CN100390500C - Object-size measurement system and method - Google Patents
Object-size measurement system and method Download PDFInfo
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- CN100390500C CN100390500C CNB2005101087802A CN200510108780A CN100390500C CN 100390500 C CN100390500 C CN 100390500C CN B2005101087802 A CNB2005101087802 A CN B2005101087802A CN 200510108780 A CN200510108780 A CN 200510108780A CN 100390500 C CN100390500 C CN 100390500C
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Abstract
A system used for measuring size of article is featured as distributing the first and the second confocal microscopic measurement device at end surfaces of the first and the second sides on direction of article size to be measured and setting the first objectives of two confocal microscopic measurement devices to face separately to two end surfaces of article to be measured then carrying and setting the first objective of the second confocal microscopic measurement device on displacement unit for getting near to or far from measured article end surface being faced by said objective in following with axial movement of said displacement unit.
Description
Technical field
The invention relates to a kind of liquid crystal layer size measurement system, refer to that especially a kind of thickness both ends of the surface in determinand (for example liquid crystal) are respectively arranged with the confocal microscopy device, to measure the measurement system of this determinand thickness; And about a kind of method for measurement that is applied to aforementioned system.
Background technology
LCD (Liquid Crystal Display, LCD) display quality is influenced by following three kinds of parameters: Show Color (display color), response speed (response speed) and sensing degree of stability (orientation stability), thickness of liquid crystal layer (cell gap) then is the important factor of above-mentioned three parameters of influence.
Thickness of liquid crystal layer measures on the framework to the hypothesis liquid crystal molecule in tradition and be arranged as perfect condition in slit, make and meet Mauguin ' s restriction (Mauguin ' s limit), but in fact this is one of main error in measurement source, and general performance causes many inconvenience for research staff's Accurate Analysis panel.Generally speaking, the error in measurement of thickness of liquid crystal all wishes to be controlled in the 0.1 μ m, and is good with non-contact measurement device, to avoid that damage is caused on the LCD surface, therefore develop the device and method that framework simply reaches the rapid measuring thickness of liquid crystal layer, have the benefit of essence for the LCD technical research.
Liquid crystal molecule has birefringent characteristic at normal temperatures, and the mode of arranging according to difference has different measurement modes.Liquid crystal measures mode in the thickness in two sheet glass gaps, be mainly and utilize light to pass through polaroid (polarizer) the generation polarized light incident identical with alignment direction, and make and penetrate or reflected light (or claims analyzer by another polaroid, analyzer) measure incident light and penetrate or reflected light between intensity variation, cooperate known liquid crystal material characteristic, the result can be scaled optical phase put-off (phase retardation) and calculate thickness of liquid crystal layer.
NEC Corporation proposed the US5434671 patent in 1993, wherein mention and respectively place a slice polaroid before and after liquid crystal layer, and the angle that is predetermined is taked in its polarization direction, and the rotation liquid crystal layer can obtain the intensity variation of thickness correspondence.
Sharp company proposes the US6757062 patent in calendar year 2001, relate to reflective liquid-crystal display, exposure places liquid crystal layer on the platform, light beam by after the polaroid vertical incidence in the liquid crystal layer bottom after reflective layer reflects, utilize similar above-mentioned principle amount to get thickness of liquid crystal layer.
Above-mentioned measurement mode is primarily aimed at TN form liquid crystal layer, for vertical orientation type (VA Type) liquid crystal layer, because its light beam when not applying voltage can't penetrate, the US6628389 patent that was proposed by Otsuka company in 1999 adopts light beam oblique incidence mode, adds respectively in the liquid crystal layer both sides that similarly a slice polaroid is to obtain the relation of intensity variation and optical phase put-off.
Nineteen ninety, " thickness of liquid crystal layer determinator " invented by Japan OAK manufacturing company, because liquid crystal molecule has birefraction, and whole liquid crystal layer has alignment film that liquid crystal molecule is done orientation, the main assay method of this device is that the optical axis direction of polaroid and analyzer is orthogonal, and become 45 to spend respectively with the orientation of liquid crystal layer, measuring the relation of light intensity and lambda1-wavelength, and then calculate thickness of liquid crystal layer.In this device and one group of confocal microscopy objective lens is installed, the three glasses tubes that see through on the microscope are done the observation of liquid crystal layer and the location of position.In addition, still utilize FT-NIR to analyze, as the US6636322 patent of Sharp in proposition in 2000, the method of its exposure also can be done accurate measurement for the panel that contains PALC (plasmaaddress liquid crystal) substrate, but need place still that polaroid and analyzer beginning obtain that liquid crystal layer penetrates in the substrate both sides or the variation of catoptrical interference fringe and corresponding optical phase put-off, with the calculating thickness of liquid crystal layer.
By disclosing of aforementioned all cases, can learn the diversity of thickness of liquid crystal method for measurement, but all utilize the birefringence effect of liquid crystal material.
At present, the device that is used to measure thickness of liquid crystal adopts the optical phase put-off that calculates liquid crystal layer more, and this kind technology is to measure with the optical interference method earlier not inject the liquid crystal material space thickness as yet, and then injects liquid crystal material, and make the liquid crystal rotation, to measure this space thickness.Yet, adopt the measurement of optical interference method not inject the real difficulty and very inaccurate that belongs to of space thickness of liquid crystal, be to include indium tin oxide (Indium Tin Oxide because of this space, ITO) transparency conducting layer, alignment film, thin film transistor (TFT) (Thin FilmTransistor, TFT) and structure such as colored filter, therefore can cause multiple measurement to be disturbed.Though above-mentioned object can be measured individually, it is very complicated and consuming time to make that whole measuring program becomes, and obtained value is also accurate inadequately.
Optical microscope is the measuring instrument of modern precision, is widely used on the surperficial tiny characteristic and researchs such as dynamic behaviour or biofilm, collagen, cell movement, liquid surface or liquid/gas body interface characteristic of surface micro-structure, biological specimen of material.As for the commercial Application aspect, in the detection of digital multi-purpose CD (DVD) and thin film transistor (TFT) product processing procedures such as (TFT), also all need use optical microscope.Optical microscope is formerly in the sky to have the characteristic that non-destruction is detected, and needn't make the just advantage of Direct observation of special processing to sample to be tested but have simultaneously.Yet, because the diffraction phenomenon of light wave makes its parsing power be subject to the grade (being commonly referred to as the diffraction limit) of half-wavelength.
Confocal microscope (confocal microscope) utilizes pin hole to carry out spatial filtering, make image resolution be superior to optical microscope a little, have simultaneously the ability of vertical detection again, therefore be widely used in the research of thickness of semiconductor film detection, the structure analysis of biological living tangent plane.
The framework of relevant traditional confocal microscopy device and principle will be illustrated in detail by Fig. 7 to Fig. 9.
As shown in Figures 7 and 8, traditional confocal microscopy device 100 comprises: light source 10, spectroscope 11, first object lens 12, second object lens 13, pin hole 14, optical detector 15, first lens 18 and second lens 19.One determinand 16 is arranged at the rear that first object lens 12 were gone up and be positioned to gearshift (figure does not show).After focusing on the surface of determinand 16 by light source 10 outgoing and via the collimated laser light bundle 17 of first lens 18, second lens 19, spectroscope 11 to first object lens 12, by the surface reflection of this determinand 16, arrive optical detector 15 via spectroscope 11, second object lens 13 and pin hole 14 again.Because the surface of determinand 16 is on the focal plane of first object lens 12, and pin hole 14 also is positioned on the focal plane of second object lens 13, therefore all light all can be received by optical detector 15 by pin hole 14, please refer to the solid line part among Fig. 8, makes the maximum signal of optical detector 15 outputs.When determinand 16 moves according to axial direction as shown by arrows, the focal plane of first object lens 12 will be left (with reference to the determinand shown in the thick dashed line 16 among the figure 8 in the surface of this determinand 16, its plane is called the out of focus plane), before the light (please refer to the fine dotted line part among Fig. 8) that is reflected by determinand 16 will be blocked and can't pass pin hole 14, thereby can't arrive optical detector 15, thus the signal of optical detector 15 output a little less than.According to diffraction theory, the light intensity by pin hole 14 is into sinc with the distance of determinand 16 out of focus
2The relation of function, it moves axially displacement and intensity variation as shown in Figure 9.
Summary of the invention
Purpose of the present invention is providing a kind of liquid crystal layer size measurement system, refers to that especially a kind of thickness both ends of the surface in determinand (for example liquid crystal) are respectively arranged with the confocal microscopy device, to measure the measurement system of this determinand thickness.
Another object of the present invention is providing a kind of object-size measurement method, but the determinand that rapid measuring application of aforementioned object-size measurement device measures.
For achieving the above object, liquid crystal layer size measurement system provided by the invention comprises:
The first confocal microscopy measuring equipment, second confocal microscopy measuring equipment and the gearshift, this first and second confocal microscopy measuring equipment is symmetrical in the determinand thickness direction and disposes respectively, wherein the object lens mounting of this second confocal microscopy measuring equipment on this gearshift and with this gearshift move axially and near or away from these object lens towards the end face of determinand.
Described liquid crystal layer size measurement system, wherein aforementioned first and second confocal microscopy measuring equipment all comprises light source, spectroscope, first object lens, second object lens, pin hole, optical detector, first lens and second lens, and first object lens of this second confocal microscopy measuring equipment are the object lens of aforementioned mounting on this gearshift.
Described liquid crystal layer size measurement system, the light beam of the light source output of the wherein aforementioned first confocal microscopy measuring equipment forms the spectroscope that collimated light beam is incident in this first confocal microscopy measuring equipment through first lens and second lens of this first confocal microscopy measuring equipment, aforementioned light beam pass this spectroscope through first object lens focusing on determinand first end face, come second object lens of this first confocal microscopy measuring equipment along original route through this spectroscope by the first end face reflection light beam of aforementioned determinand again, focus on and pass the pin hole of this first confocal microscopy measuring equipment and received by the optical detector of this first confocal microscopy measuring equipment; In the aforementioned first confocal microscopy measuring equipment, first object lens of this second confocal microscopy measuring equipment are carried on second end face that the focused beam that makes these object lens on the gearshift focuses on determinand the aforementioned second confocal microscopy measuring equipment according to aforementioned light path mirror.
Described liquid crystal layer size measurement system, wherein the aforementioned displacements device focus that moves axially first object lens of the second confocal microscopy measuring equipment that makes its load overlaps with the focus of first object lens of the first confocal microscopy measuring equipment, to optical detector, this moment, aforesaid gearshift shift value was made as the primary importance point to its transmitted beam along first object lens of the second confocal microscopy measuring equipment, spectroscope, second object lens, pin hole.
Described liquid crystal layer size measurement system, wherein aforementioned folded light beam by determinand first end face is through second object lens focusing of the first confocal microscopy measuring equipment and pass pin hole and received by optical detector, when this optical detector output maximum light intensity value, for the focal plane of these object lens overlaps with determinand first end face.
Described liquid crystal layer size measurement system, wherein aforementioned folded light beam by determinand second end face is through second object lens focusing of the second confocal microscopy measuring equipment and pass pin hole and received by optical detector, when this optical detector output maximum light intensity value, for the focal plane of these object lens overlaps with determinand second end face.
Described liquid crystal layer size measurement system, when two first object focal points of wherein aforementioned first and second confocal microscopy device overlap, the optical detector output maximum light intensity value of the second confocal microscopy measuring equipment is made as the primary importance point of aforementioned displacements device, between first and second confocal microscopy device, insert a determinand, the aforementioned displacements assembly axis is detected the maximum light intensity value for the second time to moving to this optical detector, be made as second place point, the difference of aforementioned two positions point is the size value of this determinand.
Described liquid crystal layer size measurement system, wherein the size value of aforementioned determinand is the one-tenth-value thickness 1/10 of liquid crystal.
According to liquid crystal layer size measurement system provided by the invention, also comprise: the first confocal microscopy measuring equipment, the second confocal microscopy measuring equipment, gearshift and two double beam interferometers, this first and second confocal microscopy measuring equipment is symmetrical in the determinand thickness direction and disposes respectively, wherein the object lens mounting of this second confocal microscopy measuring equipment on this gearshift and with this gearshift move axially and near or away from this object lens institutes towards the end face of determinand, aforementioned two double beam interferometers be arranged at respectively first object lens of each confocal microscopy measuring equipment and its towards the determinand end face between.
Described liquid crystal layer size measurement system, wherein aforementioned each double beam interferometer all comprises reference surface mirror and spectroscope.
Described liquid crystal layer size measurement system, wherein aforementioned first and second confocal microscopy measuring equipment all comprises light source, spectroscope, first object lens, second object lens, pin hole, optical detector, first lens and second lens, and first object lens of this second confocal microscopy measuring equipment are the object lens of aforementioned mounting on this gearshift.
Described liquid crystal layer size measurement system, the light beam of the light source output of the wherein aforementioned first confocal microscopy measuring equipment forms the spectroscope that collimated light beam is incident in this first confocal microscopy measuring equipment through first lens and second lens of this first confocal microscopy measuring equipment, aforementioned light beam passes these first object lens of this spectroscope incident, when light beam during through this first object lens focusing, be divided into twice light by aforementioned interferometer, this twice light is incident in aforementioned determinand surface and this interferometer respectively, and this twice light is come second object lens of this first confocal microscopy measuring equipment along original route through aforementioned spectroscope, focuses on and the effect of interfering simultaneously and the pin hole that passes this first confocal microscopy measuring equipment is received by the optical detector of this first confocal microscopy measuring equipment; In the aforementioned first confocal microscopy measuring equipment, first object lens of this second confocal microscopy measuring equipment are carried on second end face that the focused beam that makes these object lens on the gearshift focuses on determinand the aforementioned second confocal microscopy measuring equipment according to aforementioned light path mirror.
Described liquid crystal layer size measurement system, wherein the aforementioned displacements device focus that moves axially first object lens of the second confocal microscopy measuring equipment that makes its load overlaps with the focus of first object lens of the first confocal microscopy measuring equipment, to optical detector, this moment, aforesaid gearshift shift value was made as the primary importance point to its transmitted beam along first object lens of the second confocal microscopy measuring equipment, spectroscope, second object lens, pin hole.
Described liquid crystal layer size measurement system, wherein aforementioned folded light beam by determinand first end face is through second object lens focusing of the first confocal microscopy measuring equipment and pass pin hole and received by optical detector, when this optical detector output maximum light intensity value, for the focal plane of these object lens overlaps with determinand first end face.
Described liquid crystal layer size measurement system, wherein aforementioned folded light beam by determinand second end face is through second object lens focusing of the second confocal microscopy measuring equipment and pass pin hole and received by optical detector, when this optical detector output maximum light intensity value, for the focal plane of these object lens overlaps with determinand second end face.
Described liquid crystal layer size measurement system, when two first object focal points of wherein aforementioned first and second confocal microscopy device overlap, the optical detector output maximum light intensity value of the second confocal microscopy measuring equipment is made as the primary importance point of aforementioned displacements device, between first and second confocal microscopy device, insert a determinand, the aforementioned displacements assembly axis is detected the maximum light intensity value for the second time to moving to this optical detector, be made as second place point, the difference of aforementioned two positions point is the size value of this determinand.
Described liquid crystal layer size measurement system, wherein the size value of aforementioned determinand is the one-tenth-value thickness 1/10 of liquid crystal.
The object-size measurement method that the above-mentioned liquid crystal layer size measurement system of utilization provided by the invention carries out comprises:
Liquid crystal layer size measurement system with the first confocal microscopy measuring equipment, the second confocal microscopy measuring equipment and gearshift is provided;
The focal plane of first object lens of first object lens of the first confocal microscopy measuring equipment and the second confocal microscopy measuring equipment is overlapped;
The location point of aforementioned displacements device is made as the primary importance point;
Determinand is placed between aforementioned two first object lens;
The focal plane of first object lens of the first confocal microscopy measuring equipment is overlapped with determinand first end face;
The moving displacement device makes the focal plane of first object lens of the second confocal microscopy measuring equipment overlap with determinand second end face;
The location point of the gearshift of previous step is made as second place point;
Calculate the difference of aforementioned primary importance point and second place point, this difference is the size value of determinand.
Described object-size measurement method, when the optical detector of the wherein aforementioned second confocal microscopy measuring equipment gets the maximum light intensity value, for the focal plane of first object lens of the aforementioned first confocal microscopy measuring equipment overlaps with the focal plane of first object lens of the aforementioned second confocal microscopy measuring equipment or the focal plane of first object lens of the aforementioned second confocal microscopy measuring equipment overlaps with second end face of aforementioned determinand.
Described object-size measurement method is when the optical detector of the wherein aforementioned first confocal microscopy measuring equipment gets the maximum light intensity value, for the focal plane of first object lens of the aforementioned first confocal microscopy measuring equipment overlaps with first end face of aforementioned determinand.
Description of drawings
Fig. 1 shows first specific embodiment of liquid crystal layer size measurement system of the present invention.
The system of Fig. 2 displayed map 1 index path that makes zero.
Fig. 3 shows second specific embodiment of liquid crystal layer size measurement system of the present invention.
Fig. 4 shows the measuring basis signal of second specific embodiment shown in Figure 3.
Fig. 5 is the sectional view that is applied to determinand of the present invention, shows that this determinand is the configuration of multilayer stratiform.
Fig. 6 shows the process flow diagram of object-size measurement method of the present invention.
Fig. 7 shows the Organization Chart of traditional confocal microscopy device, and shows its light path.
Determinand in Fig. 8 displayed map 7 is in the optical path change figure of level (axially) when direction moves.
The intensity variation figure on the focal plane of Fig. 9 displayed map 8 and out of focus plane.
Embodiment
Aforementioned purpose of the present invention or feature will be described in detail according to accompanying drawing, and what only need understand is that accompanying drawing and the example of being lifted are just as explanation but not in restriction or shrinkage limit the present invention.
As shown in Figure 1, liquid crystal layer size measurement system 1 of the present invention comprises the first confocal microscopy measuring equipment 1A, the second confocal microscopy measuring equipment 1B and gearshift 30, this the first confocal microscopy measuring equipment 1A and the second confocal microscopy measuring equipment 1B with the mirror mode be disposed at respectively first and second both sides end face of determinand (for example liquid crystal) 40A thickness direction and each device all have as shown in Figure 7 by light source 10, spectroscope 11, first object lens 12, second object lens 13, pin hole 14, optical detector 15, the framework of known traditional confocal microscopy device 100 that first lens 18 and second lens 19 are constituted, and the first object lens 12B mounting of the second confocal microscopy measuring equipment 1B is on this gearshift 30.Aforementioned determinand 40A is for being covered with the liquid crystal of one (or many) layer glassy layers 41 (or photic zone) outward, and this determinand 40A is placed in the middle of the first object lens 12A and the second confocal microscopy measuring equipment 1B, the first object lens 12B of the first confocal microscopy measuring equipment 1A.
In further specify liquid crystal layer size measurement system shown in Figure 11 how to measure object (being liquid crystal layer 44) thickness before, earlier how this liquid crystal layer size measurement system 1 of explanation carries out system and makes zero.
(wherein each assembly numbering of abridged still please refer to Fig. 1) also please cooperate process flow diagram shown in Figure 6 as shown in Figure 2, the framework system structure that this system makes zero only omits light source 10B, the first lens 18B and the second lens 19B of the second confocal microscopy measuring equipment 1B in liquid crystal layer size measurement system 1 shown in Figure 1.Relevant system make zero and measurement step as follows:
This light beam is along the first object lens 12B, the spectroscope 11B of the second confocal microscopy measuring equipment 1B and pass pin hole 14B be projeced into optical detector 15B after the second object lens 13B focuses on, this moment, this optical detector 15B received the maximum light intensity value, the location point that makes zero that is decided to be gearshift (is the primary importance point, system makes zero, and is step S2 shown in Figure 6);
This determinand 40A is placed in the first object lens 12A and the first object lens 12B middle (being step S3 shown in Figure 6);
First end face that carries out the liquid crystal layer 44 among the determinand 40A overlaps (being step S4 shown in Figure 6) with the focal plane of the first object lens 12A;
Move axially gearshift 30 by the aforementioned location point that makes zero second end face of the liquid crystal layer 44 among the focal plane of the first object lens 12B of load on this gearshift 30 and the liquid crystal material 40A is overlapped (being step S5 shown in Figure 6), this moment, optical detector 15A and optical detector 15B all can get the maximum light intensity value;
The location point of the gearshift among the previous step S5 30 is made as second place point (being step S6 shown in Figure 6);
Calculate the difference of aforementioned primary importance point and second place point, this difference is aforementioned displacements device 30 axially movable displacements, also is the size value of the liquid crystal layer 44 of determinand 40A.
For the interpretation that makes aforementioned two optical detector 15A, 15B comparatively accurate, with system sensitivity and the measurement resolution that promotes measurement system 1 of the present invention, can be further between the first object lens 12A of the first confocal microscopy measuring equipment 1A and the determinand 40A and between the first object lens 12B and determinand 40A of the second confocal microscopy measuring equipment 1B, double beam interferometer 20 is set respectively, each double beam interferometer 20 all comprises reference surface mirror 21 and spectroscope 22, as shown in Figure 3.For the drawing that makes Fig. 3 for purpose of brevity, omitted each assembly numbering of the first confocal microscopy measuring equipment 1A and the second confocal microscopy measuring equipment 1B among the figure.
As shown in Figure 3, in the process that the laser beam of the first confocal microscopy measuring equipment 1A and the second confocal microscopy measuring equipment 1B is focused on respectively by the first object lens 12A, 12B object lens, also be divided into twice light by spectroscope 11A, 11B respectively, this twice light focuses on determinand 40A surface and each reference surface mirror 21 respectively.Then this twice light is reflected and comes the position of the second object lens 13A, 13B and pin hole 14A, 14B along original route, interferes effect simultaneously.According to interference of light principle, can derive in the light intensity of aforementioned pin hole position and the pass of determinand 40A out of focus distance and be: I=(1+cos (4 π z/ λ))/2.Again because each reference surface mirror 21, determinand 40A surface and pin hole 14A, 14B coexist on the position of confocal, so also become sinc with the distance of determinand 40A out of focus by the light intensity of pin hole 14A, 14B
2The relation of function.So the light signal form that two optical detector 15A, 15B receive is subjected to the interference of light and sinc simultaneously
2The standard of function.Because interference of light signal is more responsive to axial displacement, its axial response curve slope will improve many, shown in the curve of the 4th figure, its measuring basis will lock in sinc
2On the position, hill-side of first group of interference waveform in the function, the sensitivity of its measurement system and resolution are all showing and are improving.
The gearshift 30 optional usefulness that are shown in earlier figures 1 or liquid crystal layer size measurement system 1 shown in Figure 3 for example piezoelectric type displacement driver (PZT actuator) are made micropoistioning device.
Earlier figures 1 or liquid crystal layer size measurement system 1 shown in Figure 3 can be used for measuring the determinand 40B of N layer symmetry covering liquid crystal layer again outside liquid crystal layer 44 thickness that are used to measure the determinand 40A that is covered with one (or many) layer glassy layers 41 (or photic zone) aforementioned.
As shown in Figure 5, determinand 40B be N layer symmetry covering liquid crystal layer (comprise glassy layer 41, ITO42, alignment film 43, in the time of N=3), utilize the measuring program of measurement system 1 of the present invention as follows:
Axially move toward the first object lens 12A direction, optical detector 15A can get maximum light intensity value for the second time in glass 41 and ITO 42 interfaces again;
Calculate the difference of aforementioned primary importance point and second place point, be the size value of the liquid crystal layer 44 of determinand 40B.
As above-mentioned measurement determinand 40B is the program of N layer symmetry covering liquid crystal layer, and this program is in like manner in the program that measures liquid crystal layer 44 thickness of determinand 40A with the method for Fig. 6 as can be known, and the difference part only is to count layer by layer and successively measure according to N.
The invention has the advantages that, utilize the confocal microscopy device to image on the conjugate planes of object lens ( Once focusing) characteristic, if the surface of determinand is in the focal spot of object lens, then this picture point can quilt Be imaged onto the image conjugate plane of object lens, receive (focusing on for the second time) by optical detector, if determinand The focal plane that object lens are departed from the surface in the axial direction, the light that then turns back on the image conjugate plane through object lens just can Be blocked in pin hole before the optical detector outside, the light intensity that obtains from optical detector changes observes optical system System is in the process of approaching to the determinand surface, and the light intensity that receives on the optical detector can experience one Grow out of nothing, die down from weak to strong, again until the process of not having can be come according to the maximum of judging light intensity Determine optic probe and the positioning relation that the determinand surface overlaps, need not consider thus the material of liquid crystal Material characteristic and orientation form; The present invention also can measure penetration or reflective liquid crystal material, is not wrapped Cover the number of plies number of liquid crystal layer and affect measurement; And the measurement accuracy of thickness of liquid crystal layer can be by being total to Burnt microscopic system resolution ratio determines, can reach nano level dimension measurement resolution ratio.
Claims (19)
1. liquid crystal layer size measurement system, comprise: the first confocal microscopy measuring equipment, second confocal microscopy measuring equipment and the gearshift, this first and second confocal microscopy measuring equipment is symmetrical in the determinand thickness direction and disposes respectively, wherein the object lens mounting of this second confocal microscopy measuring equipment on this gearshift and with this gearshift move axially and by near or away from these object lens towards the end face of determinand; And aforementioned first and second confocal microscopy measuring equipment all comprises light source, spectroscope, first object lens, second object lens, pin hole, optical detector, first lens and second lens, and first object lens of this second confocal microscopy measuring equipment are the object lens of aforementioned mounting on this gearshift.
2. liquid crystal layer size measurement system as claimed in claim 1, it is characterized in that, the light beam of the light source output of the wherein aforementioned first confocal microscopy measuring equipment forms the spectroscope that collimated light beam is incident in this first confocal microscopy measuring equipment through first lens and second lens of this first confocal microscopy measuring equipment, aforementioned light beam pass this spectroscope through first object lens focusing on determinand first end face, come second object lens of this first confocal microscopy measuring equipment along original route through this spectroscope by the first end face reflection light beam of aforementioned determinand again, focus on and pass the pin hole of this first confocal microscopy measuring equipment and received by the optical detector of this first confocal microscopy measuring equipment; In the aforementioned first confocal microscopy measuring equipment, first object lens of this second confocal microscopy measuring equipment are carried on second end face that the focused beam that makes these object lens on the gearshift focuses on determinand the aforementioned second confocal microscopy measuring equipment according to aforementioned light path mirror.
3. liquid crystal layer size measurement system as claimed in claim 2, it is characterized in that, wherein the aforementioned displacements device focus that moves axially first object lens of the second confocal microscopy measuring equipment that makes its load overlaps with the focus of first object lens of the first confocal microscopy measuring equipment, to optical detector, this moment, aforesaid gearshift shift value was made as the primary importance point to aforementioned light beam along first object lens of the second confocal microscopy measuring equipment, spectroscope, second object lens, pin hole.
4. liquid crystal layer size measurement system as claimed in claim 2, it is characterized in that, wherein aforementioned folded light beam by determinand first end face is through second object lens focusing of the first confocal microscopy measuring equipment and pass pin hole and received by optical detector, when this optical detector output maximum light intensity value, for the focal plane of these object lens overlaps with determinand first end face.
5. liquid crystal layer size measurement system as claimed in claim 2, it is characterized in that, wherein aforementioned folded light beam by determinand second end face is through second object lens focusing of the second confocal microscopy measuring equipment and pass pin hole and received by optical detector, when this optical detector output maximum light intensity value, for the focal plane of these object lens overlaps with determinand second end face.
6. liquid crystal layer size measurement system as claimed in claim 2, it is characterized in that, when two first object focal points of wherein aforementioned first and second confocal microscopy device overlap, the optical detector output maximum light intensity value of the second confocal microscopy measuring equipment is made as the primary importance point of aforementioned displacements device, between first and second confocal microscopy device, insert a determinand, the aforementioned displacements assembly axis is detected the maximum light intensity value for the second time to moving to this optical detector, be made as second place point, the difference of aforementioned two positions point gas is the size value of this determinand.
7. liquid crystal layer size measurement system as claimed in claim 6 is characterized in that, wherein the size value of aforementioned determinand is the one-tenth-value thickness 1/10 of liquid crystal.
8. liquid crystal layer size measurement system, comprise: the first confocal microscopy measuring equipment, the second confocal microscopy measuring equipment, gearshift and two double beam interferometers, this first and second confocal microscopy measuring equipment is symmetrical in the determinand thickness direction and disposes respectively, wherein the object lens mounting of this second confocal microscopy measuring equipment on this gearshift and with this gearshift move axially and near or away from these object lens towards the end face of determinand, aforementioned two double beam interferometers be arranged at respectively first object lens of each confocal microscopy measuring equipment and its towards the determinand end face between; And aforementioned first and second confocal microscopy measuring equipment all comprises light source, spectroscope, first object lens, second object lens, pin hole, optical detector, first lens and second lens, and first object lens of this second confocal microscopy measuring equipment are the object lens of aforementioned mounting on this gearshift.
9. liquid crystal layer size measurement system as claimed in claim 8 is characterized in that, wherein aforementioned each double beam interferometer all comprises reference surface mirror and spectroscope.
10. liquid crystal layer size measurement system as claimed in claim 8, it is characterized in that, the light beam of the light source output of the wherein aforementioned first confocal microscopy measuring equipment forms the spectroscope that collimated light beam is incident in this first confocal microscopy measuring equipment through first lens and second lens of this first confocal microscopy measuring equipment, aforementioned light beam passes these first object lens of this spectroscope incident, when light beam during through this first object lens focusing, be divided into twice light by aforementioned interferometer, this twice light is incident in aforementioned determinand surface and this interferometer respectively, and this twice light is come second object lens of this first confocal microscopy measuring equipment along original route through aforementioned spectroscope, focuses on and the effect of interfering simultaneously and the pin hole that passes this first confocal microscopy measuring equipment is received by the optical detector of this first confocal microscopy measuring equipment; In the aforementioned first confocal microscopy measuring equipment, first object lens of this second confocal microscopy measuring equipment are carried on second end face that the focused beam that makes these object lens on the gearshift focuses on determinand the aforementioned second confocal microscopy measuring equipment according to aforementioned light path mirror.
11. liquid crystal layer size measurement system as claimed in claim 8, it is characterized in that, wherein the aforementioned displacements device focus that moves axially first object lens of the second confocal microscopy measuring equipment that makes its load overlaps with the focus of first object lens of the first confocal microscopy measuring equipment, to optical detector, this moment, aforesaid gearshift shift value was made as the primary importance point to aforementioned light beam along first object lens of the second confocal microscopy measuring equipment, spectroscope, second object lens, pin hole.
12. liquid crystal layer size measurement system as claimed in claim 8, it is characterized in that, wherein aforementioned folded light beam by determinand first end face is through second object lens focusing of the first confocal microscopy measuring equipment and pass pin hole and received by optical detector, when this optical detector output maximum light intensity value, for the focal plane of these object lens overlaps with determinand first end face.
13. liquid crystal layer size measurement system as claimed in claim 8, it is characterized in that, wherein aforementioned folded light beam by determinand second end face is through second object lens focusing of the second confocal microscopy measuring equipment and pass pin hole and received by optical detector, when this optical detector output maximum light intensity value, for the focal plane of these object lens overlaps with determinand second end face.
14. liquid crystal layer size measurement system as claimed in claim 8, it is characterized in that, when two first object focal points of wherein aforementioned first and second confocal microscopy device overlap, the optical detector output maximum light intensity value of the second confocal microscopy measuring equipment is made as the primary importance point of aforementioned displacements device, between first and second confocal microscopy device, insert a determinand, the aforementioned displacements assembly axis is detected the maximum light intensity value for the second time to moving to this optical detector, be made as second place point, the difference of aforementioned two positions point is the size value of this determinand.
15. liquid crystal layer size measurement system as claimed in claim 14 is characterized in that, wherein the size value of aforementioned determinand is the one-tenth-value thickness 1/10 of liquid crystal.
16. a liquid crystal layer dimension measurement method comprises:
Liquid crystal layer size measurement system with the first confocal microscopy measuring equipment, the second confocal microscopy measuring equipment and gearshift is provided;
The focal plane of first object lens of first object lens of the first confocal microscopy measuring equipment and the second confocal microscopy measuring equipment is overlapped;
The location point of aforementioned displacements device is made as the primary importance point;
Determinand is placed between aforementioned two first object lens;
The focal plane of first object lens of the first confocal microscopy measuring equipment is overlapped with determinand first end face;
The moving displacement device makes the focal plane of first object lens of the second confocal microscopy measuring equipment overlap with determinand second end face;
The location point of the gearshift of previous step is made as second place point;
Calculate the difference of aforementioned primary importance point and second place point, this difference is the size value of determinand.
17. liquid crystal layer dimension measurement method as claimed in claim 16 is characterized in that, wherein foregoing liquid crystal layer size measurement system has as claim 1 or 9 described formations.
18. liquid crystal layer dimension measurement method as claimed in claim 17, it is characterized in that, the optical detector of the wherein aforementioned second confocal microscopy measuring equipment is when obtaining the maximum light intensity value, for the focal plane of first object lens of the aforementioned first confocal microscopy measuring equipment overlaps with the focal plane of first object lens of the aforementioned second confocal microscopy measuring equipment or the focal plane of first object lens of the aforementioned second confocal microscopy measuring equipment overlaps with second end face of aforementioned determinand.
19. liquid crystal layer dimension measurement method as claimed in claim 17, it is characterized in that, the optical detector of the wherein aforementioned first confocal microscopy measuring equipment is when obtaining the maximum light intensity value, for the focal plane of first object lens of the aforementioned first confocal microscopy measuring equipment overlaps with first end face of aforementioned determinand.
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