibrating body, the shape and the frequency of the shape of vibrating body and intrinsic vibration (natural vibration) pattern are the main design parameters that is directly connected to thrust and translational speed.Yet because piezoelectric element is a sintered body, so piezoelectric element does not have the mechanical strength of metal, and machining process is also limited for this reason.Correspondingly, in open No.10-210776 of Japan Patent and No.5-49273, in the disclosed ultrasonic motor, realize that the design flexibility of high thrust and high-speed mobile reduces with piezoelectric element formation vibrating body.
2) durability of vibrating body
In order to realize high-speed driving, vibrating body must be with quite high speed vibration in the actuator that utilizes vibration.Correspondingly, consider the durability of actuator, the material of vibrating body must can be resisted repeated deformation, and the structure optimization ground of vibrating body is simple and indestructible.In addition, consider the heat that produces in the material, the material of vibrating body must have little inside decay (damping).
Yet, in open No.10-210776 of Japan Patent and No.5-49273 in the disclosed ultrasonic motor that forms vibrating body with piezoelectric element, because vibrating body has ring (pealing) that the large-amplitude vibration of labyrinth that electrode wherein is clipped in the middle vibrating body and high frequency causes electrode, so vibrating body can not be realized high durability.In addition, because piezoelectric element has big inside decay, so large-amplitude vibration at a high speed increases quantity of heat production undesirably.
3) contact force of vibrating body
In addition, because in the actuator that utilizes vibration, produce the frictional force that is used as actuating force, so need be used to make the contact force of vibrating body maintenance near stator.If this contact force too a little less than, then frictional force is that actuating force reduces.If contact force is too strong, then described power is disturbed the vibration of vibrating body and is reduced durability undesirably.Correspondingly, it is important maintaining contact force constant in oscillation actuator.In the situation of cylindric linear-motion actuator, compensate this contact force by vibrating body with as cooperation (fit) precision of the round tube of stator.
The quality of fit of vibrating body and round tube depends on the variation of the heat that produces in the piezoelectric element and atmospheric temperature and changes significantly.Therefore, the piezoelectric of formation vibrating body preferably has the thermal coefficient of expansion that equates as far as possible each other with the material of stator or mover.Yet because round tube is made by metal etc. usually, so there is significant difference between the thermal coefficient of expansion when vibrating body is made by piezoelectric, therefore this increase influence of heat.
4) vibration amplitude of vibrating body and translational speed
Usually, the deformation ratio of piezoelectric element is substantially equal to 10
-5Correspondingly, when use has the piezoelectric element of diameter of 2mm, only cause 210
-5The distortion of mm=20nm.Because the surface roughness of piezoelectric element is much larger than 20nm, realize that therefore diameter is that the little linear motion actuator of 2mm etc. is difficult.
In addition, equal the product of driving frequency and amplitude in the translational speed of direct of travel.Therefore, little vibration amplitude value is equal to translational speed slowly.When the diameter of piezoelectric element is 2mm, the amplitude in the circumferencial direction is 20nm, and the component in the direct of travel is its 1/10 o'clock, and the translational speed of the vibrating body that drives with 50kHz is 20nm1/1050kHz=0.1mm/s, and it is quite slowly.
Vibrating body need be with large-amplitude vibration, thereby realizes high-speed mobile.Yet too big if amplitude becomes, the fluid such as air that is present in the gap that is adjacent to constriction is compressed, and its pressure makes vibrating body suspension (ultrasonic wave suspension (levitation)) undesirably.As a result, do not produce friction and can not obtain thrust in contact portion.That is, large-amplitude vibration has reduced thrust undesirably.
Summary of the invention
Consider an open question that relates in the relevant technologies, the invention provides a kind of actuator that has little and simple structure and can carry out stable high-speed driving.
According to an aspect of the present invention, the actuator that moves mover along support component comprises mover.Described mover comprises: tubulose or tabular piezoelectric element; Be provided at first electrode on the first surface of described piezoelectric element; Be provided at second electrode on the opposed surface of described first surface of described piezoelectric element; And vibrating body with the end that is fixed to described piezoelectric element and the oscillating component that between described support component and described piezoelectric element, vibrates.In described actuator, stride across (across) first electrode and second electrode and apply vibration voltage to vibrate described piezoelectric element, amplify the vibration of described piezoelectric element by described vibrating body, and described oscillating component is contacted with described support component, thereby move described mover.
Further feature of the present invention will from below with reference to accompanying drawing to the description of exemplary embodiment and become obvious.
Description of drawings
Fig. 1 is the profile that shows according to the actuator of first exemplary embodiment of the present invention.
Fig. 2 A is explanation produces the state of row ripple in an actuator shown in Figure 1 schematic diagram to 2C.
Fig. 3 A is the schematic diagram that explanation is used to make the method for actuator shown in Figure 1 to 3D.
Fig. 4 A and 4B show the profile that changes example according to first and second of first exemplary embodiment of the present invention respectively.
Fig. 5 is the profile that shows according to the actuator of second exemplary embodiment of the present invention.
Fig. 6 is the profile that shows according to the actuator of the 3rd exemplary embodiment of the present invention.
Fig. 7 is the profile that shows according to the actuator of the 4th exemplary embodiment of the present invention.
Fig. 8 A is the schematic diagram that explanation is used to the drive signal in the actuator shown in Figure 7 to 8C.
Fig. 9 A and 9B are the schematic diagrames that explanation drives the method for actuator shown in Figure 7.
Figure 10 is the profile of demonstration according to the variation example of the actuator of the 4th exemplary embodiment of the present invention.
Figure 11 is the profile that shows according to the actuator of the 5th exemplary embodiment of the present invention.
Figure 12 is the profile that shows according to the actuator of the 6th exemplary embodiment of the present invention.
Figure 13 is the profile that shows according to the actuator of the 7th exemplary embodiment of the present invention.
Figure 14 A and 14B are the schematic diagrames that shows according to the actuator of relevant technologies.
Figure 15 is the schematic diagram that shows according to the actuator of relevant technologies.
Embodiment
Exemplary embodiment of the present invention will be described with reference to the drawings.
First exemplary embodiment
Fig. 1 shows the actuator according to first exemplary embodiment of the present invention.Tubular part 1 is the cylinder-like part that works as stator.Vibrating body 2 is cylinder-like parts.The diameter of the axial central portion of vibrating body 2 is greater than the diameter of its end, and vibrating body has the shape that central portion expands.This dilation is arranged to cooperate with tubular part 1.Vibrating body 2 is by forming such as stainless metal or metal glass (metallic glass).Piezoelectric element 3 is parts cylindraceous, and is fixed on the inner surface at vibrating body 2 both ends.Between the central portion of vibrating body 2 and piezoelectric element 3, form gap 2a.
Each end at the inner surface of piezoelectric element 3 provides first electrode (segmented electrode) 4a and second electrode (segmented electrode) 4b.AC power 10a and 10b stride across the first electrode 4a and vibrating body 2 and stride across the second electrode 4b and vibrating body 2 and apply vibration voltage, thus piezoelectric element 3 vibrations.Correspondingly, vibrating body 2 also works as public electrode.By the vibration of vibrating body 2 amplifying piezo-electric elements 3, and the variation of the frictional force that produces in the contact portion of vibrating body 2 and tubular part 1 is transformed into actuating force, thus mover axially the relatively moving of involving vibrations body 2 and piezoelectric element 3 at tubular part 1.
Fig. 2 A is the schematic diagram that explanation converts the vibration of vibrating body 2 to the principle of actuating force to 2C.For the purpose of explaining, Fig. 2 A shows vibration amplitude large to 2C.With reference to figure 2A, stride across the first electrode 4a and vibrating body 2 applies sine wave oscillations voltage Va by AC power 10a.
Shown in Fig. 2 B, stride across the vibration voltage Va that the first electrode 4a and vibrating body 2 apply and cause cylindric piezoelectric element 3 vibrating by the diametric(al) shown in the arrow R1.This vibration cause vibrating body 2 with the vibration mode that has vibration amplitude in diametric(al) at the end portion vibration of vibrating body 2 near the first electrode 4a.
The vibration that produces near the end of the first electrode 4a at vibrating body 2 is changed into the capable ripple of axially advancing at vibrating body 2, and it is by the arrow R2 demonstration along vibrating body 2.This row wave amplitude because vibrating body 2 and with tubular part 1 that vibrating body 2 contact between the friction and the inside decay of vibrating body 2 and little by little diminish, and arrival vibrating body 2 is near the end of the second electrode 4b.
In this exemplary embodiment, the mover of involving vibrations body 2 and piezoelectric element 3 utilizes this row ripple axially relatively moving at tubular part 1.Usually, the ripple that its wavefront is advanced in a direction is known as capable ripple, and its wavefront is because the ripple of not advancing with the wave interference that is reflected in the end is known as standing wave.Because reflection becomes standing wave, vibration must be absorbed in the end relative with producing the vibration side in order to prevent the row ripple.
Correspondingly, as shown in Fig. 2 A, in this exemplary embodiment, AC power 10b strides across the second electrode 4b and vibrating body 2 applies sine wave oscillations voltage Vb.Vibration voltage Vb has the frequency identical with vibration voltage Va, but has different phase places and amplitude.By phase place and the amplitude of optimization vibration voltage Vb, the enough second electrode 4b sides at vibrating body 2 of above line wave energy are absorbed.That is, the row ripple is kept, and is not changed into standing wave.
Fig. 2 C is that the capable ripple of advancing along the direction of the arrow R2 schematic diagram in the principle of the mover of axially relatively move the involving vibrations body 2 and the piezoelectric element 3 of tubular part 1 is used in explanation.
With vibrating body 2 that tubular part 1 contacts in be created in the capable ripple that direction shown in the arrow R2 is advanced.The row waveguide causes vibrating body 2 and vibrates elliptically in direction shown in the arrow R3.The tubular part 1 that this oval-shaped vibration contacts with vibrating body 2 in direction promotion shown in the arrow R4 opposite with row ripple direction.By this way, tubular part 1 relatively moves with respect to vibrating body 2 in direction shown in the arrow R4.
At this moment, when the amplitude of oval-shaped vibration increased, power (actuating force) grow and the translational speed that promote tubular part 1 increased, and therefore its characteristic as actuator is preferred.In this exemplary embodiment, use the vibration of vibrating body 2 amplifying piezo-electric elements 3.At this moment, utilize the eigentone of vibrating body 2 to amplify amplitude.More particularly, if vibration is applied to part near " node (node) " of vibration mode, then because resonance and obtain sizable amplitude in part near " ring (loop) " of vibration mode.Correspondingly, frequency that can be by vibration voltage Va and Vb are set is with the natural frequency of coupling vibrating body 2, and uses resonance to increase the amplitude of the vibration of vibrating body 2.
Simultaneously, in order to change the moving direction of actuator, be opposite direction with the going direction changing of row ripple.More particularly, stride across the second electrode 4b and vibrating body 2 and apply vibration voltage Va, and stride across the first electrode 4a and vibrating body 2 applies vibration voltage Vb.
At the level and smooth R shape coupling part 2b that forms vibrating body 2 near the part of each end.Can improve durability significantly with this R shape.Because this coupling part 2b comprises the zone of the strong stress that reception is caused by the excitation force (excitation force) of piezoelectric element 3, is important so connect this zone smoothly especially.This R shape prevents that stress from concentrating on a bit, and improves the intensity of vibrating body 2.As a result, improved durability, and can be to produce vibration than large amplitude, this makes it possible to provide the actuator that can carry out high-speed driving.
Fig. 3 A is the schematic diagram that explanation is used to make the method for vibrating body 2 to 3D.
As shown in Fig. 3 A, on each end of cylindric piezoelectric element 3, place first cap 11.Each cap 11 has interior diameter and covers (mask) part 11a greater than the overall diameter of piezoelectric element 3.Cover each end that part 11a covers piezoelectric element 3.
As shown in Fig. 3 B, first cap 11 piezoelectric element 3 thereon is placed in the sputtered film depositing device (not shown) then, and forms sacrifice layer 12 in rotary piezoelectric element 3.At this moment, above-mentionedly cover part 11a because exist, so the thickness of sacrifice layer 12 little by little reduces towards end.What can dissolve in bronsted lowry acids and bases bronsted lowry can be used as the material of sacrifice layer 12 such as the metal of aluminium and the macromolecular material that can dissolve in organic solvent.
As shown in Fig. 3 C, on each end of piezoelectric element 3, place second cap 13 then.In rotary piezoelectric element 3, on sacrifice layer 12, form film as vibrating body 2.As the material of vibrating body 2, the material of highly resisting the stress that applies repeatedly is preferred.For example, the material of the material of stainless series or metal glass series is preferred.Especially, metal glass is made up of the amorphous metal atom.Because metal glass is an amorphous, so metal glass shows the high-durability that is different from common metal.More particularly, amorphous has high rigidity and can improve wear resistence.In addition, make tubular part 1 with metal glass and can improve wear resistence.As a result, can realize having the actuator of much higher durability.
As shown in Fig. 3 D, dissolve sacrifice layer 12 then between vibrating body 2 and piezoelectric element 3, to form gap 2a.At this moment, in order to make the solvent be used to dissolve sacrifice layer 12 contact, can use the vibrating body 2 that has with a plurality of micropores of formation such as laser with sacrifice layer 12.Owing to even the air in the gap that is present in contiguous contact portion is compressed, in vibrating body 2, forms the hole and also allow compressed air to escape, so pressure does not increase by the hole.Correspondingly, can prevent the suspension of vibrating body 2.As a result, though vibrating body 2 with large-amplitude vibration, thrust does not reduce yet.
Can be by making vibrating body 2 by this way, and form the coupling part 2b of vibrating body 2 and piezoelectric element 3 with level and smooth R shape.
Although vibrating body 2 can provide the conductive film as public electrode as public electrode on a side of piezoelectric element 3 in this exemplary embodiment.Yet, because when the vibrating body 2 of conduction is used as public electrode, can omit an electrode, so can simplified structure.
In addition, can be with enough soft and material that do not influence the vibration of vibrating body 2 is filled the gap between vibrating body 2 and the piezoelectric element 3.As such soft material, the silicon rubber with soft is preferred.Stayed according to present appearance if be used as sacrifice layer 12 and sacrifice layer, then make and become easier and advantageously reduced cost, because do not need to remove the step of sacrifice layer 12 at the such soft material of above-mentioned manufacturing step.
If the vibration of respond vibration body 2 makes vibrating body 2 partly contact and not contact with the tubular part 1 that is used as support component repeatedly, then air pressure can prevent that vibrating body 2 from contacting with tubular part 1.This phenomenon is known as ultrasonic wave and suspends.The a plurality of micropores that form in the vibrating body 2 can prevent that this ultrasonic wave from suspending.
Change example 1
As shown in Fig. 4 A, replace using the vibrating body 2 that is formed with micropore thereon, on piezoelectric element 3, form hole 3a in advance, and can use and sacrifice layer 12 identical materials filler opening 3a.Be connected to the passage that will be connected to refrigerant cycle pump 5 by the hole 3a that will be provided on the piezoelectric element 3, cold-producing medium can be by gap 2a circulation.If piezoelectric element 3 is with high speed and large-amplitude vibration, then the heat that produces increases.By introducing cold-producing medium, can remove this heat to the gap 2a between piezoelectric element 3 and the vibrating body 2.As a result, can suppress the rising of the temperature of piezoelectric element 3 and vibrating body 2.
Change example 2
The contact portion of vibrating body 2 and tubular part 1 needs not to be smooth.Vibrating body 2 can be the shape of ripple (corrugated) plate with the waveform portion 2c shown in Fig. 4 B.Can be by forming netted covering when the deposition of sacrificial layer 12 and easily make the vibrating body 2 of corrugated plating shape.
During the vibration of vibrating body 2, the pressure that is present in the air between vibrating body 2 and the tubular part 1 suspends vibrating body 2.That is, cause that so-called ultrasonic wave suspends.Yet owing to even the air in the gap that is present in contiguous contact portion is compressed, the corrugated plating of vibrating body 2 also allows compressed air to escape from the groove of corrugated plating, so pressure does not increase.Correspondingly, can prevent the suspension of vibrating body 2.As a result, though vibrating body 2 with large-amplitude vibration, thrust does not reduce yet.
Second exemplary embodiment
Fig. 5 is the profile that shows according to the actuator of second exemplary embodiment of the present invention.Later with reference to the Fig. 1 that shows according to the actuator of first exemplary embodiment, the mover of involving vibrations body 2 and piezoelectric element 3 relatively moves in tubular part 1 inside.On the other hand, in this exemplary embodiment, comprise that the mover of cylindric vibrating body 22 and piezoelectric element 23 relatively moves in the outside that is the tubular part 21 of solid tubes.
Vibrating body 22 is cylinder-like parts.Axially the diameter of central portion is less than the diameter of end.Vibrating body 22 is that wherein central portion is the shape of spill.This concave portions is arranged to cooperate with tubular part 21.Piezoelectric element 23 is cylinder-like parts, and is fixed on the outer surface at vibrating body 22 both ends.Between the central portion of vibrating body 22 and piezoelectric element 23, form gap 22a.
Each end at the outer surface of piezoelectric element 23 provides first electrode (segmented electrode) 24a and second electrode (segmented electrode) 24b.AC power 20a and 20b stride across the first electrode 24a and vibrating body 22 and stride across the second electrode 24b and vibrating body 22 applies vibration voltage Va and Vb respectively, thus piezoelectric element 23 vibrations.Correspondingly, vibrating body 22 also works as public electrode.Vibration by vibrating body 22 amplifying piezo-electric elements 23, and the variation of the frictional force that produces in the contact portion of vibrating body 22 and tubular part 21 is transformed into actuating force, thereby mover axially the relatively moving of involving vibrations body 22 and piezoelectric element 23 at tubular part 21.
Simultaneously, because in this exemplary embodiment, adopt the driving method identical, so the descriptions thereof are omitted here with first exemplary embodiment.In addition, this exemplary embodiment provides the advantage that is similar to first exemplary embodiment.
The 3rd exemplary embodiment
Fig. 6 is the profile that shows according to the actuator of the 3rd exemplary embodiment of the present invention.In this exemplary embodiment, use as the plate body 31 of plate-like support member and the mover that comprises tabular vibrating body 32 and tabular piezoelectric element 33.The both ends of vibrating body 32 all are fixed to piezoelectric element 33.Form gap 32a at central portion as oscillating component.
The smooth connection part 32b of tabular vibrating body 32 is connected to piezoelectric element 33 in the part near each end.The R shape of coupling part 32b can be improved durability significantly.The central portion of vibrating body 32 contacts with plate body 31.Here, the direction of supposing gravity is downward direction.At this moment, because vibrating body 32 is because its weight is crushed on the plate body 31, so vibrating body 32 is not suspended, and contact condition is kept.
As in the situation of above-mentioned first exemplary embodiment, on each end of piezoelectric element 33, provide the first electrode 34a and the second electrode 34b.AC power 30a and 30b stride across the first electrode 34a and vibrating body 32 and stride across the second electrode 34b and vibrating body 32 applies vibration voltage Va and Vb respectively, thus piezoelectric element 33 vibrations.The vibration of the piezoelectric element 33 that produces by vibration voltage Va and Vb is transferred to vibrating body 32, and produces the row ripple in vibrating body 32.Vibrating body 32 moves with respect to the plate body 31 that contacts with vibrating body 32.
According to this exemplary embodiment, because can constitute support component, so can make vibrating body 32 by using simply such as the film deposition method of sputter by plate-shaped member.In addition, the power that can utilize is not only above-mentioned gravity, and the power that produces with spring and magnet also can be used as and be used to the pressure that keeps vibrating body 32 to contact with the plate body 31 that is used as support component.
The 4th exemplary embodiment
To Fig. 9 B the 4th exemplary embodiment of the present invention is described referring now to Fig. 7.In this exemplary embodiment, will the configuration that replace the capable ripple that utilizes in first exemplary embodiment and utilize the linear-motion actuator of standing wave be described.To Fig. 9 B, for giving same or analogous numeral with total parts shown in Figure 1, and the descriptions thereof are omitted from Fig. 7.
Difference between Fig. 7 and Fig. 1 is that the first electrode 4a and the second electrode 4b are replaced with the electrode on the inner surface that is formed on piezoelectric element 3 among Fig. 74.In addition, the vibration voltage V2 of the vibration voltage V1 of AC power 40a and AC power 40b is by add circuit 6 synthetic (combine), and quilt is striden across vibrating body 2 and electrode 4 applies as the 3rd vibration voltage V3.Correspondingly, the 3rd vibration voltage V3 is applied to the two ends of vibrating body 2.
The principle at the mover of axially relatively move the involving vibrations body 2 and the piezoelectric element 3 of tubular part 1 as the vibration voltage V3 of standing wave will describe be used.
If AC power 40a strides across vibrating body 2 and electrode 4 applies the first vibration voltage V1 shown in Fig. 8 A, then piezoelectric element 3 vibrates in diametric(al).The first vibration voltage V1 with frequency (intermittently) fluctuation off and on of the natural frequency of vibrating body 2 coupling.As shown in Fig. 9 A, this propagation of vibrating vibrating body 2 makes vibrating body 2 vibrations, and is created in the standing wave that diametric(al) fluctuates with the vibration mode with vibration amplitude.This standing wave is the eigentone of vibrating body 2, with predetermined frequency resonance, and can provide big amplitude.Based on this vibration, make the tubular part 1 on the outside that is arranged in vibrating body 2 contact and not contact repeatedly with vibrating body 2.
If AC power 40b strides across vibrating body 2 and electrode 4 applies the second vibration voltage V2 shown in Fig. 8 B, arrow Ra shown in then piezoelectric element 3 is not only distinguished in diametric(al) but also in Fig. 9 A and 9B and the axial deformation shown in the Rb.Piezoelectric element 3 repeats in the motion of arrow Ra direction expansion and the motion of shrinking in arrow Rb direction.
Correspondingly, if when piezoelectric element 3 is caused in the expansion of the direction of arrow Ra by the second vibration voltage V2, apply the first vibration voltage V1, then make vibrating body 2 contact, and tubular part 1 can be pushed by frictional force in the direction of arrow Ra with tubular part 1.On the contrary, if the level of the first vibration voltage V1 is lowered, diminish so that vibration amplitude is caused when the direction of arrow Rb is shunk by the second vibration voltage V2 at piezoelectric element 3, then the frictional force between vibrating body 2 and the tubular part 1 becomes considerably little, and tubular part 1 is held fixing.
Correspondingly, by applying the 3rd vibration voltage V3 that passes through synthetic first vibration voltage V1 and second vibration voltage V2 acquisition shown in Fig. 8 C, repeat the state shown in Fig. 9 A and the 9B.This is at the mover of axially relatively move the involving vibrations body 2 and the piezoelectric element 3 of tubular part 1.
Simultaneously, using two kinds of vibration voltage V1 and V2 to vibrate in the method for piezoelectric element 3, can replace using above-mentioned the 3rd vibration voltage V3 and apply vibration voltage V1 and V2 individually.In this case, as shown in Figure 10, actuator must be disposed so that vibration voltage V1 and V2 can be applied to electrode 4 respectively.
In order to change the moving direction of actuator, when the direction of arrow Rb is shunk, apply the first vibration voltage V1 at piezoelectric element 3, and the level of the first vibration voltage V1 when expanding, the direction of arrow Ra is lowered at piezoelectric element 3.Correspondingly, can change moving direction by the phase place that changes two kinds of vibration voltage V1 and V2.
The 5th exemplary embodiment
Figure 11 is the profile that shows according to the actuator of the 5th exemplary embodiment of the present invention.Difference between this exemplary embodiment and the 4th exemplary embodiment is that electrode 4 is divided into three sections.As shown in Figure 11, two electrode (segmented electrode) 44a and 44b is positioned at each end and electrode (segmented electrode) 44c is positioned at central portion.
The vibration voltage V1 that applies AC power 50a is to electrode 44a and 44b.The vibration voltage V2 that applies AC power 50b is to the electrode 44c that is positioned at central portion.If caused in axial shrinkage by vibration voltage V2 at piezoelectric element 3 vibration voltage V1 is applied to both ends, then vibrating body 2 is vibrated and the wavefront contact tubular part 1 of standing wave.By repeating this action, mover axially the relatively moving of involving vibrations body 2 and piezoelectric element 3 at tubular part 1.
The 6th exemplary embodiment
Figure 12 is the profile that shows according to the actuator of the 6th exemplary embodiment of the present invention.Be different from above-mentioned the 4th exemplary embodiment, electrode 4 is divided into two sections in this exemplary embodiment.As shown in Figure 12, two electrode (segmented electrode) 54a and 54b are provided at each end.In addition, between vibrating body 2 and piezoelectric element 3, provide public electrode 7.
Corresponding vibration voltage V1 and V2 with AC power 60a and 60b is applied to electrode 54b and 54a respectively.If caused in axial shrinkage by vibration voltage V2 at piezoelectric element 3 vibration voltage V1 is applied to both ends, then vibrating body 2 is vibrated and the wavefront contact tubular part 1 of standing wave.By repeating this action, mover axially the relatively moving of involving vibrations body 2 and piezoelectric element 3 at tubular part 1.
Provide public electrode 7 because being independent of vibrating body 2, the low electrical resistant material of copper and gold etc. forms electrode so for example can use.Because can suppress owing to flowing through the generation of the heat that electric current caused of electrode, so advantageously suppressed the rising of temperature.
The 7th exemplary embodiment
Figure 13 is the profile that shows according to the actuator of the 7th exemplary embodiment of the present invention.In this exemplary embodiment, be truncated into half according to the involving vibrations body 2 of the 4th exemplary embodiment and the mover of piezoelectric element 3 at place, plane perpendicular to axle, cause vibrating body 2, piezoelectric element 3, electrode 4 and gap 2a.Adopt the driving method identical with the 4th exemplary embodiment.
Although reference example embodiment has described the present invention, it being understood that to the invention is not restricted to disclosed exemplary embodiment.The scope of the claim of enclosing should be endowed the widest explanation to comprise all modifications and equivalent configurations and function.
Claims (14)
1, a kind ofly move the actuator of mover, comprising along support component:
Support component;
Be arranged to the mover that relatively moves along described support component, described mover comprises:
Piezoelectric element,
Be provided at first electrode at place, end of the first surface of described piezoelectric element,
Be provided at described piezoelectric element described first surface place, another end second electrode and
Vibrating body, one end of wherein said vibrating body is fixed to the opposed surface of the described first surface of described piezoelectric element, the other end of described vibrating body is fixed to the described opposed surface of the described first surface of described piezoelectric element, and the central portion of described vibrating body is arranged to contact with described support component; With
Be arranged to voltage is applied to the supply unit of described first electrode, described second electrode and described vibrating body,
Wherein stride across described first electrode and described vibrating body and stride across described second electrode and described vibrating body applies described voltage to vibrate described piezoelectric element, amplify the vibration of described piezoelectric element by described vibrating body, and by described vibrating body the vibration transmission of amplifying is arrived described support component, thereby move described mover along described support component.
2, actuator according to claim 1, wherein said support component is a tubular part, described piezoelectric element is a tubular part, described vibrating body is the tubular part that is positioned at the outside of described piezoelectric element, and comprises that the described mover of described vibrating body and described piezoelectric element moves at the axial inner surface along described support component of described support component.
3, actuator according to claim 1, wherein said support component is cylinder-like part or columnar component, described piezoelectric element is a tubular part, described vibrating body is the tubular part that is positioned at the inboard of described piezoelectric element, and comprises that the described mover of described vibrating body and described piezoelectric element moves at the axial outer surface along described support component of described support component.
4, actuator according to claim 1, wherein said support component is a plate-shaped member, described piezoelectric element is a plate-shaped member, described vibrating body is the plate-shaped member between described support component and described piezoelectric element, and the described mover that comprises described vibrating body and described piezoelectric element moves along the upper surface of described support component.
5, according to each described actuator of claim 2 to 4, wherein described mover is moved in the friction that produces by the contact site office at the wavefront of described support component and described mover.
6, according to each described actuator of claim 2 to 4, the described vibration of wherein said piezoelectric element is by striding across described first electrode and described vibrating body and striding across described second electrode and described vibrating body applies and has same frequency but the vibration voltage of out of phase and amplitude and the capable ripple that produces in the office, vibration section of described vibrating body.
7, according to each described actuator of claim 2 to 4, the described vibration of wherein said piezoelectric element is by striding across described first electrode and described vibrating body and striding across described second electrode and described vibrating body alternately applies the composite wave of first vibration voltage and second vibration voltage intermittently and the standing wave that produces in the office, vibration section of described vibrating body, described first vibration voltage makes described piezoelectric element in axial shrinkage, and second vibration voltage at described intermittence has the frequency identical with the natural frequency of described vibrating body in the increase of described first vibration voltage or when reducing.
8, according to each described actuator of claim 2 to 4, the described vibration of wherein said piezoelectric element is by striding across described first electrode and described vibrating body and striding across described second electrode and described vibrating body alternately applies first vibration voltage and second vibration voltage intermittently and the standing wave that produces in the office, vibration section of described vibrating body, described first vibration voltage makes described piezoelectric element in axial shrinkage, and second vibration voltage at described intermittence has the frequency identical with the natural frequency of described vibrating body in the increase of described first vibration voltage or when reducing.
9, according to each described actuator of claim 2 to 4, wherein said first electrode and described second electrode are integrated into single electrode, and
Wherein apply the composite wave of first vibration voltage and second vibration voltage intermittently and produce standing wave in the office, vibration section of described vibrating body by striding across single integrated electrode and described vibrating body, described first vibration voltage makes described piezoelectric element in axial shrinkage, and second vibration voltage at described intermittence has the frequency identical with the natural frequency of described vibrating body in the increase of described first vibration voltage or when reducing.
10,, wherein in described vibrating body, provide a plurality of micropores according to each described actuator of claim 2 to 4.
11, according to each described actuator of claim 2 to 4, wherein said vibrating body is the shape of corrugated plating.
12,, wherein fill the oscillating component of described vibrating body and the part between the described piezoelectric element with soft material according to each described actuator of claim 2 to 4.
13,, wherein provide the plumbing installation that is arranged to that cold-producing medium is incorporated into the oscillating component of described vibrating body and the part between the described piezoelectric element and makes described refrigerant cycle according to each described actuator of claim 2 to 4.
14, according to each described actuator of claim 2 to 4, the oscillating component of wherein said vibrating body or described support component are formed by metal glass.
Applications Claiming Priority (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2007-189001 | 2007-07-20 | ||
| JP2007189001 | 2007-07-20 | ||
| JP2007189001 | 2007-07-20 | ||
| JP2008-155357 | 2008-06-13 | ||
| JP2008155357A JP5159452B2 (en) | 2007-07-20 | 2008-06-13 | Actuator |
| JP2008155357 | 2008-06-13 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101350575A true CN101350575A (en) | 2009-01-21 |
| CN101350575B CN101350575B (en) | 2011-05-18 |
Family
ID=40269208
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN2008101336635A Expired - Fee Related CN101350575B (en) | 2007-07-20 | 2008-07-18 | Actuator |
Country Status (2)
| Country | Link |
|---|---|
| JP (1) | JP5159452B2 (en) |
| CN (1) | CN101350575B (en) |
Cited By (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102395939A (en) * | 2009-04-21 | 2012-03-28 | 摩托罗拉移动公司 | Methods and devices for consistency of the haptic response across a touch sensitive device |
| CN102525378A (en) * | 2012-02-02 | 2012-07-04 | 重庆理工大学 | Micro-robot driven by ciliary vibration |
| CN103856100A (en) * | 2012-12-03 | 2014-06-11 | 三星电机株式会社 | Apparatus for generating vibrations |
| CN107547005A (en) * | 2017-09-14 | 2018-01-05 | 苏州迈客荣自动化技术有限公司 | A kind of novel piezo-electric ceramic actuator |
| CN110690832A (en) * | 2018-07-06 | 2020-01-14 | 成都理想境界科技有限公司 | Piezoelectric actuator, optical fiber scanning module and projection equipment |
| CN111120426A (en) * | 2018-10-31 | 2020-05-08 | 精工电子有限公司 | Thrust force amplification device |
| CN111306400A (en) * | 2019-12-28 | 2020-06-19 | 邦瓷电子科技(盐城)有限责任公司 | Piezoelectric type pipeline crawling robot |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP6501977B2 (en) * | 2015-12-21 | 2019-04-17 | コーニンクレッカ フィリップス エヌ ヴェＫｏｎｉｎｋｌｉｊｋｅ Ｐｈｉｌｉｐｓ Ｎ．Ｖ． | Actuator device based on electroactive polymer |
| JP2017118040A (en) * | 2015-12-25 | 2017-06-29 | 日本特殊陶業株式会社 | Piezoelectric actuator |
| CH713460A2 (en) * | 2017-02-15 | 2018-08-15 | Digi Sens Ag | Swing string sensor and swinging string for a swinging string sensor. |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH07274559A (en) * | 1994-03-30 | 1995-10-20 | Fanuc Ltd | Piezoelectric type linear actuator |
| JPH0880068A (en) * | 1994-09-02 | 1996-03-22 | Nikon Corp | Ultrasonic actuator |
| JPH10210776A (en) * | 1997-01-27 | 1998-08-07 | Toshiba Corp | Direct rotary drive integrated ultrasonic motor and electronic apparatus incorporating it |
| JP2005153110A (en) * | 2003-11-27 | 2005-06-16 | Olympus Corp | Electrostatic actuator |
| JP4072518B2 (en) * | 2004-06-09 | 2008-04-09 | キヤノン株式会社 | Vibration wave drive |
| JP2007116889A (en) * | 2005-09-22 | 2007-05-10 | Canon Inc | Actuator by inchworm drive |
-
2008
- 2008-06-13 JP JP2008155357A patent/JP5159452B2/en not_active Expired - Fee Related
- 2008-07-18 CN CN2008101336635A patent/CN101350575B/en not_active Expired - Fee Related
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102395939A (en) * | 2009-04-21 | 2012-03-28 | 摩托罗拉移动公司 | Methods and devices for consistency of the haptic response across a touch sensitive device |
| US9164584B2 (en) | 2009-04-21 | 2015-10-20 | Google Technology Holdings LLC | Methods and devices for consistency of the haptic response across a touch sensitive device |
| CN102525378A (en) * | 2012-02-02 | 2012-07-04 | 重庆理工大学 | Micro-robot driven by ciliary vibration |
| CN102525378B (en) * | 2012-02-02 | 2014-01-01 | 重庆理工大学 | Micro-robot driven by ciliary vibration |
| CN103856100A (en) * | 2012-12-03 | 2014-06-11 | 三星电机株式会社 | Apparatus for generating vibrations |
| CN103856100B (en) * | 2012-12-03 | 2016-09-21 | Mplus株式会社 | Apparatus for generating vibrations |
| CN107547005A (en) * | 2017-09-14 | 2018-01-05 | 苏州迈客荣自动化技术有限公司 | A kind of novel piezo-electric ceramic actuator |
| CN110690832A (en) * | 2018-07-06 | 2020-01-14 | 成都理想境界科技有限公司 | Piezoelectric actuator, optical fiber scanning module and projection equipment |
| CN110690832B (en) * | 2018-07-06 | 2021-06-01 | 成都理想境界科技有限公司 | Piezoelectric actuator, optical fiber scanning module and projection equipment |
| CN111120426A (en) * | 2018-10-31 | 2020-05-08 | 精工电子有限公司 | Thrust force amplification device |
| CN111120426B (en) * | 2018-10-31 | 2023-06-30 | 精工电子有限公司 | Thrust amplifying device |
| CN111306400A (en) * | 2019-12-28 | 2020-06-19 | 邦瓷电子科技(盐城)有限责任公司 | Piezoelectric type pipeline crawling robot |
| CN111306400B (en) * | 2019-12-28 | 2022-02-11 | 邦瓷电子科技(盐城)有限责任公司 | Piezoelectric type pipeline crawling robot |
Also Published As
| Publication number | Publication date |
|---|---|
| JP2009050146A (en) | 2009-03-05 |
| CN101350575B (en) | 2011-05-18 |
| JP5159452B2 (en) | 2013-03-06 |
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