CN101236886A - Selection method and system for bridge connection storage - Google Patents
Selection method and system for bridge connection storage Download PDFInfo
- Publication number
- CN101236886A CN101236886A CNA2007100047402A CN200710004740A CN101236886A CN 101236886 A CN101236886 A CN 101236886A CN A2007100047402 A CNA2007100047402 A CN A2007100047402A CN 200710004740 A CN200710004740 A CN 200710004740A CN 101236886 A CN101236886 A CN 101236886A
- Authority
- CN
- China
- Prior art keywords
- mentioned
- bridge connection
- connection storage
- group
- factory
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003860 storage Methods 0.000 title claims abstract description 263
- 238000010187 selection method Methods 0.000 title 1
- 230000005540 biological transmission Effects 0.000 claims abstract description 92
- 239000000463 material Substances 0.000 claims description 14
- 230000014759 maintenance of location Effects 0.000 claims description 13
- 238000000034 method Methods 0.000 abstract description 6
- 238000004519 manufacturing process Methods 0.000 description 14
- 239000000725 suspension Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 230000018199 S phase Effects 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 230000003749 cleanliness Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
Images
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
- Y02P90/00—Enabling technologies with a potential contribution to greenhouse gas [GHG] emissions mitigation
- Y02P90/02—Total factory control, e.g. smart factories, flexible manufacturing systems [FMS] or integrated manufacturing systems [IMS]
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a choice method for a bridge storage, wherein, at first, according to layout schemes of a plurality of equipment of a first wafer factory and a second wafer factory, the plurality of equipment are classified into a plurality of groups; a bridge storage group corresponding to a cross-factory transmission route is designated; a start point and an end point of the cross-factory transmission route are the groups in different factories respectively; when a cross-factory transmission command is received, wherein, a start point equipment and an end point equipment of the cross-factory transmission command belong to the start point and the end point of the cross-factory transmission route respectively; real-time information of the bridge storage group, which correspond to the cross-factory transmission route, is obtained; according to the obtained real-time information, one of the bridge storage groups is chosen to be a proper bridge storage for transferring a wafer transmission box designated by the cross-factory transmission command.
Description
Technical field
The invention relates to the material allocation technology, and be particularly to select stride the method and system of the best bridge connection storage of factory's transmission.
Background technology
Traditionally, the cart type system of when thing is carried, adopting of wafer manufactory (wafer Fab).But during with person's wafer chi by 6 o'clock, 8 o'clock, increase is 12 o'clock, each fills the wafer transfer box (wafer casette) of 25 wafer (wafer), front open type closed box (front opened unified pod for example, be called for short FOUP), weighed 8.2 kilograms, a dead lift can't be loaded.Add the consideration of factors such as the yield (yieldrate) of product and cleanliness factor, so the material allocation system of automation (AutomatedMaterial Handling System is called for short AMHS) generally is applied to wafer factory in recent years.
The automated material handling system comprises roof suspension type carrier (overhead hoist shuttle, abbreviation OHS), roof suspension type transportation utensil (overhead hoist transport, abbreviation OHT), rail mounted transportation utensil (rail guided Vehicle, be called for short RGV) and automated warehousing (stocker is called for short STK).At present existing full-automatic single wafer factory.Even but enterprise or tissue have two adjacent wafer factories, and wherein have the identical semiconductor fabrication processing equipment of part, this two in semiconductor fabrication, remain separately and independently carry out.When wherein system's generation problem of a wafer factory maybe needs to maintain, even another wafer factory has identical system also not have the mechanism of automation to support, total therefore reduce the quantum of output of semiconductor product.
In order to reach the effect of comprehensive automation, it is extremely important that the setting of automated material handling system just becomes, and target wherein is that to allow these system's phase interworkings reach factory unmanned, and make when a system generation problem, can allow produce and not interrupt by another system's catcher.
Summary of the invention
In view of this, purpose of the present invention is provided when providing two wafer factories to support mutually by the method and system of bridge connection storage.
Based on above-mentioned purpose, the embodiment of the invention provides a kind of system of selection of bridge connection storage, in order to the bridge connection storage of selecting to be fit to from a plurality of bridge connection storages, with at least one wafer transfer box of transhipment between the first wafer factory and the second wafer factory.At first, the layout type of a plurality of equipment of above-mentioned first and second wafer factory of foundation is a plurality of groups with above-mentioned a plurality of device classes.The bridge connection storage group of factory's transmission route correspondence is striden in appointment one.Above-mentioned starting point and terminal point of striding factory's transmission route is respectively first group and second group, and wherein above-mentioned first group is positioned at wherein one of above-mentioned first and second wafer factory, and above-mentioned second group is positioned at wherein another person of above-mentioned first and second wafer factory.When receive corresponding above-mentioned stride factory's transmission route stride factory's transmission command the time, wherein above-mentioned stride factory's transmission command play point device and end device belongs to above-mentioned first group and above-mentioned second group respectively, obtain above-mentioned real time information of striding the above-mentioned bridge connection storage group of factory's transmission route correspondence.According to the above-mentioned real time information that obtains with select above-mentioned bridge connection storage group wherein one as above-mentioned suitable bridge connection storage, to transport above-mentioned wafer transfer box of striding factory's transmission command appointment.
In addition, the embodiment of the invention provides a kind of selective system of bridge connection storage, comprises a plurality of bridge connection storages and a control system.Above-mentioned a plurality of bridge connection storage is in order at least one wafer transfer box of transhipment between the first wafer factory and the second wafer factory.A plurality of equipment of above-mentioned first and second wafer factory are classified as a plurality of groups according to layout type.One strides the designated corresponding bridge connection storage of factory's transmission route group.Wherein above-mentioned starting point and terminal point of striding factory's transmission route is respectively first group and second group, wherein above-mentioned first group is positioned at wherein one of above-mentioned first and second wafer factory, and above-mentioned second group is positioned at wherein another person of above-mentioned first and second wafer factory.The bridge connection storage of above-mentioned control system in order to from above-mentioned a plurality of bridge connection storages, to select to be fit to, when receive corresponding above-mentioned stride factory's transmission route stride factory's transmission command the time, a wherein above-mentioned point device and end device of striding factory's transmission command belongs to above-mentioned first group and above-mentioned second group respectively, obtain above-mentioned real time information of striding the above-mentioned bridge connection storage group of factory's transmission route correspondence, and according to the above-mentioned real time information that obtains with select above-mentioned bridge connection storage group wherein one as above-mentioned suitable bridge connection storage, to transport above-mentioned wafer transfer box of striding factory's transmission command appointment.
In addition, the embodiment of the invention also provides a kind of system of selection of bridge connection storage, in order to the bridge connection storage of from a plurality of bridge connection storages, selecting to be fit to, with at least one wafer transfer box of transhipment between the first wafer factory and the second wafer factory, comprise: the layout type of a plurality of equipment of above-mentioned first and second wafer factory of foundation is a plurality of groups with above-mentioned a plurality of device classes; Specify between two groups the one bridge connection storage group of striding factory's transmission route correspondence according to above-mentioned a plurality of groups, wherein above-mentioned starting point and terminal point of striding factory's transmission route is respectively first group and second group, wherein above-mentioned first group is positioned at wherein one of above-mentioned first and second wafer factory, and above-mentioned second group is positioned at wherein another person of above-mentioned first and second wafer factory; Store the predetermined information of above-mentioned bridge connection storage group, comprise the corresponding above-mentioned priority of factory's transmission route and a plurality of weighted values of each bridge connection storage of striding of each bridge connection storage of above-mentioned bridge connection storage group; When receive corresponding above-mentioned stride factory's transmission route stride factory's transmission command the time, a wherein above-mentioned point device and end device of striding factory's transmission command belongs to above-mentioned first group and above-mentioned second group respectively, obtain above-mentioned real time information of striding the above-mentioned bridge connection storage group of factory's transmission route correspondence, comprise the pending order quantity and the storage space use amount of each bridge connection storage in the above-mentioned bridge connection storage group; And the key value that calculates each bridge connection storage of above-mentioned bridge connection storage group, wherein, the priority of i bridge connection storage of above-mentioned bridge connection storage group is P (i), and pending order quantity is C (i), and the storage space use amount is S (i), a plurality of weighted value w
1(i) w
2(i) w
3(i), wherein i is a positive integer, and then the key value R (i) of above-mentioned i bridge connection storage is:
R (i)=P (i) * w
1(i)+C (i) * w
2(i)+S (i) * w
3(i); And the bridge connection storage of selecting key value minimum in the above-mentioned bridge connection storage group is as above-mentioned suitable bridge connection storage, to transport above-mentioned this wafer transfer box of striding factory's transmission command appointment.
In addition, the embodiment of the invention also provides a kind of selective system of bridge connection storage, comprise: a plurality of bridge connection storages, in order at least one wafer transfer box of transhipment between the first wafer factory and the second wafer factory, a plurality of equipment of wherein above-mentioned first and second wafer factory are classified as a plurality of groups according to layout type, one strides the designated corresponding bridge connection storage of factory's transmission route group between two groups of above-mentioned a plurality of groups, wherein above-mentioned starting point and terminal point of striding factory's transmission route is respectively first group and second group, wherein above-mentioned first group is positioned at wherein one of above-mentioned first and second wafer factory, and above-mentioned second group is positioned at wherein another person of above-mentioned first and second wafer factory; And control system, in order to the bridge connection storage of from above-mentioned a plurality of bridge connection storages, selecting to be fit to, above-mentioned control system stores the predetermined information of above-mentioned bridge connection storage group in advance, the corresponding above-mentioned priority of factory's transmission route and a plurality of weighted values of each bridge connection storage of striding of each bridge connection storage that comprise above-mentioned bridge connection storage group, when receive corresponding above-mentioned stride factory's transmission route stride factory's transmission command the time, a wherein above-mentioned point device and end device of striding factory's transmission command belongs to above-mentioned first group and above-mentioned second group respectively, obtain above-mentioned real time information of striding the above-mentioned bridge connection storage group of factory's transmission route correspondence, the pending order quantity and the storage space use amount that comprise each bridge connection storage in the above-mentioned bridge connection storage group, and the key value that calculates each bridge connection storage of above-mentioned bridge connection storage group, wherein, the priority of i bridge connection storage of above-mentioned bridge connection storage group is P (i), pending order quantity is C (i), the storage space use amount is S (i), a plurality of weighted value w
1(i) w
2(i) w
3(i), wherein i is a positive integer, and then the key value R (i) of above-mentioned i bridge connection storage is: R (i)=P (i) * w
1(i)+C (i) * w
2(i)+S (i) * w
3(i); And wherein above-mentioned control system selects the bridge connection storage of key value minimum in the above-mentioned bridge connection storage group as above-mentioned suitable bridge connection storage, to transport above-mentioned this wafer transfer box of striding factory's transmission command appointment.
Description of drawings
Fig. 1 shows the schematic diagram with two wafer factories of striding factory's transmittability;
Fig. 2 shows the schematic diagram of above-mentioned two wafer factories and a plurality of bridge connection storages;
Fig. 3 shows the flow chart of the pre-process of selecting bridge connection storage;
Fig. 4 shows the schematic diagram of a plurality of facility group in above-mentioned two wafer factories; And
Fig. 5 shows the flow chart of embodiment of the system of selection of bridge connection storage.
[main element label declaration]
20-23～bridge connection storage; 24～roof suspension type carrier (OHS); 25～roof suspension type transportation utensil (OHT); 26～track; 101～wafer factory; 102～wafer factory; 103～passage; 104～MCS; 105～MCS; 211～input port; 212～output port; Bay_A1～facility group of wafer factory; Bay_B1～facility group of wafer factory; Block_A1～facility group of wafer factory; Block_B1～facility group of wafer factory; STK_2～automated warehousing; STK_3～automated warehousing; STK_5～automated warehousing; Tool_1～fabrication tool; Tool_2～fabrication tool; Tool_4～fabrication tool; Tool_5～fabrication tool; Tool_7～fabrication tool; Tool_9～fabrication tool.
Embodiment
Below explanation is preferred embodiment of the present invention.Its objective is to illustrate the general principle of the present invention, should not be considered as restriction of the present invention, scope of the present invention when with claim the person of being defined be as the criterion.
The system of selection and the system of bridge connection storage are below proposed.Fig. 1 shows the schematic diagram with two wafer factories of striding factory's transmittability.In Fig. 1, wafer factory 101 is adjacent with the position of wafer factory 102, wherein channel 103 provides automatic mechanism to transport material between wafer factory 101 and wafer factory 102, the material of promptly carrying wafer factory 101 to the material of wafer factory 102 and carrying wafer factory 102 to wafer factory 101.Above-mentioned material comprises wafer transfer box, for example front open type closed box (front opened unified pod is called for short FOUP).
With reference to Fig. 2, path 10 3 can utilize a plurality of automated warehousings (stocker) to do in fact, is called bridge connection storage (relay stocker), for example bridge connection storage 20-23.Bridge connection storage (for example bridge connection storage 21 and 22) can be arranged between wafer factory 101 and the wafer factory 102, or wherein one.For instance, bridge connection storage 20 is arranged at wafer factory 101, and bridge connection storage 23 is arranged at wafer factory 102.Each bridge connection storage has input port and output port (for example input port 211 of bridge connection storage 21 and output port 212), respectively in order to from roof suspension type carrier (overhead hoist shuttle, be called for short OHS, for example OHS 24), roof suspension type transportation utensil (overhead hoist transport, be called for short OHT, for example OHT 25) or rail mounted transportation utensil (rail guided Vehicle is called for short RGV) wait means of transportation to obtain extremely above-mentioned carrier tool of wafer transfer box or output wafer transfer box.The track of above-mentioned transportation utensil (for example track 26) is arranged at the input port of each bridge connection storage and the equipment room of output port and wafer factory 101 and 102, makes means of transportation wafer transfer box can be delivered to input port or obtain from output port.Above-mentioned a plurality of bridge connection storage can be by each other material control system (material control system is called for short MCS) managed together of wafer factory 101 and 102.
The efficient of a treatable chip cartridges of bridge connection storage unit interval has its restriction.The conveyance efficient of the handling time and the transfer system of robotic arm is wherein depended in this restriction.Under its restrictive condition, the system of selection of following bridge connection storage will allow two mass-produced semiconductor crystal wafer factories do a large amount of transmission mutually, and will avoid conveying capacity to be subject to bridge connection storage, that is does not allow bridge connection storage become bottleneck.The system of selection of above-mentioned bridge connection storage can be carried out by each other material control system (MCS) 104 and 105 of wafer factory 101 and 102.
In order to want the efficient of accelerated selection bridge connection storage, need to carry out the pre-process before each selection bridge connection storage.With reference to Fig. 3, pre-process can comprise according to the configuration of the material allocation system (AMHS) of the automation of wafer factory 101 and 102 production equipment of wafer factory 101 and 102 and automated warehousing be categorized as a plurality of groups (step S30), stride factory's transmission route (step S32) according to the decision of above-mentioned a plurality of groups is a plurality of, and specify each to stride the bridge connection storage group (step S34) of factory's transmission route correspondence.Bridge connection storage group comprises one or more bridge connection storage, and the designated priority valve of each bridge connection storage (step S36).For instance, following form 1 is enumerated a plurality of groups example of wafer factory 101 among Fig. 4 and 102, and each group can comprise production equipment and automated warehousing:
Bay_A1 and Block_A1 represent two zones of wafer factory 101 respectively, and Bay_A1 comprises production equipment (board) Tool_1, Tool_2 and automated warehousing STK_3, and Block_A1 comprises production equipment Tool_9 and automated warehousing STK_2 and STK_3.Bay_B1 and Block_B1 represent two zones of wafer factory 102, and Bay_B1 comprises production equipment (board) Tool_4, Tool_5 and automated warehousing STK_5, and Block_B1 comprises production equipment (board) Tool_7 and automated warehousing STK_5.
Following form 2 is striden factory's transmission route according to above-mentioned a plurality of groups decision a plurality of and in the corresponding bridge connection storage group of step S34 appointment at step S32 for example:
The priority of each bridge connection storage of above-mentioned bridge connection storage group is that the distance according to the equipment of this bridge connection storage and starting point group determines, can utilize simulated program with decision.According to form 2, from Bay_A1 to Bay_B1, stride the corresponding bridge connection storage Relay-S1 of factory transmission route, Relay-S2 and Relay-S3.The priority valve of Relay-S1, Relay-S2 and Relay-S3 is respectively 1,1 and 6.Above-mentioned starting point of striding factory's transmission route and terminal point are respectively wafer factory 101 and the 102 wherein group in one and another group in another person.
With reference to Fig. 5, when MCS 104 or MCS 105 receive (step S50) when striding factory's transmission command, the wherein above-mentioned factory's transmission command of striding is transported wafer transfer box in order to request between wafer factory 101 and 102, this MCS decision is above-mentioned stride factory's transmission command correspondence stride factory's transmission route (step S52).
Above-mentioned starting point of striding factory's transmission route and terminal point are respectively wafer factory 101 and the 102 wherein group in one and another group in another person.Therefore, this MCS according to above-mentioned stride factory's transmission command rise point device and end device can differentiate above-mentioned stride factory's transmission command correspondence stride factory's transmission route.For instance, when receive first when striding the playing point device and end device and belong to Bay_A1 of group and Bay_B1 respectively of factory's transmission command, that then obtains above-mentioned first strides in the corresponding form 2 of factory's transmission command first and strides factory's transmission route.
Then, this MCS obtains the predetermined information and the real time information (step S54) of the above-mentioned bridge connection storage group of striding factory's transmission route correspondence.The above-mentioned predetermined information of above-mentioned bridge connection storage group comprises the priority of each bridge connection storage correspondence of above-mentioned bridge connection storage group.Above-mentioned real time information comprises the pending order quantity and the storage space use amount of each bridge connection storage in the above-mentioned bridge connection storage group.The order quantity that the corresponding formation of each bridge connection storage is received in order to temporary this bridge connection storage.In addition, each bridge connection storage has the storage space of fixed qty, and the stored number that above-mentioned storage space use amount has promptly been taken by wafer transfer box.
This MCS is according to the predetermined information of each bridge connection storage of above-mentioned bridge connection storage group and the real time information key value (step S56) with each bridge connection storage of calculating above-mentioned bridge connection storage group, and from above-mentioned bridge connection storage group, select a suitable bridge connection storage (step S58) according to the key value that calculates, to transport above-mentioned above-mentioned wafer transfer box of striding factory's transmission command appointment.
For instance, first in the form 2 striden in the bridge connection storage group of factory's transmission route correspondence and comprised bridge connection storage Relay-S1, Relay-S2 and Relay-S3.The predetermined information of this bridge connection storage group comprises wherein a plurality of weighted values of each bridge connection storage, comprises the 3rd weighted value of the storage space use amount of second weighted value of pending order quantity of first weighted value, each bridge connection storage of the priority of each bridge connection storage and each bridge connection storage.Following form 3 shows first, second and third weighted value of striding the corresponding bridge connection storage with it of factory's transmission route group:
Wherein, the priority of i bridge connection storage of above-mentioned bridge connection storage group is P (i), and pending order quantity is C (i), and the storage space use amount is S (i), and first weighted value is w
1(i), second weighted value is w
2(i), the 3rd weighted value is w
3(i), then the key value R (i) of above-mentioned i bridge connection storage is:
Wherein i is a positive integer.
Therefore, this MCS can calculate the key value of each bridge connection storage of above-mentioned bridge connection storage group.Following form 4 give an example above-mentioned bridge connection storage group each bridge connection storage weighted information and calculate after key value:
| Relay-S1 | Relay-S2 | Relay-S3 | |
| The priority of weighting | (1)*10 | (1)*10 | (6)*10 |
| The reception order quantity of weighting | (13)*4 | (7)*4 | (8)*4 |
| The storage space use amount of weighting | (50/100)*10 | (30/100)*10 | (90/100)*10 |
| Key value | 67 | 51 | 101 |
| The bridge connection storage that is fit to | Relay-S2 |
This MCS selects the bridge connection storage of key value minimum in the above-mentioned bridge connection storage group as above-mentioned suitable bridge connection storage.
Though the present invention discloses as above with preferred embodiment; right its is not in order to limit the present invention; any those skilled in the art; without departing from the spirit and scope of the present invention; when can being used for a variety of modifications and variations, so protection scope of the present invention is as the criterion when looking appended the claim scope person of defining.
Claims (16)
1. the system of selection of a bridge connection storage in order to the bridge connection storage of selecting to be fit to from a plurality of bridge connection storages, with at least one wafer transfer box of transhipment between the first wafer factory and the second wafer factory, comprises:
The layout type of a plurality of equipment of above-mentioned first and second wafer factory of foundation is a plurality of groups with above-mentioned a plurality of device classes;
Specify between two groups the one bridge connection storage group of striding factory's transmission route correspondence according to above-mentioned a plurality of groups, wherein above-mentioned starting point and terminal point of striding factory's transmission route is respectively first group and second group, wherein above-mentioned first group is positioned at wherein one of above-mentioned first and second wafer factory, and above-mentioned second group is positioned at wherein another person of above-mentioned first and second wafer factory;
Store the predetermined information of above-mentioned bridge connection storage group;
When receive corresponding above-mentioned stride factory's transmission route stride factory's transmission command the time, a wherein above-mentioned point device and end device of striding factory's transmission command belongs to above-mentioned first group and above-mentioned second group respectively, obtain above-mentioned real time information of striding the above-mentioned bridge connection storage group of factory's transmission route correspondence, comprise the pending order quantity and the storage space use amount of each bridge connection storage in the above-mentioned bridge connection storage group; And
According among above-mentioned pending order quantity, storage space use amount and the above-mentioned predetermined information at least binomial information with select above-mentioned bridge connection storage group wherein one as above-mentioned suitable bridge connection storage, to transport above-mentioned this wafer transfer box of striding factory's transmission command appointment.
2. the system of selection of bridge connection storage according to claim 1, wherein, the above-mentioned predetermined information of above-mentioned bridge connection storage group comprises the corresponding above-mentioned priority of striding factory's transmission route of each bridge connection storage of above-mentioned bridge connection storage group.
3. the system of selection of bridge connection storage according to claim 2, wherein, the priority of each bridge connection storage of above-mentioned bridge connection storage group is that the distance according to this bridge connection storage and above-mentioned first group determines.
4. the system of selection of bridge connection storage according to claim 2, wherein, the above-mentioned predetermined information of above-mentioned bridge connection storage group comprises a plurality of weighted values of each bridge connection storage of above-mentioned bridge connection storage group, comprises second weighted value of first weighted value of above-mentioned priority, above-mentioned pending order quantity and the 3rd weighted value of above-mentioned storage space use amount.
5. the system of selection of bridge connection storage according to claim 4 also comprises:
Calculate the key value of each bridge connection storage of above-mentioned bridge connection storage group, wherein, the priority of i bridge connection storage of above-mentioned bridge connection storage group is P (i), and pending order quantity is C (i), and the storage space use amount is S (i), and first weighted value is w
1(i), second weighted value is w
2(i), the 3rd weighted value is w
3(i), wherein i is a positive integer, and then the key value R (i) of above-mentioned i bridge connection storage is:
R (i)=P (i) * w
1(i)+C (i) * w
2(i)+S (i) * w
3(i); And
The bridge connection storage of selecting key value minimum in the above-mentioned bridge connection storage group is as above-mentioned suitable bridge connection storage.
6. the selective system of a bridge connection storage comprises:
A plurality of bridge connection storages, in order at least one wafer transfer box of transhipment between the first wafer factory and the second wafer factory, a plurality of equipment of wherein above-mentioned first and second wafer factory are classified as a plurality of groups according to layout type, one strides the designated corresponding bridge connection storage of factory's transmission route group between two groups of above-mentioned a plurality of groups, wherein above-mentioned starting point and terminal point of striding factory's transmission route is respectively first group and second group, wherein above-mentioned first group is positioned at wherein one of above-mentioned first and second wafer factory, and above-mentioned second group is positioned at wherein another person of above-mentioned first and second wafer factory; And
Control system, in order to the bridge connection storage of from above-mentioned a plurality of bridge connection storages, selecting to be fit to, store the predetermined information of above-mentioned bridge connection storage group in advance, when receive corresponding above-mentioned stride factory's transmission route stride factory's transmission command the time, a wherein above-mentioned point device and end device of striding factory's transmission command belongs to above-mentioned first group and above-mentioned second group respectively, obtain above-mentioned real time information of striding the above-mentioned bridge connection storage group of factory's transmission route correspondence, the pending order quantity and the storage space use amount that comprise each bridge connection storage in the above-mentioned bridge connection storage group, and according to above-mentioned pending order quantity, among storage space use amount and the above-mentioned predetermined information at least binomial information with select above-mentioned bridge connection storage group wherein one as above-mentioned suitable bridge connection storage, to transport above-mentioned this wafer transfer box of striding factory's transmission command appointment.
7. the selective system of bridge connection storage according to claim 6, wherein, the above-mentioned predetermined information of above-mentioned bridge connection storage group comprises the corresponding above-mentioned priority of striding factory's transmission route of each bridge connection storage of above-mentioned bridge connection storage group.
8. the selective system of bridge connection storage according to claim 7, wherein, the priority of each bridge connection storage of above-mentioned bridge connection storage group is that the distance according to this bridge connection storage and above-mentioned first group determines.
9. the selective system of bridge connection storage according to claim 7, wherein, the above-mentioned predetermined information of above-mentioned bridge connection storage group comprises a plurality of weighted values of each bridge connection storage of above-mentioned bridge connection storage group, comprises second weighted value of first weighted value of above-mentioned priority, above-mentioned pending order quantity and the 3rd weighted value of above-mentioned storage space use amount.
10. the selective system of bridge connection storage according to claim 9, wherein above-mentioned control system is calculated the key value of each bridge connection storage of above-mentioned bridge connection storage group, wherein, the priority of i bridge connection storage of above-mentioned bridge connection storage group is P (i), pending order quantity is C (i), the storage space use amount is S (i), and first weighted value is w
1(i), second weighted value is w
2(i), the 3rd weighted value is w
3(i), wherein i is a positive integer, and then the key value R (i) of above-mentioned i bridge connection storage is:
R (i)=P (i) * w
1(i)+C (i) * w
2(i)+S (i) * w
3(i); And
Above-mentioned control system selects the bridge connection storage of key value minimum in the above-mentioned bridge connection storage group as above-mentioned suitable bridge connection storage.
11. the selective system of bridge connection storage according to claim 6, wherein, above-mentioned control system is wherein one the material control system of above-mentioned first wafer factory or the above-mentioned second wafer factory.
12. the system of selection of a bridge connection storage in order to the bridge connection storage of selecting to be fit to from a plurality of bridge connection storages, with at least one wafer transfer box of transhipment between the first wafer factory and the second wafer factory, comprises:
The layout type of a plurality of equipment of above-mentioned first and second wafer factory of foundation is a plurality of groups with above-mentioned a plurality of device classes;
Specify between two groups the one bridge connection storage group of striding factory's transmission route correspondence according to above-mentioned a plurality of groups, wherein above-mentioned starting point and terminal point of striding factory's transmission route is respectively first group and second group, wherein above-mentioned first group is positioned at wherein one of above-mentioned first and second wafer factory, and above-mentioned second group is positioned at wherein another person of above-mentioned first and second wafer factory;
Store the predetermined information of above-mentioned bridge connection storage group, comprise the corresponding above-mentioned priority of factory's transmission route and a plurality of weighted values of each bridge connection storage of striding of each bridge connection storage of above-mentioned bridge connection storage group;
When receive corresponding above-mentioned stride factory's transmission route stride factory's transmission command the time, a wherein above-mentioned point device and end device of striding factory's transmission command belongs to above-mentioned first group and above-mentioned second group respectively, obtain above-mentioned real time information of striding the above-mentioned bridge connection storage group of factory's transmission route correspondence, comprise the pending order quantity and the storage space use amount of each bridge connection storage in the above-mentioned bridge connection storage group; And
Calculate the key value of each bridge connection storage of above-mentioned bridge connection storage group, wherein, the priority of i bridge connection storage of above-mentioned bridge connection storage group is P (i), and pending order quantity is C (i), and the storage space use amount is S (i), a plurality of weighted value w
1(i) w
2(i) w
3(i), wherein i is a positive integer, and then the key value R (i) of above-mentioned i bridge connection storage is:
R (i)=P (i) * w
1(i)+C (i) * w
2(i)+S (i) * w
3(i); And
The bridge connection storage of selecting key value minimum in the above-mentioned bridge connection storage group is as above-mentioned suitable bridge connection storage, to transport above-mentioned this wafer transfer box of striding factory's transmission command appointment.
13. the system of selection of bridge connection storage according to claim 12, wherein, the priority of each bridge connection storage of above-mentioned bridge connection storage group is that the distance according to this bridge connection storage and above-mentioned first group determines.
14. the selective system of a bridge connection storage comprises:
A plurality of bridge connection storages, in order at least one wafer transfer box of transhipment between the first wafer factory and the second wafer factory, a plurality of equipment of wherein above-mentioned first and second wafer factory are classified as a plurality of groups according to layout type, one strides the designated corresponding bridge connection storage of factory's transmission route group between two groups of above-mentioned a plurality of groups, wherein above-mentioned starting point and terminal point of striding factory's transmission route is respectively first group and second group, wherein above-mentioned first group is positioned at wherein one of above-mentioned first and second wafer factory, and above-mentioned second group is positioned at wherein another person of above-mentioned first and second wafer factory; And
Control system, in order to the bridge connection storage of from above-mentioned a plurality of bridge connection storages, selecting to be fit to, above-mentioned control system stores the predetermined information of above-mentioned bridge connection storage group in advance, the corresponding above-mentioned priority of factory's transmission route and a plurality of weighted values of each bridge connection storage of striding of each bridge connection storage that comprise above-mentioned bridge connection storage group, when receive corresponding above-mentioned stride factory's transmission route stride factory's transmission command the time, a wherein above-mentioned point device and end device of striding factory's transmission command belongs to above-mentioned first group and above-mentioned second group respectively, obtain above-mentioned real time information of striding the above-mentioned bridge connection storage group of factory's transmission route correspondence, the pending order quantity and the storage space use amount that comprise each bridge connection storage in the above-mentioned bridge connection storage group, and the key value that calculates each bridge connection storage of above-mentioned bridge connection storage group, wherein, the priority of i bridge connection storage of above-mentioned bridge connection storage group is P (i), pending order quantity is C (i), the storage space use amount is S (i), a plurality of weighted value w
1(i) w
2(i) w
3(i), wherein i is a positive integer, and then the key value R (i) of above-mentioned i bridge connection storage is:
R (i)=P (i) * w
1(i)+C (i) * w
2(i)+S (i) * w
3(i); And
Wherein above-mentioned control system selects the bridge connection storage of key value minimum in the above-mentioned bridge connection storage group as above-mentioned suitable bridge connection storage, to transport above-mentioned this wafer transfer box of striding factory's transmission command appointment.
15. the selective system of bridge connection storage according to claim 14, wherein, the priority of each bridge connection storage of above-mentioned bridge connection storage group is that the distance according to this bridge connection storage and above-mentioned first group determines.
16. the selective system of bridge connection storage according to claim 14, wherein, above-mentioned control system is wherein one the material control system of above-mentioned first wafer factory or the above-mentioned second wafer factory.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100047402A CN101236886A (en) | 2007-01-30 | 2007-01-30 | Selection method and system for bridge connection storage |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNA2007100047402A CN101236886A (en) | 2007-01-30 | 2007-01-30 | Selection method and system for bridge connection storage |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101236886A true CN101236886A (en) | 2008-08-06 |
Family
ID=39920403
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNA2007100047402A Pending CN101236886A (en) | 2007-01-30 | 2007-01-30 | Selection method and system for bridge connection storage |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN101236886A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106493603A (en) * | 2016-10-21 | 2017-03-15 | 北京源著智能科技有限公司 | Three-dimensional way to play for time |
| CN109911542A (en) * | 2019-01-29 | 2019-06-21 | 迈克医疗电子有限公司 | A kind of dispatching method and device of pipelining equipment |
-
2007
- 2007-01-30 CN CNA2007100047402A patent/CN101236886A/en active Pending
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN106493603A (en) * | 2016-10-21 | 2017-03-15 | 北京源著智能科技有限公司 | Three-dimensional way to play for time |
| CN106493603B (en) * | 2016-10-21 | 2021-04-02 | 北京源著智能科技有限公司 | Three-dimensional buffering method |
| CN109911542A (en) * | 2019-01-29 | 2019-06-21 | 迈克医疗电子有限公司 | A kind of dispatching method and device of pipelining equipment |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP4860907B2 (en) | System and method for transferring small lot size substrate carriers between processing tools | |
| US7356378B1 (en) | Method and system for smart vehicle route selection | |
| CN101109932B (en) | Factory automation system and related method | |
| US7085614B1 (en) | Method, system, and computer program product for optimizing throughput of lots | |
| US6778879B2 (en) | Automated material handling system and method of use | |
| TWI575561B (en) | Method, storage medium and system for controlling the processing of lots of workpieces | |
| US7672748B2 (en) | Automated manufacturing systems and methods | |
| CN115220400B (en) | Wafer transfer-based supervisory control method, system, computer equipment and storage medium | |
| US20100138016A1 (en) | Extendable mes for cross-amhs transportation | |
| US20100278622A1 (en) | Automated Materials Handling System Having Multiple Categories of Overhead Buffers | |
| US7966090B2 (en) | Automated material handling system and method | |
| US20160276194A1 (en) | Stocker and method for dispatching wafer carrier in stocker | |
| US9250623B2 (en) | Methods and systems for fabricating integrated circuits utilizing universal and local processing management | |
| US6711450B1 (en) | Integration of business rule parameters in priority setting of wafer processing | |
| US7076326B2 (en) | Proactive staging for distributed material handling | |
| Aresi et al. | AMHS vehicle management policies in semiconductor manufacturing: A short review | |
| CN101236886A (en) | Selection method and system for bridge connection storage | |
| CN116705679B (en) | Conveying path planning method, planning system, crown block conveying method and conveying system | |
| Reith et al. | Evaluating automated guided vehicle system characteristics in semiconductor fab automated material handling systems | |
| US7720564B2 (en) | Systems and methods for cross-intrabay transport | |
| US20050119787A1 (en) | Transport system with multiple-load-port stockers | |
| Kiba et al. | Simulation of a full 300mm semiconductor manufacturing plant with material handling constraints | |
| Kim et al. | Idle vehicle circulation policies in a semiconductor FAB | |
| CN101236419A (en) | Automated trans-factory transmission system | |
| US10504764B2 (en) | Substrate stocker and systems management software |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| C06 | Publication | ||
| PB01 | Publication | ||
| C10 | Entry into substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| C02 | Deemed withdrawal of patent application after publication (patent law 2001) | ||
| WD01 | Invention patent application deemed withdrawn after publication |
Open date: 20080806 |