CN100582678C - Off-axis rotational symmetry type laser trigone displacement transducer - Google Patents
Off-axis rotational symmetry type laser trigone displacement transducer Download PDFInfo
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- CN100582678C CN100582678C CN200810070652A CN200810070652A CN100582678C CN 100582678 C CN100582678 C CN 100582678C CN 200810070652 A CN200810070652 A CN 200810070652A CN 200810070652 A CN200810070652 A CN 200810070652A CN 100582678 C CN100582678 C CN 100582678C
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- axle
- corner cube
- rotational symmetric
- laser
- symmetry
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Abstract
A off-axis rotary symmetry type laser triangle displacement sensor of the invention relates to a measuring instrument characterized in adopting an optical method and can obviously reduce the cost of a sensor as well as measure objects with free-form surfaces like a slant surface, a step index surface, etc. The invention is provided with a two-dimensional picture sensor, an imaging lens, a reflector, a semiconductor laser, an off-axis rotary symmetry pyramid prism and a circular entrance pupil, wherein, the pyramid prism is arranged on an output shaft of the laser, and laser beams go through the a rotary symmetry shaft of the pyramid prism; the reflector is arranged at the intersection of the laser beams of a laser and the rotary symmetry shaft of the off-axis rotary symmetry pyramid prism, and reflected laser beams are superposed with the rotary symmetry shaft of the pyramid prism; the pyramid prism is arranged below the reflector; the circular entrance pupil is arranged below the pyramid prism and is superposed with the rotary symmetry shaft of the pyramid prism; the imaging lens is arranged above the reflector; the two-dimensional picture sensor is arranged above the imaging lens.
Description
Technical field
The present invention relates to a kind of is the metering outfit of feature to adopt optical means, especially relates to a kind of laser triangulation displacement transducer that has from axle rotation symmetry characteristic.
Background technology
Because advantages such as the laser triangulation displacement transducer has simple in structure, noncontact, precision is higher, measuring speed is fast, can handle in real time, so be widely used in aspects such as various geometric parameter detections, measuring surface form, three-dimensional modeling and reverse-engineering.Traditional laser triangulation sensor is in actual applications because the inclination on measured workpiece surface, or the light path that step edge such as hole, step etc. can cause when measuring blocks, thereby causes sensor failure, has a strong impact on measurement effect.
The laser triangulation displacement transducer of rotational symmetry has also appearred having in recent years, in order to address the above problem, but these methods have been used the two-dimensional annular PSD sensor of specialized designs processing, or the annular reflection of high order aspheric surface and refractive surface, processing difficulties causes product price very expensive.
Publication number is that the Chinese invention patent application of CN1332358 discloses a kind of trigonometric laser measuirng head, and it is to be made of three or four semiconductor lasers, lens, CCD receiver, plane mirrors, is provided with polaroid between lens and the testee.This gauge head can be measured the surface at strong reflection free form surface body form and big pitch angle, and has reduced the cost of gauge head to a certain extent, can also provide the surface normal direction at place, measured point simultaneously.
Publication number is that the Chinese utility application of CN2653435 discloses a kind of collapsible laser triangulation device, this device comprises at least one plane mirror, these catoptrons all are arranged in picture side's light path of imaging len, and the normal parallel of its minute surface is in the determined plane of laser emitting light beam and imaging len center.This utility model is according to when the situation of high optical magnification, the problem that image distance is very long with picture side's light path of the folding imaging len of one or several plane mirrors, thereby has significantly reduced instrument size, simultaneously can increase optical magnification again, obtain high position resolution.
Publication number is that the Chinese invention patent application of CN1357748 discloses a kind of optoelectronic detector of angular displacement sensor, adopt polygon mirror as angle reference, laser aiming position sensing, high-speed electrooptical device are as receiver, and computer data acquisition is handled and implemented and shows.Form by angular displacement sensor to be measured, polygon mirror, LASER Light Source, photelectric receiver, Computer Processing and display system.
Summary of the invention
The purpose of this invention is to provide and a kind ofly can significantly reduce the sensor cost, can measure comprise tilting and free form surface object such as step surface rotate symmetric form laser triangulation displacement transducer from axle.
The present invention is provided with two-dimensional image sensor, imaging lens, catoptron, semiconductor laser, from rotational symmetric prism of corner cube of axle and annular entrance pupil.
The semiconductor laser level is installed, and is located at from the rotational symmetric prism of corner cube of axle on the laser output shaft of semiconductor laser, and the laser beam that semiconductor laser sends is through the rotation axes of symmetry from the rotational symmetric prism of corner cube of axle; Catoptron is located at the laser beam of semiconductor laser and from the intersection point place of the rotation axes of symmetry of the rotational symmetric prism of corner cube of axle, and the reflection lasering beam of catoptron overlaps with rotation axes of symmetry from the rotational symmetric prism of corner cube of axle; Be located at the catoptron below from the rotational symmetric prism of corner cube of axle; The annular entrance pupil is located at from the rotational symmetric prism of corner cube of axle below, and annular entrance pupil overlaps with rotation axes of symmetry from the rotational symmetric prism of corner cube of axle, and imaging lens is located at above the catoptron, and two-dimensional image sensor is located at above the imaging lens.
Comprise 4 optical surfaces from the rotational symmetric prism of corner cube of axle, wherein 2 are the taper reflecting surface, and 1 is the plane, and 1 is the taper transmission plane.The cone angle design of 2 taper reflectings surface makes that measuring light on two taper reflectings surface total reflection takes place.
Two-dimensional image sensor can be selected CCD two-dimensional image sensor or CMOS two-dimensional image sensor for use.
Compared with prior art, the present invention has following outstanding advantage:
1) owing to introduced annular entrance pupil and from the rotational symmetric prism of corner cube of axle, therefore incoming laser beam at the scattered light on the testee by annular entrance pupil with after the rotational symmetric prism of corner cube internal reflection of axle, be imaged as an annulus by imaging lens on two-dimensional image sensor, the displacement of testee shows as the variation of annular radii.
2) owing to introduced annular entrance pupil and from the rotational symmetric prism of corner cube of axle, make it be equivalent to a series of conventional laser three angular displacement sensors that distribute around common incident laser symmetrical, therefore when there is different vergence directions on the testee surface, can obtain measured signal.
3) comprise two taper reflectings surface from the rotational symmetric prism of corner cube of axle, because the cone angle design of two taper reflectings surface makes that measuring light on two taper reflectings surface total reflection takes place, and therefore need not described prism of corner cube plated film.
4) because entrance pupil is from the axle annulus, the incident luminous point is imaged as an annulus on imageing sensor, therefore when the edge in step, groove or the hole on testee surface causes that the part light path is blocked, the imaging annulus can excalation, fails but can not cause measuring.
5) because whole optical path is rotational symmetric from axle, the error that measured surface tilts to bring is cancelled out each other to a great extent, therefore can improve measuring accuracy.
6), therefore significantly reduced the cost of sensor owing to using annular entrance pupil, replacing existing lens ring, Perimeter Truss Reflector or ring-shaped P SD sensor from rotational symmetric prism of corner cube of axle and common imaging lens.
Description of drawings
Fig. 1 is that the structure of the embodiment of the invention is formed synoptic diagram (side-looking).
Fig. 2 be the embodiment of the invention from the rotational symmetric prism of corner cube structural representation of axle.
Fig. 3 is the internal reflection and the equivalent light path thereof from the rotational symmetric prism of corner cube of axle of the embodiment of the invention.
Fig. 4 is to use ray-tracing software the embodiment of the invention to be carried out the side view of emulation.
Embodiment
Referring to Fig. 1, the present invention is provided with two-dimensional image sensor (CCD or CMOS) 1, imaging lens 2, catoptron 3, semiconductor laser 4, from rotational symmetric prism of corner cube 5 of axle and annular entrance pupil 6.Semiconductor laser 4 levels are installed, the laser beam that semiconductor laser 4 sends is through the rotation axes of symmetry from the rotational symmetric prism of corner cube 5 of axle, catoptron 3 is located at the intersection point place of laser beam and rotation axes of symmetry, the reflection lasering beam of catoptron overlaps with rotation axes of symmetry from the rotational symmetric prism of corner cube 5 of axle, is located at catoptron 3 belows from the rotational symmetric prism of corner cube 5 of axle; Annular entrance pupil 6 is located at from the rotational symmetric prism of corner cube of axle 5 belows, and annular entrance pupil 6 overlaps with rotation axes of symmetry from the rotational symmetric prism of corner cube 5 of axle, and imaging lens 2 is located at catoptron 3 tops, and two-dimensional image sensor 1 is located at imaging lens 2 tops.Above-mentioned structure form the optical axis that must guarantee imaging lens 2, from the rotation axes of symmetry of the rotation axes of symmetry of the rotational symmetric prism of corner cube 5 of axle, annular entrance pupil 6 all will with catoptron 3 laser light reflected Shu Chonghe.Semiconductor laser 4 can adjusting angle and position, and its installation accuracy is guaranteed by mechanical system.Contact between all parts and their position relation are all determined by the travel path of laser beam.
In Fig. 1, the laser beam that semiconductor laser 4 sends is after collimation focuses on, project on the testee 7 via small reflector 3, scattered light enters from the rotational symmetric prism of corner cube 5 of axle by annular entrance pupil 6, this part light is measuring light, and measuring light is behind two secondary reflections of described prism of corner cube inside, by imaging lens 2 imaging on two-dimensional image sensor 1, since whole optical path from the axle rotational symmetry, this looks like is an annulus.θ with
The angle is the incident chief ray in the incident angle on rotational symmetric prism of corner cube 5 inner two reflectings surface of axle, and these two angles should be greater than the cirtical angle of total reflection.
Fig. 2 is described from the rotational symmetric prism of corner cube of axle, the selection of its each cone angle such as γ, η and λ should make incident measure the incident angle of light greater than the cirtical angle of total reflection, thereby guarantee that incident ray on two conical surfaces total reflection takes place, do not need prism of corner cube plating reflectance coating.
Fig. 3 is described internal reflection and equivalent light path thereof from the rotational symmetric prism of corner cube of axle.Since two secondary reflections of prism of corner cube, the laser facula X on the testee
0To be imaged in X
0" locate, ohject displacement cause hot spot move X
1-X
0-X
2To show as X
1" X
0" X
2", thereby on two-dimensional image sensor, obtain the variation of annular radii.α among Fig. 3 is the angle measurement in the conventional laser trigonometry.O is the photocentre of imaging lens 2 among the figure, θ with
The angle is referring to Fig. 1, X
1'-X
0'-X
2' be that actual the moving through the resulting image drift of first reflecting surface imaging of prism of corner cube 5 of hot spot moved.
Fig. 4 uses the ray-tracing software instrument that the present invention has been carried out emulation, when measured object is subjected to displacement, by ray tracing, can obtain the annulus of different radii on two-dimensional image sensor.
Claims (2)
1. from axle rotation symmetric form laser triangulation displacement transducer, it is characterized in that being provided with two-dimensional image sensor, imaging lens, catoptron, semiconductor laser, from rotational symmetric prism of corner cube of axle and annular entrance pupil;
The semiconductor laser level is installed, and is vertical with the laser output shaft of semiconductor laser from the rotation axes of symmetry of the rotational symmetric prism of corner cube of axle, and the laser beam that semiconductor laser sends is through the rotation axes of symmetry from the rotational symmetric prism of corner cube of axle; Catoptron is located at the laser beam of semiconductor laser and from the intersection point place of the rotation axes of symmetry of the rotational symmetric prism of corner cube of axle, and the reflection lasering beam of catoptron overlaps with rotation axes of symmetry from the rotational symmetric prism of corner cube of axle; Be located at the catoptron below from the rotational symmetric prism of corner cube of axle, comprise 4 optical surfaces from the rotational symmetric prism of corner cube of axle, wherein 2 are the taper reflecting surface, 1 is the plane, 1 is the taper transmission plane, the cone angle design of 2 taper reflectings surface makes that measuring light on two taper reflectings surface total reflection takes place, the annular entrance pupil is located at from the rotational symmetric prism of corner cube of axle below, the annular entrance pupil overlaps with rotation axes of symmetry from the rotational symmetric prism of corner cube of axle, imaging lens is located at the catoptron top, two-dimensional image sensor is located at imaging lens top, and the optical axis of imaging lens overlaps with rotation axes of symmetry from the rotational symmetric prism of corner cube of axle.
2. as claimed in claim 1 from axle rotation symmetric form laser triangulation displacement transducer, it is characterized in that two-dimensional image sensor is CCD two-dimensional image sensor or CMOS two-dimensional image sensor.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810070652A CN100582678C (en) | 2008-02-20 | 2008-02-20 | Off-axis rotational symmetry type laser trigone displacement transducer |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN200810070652A CN100582678C (en) | 2008-02-20 | 2008-02-20 | Off-axis rotational symmetry type laser trigone displacement transducer |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN101231181A CN101231181A (en) | 2008-07-30 |
| CN100582678C true CN100582678C (en) | 2010-01-20 |
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| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN200810070652A Expired - Fee Related CN100582678C (en) | 2008-02-20 | 2008-02-20 | Off-axis rotational symmetry type laser trigone displacement transducer |
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102353684B (en) * | 2011-06-23 | 2013-10-30 | 南京林业大学 | Method for acquiring laser meat image by double-laser triangle method |
| CN102829953B (en) | 2012-09-14 | 2015-03-18 | 爱佩仪光电技术（深圳）有限公司 | Method for rapidly and comprehensively detecting lens actuator |
| CN110360946A (en) * | 2019-07-24 | 2019-10-22 | 华中科技大学 | A kind of device and method measuring Object Depth |
| CN114515934B (en) * | 2022-04-20 | 2022-07-12 | 大汉科技股份有限公司 | Tower crane standard festival welding position frock |
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2008
- 2008-02-20 CN CN200810070652A patent/CN100582678C/en not_active Expired - Fee Related
Non-Patent Citations (8)
| Title |
|---|
| New compact rotationally symmetric triangulation sensor withlow-cost plastic optics. Johannes Eckstein,Gao Jun,Peter Ott,Wang lei,Wang Xiaojia.Proc.of SPIE,Vol.6585 . 2007 |
| New compact rotationally symmetric triangulation sensor withlow-cost plastic optics.Johannes Eckstein,Gao Jun,Peter Ott,Wang lei,Wang Xiaojia.Proc.of SPIE,Vol.6585. 2007 * |
| Rotationally symmetric triangulation sensorwithintegratedobject imaging using only one 2D detector. Johannes Eckstein etc.Proc.of SPIE,Vol.6189 . 2006 |
| Rotationally symmetric triangulation sensorwithintegratedobject imaging using only one 2D detector. Johannes Eckstein etc.Proc.of SPIE,Vol.6189 . 2006 * |
| 基于旋转对称三角测量视觉传感器的高分辨率三维信息获取技术研究. 王磊.中国博士学位论文全文数据库电子期刊，第4期. 2007 |
| 基于旋转对称三角测量视觉传感器的高分辨率三维信息获取技术研究. 王磊.中国博士学位论文全文数据库电子期刊，第4期. 2007 * |
| 旋转对称三角传感器智能信号处理系统研究. 王晓嘉.中国博士学位论文全文数据库电子期刊，第4期. 2007 |
| 旋转对称三角传感器智能信号处理系统研究. 王晓嘉.中国博士学位论文全文数据库电子期刊，第4期. 2007 * |
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| Publication number | Publication date |
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| CN101231181A (en) | 2008-07-30 |
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