CN100458243C - Magnetofluid seal driving device for vacuum equipment driving shaft - Google Patents
Magnetofluid seal driving device for vacuum equipment driving shaft Download PDFInfo
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- CN100458243C CN100458243C CNB2007100683821A CN200710068382A CN100458243C CN 100458243 C CN100458243 C CN 100458243C CN B2007100683821 A CNB2007100683821 A CN B2007100683821A CN 200710068382 A CN200710068382 A CN 200710068382A CN 100458243 C CN100458243 C CN 100458243C
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- transmission shaft
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Abstract
A magnetofluid seal driving device for vacuum equipment driving shaft includes a housing and a drive shaft which is connected to the housing by two bearings. A magnet core assembly is mounted in the housing and encloses on the drive shaft. The right end of the housing is mounted with an end cover. The drive shaft has a left end passing a vacuum can and connected to the input shaft of the measured instruments device and a right end connected to a power device and the output shaft of a decelerate device. Sensors are disposed on the shaft segment of the drive shaft in the can housing of the vacuum can and a heat sink chamber. The invention provides a magnetofluid seal driving device for vacuum equipment driving shaft which adopts common sensor, and is stable in detection, good in reliability and high in detection accuracy.
Description
(1) technical field
The present invention relates to the magnetic fluid seal member in the sealing component, especially a kind of magnetofluid seal driving device for vacuum equipment driving shaft.
(2) background technique
At present, in order to detect the Operational Limits of under vacuum ultra-low temperature surroundings instrument or equipment, generally adopt two kinds of methods: a kind of is that instrument or equipment are put into heat sink vacuum tank with test system, directly tests under the vacuum ultra-low temperature surroundings; Another kind is that tested instrument or equipment are put into vacuum tank, power equipment and sensor are placed on outside the jar, by the magnet fluid sealing transmission device both are coupled together, tested instrument or equipment under the vacuum ultra-low temperature surroundings in power being imported into jar by the magnet fluid sealing transmission shaft by the outer power equipment of jar, sensor then is arranged on jar outer transmission shaft, realize the detection of each parameter, a kind of method in back is the method that often adopt related domain.
Two kinds of methods cut both ways.Preceding a kind of method, because power, sensor, tested instrument and equipment are all in jar, connect compactness, the additional friction loss is little, so error is little, precision is high, but shortcoming is sensor and power equipment and speed reducer all works under the vacuum ultra-low temperature surroundings, to sensor and power equipment and speed reducer requirement raising greatly, thereby cause cost to rise significantly, more trouble is sensor and power equipment reliability decrease, shorten working life greatly, and artificial being difficult to intervened in the test process.Though a kind of method in back all shifts out sensor, power equipment and speed reducer outside the jar, work at normal temperatures and pressures, advantage is that sensor, power equipment and speed reducer can adopt common sensor, power equipment and the speed reducer that satisfies precision, greatly reduce cost, but because the surface friction drag of magnet fluid sealing transmission device own is big, and unstable, therefore influence testing precision greatly, make testing result not reach required required precision.
(3) summary of the invention
In order to overcome outside sensor is positioned at vacuum tank, working of existing magnet fluid sealing transmission device, adopt common sensor, detect instability, poor reliability, deficiency that testing precision is low, the invention provides and a kind ofly adopt common sensor, detect stablize, good reliability, magnetofluid seal driving device for vacuum equipment driving shaft that testing precision is high.
The technical solution adopted for the present invention to solve the technical problems is:
A kind of magnetofluid seal driving device for vacuum equipment driving shaft, comprise casing, transmission shaft, described transmission shaft is connected with casing by two bearings, core assembly is installed in the described casing, described core assembly is sleeved on the transmission shaft, described casing right-hand member is installed end cap, described transmission shaft comprises the right-hand member that passes vacuum tank and the left end that is connected with tested instrument and equipment input shaft, is connected with power equipment, reduction unit output shaft, is positioned at described transmission shaft on vacuum tank tank shell and heat sink 's the shaft part to be provided with sensor.
Further, described transmission shaft inside is provided with through hole, and transmission shaft has threading hole between sensor and through hole, and the signal end of described sensor connects lead, and described lead passes described threading hole, through hole, and described through hole right-hand member is provided with package blocks.
Further again, described transmission shaft right-hand member is provided with the slip ring that is separated by isolation layer, and described lead connects slip ring.Connect carbon brush on the slip ring, be applicable to rotary magnetic fluid-tight transmission occasion.
Further, have wireless launcher on the described sensor in order to testing signal is sent.
Arrange in order to detect the additional sensor of frictional loss at the right-hand member of transmission shaft.Can the frictional loss of magnet fluid sealing transmission device be detected, be convenient to control.
Described core assembly comprises annular magnetic pole, permanent magnet, and permanent magnet is between two blocks of ring magnets, and the internal surface of annular magnetic pole is provided with utmost point mark of mouth groove, is provided with the sealing magnetic fluid between the micro-gap of utmost point mark of mouth groove and transmission shaft.
Be provided with first O-ring seals between casing and the annular magnetic pole, install in the left side of casing in order to second O-ring seals of vacuum tank sealing, between two bearings in the casing and annular magnetic pole magnetic shield is installed, casing is provided with magnetic fluid can hole, the installation sealing screw can hole in.
Described sensor is torque sensor or the force transducer in order to detect.Also can adopt other sensors.
Technical conceive of the present invention is: the inherent tank shell of ultra low temperature vacuum jar and heat sink have an interlayer near normal temperature, i.e. normal temperature region of no pressure is the ultra-low temperature region in heat sink, i.e. the vacuum ultra-low temperature region.So vacuum equipment transmission shaft of the present invention is to utilize the magnet fluid sealing transmission device to realize the transmission of power between normal pressure and vacuum environment with the magnet fluid sealing transmission device of belt sensor, sensor is arranged on the shaft part of tank shell and heat sink normal temperature region of no pressure, and power equipment and speed reducer are arranged in outside the jar, with tested instrument or apparatus arrangement in the vacuum ultra-low temperature region in heat sink, jar inner sensor is connected with a jar outer control system by the lead in the axle inner via hole of magnet fluid sealing transmission device, can receiving sensor information and control according to the signal of sensor.
The present invention is applicable to the rotary magnetic fluid seal apparatus; As carbon brush 27 is installed in transmission shaft 2 synchronous reciprocating devices on, also be applicable to reciprocating type device for sealing magnetic fluid.
The present invention also is applicable to the occasion that sensor separates with the magnet fluid sealing transmission device; Be equally applicable to the device for sealing magnetic fluid that sensor is a wireless senser.
Beneficial effect of the present invention mainly shows: 1, owing to work at normal temperatures and pressures, sensor, power equipment and speed reducer can adopt common sensor, power equipment and the speed reducer that satisfies precision, greatly reduce cost, and working life is also very long; 2, owing to work at normal temperatures and pressures, sensor, power equipment and speed reducer can adopt common sensor, power equipment and the speed reducer that satisfies precision, because these products are very ripe product, so reliability, precision all can guarantee; If also placement sensor on 3 the shaft parts outside jar, then the frictional loss to the magnet fluid sealing transmission device also can detect, thereby is more convenient for control.
(4) description of drawings
Fig. 1 is the scheme of installation of magnet fluid sealing transmission device of the present invention.
Fig. 2 is the cut-away view of magnet fluid sealing transmission device of the present invention.
(5) embodiment
Below in conjunction with accompanying drawing the present invention is further described.
With reference to Fig. 1, Fig. 2, a kind of magnetofluid seal driving device for vacuum equipment driving shaft, comprise casing 5, transmission shaft 2, described transmission shaft 2 is connected with casing 5 by two bearings 6, in the described casing 5 core assembly is installed, described core assembly is sleeved on the transmission shaft 2, described casing 5 right-hand members are installed end cap 12, described transmission shaft 2 comprises the right-hand member that passes vacuum tank and the left end that is connected with tested instrument and equipment input shaft, is connected with power equipment, reduction unit output shaft, is positioned at described transmission shaft 2 on vacuum tank tank shell and heat sink 's the shaft part to be provided with sensor 3.
Described transmission shaft 2 inside are provided with through hole, and transmission shaft has threading hole between sensor 3 and through hole, and the signal end of described sensor connects lead 16, and described lead 16 passes described threading hole, through hole, and described through hole right-hand member is provided with package blocks 15.
Described transmission shaft 2 right-hand members are provided with the slip ring 13 that is separated by isolation layer 14, and described lead 16 connects slip ring 13.Slip ring 13 connects carbon brush 27, is applicable to rotary magnetic fluid-tight occasion.
Or: described carbon brush 27 be installed in transmission shaft 2 synchronous reciprocating devices on the time, also be applicable to reciprocating type magnet fluid sealing occasion.
Or: have wireless launcher on the described sensor 3 in order to testing signal is sent.Be applicable to that sensor is the magnet fluid sealing occasion of wireless senser.
Arrange in order to detect the additional sensor of frictional loss at the right-hand member of transmission shaft 2.Can the frictional loss of magnet fluid sealing transmission device be detected, be convenient to control.
Described core assembly comprises annular magnetic pole 10, permanent magnet 11, permanent magnet 11 is between two annular magnetic poles 10, the internal surface of annular magnetic pole 10 is provided with utmost point mark of mouth groove 18, is provided with sealing magnetic fluid 17 between the micro-gap of utmost point mark of mouth groove and transmission shaft 2.
Be provided with first O-ring seals 8 between casing 5 and the annular magnetic pole 10, install in the left side of casing 5 in order to second O-ring seals 4 of vacuum tank sealing, two bearings 6 and 10 of annular magnetic poles in the casing 5 are equipped with magnetic shield 7, casing 5 is provided with magnetic fluid can hole 20, and sealing screw 9 is installed in the can hole 20.
Described sensor 3 is torque sensor or the force transducer in order to detect.Also can adopt other sensors.
Described casing is a non-magnet material, as aluminium or stainless steel etc.; Annular magnetic pole is a soft magnetic material, as pure iron or low carbon steel; Transmission shaft is a soft magnetic material, as pure iron or low carbon steel; Permanent magnet can be ferrite, rare earth permanent-magnetic material etc.; Package blocks can be epoxy resin and other sealing and curing materials.
In the present embodiment, vacuum tank comprises vacuum tank housing 21, heat sink 22, the left end of transmission shaft 2 is provided with driving groove 1, the left end of transmission shaft 2 is connected with tested instrument and equipment input shaft 24 by coupling 23, casing 5 is fixedlyed connected with vacuum tank housing 21 by screw- nut 25,26, connects by second O-ring seals 4.
Claims (8)
1, a kind of magnetofluid seal driving device for vacuum equipment driving shaft, comprise casing, transmission shaft, described transmission shaft is connected with casing by two bearings, core assembly is installed in the described casing, described core assembly is sleeved on the transmission shaft, described casing right-hand member is installed end cap, described transmission shaft comprise pass vacuum tank and the left end that is connected with tested instrument and equipment input shaft, with the right-hand member that power equipment, reduction unit output shaft are connected, it is characterized in that: be positioned at described transmission shaft on vacuum tank tank shell and heat sink 's the shaft part and be provided with sensor.
2, magnetofluid seal driving device for vacuum equipment driving shaft as claimed in claim 1, it is characterized in that: described transmission shaft inside is provided with through hole, transmission shaft has threading hole between sensor and through hole, the signal end of described sensor connects lead, described lead passes described threading hole, through hole, and described through hole right-hand member is provided with package blocks.
3, magnetofluid seal driving device for vacuum equipment driving shaft as claimed in claim 2 is characterized in that: described transmission shaft right-hand member is provided with the slip ring that is separated by isolation layer, and described lead connects slip ring.
4, magnetofluid seal driving device for vacuum equipment driving shaft as claimed in claim 1 is characterized in that: have the wireless launcher in order to testing signal is sent on the described sensor.
5, as the described magnetofluid seal driving device for vacuum equipment driving shaft of one of claim 1-4, it is characterized in that: arrange in order to detect the additional sensor of frictional loss at the right-hand member of transmission shaft.
6, magnetofluid seal driving device for vacuum equipment driving shaft as claimed in claim 5, it is characterized in that: described core assembly comprises annular magnetic pole, permanent magnet, permanent magnet is between two annular magnetic poles, the internal surface of annular magnetic pole is provided with utmost point mark of mouth groove, is provided with the sealing magnetic fluid between the micro-gap of utmost point mark of mouth groove and transmission shaft.
7, magnetofluid seal driving device for vacuum equipment driving shaft as claimed in claim 6, it is characterized in that: be provided with first O-ring seals between casing and the annular magnetic pole, install in the left side of casing in order to second O-ring seals of vacuum tank sealing, between two bearings in the casing and annular magnetic pole magnetic shield is installed, casing is provided with magnetic fluid can hole, and sealing screw is installed in the can hole.
8, magnetofluid seal driving device for vacuum equipment driving shaft as claimed in claim 7 is characterized in that: described sensor is torque sensor or force transducer in order to detect.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
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CNB2007100683821A CN100458243C (en) | 2007-04-29 | 2007-04-29 | Magnetofluid seal driving device for vacuum equipment driving shaft |
Applications Claiming Priority (1)
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CNB2007100683821A CN100458243C (en) | 2007-04-29 | 2007-04-29 | Magnetofluid seal driving device for vacuum equipment driving shaft |
Publications (2)
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CN101055037A CN101055037A (en) | 2007-10-17 |
CN100458243C true CN100458243C (en) | 2009-02-04 |
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CNB2007100683821A Expired - Fee Related CN100458243C (en) | 2007-04-29 | 2007-04-29 | Magnetofluid seal driving device for vacuum equipment driving shaft |
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CN108843791B (en) * | 2018-08-13 | 2020-01-21 | 广西科技大学 | Tandem type magnetic fluid sealing structure |
CN108869755B (en) * | 2018-08-13 | 2020-01-21 | 广西科技大学 | Magnetic source mixed type magnetic fluid sealing structure |
CN109238695A (en) * | 2018-09-19 | 2019-01-18 | 中山瑞科新能源有限公司 | A kind of vacuum equipment with live-roller on-line monitoring function |
CN112349577B (en) * | 2019-08-08 | 2022-03-04 | 同方威视技术股份有限公司 | Interface structure for conducting and transmitting fluid and detector device |
CN114251367B (en) * | 2021-11-25 | 2023-10-27 | 广西科技大学 | Mixed magnetic fluid sealing device for bearing |
CN115962215B (en) * | 2023-03-16 | 2023-06-13 | 合肥铠柏科技有限公司 | Ultrahigh vacuum magnetic fluid rotating shaft |
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Patent Citations (6)
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JP2001311473A (en) * | 2000-04-28 | 2001-11-09 | Rigaku Corp | Shaft sealing apparatus |
CN2447583Y (en) * | 2000-11-03 | 2001-09-12 | 罗喜梅 | Magnetofluid sealing device for vacuum equipment driving shaft capable of forced cooling |
CN2447582Y (en) * | 2000-11-03 | 2001-09-12 | 罗喜梅 | Magnetofluid seal driving device for vacuum equipment driving shaft |
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CN101055037A (en) | 2007-10-17 |
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Granted publication date: 20090204 Termination date: 20120429 |