CN100432658C - A sensor based on asymmetric interference arm Mach-Zehnder interferometer - Google Patents
A sensor based on asymmetric interference arm Mach-Zehnder interferometer Download PDFInfo
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- CN100432658C CN100432658C CNB2005100603584A CN200510060358A CN100432658C CN 100432658 C CN100432658 C CN 100432658C CN B2005100603584 A CNB2005100603584 A CN B2005100603584A CN 200510060358 A CN200510060358 A CN 200510060358A CN 100432658 C CN100432658 C CN 100432658C
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Abstract
The present invention discloses a Mach-Zehnder interferometer sensor based on non symmetrical interference arms, which is orderly formed by the connection of an input waveguide, a 1*2 optical power divider, two non symmetrical Mach-Zehnder arms, a 2*1 wave combiner and an output waveguide. The non symmetrical Mach-Zehnder arms of the Mach-Zehnder interferometer of the present invention, comprising a reference arm and a measurement arm, respectively adopt two waveguides with different widths, both the waveguides adopt a spine-shaped optical waveguide structure, liquid to be measured is taken as a covering layer of the optical waveguide, and the refractive variation of the liquid to be measured cause the unequal phase variation of the reference arm and the measurement arm, so that interference is caused at an output end. The responded refractive variation can be measured by measuring the final output energy. The present invention directly introducces phase difference by adopting the non symmetrical Mach-Zehnder arms, no liquid groove corrasion is needed, the technical difficulty is greatly simplified, no alignment technology is needed as well, and the present invention simultaneously has the characteristic which can be compared with a traditional Mach-Zehnder sensor.
Description
Technical field
The present invention relates to sensor technical field, particularly relate to a kind of based on asymmetric interference arm Mach Ceng De (Mach-Zehnder) interferometer type sensor.
Background technology
Along with the development of modern surveying, control and automatic technology, the effect of sensor in every field is remarkable day by day, and becomes the key device of decision systems quality.Sensor mainly is the device that various non electrical quantities (comprising physical quantity, chemistry amount, biomass etc.) is converted to the another kind of physical quantity of being convenient to handle and transmitting.Light wave has the powerful transmission information and the ability of process information, and various photoelectric detection equipment (as photoelectric diode, power meter, spectrometer etc.) application is general, so light wave often is used as information carrier and becomes the transition physical quantity.An important branch as sensor, optical sensor development in recent years is swift and violent, integrated optical waveguide sensor is a new developing direction of optical sensor, it adopts the method that is similar to SIC (semiconductor integrated circuit), optical element is integrated on the same substrate with form of film forms integrated optical circuit.Integrated optical waveguide sensor has been inherited the advantage of Fibre Optical Sensor; but also more help realizing multi-functional integrated, compact package and batch process; and have the incomparable advantages of other structure sensors such as small-sized light weight, reliable and stable, low-consumption high-efficiency, be widely used in environmental protection, life science, field of aerospace.
The Mach-Zehnder interferometer then is the Waveguide interference instrument scheme that is easy to realize most.The Mach-Zehnder interferometer sensor has not only overcome surface plasma wave sensing device and grating coupling instrument sensor to the suffered restriction in developing of following Highgrade integration, microminiaturized direction, be easy to realize that array and multichannel detect simultaneously, and the most important thing is that it is considered to the most potential a kind of structure type aspect the high sensitivity obtaining always.Traditional Mach-Zehnder interferometer is made up of two three-dB couplers and two waveguide arms, usually wherein an arm is exposed in the environment, variation along with extraneous parameter, variation as temperature, concentration, distortion, stress etc., changed the effective refractive index of this arm transmission light, thereby change the phase place of light, make output interference of light result change, thereby reach the purpose of surveying the external environment parameter.When actual fabrication, all etch sample cell on an arm or two arms therein usually,, make troubles the needs alignment process from the manufacture craft angle to actual fabrication.
Summary of the invention
The object of the present invention is to provide two to interfere a kind of of waveguiding structure that arms adopt different in width based on asymmetric interference arm Mach-Zehnder interferometer sensor.
The technical scheme that the present invention solves its technical matters employing is:
Comprise input waveguide successively, 1 * 2 optical power distributor, two asymmetric mach be moral arm, 2 * 1 wave multiplexers once, and output waveguide is formed by connecting.
Described two asymmetric mach once one of them arm of moral arm are formed by connecting greater than the wide straight wave guide of input waveguide width, the output tapered transmission line of pickup arm by input tapered transmission line, the width of pickup arm, and another arm is by being formed by connecting with the straight wave guide of the same width of input waveguide, the input tapered transmission line of reference arm, the output tapered transmission line of reference arm.
The input tapered transmission line structure of the input tapered transmission line of described pickup arm and reference arm is identical with length, and the input tapered transmission line structure of the output tapered transmission line of pickup arm and reference arm is identical with length, and wide straight wave guide is identical with straight wave guide length.
Described 1 * 2 optical power distributor, 2 * 1 wave multiplexers are multiple-mode interfence waveguiding structure, Y branched structure or directional coupler structure.
Described waveguiding structure is the ridge optical waveguide structure.
The useful effect that the present invention has is:
1. need not the etching liquid tank, do not need to use alignment process when making, make work simplification, cost of manufacture reduces greatly;
2. the tapered transmission line of two arms of Mach-Zehnder adopts identical structure, makes because the loss that taper is introduced and the variation of phase place can be cancelled out each other, thereby makes phase place be because the variation of the width of waveguide causes;
3. the width of the straight wave guide part by choosing two arms is than making the sensitivity of entire device under the prerequisite that size does not increase reach very high;
4. only total need be placed testing liquid when measuring, not want liquid with precise control not excessive and have.
Description of drawings
The asymmetric interference arm Mach-Zehnder interferometer sensor of Fig. 1 the present invention synoptic diagram;
Fig. 2 ridge optical waveguide schematic cross-section of the present invention;
Fig. 3 light field is propagated synoptic diagram in whole asymmetric interference arm Mach-Zehnder interferometer sensor;
The asymmetric interference arm Mach-Zehnder interferometer sensor output of Fig. 4 energy variation is with the variations in refractive index synoptic diagram.
Among the figure: 1, input waveguide, 2,1 * 2 optical power distributor, 3, the input tapered transmission line of pickup arm, 4, wide straight wave guide, 5, the output tapered transmission line of pickup arm, 6, straight wave guide, 7, the input tapered transmission line of reference arm, 8, the output tapered transmission line of reference arm, 9,2 * 1 wave multiplexers, 10, output waveguide.
Embodiment
As shown in Figure 1, the present invention comprises input waveguide 1,1 * 2 optical power distributors 2, two asymmetric mach once moral arm, 2 * 1 wave multiplexers 9 successively, and output waveguide 10 is formed by connecting.
Described two asymmetric mach once one of them arm of moral arm are formed by connecting greater than the wide straight wave guide 4 of input waveguide 1 width, the output conical wave 5 of pickup arm by input tapered transmission line 3, the width of pickup arm, and another arm is by being formed by connecting with the straight wave guide 6 of the same width of input waveguide, the input tapered transmission line 7 of reference arm, the output tapered transmission line 8 of reference arm.
Input tapered transmission line 7 structures of the input tapered transmission line 3 of described pickup arm and reference arm are identical with length, and input tapered transmission line 8 structures of the output tapered transmission line 5 of pickup arm and reference arm are identical with length, and wide straight wave guide 4 is identical with straight wave guide 6 length.
Described 1 * 2 optical power distributor, 2,2 * 1 wave multiplexer 9 is multiple-mode interfence waveguiding structure, Y branched structure or directional coupler structure.
Described waveguiding structure is the ridge optical waveguide structure.
At first need definite basic structure that constitutes the ridge optical waveguide of whole asymmetric interference arm Mach-Zehnder interferometer sensor, make the communication satisfaction single mode transport condition of light wave in waveguide, simultaneously enough big bending radius to be arranged, comprehensive above the analysis chosen ridge optical waveguide (as shown in Figure 2) width W
r=4 μ m, the high h of ridge
r=2.0 μ m, SiO2 core layer thickness h
1=6 μ m, SiO2 sandwich layer refractive index n
1=1.4588, SiO2 under-clad layer thickness h
2=8 μ m, the under-clad layer refractive index n
2=1.4471, calculate wavelength X=1.55 μ m.Adopting simple Y branched structure is examples of implementation, just should consider at Fen Kouchu and leave minimum permission spacing (generally being 2 μ m), with the loss that prevents to introduce because of air-gap.If but adopt the light engraving arbor, have only about 2 μ m such as the etching depth of being got among the present invention, air-gap is very faint to the influence of loss so, can ignore.
Adopt the design of unsymmetric structure, two waveguiding structures of interfering arm to adopt two kinds of width of Mach-Zehnder interferometer, by the width difference make two arms to external world the propagation constant that causes of variations in refractive index change differently, interfere thereby produce in output place, cause the variation of output intensity.When etching depth was 2 μ m, the duct width of two arms was chosen for 4 μ m and 6 μ m respectively, to guarantee single mode transport.Because the duct width of remainder still is 4 μ m, therefore must introduce waveguide arm and other parts that pyramidal structure ((3) are with shown in (5) among Fig. 1) is connected 6 μ m.The introducing of pyramidal structure makes the phase place of an arm of Mach-Zehnder interferometer change, because the phase change that pyramidal structure is introduced, the present invention introduces the input conical wave 7 of the identical reference arm of the output tapered transmission line 5 of the input tapered transmission line 3 of structure and pickup arm and pickup arm and the output tapered transmission line 8 of reference arm on another arm of Mach-Zehnder interferometer in order to eliminate.Such structure can guarantee that owing to the phase change that pyramidal structure is introduced is cancelled out each other the phase change of whole sensor offers convenience for design and making only owing to the wide variety of two arms is introduced.Such asymmetric design need not the etching liquid tank, does not need to use alignment process when making, and makes work simplification, and cost of manufacture reduces greatly.
Utilize 3DBPM can simulate the situation that light field is propagated in total.For range and the sensitivity that takes into account sensor, the length of sensor interferometer arm is chosen for 942.57 μ m, and the length of taper is taken as 1000 μ m.Fig. 3 is that light field is propagated synoptic diagram in whole asymmetric interference arm Mach-Zehnder interferometer sensor.As can be seen from the figure, punish into two-way in the input light field at Y branched optical cable power splitter 2, in two arms, propagate respectively, because the propagation constant of two arms is different, when arriving Y branched optical cable wave multiplexer 9, light field interferes, from the phase differential decision by two arms of the light field of output waveguide 10 output, and the phase differential of two arms is relevant with the refractive index in the external world, therefore can measure the refractive index in the external world by the intensity of measuring output light field.Fig. 4 is that asymmetric interference arm Mach-Zehnder interferometer sensor is exported energy variation with the variations in refractive index synoptic diagram, and as can be seen from the figure, the output energy is corresponding with extraneous refractive index, and total can realize the function of sensor.
Claims (4)
1, a kind of based on asymmetric interference arm Mach-Zehnder interferometer sensor, comprise input waveguide (1) successively, 1 * 2 optical power distributor (2), two asymmetric mach be moral arm, 2 * 1 wave multiplexers (9) once, and output waveguide (10) is formed by connecting; It is characterized in that: described two asymmetric mach once one of them arm of moral arm are formed by connecting greater than the wide straight wave guide (4) of input waveguide (1) width, the output tapered transmission line (5) of pickup arm by input tapered transmission line (3), the width of pickup arm, and another arm is by being formed by connecting with the straight wave guide (6) of the same width of input waveguide, the input tapered transmission line (7) of reference arm, the output tapered transmission line (8) of reference arm.
2, according to claim 1 a kind of based on asymmetric interference arm Mach-Zehnder interferometer sensor, it is characterized in that: input tapered transmission line (7) structure of the input tapered transmission line (3) of described pickup arm and reference arm is identical with length, input tapered transmission line (8) structure of the output tapered transmission line (5) of pickup arm and reference arm is identical with length, and wide straight wave guide (4) is identical with straight wave guide (6) length.
3, according to claim 1 a kind of based on asymmetric interference arm Mach-Zehnder interferometer sensor, it is characterized in that: described 1 * 2 optical power distributor (2), 2 * 1 wave multiplexers (9) are multiple-mode interfence waveguiding structure, Y branched structure or directional coupler structure.
4, according to claim 1 or 2 or 3 described a kind of based on asymmetric interference arm Mach-Zehnder interferometer sensor, it is characterized in that: described waveguide is the ridge optical waveguide structure.
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| CN113608037B (en) * | 2021-08-09 | 2022-06-17 | 西安电子科技大学 | Pulse electric field sensor based on asymmetric straight waveguide interferometer |
| CN117470806B (en) * | 2023-12-21 | 2024-03-26 | 天津工业大学 | Polymer glucose sensor based on Mach-Zehnder structure |
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