CN101154550A - Rotating anode x-ray tube assembly - Google Patents

Rotating anode x-ray tube assembly Download PDF

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Publication number
CN101154550A
CN101154550A CNA2007101623264A CN200710162326A CN101154550A CN 101154550 A CN101154550 A CN 101154550A CN A2007101623264 A CNA2007101623264 A CN A2007101623264A CN 200710162326 A CN200710162326 A CN 200710162326A CN 101154550 A CN101154550 A CN 101154550A
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China
Prior art keywords
vacuum envelope
housing
assembly
vacuum
ray tube
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CNA2007101623264A
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Chinese (zh)
Inventor
阿武秀郎
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Toshiba Corp
Canon Electron Tubes and Devices Co Ltd
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Toshiba Corp
Toshiba Electron Tubes and Devices Co Ltd
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Publication of CN101154550A publication Critical patent/CN101154550A/en
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Abstract

There is disclosed a rotating anode X-ray tube assembly comprising a vacuum envelope (11) integrated with an anode target (15), a housing (3) receiving at least the vacuum envelope, and rotatably holding it, a circulation path circulating a cooling medium (7) closed to at least the anode target of the vacuum envelope, a cathode (13) received and arranged in the vacuum envelope, a cathode support member (13a) supporting the cathode, a bearing mechanism and a vacuum sealing mechanism interposed between the vacuum envelope, and the housing or a stationary member directly or indirectly fixed to the housing, and a driver unit for rotating the vacuum envelope.

Description

Rotating anode x-ray tube assembly
Technical field
The present invention relates to rotating anode x-ray tube assembly.Specifically, the present invention relates to a kind of structure that is used to improve the dissipation of heat performance of anode.
Background technology
The conventional rotating anode x-ray tube assembly that improves the dissipation of heat performance of anode roughly is divided into following two types:
(1) Class1: the rotating anode X-ray tube assembly comprises rotating anode x-ray tube and housing etc.The rotarting anode ray tube is arranged to the plate target of rotatable supporting is received in the vacuum envelope.Housing is set to admit rotating anode x-ray tube.In order to remove the heat of plate target, be provided for the circulating path (for example, seeing Japanese patent application KOKOKU publication number H5-27205 and Japanese Unexamined Patent Publication No 2006-54181) that coolant is circulated in plate target.
The heat of plate target is transmitted to coolant by short hot path.Therefore, improved the dissipation of heat performance of anode.
(2) type 2: a kind of rotating anode x-ray tube assembly comprises with lower member:
One is vacuum chamber, can center on the vacuum envelope of axis rotation, and given plate target is as its part.Another is to be used to make vacuum envelope to center on the device of axis rotation.Another is the negative electrode that is attached to the generation electronics in the vacuum envelope, and deflecting coil is arranged on the vacuum envelope outside electron reflection is arrived the outer zone of axis of plate target.Another be used for by vacuum envelope wall part from the external source of vacuum envelope (for example to the collector ring mechanism of negative electrode supply of current, see Japan Patent the 2539193rd, french patent application 2599555-A1, Japan Patent the 2929506th and United States Patent (USP) the 6396901st).
The heat of plate target is transmitted to coolant by short hot path.Therefore, improved the dissipation of heat performance of anode.
Rotating anode x-ray tube assembly with aforementioned structure (1) has following problem.Specifically, if the heat load of rotating-anode tube becomes greatly, can not fully obtain the cooling performance of needs, reason is as follows.
A) translational speed of the dorsal part of rotating anode target and and the translational speed of the fluid removed of dorsal part between poor (relative moving speed) very high.In this case, the pyroconductivity at the contact interface place increases.But under the situation of aforementioned (1) structure, relative moving speed is not the rotary speed that depends on plate target like this, and almost only depends on the fluid velocity of coolant.This is along with (the open 2006-54181 of Japanese patent application KOKAI) rotated in the rotation of anode target together because of coolant.
B) be arranged on structure in the plate target according to stream, because its complexity and manufacturing cost increases.On the contrary, the structure shown in Figure 5 according to the open 2006-54181 of Japanese patent application KOKAI does not provide stream in plate target.But, adopted aforementioned simple plate target structure, and thus, further reduced cooling performance.
Rotating anode x-ray tube assembly with aforementioned (2) structure has following the have aforementioned structure problem of rotating anode x-ray tube assembly of (1) of being similar to.Specifically, if the heat load of rotating-anode tube becomes greatly, can not fully obtain the cooling performance of needs, reason is as follows.
D) at first, very difficult use has the water cooling medium of high cooling performance.Insulating oil with low cooling performance must be used as coolant.In other words, exist the space of coolant and the potential space of exposing of negative electrode to communicate with each other.For this reason, if use the water cooling medium, because the disintegration voltage that influences negative electrode of steam reduces.
E) given following structure; Specifically, be provided for wall part by vacuum envelope from the external source of vacuum envelope collector ring mechanism to the negative electrode supply of current.Because aforementioned structure, be difficult to realize such as multiple focal length or except the Premium Features the pulse operation of grid.This is because must a plurality of collector ring mechanism be set according to Premium Features.So, must be outside having high axis the part of high peripheral speed one or more collector ring mechanism is set.This situation is because the life-span of collector ring mechanism has been shortened in the wearing and tearing of slipper.
Summary of the invention
The purpose of this invention is to provide a kind of it can improve the dissipation of heat performance of anode and the rotating anode x-ray tube assembly that has high reliability for a long time.
In order to realize this purpose, according to an aspect of the present invention, provide a kind of rotating anode x-ray tube assembly, comprising:
Vacuum envelope is with the plate target one;
Housing holds vacuum envelope at least, and rotatably keeps vacuum envelope;
Circulating path makes coolant be recycled to the plate target of vacuum envelope at least with closed state;
Negative electrode holds and is arranged in the vacuum envelope;
Cathode supporting spare, the supporting negative electrode;
Bearning mechanism and vacuum seal mechanism are inserted in vacuum envelope and housing or directly or indirectly are fixed between the static element of housing; And
Actuator unit is used to rotate vacuum envelope.
According to a further aspect in the invention, provide a kind of rotating anode x-ray tube assembly, having comprised:
By producing the plate target of X-ray with electron collision;
The electron emission source of emitting electrons;
Vacuum tank with the plate target one, and remains on plate target and electron emission source under the predetermined low pressure;
Housing holds vacuum tank and cooling liquid, makes cooling liquid circulate between vacuum tank and housing;
Supporting member is fixed in housing with electron emission source;
Keeper rotatably remains on vacuum tank in the housing; And
Vacuum seal is arranged between vacuum tank and the keeper, makes vacuum tank rotate in housing, will keep the vacuum tank inner vacuum simultaneously.
Other advantage of the present invention can be set forth in following specification, and part can be apparent from specification, maybe can understand by practice of the present invention.Can realize and obtain advantage of the present invention by method and the combination of after this specifically noting.
Description of drawings
The accompanying drawing that is included in the specification and forms a specification part shows embodiments of the invention, and the detailed description with above general description that provides and the following embodiment that provides is used to explain principle of the present invention.
Fig. 1 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Fig. 2 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Fig. 3 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Fig. 4 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Fig. 5 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Fig. 6 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Fig. 7 explains to fill the schematic diagram of the method for the coolant of rotating anode x-ray tube assembly according to an embodiment of the invention;
Fig. 8 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Fig. 9 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Figure 10 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Figure 11 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Figure 12 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Figure 13 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Figure 14 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Figure 15 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Figure 16 shows along the amplification view of the rotating anode x-ray tube assembly of the line XVI-XVI intercepting of Figure 15, and specifically, shows the view of first and second magnetic reflection coil;
Figure 17 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention;
Figure 18 shows along the amplification view of the rotating anode x-ray tube assembly of the line XVIII-XVIII intercepting of Figure 17, and specifically, shows the view of first and second magnetic reflection coil; And
Figure 19 schematically shows the view of rotating anode x-ray tube assembly according to an embodiment of the invention.
Embodiment
After this describe embodiments of the invention with reference to the accompanying drawings in detail.
As shown in Figure 1, X-ray tube assembly 1 is configured to for example X-ray image diagnostic device and nondestructive testing device.X-ray tube assembly 1 is to target, and promptly experiment target radiates the X-ray.X-ray tube assembly 1 has housing 3 and X-ray tube body (rotating anode x-ray tube) 5.X-ray tube body 5 is contained in the housing 3, and has the X-ray of predetermined strength to the predetermined direction radiation.
X-ray tube body 5 is contained in the precalculated position of housing 3 by cooling agent 7.Cooling agent 7 mainly is made up of for example water, and is to have conductance less than but liquid (water base coolant) of the non-oil cooling of predetermined value.The coolant that has less than the 1mS/m conductance also reduces the corrosion to metal parts as cooling agent 7 to guarantee low-voltage insulation character.In addition, provide following glycol as the coolant that mixes with water.For example ethylene glycol and propylene glycol also are available.
X-ray tube body 5 comprises vacuum envelope 11, cathode electron gun (thermal actuation electron emission source) 13 and rotarting anode (plate target, anode) 15.Vacuum envelope 11 is arranged so that rotatably its circumference roughly contacts the cooling agent (water cooling medium) 7 that is contained in the housing 3.The inside of vacuum envelope 11 remains on the vacuum of predetermined extent.Cathode electron gun 13 is arranged in the vacuum envelope 11 and is independent of capsule 11.Plate target 15 is arranged in vacuum envelope 11 and vacuum envelope 11 one.Quickened by the electric field between negative electrode 13 and the plate target 15 from electron gun 13 electrons emitted, and collide, and plate target 15 is launched the X-ray with predetermined wavelength thus with plate target 15.By way of parenthesis, vacuum envelope 11 contacts with the earth polar 9 in the precalculated position of an end that penetrates housing 3, and so ground connection.
Vacuum envelope 11 keeps by magnetic fluid vacuum seal 53 and bearing (rolling bearing, ball/roll bearing) part 55.Magnetic fluid vacuum seal 53 is positioned at the precalculated position of outer circumferential surface of the cylindrical shape stationary part 51 in the precalculated position that is arranged on housing 3.Bearing part 55 is positioned at the precalculated position of stationary part 51, promptly at the stream than magnetic fluid vacuum seal 53 more close cooling agents 7.Cylindrical shape stationary part 51 is fixed in vacuum envelope keeper 59 by electric insulation supporting member 57.Stationary part 51 and vacuum envelope keeper 59 concentric (coaxial line) are provided with.
Cathode electron gun 13 is fixed in cylindrical shape and electric insulation negative electrode keeper 13a.The inside presumptive area of tube (cylinder) 59a that is fixed in the fixture 63 of outer circumferential surface of negative electrode keeper 13a and vacuum envelope keeper 59 is fixing by seal 61.As mentioned above, cathode electron gun 13 is fixed on the precalculated position of vacuum envelope 11 inside.
Fixture 63 be fixed in the side that seal 61 separates and have end 63a.Johning knot member 51a is connected with cylindrical shape stationary part 51, and has elastic property.Stationary part 51 is from vacuum envelope 11 inboard supporting vacuum envelopes 11.End 63a is connected (fixing) by johning knot member 51a with welding portion 65.The negative electrode keeper 13a of cathode electron gun 13 has the predetermined length of the vacuum envelope keeper 59 that penetrates housing 3.Connector (high voltage source terminal) 67 on the negative electrode keeper 13a side relative with a side in the earth polar 9 that is provided with housing 3 is electrically connected.Connector (high voltage source terminal) 67 is used for powering to cathode electron gun.
The end 63a of static element 63 and johning knot member 51a are fixing by welding portion 65.Like this, when 11 rotations of vacuum capsule, it is used to prevent that vibration transmission from arriving cathode electron gun 13.Specifically, johning knot member 51a has elastic property; Therefore, absorb the vibration that vacuum envelope 11 rotations produce.In addition, because the elastic property of johning knot member 51a can be offset the slight assembly error between negative electrode keeper 13a and the cylindrical shape stationary part 51.
The pre-position of the vacuum envelope on a side of holding anode (plate target) 15 is provided with a plurality of permanent magnets 69.Permanent magnet 69 is arranged near the bearing 11a of vacuum envelope in bearing part 55 outsides.The thrust (magnetic force) that permanent magnet 69 acceptance are used to rotate vacuum envelope 11.
Stator 71 is arranged on the precalculated position with the housing 3 of permanent magnet 69 coaxial lines (concentric).Stator 71 provides magnetic force (thrust) with respect to permanent magnet 69 with arbitrary timing.Stator 71 is coil members, and is controlled to form rotating magnetic field.
In X-ray tube assembly 1, to stator 71 supply scheduled currents.Like this, vacuum envelope 11 rotates at a predetermined velocity.Therefore, the plate target (rotarting anode) 15 that is arranged in the vacuum envelope 11 rotates at a predetermined velocity.Under this state, from cathode electron gun 13 electrons emitted and plate target 15 collisions.Like this, export the X-ray of predetermined wavelengths from plate target 15.Outwards launch output X-ray from window 11b and 3a.Window 11b is positioned at the precalculated position of the cylindrical shape part of vacuum envelope 11.Window 3a is positioned at the precalculated position of the cylindrical shape part of housing 3.
Cooling agent 7 injects between the inside presumptive area of outside most of zone of vacuum envelope and housing 3 by cooling fluid inlet 5b.Cooling fluid inlet 5b be positioned at vacuum envelope 11 bearing portions 11a near.Cooling agent 7 is discharged from being formed near housing 3 outside earth polars 9 cooling liquid outlet 5c.Like this, bearing portions 11a and the plate target 15 that is configured in the vacuum envelope 11 is cooled.
Vacuum envelope 11 inside, promptly cathode electron gun 13 and plate target 15 remain on predetermined vacuum state by magnetic fluid vacuum seal 53.The magnetic fluid vacuum seal was reported by for example following file.
File: Kamiyama, " Lubrication " (" lubricating oil ") vol.30, No.8, pp75-78 require following the preparation in order to form aforementioned magnetic fluid vacuum seal.Prepare the magnetic fluid of scheduled volume at the outer circumferential place that covers the axis structure body of magnetic or non magnetic axis with the tube that comprises magnetic fluid.In this case, magnetic fluid is that ferromagnetic particle is dispersed in colloidal solution in the liquid.Close axis of magnetic part and permanent magnet or axis structure body are to form magnetic circuit.Like this, magnetic fluid is around axis or axis structure body.The magnetic fluid vacuum seal is the seal that is used to keep pressure (atmospheric pressure) difference.
Using the magnetic fluid vacuum seal is effective for vacuum envelope 11 being remained on predetermined vacuum level (low pressure).
The cooling agent 7 that is fed to housing 3 is positioned at the interior heat exchanger 7b cooling of chiller unit 7a.Cooling agent 7 circulates between cooling fluid inlet 5b and cooling liquid outlet 5c by pump 7c.Like this, the heat that produces among plate target 15 and the bearing portions 11a is discharged into outside by cooling agent 7.
In this case, cooling agent 7 flows with plate target 15 dorsal parts near magnetic fluid vacuum seal 53 by vacuum envelope 11.Therefore, magnetic fluid vacuum seal 53 and plate target 15 have been cooled off effectively.Form the stream of cooling agent 7 by the shape of design housing 3 and X-ray tube body 5.Suitably design the stream of cooling agent 7, cooling agent 7 can cool off stator together thus.Most of heat that X-ray tube assembly 1 produces is discharged into X-ray tube assembly 1 outside by cooling agent 7.
The end 11c of vacuum envelope 11 is positioned at the one end, and the stationary part 51 of close housing 3.End 11c is used for providing minim gap between the ledge 52 of stationary part 51 and end, promptly has the gap 5d of low wettability.Therefore, gap 5d prevents that cooling agent 7 from entering vacuum envelope 11.Like this, cooling agent 7 arrives magnetic fluid vacuum seal 53; Therefore, the performance (ability) that prevents vacuum seal 53 undesirably reduces.
According to this embodiment, the water that mixes with glycol is as coolant.In this case, bigger in order to make contact angle, end 11c of vacuum envelope 11 (end that comprises permanent subway 69) and stationary part 51 preferably scribble resin.
The bearing part that separates with magnetic fluid vacuum seal 53 of bearing part 55 is to be sealed in closed type between the internal-external cylinder by seal.This is used to prevent that cooling agent 7 from entering magnetic fluid vacuum seal 53.
As mentioned above, one embodiment of the invention are applicable to the X-ray tube assembly.Like this, improve dissipation of heat performance by water base coolant.Therefore, obtain stable long-term behaviour.This is used to prolong the life-span that X-ray image diagnostic device and X-ray tube assembly are configured in nondestructive testing device wherein.According to the present invention, the coolant with high cooling performance is available, does not consider the High-Voltage Insulation character of cooling fluid; Therefore, improved cooling performance.In addition, according to the present invention, prolonged the life-span of X-ray tube assembly itself.Therefore, can reduce the operating cost of aforementioned X-ray image diagnostic device and nondestructive testing device.
Fig. 2 relates to another embodiment of X-ray tube assembly of the present invention.Identical label is used for the identical components that presentation graphs 1 has been described, and omits its details.Add that 100 label is similar to the member of having described among Fig. 1, and omit its details.
X-ray tube assembly 101 shown in Fig. 2 has housing 103, and X-ray tube body (rotating anode x-ray tube) 105 is contained in the housing 103.
X-ray tube body 105 is contained in the precalculated position of housing 103 by cooling agent 7.Cooling agent 7 mainly is made of water, and is the water base coolant (non-oil cooling but medium) of conductance less than 1mS/m.
Vacuum envelope 111 contacts with ground connection with the earth polar 9 in the precalculated position of an end that penetrates housing 103.
The inside of vacuum envelope 111 remains on predetermined vacuum level.Vacuum envelope 111 is provided with cathode electron gun (thermal actuation electron emission source) 13 and rotarting anode (plate target, anode) 15.Cathode electron gun 13 is independent of vacuum envelope 111 and is provided with.Plate target 15 is arranged in vacuum envelope 111 and vacuum envelope 111 one.From electron gun 13 electrons emitted and plate target 15 collisions, and plate target 15 is launched the X-ray with predetermined wavelength thus.
Vacuum envelope 111 keeps by magnetic fluid vacuum seal 53 and bearing (rolling bearing, ball/roll bearing) part 55.Magnetic fluid vacuum seal 53 is positioned at the precalculated position of outer circumferential surface of the cylindrical shape stationary part 151 in the precalculated position that is arranged on housing 103.Bearing part 55 is positioned at the predetermined portions of stationary part 151, promptly at the stream than magnetic fluid vacuum seal 53 more close cooling agents 7.Cylindrical shape stationary part 151 is fixed in vacuum envelope keeper 59 by electric insulation supporting member 57.Stationary part 151 and vacuum envelope keeper 59 are fixed in vacuum envelope keeper 59 by supporting member 57 concentric (coaxial line).
Cathode electron gun 13 is fixed in cylindrical shape and electric insulation negative electrode keeper 13a.The inside presumptive area of tube 59a that is fixed in the fixture 63 of outer circumferential surface of negative electrode keeper 13a and vacuum envelope keeper 59 is fixing by seal 61.As mentioned above, cathode electron gun 13 is fixed on the precalculated position of vacuum envelope 111 inside.
Fixture 63 be fixed in the side that seal 61 separates and have end 63a.Johning knot member 51a is connected with cylindrical shape stationary part 51, and has elastic property.Stationary part 151 is from vacuum envelope 111 outsides supporting vacuum envelope 111.End 63a is connected (fixing) by johning knot member 51a with welding portion 65.
The negative electrode keeper 13a of cathode electron gun 13 has the predetermined length of the vacuum envelope keeper 59 that penetrates housing 103.Connector (high voltage source terminal) 67 on the negative electrode keeper 13a side relative with a side in the earth polar 9 that is provided with housing 103 is electrically connected.Connector (high voltage source terminal) 67 is used for powering to cathode electron gun.
The end 63a of static element 63 and johning knot member 51a are fixing by welding portion 65.Like this, when 111 rotations of vacuum capsule, it is used to prevent that vibration transmission from arriving cathode electron gun 13.Specifically, johning knot member 51a has elastic property; Therefore, absorb the vibration that vacuum envelope 11 rotations produce.
Pre-position at the vacuum envelope 111 of holding anode (plate target) 15 is provided with a plurality of permanent magnets 169.Permanent magnet 169 is positioned near earth polar 9 and part (after this, being called far-end) 111d in the back.Part 111d is less than the external diameter of the vacuum envelope 111 that centers on plate target 15.The thrust (magnetic force) that permanent magnet 169 acceptance are used to rotate vacuum envelope 111.
The precalculated position of housing 103 is provided with stationary stator coil 171.Stator coil 171 is positioned at and permanent magnet 169 coaxial lines (concentric).Permanent magnet 169 is around the far-end 111d location of vacuum envelope 111.Stator coil 171 provides magnetic force (thrust) with arbitrary timing to permanent magnet 169.Stator coil 171 forms electromagnet, and making can be from its rotation of external control.
In X-ray tube assembly 101, to stator 171 supply scheduled currents.Like this, vacuum envelope 111 rotates at a predetermined velocity.Therefore, the plate target (rotarting anode) 15 that is arranged in the vacuum envelope 111 rotates at a predetermined velocity.Under this state, from cathode electron gun 13 electrons emitted and plate target 15 collisions.Like this, export the X-ray of predetermined wavelengths from plate target 15.Outwards launch output X-ray from window 111b and 103a.Window 111b is positioned at the precalculated position of the cylindrical shape part of vacuum envelope 111.Window 103a is positioned at the precalculated position of the cylindrical shape part of housing 103.
Near the cooling fluid inlet 105b of the bearing portions 111a of cooling agent 7 by being positioned at vacuum envelope 111 injects housing 103.Cooling agent 7 is discharged from being arranged near earth polar 9 cooling liquid outlet 105c.Cooling agent 7 circulates between the inside presumptive area of most of perimeter of vacuum envelope 111 and housing 103.Therefore and the magnetic fluid vacuum seal 53 and the plate targets 15 that are configured in the vacuum envelope 111 be cooled.
The cooling agent 7 that is fed to housing 103 is positioned at the interior heat exchanger 7b cooling of chiller unit 7a.Cooling agent 7 circulates between cooling fluid inlet 105b and cooling liquid outlet 105c by pump 7c.Like this, the heat that produces in the X-ray tube assembly cooling agent 7 that is used as coolant is discharged into housing 103 outsides.
As mentioned above, cooling agent 7 is used for cooling off effectively magnetic fluid vacuum seal 53 and plate target 15.Stationary part 151 contacts that the flow path designs of cooling agent 7 becomes generally to be made of metal.
The precalculated position of vacuum envelope 111 is provided with the flange 111e that is used to reduce wettability.The flange 111e that is used to reduce wettability is positioned near near the plate target 15 of the vacuum envelope of an end 151b of the stationary part 151 of housing 103.The flange 111e and the end 11c that are used to reduce wettability are made as one.The flange 111e that is used to reduce wettability is used to prevent that cooling agent 7 from entering bearing part 55 and magnetic fluid vacuum seal 53.
Between an end 151b of flange 111e that is used to reduce wettability and stationary part 151, form little gap, promptly low wettability gap 105d.Therefore, a flange 111e and an end 151b who is used to reduce wettability prevents that cooling agent 7 from entering vacuum envelope 111 inside.Like this, can prevent that cooling agent from entering magnetic fluid vacuum seal 53.This performance (ability) that is used to prevent vacuum seal 53 undesirably reduces.
Be used as coolant if be given as the cooling agent 7 with big relatively contact angle, the gap 105d that then has low wettability is arranged to less than predetermined value.Like this, prevent that cooling agent from entering gap 105d.According to this embodiment, the medium of mixing water or glycol is as coolant.In this case, bigger in order to form contact angle, an end 151b of the flange 111e of vacuum envelope 111 and stationary part 151 preferably scribbles resin.
The bearing part that separates with magnetic fluid vacuum seal 53 of bearing part 55 is closed types.This is used for further preventing that cooling agent 7 from entering magnetic fluid vacuum seal 53.
As mentioned above, one embodiment of the invention are applicable to the X-ray tube assembly.Like this, improve dissipation of heat performance by the water cooling medium.Therefore, obtain stable long-term behaviour.This is used to prolong the life-span that X-ray image diagnostic device and X-ray tube assembly are configured in nondestructive testing device wherein.According to the present invention, the coolant with high cooling performance is available, does not consider the High-Voltage Insulation character of cooling fluid; Therefore, improved cooling performance.In addition, according to the present invention, prolonged the life-span of X-ray tube assembly itself.Therefore, can reduce the operating cost of aforementioned X-ray image diagnostic device and nondestructive testing device.
In the X-ray tube assembly 101 shown in X-ray tube assembly 1 shown in Fig. 3 and Fig. 4, has the bellows cylindrical shape by welding portion 65 and the static element 63 (163 among Fig. 4) that johning knot member 51a welds together.Like this, prevent that the vibration of rotating vacuum envelope 111 (label 111 among Fig. 4) undesirably is transferred to cathode electron gun 13.
Absorb the big assembly error of negative electrode keeper 13a and cylindrical shape stationary part 51 or stationary part 151.
Fig. 5 relates to the another embodiment of X-ray tube assembly of the present invention.Identical label is used for the identical components that presentation graphs 1 has been described, and omits its details.Add that 500 label is similar to the member of having described among Fig. 1, and omit its details.
X-ray tube assembly 501 shown in Fig. 5 has housing 503, and X-ray tube body (rotating anode x-ray tube) 505 is contained in the housing 503.
X-ray tube body 505 is contained in the precalculated position of housing 503 by cooling agent 7.Cooling agent 7 mainly is made of water, and is the water base coolant (non-oil cooling but medium) of conductance less than 1mS/m.
Vacuum envelope 511 contacts with ground connection with the earth polar 9 in the precalculated position of an end that penetrates housing 503.
The inside of vacuum envelope 511 remains on predetermined vacuum level.Vacuum envelope 511 is provided with cathode electron gun (thermal actuation electron emission source) 513 and rotarting anode (plate target, anode) 515.Cathode electron gun 513 is independent of vacuum envelope 511 and is provided with.Plate target 515 is arranged to and vacuum envelope 511 one in a side in the earth polar 9 of close housing 503.From electron gun 513 electrons emitted and plate target 515 collisions, and plate target 515 is launched the X-ray with predetermined wavelength thus.
Vacuum envelope 511 keeps by magnetic fluid vacuum seal 53 and bearing (rolling bearing, ball/roll bearing) part 55.Magnetic fluid vacuum seal 53 is positioned at the precalculated position of outer circumferential surface of the cylindrical shape stationary part 51 in the precalculated position that is arranged on housing 503.Bearing part 55 is positioned at the predetermined portions of stationary part 51, promptly at the stream than magnetic fluid vacuum seal 53 more close cooling agents 7.Cylindrical shape stationary part 551 is fixed in the vacuum envelope keeper 59 of housing 503 by electric insulation supporting member 57.Stationary part 51 and vacuum envelope keeper 59 concentric (coaxial line) are provided with.
Cathode electron gun 513 is fixed in cylindrical shape and electric insulation negative electrode keeper 13a.The inside presumptive area of tube 59a that is fixed in the fixture 63 of outer circumferential surface of negative electrode keeper 13a and vacuum envelope keeper 59 is fixing by seal 61.As mentioned above, cathode electron gun 513 is fixed on the precalculated position of vacuum envelope 511 inside.
Fixture 63 be fixed in the side that seal 61 separates and have end 63a.Johning knot member 51a is connected with cylindrical shape stationary part 51 (from vacuum envelope 511 inboard supporting vacuum envelopes 511), and has elastic property.End 63a is connected (fixing) by johning knot member 51a with welding portion 65.The negative electrode keeper 13a of cathode electron gun 513 has the predetermined length of the vacuum envelope keeper 59 that penetrates housing 503.Connector (high voltage source terminal) 67 on the negative electrode keeper 13a side relative with a side in the earth polar 9 that is provided with housing 503 is electrically connected.Connector (high voltage source terminal) 67 is used for to the cathode electron gun power supply.
The end 63a of static element 63 and johning knot member 51a are fixing by welding portion 65.Like this, when 511 rotations of vacuum capsule, it is used to prevent that vibration transmission from arriving cathode electron gun 513.Specifically, johning knot member 51a has elastic property; Therefore, absorb the vibration that vacuum envelope 511 rotations produce.Absorb the slight assembly error between negative electrode keeper 13a and the cylindrical shape stationary part 51.
Pre-position at the vacuum envelope 511 of fixed negative pole electron gun 513 sides is provided with a plurality of permanent magnets 69.Permanent magnet 69 is provided with near the bearing 11a of the vacuum envelope 511 that is positioned at bearing part 55 outsides.The thrust (magnetic force) that permanent magnet 69 acceptance are used to rotate vacuum envelope 511.
The precalculated position of housing 503 is provided with stationary stator 71.Stator forms electromagnet, and making can be from its rotation of external control.Therefore, stator 71 is coil piece.Stator 71 is provided with permanent magnet 69 coaxial lines (with one heart).Stator 71 provides magnetic force (thrust) with arbitrary timing to permanent magnet 69.
In X-ray tube assembly 501, to stator 71 supply scheduled currents.Like this, vacuum envelope 511 rotates at a predetermined velocity.Therefore, the plate target (rotarting anode) 515 that is arranged in the vacuum envelope 511 rotates at a predetermined velocity.Under this state, from cathode electron gun 513 electrons emitted and plate target 515 collisions.Like this, export the X-ray of predetermined wavelengths from plate target 515.Outwards launch output X-ray from window 511b and 503a.Window 511b is positioned at the precalculated position of the cylindrical shape part of vacuum envelope 511.Window 503a is positioned at the precalculated position of the cylindrical shape part of housing 503.
Cooling agent 7 injects between the inside presumptive area of vacuum envelope 511 outside most of zones and housing 503 by cooling fluid inlet 5b.Cooling fluid inlet 5b be positioned at vacuum envelope 511 bearing portions 11a near.Cooling agent 7 is discharged from being formed near housing 503 outside earth polars 9 cooling liquid outlet 5c.Like this, magnetic fluid vacuum seal 53 and the plate target 515 that is configured in the vacuum envelope 511 is cooled.
The cooling agent 7 that is fed to housing 503 is positioned at the interior heat exchanger 7b cooling of chiller unit 7a.Cooling agent 7 circulates between cooling fluid inlet 5b and cooling liquid outlet 5c by pump 7c.Like this, the heat that produces in the X-ray tube assembly 501 cooling agent 7 that is used as coolant is discharged into housing 503 outsides.
In this case, cooling agent 7 flows near magnetic fluid vacuum seal 53 dorsal parts by vacuum envelope 511.Therefore, cooling bearing part 11a (specifically being magnetic fluid vacuum seal 53) effectively.Form the stream of cooling agent 7 by the shape of design housing 503 and X-ray tube body 505.Suitably design the stream of cooling agent 7, cooling agent 7 can cool off stator 71 together thus.Most of heat that X-ray tube assembly 501 produces is discharged into X-ray tube assembly 501 outsides by cooling agent 7.
The end 11c of vacuum envelope 511 is positioned at the one end, and the stationary part 51 of close housing 503.End 11c is used for providing minim gap between the ledge 52 of stationary part 51 and end, promptly has the gap 5d of low wettability.Therefore, gap 5d prevents that cooling agent 7 from entering vacuum envelope 511.Like this, cooling agent 7 arrives magnetic fluid vacuum seal 53; Therefore, the performance (ability) that prevents vacuum seal 53 undesirably reduces.
According to this embodiment, the water that mixes with glycol is as coolant.In this case, bigger in order to make contact angle, end 11c of vacuum envelope 511 (end that comprises permanent subway 69) and stationary part 51 preferably scribble resin.
The bearing part that separates with magnetic fluid vacuum seal 53 of bearing part 55 is to be sealed in closed type between the internal-external cylinder by seal.This is used for further preventing that cooling agent 7 from entering magnetic fluid vacuum seal 53.
As mentioned above, one embodiment of the invention are applicable to the X-ray tube assembly.Like this, improve dissipation of heat performance by water base coolant.Therefore, obtain stable long-term behaviour.This is used to prolong the life-span that X-ray image diagnostic device and X-ray tube assembly are configured in nondestructive testing device wherein.According to the present invention, the coolant with high cooling performance is available, does not consider the High-Voltage Insulation character of cooling fluid; Therefore, improved cooling performance.In addition, according to the present invention, prolonged the life-span of X-ray tube assembly itself.Therefore, can reduce the operating cost of aforementioned X-ray image diagnostic device and nondestructive testing device.
Fig. 6 relates to another embodiment of X-ray tube assembly of the present invention.Identical label is used for the identical components that presentation graphs 1 has been described, and omits its details.Add that 600 label is similar to the member of having described among Fig. 1, and omit its details.
X-ray tube assembly 601 shown in Fig. 6 has housing 603, and X-ray tube body (rotating anode x-ray tube) 605 is contained in the housing 603.
X-ray tube body 605 is contained in the precalculated position of housing 603 by cooling agent 7.Cooling agent 7 mainly is made of water, and is the water base coolant (non-oil cooling but medium) of conductance less than 1mS/m.
Vacuum envelope 611 contacts with ground connection with the earth polar 9 in the precalculated position of an end that penetrates housing 603.
The inside of vacuum envelope 611 remains on predetermined vacuum level.Vacuum envelope 611 is provided with cathode electron gun (thermal actuation electron emission source) 613 and rotarting anode (plate target, anode) 615.Cathode electron gun 613 is independent of vacuum envelope 611 and is provided with.Plate target 615 is arranged in vacuum envelope 611 and vacuum envelope 611 one.From electron gun 613 electrons emitted and plate target 615 collisions, and plate target 615 is launched the X-ray with predetermined wavelength thus.
Vacuum envelope 611 keeps by magnetic fluid vacuum seal 53 and bearing (rolling bearing, ball/roll bearing) part 55.Magnetic fluid vacuum seal 53 is positioned at the precalculated position of internal circumferential surface of the cylindrical shape stationary part 151 in the precalculated position that is arranged on X-ray tube assembly 605.Bearing part 55 is positioned at the predetermined portions of stationary part 151, promptly at the stream than magnetic fluid vacuum seal 53 more close cooling agents 7.Cylindrical shape stationary part 151 is fixed in the vacuum envelope keeper 59 of housing 603 by electric insulation supporting member 57.Stationary part 151 and vacuum envelope keeper 59 concentric (coaxial line) are provided with.
Cathode electron gun 613 is fixed in cylindrical shape and electric insulation negative electrode keeper 13a.The inside presumptive area of tube 59a that is fixed in the fixture 63 of outer circumferential surface of negative electrode keeper 13a and vacuum envelope keeper 59 is fixing by seal 61.As mentioned above, cathode electron gun 613 is fixed on the precalculated position of vacuum envelope 611 inside.
Fixture 63 be fixed in the side that seal 61 separates and have end 63a.Johning knot member 51a is connected with cylindrical shape stationary part 51, and has elastic property.Stationary part 151 is from vacuum envelope 611 inboard supporting vacuum envelopes 611.End 63a is connected (fixing) by johning knot member 51a with welding portion 65.The negative electrode keeper 13a of cathode electron gun 613 has the predetermined length of the vacuum envelope keeper 59 that penetrates housing 603.Connector (high voltage source terminal) 67 on the negative electrode keeper 13a side relative with a side in the earth polar 9 that is provided with housing 603 is electrically connected.Connector (high voltage source terminal) 67 is used for powering to cathode electron gun.
The end 63a of static element 63 and johning knot member 51a are fixing by welding portion 65.Like this, when 611 rotations of vacuum capsule, it is used to prevent that vibration transmission from arriving cathode electron gun 613.Specifically, johning knot member 51a has elastic property; Therefore, absorb the vibration that vacuum envelope 611 rotations produce.
Pre-position at the vacuum envelope 611 of holding anode (plate target) 615 is provided with a plurality of permanent magnets 169.Permanent magnet 169 is positioned near earth polar 9 and part (after this, being called far-end) 611d in the back.Part 611d is less than the external diameter of the vacuum envelope 611 that centers on plate target 615.The thrust (magnetic force) that permanent magnet 169 acceptance are used to rotate vacuum envelope 611.
The precalculated position of housing 603 is provided with stationary stator coil 171.Stator coil 171 is positioned at and permanent magnet 169 coaxial lines (concentric).Stator coil 171 provides magnetic force (thrust) with arbitrary timing to permanent magnet 169.In X-ray tube apparatus 601, to stator 171 supply scheduled currents.Like this, vacuum envelope 611 rotates at a predetermined velocity.Under this state, from cathode electron gun 613 electrons emitted and plate target 615 collisions.Like this, export the X-ray of predetermined wavelengths from plate target 615.Outwards launch output X-ray from window 611b and 603a.Window 611b is positioned at the precalculated position of the cylindrical shape part of vacuum envelope 611.Window 603a is positioned at the precalculated position of the cylindrical shape part of housing 603.
Cooling agent 7 injects between the inside presumptive area of vacuum envelope 611 outside most of zones and housing 603 by cooling fluid inlet 605b.Cooling fluid inlet 605b be positioned at vacuum envelope 611 bearing portions 611a near.Cooling agent 7 is discharged from being formed near housing 603 outside earth polars 9 cooling liquid outlet 605c.Like this, magnetic fluid vacuum seal 53 and the plate target 615 that is configured in the vacuum envelope 611 is cooled.
The cooling agent 7 that is fed to housing 603 is positioned at the interior heat exchanger 7b cooling of chiller unit 7a.Cooling agent 7 circulates between cooling fluid inlet 605b and cooling liquid outlet 605c by pump 7c.Like this, the heat that produces in the X-ray tube apparatus 501 cooling agent 7 that is used as coolant is discharged into housing 603 outsides.
In this case, cooling agent 7 cools off magnetic fluid vacuum seal 53 and bearing part 55 effectively by stationary part 151.Cooling agent 7 flows near the dorsal part of the plate target 615 that is fixed in vacuum envelope 611.Therefore, cooling bearing part 611a and plate target 615 effectively.The flow path designs of cooling agent 7 becomes to contact with the stationary part 151 that generally is made of metal.
The precalculated position of vacuum envelope 611 is provided with the flange 111e that is used to reduce wettability.The flange 111e that is used to reduce wettability is positioned near near the plate target 615 of the vacuum envelope of an end 151b of the stationary part 151 of X-ray tube body 605.The flange 111e that is used to reduce wettability is used to prevent that cooling agent 7 from entering bearing part 55 and magnetic fluid vacuum seal 53.Between an end 151b of flange 111e that is used to reduce wettability and stationary part 151, form little gap, promptly low wettability gap 105d.Therefore, a flange 111e and an end 151b who is used to reduce wettability prevents that cooling agent 7 from entering vacuum envelope 611 inside.Like this, can prevent that cooling agent from entering magnetic fluid vacuum seal 53.This performance (ability) that is used to prevent vacuum seal 53 undesirably reduces.
According to this embodiment, the water that mixes with glycol is as coolant.In this case, bigger in order to make contact angle, a flange 111e and an end 151b preferably scribble resin.
The bearing part that separates with magnetic fluid vacuum seal 53 of bearing part 55 is closed types.This is used for further preventing that cooling agent 7 from entering magnetic fluid vacuum seal 53.
As mentioned above, one embodiment of the invention are applicable to the X-ray tube assembly.Like this, improve dissipation of heat performance by water base coolant.Therefore, obtain stable long-term behaviour.This is used to prolong the life-span that X-ray image diagnostic device and X-ray tube assembly are configured in nondestructive testing device wherein.According to the present invention, the coolant with high cooling performance is available, does not consider the High-Voltage Insulation character of cooling fluid; Therefore, improved cooling performance.In addition, according to the present invention, prolonged the life-span of X-ray tube assembly itself.Therefore, can reduce the operating cost of aforementioned X-ray image diagnostic device and nondestructive testing device.
As shown in Figure 7, in X-ray tube assembly shown in Figure 6, between the far-end 611d of vacuum envelope 611 and rotor (permanent magnet) 169, be provided with second bearing part (rolling bearing) 773.In other words, from Fig. 7 as seen, second bearing part 773 is at far-end 611d side bearing vacuum envelope 611.The center of vacuum envelope 611 and bearing part 773 is close to each other.Therefore, when 611 rotations of vacuum capsule, prevent axial runout (centrifugal rotation).Therefore, this is used to reduce the vibration that X-ray tube assembly 601 produces.
Use X-ray tube assembly (601) as shown in Figure 7, will describe the method for injection (charging into) cooling agent 7 between the vacuum envelope (111,611) of X-ray tube body (105,605) and Fig. 2 (4) and the X-ray tube assembly shown in 6.
As shown in Figure 7, the distal portions 611d (111d) of vacuum envelope 611 (111) is directed downwards, and promptly is subjected to the direction of gravity.Like this, the tube's axis of X-ray tube assembly 601 (101) is positioned at parallel with vertical direction.
Therefore, cooling fluid inlet 605b is positioned at the cathode electron gun 613 (13) and plate target 615 (15) tops of vacuum envelope 611 (111).Near cooling fluid inlet 605b below cooling agent 7 is fills up to (entering) is positioned at the remaining air layer.
Be full of inert gas, be that the cooling agent of helium (He) is injected into housing 603 by the position shown in " h " (inlet 605b top) from inlet 605b.
Helium (He) injects its complementary space (air layer) (air of air layer is replaceable).
Therefore, cooling agent 7 had before comprised inert gas in saturated solution.Cooling agent 7 contacts with inert gas between housing 603 and the vacuum envelope 611.
The flange 111e that is used to reduce wettability prevents that cooling agent 7 from entering magnetic fluid vacuum seal 53 and bearing part 55.
If bearing part 55 is closed types, prevent that fully cooling agent 7 from arriving magnetic fluid vacuum seal 53.
Fig. 8 relates to another embodiment of X-ray tube assembly of the present invention.Identical label is used for the identical components that presentation graphs 1 to 7 has been described, and omits its details.Add that 800 label is similar to the member of having described among Fig. 1 to 7, and omit its details.
X-ray tube assembly 801 shown in Fig. 8 has housing 803, and X-ray tube body (rotating anode x-ray tube) 805 is contained in the housing 803.
X-ray tube body 805 is contained in precalculated position in the housing 803 by cooling agent 7.Cooling agent 7 mainly is made of water, and is the water base coolant (non-oil cooling but medium) of conductance less than 1mS/m.
Vacuum envelope 811 contacts with ground connection with the earth polar 9 in the precalculated position of an end that penetrates housing 803.
The inside of vacuum envelope 811 remains on predetermined vacuum level.Vacuum envelope 811 is provided with cathode electron gun (thermal actuation electron emission source) 813 and rotarting anode (plate target, anode) 815.Cathode electron gun 813 is independent of vacuum envelope 811 and is provided with.Plate target 815 is arranged in vacuum envelope 811 and vacuum envelope 811 one.From electron gun 813 electrons emitted and plate target 815 collisions, and plate target 815 is launched the X-ray with predetermined wavelength thus.
Vacuum envelope 811 keeps by magnetic fluid vacuum seal 853 and bearing (rolling bearing, ball/roll bearing) part 855.Magnetic fluid vacuum seal 853 is positioned at the precalculated position of internal circumferential surface of the cylindrical shape stationary part 875 (inserting vacuum envelope 811 from the outside) in the precalculated position that is arranged on housing 803.Bearing part 855 is positioned at the precalculated position of stationary part 875, promptly at the stream than magnetic fluid vacuum seal 853 more close cooling agents 7.
Cylindrical shape stationary part 875 is connected with the high voltage source recipient that is connected in housing 803 outsides by the supporting member 877 that two cylindrical shape thin plates form.Seal 881 is arranged on the side of bearing part 855 towards an end (discharging end) of vacuum envelope 811.Like this, prevent that cooling agent 7 from passing bearing part 855 and magnetic fluid vacuum seal 853 arrives (leaking into) vacuum envelope.
High voltage source recipient 879 is fixed on the center of the lid member 883 of seal casinghousing 803.
Electron gun 813 is by remaining on recipient 879 supportings of covering member 883.Vacuum envelope 811 can the outer perimeter around recipient 879 rotate in housing 803.
Bearing part 855 is used for respect to the vacuum envelope 811 coaxial stationary parts 875 that are provided with.Electric insulation distance piece 885 and bearing part 887 keep vacuum envelope 811, make that vacuum envelope can be in (cylindrical shape) space, i.e. rotation in housing 803.Second bearing 887 is non-closed types.
As mentioned above, one embodiment of the invention are applicable to the X-ray tube assembly.Like this, improve dissipation of heat performance by water base coolant.Therefore, obtain stable long-term behaviour.This is used to prolong the life-span that X-ray image diagnostic device and X-ray tube assembly are configured in nondestructive testing device wherein.According to the present invention, the coolant with high cooling performance is available, does not consider the High-Voltage Insulation character of cooling fluid; Therefore, improved cooling performance.In addition, according to the present invention, prolonged the life-span of X-ray tube assembly itself.Therefore, can reduce the operating cost of aforementioned X-ray image diagnostic device and nondestructive testing device.
After this X-ray tube assembly 901 of the modification example of X-ray tube assembly 801 shown in Figure 8 will be described.As shown in Figure 9, the second cylindrical shape stationary part 989, the second magnetic fluid closure member 991 and bearing (rolling bearing) part 993 are inserted in between the lower member.One is the cylindrical shape stationary part 875 of vacuum envelope 811, and another is the bearing portions 811a of vacuum envelope 811.The stationary part 875 and the vacuum envelope 811 that are arranged on supporting member 877 outsides support by two steps.In this case, each specific rotation (rotary speed) of bearing part and magnetic fluid seal spare becomes approximately half.Therefore, reduced the temperature rise (heating) of bearing part.Therefore, this is used to prevent that bearing part is burned.Improved the vacuum seal performance of magnetic fluid seal spare.
After this X-ray tube assembly 1001 according to the change example of X-ray tube assembly 901 shown in Figure 9 will be described.As shown in figure 10, the second cylindrical shape stationary part 989 is made longer, makes its part as rotor.The outer perimeter of stationary part 989 is provided with stator coil 1095.Like this, the rotary speed of cylindrical shape stationary part 989 can be accurately controlled with 1/2 of the rotating speed that becomes vacuum envelope 811.
After this X-ray tube assembly 1101 according to the change example of X-ray tube apparatus 801 shown in Figure 8 will be described.As shown in figure 11, X-ray tube assembly 1101 is provided with rotating mechanism 1197.Rotating mechanism 1197 is to the optimum position transmission actuating force (revolving force) of vacuum envelope 811.Use rotating mechanism 1197, vacuum envelope 811 is forced to rotate from the outside.
In the X-ray tube assembly shown in Fig. 1 to 11, the inner surface of vacuum envelope can be formed with gettering material such as the film (not shown) of barium (Ba) and titanium (Ti) by vapour deposition.The gas that produces in the gettering material covering/absorption vacuum envelope.From Figure 11 as seen, the gettering material 1199 of current heating can be arranged in vacuum envelope 811 by cathode electron gun 1113.
In the X-ray tube assembly shown in Fig. 1 to 11, although do not describe chiller unit in detail, chiller unit is connected with housing by removable hose coupling certainly.
In the X-ray tube assembly shown in Fig. 1 to 11, plate target and cathode electron gun (thermal actuation electron emission source) are positioned to face with each other along the rotation of vacuum envelope.Vacuum envelope and housing respectively have the window that the X-ray passes its transmission.These windows are along being arranged to towards plate target perpendicular to the direction of axial rotary.Figure 12 relates to another embodiment of X-ray tube assembly of the present invention.Identical label is used for the identical components that presentation graphs 3 has been described, and omits its details.Add that 1300 label is similar to the member of having described among Fig. 3, and omit its details.
As shown in figure 12, X-ray tube assembly 2101 has housing 1203, and X-ray tube body 1205 is contained in the housing 1203.Plate target 1215 forms annular, and can rotate together along with vacuum envelope 1211.
Plate target 1215 and cathode electron gun (thermal actuation electron emission source) 1213 is along being arranged to face with each other perpendicular to the rotation direction of vacuum envelope 1211.Vacuum envelope 1211 has the X-ray and passes the wherein window 1211b of transmission.Housing 1203 has the X-ray and passes the wherein window 1203a of transmission.Window 1211b and 1203a are arranged to along the rotation direction towards plate target 1215.
In X-ray tube assembly 1201, to stator 71 supply scheduled currents.Like this, vacuum envelope 1211 rotates at a predetermined velocity.Therefore, the plate target 1215 that is arranged in the vacuum envelope 1211 rotates at a predetermined velocity.In this state, from the X-ray of plate target 1215 output predetermined wavelengths.The X-ray of output from window 1211b and 1203a to external radiation.Window 1211b is positioned at the precalculated position of the cylindrical shape part of vacuum envelope 1211.Window 1203a is positioned at the precalculated position of the cylindrical shape part of housing 1203.
Although do not provide explanation, cooling agent 7 is set at the heat exchanger 7b cooling among the chiller unit 7a, and circulates between cooling fluid inlet 5b and cooling liquid outlet 5c by pump 7c.
In X-ray tube assembly shown in Figure 12, although do not describe chiller unit in detail, chiller unit is connected with housing by removable hose coupling certainly.
As shown in figure 13, can connect cooling fluid inlet 5b and cooling liquid outlet 5c and not use chiller unit 7a by pipeline 7d.In this case, cooling agent 7 circulates between cooling fluid inlet 5b and cooling liquid outlet 5c by pipeline 7d.Certainly, plate target and cathode electron gun 1213 are positioned to face with each other along the rotation perpendicular to vacuum envelope 1211.
From Figure 14 as seen, cooling fluid inlet 5b can be connected by the stream 1203d that is formed in the housing 1203 with cooling liquid outlet 5c.In this case, cooling agent 7 circulates between cooling fluid inlet 5b and cooling liquid outlet 5c by stream 1203d.Certainly, plate target 1215 and cathode electron gun 1213 are arranged to face with each other along the rotation direction perpendicular to vacuum envelope 1211.
As described in Figure 12 to 14, one embodiment of the invention are applicable to the X-ray tube assembly.Like this, improve dissipation of heat performance by water base coolant.Therefore, obtain stable long-term behaviour.This is used to prolong the life-span that X-ray image diagnostic device and X-ray tube assembly are configured in nondestructive testing device wherein.According to the present invention, the coolant with high cooling performance is available, does not consider the High-Voltage Insulation character of cooling fluid; Therefore, improved cooling performance.In addition, according to the present invention, prolonged the life-span of X-ray tube assembly itself.Therefore, can reduce the operating cost of aforementioned X-ray image diagnostic device and nondestructive testing device.
In the X-ray tube assembly shown in Fig. 1 to 14, plate target and cathode electron gun (thermal actuation electron emission source) are arranged to face with each other.
After this another embodiment of X-ray tube apparatus of the present invention will be described.
Shown in Figure 15 and 16, X-ray tube assembly 1501 for example is configured in the X-ray image diagnostic device and nondestructive testing device.X-ray tube assembly 1501 emission X-rays are to shine target, promptly on the experiment target.X-ray tube assembly 1501 has housing 1503, X-ray tube body (rotating anode x-ray tube) 1505 and chiller unit 7a.
X-ray tube body 1505 is contained in the housing 1503, and to the X-ray of predetermined direction radiation predetermined length.Chiller unit 7a discharges the cooling agent 7 of X-ray tube body 1505 and makes its circulation.X-ray tube body 1505 and chiller unit 7a are by stream, and promptly flexible pipe 4 connects.X-ray tube assembly 1501 comprises X-ray tube body (vacuum tube) 1505, housing 1503 and cooling agent 7.
X-ray tube body 1505 is contained in the precalculated position of housing 1503 by cooling agent 7.Cooling agent 7 mainly is made of for example water, and is to have conductance less than but liquid (water base coolant) of the non-oil cooling of predetermined value.The coolant that has less than the 1mS/m conductance also reduces the corrosion to metal parts as cooling agent 7 to guarantee low-voltage insulation character.Coolant is that wherein for example ethylene glycol and propylene glycol are blended in wherein water with scheduled volume.
X-ray tube body 1505 comprises vacuum envelope 1511, cathode electron gun (thermal actuation electron emission source) 1513 and rotarting anode (plate target, anode) 1515.The cooling agent (water base coolant) 7 that vacuum envelope 1511 is arranged to that rotatably its whole circumference is roughly contacted and is contained in the housing 1503.The inside of vacuum envelope 1511 keeps the vacuum of predetermined extent.
Cathode electron gun 1513 is provided with vacuum envelope 1511 and is independent of vacuum envelope 1511.Negative electrode object 1515 rotatably is positioned at vacuum envelope 1511.From 1515 collisions of electron gun 1513 electrons emitted and plate target, and the X-ray of plate target 1515 radiation predetermined wavelengths thus.
Negative electrode 1513 is arranged on the rotation of vacuum envelope 1511.In other words, negative electrode 1513 is outside the position of plate target 1515.
The first and second magnetic deflection coil 8a and 8b are arranged near the position the negative electrode 1513.The first and second magnetic deflection coil 8a and 8b are arranged on the precalculated position of the annular space S1 between vacuum envelope 1511 outsides and housing 1503 inside.The first and second magnetic deflection coil 8a and 8b are arranged to face with each other by vacuum envelope 1511 (end 11c).
Aforementioned first and second magnetic deflection coil 8a and 8b are as the deflection piece unit.The first and second magnetic deflection coil 8a and 8b be deflection beam magnetically.The first and second magnetic deflection coil 8a and 8b are formed for the magnetic field H of deflection beam.
The rotation of vacuum envelope 1511 along direction be made as first direction d1.Be made as second and third direction d2 and d3 perpendicular to the direction of first direction.Perpendicular to first and the direction of third direction be made as the 4th and the 5th direction d4 and d5.
According to this embodiment, the first and second magnetic deflection coil 8a and 8b are towards second and third direction d2 and d3.Form magnetic field H towards the second magnetic deflection coil 8b along third direction from the first magnetic deflection coil 8a.
Quickened and collection by the electric field between negative electrode 1513 and the plate target 1515 from the thermoinduction electronics of negative electrode 1513 emissions.The thermoinduction electronics is subjected to the influence of the magnetic field H of the first and second magnetic deflection coil 8a and 8b formation.Like this, thermoinduction electronics and plate target collision, plate target is arranged on the position of leaving rotation along the direction (radial direction) perpendicular to rotation.In this embodiment, although do not provide explanation, the thermoinduction electronics by magnetic field H along the four directions to d4 deflection with plate target 1515 collision.
Vacuum envelope 1511 contacts with ground connection with the earth polar 9 that the precalculated position of an end of passing housing 1503 is provided with.
Vacuum envelope 1511 is kept by bearing (rolling bearing, ball/roll bearing) part 1573a and 1573b.Bearing part 1573a and 1573b are with the precalculated position between the lower part.An interior circumferential surface that is arranged on the rotor 1569a of place, an end on holding anode target 1,515 one sides.Another is the outer circumferential surface that comprises the stationary part 72 of the pre-position cylindrical shape insulating part that is arranged on housing 1503.The load of vacuum envelope 1511 is by bearing part 1573a and 1573b supporting.
The outer circumferential surface of rotor 1569a is provided with a plurality of permanent magnet 1569b that admit the thrust (magnetic force) that is used to rotate vacuum envelope 1511.
Stator 71 is arranged on the precalculated position of housing 1503, housing 1503 and the permanent magnet 1569b coaxial line (concentric) that is arranged on around the rotor 1569a.Stator provides magnetic force (thrust) with respect to permanent magnet 1569b with arbitrary timing.
At X-ray tube assembly 1501, to stator 71 supply scheduled currents.Like this, vacuum envelope 1511 rotates at a predetermined velocity.Therefore, the plate target 1515 that is arranged in the vacuum envelope 1511 rotates at a predetermined velocity.Under this state, from cathode electron gun 1513 electrons emitted and plate target 1515 collisions.Like this, export the X-ray of predetermined lengths from plate target 1515.The X-ray of output from window 1511b and 1503a (not shown) to external radiation.Window 1511b is positioned at the precalculated position of the cylindrical shape part of vacuum envelope 1511.Window 1503a is positioned at the precalculated position of the cylindrical shape part of housing 1503.
Magnetic fluid vacuum seal 53 is arranged on the interior circumferential surface of cylindrical shape stationary part 51, and cylindrical shape stationary part 51 is arranged on the precalculated position that a side that keeps negative electrode 1513 is arranged on housing 1503.Bearing part 55 is arranged on the precalculated position of stationary part 51, and compares a side that is positioned near the stream of cooling agent 7 with magnetic fluid vacuum seal 53.
Cylindrical shape stationary part 51 is fixed in the ledge 52 that provides as flange.The supporting member 57 of ledge 52 by comprising insulating part (coaxial line ground) with one heart is fixed in the capsule keeper 59 of housing 1503.Bearing part 55 does not support the load of vacuum envelope 1511, but has the function of the coaxial line location of vacuum envelope 1511 and stationary part 51.
Negative electrode 1513 is fixed in and comprises cylindrical shape insulating part negative electrode keeper 13a.Presumptive area in the outer circumferential surface of negative electrode keeper 13a and the cylindrical portions may of vacuum envelope keeper 59 is fixing by seal 61.Therefore, negative electrode 1513 is fixed in the precalculated position in the vacuum envelope 1511.
The negative electrode keeper 13a that is attached to negative electrode 1513 has the predetermined length of the vacuum envelope keeper 59 that passes housing 3.Connector (high voltage source terminal) 67 on the negative electrode keeper 13a side relative with a side in the earth polar 9 that is provided with housing 1503 is electrically connected.Connector (high voltage source terminal) 67 is used for to negative electrode 1513 power supplies.
Fixture 63 is the bellows form with elastic performance.Therefore, when 1511 rotations of vacuum capsule, prevent that vibration transmission from arriving negative electrode 1513.Fixture 63 has elastic performance, and absorbs the slight assembly error of negative electrode keeper 13a and ledge 52 thus.
Cooling agent 7 injects between the inside presumptive area of the outside presumptive area of vacuum envelope 1511 and housing 1503 by cooling fluid inlet 1505b.Cooling fluid inlet 1505b be positioned at magnetic deflection coil 8 near.Cooling agent 7 is discharged housing 1503 outsides from cooling liquid outlet 1505c.Cooling liquid outlet 1505c is positioned near the earth polar 9.Like this, the plate target 1515 that is configured in the vacuum envelope 1511 is cooled.Comprise that near the wall surface of the vacuum envelope of the window 1511b the plate target 1515 is subjected to the impact of recoil electron (recoil electron is some accelerated electrons with plate target 1515 collisions) and after this is heated.But, agent 7 cooling that is cooled of the wall surface of vacuum envelope.Plate target 1515 and vacuum envelope 1511 high speed rotating.Aforementioned rotary manipulation helps to increase cooling effectiveness.
Negative electrode 1513 and plate target 1515 are positioned at vacuum envelope 1511 inside.Vacuum envelope 1511 inside remain on predetermined vacuum state by magnetic fluid vacuum seal 53.
The cooling agent 7 that is fed to housing 1503 is set at the interior heat exchanger 7b cooling of chiller unit 7a.Heat exchanger 7b has blower fan 7d and radiator 7e.Cooling agent 7 circulates between cooling fluid inlet 1505b and cooling liquid outlet 1505c by pump 7c.Like this, the heat that is subjected to producing among the plate target 1515 of impact of recoil electron and the window 1511b removes to housing 1503 outsides by cooling agent 7.
In this case, except plate target 1515 and window 1511b, cooling agent 7 also cools off magnetic fluid vacuum seal 53, stator 71, first and second magnetic deflection coil 8a and the 8b together.Therefore, each member keeps less than allowable temperature.Form the stream of cooling agent 7 by the shape of design housing 1503.
The end 11c of vacuum envelope 1511 is positioned at an end of vacuum envelope 1511, and the stationary part 51 of close housing 1503.End 11c provides minim gap between the ledge 52 of stationary part 51 and end, promptly have the gap 5d of low wettability.Therefore, gap 5d is used to prevent that cooling agent 7 from entering vacuum envelope 1511 inside.In addition, gap 5d is used to prevent that cooling agent 7 from entering magnetic fluid vacuum seal 53.Therefore, the performance (ability) that prevents vacuum seal 53 undesirably reduces.
According to this embodiment, have the water of high humidity lubricant nature or the water that mixes with glycol as coolant.In order to make contact angle bigger, the surface of the end 11c of vacuum envelope 1511 and preferably scribble resin towards its stationary part 51.Bearing part 55 is closed types, makes that the space between cylinder inside and outside seals by seal.This is used for further preventing that cooling agent 7 from entering magnetic fluid vacuum seal 53.
As mentioned above, one embodiment of the invention are applicable to the X-ray tube assembly.Like this, improve dissipation of heat performance by water base coolant.Therefore, obtain stable long-term behaviour.This is used to prolong the life-span that X-ray image diagnostic device and X-ray tube assembly are configured in nondestructive testing device wherein.According to the present invention, the coolant with high cooling performance is available, does not consider the High-Voltage Insulation character of cooling fluid; Therefore, improved cooling performance.In addition, according to the present invention, prolonged the life-span of X-ray tube assembly itself.Therefore, can reduce the operating cost of aforementioned X-ray image diagnostic device and nondestructive testing device.
After this another embodiment of X-ray tube assembly of the present invention will be described.Identical label is used for the identical components of representing that Figure 15 has described, and omits its details.
Shown in Figure 17 and 18, X-ray tube assembly 1501 has housing 1503, is contained in the X-ray tube body (rotating anode x-ray tube) 1505 in the housing 1503.Although do not provide explanation, X-ray tube assembly 1501 has chiller unit 7a.
X-ray tube body 1505 is contained in the precalculated position of housing 1503 by cooling agent 7.Cooling agent 7 mainly is made up of the water as main component, and is conductance less than but medium (water base coolant) of the non-oil cooling of predetermined value.
X-ray tube body 1505 comprises vacuum envelope 1511, negative electrode (thermal actuation electron emission source) 1513, rotarting anode (plate target, anode) 1515.The whole circumference of vacuum envelope 1511 roughly with charge into housing 1503 in cooling agent 7 contact.The inside of vacuum envelope remains on predetermined vacuum level.
Negative electrode 1513 is positioned at vacuum envelope 1511 inside, is independent of vacuum envelope 1511.Plate target 1515 forms annular.Plate target 1515 is one in vacuum envelope 1511 inside with vacuum envelope 1511.Plate target 1515 with from the collision of negative electrode 1513 electrons emitted, and radiation X-ray thus.
Negative electrode 1513 is arranged on the rotation of vacuum envelope 1511.In other words, negative electrode 1513 is in the outside towards the position of plate target 1515.
The first and second magnetic deflection coil 8a and 8b are arranged near the position the negative electrode 1513.The first and second magnetic deflection coil 8a and 8b are arranged on the precalculated position of the annular space S1 between vacuum envelope 1511 outsides and housing 1503 inside.The first and second magnetic deflection coil 8a and 8b are arranged to face with each other by vacuum envelope 1511 (end 11c).
Aforementioned first and second magnetic deflection coil 8a and 8b are as the deflection piece unit.The first and second magnetic deflection coil 8a and 8b be deflection beam magnetically.The first and second magnetic deflection coil 8a and 8b are formed for the magnetic field H of deflection beam.
According to this embodiment, the first and second magnetic deflection coil 8a and 8b face with each other along the 4th and the 5th direction d4 and d5.Form magnetic field H along the four directions to d4 towards the second magnetic deflection coil 8b from the first magnetic deflection coil 8a.
Quickened and collection by the electric field between negative electrode 1513 and the plate target 1515 from the thermoinduction electronics of negative electrode 1513 emissions.The thermoinduction electronics is subjected to the influence of the magnetic field H of the first and second magnetic deflection coil 8a and 8b formation.Like this, thermoinduction electronics and plate target collision, plate target is arranged on the position of leaving rotation along the direction (radial direction) perpendicular to rotation.In this embodiment, although do not provide explanation, the thermoinduction electronics by magnetic field H along second direction d2 deflection with plate target 1515 collision.
Vacuum envelope 1511 contacts with ground connection with the earth polar 9 that the precalculated position of an end of passing housing 1503 is provided with.
Vacuum envelope 1511 is kept by bearing (rolling bearing, ball/roll bearing) part 1573a and 1573b.
The precalculated position of bearing part 1573a between the interior circumferential surface of the interior circumferential surface of cylindrical shape distal portion 1511d and stationary part 72.Distal portions 1511d is positioned at the end on the side of holding anode target 1515.Stationary part 72 is positioned at the precalculated position of housing 1503, and comprises the cylindrical shape insulating part.
Magnetic fluid vacuum seal 53 is positioned at the outer circumferential surface of cylindrical shape stationary part 51.Stationary part 51 is positioned at the precalculated position of housing in a side that keeps negative electrode 1513.
Bearing part 1573b is positioned at the precalculated position of stationary part 51 and compares with magnetic fluid vacuum seal 53 in the side near the stream of cooling agent 7.
The load of vacuum envelope 1511 is by bearing part 1573a and 1573b supporting.Vacuum envelope 1511 has end 11c in the end with the attached side of bearing part 1573b.The outer circumferential surface of end 11c is provided with rotor 1569a.Rotor 1569a is made of copper.
The outer circumferential surface of rotor 1569a is provided with a plurality of permanent magnet 1569b.The thrust (magnetic force) that permanent magnet 1569b acceptance is used to rotate vacuum envelope 1511.
In the precalculated position of housing 1503 stator 71 is set.Housing 1503 is provided with permanent magnet 1569b coaxial line (with one heart).Stator 71 provides magnetic force (thrust) with respect to permanent magnet 1569b with arbitrary timing.
In X-ray tube assembly 1501, to stator 71 supply scheduled currents.Like this, vacuum envelope 1511 rotates at a predetermined velocity.Therefore, the plate target 1515 that is arranged in the vacuum envelope 1511 rotates at a predetermined velocity.Under this state, from cathode electron gun 1513 electrons emitted and plate target 1515 collisions.Like this, export the X-ray of predetermined wavelengths from plate target 1515.The X-ray of output from window 1511b and 1503a to external radiation.Window 1511b is positioned at the precalculated position of the sidepiece of vacuum envelope 1511.Window 1503a is positioned at the precalculated position of the sidepiece of housing 1503. Window 1511b and 1503a are arranged to towards plate target along the direction of the rotation of vacuum envelope 1511.
Cylindrical shape stationary part 51 is fixed in the ledge 52 that provides as flange.The supporting member 57 of ledge 52 by comprising insulating part (coaxial line ground) with one heart is fixed in the capsule keeper 59 of housing 1503.The fractional load of bearing part 1573b supporting vacuum envelope 1511.Bearing part 1573b has the function of the coaxial line location of vacuum envelope 1511 and stationary part 51.
Negative electrode 1513 is fixed in and comprises cylindrical shape insulating part negative electrode keeper 13a.Presumptive area in the outer circumferential surface of negative electrode keeper 13a and the cylindrical portions may of vacuum envelope keeper 59 is fixing by seal 61.Therefore, negative electrode 1513 is fixed in the precalculated position in the vacuum envelope 1511.
Fixture 63 is the bellows form with elastic performance.Therefore, when 1511 rotations of vacuum capsule, prevent that vibration transmission from arriving negative electrode 1513.Fixture 63 has elastic performance, and absorbs the slight assembly error of negative electrode keeper 13a and ledge 52 thus.
Cooling agent 7 injects between the inside presumptive area of the outside presumptive area of vacuum envelope 1511 and housing 1503 by cooling fluid inlet 1505b.Cooling fluid inlet 1505b be positioned at magnetic deflection coil 8 near.Cooling agent 7 is discharged housing 1503 outsides from cooling liquid outlet 1505c.Cooling liquid outlet 1505c is positioned near the earth polar 9.Like this, the plate target 1515 that is configured in the vacuum envelope 1511 is cooled.
Comprise that near the wall surface of the vacuum envelope of the window 1511b the plate target 1515 is subjected to the impact of recoil electron (recoil electron is some accelerated electrons with plate target 1515 collisions) and after this is heated.But, agent 7 cooling that is cooled of the wall surface of vacuum envelope.Plate target 1515 and vacuum envelope 1511 high speed rotating.Aforementioned rotary manipulation helps to increase cooling effectiveness.
Negative electrode 1513 and plate target 1515 are positioned at vacuum envelope 1511 inside.Vacuum envelope 1511 inside remain on predetermined vacuum state by magnetic fluid vacuum seal 53.
The cooling agent 7 that is fed to housing 1503 is set at the interior heat exchanger 7b cooling of chiller unit 7a.Cooling agent 7 circulates between cooling fluid inlet 1505b and cooling liquid outlet 1505c by pump 7c.Like this, the heat that is subjected to producing among the plate target 1515 of impact of recoil electron and the window 1511b removes to housing 1503 outsides by cooling agent 7.
In this case, except plate target 1515 and window 1511b, cooling agent 7 also cools off magnetic fluid vacuum seal 53, stator 71, first and second magnetic deflection coil 8a and the 8b together.Therefore, each member keeps less than allowable temperature.Form the stream of cooling agent 7 by the shape of design housing 1503.
End 11c and rotor 1569a are near ledge 52.End 11c and rotor 1569a provide minim gap between stationary part 51 and ledge 52, promptly have the gap 5d of low wettability.Therefore, gap 5d is used to prevent that cooling agent 7 from entering vacuum envelope 1511 inside.In addition, gap 5d is used to prevent that cooling agent 7 from entering magnetic fluid vacuum seal 53.Therefore, the performance (ability) that prevents vacuum seal 53 undesirably reduces.
According to this embodiment, have the water of high humidity lubricant nature or the water that mixes with glycol as coolant.In order to make contact angle bigger, the surface of the end 11c of vacuum envelope 1511 and preferably scribble resin towards its ledge 52.Bearing part 1573b is a closed type, makes that the space between cylinder inside and outside seals by seal.This is used for further preventing that cooling agent 7 from entering magnetic fluid vacuum seal 53.
As mentioned above, one embodiment of the invention are applicable to the X-ray tube assembly.Like this, improve dissipation of heat performance by water base coolant.Therefore, obtain stable long-term behaviour.This is used to prolong the life-span that X-ray image diagnostic device and X-ray tube assembly are configured in nondestructive testing device wherein.According to the present invention, the coolant with high cooling performance is available, does not consider the High-Voltage Insulation character of cooling fluid; Therefore, improved cooling performance.In addition, according to the present invention, prolonged the life-span of X-ray tube assembly itself.Therefore, can reduce the operating cost of aforementioned X-ray image diagnostic device and nondestructive testing device.
After this another embodiment of X-ray tube assembly of the present invention will be described.Identical label is used for the identical components of representing that Figure 17 has described, and omits its details.
As shown in figure 19, X-ray tube assembly 1501 has housing 1503, is contained in the X-ray tube body (rotating anode x-ray tube) 1505 in the housing 1503.Although do not provide explanation, X-ray tube assembly 1501 has chiller unit 7a.
According to this embodiment, the X-ray tube assembly does not have first and second magnetic deflection coil 8a and the 8b.As the first deflecting electrode 8c of positive deflection electrode and as the second deflecting electrode 8d of negative sense deflecting electrode be arranged on negative electrode 1513 positions near.The first and second deflecting electrode 8c and 8d are applied associated voltage, the first deflecting electrode 8c is applied forward voltage relatively.On the other hand the second deflecting electrode 8d is applied negative voltage relatively.
The first and second deflecting electrode 8c and 8d are arranged on vacuum envelope 1511 inside, and face with each other with being arranged to be separated by.The first and second deflecting electrode 8c and 8d are fixed in negative electrode 1513 separately by electrical insulation.
The first and second deflecting electrode 8c and 8d are as the deflection piece unit.The first and second deflecting electrode 8c and 8d be deflection beam electrically.The first and second deflecting electrode 8c and 8d produce the electric field E that is used for deflection beam.
According to this embodiment, the first and second deflecting electrode 8c and 8d face with each other along second direction d2 (third direction d3).Form electric field E towards the second deflecting electrode 8d along third direction d3 from the first deflecting electrode 8c.
Quickened and collection by the electric field between negative electrode 1513 and the plate target 1515 from the thermoinduction electronics of negative electrode 1513 emissions.The thermoinduction electronics is subjected to the effect of the electric field E of the first and second deflecting electrode 8c and 8d generation.Potential difference between the first and second deflecting electrode 8c and the 8d little than between negative electrode 1513 and the plate target 1515.
Like this, thermoinduction electronics and plate target collision, plate target is arranged on the position of leaving rotation along the direction (radial direction) perpendicular to rotation.According to this embodiment, the thermoinduction electronics by electric field E along second direction d2 deflection with plate target 1515 collision.
As mentioned above, one embodiment of the invention are applicable to the X-ray tube assembly.Like this, improve dissipation of heat performance by water base coolant.Therefore, obtain stable long-term behaviour.This is used to prolong the life-span that X-ray image diagnostic device and X-ray tube assembly are configured in nondestructive testing device wherein.According to the present invention, the coolant with high cooling performance is available, does not consider the High-Voltage Insulation character of cooling fluid; Therefore, improved cooling performance.In addition, according to the present invention, prolonged the life-span of X-ray tube assembly itself.Therefore, can reduce the operating cost of aforementioned X-ray image diagnostic device and nondestructive testing device.
The present invention is not limited to aforementioned any embodiment.The theme that can not depart from the invention step is revised and is embodied building block.But a plurality of parts appropriate combination that previous embodiment discloses, and form various inventions thus.For example, each parts that can disclose from each embodiment are deleted some parts.But the parts appropriate combination that discloses among the different embodiment.
Coolant 7 is not limited to aqueous coolant, and can use insulating oil and such as the gas of air.Can be used as bearing part with lower member.For example, can use rolling bearing in addition such as ball bearing, sliding bearing and magnetic bearing.Stationary part 51 directly is fixed in housing by insulating part.But, elastic component, antivibration member or absorption component be inserted between insulating part and the housing or insulating part and stationary part 51 between.Like this, can reduce the vibration of the X-ray tube apparatus that produces by the rotation of rotating body.

Claims (26)

1. a rotating anode x-ray tube assembly is characterized in that, comprising:
Vacuum envelope is with the plate target one;
Housing holds described vacuum envelope at least, and rotatably keeps described vacuum envelope;
Circulating path makes coolant be recycled to the plate target of described at least vacuum envelope with closed state;
Negative electrode holds and is arranged in the described vacuum envelope;
Cathode supporting spare supports described negative electrode;
Bearning mechanism and vacuum seal mechanism are inserted in described vacuum envelope and housing or directly or indirectly are fixed between the static element of described housing; And
Actuator unit is used to rotate described vacuum envelope.
2. assembly as claimed in claim 1 is characterized in that, described vacuum seal mechanism comprises the magnetic fluid vacuum seal.
3. assembly as claimed in claim 1 is characterized in that described coolant passes heat exchanger, and circulates between described housing and described vacuum envelope by circulating pump.
4. assembly as claimed in claim 1 is characterized in that, described coolant comprises the inert gas solute of saturation condition in advance, and contacts with inert gas between described housing and the described vacuum envelope.
5. assembly as claimed in claim 1 is characterized in that, described coolant is with the water base coolant of water as main component.
6. assembly as claimed in claim 5 is characterized in that, described water base coolant has the conductance less than 1mS/m.
7. assembly as claimed in claim 1, it is characterized in that, described vacuum envelope or and the member that is wholely set of described vacuum envelope and described housing or and the member that is wholely set of described housing between them, form narrow gap, enter described vacuum envelope to prevent the described coolant that between described vacuum envelope and described housing, circulates.
8. assembly as claimed in claim 1 is characterized in that, also comprises:
Be inserted in the absorbing mechanism between described cathode supporting spare and the described vacuum envelope.
9. assembly as claimed in claim 1 is characterized in that, also comprises:
Middle rotating cylinder is inserted between described cathode supporting spare and the described vacuum envelope; And
Second Bearning mechanism and second vacuum seal respectively are arranged between described cathode supporting spare and the described middle rotating cylinder and between described middle rotating cylinder and the described vacuum envelope.
10. assembly as claimed in claim 9 is characterized in that, also comprises:
Be used to rotate the actuator unit of described middle rotating cylinder.
11. assembly as claimed in claim 1 is characterized in that, described actuator unit is a stator.
12. assembly as claimed in claim 9 is characterized in that, described actuator unit is the stator that produces rotating magnetic field, and makes described vacuum envelope and/or described middle rotating cylinder rotation.
13. assembly as claimed in claim 1 is characterized in that, also comprises:
Removable hose coupling; And
Flexible pipe is connected with described housing by described hose coupling, and makes described coolant circulation.
14. assembly as claimed in claim 1 is characterized in that, also comprises:
Getter is arranged in the described vacuum envelope, and absorbs gas.
15. assembly as claimed in claim 1 is characterized in that, also comprises:
Getter is arranged in the described vacuum envelope, and absorbs gas; And
Heater is arranged in the described vacuum envelope, and heats described getter.
16. assembly as claimed in claim 1 is characterized in that, described vacuum envelope and described housing respectively have transmission X-ray and along perpendicular to the window of described rotation direction towards described plate target.
17. assembly as claimed in claim 1 is characterized in that, described vacuum envelope and described housing respectively have transmission X-ray and the window along described rotation direction towards described plate target.
18. assembly as claimed in claim 1 is characterized in that, also comprises:
Deflector unit, deflection is from the electronics of described cathode emission.
19. a rotating anode x-ray tube assembly is characterized in that, comprising:
Plate target is by producing the X-ray with electronic impact;
The electron emission source of emitting electrons;
Vacuum tank with described plate target one, and remains on described plate target and described electron emission source under the predetermined low pressure;
Housing holds described vacuum tank and cooling liquid, makes cooling liquid circulate between described vacuum tank and described housing;
Supporting member is fixed in described housing with described electron emission source;
Keeper rotatably remains on described vacuum tank in the described housing; And
Vacuum seal is arranged between described vacuum tank and the described keeper, makes described vacuum tank rotate in described housing, keeps the vacuum of described vacuum tank inside simultaneously.
20. assembly as claimed in claim 19 is characterized in that, described fluid seal comprises the magnetic fluid vacuum seal.
21. assembly as claimed in claim 19, it is characterized in that, described vacuum tank or and the member that is wholely set of described vacuum tank and described housing or and the member that is wholely set of described housing between them, form narrow gap, enter described vacuum tank to prevent the described coolant that between described vacuum tank and described housing, circulates.
22. assembly as claimed in claim 19 is characterized in that, described cooling liquid is with the water base coolant of water as main component.
23. assembly as claimed in claim 22 is characterized in that, described water base coolant has the conductance less than 1mS/m.
24. assembly as claimed in claim 19 is characterized in that, described vacuum envelope and described housing respectively have transmission X-ray and along perpendicular to the window of described rotation direction towards described plate target.
25. assembly as claimed in claim 19 is characterized in that, described vacuum envelope and described housing respectively have transmission X-ray and the window along described rotation direction towards described plate target.
26. assembly as claimed in claim 19 is characterized in that, also comprises:
Deflector unit, deflection is from the electronics of described cathode emission.
CNA2007101623264A 2006-09-29 2007-09-27 Rotating anode x-ray tube assembly Pending CN101154550A (en)

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JP2006269314 2006-09-29
JP2006269314 2006-09-29
JP2007199965 2007-07-31

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CN102647842A (en) * 2011-02-16 2012-08-22 西门子公司 X-ray radiator system and medical X-ray imaging system with two cooling devices
CN102754532A (en) * 2010-02-08 2012-10-24 株式会社日立医疗器械 X-ray tube device and x-ray ct device
CN103165367A (en) * 2013-03-22 2013-06-19 苏州明威医疗科技有限公司 Rotating anode CT (computed tomography) bulb tube
CN102084268B (en) * 2008-07-11 2014-12-10 东芝电子管器件株式会社 Composition for reflective film, reflective film, and X-ray detector
CN104285271A (en) * 2012-07-11 2015-01-14 西门子公司 Rotary anode arrangement and X-ray tube
CN104470171A (en) * 2013-09-18 2015-03-25 清华大学 X-ray device and CT device provided with same
CN104934282A (en) * 2014-03-20 2015-09-23 株式会社东芝 Fixed anode X-ray tube device and manufacture method thereof
CN107275174A (en) * 2016-04-01 2017-10-20 东芝电子管器件株式会社 X-ray pipe device
CN108400079A (en) * 2018-05-10 2018-08-14 同方威视技术股份有限公司 Pencil beam X-ray tube and back scattering detection device
CN111243924A (en) * 2020-01-14 2020-06-05 中国电子科技集团公司第三十八研究所 Rotating target mechanism for ray source
CN112888368A (en) * 2018-09-28 2021-06-01 万睿视影像有限公司 Vacuum penetration for magnetically assisted bearings
CN113225886A (en) * 2021-07-07 2021-08-06 中国工程物理研究院应用电子学研究所 Water-cooling rotary radiation conversion target for high-energy microfocus X-ray
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CN102084268B (en) * 2008-07-11 2014-12-10 东芝电子管器件株式会社 Composition for reflective film, reflective film, and X-ray detector
CN102754532A (en) * 2010-02-08 2012-10-24 株式会社日立医疗器械 X-ray tube device and x-ray ct device
CN102647842B (en) * 2011-02-16 2016-12-07 西门子公司 X-ray emitter system and the medical X-ray imaging system having two chillers
CN102647842A (en) * 2011-02-16 2012-08-22 西门子公司 X-ray radiator system and medical X-ray imaging system with two cooling devices
US9847206B2 (en) 2012-07-11 2017-12-19 Siemens Aktiengesellschaft Rotary anode arrangement and X-ray tube
CN104285271A (en) * 2012-07-11 2015-01-14 西门子公司 Rotary anode arrangement and X-ray tube
CN103165367A (en) * 2013-03-22 2013-06-19 苏州明威医疗科技有限公司 Rotating anode CT (computed tomography) bulb tube
CN104470171A (en) * 2013-09-18 2015-03-25 清华大学 X-ray device and CT device provided with same
CN104934282A (en) * 2014-03-20 2015-09-23 株式会社东芝 Fixed anode X-ray tube device and manufacture method thereof
CN107275174A (en) * 2016-04-01 2017-10-20 东芝电子管器件株式会社 X-ray pipe device
CN107275174B (en) * 2016-04-01 2019-04-16 佳能电子管器件株式会社 X-ray pipe device
US10529528B2 (en) 2016-04-01 2020-01-07 Canon Electron Tubes & Devices Co., Ltd. X-ray tube assembly including a first cylindrical pipe, a second cylindrical pipe, and an elastic member
CN108400079A (en) * 2018-05-10 2018-08-14 同方威视技术股份有限公司 Pencil beam X-ray tube and back scattering detection device
CN112888368A (en) * 2018-09-28 2021-06-01 万睿视影像有限公司 Vacuum penetration for magnetically assisted bearings
CN111243924A (en) * 2020-01-14 2020-06-05 中国电子科技集团公司第三十八研究所 Rotating target mechanism for ray source
CN111243924B (en) * 2020-01-14 2022-10-25 中国电子科技集团公司第三十八研究所 Rotating target mechanism for ray source
CN113225886A (en) * 2021-07-07 2021-08-06 中国工程物理研究院应用电子学研究所 Water-cooling rotary radiation conversion target for high-energy microfocus X-ray
CN113675059A (en) * 2021-08-20 2021-11-19 中国工程物理研究院流体物理研究所 Pulse X-ray diode for measuring material space distribution characteristics
CN113675059B (en) * 2021-08-20 2023-03-21 中国工程物理研究院流体物理研究所 Pulse X-ray diode for measuring material space distribution characteristics

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