CN101002029A - Microvalve assemblies and related methods - Google Patents
Microvalve assemblies and related methods Download PDFInfo
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- CN101002029A CN101002029A CN 200580024574 CN200580024574A CN101002029A CN 101002029 A CN101002029 A CN 101002029A CN 200580024574 CN200580024574 CN 200580024574 CN 200580024574 A CN200580024574 A CN 200580024574A CN 101002029 A CN101002029 A CN 101002029A
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Abstract
A valve chip may include a substrate having first and second faces and openings between the first and second faces, and a plurality of flexible valve flaps on one of the faces of the substrate with each flexible valve flap being associated with at least one of the openings. The valve chip may be packaged by forming a frame having an opening therein, and securing the valve chip in the opening of the frame. More particularly, the valve chip may be secured in the opening so that central portions of the first and second faces of the substrate are exposed through the opening in the frame and so that a fluid seal is provided between the frame and edges of the substrate. Related valves, valve assemblies, and methods are also discussed.
Description
Association request
It is 60/590,483 U.S. Provisional Patent Application that the application advocates to apply for July 23, sequence number in 2004, and applies for interests and preference that July 23, sequence number in 2004 are 60/590,669 U.S. Provisional Patent Application.By reference above-mentioned two contents that provisional application disclosed all are incorporated in this specification.U.S. Patent Application Serial Number (acting on behalf of case 9451-4), denomination of invention that the application also is associated with application simultaneously are the patent application of " Methods of Operating Microvalve Assemblies and RelatedStructures and Devices ", by reference the full content that this application disclosed are incorporated in this specification.
Technical field
The present invention relates to the valve field, relate more specifically to little valve and microvalve assemblies and associated method.
Background technique
Can use traditional Electromagnetic Drive air pressure valve to control fluid stream.When energising or when outage, the Electromagnetic Drive air pressure valve can cut off also/or allow one or more fluid stream.The actuator of Electromagnetic Drive air pressure valve is an electromagnet.When valve is switched on, produce magnetic field with the active force pulling of antagonistic spring also/or promote guiding valve.When outage, be back to its home position by the spring action guiding valve.In the mode of example at reference " Technical Principles of Valves " (omega.com, One Omega Drive, Stamford, CT, 06907, J-3 to J-7) in the Electromagnetic Drive air pressure valve has been discussed, by reference the content that the document disclosed all has been incorporated in this specification.
Air stream (or other fluid streams) by valve can be the function of several controlled ports connections and several switching positions.Directional valve is functional can be described by being referred to as the combination that " path " reach " position ", and for example, the four-way on-off valve also can be described as 4/2 access valve.Term " path " defines a plurality of controlled stream (representing with the arrow in the ISO symbolism) that valve has.For term " position ", the Pneumatic directional valve can have two or three switching positions (representing with the square in the ISO symbolism).
In traditional five-way dibit Electromagnetic Drive air pressure valve (5/2 valve), can between first and second actuator port, first and second discharge port and air supply port, control fluid stream.When solenoid is switched on, 5/2 valve can set up the fluid coupling between the air supply port and first actuator port and between second actuator port and second discharge port.When solenoid cut off the power supply, 5/2 valve can be set up the fluid coupling between air supply port and second actuator port and first actuator port and first discharge port.Therefore, 5/2 valve can be used to control the operation of the pneumatic actuator that is coupled to actuator port.
But the Electromagnetic Drive air pressure valve can suffer meeting to shorten the mechanical wear in its working life.In addition, by the Electromagnetic Drive air pressure valve provide functional be limited.In addition, the Electromagnetic Drive air pressure valve can not remain on on-position when outage.
Summary of the invention
According to some embodiments of the present invention, valve assembly can comprise the main casing that defines five chambeies, four valves and controller.First chamber can be coupled to the low pressure discharge port, and second chamber can be coupled to first actuator port, and the 3rd chamber can be coupled to high pressure supply port, and the 4th chamber can be coupled to second actuator port, and the 5th chamber can be coupled to the low pressure discharge port.In addition, first valve can be between first chamber and second chamber, and wherein first response valve allows or block first chamber in fact to be communicated with fluid between second chamber in first electrical signal; Second valve can be between second chamber and the 3rd chamber, and wherein second response valve allows or block second chamber in fact to be communicated with fluid between the 3rd chamber in second electrical signal; The 3rd valve can be between the 3rd chamber and the 4th chamber, and wherein the 3rd response valve allows or block the 3rd chamber in fact to be communicated with fluid between the 4th chamber in the 3rd electrical signal; And the 4th valve can be between the 4th chamber and the 5th chamber, wherein the 4th response valve allows or blocks the 4th chamber in fact to be communicated with fluid between the 5th chamber in the 4th electrical signal.
In addition, controller can be set think that each valve assembly produces first, second, third, and the 4th electrical signal, and controller can be set pass through order status to advance valve.Under first state, described second valve and described the 4th valve can be opened and described first valve and described the 3rd valve can be closed, allow between described second chamber and described the 3rd chamber thus and described the 4th chamber is communicated with fluid between described the 5th chamber, and block between described first chamber and described second chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber.Under second state after described first state, can open described second valve also can close described first valve, the 3rd valve, reach the 4th valve, allow described second chamber to be communicated with thus with fluid between described the 3rd chamber, and block between described first chamber and described second chamber thus in fact, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.Under the third state after described second state, described second valve and described the 3rd valve can be opened and described first valve and described the 4th valve can be closed, allow between described second chamber and described the 3rd chamber thus and described the 3rd chamber is communicated with fluid between described the 4th chamber, and block between described first chamber and described second chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber.Under the four condition after the described third state, can open described the 3rd valve also can close described first valve, second valve, reach the 4th valve, allow described the 3rd chamber to be communicated with thus with fluid between described the 4th chamber, and block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.Under the 5th state after described four condition, described first valve and described the 3rd valve can be opened and described second valve and described the 4th valve can be closed, allow between described first chamber and described second chamber thus and described the 3rd chamber is communicated with fluid between described the 4th chamber, and block between described second chamber and described the 3rd chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber.
According to other embodiments of the invention, valve assembly can comprise housing, this housing has first chamber that is coupled to the low pressure discharge port, be coupled to second chamber of first actuator port, be coupled to the 3rd chamber of high pressure supply port, be coupled to the 4th chamber of second actuator port, and the 5th chamber that is coupled to the low pressure discharge port.Valve assembly also can comprise the 3rd valve between second valve, the 3rd chamber and the 4th chamber between first valve, second chamber and the 3rd chamber between first chamber and second chamber and the 4th valve between the 4th chamber and the 5th chamber.
The second and the 4th valve can be opened and the first and the 3rd valve can be closed so that first state to be set, allow thus from chamber, the 3rd chamber to the second and be communicated with, and block between first chamber and second chamber thus in fact and the 3rd chamber is communicated with fluid between the 4th chamber from the fluid in five chambeies, the 4th chamber to the.After first state, can open second valve also can close first, the 3rd, reach the 4th valve so that second state to be set, allow thus to be communicated with from the fluid in chamber, the 3rd chamber to the second, and block between first chamber and second chamber thus in fact, between the 3rd chamber and the 4th chamber and the 4th chamber is communicated with fluid between the 5th chamber.After second state, second valve and the 3rd valve be can open and first valve and the 4th valve also can be closed so that the third state to be set, allow thus from chamber, the 3rd chamber to the second and be communicated with, and block between first chamber and second chamber thus in fact and the 4th chamber is communicated with fluid between the 5th chamber from the fluid in four chambeies, the 3rd chamber to the.
After the third state, can open the 3rd valve also can close first, second, reach the 4th valve so that four condition to be set, allow thus to be communicated with from the fluid in four chambeies, the 3rd chamber to the, and block between first chamber and second chamber thus in fact, between second chamber and the 3rd chamber and the 4th chamber is communicated with fluid between the 5th chamber.After four condition, first valve and the 3rd valve be can open and second valve and the 4th valve also can be closed so that the 5th state to be set, allow thus from chamber, second chamber to the first and be communicated with, and block between second chamber and the 3rd chamber thus in fact and the 4th chamber is communicated with fluid between the 5th chamber from the fluid in four chambeies, the 3rd chamber to the.
According to other embodiments of the invention, valve can comprise substrate with first and second apparent surface, a plurality of holes by substrate between first surface and the second surface, with and on paired input pad.A plurality of flexible flaps can be set on substrate, and wherein each flexible flap all is associated with at least one of each hole in the substrate, and flexible flap can be set to open in response to the electrical signal that is applied to paired input pad or to block each hole in fact.In addition, framework can expose first and second surperficial core of substrate, and between the edge of framework and substrate fluid-tight is set thus thus in its surrounded by edges and support substrates by the opening in the framework.
According to other embodiments of the invention, Valve core blade can comprise the substrate with first and second surface and the opening between first and second surface, and be arranged in a plurality of flexible flaps on the surface of substrate, wherein each flexible flap all is associated with at least one opening.Framework can form wherein has opening, and Valve core blade can be fixed in the opening of framework.Particularly, can expose first and second surperficial core of substrate by the opening in the framework, and can between the edge of framework and substrate, fluid-tight be set.
According to other embodiments of the invention, valve assembly can comprise main casing, this main casing define first, second, and the 3rd chamber, and define first valve shell between first chamber and second chamber and second valve shell between second chamber and the 3rd chamber.Can in main casing, be provided with first, second, third, reach the 4th electric housing lead-in wire, the part of each during wherein first and second electric housing of exposure goes between in first valve shell, and the part during wherein exposure the 3rd and the 4th electric housing goes between in second valve shell.
First valve in first valve shell can with first and second electric housing lead-in wire electric coupling, first valve wherein is set is communicated with fluid between second chamber to allow in response to the electrical signal that on first and second electric housing lead-in wire, provides or to block first chamber in fact.Second valve in second valve shell can with the electric coupling of the 3rd and the 4th electric housing lead-in wire, second valve wherein is set is communicated with fluid between the 3rd chamber to allow in response to the electrical signal that on the 3rd and the 4th electric housing lead-in wire, provides or to block second chamber in fact.In addition, controller can be electrically coupled to first, second, third, and the 4th electric housing lead-in wire, and controller can be set allow or block between first chamber and second chamber in fact and electrical signal that second chamber is communicated with fluid between the 3rd chamber to produce.
Description of drawings
Fig. 1 is the viewgraph of cross-section according to the electrostatically actuated valve of some embodiments of the present invention.
Fig. 2 is the planimetric map according to the Valve core blade that comprises the electrostatically actuated valve array of some embodiments of the present invention.
Fig. 3 is the explanatory view according to the valve assembly of some embodiments of the present invention, and the control pneumatic actuator is shown here.
Fig. 4 A-Fig. 4 F is the explanatory view that illustrates according to the programmed sequence of operations of the valve assembly of some embodiments of the present invention.
Fig. 5 is the front view according to the packaging frame that is used for Valve core blade of some embodiments of the present invention.
Fig. 6 is the planimetric map according to the encapsulation Valve core blade of some embodiments of the present invention.
Fig. 7 is the front view according to the packaging frame that is used for Valve core blade of some embodiments of the present invention.
Fig. 8 is the planimetric map according to the encapsulation Valve core blade of some embodiments of the present invention.
Fig. 9 is the planimetric map according to the electrical lead that is used for packaging frame of some embodiments of the present invention.
Figure 10 is the exploded view according to the main casing of some embodiments of the present invention.
Figure 11 is according to the rear perspective view after the main casing assembling of Figure 10 of some embodiments of the present invention.
Figure 12 is according to the front perspective view after the main casing assembling of Figure 10 of some embodiments of the present invention.
Figure 13 is according to the face upwarding stereogram after the main casing assembling of Figure 10 of some embodiments of the present invention.
Figure 14 is the stereogram according to the electronics sub-component of some embodiments of the present invention.
Figure 15 is the front perspective view according to the printed circuit board (PCB) of the electronics sub-component of Figure 14 of some embodiments of the present invention.
Figure 16 is the perspective view according to the electronics sub-component of Figure 14 of some embodiments of the present invention.
Figure 17 is the rear perspective view according to the printed circuit board (PCB) of the electronics sub-component of Figure 14 of some embodiments of the present invention.
Figure 18 is the stereogram according to the matrix of the valve assembly of some embodiments of the present invention.
Figure 19 is the front perspective view according to the valve assembly of some embodiments of the present invention, and wherein the encapsulation with the electronics sub-component is depicted as transparent.
Figure 20 is the stereogram according to the valve assembly of Figure 19 of some embodiments of the present invention, and wherein the non-metallic part of main casing is removed with lead-in wire that main casing the is shown orientation with respect to the Valve core blade assembly.
Figure 21 is the face upwarding stereogram of the main casing of Figure 19, wherein encapsulates the Valve core blade assembly and is inserted in its shell.
Figure 22 is the rear perspective view according to the valve assembly of Figure 19 of some embodiments of the present invention, and wherein the encapsulation with the electronics sub-component is depicted as transparent.
Figure 23 is the front view according to the baffle plate of some embodiments of the present invention.
Figure 24 and Figure 25 are the planimetric maps of observing from the not ipsilateral of encapsulation Valve core blade according to some embodiments of the present invention.
Figure 26 is the exploded view according to the encapsulation Valve core blade of some embodiments of the present invention.
Figure 27 is the planimetric map according to the electrical lead that is used for packaging frame of some embodiments of the present invention.
Figure 28 is the exploded view according to the main casing of some embodiments of the present invention.
Figure 29 is the rear perspective view according to the assembling main casing of some embodiments of the present invention.
Figure 30 is the front perspective view according to the assembling main casing of some embodiments of the present invention.
Figure 31 is the face upwarding stereogram according to the main casing of some embodiments of the present invention.
Figure 32 is the amplification cross-sectional view of the packing of the main casing got of the section line I-I ' along Figure 29 and Figure 30 according to some embodiments of the present invention and encapsulation Valve core blade.
Figure 33 is the stereogram according to the valve assembly of some embodiments of the present invention, wherein the non-metallic part of main casing is removed with lead-in wire that main casing the is shown orientation with respect to the Valve core blade assembly.
Figure 34 is the cross-sectional view that the edge according to some embodiments of the present invention comprises the valve assembly that the section line I-I ' of Figure 29 of filter and Figure 30 is got.
Figure 35 and Figure 36 are that wherein battery cover is closed respectively and opened according to the stereogram of the electronics sub-component of some embodiments of the present invention.
Figure 37 and Figure 38 are top perspective view and the face upwarding stereograms that is used for the matrix of valve assembly according to some embodiments of the present invention.
Figure 39 and Figure 40 are the stereograms according to the valve assembly of some embodiments of the present invention.
Figure 41 is a block diagram, and functional such as the custom circuit of specific integrated circuit (ASIC) that is used for the electronics sub-component according to some embodiments of the present invention is shown.
Figure 42 is the explanatory view according to the electronics sub-component that comprises custom circuit of some embodiments of the present invention.
Figure 43 is a table, show according to the input of the custom circuit of some embodiments of the present invention with export between logical relation.
Figure 44 is a table, shows the program that is used for state transitions and polarity inversion according to some embodiments of the present invention.
Figure 45 A and Figure 45 B are tables, show the stitch definition according to the custom circuit of some embodiments of the present invention.
Figure 46 A and Figure 46 B are tables, show the design parameter that is used for custom circuit according to some embodiments of the present invention.
Figure 47 A and Figure 47 B are front perspective view and the rear perspective view according to the valve assembly that comprises valve chest, matrix and electronics sub-component of some embodiments of the present invention.
Figure 48 is the stereogram of shared matrix that is configured to receive a plurality of valve chests and electronics sub-component according to some embodiments of the present invention.
Figure 49 A and Figure 49 B are the schematic representation that illustrates according to the valve assembly that is used for vacuum application of some embodiments of the present invention.
Figure 50 A and Figure 50 B are the stereogram and the cross-sectional views of integrated according to an embodiment of the invention air pressure valve and cylinder assembly.
Embodiment
The present invention is explained in more detail embodiments of the invention shown in the drawings below with reference to accompanying drawing.But the present invention can much different forms implement, and should not be construed as limited to listed embodiment here.On the contrary, provide these embodiments' purpose to be to make the content that discloses thorough and complete here, and scope of the present invention is conveyed to those skilled in the art fully.
In the accompanying drawings, the thickness of layer, zone and/or line and/or width illustrate for clear the exaggeration.Should be appreciated that when the element such as layer, zone or substrate is mentioned be to be positioned on another element, it can be located immediately on this another element, or also other spacer elements can be arranged betwixt.On the contrary, be to be located immediately on another element if be mentioned such as the element of layer, zone or substrate, then do not have other spacer elements therebetween.Similarly, when element is mentioned " being connected to " or " being coupled to " another element, then it can be connected directly to or be coupled to this another element, or also other spacer elements can be arranged betwixt.On the contrary, be to be connected directly to or to couple directly to another element if element is mentioned, then do not have other spacer elements betwixt.In this manual, term " and/or " comprise one or more associations list project arbitrarily and all combinations.
In addition, here can use such as below, on, upper and lower and/or inferior relational terms the relation of an element shown in the accompanying drawing with respect to other elements described.Should be understood that relational terms is intended to comprise the different azimuth of the device except the orientation shown in the accompanying drawing.For example, if the device in an accompanying drawing is reversed, the element that then is described as being positioned at other elements belows will be positioned at the top of other elements.Therefore, schematically can comprise under the term over-azimuth and orientation, below both.
Although should be appreciated that using term first, second and third to wait describes various zones, layer, part and/or step here, these zones, layer, part and/or step should not limited by these terms.Use the purpose of these terms only to be zone, layer, part or a step and another zone, layer, part or step are differentiated.Therefore, under the situation that does not break away from instruction of the present invention, first area described below, layer, part or step also can be called as second area, layer, part or step, and similarly, second area, layer, part or step also can be called as first area, layer, part or step.Similarly label is represented similar elements in the whole text.
The purpose of term used herein only is to describe certain embodiments, and and is not intended to restriction the present invention.In this manual, singulative also is intended to comprise plural form, unless the clear and definite opposite explanation of Wen Zhongyou.It should also be understood that, when using term " to comprise " in this manual, it is intended to represent the existence of described feature, integral body, step, operation, element and/or assembly, and does not get rid of the existence of one or more other features, integral body, step, operation, element, assembly and/or its set or additional.
Unless define especially, employed here whole terms (comprising technology and scientific and technical terminology) all have with the present invention under the identical implication of those skilled in the technology concerned's common sense.It is also understood that such as those terms that in general dictionary, define to be interpreted as having the implication consistent, and should not idealize or excessively doctrine explained, unless here define so clearly with its implication in the background of association area.
In pneumatic actuator, two actuator cavities are separated by piston, use the pressure reduction in the actuator cavities to come mobile piston.Can use bar with the transmission of movement of piston to the device that activated in the actuator outside.Can use the air-flow of controlling one or two actuator cavities that enters or leave pneumatic actuator according to the valve assembly of some embodiments of the present invention.
Valve assembly according to some embodiments of the present invention can comprise a plurality of valve arrays, and wherein each valve array all is arranged on independently on the substrate.Each valve all can comprise by (a plurality of) valve opening of substrate and the electrostatically actuated flexible flap that is used for gate (a plurality of) valve opening.Particularly, each flexible flap all can be anchored into substrate and keep free at whole other edges at first end.In addition, the free end of each flexible flap all can curl away from substrate, makes each flexible flap not exist the electrostatic force that applies to open often.Flap can be arranged on the top surface of substrate, and by opening the stream that (a plurality of) valve opening can form the low pressure on the top surface from the high pressure on the bottom surface of substrate to substrate.
Figure 1 illustrates structure according to the single valve of some embodiments of the present invention.As shown in Figure 1, valve 100 can comprise substrate 101 (such as silicon substrate), be arranged on the fixed electrode 105 between first isolation layer 103 and second isolation layer 107 on the top surface of substrate 101 and be arranged on the 3rd isolation layer 109 and the 4th isolation layer 115 between flexible electrode 111.Fixed electrode 105 and flexible electrode 111 for example all can comprise such as metal layers such as Ti, Cr, Au, Al, Cu, W, Pt with and/or such as other flexible conducting material layers of conducting polymer (for example polyanniline) and/or conductive oxide film (for example ITO).When using specific conductive metal film (for example Au, Ag, Al, Cu and/or Pt), can on the upper surface of conductive metal film and/or lower surface, thin adhesion layer (for example Ti and/or Cr) be set so that the suitable stickiness to the isolation layer of flexible flaps to be provided.More isolation layer 103,107,109, and 115 can be such as polyimide or other photopolymers polymer material layer.In alternate embodiment, can save one in second isolation layer 107 and the 3rd isolation layer 109, and/maybe can save first isolation layer 103.Additional or alternately, isolation layer 107 and/or isolation layer 109 can comprise the ceramic dielectric such as silica (SiO2).
The 3rd isolation layer 109 and the 4th isolation layer 115 and flexible electrode 111 close on each valve opening 119 that passes substrate 101 and have defined flexible flap 117.Can by wet chemical etch also/or pass substrate by deep reactive ion etch and form valve opening.Flexible flap 117 is configured to not exist between fixed electrode 105 and flexible electrode 111 top surface that curls under the situation that attracts electrostatic force away from substrate to be in the normally open position, passes (a plurality of) valve opening 119 also by the flexible flap 117 on the top surface of substrate 101 to allow fluid from the bottom surface of substrate 101.Can attract electrostatic force to come cut-off valve 100 by between fixed electrode 105 and flexible electrode 111, producing, make flexible flap 117 block (a plurality of) valve opening 119.Particularly, make and wherein have predetermined stress by making isolation layer 109 and 115, can be so that the tops that flexible flap 117 curls away from substrate 101 be in the normally open position.Be the U.S. Patent number 6 of " Microelectromechanical FlexibleMembrane Electrostatic Valve Devices And Related FabricationMethods " for example in people, denominations of invention such as mandate Scott H.Goodwin-Johansson, 590, micro electronmechanical static control valve unit has been discussed in 267, by reference its full content has been incorporated in this specification.According to embodiments of the invention, can utilize above-mentioned other removable valve members such as barrier film of processing with reference to the flap or utilization such as the microcomputer of figure 1 discussion that electrostatically actuated valve is set.
Valve array 100
1-x, 1-yCan be arranged on the top surface of single substrate so that Valve core blade 131 shown in Figure 2 to be provided.As shown in Figure 2, a plurality of valves 100
1-x, 1-yCan on Valve core blade 131, in a row also become row to arrange, wherein each valve 100
1-x, 1-yAll have (a plurality of) valve opening 119 (or hole) and flexible flap 117 (as shown in Figure 1) separately respectively.In addition, each valve 100 on the Valve core blade 131
1-x, 1-yFixed electrode 105 all can be electrically connected to each other and each valve 100 on the Valve core blade 131
1-x, 1-y Flexible electrode 111 all can be electrically connected to each other, can between fixing and flexible electrode, provide voltage potential to produce electrostatic attraction thus with between.Though figure 2 illustrates a plurality of valves (wherein each valve all comprises a flap and a hole), also can be Valve core blade according to embodiments of the invention other settings are provided.For example, the Valve core blade according to some embodiments of the present invention can comprise the single valve with single flap and single hole.Alternately, Valve core blade can comprise one or more valves, and wherein at least one valve comprises the single flap that is used to open and cut out a plurality of holes.
Therefore, can open also cut-off valve array 100 simultaneously
1-x, 1-yParticularly, can close electromotive force and make whole valve openings 119 on whole flexible flap 117 cut-off valve chips 131 applying between the flexible electrode 111 of the fixed electrode 105 of array and array to produce electrostatic attraction.Similarly, can between the fixed electrode 105 of array and flexible electrode 111, apply and open electromotive force and make whole flexible flaps 117 open the whole valve openings 119 on the Valve core blade 131 to remove electrostatic attraction.By common activated valve array 100 is set on chip 131
1-x, 1-y, the bigger flow of flow that Valve core blade 131 can regulate and single valve can be regulated.Therefore, can provide the Valve core blade of different flow size (Cv), the big I of flow is up to the flow size of 1.0Cv.Can for example be provided at about 0.001Cv to the interior flow size of about 10Cv scope.(in this manual, flow coefficient C v is based on the system of English unit, and is defined as in 11b/in
2Pressure drop under 60 with the current of U.S. gallon/minute by valve.) for example can wait to determine the flow size by the quantity of valve, the size of valve opening.Therefore, bigger Valve core blade can provide bigger flow size.Alternately, can independently select and control respectively the valve that is on the identical chips.
Figure 3 illustrates explanatory view according to the valve assembly 141 of some embodiments of the present invention.As shown in Figure 3, four Valve core blade 131a-131d are separated out five chamber 143a-143e of valve assembly 141.Particularly, Valve core blade 131a compartment 143a and 143b; Valve core blade 131b compartment 143b and 143c; Valve core blade 131c compartment 143c and 143d; And Valve core blade 131d compartment 143d and 143e.Chamber 143a and 143e are coupled to each low pressure discharge port 142a and 142b; Chamber 143b and 143d are coupled to each chamber 163a and the 163b (being separated by moveable piston 165) of pneumatic actuator 161 by port one 46a and 146b; And chamber 143c is coupled to high pressure supply port 144c.Therefore, Valve core blade 131a is constructed to allow or blocks fluid stream from chamber 143b to chamber 143a.Valve core blade 131b is constructed to allow or blocks fluid stream from chamber 143c to chamber 143b.Valve core blade 131c is constructed to allow or blocks fluid stream from chamber 143c to chamber 143d.Valve core blade 131d is constructed to allow or blocks fluid stream from chamber 143d to chamber 143e.
According to some embodiments of the present invention, can make valve assembly 141 and pneumatic actuator 161 (being also referred to as cylinder) independently, then both are coupled.The user can buy valve assembly and pneumatic actuator independently from identical or different distributors thus.According to other embodiments of the invention, valve assembly can embed in (or being integrated in) pneumatic actuator, thus with two elements as a unit manufacturing also/or sell.
According to some embodiments of the present invention, will be at the sequential operation state that discusses the valve assembly 141 of Fig. 3 below with reference to Fig. 4 A-Fig. 4 F in more detail.In a possible starting state shown in Fig. 4 A, all under first state of startup, close at the flap of the whole valve 100a-100d on the Valve core blade 131a-131d.Applying electrostatic attraction by the flap to valve makes valve keep closing.Under this starting state, only in supply chamber 143c, there is manometer pressure, and in any other chamber 143a-143b and 143d-143e, all do not have manometer pressure.Operation period after starting, will in supplying at least one of chamber 143c and chamber 143b or 143d, there be manometer pressure.In the mode of example, piston 165 and bar 167 are illustrated in and are in retracted position when starting.
In second state of Fig. 4 B, when valve 100a on Valve core blade 131a and 131c and the flap of 100c were closed, valve 100b on Valve core blade 131b and the 131d and the flap of 100d were opened.Because from the pressure reduction of chamber 143c to 143b and from the pressure reduction of chamber 143b to 143e, can open the flap of valve 100a and 100c by the electrostatic attraction that reduction/elimination applied, flap curls to the normally open position thus.Therefore, the pressure of chamber 143b and 163a rises, and piston 165 and bar 167 stretch out, and by chamber 143e and discharge port 142b chamber 163b and 143d are discharged.
Under the third state of Fig. 4 C, can realize the abundant balance between the pressure of chamber 143d and 143e, the flap of valve 100d that thus can cut-off valve chip 131d, and utilize electrostatic attraction on the flap to come the valve 100d of cut-off valve chip 131d.Under the four condition of Fig. 4 D, because chamber 143d discharges under the state of Fig. 4 C in advance, so can open the flap of valve 100c.Removal is used for the electrostatic force of the flap of cut-off valve 100c, thus valve 100b keep open in, along with its flap curls to the normally open position shown in Fig. 4 D, valve 100c opens.Opened valve 100c before stretching out fully at piston 165, the pressure that increases in chamber 143d and the 163b can make piston motion slow down.
Under the 5th state of Fig. 4 E, between chamber 143b and 143c, can realize balance, and by applying the flap of the valve 100b of electrostatic attraction on can cut-off valve chip 131b.In addition, the pressure of chamber 143b can increase with respect to the pressure of chamber 143a.
Under the 6th state of Fig. 4 F, after the pressure with respect to chamber 143a has increased the pressure of chamber 143b, can make flap curl by the electrostatic force that removal is used for the flap of cut-off valve 100a and open the flap of the valve 100a on the Valve core blade 131a to the normally open position.Therefore, pneumatic actuator chamber 163a is coupled to low pressure discharge port 142a by chamber 143a and 143b, and pneumatic actuator chamber 163b is coupled to high pressure supply port 144c by chamber 143c and 143d.Under the state of Fig. 4 F, piston 165 and bar 167 are regained.In case chamber 143c is identical with pressure among the 143d and chamber 143a and 143b in pressure identical, then can cut-off valve chip 131a and valve 100a and the 100c of 131c by apply electrostatic attraction to its flap, and the operation that can repeat Fig. 4 A-Fig. 4 F is to stretch out and to regain piston 165 and bar 167.
According to some embodiments of the present invention, the state that the Valve core blade 131a-131d of valve assembly 141 can sequentially experience Fig. 4 B to Fig. 4 C to Fig. 4 D to Fig. 4 E to Fig. 4 F is to move to retracted position with piston 165 and bar 167 from extended position.The state that the Valve core blade 131a-131d of valve assembly 141 can sequentially experience Fig. 4 F to Fig. 4 E to Fig. 4 D to Fig. 4 C to Fig. 4 B is to move to extended position with piston 165 and bar 167 from retracted position.
Can utilize thus to operate and stretch out and regain piston 165 with reference to the said sequence of figure 4A-4F.But, should be understood that, be not that each order of stretching out piston will make that all piston stretches out or stretches out fully, and be not that each order of regaining piston all will make piston regain or regain fully.For example, before last stretching out/regain action is finished, may receive/send next order.Particularly, if if if for example detecting the error condition safety sensor lost efficacy and/or detect outage, then can move and receive/send next order before finishing last stretching out/regains.
In alternative exemplary, the Valve core blade of valve assembly can sequentially experience the state of the state of Fig. 4 F to Fig. 4 D, and wherein Valve core blade 131a and 131d close and Valve core blade 131b and 131c open.In alternative exemplary, the state that the Valve core blade of valve assembly sequentially experiences Fig. 4 F is closed and state that Valve core blade 131a and 131d open to wherein Valve core blade 131b and 131c.
Valve assembly can be increased with reference to the above-mentioned sequencing technology of figure 4A-Fig. 4 F and its operation can be resisted to stretch out and to regain the pressure maximum of actuator.Because on the bottom surface of Valve core blade, have elevated pressures, so can reduce to opening the proper operation restriction of valve array.When coming cut-off valve, can produce restriction by the power of closing power from the static near valve of air pressure.Therefore, valve can selectively open and cut out allow to reduce the pressure reduction between the adjacent chambers.By reducing the pressure reduction between the adjacent chambers, can produce a kind of state and make the flap of Valve core blade can resist to have the much lower pressure reduction of pressure reduction and close than original.When closing the flap of Valve core blade under the state that has relative higher differential pressure, less relatively time lag (for example, the magnitude of about 100 microseconds) just can fully reduce pressure reduction.
For example licensing to people such as Scott H.Goodwin-Johansson, denomination of invention U.S. Patent number 6 for " Microelectromechanical Flexible Membrane Electrostatic ValveDevices And Related Fabrication Methods ", 590,267; License to people such as Scott H.Goodwin-Johansson, denomination of invention U.S. Patent number 6,236,491 for " Micromachined Electrostatic Actuator With Air Gap "; With and/or international publication number WO 02/22492 in micro electronmechanical valve has been discussed.In these patents and the open source literature each all here is contained in its full content in this specification by reference.
In addition, for example can using, Fig. 5-framework according to some embodiments of the present invention shown in Figure 9 encapsulates Valve core blade.The alternate embodiment (each all comprises the above-mentioned Valve core blade 131 with reference to figure 2) of encapsulation Valve core blade has been shown in Fig. 6 and Fig. 8.In the corresponding embodiment of the packaging frame that does not have Valve core blade shown in Fig. 5 and Fig. 7, and figure 9 illustrates the embodiment of the electrical lead that does not have framework.
Packaging frame 211a according to some embodiments of the present invention for example shown in Figure 5 can comprise main body 213a, packing ring 215a and electrical lead 217.Framework 211a has window 219a therein and has recessed ledge 221a around window 219a.In addition, groove 223a can center on ledge 221a.Ledge 221a and groove 223a combine width can about 0.025 inch to about 0.060 inch scope.Particularly, ledge 221a and groove 223a combine width can about 0.050 inch to about 0.060 inch scope.Electrical lead 217 can be formed by stamped metal, and electrical lead 217 can zinc-plated (about 150 microinch) gold-plated then (about 40 microinch).Main body 213a can be formed by injection molding insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative), and packing ring 215a can be formed by injection molding flexible sealing material (for example rubber, viton and/or silicone).Packing ring 215a can provide the hydrostatic(al) sealing with respect to the main casing of valve assembly.
Particularly, main body 213a can be formed by injection molding insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative), and wherein electrical lead 217 is set to the inserting member in the mould.In addition, utilize double shot technology and/or again injection molding technique packing ring 215a and main body 213a together can be formed.Ledge 221a can be partly recessed with respect to the encirclement of main body 213a, makes Valve core blade to support by ledge on the edge of one side, makes the top surface of Valve core blade and bottom surface expose the fluid connection that is used for by it.In addition, ledge 221a can fully be recessed into and make the Valve core blade of placing subsequently also be recessed in the main body 213a.In addition, a part of adjacent windows 219a of electrical lead 217 exposes and is used for being electrically connected (for example well known to a person skilled in the art means by lead-in wire bonding, solder projection, conductive epoxy thing or other) to the Valve core blade of placing subsequently.In addition, can be in the part of contiguous ledge 221a and notch 225a is set among the main body 213a thinks that the instrument that Valve core blade is placed on the ledge provides the space, simultaneously other parts of main body 213a proportioning valve chip more closely.The part around lead-in wire 217 of main body 213a can tilt (for example being 30 degree approximately) so that lead-in wire bonding tip gap to be provided.Though example injection moulding has been discussed here, also can have been adopted such as other molding process such as inserted mode system and/or blown-mouldings.
Can provide tackiness agent in groove 223a then, and Valve core blade 131 can be placed on the ledge 221a, wherein groove 223a is used to provide layout, keeps and/or the control of the diffusion of tackiness agent is solidified fully until it.Particularly, can use and have about 0.015 inch wide strip of glue.Valve core blade can utilize optical sensor device to be placed on the ledge 221a with about 0.005 inch validity.Therefore, cue mark can be molded in the main body 213a of packaging frame.Particularly, can molded cue mark to comprise vertical crossed lines, this vertical crossed lines has the shape of similar " L ", " T ", "+" or other simileys.In addition, cue mark can have about 0.010 inch degree of depth.
Be used for the tackiness agent that Valve core blade 131 is fixed on the ledge 221a can be solidified through about 1 hour about 150 degrees centigrade (302 Fahrenheit).Alternately, tackiness agent can solidify through the long period at lower temperature.For example can be main body 213a and use polycarbonate (PC), and polycarbonate (PC) can have in the melting point of about 430 Fahrenheits to about 480 Fahrenheit scopes.But,, the adhesive temperature can be maintained at about 125 Fahrenheits to the scope of about 200 Fahrenheits in order to reduce the deformation of main body 213a.Alternately, can use the UV cured epoxy resin as tackiness agent.
The part 229 of main body 213a can be out of shape so that structure shown in Figure 6 to be provided around the exposed edge of Valve core blade 131.Tackiness agent can provide the fluid-tight between Valve core blade 131 and the main body 213a, and deformation part 229 can be fixed on Valve core blade in the main body 213a.Particularly, can utilize heating tool (for example hot-melting machine) to make part 229 distortion of main body 213a so that Valve core blade 131 is remained in the main body 213a.Therefore, the edge of Valve core blade 131 can support and pass through deformation part 229 supports of main body 213a on opposite side by ledge 221a on a side.In addition, the surface of Valve core blade 131 vicinity lead-in wires 217 can be recessed into about 0.010 inch with respect to lead-in wire 217, and is recessed into about 0.030 inch with respect to the surface around notch 225a, ledge 221a and groove 223a of main body 213a.
On Valve core blade 131, whole fixed electrodes all can be electrically connected to first input pad (for example first gold bonding pad), and all flexible electrode all can be electrically connected to second input pad (for example second gold bonding pad), and input pad can be electrically connected (for example, by well known to a person skilled in the art means such as the lead-in wire bonding of gold thread bonding, solder projection, conductive epoxy thing or other) expose portion to each electrical lead 217 adjacent windows 219a.Can use being electrically connected between input pad that monoblock top encapsulation 231a comes Protective valve chip 131 and the electrical lead 217.The part of electrical lead 217 exposes the main casing that is used to be electrically coupled to valve assembly on the edge of main body 213.
For example according to alternate embodiment shown in Figure 7, can comprise main body 213b, housing packing ring 215b, electrical lead 217 according to the packaging frame 211b of some embodiments of the present invention.Framework 211b has window 219b (being also referred to as through hole) therein, and has the recessed ledge 221b around window 219b.In addition, also chip packing ring 216b can be set on ledge 221b.
The width of ledge 221b can be in about 0.025 inch to about 0.060 inch scope.Particularly, the width of ledge 221b can be in about 0.050 inch to about 0.060 inch scope.Electrical lead 217 can be formed by stamped metal, and electrical lead 217 can zinc-plated (about 150 microinch) gold-plated then (about 40 microinch).Main body 213b can be formed by injection molding insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative), and packing ring 215b and 216b can be formed by injection molding flexible sealing material (for example rubber, viton and/or silicone).Packing ring 215b can provide the hydrostatic(al) sealing with respect to main casing.Packing ring 216b can provide the hydrostatic(al) sealing with respect to Valve core blade disposed thereon.
Particularly, main body 213b can be formed by injection molding insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative), and wherein electrical lead 217 is set to the inserting member in the mould.In addition, utilize double injection molding technology and/or again injection molding technique packing ring 215b and 216b and main body 213b together can be formed.Ledge 221b can be partly recessed with respect to the encirclement of main body 213b, makes Valve core blade to support by ledge 221b and packing ring 216b on the edge of one side, and wherein the top surface of Valve core blade and bottom surface expose the fluid connection that is used for by it.In addition, ledge 221b can fully be recessed into and make the Valve core blade of placing subsequently also be recessed in the main body 213b.In addition, a part of adjacent windows 219b of electrical lead 217 exposes and is used for being electrically connected (for example well known to a person skilled in the art means by lead-in wire bonding, solder projection, conductive epoxy thing or other) to the Valve core blade of placing subsequently.In addition, can notch 225b be set in the part of contiguous ledge 221b in main body 213b and think that the instrument that Valve core blade is placed on the ledge provides the space, other parts of while main body 213b are the proportioning valve chip more closely.The part around lead-in wire 217 of main body 213b can tilt (for example being 30 degree approximately) so that lead-in wire bonding tip gap to be provided.
The part 229 of main body 213b can be out of shape so that structure shown in Figure 8 to be provided around the exposed edge of Valve core blade 131.Deformation part 229 can be fixed on Valve core blade in the main body 213b against packing ring 216b.Particularly, can utilize heating tool (for example hot-melting machine) to make part 229 distortion of main body 213b so that Valve core blade 131 is remained in the main body 213b.Therefore, the edge of Valve core blade 131 can support and pass through deformation part 229 supports of main body 213b on opposite side by ledge 221b and packing ring 216b on a side.In addition, the surface of Valve core blade 131 vicinity lead-in wires 217 can be recessed into about 0.010 inch with respect to lead-in wire 217, and is recessed into about 0.030 inch with respect to the surface around notch 225b and ledge 221b of main body 213b.
In addition, Valve core blade 131 can encapsulation before discharging flap 117.Particularly, flap 117 can be formed on the sacrifical oxide, and can keep sacrifical oxide when Valve core blade 131 is assemblied in packaging frame.Can utilize drying (steam) HF (hydrofluoric acid) exhaust to remove sacrifical oxide and can greatly not damage packaging frame then.Particularly, packaging frame can and/or can resist the other materials of the damage of self-desiccation (steam) HF exhaust to form by viton.Though sacrificial oxide layer exemplarily has been discussed, can have together been used other sacrifice layers (for example expendable metal layer) with other suitable steam and/or wet chemical etch agent.
In alternative exemplary, can before the wafer cutting that comprises a plurality of Valve core blades, after the cutting but before the encapsulation or after encapsulation by using the HF acid etching removal sacrifical oxide that wets to come the flap of relief valve chip.Particularly, can use 49%HF solution to remove sacrificial oxide layer from Valve core blade through coming in about 10 minutes, and Wet-type etching can follow all through 20 minutes washed with de-ionized water, isopropanol clean and first and second washed with methanol to remove any remaining HF and/or water.After wet processed, the Valve core blade that has discharged flap can load methyl alcohol through the supercritical drying circulation reducing any surface tension, otherwise this surface tension will cause the stiction between flap and the substrate.
Particularly, Valve core blade can be loaded in the exsiccator chamber and by methyl alcohol and cover, and uses liquid CO 2 under the pressure of about 1200psig (pound/square inch, gauge pressure) methyl alcohol is removed from the chamber then.In case removed whole methyl alcohol, with regard to heating chamber through super critical point (about 31 degrees centigrade) with CO2 from liquid-phase conversion to gas phase, and release pressure is to discharge CO2 steam from system.Because supercritical CO 2 has extremely low surface tension, thus when its when liquid state is converted into gaseous state, CO2 is unlikely left behind flap.Can use commercially available and/or customization supercritical drying device.
Can utilize visual inspection to judge and successfully discharge the flap of acceptable number on the Valve core blade.Particularly, the surface of Valve core blade has with valve and exposes down the different color of silicon (when flap discharges and Valve core blade do not switched on as seen), and can be checked through this color distinction.Alternately, can be after release with light emission by wafer, and fluorescence detector can detect energising (closing) and the equation of light between (opening) Valve core blade of switching on.In above-mentioned two kinds of examples, all can use the machine image system to check.
On Valve core blade 131, all fixed electrode all can be electrically connected to first input pad (for example first gold bonding pad), and all flexible electrode all can be electrically connected to second input pad (for example second gold bonding pad), and input pad can be electrically connected (for example, by using lead-in wire bonding such as the gold thread bonding, solder projection, conductive epoxy thing or other to well known to a person skilled in the art means) expose portion to each electrical lead 217 adjacent windows 219b.Can use being electrically connected between input pad that monoblock top encapsulation 231b comes Protective valve chip 131 and the electrical lead 217.The part of electrical lead 217 exposes on the edge of main body 213b and is used to be electrically coupled to main casing.
In addition, can revise, make packaging frame utilize the different window size of the molded formation of substantially the same mould with same external dimensions according to the instrument that is used for the molded package framework that some embodiments of the present invention are shown among Fig. 5-Fig. 8.For example, can use identical die matrix to form different packaging frames by different mould lid (its be used to provide different window size, shape and/or position).Therefore, the Valve core blade that can be different size manufacturing and encapsulation framework effectively.Particularly, can be less Valve core blade (being used for the application of the low fluid current capacity of demand) provides than wicket, should be than wicket with approaching lead-in wire bonding and can be close to electrical lead (but not in putting) setting.By the packaging frame that has same external dimensions for the setting of different Valve core blade size, identical main casing can receive the encapsulation Valve core blade of different capabilities/size so that different operating characteristicss to be provided.
In addition, can be provided with on the main body (213a or 213b) of framework (211a or 211b) baffle plate with the deflection pressure spike also/or reduce stress on the electrostatic flap valve of Valve core blade 131.Particularly, can in the packing ring (215a or 215b) of the side (comprising flexible flap and input pad) of proximate valves chip 131, on main body (213a or 213b), baffle plate be set.In addition, the baffle plate conduct can be set by the plate of adhesive to main body (213a or 213b).
Figure 23 illustrates the example of baffle plate 971.As shown in the figure, baffle plate 971 comprises the hole 973 by it, and the size of baffle plate 971 can so that baffle plate than Valve core blade 131 is slightly long and slightly wide but the Inner Dimension than packing ring (215a or 215b) is little slightly.Therefore, baffle plate 971 can be close to and be spaced apart fixing and be in the packing ring (215a or 215b) with Valve core blade 131.In addition, can in the main body (213a or 213b) (wherein can place baffle plate 971) of framework, be provided with recessedly, and should recessed can define interval between baffle plate 971 and the Valve core blade 131.In addition, can arrange baffle plate 971 make hole 973 proximate valves chips 131 apart from electrical lead 217 part farthest.By comprising baffle plate 971, can reach the flap of assembly process Protective valve chip 131 subsequently in processing.In addition, baffle plate 971 can provide the bigger laminar flow by Valve core blade 131, and/or increase the speed that sequencing comprises the valve assembly of encapsulation Valve core blade and baffle plate.In alternative exemplary, can eliminate demand to sequencing by using baffle plate.Have the single elongated hole though baffle plate 971 illustrates, difformity, structure and/or orientation can be set, and/or a plurality of holes are set.
By using baffle plate the baffle plate chamber to be set, wherein at processing and/or the assembly process flap of Protective valve chip physically in the baffle plate chamber between baffle plate and the related Valve core blade.In addition, (a plurality of) hole in the baffle plate fully limit fluid stream make the maximum, force of the flap that can reduce to be applied to Valve core blade.In addition, the volume in baffle plate chamber can flow with respect to the sufficiently little stratified fluid that can obtain more quickly by Valve core blade that makes in the relevant chamber of valve chest, and the feasible fatigue strength that can reduce flap.Therefore can independence or be used in combination baffle plate and pressure that sequencing operation (as above described with reference to figure 4A-Fig. 4 F) can be resisted its operation with the increase Valve core blade with the reduction fatigue strength and improve flow etc.
In addition, can be the baffle plate that different Valve core blade settings in the same valve assembly have different hole dimensions.The 5 logical valves that for example have the baffle plate that bigger flow is provided and bigger limited flow is provided in actuator port outside actuator port can provide piston motion relatively stably, and can reduce maximum piston speed.
As reference Figure 13 and Figure 21 in greater detail, can the encapsulation Valve core blade insert main casing and remove from it.Therefore, can repair also/maybe can revise the valve assembly that comprises one or more encapsulation Valve core blades.Therefore, by removing inoperable encapsulation Valve core blade and inserting new encapsulation Valve core blade, can repair valve assembly with defective valves chip.In addition, by substituting original encapsulation Valve core blade, can change the functional of valve assembly with new encapsulation Valve core blade with different qualities (for example Valve core blade of different flow capacity and/or size).
Main casing according to some embodiments of the present invention has been shown in Figure 10-Figure 13.Particularly, figure 10 illustrates the exploded view of main casing 401 and associated component, figure 13 illustrates the face upwarding stereogram of main casing.Shown in the worm's eye view of Figure 13, main casing 401 defines above-mentioned with reference to figure 3 and the described valve assembly of Fig. 4 A-Fig. 4 F chamber 143a-143e.Main casing 401 also comprises the shell 403a-403d of the encapsulation Valve core blade (for example above-mentioned description with reference to figure 6 and Fig. 8) that is configured to receive perpendicular to main casing length.In addition, main casing 401 is included in the conductive lead wire 405 of the metal lead wire 217 that wherein is used for the encapsulation Valve core blade of transmission signal to the shell 403a-403d.In addition, can comprise that also matrix packing ring 407 is used to provide the fluid-tight (as shown in figure 18) with respect to the matrix of assembly, and the sealing of the lead-in wire 405 that PCB packing ring 409 is used to provide the outside to be connected to main casing also can be provided.
Main casing 401 can injection profiled insulation material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative) form under the wherein molded situation by inserting at conductive lead wire 405, and packing ring 407 and/or 409 can utilize double injection molding technology and/or again injection molding technique form by flexible sealing material.Particularly, mould produces five separate chamber 143a-143e, is used for above-mentioned high-pressure air supply and low pressure discharging with reference to figure 3 and Fig. 4 A-Fig. 4 F description.When the injection moulding main casing, can in the outside of housing, form hole 411 to allow between the 143a-143e of chamber, forming internal holes.Hole 411 in the outside of housing can by can be bonded, welding or otherwise fixing bolt 413 with closed hole 411 seal.In addition, can close on Valve core blade be provided with baffle plate with the deflection pressure spike also/or reduce stress on the electrostatic flap valve.For example, the low voltage side that can close on Valve core blade 131 is provided with baffle plate as the plate in the main casing 401.As mentioned above, can before inserting main casing, be used to encapsulate on the packaging frame of Valve core blade baffle plate is being set.Baffle plate can provide the bigger laminar flow by Valve core blade, can increase sequencing comprise the speed of the valve assembly of baffle plate, also/or baffle plate can eliminate demand to sequencing.
As mentioned above, MEMS (MEMS) Valve core blade 131 can be encapsulated in the framework to provide for example at the encapsulation Valve core blade shown in Fig. 6 and/or Fig. 8.The encapsulation Valve core blade can be inserted into each shell 403a-403d of main casing 401 or removes from it, and valve assembly can be revised also/or repair thus.The packing ring 215a of encapsulation Valve core blade or 215b provide the fluid-tight with each shell 403a-403d, make that the fluid connection between the shell only provides by the opening in each Valve core blade.In addition, at the Valve core blade 131 of encapsulation in the Valve core blade is oriented and packing ring 215a or 215b should cooperate with the predetermined side of particular shell, makes the encapsulation Valve core blade be directed in main casing 401 as above to provide the fluid between the 143a-143e of chamber to flow with reference to figure 4A-Fig. 4 F is described.
In some embodiments of the invention, be desirable to provide Different Fluid Flow by the different streams of valve assembly.For example, the different shell 403a-403d of main casing 401 can be provided with provides the encapsulation of different flow characteristic Valve core blade.Particularly, the part of shell 403a-403d can be provided with the encapsulation Valve core blade with less relatively and/or less valve opening (hole), other shells can be provided with has encapsulation Valve core blade more relatively and/or big valve opening (hole), all can have same external dimensions and all encapsulate Valve core blade.In addition, encapsulation Valve core blade with less relatively and/or less valve opening (hole) can be provided with the baffle plate with less relatively and/or less baffle holes (hole), can be provided with and has baffle plate more relatively and/or big baffle holes (hole) and have encapsulation Valve core blade more relatively and/or big valve opening (hole).Alternately, the baffle plate that has the baffle holes (hole) of varying number and/or size by setting, the difference encapsulation Valve core blade of valve opening (hole) that can be by having equal number and size provides different flow.
As mentioned above, the Inner Dimension of window that is used to encapsulate the framework of Valve core blade can change the outside dimensions that does not change encapsulation Valve core blade assembly with the Valve core blade that holds different size.Therefore identical main casing 401 can receive the encapsulation Valve core blade assembly with different flow capacity characteristic in shell 403a-403d.In other words, in the identical packages structures of keeping the encapsulation Valve core blade, the vary in size of MEMS Valve core blade is to provide different flow characteristic (for example, at about 0.001Cv extremely in the scope of about 10Cv).
In addition, the expose portion of metal lead wire 217 on the edge of encapsulation valve can cooperate with the respective lead of main casing 401 to reach flexible electrode to the Valve core blade shell 403a-403d of main casing 401 (its insert) fixing provides electrical signal communication from the outside of main casing.
Though not shown in Figure 10-Figure 13, can in chamber 143a-143e one or more, filter be set to protect little valve.For example, the filter among the 143c of chamber can protect little valve to avoid particulate and/or other deposits of supplying from high pressure, and the filter among chamber 143b and the 143d can protect little valve to avoid particulate and/or other deposits of introducing from actuator during the cycle in discharging.
The electronics sub-component 501 that is used for valve assembly according to some embodiments of the present invention has been shown in Figure 14-Figure 17.Particularly, printed circuit board (PCB) 503 can comprise and is used for electronic circuit and/or software and/or firmware that the operation of the Valve core blade 131 that is included in main casing 401 is controlled.For example, printed circuit board (PCB) 503 can comprise that electronic circuit and/or software are to control also according to the above-mentioned operation of describing with reference to figure 4A-Fig. 4 F (by giving an order such as the remote-control device of programmable logic controller (PLC) (PLC))/or actuating valve chip 131.
Printed circuit board (PCB) can comprise IC chip disposed thereon 505, resistor, capacitor and/or inductor.In addition, the lead-in wire 507 on the printed circuit board (PCB) 503 can provide the electric coupling with the lead-in wire of main casing 401, and one or more connector 509 (for example Molex connector) can provide to the electrical connection such as the remote controllers of PLC.Printed circuit board (PCB) can be configured to provide a plurality of different operating characteristics, wherein use wire jumper 511 or such as pull down switch, other means such as shunt 510 select a specific programming characteristic.Particularly, following will being described with reference to figure 41-Figure 44, Figure 45 A-Figure 45 B and Figure 46 A-Figure 46 B, printed circuit board (PCB) can comprise one or more custom circuits (for example, comprising the application-specific integrated circuit ASIC device).Apply for other operations of having described valve assembly and/or its electronics sub-component in for the U.S. Provisional Patent Application of " Methods Of Operating Electrostatically Actuated MicrovalveAssemblies And Related Structures " number 60/590,699 (hereinafter referred to as people's documents such as " " Douglas) on July 23rd, 2004, denomination of invention people such as Kevin Douglas.By reference the full content that this provisional application disclosed is incorporated in this specification.
During normal running, printed circuit board (PCB) 503 can receive operating energy and control signal by connector 509.Also can be provided with alternative energy source such as storage battery 513 make printed circuit board (PCB) can be under the situation that energy interrupts with Valve core blade 131 sequencing to the predetermined default state.Though figure 15 illustrates storage battery, also can adopt other alternative energy sources (such as capacitive character storage device and/or fuel cell).Printed circuit board (PCB) 503 also can comprise the high-voltage driving circuit (for example multistage supply pump) that is used for the actuating valve chip electrode.For example, can provide 24V external power supply by connector 509, and high-voltage driving circuit can produce be used for by go between 507, lead-in wire 405 and go between 217 and the output of the 150V of actuating valve chip electrode.Printed circuit board (PCB) can comprise that also transient voltage suppresses (TVS) device 517 (the also one-tenth zener diode of reversal connection for example is connected in series).
The controller of electronics sub-component can be configured to monitor external power supply, and based on the interruption that detects external power supply Valve core blade 131a-131d is advanced into the predetermined default state and utilizes supply to keep this default conditions from the energy that substitutes energy source.For example when the interruption that detects external power supply, can keep the current state of Valve core blade 131a-131d.Alternately, when the interruption that detects external power supply, but controller cut-off valve chip 131a-131d makes the fluid that blocks between the 143a-143e of each chamber be communicated with.Alternately, when the interruption that detects external power supply, but controller cut-off valve chip 131b-131c and open Valve core blade 131a and 131d.Also alternately, when the interruption that detects external power supply, but controller cut-off valve chip 131a and 131d and open Valve core blade 131b-131c.
For example utilize injection molding technique again, as Figure 14 and shown in Figure 16, the electronics sub-component 501 that comprises printed circuit board (PCB) 503 and storage battery 513 can be encapsulated in the insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative).Particularly, can use the epoxy resin that under relatively lower temp and pressure, solidifies to protect wherein electronic device.The exterior geometry of packaging electronic sub-component can be set to be assemblied on the main casing 401, makes the lead-in wire 507 of printed circuit board (PCB) 503 cooperate with the lead-in wire 405 of main casing 401.
Alternately, storage battery or other electrical energy storage devices can remove and/or storage battery can be arranged on the outside of the encapsulation of electronics sub-component from the electronics sub-component.Therefore, can more easily replace storage battery.For example, storage battery can be arranged on the circuit that is used for supplying energy and/or controls signal to the electronics sub-component.In addition, the electronics sub-component can comprise and utilizes the circuit of peripheral hardware energy to charge in batteries during being arranged in use in normal running.Therefore can prolong the life-span of storage battery.
Figure 18 illustrates the matrix that is used for valve assembly 601 according to some embodiments of the present invention.Can utilize metal casting technique to form matrix 601.Particularly, matrix 601 can be by forming such as aluminium or stainless metal, and discharge port 142a-142b and supply port 144c can be the screw thread tapped holes.Can adopt extra screw thread tapped holes 603a-603b that main casing 401 is fixed on the matrix 601.In addition, can in matrix, be provided for installing the gap of valve assembly and/or mounting hole 605 (perpendicular to also/or be parallel to port).
By using the cast metal as matrix, the integrity of the screw thread in the retaining hole more easily.In addition, epoxy resin finish can be set and think protection and/or purpose attractive in appearance on the cast aluminum base body.Alternately, matrix 601 can utilize the metal insert that is arranged in screw position to be formed by injecting forming material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative).
Can be by in the shell in the bottom that will encapsulate Valve core blade (for example shown in Fig. 6 and Fig. 8) insertion main casing 401 (as shown in figure 21); Utilize screw 701 that main casing (comprising encapsulation Valve core blade wherein) is fixed to matrix 601; And finish valve assembly on the main casing as Figure 19 and Figure 21-shown in Figure 22 electronics sub-component is inserted in.Figure 20 valve assembly is shown and the non-metallic part of not shown main casing make main casing lead-in wire as seen, and make lead-in wire 217,405 and 507 interconnection as seen.
Can be 5 logical or 3 logical identical main casing, matrix and the electronics sub-components of valve operation setting.For 5 logical valve operations, as above with reference to the description of figure 4A-Fig. 4 F, for example as shown in figure 21 can be with in each shell in the bottom of four encapsulation Valve core blades insertion main casings.For 3 logical valves operations, the encapsulation Valve core blade can be inserted apart from each of electronics sub-component two shells farthest, and sealing bolt 413 can be inserted apart from making chamber 143d-143e be permanently sealed in two nearest shells of electronics sub-component.As mentioned above, identical electronics sub-component can be set to based on utilize wire jumper, switch, shunt, safety fuse cutout or during manufacture and/or the selection made of other selection devices that can be set afterwards one in a plurality of operator schemes that are defined in the memory (for example ROM, PROM, EPROM, EEPROM etc.) are provided.For example, can use identical electronics sub-component to come to control 5 logical, 4 logical, 3 logical or 2 logical operations based on switch, shunt, safety fuse cutout and/or jumper settings.For example, 3 logical and 5 logical valves operate in people's document such as Douglas and are described.
Further alternately, can main casing, matrix and electronics sub-component be set for 4 logical and/or 2 logical operations.For 4 logical operations, can change matrix and make and between discharge chamber 143a and 143e and identical discharge port, provide fluid to be coupled.In addition, 4 logical operations can be provided with four Valve core blades of as above describing with reference to figure 4A-Fig. 4 F.Alternately, can utilize single Valve core blade to provide 2 logical operations so that unidirectional conducting/cut-out stream device to be provided.Can utilize the assembly that has a Valve core blade and replace the bolt of other Valve core blades of Figure 10-shown in Figure 13 that 2 exchange devices are provided.Alternately, can utilize have an input port, an output port and be used for single Valve core blade a shell provide 2 exchange devices than small shell.
According to some embodiments of the present invention, can control air flue independently between each at five chamber 143a-143e in the valve assembly that is provided for 5 logical valves operations, make identical valve assembly can play " full cylinder port discharging " valve, " full cylinder port is blocked " valve or " full cylinder port energising " valve.Therefore can be based on to the programming of electronics sub-component, to the selection of the program of electronics sub-component and/or will encapsulate the Valve core blade assembly and/or the shell of sealing bolt insertion main casing duplicates valve functional of the type of any commercially available acquisition according to the valve assembly of some embodiments of the present invention.
In addition, can provide independent control to air-flow to make the valve that to realize newtype according to the valve assembly of some embodiments of the present invention.For example, when losing system capacity, can provide the functional of uniqueness by margin of energy source such as storage battery.Particularly, valve and pneumatic actuator can remain on rearmost position (default conditions are opposite with adopting) between the energy age at failure.
In addition, the circuit such as made to order integrated circuit device (for example, ASIC device) that is used for the electronics sub-component can provide distinct program to provide (comprising Valve core blade main casing, matrix, electronics sub-component etc.) valve functional of any kind to allow same physics valve assembly.For example by will import stitch be pulled to particular voltage levels, by utilize interface (for example serial line interface) programme the chip of electronics sub-component, optionally destroy fusible link, cut off also/or keep one or more wire jumpers, between two or more stitch, be provided with also/or the position etc. of saving shunt, selector switch, can select in a plurality of programs of electronics sub-component one.
The fluid that valve assembly according to other embodiments of the invention can utilize pulse duration modulation to control by electrostatically actuated valve flows.For example, can utilize pulse duration modulation to open and close the electrostatically actuated flap, wherein utilize dutycycle to determine fluid stream by valve with preset frequency.For example, the dutycycle of valve 100% can be provided with full flow, and 50% dutycycle can be provided with half 1 flow, and 0% dutycycle can be provided with no flow.By utilizing pulse duration modulation to come activated valve chip 131a-131d, the speed of for example can controlling rod 167 stretching out and regaining.In addition, change dutycycle by stretching out along with bar or regaining, can stretch out also along with bar/or the acceleration and/or the deceleration of regaining controlling rod 167.For example, recently activate each Valve core blade overcoming inertia stretching out and/or regain duty that when beginning can be bigger, and along with bar recently activates each Valve core blade near the duty that stretches out fully and/or retracted position can reduce.
In addition, according to some embodiments of the present invention one or more filters can be set in valve assembly.Filter for example can be arranged at the position of high pressure supply port 144c and/or actuator port 146a and 146b.Additional or alternately, can filter be set in the position of discharge port 142a and 142b.The filter that is arranged in supply port 144c and/or discharge port 142a and 142b position can be arranged on the matrix 601 of Figure 18 and/or matrix 601.The filter that is positioned at actuator port 146a and 146b position can be arranged on the inside of the inside of main casing 401 or outside, butt joint assembly parts 415a and 415b or outside and/or in the position of collet chuck 419a and 419b.But use filter Protective valve assembly to avoid pollutant such as dust, oil and/or water etc., these pollutants can be when valve cuts out, by the embolism valve opening also/or reduce sealing between flap and each hole and the operation of deterioration valve assembly.
In Figure 24-Figure 26, illustrated have wedge shaped baffle 741, other embodiments (comprising above-mentioned) of framework 711 and 717 the encapsulation Valve core blade of going between with reference to figure 2 described Valve core blades 131.Electrical lead 717 according to some embodiments of the present invention is shown in Figure 27 for to separate with framework 711.
As shown in the figure, for example in Figure 24-Figure 26, can comprise main body 713, packing ring 715 and electrical lead 717 according to the packaging frame 711 of some embodiments of the present invention.Framework 711 can have as above with reference to figure 5-Fig. 6 and/or Fig. 7-window that is positioned at it of Fig. 8 description, the recessed ledge that centers on window and the groove that can surround ledge.The combined width of ledge and groove can be in about 0.025 inch to about 0.060 inch scope.Particularly, the combined width of ledge and groove can be in about 0.050 inch to about 0.060 inch scope.Electrical lead 717 can be formed by stamped metal, and electrical lead 717 can zinc-plated (about 150 microinch) gold-plated then (about 40 microinch).Main body 713 can be formed by injection molding insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative), and packing ring 715 can be formed by injection molding flexible sealing material (for example rubber, viton and/or silicone).Packing ring 715 can provide the hydrostatic(al) sealing with respect to the main casing of valve assembly.
Particularly, main body 713 can be formed by injection molding insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative), and wherein electrical lead 717 is set to the inserting member in the mould.In addition, utilize double injection molding technology and/or again injection molding technique packing ring 715 and main body 713 together can be formed.Ledge can be partly recessed with respect to the encirclement of main body 713, makes Valve core blade to support by ledge on the edge of one side, makes the top surface of Valve core blade and bottom surface expose the fluid connection that is used for by it.In addition, ledge can fully be recessed into and make the Valve core blade of placing subsequently also be recessed in the main body 713.In addition, a part of adjacent windows of electrical lead 717 exposes and is used for being electrically connected (for example well known to a person skilled in the art means by lead-in wire bonding, solder projection, conductive epoxy thing or other) to the Valve core blade of placing subsequently.In addition, can be in the part of contiguous ledge and notch 725 is set in the main body 713 provides the space to allow for the instrument that Valve core blade is placed on the ledge, other parts of main body 713 more closely are engaged to Valve core blade simultaneously.The part around lead-in wire 717 of main body 713 can tilt (for example being 30 degree approximately) so that lead-in wire bonding tip gap to be provided.
Can in the groove of main body 713, provide tackiness agent then, and Valve core blade 131 can be placed on main body 713 on the ledge of window, wherein groove is used to provide layouts, maintenance and/or the control of the diffusion of tackiness agent is solidified fully until it.Particularly, can use and have about 0.015 inch wide strip of glue.Valve core blade can utilize optical sensor device to be placed on the ledge of main body 713 with about 0.005 inch validity.Therefore, cue mark can be molded in the main body 713 of packaging frame.Particularly, can molded cue mark to comprise vertical crossed lines, this vertical crossed lines has the shape of similar " L ", " T ", "+" or other simileys.In addition, cue mark can have about 0.010 inch degree of depth.
Be used for the tackiness agent that Valve core blade 131 is fixed on the ledge of main body 713 can be solidified through about 1 hour about 150 degrees centigrade (302 Fahrenheit).Alternately, tackiness agent can solidify through the long period at lower temperature.For example can be main body 713 and use polycarbonate (PC), and polycarbonate (PC) can have in the melting point of about 430 Fahrenheits to about 480 Fahrenheit scopes.But,, the adhesive temperature can be maintained at about 125 Fahrenheits to the scope of about 200 Fahrenheits in order to reduce the deformation of main body 713.Alternately, can use the UV cured epoxy resin as tackiness agent.
The part 729 of main body 713 can be out of shape so that structure shown in Figure 26 to be provided around the exposed edge of Valve core blade 131.Tackiness agent can provide the fluid-tight between Valve core blade 131 and the main body 713, and deformation part 729 can be fixed on Valve core blade in the main body 713.Particularly, can utilize heating tool (for example hot-melting machine) to make part 729 distortion of main body 713 so that Valve core blade 131 is remained in the main body 713.Therefore, the edge of Valve core blade 131 can support and pass through deformation part 729 supports of main body 713 on opposite side by the ledge of main body 713 on a side.In addition, the surface of Valve core blade 131 vicinity lead-in wires 717 can be recessed into about 0.010 inch with respect to lead-in wire 717, and is recessed into about 0.030 inch with respect to the surface around notch 725, ledge and groove of main body 713.
On Valve core blade 131, whole fixed electrodes all can be electrically connected to first input pad (for example first gold bonding pad), and all flexible electrode all can be electrically connected to second input pad (for example second gold bonding pad), and input pad can be electrically connected (for example, by well known to a person skilled in the art means such as the lead-in wire bonding of gold thread bonding, solder projection, conductive epoxy thing or other) to each electrical lead 717 contiguous expose portions that pass the window of main body 713.Can use being electrically connected between input pad that monoblock top encapsulation 731 comes Protective valve chip 131 and the electrical lead 717.The part of electrical lead 717 exposes the main casing that is used to be electrically coupled to valve assembly on the edge of main body 713.
According to alternate embodiment, packaging frame 711 can use the fluid-tight between the main body that is similar to the above-mentioned chip packing ring of describing with reference to figure 7 and Fig. 8 and provides Valve core blade 131 and packaging frame.As mentioned above, main body 713 can be formed by injection molding insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative), and above-mentioned packing ring 715 and other chip mat circles can be formed by injection molding flexible sealing material (for example rubber, viton and/or silicone).Packing ring 715 can provide the hydrostatic(al) sealing with respect to main casing, and the chip packing ring can provide the hydrostatic(al) sealing with respect to Valve core blade disposed thereon.In addition, packing ring 715 and chip packing ring can utilize double injection molding technology and/or again injection molding technique can together form with main body 713.Substitute the chip packing ring or be additional to the chip packing ring, can use the punching press adhesive tape that Valve core blade is fixed to ledge.
In addition, Valve core blade 131 can encapsulation before discharging flap 117.Particularly, flap 117 can be formed on the sacrifical oxide, and can keep sacrifical oxide when Valve core blade 131 is assemblied in packaging frame.Can utilize drying (steam) HF exhaust to remove sacrifical oxide and can greatly not damage packaging frame then.Particularly, packaging frame can and/or can resist the other materials of the damage of self-desiccation (steam) HF exhaust to form by viton.
In alternative exemplary, can before the wafer cutting that comprises a plurality of Valve core blades, after the cutting but before the encapsulation or after encapsulation by using the HF acid etching removal sacrifical oxide that wets to come the flap of relief valve chip.Particularly, can use 49%HF solution to remove sacrificial oxide layer from Valve core blade through coming in about 10 minutes, and Wet-type etching can follow all through 20 minutes washed with de-ionized water, isopropanol clean and first and second washed with methanol to remove any remaining HF and/or water.After wet processed, the Valve core blade that has discharged flap can load methyl alcohol through the supercritical drying circulation reducing any surface tension, otherwise this surface tension will cause the stiction between flap and the substrate.
Particularly, Valve core blade can be loaded in the exsiccator chamber and by methyl alcohol and cover, and uses liquid CO 2 under the pressure of about 1200psig (pound/square inch, gauge pressure) methyl alcohol is removed from the chamber then.In case removed whole methyl alcohol, with regard to heating chamber through super critical point (about 31 degrees centigrade) with CO2 from liquid-phase conversion to gas phase, and release pressure is to discharge CO2 steam from system.Because supercritical CO 2 has extremely low surface tension, thus when its when liquid state is converted into gaseous state, CO2 is unlikely left behind flap.Can use commercially available and/or customization supercritical drying device.
Can utilize visual inspection to judge and successfully discharge the flap of acceptable number on the Valve core blade.Particularly, the surface of Valve core blade has with valve and exposes down the different color of silicon (when flap discharges and Valve core blade do not switched on as seen), and can be checked through this color distinction.Alternately, can be after release with light emission by wafer, and fluorescence detector can detect energising (closing) and the equation of light between (opening) Valve core blade of switching on.In above-mentioned two kinds of examples, all can use the machine image system to check.
In addition, can revise, make packaging frame utilize the different window size of the molded formation of substantially the same mould with same external dimensions according to the instrument that is used for the molded package framework that some embodiments of the present invention are shown among Figure 24-Figure 26.For example, can use identical die matrix to form different packaging frames by different mould lid (its be used to provide different window size, shape and/or position).Therefore, the Valve core blade that can be different size manufacturing and encapsulation framework effectively.Particularly, can be less Valve core blade (being used for the application of the low fluid current capacity of demand) provides than wicket, should be than wicket with approaching lead-in wire bonding and can be close to electrical lead (but not in putting) setting.By the packaging frame that has same external dimensions for the setting of different Valve core blade size, identical main casing can receive the encapsulation Valve core blade of different capabilities/size so that different operating characteristicss to be provided.
As Figure 24-Figure 26 further shown in, can be provided with on the main body 713 of framework 711 wedge shaped baffle 741 with the deflection pressure spike also/or reduce stress on the electrostatic flap valve of Valve core blade 131.Particularly, can on the main body 713 of the side (comprising flexible flap and input pad) of proximate valves chip 131, baffle plate 741 be set.By comprising baffle plate 741, can reach the flap 117 of assembly process Protective valve chip 131 subsequently in processing.In addition, baffle plate 741 can provide the bigger laminar flow by Valve core blade 131, increases the speed that sequencing comprises the valve assembly of encapsulation Valve core blade and baffle plate, and/or eliminate demand to sequencing.Have four circular holes 743 though baffle plate 741 illustrates, difformity, structure and/or orientation can be set, and/or for example hole of the lesser amt in single hole is set.
Can utilize four pin 745a-745b and 747a-747b and hot-melting machine operation baffle plate 741 to be attached to the main body 713 of framework 711.Particularly, pin 745a-745b can be molded on the main body 713 of framework 711 and be configured to be molded in baffle plate 741 in through hole 749a-749b cooperate.Pin 747a-747b can be molded on the baffle plate 741 and be configured to and cooperate with through hole 751a-751b in the main body 713 that is molded in framework 711.By pin 745a-745b and 747a-747b and through hole 749a-749b and 751a-751b are set shown in Figure 24-26, can provide baffle plate 741 orientation required with respect to main body 713, reduce assembly error thus.In other words, the relative narrower that can be convenient to wedge shaped baffle 741 as Figure 24-pin shown in Figure 26 and the layout in hole is partly closed on electrical lead 71 and is arranged, and the relative wider portion of wedge-like baffle plate 741 is arranged away from electrical lead 717.Baffle plate 741 can utilize and be used for main body 713 identical materials and come moldedly, and it is molded maybe can to utilize different materials.
Through hole 749a-749b in the baffle plate 741 can be provided with the counterbore (being wider portion) with respect to main body 713, and the through hole 751a-751b in the main body 713 can be provided with the counterbore with respect to baffle plate 741.Therefore, pin 745a-745b and 747a-747b can cooperate with each through hole 749a-749b and 751a-751b, and can utilize the hot-melting machine operation so that baffle plate 741 is fixed to main body 713 on pin.By for through hole is provided with counterbore, can be and move hot melt material from pin the space is provided, make the outer surface of baffle plate 741 and/or main body 713 can be because the hot-melting machine operation excessive deformation.
Shown in Figure 24-26, baffle plate 741 can comprise a plurality of holes 743 by it for another example.In addition, baffle plate 741 can close on the flap side setting of Valve core blade 131, and packing ring 715 can close on the dorsal part setting of Valve core blade 131.Therefore the dorsal part of Valve core blade 131 can be communicated with hyperbaric environment (such as the chamber), the hole 743 of baffle plate 741 can be communicated with relatively low pressure environment (such as the chamber), and Valve core blade 131 can allow or block the fluid stream that also arrives environment under low pressure from hyperbaric environment by Valve core blade by the hole the baffle plate 741 743.Therefore, but baffle plate 741 handling and/or the flap side of Protective valve chip 131 between follow-up erecting stage.
In addition, the pressure difference of baffle plate 741 controllable valve chips 131 both sides, thus the flap of Valve core blade 131 do not need to resist the velocity of sound air-flow and/or resist whole incoming pressures and open also/or close.By baffle plate 741 is set, between baffle plate 741 and Valve core blade 131, be provided with liquid-storing part, can suppress thus flow also/or can reduce valve to resist it thus and the pressure of closing.In other words, the overall pressure drop of encapsulation Valve core blade both sides can be divided between second pressure drop of first pressure drop of Valve core blade 131 both sides and baffle plate 741 both sides, can not have overall presure drop in Valve core blade 131 both sides thus.Because baffle plate 741 with relatively short time durations (for example can allow to be used for pressure that the flap antagonism of the Valve core blade 131 of valve assembly reduces, with less than 100 microseconds) open also/or close, so the fluid stream by Valve core blade 131 is can " as required " directed and do not need above-mentioned for example with reference to the special sequencing step of figure 4A-Fig. 4 F description.In other embodiments, the operation of the sequencing of Fig. 4 A-Fig. 4 F can together be used to provide operation under higher pressure with the Valve core blade 131 that is packaged with baffle plate 741.
The fluid that the size in hole 743, position and quantity can be used for controlling back pressure and passing through Valve core blade 131 and assembly flows.As Figure 24-shown in Figure 26, the outside angle that can close on Valve core blade 131 is provided with hole 743, but also other orientation can be set, the hole 743 of position, shape etc.By baffle plate 741, the flap of Valve core blade 131 can only resist the assembly both sides that comprise baffle plate 741 and Valve core blade 131 total pressure sub-fraction and open also/or close, and can reduce the time period of turbulent flow.Therefore, can reduce to open also/or close response time of flap, can provide improved functional, and/maybe can improve reliability.In addition, can eliminate demand to sequencing.
Wedge shaped baffle 743 also can be convenient to encapsulate Valve core blade and be assemblied in the main casing.Particularly, the degree that before packing ring 715 began compression, that wedge shape can allow to encapsulate was about 3/4 in the corresponding wedge-shaped enclosure that Valve core blade inserts valve chest (promptly 75%).Therefore, can reduce of the damage of follow-up when assembling to packing ring 715.
As Figure 24-shown in Figure 26, packing ring 715 can be arranged on that main body 713 is closed on the dorsal part of Valve core blade 131 and with respect to a side of baffle plate 741.Therefore packing ring 715 can be protected from being the tackiness agent, hot-melting machine operation etc. that are used for Valve core blade 131 is fixed on main body 713 between erecting stage.By arranging packing ring 715 as Figure 24-Figure 26, can packing ring 715 and baffle plate 741 between interference.
In addition, can form electrical lead 717 as shown in figure 27 makes the lead-in wire bonding part 717a that goes between be in substantially parallel relationship to the also feasible outside 717b that goes between of Valve core blade 131 with respect to Valve core blade 131 substantially vertically.In addition, depression can be set with the interconnection of improvement on the outside 717b of lead-in wire with the lead-in wire of main casing.
As describing in detail with reference to figure 28-Figure 34, the encapsulation Valve core blade of Figure 24-Figure 26 can insert main casing or remove from it.Therefore, can repair also/or revise the valve assembly that comprises one or more encapsulation Valve core blades.Therefore by removing inoperable encapsulation Valve core blade and inserting new encapsulation Valve core blade, can repair valve assembly with defective valves chip.In addition, by substituting original encapsulation Valve core blade, can change the functional of valve assembly with new encapsulation Valve core blade with different qualities (for example Valve core blade of different flow capacity and/or size).
As Figure 28-shown in Figure 30, main casing 801 also can have butt joint assembly parts 815a-815b, O shape ring 817a-817b and the collet chuck 819a-819b (be also referred to as and connect assembly parts and/or chuck soon) that is fixed to it.Particularly, collet chuck 819a-819b can be the push-in type chuck.Particularly, for example can utilize ultra-sonic welded and/or tackiness agent will dock assembly parts 815a-815b and be fixed to main casing 801, and butt joint assembly parts 815a-815b is communicated with the chamber 143b and the 143d fluid of valve assembly.O shape ring 817a-817b and collet chuck 819a-819b can be inserted into butt joint assembly parts 815a-815b to keep providing the air conduit that is communicated with the fluid of pneumatic actuator chamber 163a-163b (as shown in Figure 3) then.Can use main casing 801 three-way valve or five-way valve to be set based on the quantity of employed packaging hardware and position thereof with control fluid stream.
As mentioned above, MEMS (MEMS) Valve core blade 131 can be encapsulated in the framework to provide for example at the encapsulation Valve core blade shown in Figure 24-Figure 26.The encapsulation Valve core blade can be selectively inserted into each shell 803a-803d of main casing 801 or removes from it, and valve assembly can be revised also/or repair thus.The packing ring 715 of encapsulation Valve core blade provides the fluid-tight with each shell 803a-803d, makes that the fluid connection between the shell only provides by the opening in each Valve core blade.In addition, be oriented and packing ring 715 should cooperate with the predetermined side of particular shell at the Valve core blade 131 of encapsulation in the Valve core blade, make the encapsulation Valve core blade in main casing 801, be directed as above to provide the fluid between the 143a-143e of chamber to flow with reference to figure 4A-Fig. 4 F is described.
Shown in figure 32, each shell 803a-803d (as shown in figure 31) can have wedge-type shape to receive as above with reference to described each encapsulation Valve core blade that comprises wedge shaped baffle 741 of figure 24-Figure 27.Particularly, each shell 803a-803d has and closes on the matrix 851 relative broads that are used for housing 801 and along with shell becomes narrower away from matrix 851 extends profile.Therefore, each shell 803a-803d is configured to receive each encapsulation Valve core blade (comprising wedge shaped baffle 741), make the narrower part of encapsulation Valve core blade extend into housing, and make the wider portion of encapsulation Valve core blade close on the matrix 851 that is used for housing 801 with lead-in wire 717.
Because the wider portion of wedge shape encapsulation can not at first be inserted housing, so can reduce to encapsulate the possibility that Valve core blade can insert housing mistakenly.For example, the wedge shape of the shell possibility that can reduce that the wedge shape chip assembly is upside down or laterally insert.In addition,, then just can not insert fully if the wedge shape chip assembly is inserted shell backward, thus matrix 851 can be able to not correctly cooperate also with housing 801/or form and seal.
In addition, before the packing ring 715 of encapsulation begins compression, the wedge shape encapsulation can be inserted each wedge-shaped enclosure most (for example, greater than 50%, being generally 75%).Therefore, can reduce damage, and/or can between wedge shape encapsulation and wedge-shaped enclosure, provide the improvement fluid-tight to packing ring 715.
As mentioned above, the Inner Dimension that can change the window of the framework that is used to encapsulate Valve core blade does not change the outside dimensions of encapsulation Valve core blade assembly with the Valve core blade that holds different size.But therefore be received in encapsulation Valve core blade assembly among the same main casing 801 shell 803a-803d with different flow capacity characteristic.In other words, in the identical profile geometrical construction of keeping the encapsulation Valve core blade, the size that can change the MEMS Valve core blade is to provide different flow characteristic (for example, being in about 0.001Cv to the scope of about 10Cv).
In addition, metal lead wire 717 is arranged in expose portion on the edge of encapsulation Valve core blade and can cooperates with the fixing and flexible electrode to the Valve core blade of the shell 803a-803d that inserts main casing 801 with the corresponding lead-in wire 805 of main casing 801 electrical signal communication from the outside of main casing is provided.
Figure 33 show comprise four encapsulation Valve core blades, electronics sub-components 1001 and the valve assembly of matrix 851, saved the non-metallic part of main casing 801.Therefore, the electrical lead 805 of main casing 801 as seen, and the coupling of the electrical lead 805 of main casing and the electrical lead 717 of encapsulation valve assembly is also as seen.
Go out as shown in figure 33, the length that part (or tab) that curved section makes electrical lead 805 contact with the lead-in wire 717 of packaged chip assembly can be parallel to lead-in wire 805 length of main casing 801 (and be parallel to) can be set in each electrical lead 805 be provided with.Therefore, electrical lead 805 can be supported to gain in strength at its two ends with lead-in wire 717 parts that contact.In addition, insert along with the packaged chip assembly in the shell of main casing, during inserting along with the compression of packing ring 715, the lead-in wire 717 of packaged chip assembly can along the tab of lead-in wire 805 backward also/or to front slide.Can improve the reliability of the electric coupling between the lead-in wire 717 and 805 thus.
In addition, can filter be set in one or more chamber 143a-143e to protect little valve.For example as shown in figure 34, emissions filter 1041 can be arranged in chamber 143b and the 143c, and input filter 1043 can be arranged in the 143c of chamber.Filter in the 143c of chamber can protect little valve to avoid particulate and/or other deposits of supplying from high pressure, and the filter in chamber 143b and the 143d can protect little valve to avoid being incorporated into from port particulate and/or other deposits of actuator.Filter 1041 and/or 1043 can be made into integration with housing 801, and/or filter 1041 and/or 1043 can be independent of housing 801 and makes.One or more filters for example can be porous plastic filter device, porous metal filter, paper filter, desiccant filter, coalescing filter, fabric filter, membrane filter, sieve aperture filter/separator, mist separator, blade separator, cyclone separating device, fall liquid/gas separator, the flushing separator, streaming separator and/or horizontal separator hang down.
Can utilize input filter 1043 to filter customer-furnished high pressure supply.Though can be in housing 801 outsides to high pressure supply filter, destructive particulate can be introduced into the high pressure supply between the valve installation period, and/or otherwise particulate can be from any outside guiding downstream of filtering.As example, input filter 1043 can be configured to catch such as the particulate of Teflon band, line seal agent with and/or other can be present in the material of the particulate in the high-pressure feed road in high pressure supply filter/regulator downstream of user.Therefore, can reduce in feed path damage to Valve core blade.In addition, input filter 1043 can be configured to allow the air-flow on all directions.Therefore, block if a zone of filter becomes contaminated thing, air can flow through the adjacent area of filter and serious current limliting not.Though supply filter 1043 is illustrated in the housing 801, also alternative supply filter 1043 or be additional to it other filters are set.For example, can matrix 851 with and/or be coupled in the supply line of matrix 851 the supply filter be set.
Emissions filter 1041 can be used to the actuator discharging that filtration can comprise the particulate that produces because of actuating.The actuator discharging for example can comprise the micro particles of dry lubricant, sealing, rod bearing and/or actuator body material.Filter all these particulates by crossing, can reduce in vent pathway damage Valve core blade from actuator.In addition, emissions filter 1041 can be constructed to allow the air-flow on all directions.Therefore, if the contaminated thing that one of filter zone becomes blocks, then air can flow through the close region of filter and limited flow seriously not.Though emissions filter 1041 has been shown, also alternative emissions filter 1041 or be additional to it other filters are set in housing 801.For example, can and/or in the pneumatic actuator emissions filter be set in butt joint assembly parts 815a-815b, among the collet chuck 819a-819b.
By using baffle plate 741 the baffle plate chamber to be set, wherein at processing and/or the assembly process flap of Protective valve chip physically in the baffle plate chamber between baffle plate and the related Valve core blade.In addition, (a plurality of) hole in the baffle plate fully limit fluid stream make the maximum, force of the flap that can reduce to be applied to Valve core blade.In addition, the volume in baffle plate chamber can flow with respect to the sufficiently little stratified fluid that can obtain more quickly by Valve core blade that makes in the relevant chamber of valve chest, and the feasible fatigue strength that can reduce flap.Therefore can independence or be used in combination baffle plate and pressure that sequencing operation (as above described with reference to figure 4A-Fig. 4 F) can be resisted its operation with the increase Valve core blade with the reduction fatigue strength and improve flow etc.
In addition, can be the baffle plate that different Valve core blade settings in the same valve assembly have different hole dimensions.The 5 logical valves of Figure 34 for example can be provided with the baffle plate of bigger flow 741b-741c to be provided in actuator port and to be provided with the baffle plate of bigger limited flow 741a and 741d are provided outside actuator port.Piston motion relatively stably can be provided, and can reduce maximum piston speed.
The electronics sub-component 1001 that is used for valve assembly according to some embodiments of the present invention has been shown in Figure 35-Figure 36.Particularly, the printed circuit board (PCB) in the electronics sub-component 1001 can comprise and is used for electronic circuit and/or software and/or firmware that the operation of the Valve core blade 131 that is included in main casing 801 is controlled.For example, printed circuit board (PCB) can comprise that electronic circuit and/or software are to control also according to the above-mentioned operation of describing with reference to figure 4A-Fig. 4 F (by giving an order such as the remote-control device of programmable logic controller (PLC) (PLC))/or actuating valve chip 131.
Printed circuit board (PCB) can comprise IC chip disposed thereon, resistor, capacitor and/or inductor.In addition, the lead-in wire on the printed circuit board (PCB) can provide the electric coupling with the lead-in wire 805 of main casing 801, and connector 1005 (for example 5 pin Molex connectors) can provide to the electrical connection such as the remote controllers of PLC.Can be provided with the electronics sub-component with based on utilize such as wire jumper, pull down switch, a certain programmed characteristic of device selection such as shunt provides a plurality of different operating characteristics that is defined in the memory (for example ROM, PROM, EPROM, EEPROM etc.).Particularly, following will being described with reference to figure 41-Figure 44, Figure 45 A-Figure 45 B and Figure 46 A-Figure 46 B, printed circuit board (PCB) can comprise one or more custom circuits (for example, comprising the application-specific integrated circuit ASIC device).Apply for other operations of having described valve assembly and/or its electronics sub-component in for the U.S. Provisional Patent Application of " Methods Of Operating ElectrostaticallyActuated Microvalve Assemblies And Related Structures " number 60/590,699 (hereinafter referred to as people's documents such as " " Douglas) on July 23rd, 2004, denomination of invention people such as Kevin Douglas.By reference the full content that this provisional application disclosed is incorporated in this specification.
During normal running, electronics sub-component 1001 can receive operating energy and control signal by connector 1005.Also can be provided with alternative energy source such as storage battery 1013 make the electronics sub-component can be under the situation that energy interrupts with Valve core blade 131 sequencing to the predetermined default state.Though in Figure 35 and Figure 36, storage battery has been shown, also can have adopted other alternative energy sources (such as capacitive character storage device and/or fuel cell).As Figure 35 and shown in Figure 36, storage battery 1013 can be arranged in the hinged compartment lid 1015, replaceable thus storage battery.Hinge 1017 can be set make the compartment lid open and close, and packing ring 1019 can protect storage battery to avoid the pollution and/or the moisture of storage battery compartment outside.Can utilize double injection technology to form the storage battery compartment so that integrated lid 1015 and packing ring 1019 to be provided.By dish formula storage battery, terminal 1021 can provide the electrical couplings between the electrical assembly of sub-component 1001 and storage battery 1013.In addition, the electronics sub-component also can comprise be configured to utilize the circuit of peripheral hardware energy to charge in batteries during normal running.Can prolong the life-span of storage battery thus.
In addition, tutorial light 1023 (for example light emitting diode) can provide the indication to current operator scheme, external power supply state, battery condition etc.In addition, can use paired manual override terminal 1025 to stretch out or retracted position manually associated actuator is urged to.For example, can utilize terminal or other instruments of screwdriver to make first pair of manual override terminal electrical short manually driving associated actuator, and can utilize the end (or other instruments) of screwdriver to make second pair of manual override terminal electrical short manually to drive associated actuator to extended position to retracted position.
Electronics sub-component 1001 also can comprise the high-voltage driving circuit (for example multistage supply pump) that is used for the actuating valve chip electrode.For example, can provide 24V external power supply, the output of the 150V of actuating valve chip electrode and high-voltage driving circuit can produce the lead-in wire 717 of the lead-in wire 805 that is used for by housing 801 and Valve core blade by connector 1005.Printed circuit board (PCB) can comprise that also transient voltage suppresses (TVS) device 517 (the also one-tenth zener diode of reversal connection for example is connected in series).
The controller of electronics sub-component can be configured to monitor external power supply, and based on the interruption that detects external power supply Valve core blade 131a-131d is advanced into the predetermined default state and utilizes supply to keep this default conditions from the energy that substitutes energy source.For example when the interruption that detects external power supply, can keep the current state of Valve core blade 131a-131d.Alternately, when the interruption that detects external power supply, but controller cut-off valve chip 131a-131d makes the fluid that blocks between the 143a-143e of each chamber be communicated with.Alternately, when the interruption that detects external power supply, but controller cut-off valve chip 131b-131c and open Valve core blade 131a and 131d.Also alternately, when the interruption that detects external power supply, but controller cut-off valve chip 131a and 131d and open Valve core blade 131b-131c.
For example utilize injection molding technique again,, the electronics sub-component 1001 that comprises printed circuit board (PCB) can be encapsulated in the insulating material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative) as Figure 35 and shown in Figure 36.Particularly, can use the epoxy resin that under relatively lower temp and pressure, solidifies to protect wherein electronic device.The exterior geometry of packaging electronic sub-component can be set to be assemblied on the main casing 801, makes the lead-in wire of electronics sub-component cooperate with the lead-in wire 805 of main casing 801.
Five needle connectors 1005 for example can provide power supply (Vcc) input connection, ground connection (GND) input connection, A and B input control connection and state of energy output to connect.In addition, every pair of manual override terminal 1025 all can be recessed in the injection moulding housing to reduce and its unexpected possibility that contacts again.In addition, paired manual override terminal can be on the neighbouring part of storage battery lid respectively sign " 2 " reach " 4 " and number with actuator port corresponding to housing.
In addition, injection molding again extension 888 can be constructed with guiding electronics sub-component 1001 between follow-up erecting stage with respect to the layout of matrix and housing.Particularly, as described in below with reference to Figure 37-Figure 38, extension 888 can cooperate with the respective grooves of matrix.In addition, as described in below with reference to Figure 39 and Figure 40, the groove 885 of electronics sub-component 1001 can be constructed to cooperate with retaining clip.
The matrix that is used for valve assembly 851 according to some embodiments of the present invention has been shown in Figure 37 and Figure 38.Can utilize metal casting technique to form matrix 851.Particularly, matrix 851 can be by forming such as aluminium or stainless metal, and discharge port 142a-142b and supply port 144c can be the screw thread tapped holes.Can adopt extra screw thread tapped holes 853a-853b that main casing 801 is fixed on the matrix 851.In addition, can in matrix, be provided for installing the gap of valve assembly and/or mounting hole 855 (perpendicular to also/or be parallel to port).In addition, connectivity slot 857 is provided at the opening of relative narrower between each chamber in screw thread tapped holes and the main casing 801.
By using the cast metal as matrix, the integrity of the screw thread in the retaining hole more easily.In addition, can think protection and/or purpose attractive in appearance by the epoxy resin finish that is provided with on the cast aluminum base body.Alternately, matrix 851 can utilize the metal insert that is arranged in screw position to be formed by injecting forming material (for example plastic materials, elastomeric material, polymer, copolymer and/or its derivative).As shown in figure 37, groove 889 can be formed in the shank (tang) of matrix 851, and groove 889 can be configured to receive the extension 888 of electronics sub-component 1001.Following described with reference to Figure 39 and Figure 40, groove 887 also can be formed in the matrix 851 to be coupled with retaining clip.
In addition, can utilize flat tap drill then tapping form discharge port 142a-142b and supply port 144c.In addition, but Off center is formed for the connectivity slot 857 of discharge port 142a-142b.Therefore, because discharge during port need not put with respect to each valve pocket, so can reduce the length of valve assembly.
By encapsulating in the shell in the bottom that Valve core blade (as Figure 24-shown in Figure 26) inserts main casing 801 (as Figure 31 and shown in Figure 32); Utilize screw 861 that main casing (comprising encapsulation Valve core blade wherein) is fixed to matrix 851; And as Figure 39 and the U-shaped retaining clip 881 of utilizing shown in Figure 40 electronics sub-component 1001 is attached on main casing 801 and the matrix 851, can finish valve assembly.Particularly, U-shaped retaining clip 881 can construct with the groove 885 of the groove 883 of main casing 801, electronics sub-component 1001, and groove 887 couplings of matrix 851 so that said modules is tightened together.In addition, the extension 888 of electronics sub-component 1001 can be configured to cooperate so that aligning between the two to be provided with the groove 889 of matrix 851.
Can be 5 logical, 4 logical, 3 logical or 2 logical identical main casing, matrix and the electronics sub-components of valve operation setting.For 5 logical valve operations, as above with reference to the description of figure 4A-Fig. 4 F, for example as shown in figure 34 can be with in each shell in the bottom of four encapsulation Valve core blades insertion main casings.For 3 logical valves operations, the encapsulation Valve core blade can be inserted apart from each of electronics sub-component two shells farthest, and sealing bolt can be inserted apart from making chamber 143d-143e be permanently sealed in two nearest shells of electronics sub-component.As mentioned above, identical electronics sub-component can be set to based on utilize wire jumper, switch, shunt, safety fuse cutout or during manufacture and/or the selection made of other selection devices that can be set afterwards one in a plurality of operator schemes that are defined in the memory (for example ROM, PROM, EPROM, EEPROM etc.) are provided.For example, can use identical electronics sub-component to come to control 5 logical, 4 logical, 3 logical or 2 logical operations based on switch, shunt, safety fuse cutout and/or jumper settings.For example, 3 logical and 5 logical valves operate in people's document such as Douglas and are described.
Further alternately, can main casing, matrix and electronics sub-component be set for 4 logical and/or 2 logical operations.For 4 logical valves operations, can change matrix and make and between discharge chamber 143a and 143e and identical discharge port, provide fluid to be coupled.In addition, 4 logical operations can be provided with four Valve core blades of as above describing with reference to figure 4A-Fig. 4 F.Alternately, can utilize single Valve core blade to provide 2 logical operations so that unidirectional conducting/cut-out stream device to be provided.Can utilize the assembly that has a Valve core blade and replace the bolt of other Valve core blades of Figure 28-shown in Figure 31 that 2 exchange devices are provided.Alternately, can utilize have an input port, an output port and be used for single Valve core blade a shell provide 2 exchange devices than small shell.
According to some embodiments of the present invention, can utilize custom circuit (for example comprising one or more specific integrated circuit (being also referred to as ASIC)) provide as above with reference to figure 14-Figure 17 with and/or the electric function of the electronics sub-component described of Figure 35-Figure 36.Figure 41 is the block diagram that illustrates according to the functional block of the circuit 2001 of some embodiments of the present invention, and Figure 42 is the explanatory view of element that the printed circuit board (PCB) of the circuit 2001 that comprises Figure 41 is shown.
As shown in figure 41, circuit 2001 can comprise power adjustments/control circuit 2011, high voltage generating circuit 2013, storage battery detection/control circuit 2015, limit change/debounce logic circuit 2017, sequence controller (state machine) circuit 2019, high pressure (HV) output level conversion circuit 2021, configuration circuit 2023, reverse timing/control circuit 2025 and light emitting diode (LED) drive circuit 2027.As shown in the figure, each connector 509 that power adjustments/control circuit 2011 can be by Figure 14-Figure 17 or each connector 1005 by Figure 35-Figure 36 receive external power supply VDD and ground connection GND signal.Similarly, each connector 509 that limit change/debounce logic circuit 2017 can be by Figure 14-Figure 17 or each connector 1005 by Figure 35-Figure 36 receive input control signal A and B.Storage battery detection/control circuit 2015 can receive battery feed VBat and ground connection GBat signal from storage battery (for example storage battery 1013 of the storage battery 513 of Figure 14-Figure 17 or Figure 35 and Figure 36).
Utilize the output F1-F4 of HV output level conversion circuit 2021 and HComO and HComE to come the Valve core blade of actuating valve assembly, wherein export F1-F4 and HComO and the HComE lead-in wire (for example by the lead-in wire 405 of Figure 13 and Figure 20 or the lead-in wire 805 of Figure 31 and Figure 33) by main casing and be coupled to each Valve core blade.Particularly, the Valve core blade of valve assembly can be identified as first Valve core blade (apart from the electronics sub-component farthest) to the 4th Valve core blade (nearest apart from the electronics sub-component), its mesohigh output F1 to F4 is applied to first to fourth Valve core blade respectively, the shared strange HComO signal of high pressure is applied to the first and the 3rd Valve core blade, and the shared even HComE signal of high pressure is applied to the second and the 4th Valve core blade.
The custom circuit of Figure 41 and Figure 42 can be arranged so that the valve assembly of acquisition can be used as substituting flexibly traditional Electromagnetically driven valve.Therefore, physics and the electric interfaces that is used for the electronics sub-component can be consistent with physics that is used for traditional Electromagnetically driven valve and electric interfaces.For example, limit change/debounce logic circuit 2017 can be provided with input control signal A and the B that is used for Electromagnetically driven valve with reception.As Figure 41 and shown in Figure 42, four independently high pressure output signal F1-F4 can be set, and each Valve core blade load all effectively modeling as having the capacitor VC1-VC4 of hysteresis.Therefore capacitor VC1-VC4 represents that the element on the printed circuit board (PCB) interior with being arranged on the electronics sub-component relatively is arranged on the interior Valve core blade of main valve housing.In addition, can utilize supply pump, sensor circuit and/or its combination with and/or well known to a person skilled in the art that other circuit produce higher actuation voltage.
High voltage generating circuit 2013 can be set so that low pressure source (for example 24 volts of external power supply signal VDD and/or 3 volts of battery feed signal VBat) is converted to the high-voltage signal such as 200 volts of DC signals.HV generative circuit 2013 for example can comprise that series connection is arranged on the charge pump on the circuit 2001.As shown in Figure 41 and Figure 42, in size that reduces circuit 2001 and/or cost, extraly or alternatively, outside inductor coil LL and LH can be arranged in parallel so that the one or more booster converters that are used to produce high-voltage signal to be provided with external resistor RL and RH.In addition, the absolute value that can adjust consequent high pressure with adapt to be used for different application different actuation voltage also/or adapt to because of making the change of the characteristic that changes the different circuit (for example ASIC) that cause.Can utilize the resistor HVAR of the part of the voltage divider that together uses as comparator to adjust synthetic high pressure when high voltage generating circuit 2013 is activated, to control with HV generative circuit 2013.
When primary power source de-energizes (for example when losing external power supply signal VDD), the electronics sub-component that comprises circuit 2001 can be set to be arranged so that valve assembly and can to keep a kind of state or to be converted to the state of needs.Therefore, the electronics sub-component that comprises circuit can be set providing enough energy, be in the electric leakage that overcomes when needing state to reach the time period in indefinite duration by the electrostatically actuated Valve core blade during losing external power supply signal VDD (it is 24 volts of power supplys), to keep Valve core blade from storage battery (for example storage battery 3013 of the storage battery 1013 of the storage battery 513 of Figure 15-Figure 17, Figure 36 and/or Figure 42).
When detecting when outage, also can need the input state of energy with the time that high pressure output signal F1-F4 is switched to predetermined state based on concrete application and outage.Can use 3 volts of lithium main batterys of relatively low cost provide energy with lose also at DC external power supply signal VDD/or keep high pressure output signal F1, F2, F3 and/or F4 when being interrupted.Alternately, can use the rechargeable lithium-ion battery of the voltage output that has in 3.0 to 4.2 volt range, circuit 2001 wherein is set when having external power supply signal VDD, storage battery is recharged.
During the normal running that can obtain external power supply signal VDD, limit changes/debounce logic circuit 2017 can receive also/or filter input control signal A and B, and limit change/debounce logic circuit 2017 can provide input control signal A and B to sequence controller 2019.In the time can obtaining external power supply signal VDD, sequence controller circuit 2019 also disposes the operation of instructing HV output level conversion circuit 2021 according to the circuit that is defined by configuration signal C1-C3 according to input control signal A and B.When losing external power supply signal VDD, storage battery detection/control circuit 2015 can detect outage, and power-off signal can produce and be provided to sequence controller circuit 2019 by detection/control circuit 2015.During losing external power supply signal VDD, sequence controller circuit 2019 instructs the operation of HV output level conversion circuit 2021 according to the power-down mode (not considering input control signal A and B) that is defined by configuration signal C1-C3.
Because only can obtain finite energy, so the operation during losing external power supply signal VDD can influence the operation of each assembly of circuit 2001 from storage battery.In other words, the one or more assemblies of circuit 2001 can be set under low energy model, to operate to prolong the life of storage battery during the loss signal VDD.For example, HV output level conversion circuit 2021 can be set so that low electric leakage operation to be provided, the high pressure of HV generative circuit 2013 generates oscillator and can operate based on " on demand " during loss signal VDD, and/led drive circuit 2027 maybe can be set so that the pattern of only leaking electricity to be provided during loss signal VDD.By reducing the electric current that obtains from storage battery, can prolong the time durations that during loss signal VDD, can use storage battery.
In addition, storage battery detection/control circuit 2015 can be set detects low battery tension and for example needs to replace storage battery by one or two LED1023 being glimmered indicating.Particularly, storage battery detection/control circuit 2015 battery tension of can under rated load, periodically sampling, and storage battery detection/control circuit 2015 can be indicated and needed to replace storage battery (to hold dissimilar storage batteries) when battery tension signal VBat falls to about 2 volts.For example, storage battery detection/control circuit 2015 can utilize the rated load at least about 10M-ohms to come battery tension is sampled.
Logical relation between (comprising the electronics sub-component of Figure 41 and circuit 2001 shown in Figure 42) input and the output is provided in the table 1 of Figure 43.Index raises and fall (by the capacitor of transistor charging and discharge) can be enough to drive the electrostatically actuated Valve core blade.But, can provide waveform shaping (for example deliberate toning and sedimentation voltage) according to some embodiments of the present invention.In the table 1 of Figure 43, X represents " paying no attention to " state to each signal.But the one or both of input control signal A and/or B is being represented under the situation of " paying no attention to " state, can all input control signal be urged to high pressure or low pressure at any time.
Shown in the table 1 of Figure 43,5 logical 3 cylinder port discharging configurations can be set by being arranged so that configuration signal C1 and C1 ground connection (being expressed as 0).When signal VDD exists when being in normal running, in response to represented input control signal A and B can drive high pressure output signal F1-F4 (wherein 0 expression valve open and 1 expression valve close) and LED output signal LED-A and LEID-B (wherein 0 expression is interrupted and 1 expression conducting).When configuration signal C3 ground connection and signal VDD are interrupted, can drive HV output signal F1-F4 makes to " 00 " state and wins and the 4th Valve core blade opens and second and third Valve core blade is closed (that is, two cylinder port are all discharged) and do not consider the state of input signal A and B.When configuration signal C3 unsteady (being expressed as 1) and signal VDD when being interrupted, the end-state when HV output signal F1-F4 can remain on its outage and do not consider the state of input signal A and B.
Can the 5 logical whole occlusion configuration of 3 bit ports be set configuration signal C2 unsteady (being expressed as 1) by being arranged so that configuration signal C1 ground connection (being expressed as 0).When signal VDD exists when being in normal running, in response to represented input control signal A and B can drive high pressure output signal F1-F4 (wherein 0 expression valve open and 1 expression valve close) and LED output signal LED-A and LED-B (wherein 0 expression is interrupted and 1 expression conducting).When configuration signal C3 ground connection and signal VDD are interrupted, can drive HV output signal F1-F4 and make the full spool sheet all close (that is, two cylinder port are all isolated with high pressure and discharge port) and do not consider the state of input signal A and B to " 00 " state.When configuration signal C3 is floating (being expressed as 1) and signal VDD when being interrupted, the end-state when HV output signal F1-F4 can remain on its outage and do not consider the state of input signal A and B.
Can 5 logical 3 bit port stimulation arrangement be set configuration signal C2 ground connection (being expressed as 0) by being arranged so that configuration signal C1 to float (being expressed as 1).When signal VDD exists when being in normal running, in response to represented input control signal A and B can drive high pressure output signal F1-F4 (wherein 0 expression valve open and 1 expression valve close) and LED output signal LED-A and LED-B (wherein 0 expression is interrupted and 1 expression conducting).When configuration signal C3 ground connection and signal VDD are interrupted, can drive HV output signal F1-F4 makes to " 00 " state and wins and the 4th Valve core blade is closed and second and third Valve core blade is opened (that is, two actuator port all are energized) and do not consider the state of input signal A and B.When configuration signal C3 is floating (being expressed as 1) and signal VDD when being interrupted, the end-state when HV output signal F1-F4 can remain on its outage and do not consider the state of input signal A and B.
Can by be arranged so that configuration signal C1 and C2 all float (being expressed as 1) 5 logical 2 configurations are set., only use an input control signal B here, so input control signal A is in " being indifferent to " state.When signal VDD exists when being in normal running, in response to represented input control signal B can drive high pressure output signal F1-F4 (wherein 0 expression valve open and 1 expression valve close) and LED output signal LED-A and LED-B (wherein 0 expression is interrupted and 1 expression conducting).When configuration signal C3 ground connection and signal VDD are interrupted, can drive HV output signal F1-F4 and make to " 0 " state and win and the 3rd Valve core blade opens and the second and the 4th Valve core blade is closed and do not consider the state of input signal A and B.When configuration signal C3 is floating (being expressed as 1) and signal VDD when being interrupted, the end-state when HV output signal F1-F4 can remain on its outage and do not consider the state of input signal A and B.
When voltage being applied to continuously the electrostatically actuated Valve core blade through during the time enough, the electric charge of accumulation can cause de-excitation to postpone.Because according to the application meeting needs of some embodiments of the present invention keep the set state a few days or even several weeks, so need reduce stored charge.By making the pole reversal of the voltage that applies in the case periodically, can reduce residual charge, reduce stored charge and related actuating delay thus.Because Valve core blade is electrostatic, so it is inessential to apply the polarity of voltage.In addition, if before Valve core blade can be opened fully, can make the pole reversal, then just can not cause substantial influence to the physical operations of device.
Therefore, circuit can be set is applied to the HV output signal that keeps closing the Valve core blade during the long period (for example, F1, F2, F3 and/or F4) the pole reversal reduces stored charge thus to make periodically.By being used in oscillator on the chip in the high voltage generating circuit 2013, can obtain to be used for the signal of the timing that polarity switches.The various functions of the absolute cycle of vibration for high voltage generating circuit can not be epochmaking.
Can determine minimum latency length (trev) between the pole reversal based on the characteristic of the Valve core blade that uses.Because during losing external power supply signal VDD, when accumulator positive is used to the maintaining valve chip status, also can produce stored charge, so also can between whole turnoff time, provide the pole reversal.Therefore, can when HV generative circuit 2013 is encouraged periodically, trigger the pole reversal between turnoff time, when outage, just not need continuous running thus the oscillator of HV generative circuit.In addition, if change state, then can before in response to new input control signal order, finish the pole reversal at pole reversal operation period input control signal A and B.
When a state switches to another state, product functionality can require sequence controller circuit 2019 to be provided at de-excitation and/or the excitation (describing with reference to figure 4A-Fig. 4 F for example) that is converted to controlled sequence during next serviceability from a serviceability.In other words, after control input signals changes and/or after state of energy changes, can need timing order to output state.In addition, sequencing is by a series of intermediatenesses term of execution that the pole reversal can being included in it.Particularly, sequencing can make by intermediateness and can not take place or even the specific output combination of moment, and make that giving the specific intermediateness sufficient time solves.
Shown in table 1 among Figure 43, can there be 5 kinds of unique operation states (0101,1010,1111,0110 and 1001) of HV output signal F1-F4 and 14 kinds of different switching from a serviceability to another serviceability.Figure 44 illustrates example according to the order of the whole 14 kinds of change of state of some embodiments of the present invention.Figure 44 also shows and can be used to the order that (being each of five kinds of serviceability) carries out 5 kinds of pole reversal conversions.In addition, minimum time can be set and postpone (t before switching to the state that is expressed as runic
Del).In addition, during power-down mode, can produce the pole reversal order of Figure 44.Therefore, the high-voltage signal conversion can utilize storage battery energy between turnoff time.
The Valve core blade that at first makes its pole reversal is through applying the state of zero volt to it.In Figure 44 with top line (promptly
Represent these zero cross points.(wherein a pair of two HV output signals (for example to realize the top line state at circuit 2001, F1 and F3 or F2 and F4) (for example share shared signal with respect to each, HComO or HComE) be driven with the zero potential difference) afterwards, can make the pole reversal of sharing shared signal right with respect to each HV output signal.If the HV output signal is initially in the high-voltage potential of sharing shared signal with respect to each when pole reversal operation beginning, then share shared signal at paired high pressure output signal of transition period and each and can all be pulled to high-voltage potential, the high pressure output signal can be pulled to the low pressure electromotive force of sharing shared signal with respect to each in pairs then.If the HV output signal is initially in the low pressure electromotive force of sharing shared signal with respect to each when pole reversal operation beginning, then share shared signal at paired high pressure output signal of transition period and each and can all be pulled to the low pressure electromotive force, the high pressure output signal can be pulled to the high-voltage potential of sharing shared signal with respect to each in pairs then.
Figure 45 A-Figure 45 B provides the input/output signal and/or the stitch summary of circuit 2001.Can a plurality of connection pads be set to adapt to the electromotive force current surge for some stitch.
Can be on whole I/O stitch of circuit 2001 be provided with in circuit 2001 and meet IEC61000-4-2, meeting rank is the Electrostatic Discharge circuit protection of 2 grades (4kV is used for contact).In addition, can be according to IEC61000-4-4, meeting 4 grades of ranks is that input control signal stitch (A and B) and power supply stitch (VDD and GND) are provided with to external electrical fast transient (EFT) circuit.Particularly, can between master battery signal/stitch VDD and ground signalling/stitch GND, be provided with transient voltage suppressor TVS (for example comprising two Zener diodes) with and/or reservoir capacitor SC.In addition, externally between power Vcc and master battery signal/stitch VDD diode RPI is set.In addition, can be input control signal/stitch A and B diode RP2 and RP3 are set.Figure 46 A-Figure 46 B provides the design parameter according to the circuit 2001 of some embodiments of the present invention.
Transient voltage suppressor TVS can comprise the zener diode that becomes that is connected between input power supply signal Vcc/VDD and the ground connection GND.The Zener diode setting of can under the situation that its negative electrode connects as shown in figure 42, connecting.Transient voltage suppressor TVS can provide overvoltage protection and can provide protection to avoid relatively large fast transient.Transient voltage suppressor TVS can arrange so that realize reliable protection from transients away from the circuit on the printed circuit board (PCB) of electronics sub-component 2001 relatively.Volume, thickness, width, length and the material of trace that can select to be used for electronics sub-component printed circuit board (PCB) is with the useful signal path that is provided for normal running and be provided at protection from transients under the elevated temperature.
Reversed polarity diode RP1 also can connect with circuit 2001 and be arranged between power supply stitch VDD and the external power supply Vcc (for example 24 volts of DC external power supplys), and reversed polarity diode RP1 can provide the reversed polarity protection to circuit 2001.Additional diodes RP2 and RP3 can be input control signal/stitch A and B provides the reversed polarity protection.Reservoir capacitor SC can be arranged in parallel with transient voltage suppressor TVS, and reservoir capacitor SC can provide lower pass-filter.Reservoir capacitor SC also can play electric accumulator and do in order to be circuit 2001 power supplies during losing external energy.Lose external energy (that is, Vcc) afterwards, reservoir capacitor SC can provide sufficient electric current, make circuit 2001 can detect outage also/or begin to be converted to the power operation pattern and can switch to storage battery 3013 until circuit.
High voltage generating circuit 2013 can utilize resistor R L and/or RH and inductor LL and/or LH to generate high pressure HVDD to be used for inductive impulse to reservoir capacitor HVSC charging with generation.Resistor R L and/or RH can be used to limit maximum impulse voltage, do not damage the diverter circuit of high voltage generating circuit 2013 thus to generate sufficiently high voltage.
The speed that changes electric current in inductor depends on and applies the voltage that passes it.Can utilize equation: V=L (di/dt) to calculate the voltage that passes inductor, and provide the voltage that passes inductor can make the electric current by inductor raise with the slope.Electric current is provided and makes the switch of inductor current sedimentation if open to inductor, then because the electric current that passes inductor is because of inductor characteristic V=Ldi/dt can not change immediately, the voltage that passes inductor will raise.When opening switch, the voltage that passes inductor will be increased to the level that is enough to force electric current to flow immediately.By resistor R L and RH being set in parallel, can limit the possibility that the maximum current that is produced by inductor also can reduce to damage circuit 2001 with inductor LL and LH.As shown in figure 41, the inductive impulse circuit that comprises inductor LH and resistor R H can be used to charge to high pressure reservoir capacitor HVSC by charging diode CD1.Between turnoff time, comprise that the inductive impulse circuit of inductor LL and resistor R L can be used to charge to reservoir capacitor SC by charging diode CD2.
Figure 47 A and Figure 47 B are front perspective view and the rear perspective view according to the valve assembly that comprises valve body 801 ', matrix 851 ' and gas sub-component 1001 ' of some embodiments of the present invention.In the assembly of Figure 47 A-Figure 47 B, can provide to whole couplings of supplying, discharge, reaching actuator port by matrix 851 '.As shown in the figure, screw thread couple 146a ' and 146b ' can be provided for the actuator port of pneumatic cylinder, and screw thread couple 142a ' and 142b ' can provide discharge port; And screw thread couple 144c ' can provide high pressure supply port.Therefore the valve assembly of Figure 47 A-Figure 47 B can provide and valve assembly and the parts identical functions as above described with reference to figure 28-Figure 40.In addition, electronics sub-component 1001 ' can be identical with above-mentioned electronics sub-component with reference to Figure 33, Figure 35-Figure 36 and Figure 39-Figure 40 description.
In addition, valve chest 801 ' can be identical with the valve chest 801 of Figure 28-Figure 34 and Figure 39-Figure 40, except there is not port (that is, butt joint assembly parts 815a-815b or collet chuck 819a-819b) on respect to the surface of matrix 851 ' at valve chest 801 '.Shown in Figure 47 A-Figure 47 B, valve chest 801 ' can be the smooth opening that do not exist therein with respect to the surface of matrix 851 '.But the inside of valve chest 801 ' can comprise as above with reference to figure 28-Figure 34 and the described chamber of Figure 39-Figure 40, valve shell, lead-in wire etc.
The valve chest 801 ' of Figure 47 A-Figure 47 B and the valve chest 801 of Figure 28-Figure 34 and Figure 39-Figure 40 can utilize some shared instruments to make.Particularly, can use identical lower mould instrument to come the bottom of molded valve housing 801 and 801 ', wherein identical lower mould instrument defines chamber and the valve shell of valve chest 801 and 801 '.Can use different last moulds to come the different top of molded valve housing 801 and 801 '.Particularly, can with first on mould together use identical lower mould instrument to come the molded valve chest 801 that comprises butt joint assembly parts 815a-815b, and can with second on mould together use identical lower mould instrument to come molded valve housing 801 ' to make not have opening in respect to the surface of matrix 851 ' at valve chest 801 '.
As shown in figure 48, punching press aluminium manifold matrix 851 " can be a plurality of valve chest 801a ' and provide identical supply port 144c to 801c ' and electronics sub-component 1001a ' to 1001c ' " and discharge port 144a-144b ', wherein as above with reference to described valve chest and the electronics sub-component of being provided with of figure 47A-47B.In addition, the manifold matrix 851 " can be each valve chest independent actuator port 146aa to 146af and 146ba to 146bf in pairs are provided.Therefore can be at supply port 144c " with each valve chest 801a ' to providing fluid to be coupled between the supply chamber of 810c '.Similarly, can be at discharge port 142a " and 142b " and each valve chest 801a ' to the fluid coupling is provided between each discharge chamber of 810c '.On the contrary, actuator port 146aa and 146ba can be coupled to each actuator cavities of valve chest 801a '; Actuator port 146ab and 146bb can be coupled to each actuator cavities of valve chest 801b '; And actuator port 146ac and 146bc can be coupled to each actuator cavities of valve chest 801c '.
Can be and be coupled to manifold matrix 851 " the additional valve housing additional actuated device port one 46ad to 146af and 146bd to 146bf are set.Manifold matrix 851 shown in Figure 48 for example is set " to receive six valve assemblys.If manifold matrix 851 with Figure 48 " together use and be less than six valve chests, then can seal untapped valve chest position to reduce from supply port 144c " leakage.As shown in figure 48, at manifold matrix 851 " on each valve chest position all comprise to each actuator port and to the supply and the coupling 893 of discharge port.If not at manifold matrix 851 " the valve chest position valve chest is set, then can seal coupling 893 (or at least to supplying port 144c " coupling) and leak to reduce.In addition, the manifold matrix 851 " can be provided with AN connector such as the connector that is used for DIN rail 891 (according to Deutsche industry norm (DIN)).
For example can come machined manifold matrix 851 by the punching press aluminium section bar ", and it is installed on the DIN rail.Can form supply port 144c by punching press " and discharge port 142a " and 142b ".Can be at manifold matrix 851 " in from coming machining actuator port 146aa to 146af and 146ba to 146bf perpendicular to the direction of supply and discharge port.Can be in the manifold matrix from perpendicular to supply and discharge port and be machined into the coupling that is used for valve chest 893 of supply port, discharge port and actuator port perpendicular to the direction of actuator port.
Valve core blade and/or valve assembly also can be used for vacuum application according to an embodiment of the invention.For example shown in Figure 49 A and the 49B, valve assembly 4141 can define three chamber 4143a-4143c that separate by two Valve core blade 4131a-4131b in the valve shell that is supported on valve assembly.In addition, vacuum ports 4142 can be coupled to vacuum pump, remove port 4144 and can be coupled to pressure releasing source (for example atmosphere), and output port 4146 can be coupled to vacuum equipment 4148 (for example being used for the microelectronic process industry to handle the vacuum WAND of the brilliant unit of microelectronic).
Shown in Figure 49 A, can apply vacuum by vacuum equipment 4148 by in the flap of cut-off valve chip 4131b, opening the flap of Valve core blade 4131a, output port 4146 is coupled to vacuum ports 4143a by Valve core blade 4131a thus.Shown in Figure 49 B, can remove vacuum from vacuum equipment 4148 by the flap of cut-off valve chip 4131a in the flap of opening Valve core blade 4131b, output port 4146 is coupled to by Valve core blade 4131b and removes port 4143b thus.Though in Figure 49 A-49B, do not illustrate, can be under in response to the control of the controller of user and/or other inputs operation Valve core blade 4131a-4131b.
For example can utilize the valve chest 801 of Figure 28-Figure 30 that valve assembly 4141 is set, wherein bolt is used for the valve shell 803c-803d of hermetically closing.The valve assembly in three chambeies alternately, can be set.In addition, can filter be set in one or more chamber 4143a-4143c with Protective valve chip 4143a-4143b.In addition, can as described in figure 6-Fig. 9 and/or Figure 24-Figure 27, encapsulate Valve core blade 4131a-4131b, and/or baffle plate can as above be provided with Valve core blade 4131a-4131b with reference to figure 23-Figure 26 is described as above-mentioned.
According to some embodiments of the present invention, can utilize relatively low energy storage battery (for example the storage battery 1013 of the storage battery 513 of Figure 15-Figure 17, Figure 36, with and/or the storage battery 3013 of Figure 42) and do not need external power supply to come operating valve assembly and related control.In addition, can via optical communication, radio frequency communications, with and/or other radio communications provide control signal to make not need to be electrically connected.Therefore this valve assembly can satisfy intrinsic safety (IS) demand that is used for the IS application.
In addition, can the wearing and tearing littler operate according to MEMS (MEMS) valve of some embodiments of the present invention than traditional mechanical valve.MEMS valve according to some embodiments of the present invention can produce less particulate (because of wearing and tearing cause) thus.Therefore, can be according to the MEMS valve of some embodiments of the present invention extremely useful to polluting in the tetchy application (for example in semi-conductor industry, pharmaceuticals industry, medical industries, biochemistry industry etc.).
Figure 50 A is the stereogram of integrated according to an embodiment of the invention air pressure valve and cylinder assembly 5001, and Figure 50 B is the cross section of the assembly 5001 of Figure 50 A.For clearly the size of component of purpose Figure 50 A-Figure 50 B can be by exaggerative.Particularly, assembly can comprise the piston 5008 in cylinder tube 5003 (for example rigid metal cylinder tube), first and second end cap 5005 and 5007, the cylinder tube 5003 and be coupled to piston 5008 and extend through the bar 5009 of first end cap 5005.In addition, spring 5010 can be set to promote piston 5008 and bar 5009 at unpowered (that is discharging) state in cylinder tube 5003 to regaining (acquiescence) position.
Shown in Figure 50 B, second end cap 5007 can define first, second and third valve pocket 5015a-5015c.The first valve pocket 5015a can be provided with to be coupled to high pressure supply 5011, the second valve pocket 5015b can be provided with the chamber 5017 of managing in the cylinder 5003 to be coupled to, and the 3rd valve pocket can be provided with to be coupled to low pressure discharging 5019.In addition, electrostatically actuated Valve core blade 5021a-5021b can be set in second end cap 5007.Particularly, can between the first valve pocket 5015a and the second valve pocket 5015b, Valve core blade 5021a be set, and Valve core blade 5021a can be set allow in response to the electrical signal that is applied to it to be communicated with, or block the first valve pocket 5015a and be communicated with fluid between the second valve pocket 5015b from the fluid of first valve pocket 5015a to the second valve pocket 5015b.Similarly, can between the second valve pocket 5015b and the 3rd valve pocket 5015c, Valve core blade 5021b be set, and in response to the electrical signal that is applied to it, Valve core blade 5021b can be set be communicated with from the fluid of the second valve pocket 5015b to the, three valve pocket 5015c allowing, or block the second valve pocket 5015b and be communicated with fluid between the 3rd valve pocket 5015c.
Can electrical signal be provided to first and second Valve core blade 5021a-5021b via coupling 5023 to electric bus 5025.For example, can be at second end cap 5007 by electric bus 5025 and be coupled and 5023 receive from programmable logic controller (PLC) (PLC) and to stretch out and regains signal, the control circuit generation high-voltage signal that wherein is positioned at second end cap, 5007 places also/or provide logic for sequencing, power operation, the pole reversal etc.Alternately, can take place in the outside of second end cap 5007 stretching out and regain part or all of Signal Processing.
Therefore, Valve core blade 5021a-5021b can provide 3 logical valves functional stretching out and regain with control piston 5008 and bar 5009.Under first state, but cut-off valve chip 5021a is communicated with fluid between the second valve pocket 5015b to block the first valve pocket 5015a in fact, is communicated with fluid between the 3rd valve pocket 5015c to allow the second valve pocket 5015b and can open the second Valve core blade 5021b.Therefore, cavity 5017 can be coupled to low pressure discharging 5019 by the second Valve core blade 5021b, and spring 5010 is pushed into retracted position with piston 5008 and bar 5009 thus.
Under second state, can open Valve core blade 5021a and be communicated with fluid between the second valve pocket 5015b, be communicated with fluid between the 3rd valve pocket 5015c to block the second valve pocket 5015b in fact and can close the second Valve core blade 5021b to allow the first valve pocket 5015a.Therefore, cavity 5017 can be coupled to high pressure supply 5019 by the first Valve core blade 5021a, and piston 5008 and bar 5009 are pushed to extended position pressure spring 5010 thus thus.
For example can provide the functional of five-way valve with control supply and discharge pressure to the coupling in second chamber of the cylinder tube 5003 between the piston 5008 and first end cap 5005 thus by in first end cap 5005, comprising two Valve core blades similarly.Therefore, can be provided with electric and coupling pressure two end caps.Alternately, can utilize four Valve core blades that are arranged at an end caps that 5 logical operations are provided, wherein between two end caps, be provided with the air pressure coupling.By the five-way valve operation, just can not need spring 5010.
Can form independently end cap 5005 and 5007 and cylinder tube 5003 then with its assembling.Screw thread for example can be attacked to receive the internal thread of each end cap 5005 and 5007 in the end of cylinder tube 5003, perhaps can assemble pipe and end cap by other means well known by persons skilled in the art.
Can be as above be provided with also/or encapsulation Valve core blade 5021a-5021b with reference to the description of figure 1-Fig. 2, Fig. 5-Fig. 9 and/or Figure 24-Figure 27, and end cap 5007 can be formed by molded, rotary cutting (for example, on lathe), machining and/or other means well known by persons skilled in the art by rigid material.After formation comprises the end cap 5007 of valve pocket 5015a-5015c, Valve core blade can be inserted in (a plurality of) opening in the end cap 5007, and before end cap 5007 (and Valve core blade and matrix) being fixed to cylinder tube 5008, matrix can be fixed to (a plurality of) opening in the end cap 5007.End cap 5007 can provide the rigid valve housing thus, and first and second valve 5015a-5015b can be set in the rigid valve housing that is defined by end cap 5007, and the rigid valve housing that is defined by end cap 5007 directly can be mounted to cylinder tube 5003.Therefore, can between valve chest that defines by end cap 5007 and cylinder tube 5003, provide fluid-tight.
Though abovely at the valve assembly that is used to control the pneumatic actuator that comprises bar embodiments of the invention have been discussed, valve assembly also can be used to the pneumatic actuator that control comprises Rodless cylinder (for example magnetic coupling cylinder and/or revolving actuator) according to an embodiment of the invention.For example, can from the structure of Figure 50 A-Figure 50 B, remove bar 5009, and magnet can be coupled to the piston 5008 of cylinder tube 5003 inside.Therefore, can utilize the motion of the piston 5008 in magnet and the cylinder tube 5003 to influence the motion of cylinder tube 5003 outer barrel.
Though specifically illustrate and described the present invention with reference to embodiment, it will be apparent to one skilled in the art that under the situation that does not break away from the spirit that defines by claims and equivalent thereof and scope, can carry out change on each form and the details to the present invention.
Claims (133)
1. valve assembly comprises:
Define the main casing in five chambeies, first chamber is coupled to low pressure discharge port, second chamber and is coupled to that first actuator port, the 3rd chamber are coupled to high pressure supply port, the 4th chamber is coupled to second actuator port and the 5th chamber is coupled to the low pressure discharge port;
First valve between described first chamber and described second chamber, wherein said first response valve allows or blocks described first chamber in fact to be communicated with fluid between described second chamber in first electrical signal;
Second valve between described second chamber and described the 3rd chamber, wherein said second response valve allows or blocks described second chamber in fact to be communicated with fluid between described the 3rd chamber in second electrical signal;
The 3rd valve between described the 3rd chamber and described the 4th chamber, wherein said the 3rd response valve allows or blocks described the 3rd chamber in fact to be communicated with fluid between described the 4th chamber in the 3rd electrical signal;
The 4th valve between described the 4th chamber and described the 5th chamber, wherein said the 4th response valve allows or blocks described the 4th chamber in fact to be communicated with fluid between described the 5th chamber in the 4th electrical signal; And
Be set to each valve assembly and produce described first, second, third, and the controller of the 4th electrical signal, wherein said controller is set up so that described valve advances by following sequence of states,
Under first state, open described second valve and described the 4th valve and close described first valve and described the 3rd valve, allow between described second chamber and described the 3rd chamber thus and described the 4th chamber is communicated with fluid between described the 5th chamber, and block between described first chamber and described second chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber
Under second state after described first state, open described second valve and close described first valve, the 3rd valve, and the 4th valve, allow described second chamber to be communicated with thus with fluid between described the 3rd chamber, and block between described first chamber and described second chamber thus in fact, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber
Under the third state after described second state, open described second valve and described the 3rd valve and close described first valve and described the 4th valve, allow between described second chamber and described the 3rd chamber thus and described the 3rd chamber is communicated with fluid between described the 4th chamber, and block between described first chamber and described second chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber
Under the four condition after the described third state, open described the 3rd valve and close described first valve, second valve, and the 4th valve, allow described the 3rd chamber to be communicated with thus with fluid between described the 4th chamber, and block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber and described the 4th chamber is communicated with fluid between described the 5th chamber, and
Under the 5th state after described four condition, open described first valve and described the 3rd valve and close described second valve and described the 4th valve, allow between described first chamber and described second chamber thus and described the 3rd chamber is communicated with fluid between described the 4th chamber, and block between described second chamber and described the 3rd chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber.
2. the described sequence of states that valve assembly as claimed in claim 1, wherein said controller are provided to provide also comprises:
Under the original state before described first state, close described first valve, second valve, the 3rd valve and the 4th valve, block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.
3. what valve assembly as claimed in claim 1, wherein said controller setting provided is also comprised by described sequence of states:
Under the 6th state after described the 5th state, close described first valve, second valve, the 3rd valve and the 4th valve, block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.
4. the described sequence of states that valve assembly as claimed in claim 1, wherein said controller are provided to provide also comprises:
Under the 6th state after described the 5th state, close described second valve and described the 3rd valve, block between described second chamber and described the 3rd chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber, and open described first valve and described the 4th valve, allow between described first chamber and described second chamber thus and described the 4th chamber is communicated with fluid between described the 5th chamber.
5. the described sequence of states that valve assembly as claimed in claim 1, wherein said controller are provided to provide also comprises:
Under the 6th state after described the 5th state, close described first valve and described the 4th valve, block between described first chamber and described second chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber, and open described second valve and described the 3rd valve, allow between described second chamber and described the 3rd chamber thus and described the 3rd chamber is communicated with fluid between described the 4th chamber.
6. the described sequence of states that valve assembly as claimed in claim 1, wherein said controller are provided to provide also comprises:
Under the original state before described first state, close described second valve and described the 3rd valve, block between described second chamber and described the 3rd chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber, and open described first valve and described the 4th valve, allow between described first chamber and described second chamber thus and described the 4th chamber is communicated with fluid between described the 5th chamber.
7. the described sequence of states that valve assembly as claimed in claim 1, wherein said controller are provided to provide also comprises:
Under the original state before described first state, close described first valve and described the 4th valve, block between described first chamber and described second chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber, and open described second valve and described the 3rd valve, allow between described second chamber and described the 3rd chamber thus and described the 3rd chamber is communicated with fluid between described the 4th chamber.
8. the method for an operating valve assembly, described valve assembly comprises the housing that has with cavity of resorption: be coupled to first chamber of low pressure discharge port, second chamber that is coupled to first actuator port, the 3rd chamber that is coupled to high pressure supply port, the 5th chamber that is coupled to the 4th chamber of second actuator port and is coupled to the low pressure discharge port; Described valve assembly also comprises the 3rd valve between second valve between first valve between described first chamber and described second chamber, described second chamber and described the 3rd chamber, described the 3rd chamber and described the 4th chamber and the 4th valve between described the 4th chamber and described the 5th chamber, and described method comprises:
Open described second valve and described the 4th valve and close described first valve and described the 3rd valve so that first state to be provided, allow the extremely fluid in described the 4th chamber connection to described second chamber and from described the 3rd chamber thus from described the 3rd chamber, and block between described first chamber and described second chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber
After described first state, open described second valve and close described first valve, the 3rd valve, and the 4th valve so that second state to be provided, allow fluid to be communicated with thus from described the 3rd chamber to described second chamber, and block between described first chamber and described second chamber thus in fact, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber
After described second state, open described second valve and described the 3rd valve and close described first valve and described the 4th valve so that the third state to be provided, allow the extremely fluid in described the 4th chamber connection to described second chamber and from described the 3rd chamber thus from described the 3rd chamber, and block between described first chamber and described second chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber
After the described third state, open described the 3rd valve and close described first valve, second valve, and the 4th valve so that four condition to be provided, allow fluid to be communicated with thus from described the 3rd chamber to described the 4th chamber, and block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber and described the 4th chamber is communicated with fluid between described the 5th chamber, and
After described four condition, open described first valve and described the 3rd valve and close described second valve and described the 4th valve so that the 5th state to be provided, allow from described second chamber to described first chamber thus and the fluid from described the 3rd chamber to described the 4th chamber is communicated with, and block between described second chamber and described the 3rd chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber.
9. method as claimed in claim 8 also comprises:
Before described first state, close described first valve, second valve, the 3rd valve and the 4th valve so that original state to be provided, block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.
10. method as claimed in claim 8 also comprises:
After described the 5th state, close described first valve, second valve, the 3rd valve and the 4th valve so that the 6th state to be provided, block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.
11. method as claimed in claim 8 also comprises:
After described the 5th state, close described second valve and described the 3rd valve and open described first valve and described the 4th valve so that the 6th state to be provided, block between described second chamber and described the 3rd chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber, and allow between described first chamber and described second chamber thus and described the 4th chamber is communicated with fluid between described the 5th chamber.
12. method as claimed in claim 8 also comprises:
After described the 5th state, close described first valve and described the 4th valve and open described second valve and described the 3rd valve, block between described first chamber and described second chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber, and allow between described second chamber and described the 3rd chamber thus and described the 3rd chamber is communicated with fluid between described the 4th chamber.
13. method as claimed in claim 8 also comprises:
Before described first state, close described second valve and described the 3rd valve and open described first valve and described the 4th valve so that original state to be provided, block between described second chamber and described the 3rd chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber, and allow between described first chamber and described second chamber thus and described the 4th chamber is communicated with fluid between described the 5th chamber.
14. method as claimed in claim 8 also comprises:
Before described first state, close described first valve and described the 4th valve and open described second valve and described the 3rd valve so that original state to be provided, block between described first chamber and described second chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber, and allow between described second chamber and described the 3rd chamber thus and described the 3rd chamber is communicated with fluid between described the 4th chamber.
15. method as claimed in claim 8, wherein said first chamber and described the 5th chamber are coupled to same low pressure discharge port.
16. method as claimed in claim 8, wherein said first chamber and described the 5th chamber are coupled to different low pressure discharge port.
17. method as claimed in claim 8, wherein each described valve includes Valve core blade separately, comprises a plurality of flaps separately on the described Valve core blade.
18. method as claimed in claim 17, wherein said first Valve core blade and described second Valve core blade are arranged apart.
19. method as claimed in claim 17, wherein said first Valve core blade is parallel to described second Valve core blade.
20. method as claimed in claim 8 also comprises:
At described first state and described the 5th state during each, the monitoring external power supply;
When during described first state, detecting the interruption of described external power supply, keep described first state; And
When during described the 5th state, detecting the interruption of described external power supply, keep described the 5th state.
21. method as claimed in claim 8 also comprises:
At described first state, second state, the third state, four condition, and the 5th state during each, monitoring external power supply; And
When at described first state, second state, the third state, four condition, and the 5th state when detecting the interruption of described external power supply during any one, close described first valve, second valve, the 3rd valve, and the 4th valve so that default conditions to be provided, block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.
22. method as claimed in claim 8 also comprises:
At described first state, second state, the third state, four condition, and the 5th state during each, monitoring external power supply; And
When at described first state, second state, the third state, four condition, and the 5th state when detecting the interruption of described external power supply during any one, close described second valve and described the 3rd valve and open described first valve and described the 4th valve so that default conditions to be provided, block between described second chamber and described the 3rd chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber, and allow between described first chamber and described second chamber thus and described the 4th chamber is communicated with fluid between described the 5th chamber.
23. method as claimed in claim 8 also comprises:
At described first state, second state, the third state, four condition, and the 5th state during each, monitoring external power supply; And
When at described first state, second state, the third state, four condition, and the 5th state when detecting the interruption of described external power supply during any one, close described first valve and described the 4th valve and open described second valve and described the 3rd valve so that default conditions to be provided, block between described first chamber and described second chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber, and allow between described second chamber and described the 3rd chamber thus and described the 3rd chamber is communicated with fluid between described the 4th chamber.
24. a valve comprises:
Substrate, its have first and second apparent surface, in the hole by described substrate between described first surface and the described second surface, with and on paired input pad;
Removable valve member on the described substrate, wherein said removable valve member is associated with described hole in the described substrate, and wherein said removable valve member is set to open or block described hole in fact in response to the electrical signal that is applied to described paired input pad; And
Surround and support the framework of described substrate at described edges of substrate place, expose the described first surface of described substrate and the core of described second surface by the opening in the described framework thus, and between the edge of described framework and described substrate, provide fluid-tight thus.
25. valve as claimed in claim 24, wherein said removable valve member comprises flexible flap.
26. valve as claimed in claim 24 also comprises:
First conductive lead wire in described framework and second conductive lead wire, described first conductive lead wire and described second conductive lead wire are electrically coupled to described each input pad on the described substrate.
27. valve as claimed in claim 26 wherein exposes the part of described first conductive lead wire and described second conductive lead wire along the outward edge of described framework.
28. valve as claimed in claim 27, the described expose portion of wherein said first conductive lead wire and described second conductive lead wire are oriented on the direction of cardinal principle perpendicular to described substrate.
29. valve as claimed in claim 27, the described expose portion of wherein said first conductive lead wire and described second conductive lead wire exposes by described slot in frames.
30. valve as claimed in claim 26, wherein said first conductive lead wire and described second conductive lead wire lead-in wire are bonded to described each input pad.
31. valve as claimed in claim 24, wherein said framework has the thickness greater than the thickness of described substrate, and wherein said framework comprises that along the recessed ledge of the described opening of described framework, the described edge of wherein said substrate is supported by the female ledge.
32. valve as claimed in claim 31 also comprises:
Flexible gaskets between the described edge of the female ledge and described substrate.
33. valve as claimed in claim 31, the described edge of wherein said substrate is fixed to described packing ring and the female ledge, the part of wherein said framework and the imbricate of described substrate in contrast to the female ledge.
34. valve as claimed in claim 31 wherein utilizes tackiness agent that the described edge of described substrate is fixed to the female ledge.
35. valve as claimed in claim 24 also comprises:
Be positioned on the described framework and with the isolated baffle plate of described substrate, described baffle plate has at least one opening by it.
36. valve as claimed in claim 35, wherein said valve member is between described substrate and described baffle plate.
37. valve as claimed in claim 35, wherein said baffle plate and described substrate define the baffle plate chamber betwixt.
38. valve as claimed in claim 35, wherein said baffle plate and the restriction that fluid flow in series is provided by described a plurality of holes of described substrate.
39. valve as claimed in claim 35, wherein said baffle plate are wedge shape.
40. valve as claimed in claim 39 also comprises:
Be positioned at first conductive lead wire and second conductive lead wire on first edge of described framework, described first conductive lead wire and described second conductive lead wire are electrically coupled to described each input pad on the described substrate, described first edge of the contiguous described framework of the narrower part of wherein said baffle plate, and second edge with respect to described first edge of the contiguous described framework of the wider portion of wherein said baffle plate.
41. valve as claimed in claim 35, wherein said baffle plate, described framework and described substrate define shell, and wherein said removable valve member is accommodated in the described shell.
42. valve as claimed in claim 35 also comprises:
Be positioned at the flexible gaskets on the described framework, make described framework between described flexible gaskets and described baffle plate.
43. valve as claimed in claim 24 also comprises:
Be positioned at the flexible gaskets on the described framework, wherein said substrate is with respect to the recessed described framework of described packing ring, and described flexible gaskets defines opening therein, and described opening has the size of the size that defines greater than the periphery by described substrate.
44. valve as claimed in claim 24, wherein said framework comprises rigid polymeric material.
45. a method that encapsulates Valve core blade, described Valve core blade comprises: substrate, the hole that it has first and second surface and pass through described substrate between described first surface and described second surface; And the removable valve member in the described surface of described substrate, wherein said removable valve member is associated with described hole in the described substrate, and described method comprises:
Form the framework that wherein has opening; And
Described Valve core blade is fixed in the described opening of described framework, expose the described first surface of described substrate and the core of described second surface by the described opening in the described framework thus, and between the edge of described framework and described substrate, provide fluid-tight thus.
46. method as claimed in claim 45, wherein said removable valve member comprises flexible flap.
47. method as claimed in claim 45, the step that wherein forms described framework comprises that being independent of described Valve core blade comes molded described framework, and the step of wherein fixing described Valve core blade is fixed on described Valve core blade in the described opening of described framework after being included in molded finishing.
48. method as claimed in claim 45, wherein said Valve core blade comprise the paired input pad that is positioned on the described substrate, and the step that described framework wherein is set is included in first conductive lead wire and second conductive lead wire are set in the described framework, described method also comprises:
After being fixed on described Valve core blade in the described opening, described first conductive lead wire and described second conductive lead wire are electrically coupled to described each input pad on the described substrate.
49. method as claimed in claim 48 wherein exposes the part of described first conductive lead wire and described second conductive lead wire along the outward edge of described framework.
50. method as claimed in claim 49, the described expose portion of wherein said first conductive lead wire and described second conductive lead wire are oriented on the direction of cardinal principle perpendicular to described substrate.
51. method as claimed in claim 49, the described expose portion of wherein said first conductive lead wire and described second conductive lead wire exposes by described slot in frames.
52. method as claimed in claim 48, wherein the step of described first conductive lead wire of electric coupling and described second conductive lead wire comprises described first conductive lead wire and described second conductive lead wire lead-in wire is bonded to described each input pad.
53. method as claimed in claim 45, wherein said framework has the thickness greater than the thickness of described substrate, and wherein said framework comprises that along the recessed ledge of the described opening of described framework, the described edge of wherein said substrate is supported by the female ledge.
54. method as claimed in claim 53 also comprises:
Before being fixed on described Valve core blade in the described opening, on the female ledge, form flexible gaskets, the step of wherein fixing described Valve core blade comprises that the edge with described substrate is fixed on the described flexible gaskets.
55. method as claimed in claim 54, the step that wherein forms described framework and form described flexible gaskets comprise that utilizing injection for the first time to be used for second material that first material of described framework and injection for the second time be used for described packing ring comes molded described framework and described packing ring.
56. method as claimed in claim 53, the step of wherein fixing described Valve core blade comprises described Valve core blade is arranged on the female ledge, the part distortion that makes described framework then with the edge overlaid of described substrate in contrast to the female ledge, the edge with described substrate is fixed between the described crushed element of the female ledge and described framework thus.
57. method as claimed in claim 53, the step of wherein fixing described Valve core blade are included between the described edge of described substrate and the female ledge tackiness agent are set.
58. method as claimed in claim 45 also comprises:
On described framework baffle plate is set, wherein said baffle plate and described substrate are spaced apart, and wherein said baffle plate has at least one opening by it.
59. method as claimed in claim 58, wherein said baffle plate and the restriction that fluid flow in series is provided by described a plurality of holes of described substrate.
60. method as claimed in claim 58, wherein said baffle plate are wedge shape.
61. method as claimed in claim 60, wherein said framework comprises first conductive lead wire and second conductive lead wire on first edge that is positioned at described framework, described first conductive lead wire and described second conductive lead wire are electrically coupled to described each input pad on the described substrate, described first edge of the contiguous described framework of the narrower part of wherein said baffle plate, and second edge with respect to described first edge of the contiguous described framework of the wider portion of wherein said baffle plate.
62. method as claimed in claim 58, wherein said baffle plate, described framework and described substrate define shell, and wherein said removable valve member is accommodated in the described shell.
63. method as claimed in claim 58 also comprises:
On described framework, form flexible gaskets, make described framework between described flexible gaskets and described baffle plate.
64. method as claimed in claim 45 also comprises:
Before being fixed on described Valve core blade in the described opening, on described framework, form flexible gaskets, described flexible gaskets defines opening therein, and described opening has the size of the size that defines greater than the periphery by described substrate.
65. as the described method of claim 64, the step that wherein forms described framework and form described flexible gaskets comprises that utilizing injection for the first time to be used for second material that first material of described framework and injection for the second time be used for described packing ring comes molded described framework and described packing ring.
66. method as claimed in claim 45, wherein said framework comprises rigid polymeric material.
67. method as claimed in claim 45 also comprises:
Housing is set, and it defines the Valve core blade shell between first chamber and second chamber and described first chamber and described second chamber, and wherein said first chamber and described second chamber and described Valve core blade shell be opening at one end;
After in the described opening that described Valve core blade is fixed on described framework, described framework is inserted described Valve core blade shell; And
After described framework is inserted described Valve core blade shell, matrix is fixed on the described opening end of described housing, described thus first chamber is separated by described Valve core blade with described second chamber.
68. as the described method of claim 67, wherein said housing comprises first port that the fluid connection that enters and/or leave described first chamber is provided, and wherein said matrix provides second port of the fluid connection that enters and/or leave described second chamber.
69. a valve assembly comprises:
Define the main casing in first chamber, second chamber and the 3rd chamber, described main casing also defines first valve shell between described first chamber and described second chamber and second valve shell between described second chamber and described the 3rd chamber;
The first, second, third and the 4th electric housing lead-in wire in described main casing, the wherein part of each that described first and second the electric housing of exposure goes between in described first valve shell, and the part that wherein exposure the described the 3rd and the 4th electric housing goes between in described second valve shell;
First valve in described first valve shell, itself and described first and second electric housing lead-in wire electric coupling, wherein said first valve are set to allow or block described first chamber in fact to be communicated with fluid between described second chamber in response to the electrical signal that provides on described first and second electric housing lead-in wire;
Second valve in described second valve shell, itself and the electric coupling of the described the 3rd and the 4th electric housing lead-in wire, wherein said second valve are set to allow or block described second chamber in fact to be communicated with fluid between described the 3rd chamber in response to the electrical signal that provides on the described the 3rd and the 4th electric housing lead-in wire; And
Be electrically coupled to the controller of the described first, second, third and the 4th electric housing lead-in wire, wherein said controller is set to produce and allows or block between described first chamber and described second chamber in fact and described electrical signal that described second chamber is communicated with fluid between described the 3rd chamber.
70. as the described valve assembly of claim 69, wherein said first valve comprises first flat substrate, has a plurality of holes by described first flat substrate, wherein said second valve comprises second flat substrate, has a plurality of holes by described second flat substrate.
71. as the described valve assembly of claim 70, wherein said first and second flat substrate is essentially parallel to each other.
72. as the described valve assembly of claim 70, wherein said first valve comprises a plurality of its lip-deep flexible flaps that are positioned at, and wherein said flexible flap is set to open or block each hole in fact in response to providing to the described electrical signal of described first and second electric housing lead-in wire.
73., also comprise being arranged at least one filter of described first chamber, second chamber and/or the 3rd chamber as the described valve assembly of claim 69.
74. as the described valve assembly of claim 69, wherein said first valve comprises flat substrate and framework, a plurality of holes are by described substrate, framework edges of substrate around and support described flat substrate, expose the core of described flat substrate thus by the opening in the described framework, and between the edge of described framework and described substrate, fluid-tight is set thus.
75. as the described valve assembly of claim 74, wherein said first valve also comprises the baffle plate that is positioned on the described framework, described thus baffle plate, described framework and described flat substrate define shell, and comprise at least one opening in the wherein said baffle plate.
76. as the described valve assembly of claim 74, wherein said first valve has wedge profile.
77. as the described valve assembly of claim 69, wherein said main casing also defines the 3rd valve shell between the 4th chamber and described the 3rd chamber and described the 4th chamber, described valve assembly also comprises:
The 5th electric housing lead-in wire in described main casing, the part of each during wherein exposure the described second and the 5th electric housing goes between in described the 3rd valve shell; And
The 3rd valve in described the 3rd valve shell, itself and the electric coupling of the described the 5th and second electric housing lead-in wire, wherein said the 3rd valve are set to allow or block described the 3rd chamber in fact to be communicated with fluid between described the 4th chamber in response to the electrical signal that provides on the described the 5th and second electric housing lead-in wire;
Wherein said controller is electrically coupled to the described the 5th electric housing lead-in wire, and wherein said controller is set to produce and allows or block described the 3rd chamber in fact to be communicated with described electrical signal with fluid between described the 4th chamber.
78., also comprise as the described valve assembly of claim 69:
First flexible gaskets of fluid-tight is provided between described first valve and described first valve shell; And
Second flexible gaskets of fluid-tight is provided between described second valve and described second valve shell.
79. a valve assembly comprises:
Define the valve chest in first chamber and second chamber;
Between described first chamber and described second chamber, be arranged in the valve of described housing; Wherein
Described valve comprises having the hole by its flat substrate and the removable valve member in contiguous described hole, and wherein said valve is set to allow or blocks described first chamber in fact be communicated with fluid between described second chamber; And
Be positioned at the filter in described second chamber of described housing.
80. as the described valve assembly of claim 79, wherein said removable valve member comprises flexible flap.
81. as the described valve assembly of claim 79, wherein said valve chest also defines the 3rd chamber, described valve assembly also comprises:
Be arranged in second valve of described housing between described second chamber and described the 3rd chamber, wherein said second valve is set to allow or blocks described second chamber in fact be communicated with fluid between described the 3rd chamber.
82., also comprise as the described valve assembly of claim 81:
Be positioned at second filter in described the 3rd chamber of described housing.
83. as the described valve assembly of claim 81, wherein said valve chest also defines the 4th chamber, described valve assembly also comprises:
Be arranged in the 3rd valve of described housing between described the 3rd chamber and described the 4th chamber, wherein said the 3rd valve is set to allow or blocks described the 3rd chamber in fact be communicated with fluid between described the 4th chamber.
84., also comprise as the described valve assembly of claim 83:
Be positioned at second filter in described the 4th chamber of described housing.
85. as the described valve assembly of claim 83, wherein said valve chest also defines the 5th chamber, described valve assembly also comprises:
Be arranged in the 4th valve of described housing between described the 4th chamber and described the 5th chamber, wherein said the 4th valve is set to allow or blocks described the 4th chamber in fact be communicated with fluid between described the 5th chamber.
86., also comprise as the described valve assembly of claim 85:
Be positioned at second filter in described the 4th chamber.
87., also comprise as the described valve assembly of claim 86:
Be positioned at the 3rd filter in described the 3rd chamber.
88. as the described valve assembly of claim 85, wherein said the 3rd chamber is set to be coupled with the high-pressure liquid supply, wherein said second chamber and described the 4th chamber are set to be coupled to each port of cylinder, and wherein said first chamber and described the 5th chamber are set to and low pressure discharging coupling.
89. as the described valve assembly of claim 79, wherein said valve comprises electrostatically actuated valve.
90. as the described valve assembly of claim 89, wherein said electrostatically actuated valve comprises having the hole by its substrate and the lip-deep valve member that is positioned at described first chamber of facing contiguous described hole of described substrate.
91. as the described valve assembly of claim 79, wherein said housing comprises main part and base portion, described main part has to the opening in described first chamber and described second chamber, and described base portion is fixed to described main part to seal the described opening of described main part to described first chamber and described second chamber.
92. the method for an operating valve assembly, described valve assembly comprises the housing that has with cavity of resorption: be coupled to first chamber of low pressure discharge port, second chamber that is coupled to first actuator port, the 3rd chamber that is coupled to high pressure supply port, the 5th chamber that is coupled to the 4th chamber of second actuator port and is coupled to the low pressure discharge port; Described valve assembly also comprises the 3rd valve between second valve between first valve between described first chamber and described second chamber, described second chamber and described the 3rd chamber, described the 3rd chamber and described the 4th chamber and the 4th valve between described the 4th chamber and described the 5th chamber, and described method comprises:
Open electrical signal and first state is set by applying to described second valve and described the 4th valve and by applying shutdown signal to described first valve and described the 3rd valve, allow from described the 3rd chamber to described second chamber thus and the fluid from described the 3rd chamber to described the 4th chamber is communicated with, and block between described first chamber and described second chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber; And
To described first valve and described the 3rd valve and by applying shutdown signal to described second valve and the 4th valve second state is set by applying opening signal, allow from described second chamber to described first chamber thus and the fluid from described the 3rd chamber to described the 4th chamber is communicated with, and block between described second chamber and described the 3rd chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber.
93., also comprise as the described method of claim 92:
Make and to block between described first chamber and described second chamber in fact and described second chamber is communicated with fluid between described the 3rd chamber by closing described at least first valve and described second valve, or make and to block between described second chamber and described the 3rd chamber in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber by closing described at least second valve and described the 3rd valve, or make and to block between described the 3rd chamber and described the 4th chamber in fact and described the 4th chamber is communicated with fluid between described the 5th chamber by closing described at least the 3rd valve and described the 4th valve, or make to allow between described first chamber and described second chamber and described second chamber is communicated with fluid between described the 3rd chamber by opening described at least first valve and described second valve, or make to allow between described second chamber and described the 3rd chamber and described the 3rd chamber is communicated with fluid between described the 4th chamber by opening described at least second valve and described the 3rd valve, or make to allow between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber by opening described at least the 3rd valve and described the 4th valve, the third state is set.
94., also comprise as the described method of claim 92:
Make and to block between described first chamber and described second chamber in fact and described the 4th chamber is communicated with fluid between described the 5th chamber by closing described at least first valve and described the 4th valve, or make and to block between described second chamber and described the 3rd chamber in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber by closing described at least second valve and described the 3rd valve, the third state is set.
95. as the described method of claim 94, the described third state wherein is set to be comprised and opens described second valve and close described first valve, the 3rd valve, and the 4th valve, allow thus from described the 3rd chamber to be communicated with to the fluid in described second chamber, and block between described first chamber and described second chamber thus in fact, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.
96. as the described method of claim 94, the described third state wherein is set to be comprised and opens described second valve and described the 3rd valve and close described first valve and the 4th valve, allow from described the 3rd chamber to described second chamber thus and the fluid from described the 3rd chamber to described the 4th chamber is communicated with, and block between described first chamber and described second chamber thus in fact and described the 4th chamber is communicated with fluid between described the 5th chamber.
97. as the described method of claim 94, the described third state wherein is set to be comprised and opens described the 3rd valve and close described first valve, second valve, and the 4th valve, allow thus from described the 3rd chamber to be communicated with to the fluid in described the 4th chamber, and block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.
98. as the described method of claim 94, the described third state wherein is set to be comprised and opens described first valve and described the 4th valve and close described first valve and described the 3rd valve, allow from described second chamber to described first chamber thus and the fluid from described the 4th chamber to described the 5th chamber is communicated with, and block between described second chamber and described the 3rd chamber thus in fact and described the 3rd chamber is communicated with fluid between described the 4th chamber.
99. as the described method of claim 94, the described third state wherein is set comprises and close described first valve, second valve, the 3rd valve and the 4th valve, block between described first chamber and described second chamber thus in fact, between described second chamber and described the 3rd chamber, between described the 3rd chamber and described the 4th chamber and described the 4th chamber is communicated with fluid between described the 5th chamber.
100., the described third state wherein is set comprises that the described third state is set in time in the intermediateness that is provided with between described first state and described second state as the described method of claim 94.
101., the described third state wherein is set comprises that the described third state is set to be positioned in time the original state that is provided with before described first state and described second state as the described method of claim 94.
102., the described third state wherein is set comprises that the described third state is set to be positioned in time the end-state that is provided with after described first state and described second state as the described method of claim 94.
103., wherein prior to described second state is set described first state is set in time as the described method of claim 94.
104., wherein prior to described first state is set described second state is set in time as the described method of claim 94.
105. as the described method of claim 92, wherein each described valve all comprises electrostatically actuated valve.
106. as the described method of claim 92, wherein said valve assembly comprises the coupling to external power supply, described method also comprises:
In being set, described first and second state in each, monitors described external power supply;
When described first state is set, detecting the interruption of described external power supply, keep described first state at the intercourse of described external power supply; And
When described second state is set, detecting the interruption of described external power supply, keep described second state at the intercourse of described external power supply.
107. as the described method of claim 106, wherein said valve assembly also comprises the coupling to standby power supply, wherein the step of keeping described first state at the intercourse of described external power supply comprises and utilizes described standby power supply to keep described first state; And wherein the step of keeping described second state at the intercourse of described external power supply comprises and utilizes described standby power supply to keep described second state.
108. as the described method of claim 107, wherein standby power supply comprises storage battery.
109. a valve assembly comprises:
Define first chamber, second chamber, and the valve chest in the 3rd chamber;
First valve between described first chamber and described second chamber, described first valve comprise at the bottom of first valve bush, and wherein said first valve is communicated with fluid between described second chamber to be set to allow or to block described first chamber in fact; And
Second valve between described second chamber and described the 3rd chamber, described second valve comprises at the bottom of second valve bush, wherein said second valve is set to allow or blocks described second chamber in fact be communicated with fluid between described the 3rd chamber, and wherein said first substrate separates with described second substrate.
110. as the described valve assembly of claim 109, wherein said first substrate and described second substrate are not parallel.
111. as the described valve assembly of claim 109, wherein said first valve and described second valve comprise first and second electrostatically actuated valve.
112. as the described valve assembly of claim 109, wherein said first substrate comprises first valve member by its first hole and contiguous described first hole, wherein said first valve member is set to open and close described first hole in response to first electrical signal that is applied to it, and wherein said second substrate comprises that wherein said second valve member is set to open and close described second hole in response to second electrical signal that is applied to it by second valve member in its second hole and contiguous described second hole.
113. as the described valve assembly of claim 112, wherein said first valve member and described second valve member comprise first flexible flap and second flexible flap separately.
114., also comprise as the described valve assembly of claim 109:
Baffle plate in described first valve and described first and second chamber between one, wherein said baffle plate is defined in the baffle plate chamber between described baffle plate and the described valve, and wherein said baffle plate comprises the hole by it.
115., also be included at least one interior filter in described first chamber and described second chamber as the described valve assembly of claim 109.
116. as the described valve assembly of claim 109, wherein said valve chest also defines the 4th chamber and the 5th chamber, described valve assembly also comprises:
The 3rd valve between described the 3rd chamber and described the 4th chamber, described the 3rd valve comprise at the bottom of the 3rd valve bush, and wherein said the 3rd valve is set to allow or blocks described the 3rd chamber in fact be communicated with fluid between described the 4th chamber; And
The 4th valve between described the 4th chamber and described the 5th chamber, described the 4th valve comprises at the bottom of the 4th valve bush, wherein said the 4th valve is set to allow or blocks described the 4th chamber in fact be communicated with fluid between described the 5th chamber, and the wherein said first, second, third and the 4th substrate separates.
117., also comprise as the described valve assembly of claim 109:
Be coupled in described first valve and described second valve controller of each, wherein said controller is set to control opening and closing described first valve and described second valve.
118. as the described valve assembly of claim 117, the coupling of first electrical signal wherein is set between described controller and described first valve, the coupling of second electrical signal wherein is set, and wherein said first coupling is inequality with described second coupling between described controller and described second valve.
119., also comprise as the described valve assembly of claim 109:
Pipe, wherein said valve chest is mounted to first end of described pipe, the internal fluid communication of described thus second valve pocket and described pipe;
Be arranged in the piston of described pipe, described area within a jurisdiction fixes on the chamber between described piston and the described valve chest; And
End cap on second end of described pipe.
120. as the described valve assembly of claim 119, wherein said valve chest provides the end cap of described first end of the described pipe of sealing.
121. as the described valve assembly of claim 119, wherein said valve chest comprises the rigid valve housing, wherein said first valve and described second valve are in the described rigid valve housing, and wherein said rigid valve housing directly is mounted to described pipe.
122. a method that forms valve assembly, described method comprises:
Form housing, described housing defines first chamber, second chamber and the 3rd chamber, described first chamber is separated by first valve shell that is used for Valve core blade with described second chamber, and described second chamber is separated by second valve shell that is used for Valve core blade with described the 3rd chamber, and wherein said chamber and valve shell are at the open end opening of described housing;
After forming described housing, Valve core blade is inserted in the described valve shell in one, the removable valve member that wherein said Valve core blade comprises the substrate that wherein has the hole and is configured to open and close described valve opening, the relative exposed at both sides of the wherein said Valve core blade chamber to the relative both sides that are positioned at described valve shell; And
After inserting described Valve core blade, matrix is fixed to the described opening end of described housing, close described chamber and described valve shell thus.
123. as the described method of claim 122, wherein said removable valve member comprises flexible flap.
124. as the described method of claim 122, wherein said housing also defines the 4th chamber and the 5th chamber, described the 3rd chamber is separated by the 3rd valve shell that is used for Valve core blade with described the 4th chamber, and described the 4th chamber is separated by the 4th valve shell that is used for Valve core blade with described the 5th chamber.
125. as the described method of claim 124, the step of wherein inserting Valve core blade comprises inserts described first valve shell with first Valve core blade, second Valve core blade is inserted described second valve shell, the 3rd Valve core blade is inserted described the 3rd valve shell, and the 4th Valve core blade is inserted described the 4th valve shell.
126., also comprise as the described method of claim 124:
Before fixing described matrix, sealing bolt is inserted among another person of described valve shell, the chamber on the opposition side of described bolt is sealed each other thus separates.
127. as the described method of claim 124, wherein said housing comprises by described housing, and first output port that fluid is communicated with and second output port that provides fluid to be communicated with from described the 4th chamber by described housing are provided from described second chamber, and wherein said matrix comprises by described matrix to be provided first discharge port that fluid is communicated with, provide supply port that fluid is communicated with and second discharge port that provides fluid to be communicated with from described the 5th chamber by described matrix from described the 3rd chamber by described matrix from described first chamber.
128. as the described method of claim 122, wherein said housing comprises conductive lead wire wherein, described conductive lead wire provides the electrical couplings of the outside from described Valve core blade to described housing.
129. as the described method of claim 122, the step that wherein forms described housing comprises molded described housing and described lead-in wire is set as plug-in unit in molded described housing.
130. the method for an operating valve assembly, described valve assembly comprises the housing that has with cavity of resorption: be coupled to first chamber of low pressure discharge port, the 3rd chamber that is coupled to second chamber of actuator port and is coupled to high pressure supply port, described valve assembly also comprises first valve between described first chamber and described second chamber and second valve between described second chamber and described the 3rd chamber, and described method comprises:
First state is set, allows thus from described second chamber to be communicated with, and block described second chamber thus in fact and be communicated with fluid between described the 3rd chamber to the fluid in described first chamber;
Second state is set, allows thus from described second chamber to be communicated with, and block described first chamber thus in fact and be communicated with fluid between described second chamber to the fluid in described the 3rd chamber;
Described first state and described second state are set each in, the monitoring external power supply;
When described first state is set, detecting the interruption of described external power supply, keep described first state at the intercourse of described external power supply; And
When described second state is set, detecting the interruption of described external power supply, keep described second state at the intercourse of described external power supply.
131. as the described method of claim 130, wherein the step of keeping described first state at the intercourse of described external power supply comprises and utilizes standby power supply to keep described first state, and the step of wherein keeping described second state at the intercourse of described external power supply comprises and utilizes described standby power supply to keep described second state.
132. as the described method of claim 131, wherein said standby power supply comprises storage battery.
133. as the described method of claim 120, wherein said valve assembly also comprises the 4th chamber that is coupled to second actuator port, be coupled to the 5th chamber of low pressure discharge port, the 3rd valve between described the 3rd chamber and described the 4th chamber, the step that described first state wherein is set comprises that also the fluid of permission from described the 3rd chamber to described the 4th chamber is communicated with, and block described the 4th chamber in fact and be communicated with fluid between described the 5th chamber, and the step that described second state wherein is set comprises that also permission is communicated with from described the 4th chamber to the fluid in described the 5th chamber, and blocks described the 3rd chamber in fact and be communicated with fluid between described the 4th chamber.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US59066904P | 2004-07-23 | 2004-07-23 | |
| US60/590,483 | 2004-07-23 | ||
| US60/590,669 | 2004-07-23 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN101002029A true CN101002029A (en) | 2007-07-18 |
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Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200580024574 Pending CN101002029A (en) | 2004-07-23 | 2005-07-22 | Microvalve assemblies and related methods |
| CN 200580024642 Pending CN101002040A (en) | 2004-07-23 | 2005-07-22 | Methods of operating microvalve assemblies and related structures and related devices |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 200580024642 Pending CN101002040A (en) | 2004-07-23 | 2005-07-22 | Methods of operating microvalve assemblies and related structures and related devices |
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| Country | Link |
|---|---|
| CN (2) | CN101002029A (en) |
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| CN103456663A (en) * | 2012-05-31 | 2013-12-18 | 细美事有限公司 | Substrate treating apparatus and substrate treating method |
| CN104487748A (en) * | 2012-08-09 | 2015-04-01 | 浙江盾安人工环境股份有限公司 | Microvalve device and fluid flow control method |
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| JP6541574B2 (en) * | 2012-12-05 | 2019-07-10 | インテリジェント エナジー リミテッドＩｎｔｅｌｌｉｇｅｎｔ Ｅｎｅｒｇｙ Ｌｉｍｉｔｅｄ | Micro valve |
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| CN104487748A (en) * | 2012-08-09 | 2015-04-01 | 浙江盾安人工环境股份有限公司 | Microvalve device and fluid flow control method |
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| CN110005842B (en) * | 2014-06-20 | 2021-01-12 | 阿斯科公司 | Clamping block, valve manifold block and manifold block for valve manifold assembly |
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| CN108475938A (en) * | 2015-12-23 | 2018-08-31 | 瑞克锐斯株式会社 | Self-powered type element and flexible apparatus including this |
| CN110285039A (en) * | 2019-08-01 | 2019-09-27 | 黄石东贝电器股份有限公司 | A kind of exhaust valve plate and its refrigeration compressor with diversion function |
| CN112452243A (en) * | 2019-09-09 | 2021-03-09 | 德尔格制造股份两合公司 | Dosing device and method for adjusting the dosing of a fluid |
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| Publication number | Publication date |
|---|---|
| CN101002040A (en) | 2007-07-18 |
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Open date: 20070718 |