CN100373132C - Omnibearing self-aligning method for detector-optical fiber coupling - Google Patents
Omnibearing self-aligning method for detector-optical fiber coupling Download PDFInfo
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- CN100373132C CN100373132C CNB2004100813253A CN200410081325A CN100373132C CN 100373132 C CN100373132 C CN 100373132C CN B2004100813253 A CNB2004100813253 A CN B2004100813253A CN 200410081325 A CN200410081325 A CN 200410081325A CN 100373132 C CN100373132 C CN 100373132C
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Abstract
The present invention provides an omnibearing self-aligning method for coupling detectors-optical fibers, which utilizes the laser auxiliary corrosion technique to generate a corrosion hole on the back side of a semiconductor substrate for preparing a round hole-shaped detector. An optical fiber is inserted into the round hole; that is to accurately align with the front photosensitive surface of the detector to realize the omnibearing self-aligning coupling of the detector-optical fibers. The present invention not only enhances the coupling efficiency of a tail fiber-detector component to enhance the performance of an optical fiber system but also has the advantages of simple coupling technology and low difficulty of the encapsulation process; the present invention can also avoid the relative offset between the optical fiber and the detector when solidification and after encapsulation. When the circular hole is made, the erosion-resist film occultation technique is utilized to control the shape and the size of the eroded hole diameter; thus, many problems brought by laser focusing can be avoided; the process can be simplified. The present invention reduces the complicated degree of actual production and the cost of human resources, and is suitable for being generalized and applied.
Description
Technical field:
The invention belongs to the photoelectron technology field, it is particularly related to the technical field of realization detector-optical fiber coupling.
Background technology:
Detector-fiber coupling technique is the gordian technique of making the fine detector of magnetic tape trailer, and purpose is the accurate coupling that realizes between detector and the optical fiber, improves its coupling efficiency, thereby improves the overall performance of detector.
Because in the unique advantage of aspects such as capacity, antijamming capability, fibre system maybe will be widely used in fields such as communication, Aero-Space, very-high speed computer.In fibre system, because detector photosurface and fiber core cross section all very little (10 microns even micron dimension), mutual accurate aligning, curing are all very difficult.Good coupling between detector-optical fiber and low-cost production thereof are significant for the raising of fibre system overall performance.
Even to this day, most producers still adopt time-consuming expensive active technique of alignment, promptly allow laser instrument, detector be in running status, repeatedly, carefully adjust the position and the direction of input optical fibre, when detector output photosignal is the strongest, expression detector-optical fiber is in the optimum coupling state, carefully the relative position and the direction of detector and optical fiber is solidified when the time comes, just accuses the coupling of finishing a pair of detector-optical fiber.This is a kind of time-consuming, expensive technology, and in the solidification process and after the encapsulation, fibre core can be introduced very big coupling loss with respect to any small the departing from all of photo-detector active area.In a word, existing technology and method also exist following shortcoming except the not high problem of coupling efficiency: 1) complex manufacturing technology, and higher relatively to the requirement of equipment, when pushing production application to, can run into very big obstacle.2) operating environment and manufacturing technology are had relatively high expectations, the instability when causing putting into production is higher.3) step is still more in the making flow process, has the bottleneck of self on the disposable production qualification rate that improves product.Therefore, how to solve the coupled problem of fibre core and detector, be the key issue of producing and study the fine photo-detector of magnetic tape trailer easily and effectively always.
Because the importance of detector-fiber coupling technique, very active always, different according to the detector light incident mode of research has in this respect proposed different coupling techniques both at home and abroad.Shine the formula photo-detector for the side, Japan proposes the photo-detector of plane of refraction structure and (sees document: H.Fukanv etc.Edge-illuminatedrefracting-facet photodiode with high responsivity and low-operationvoltage.Electronics Letters, 1996, Vol.32, No.25:2346～2348) and optical fiber bottom chevron shaped groove structure, see document: M.Kato etc.Large coupling tolerance side-illuminated mirrorphotodiode for low-cost surface hybrid integration.IEEE Photonics TechnologyLetters, 1999, Vol.11, No.6:709～711; Domestic to vertical coupled analysis the between ducting layer and absorption layer in the Si based waveguides structure detector, see document: Li Na. the optically-coupled analysis in waveguide and the detector absorption layer perpendicular coupling structure. the optics journal, 1998, Vol.18, No.9:1224～1227; For the back-illuminated type detector, the U.S. adopts the method for monolithic integral micro-lens to improve optical fiber-detector coupling tolerance (to see document: M.Madhav etc.Improvements in fiber alignment tolerance using chemicallyetched monolithically integrated microlenses on InGaAs:InP PIN photodetectors.Electronics Letters, 1997, Vol.33, No.10:891～892); But the research of above method all is to have improved alignment tolerance relatively, does not fundamentally go to solve the automatic alignment issues of optical fiber-detector.
The India scholar utilizes the back V-shaped groove accurately to aim at the solution coupled problem with the top, see document: NanditaDasGupta etc.Passive coupling of InGaAs/InP PIN detector and single mode fiberusing InP bulkmicromaching in Micro-Optic-Electric-Mechanical Systems.Proceedings of SDIE, 2000, Vol.40, No.75:134～139.Though but the India scholar proposes autoregistration (sel f-alignment) notion, what adopt is conventional wet chemical etching technique technology, on semiconductor substrate materials 1, only made V-shaped groove 2, inserting optical fiber 3 realization one dimension autoregistrations perpendicular to V-shaped groove 2 rib ridge directions, can not realize comprehensive accurate automatically location, as shown in Figure 1.
Summary of the invention
The all-azimuth self-alignment method that the purpose of this invention is to provide a kind of detector-optical fiber coupling, adopt method of the present invention can realize the all-azimuth self-alignment of detector-optical fiber coupling, and technological process is simple, control method is easy, equipment and environmental requirement is lower, reduce cost of human resources, is suitable for production application.
In order to describe the present invention ground content easily, at first do a terminological interpretation:
Photochemical reaction: refer to owing to absorbed the chemical reaction that causes behind ultraviolet, the visible or infrared light.Classical photochemical reaction is only limited to ultraviolet and visible light is the reflection system of light source, since infrared laser become a kind of realize new light sources that multi-photon absorbs after, infrared photochemistry also becomes a photochemical part.
The laser corrosion technology: be exactly under the excitation of laser, the electronics that makes compound of reaction by ground state transition to excited state, thereby and corrosive liquid or etchant gas generation photochemical reaction; In this invention, corrosive liquid can be solution such as hydrochloric acid, sulfuric acid, NaOH.
Etchant resist: etchant resist refers to certain material that covers semiconductor substrate surface in this invention, can be when needed between in withstand the acting in conjunction of laser and corrosive liquid, play the effect of better protect Semiconductor substrate.Can be enough someway in a certain shape of the surface etch of etchant resist, laser beam is played the effect of diaphragm, in this invention, etchant resist can adopt silicon nitride, silit, photoresist etc.
All-azimuth self-alignment: all-azimuth self-alignment is to a kind of extension of autoregistration notion and perfect, it requires the coupling between optical fiber and the detector is all can realize coupling on the different azimuth, play certain fixation simultaneously, because the end face of optical fiber is circular, so require detector coupling aperture be shaped as circle and diameter and fibre diameter equal and opposite in direction or approximately equal.
The all-azimuth self-alignment method of a kind of detector provided by the invention-optical fiber coupling is characterized in that the following step of its employing:
The Semiconductor substrate 1 that step 3 will be coated with etchant resist 5 places corrosive liquid or etchant gas, realizes the laser corrosion under laser 7 effects, forms the corrosion circular hole 4 of aperture and fibre diameter size coupling, as shown in Figure 2;
In the corrosion circular hole 4 of step 4 with 3 preparations of optical fiber 3 inserting steps, realize accurately aiming at, as shown in Figure 3 with positive photosurface 6.
Through after the above step, both can realize the efficient coupling between optical fiber and the detector well, in the time of avoiding solidifying again and the relativity shift between encapsulation back optical fiber and detector.
Need to prove:
In step 1, rely on the different of cleavage plane trend and the restriction of other methods of operating with other simple chemical corrosion, because adopt the laser corroding method to obtain corrosion hole, the precision of laser corrosion is very high, so the diameter that can choose corrosion hole arbitrarily according to the size and the actual needs of fibre diameter.
In step 2, etchant resist can be kept out the acting in conjunction of laser and etchant gas or liquid, makes it can play the effect of diaphragm in the laser corrosion.Like this, with regard to no longer needing laser beam is focused on, some problems of avoiding laser focusing to bring have been simplified the corrosion flow process greatly.
In step 4,, can also carry out further fixing with other conventional method, as using gel glue except corrosion circular hole self plays the positioning action optical fiber.
Principle of work of the present invention is as follows: the all-azimuth self-alignment method that a kind of detector-optical fiber coupling is provided, produce the circular hole detector, promptly utilize the auxiliary corrosion technology of laser to generate corrosion hole at the Semiconductor substrate back side, optical fiber inserts in the circular hole, promptly accurately aim at the detector photosurface in front, realize detector all-azimuth self-alignment coupling truly, not only improve the coupling efficiency in tail optical fiber-detector assembly greatly, thereby improve the fibre system performance, and coupling technique is simple, the encapsulation process difficulty is low, and cost of human resources is low, the relativity shift between in the time of avoiding solidifying again and encapsulation back optical fiber and detector.Utilize the shape and the size of etchant resist macking technique control corrosion hole, the problems of avoiding laser focusing to bring, simplify flow process, technological process is simple, control method is easy, and equipment and environmental requirement are lower, greatly reduces the complexity of actual production, reduce cost of human resources, be suitable for production application.
Essence of the present invention has provided the all-azimuth self-alignment method of a kind of detector-optical fiber coupling, produce the circular hole detector, promptly utilize the auxiliary corrosion technology of laser to generate corrosion hole at the Semiconductor substrate back side, optical fiber inserts in the circular hole, promptly accurately aim at the detector photosurface in front, realize detector all-azimuth self-alignment coupling truly, not only improve the coupling efficiency in tail optical fiber-detector assembly greatly, thereby improve the fibre system performance, and coupling technique is simple, the encapsulation process difficulty is low, and cost of human resources is low, the relativity shift between in the time of avoiding solidifying again and encapsulation back optical fiber and detector.Utilize the shape and the size of etchant resist macking technique control corrosion hole, the problems of avoiding laser focusing to bring, simplify flow process, technological process is simple, control method is easy, and equipment and environmental requirement are lower, greatly reduces the complexity of actual production, reduce cost of human resources, be suitable for production application.
The invention has the advantages that:
1) optical fiber input light is directly accurately aimed at automatically with the detector photosurface, avoids complicated Alignment Process.
2) can itself and optical fiber be mated well, and can play positioning action according to the diameter of optical fiber and the size in the flexible selective etching of actual needs hole.
3) do not need the laser beam that participates in the laser corrosion is focused on, just can obtain micron-sized corrosion hole.
4) operating process is simple, and process complexity is low, and facility requires simple, is suitable for actual large-scale production, and the human resources expense when saving a large amount of detectors and optical fiber align reduces cost, and raises labour productivity and once success rate.
Description of drawings:
Fig. 1 is an existing back V-shaped groove detector ultimate principle structural drawing
Wherein 1 is Semiconductor substrate, the 2nd, V-shaped groove, the 3rd, optical fiber;
Fig. 2 is a circular hole detector corrosion hole formation method synoptic diagram
Wherein 1 is Semiconductor substrate, the 4th, corrosion circular hole, the 5th, etchant resist, the 7th, laser beam;
Fig. 3 is optical fiber and detector coupling synoptic diagram
Wherein 3 is optical fiber, the 4th, corrosion circular hole, the 6th, photosurface;
Fig. 4 is the exemplary block diagram of circular hole detector
Wherein 3 is optical fiber, the 4th, corrosion circular hole, the 5th, etchant resist, the 8th, P
+Diffusion region, the 9th, anode, the 10th, intrinsic region, the 11st, N
+Diffusion region, the 12nd, negative electrode.
Embodiment
Realize the detector-optical fiber all-azimuth self-alignment coupling (as shown in Figure 4) of the InP foundation light electric explorer of magnetic tape trailer fibre
The semiconductor InP substrate that step 3 will be coated with etchant resist 5 places corrosive liquid or etchant gas, realizes the laser corrosion under laser action, at N
+Form the corrosion circular hole 4 of aperture and optical fiber 3 diameter coupling on the diffusion region 11, as shown in Figure 4;
In the corrosion circular hole 4 of step 4 with 3 preparations of optical fiber 3 inserting steps, light is realized and positive P through intrinsic region 10
+ Diffusion region 8 is accurately aimed at, as shown in Figure 4.
Through after the above step, both can realize the efficient coupling between optical fiber and the detector well, in the time of avoiding solidifying again and the relativity shift between encapsulation back optical fiber and detector.
Claims (2)
1. the all-azimuth self-alignment method of a detector-optical fiber coupling is characterized in that its step below adopting:
Step 1 is ready to Semiconductor substrate (1), determine the position of Semiconductor substrate (1) front photosurface (6), the position at Semiconductor substrate (1) back side of the position correspondence of Semiconductor substrate (1) front photosurface (6) is corroded the position of circular hole (4), the i.e. position of back side optical fiber light incident exactly; And realize the diameter of the corrosion circular hole (4) of coupling between definite detector and the optical fiber, and the slightly larger in diameter of corrosion circular hole (4) is in the diameter of optical fiber (3), and the diameter of corrosion circular hole (4) and the degree of depth are inserted not to be shifted behind the corrosion circular hole (4) with optical fiber (3) and are as the criterion;
Step 2 is sheltered the zone of Semiconductor substrate (1) back side except corrosion circular hole (4) with etchant resist (5);
The Semiconductor substrate (1) that step 3 will be coated with etchant resist (5) places corrosive liquid or etchant gas, realizes the laser corrosion under laser (7) effect, forms the corrosion circular hole (4) of aperture and fibre diameter size coupling;
In the corrosion circular hole (4) of step 4 with 3 preparations of optical fiber (3) inserting step, realize accurately aiming at positive photosurface (6).
2. the all-azimuth self-alignment method of a kind of detector according to claim 1-optical fiber coupling is characterized in that described etchant resist adopts silicon nitride, silit.
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| CN100373132C true CN100373132C (en) | 2008-03-05 |
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| CN105572815B (en) * | 2015-12-21 | 2018-02-23 | 华进半导体封装先导技术研发中心有限公司 | Active optics pinboard and optical interconnection module |
| CN107271142B (en) * | 2017-05-22 | 2019-06-18 | 河海大学 | Real-time optical fiber positioning device and localization method based on center opening type 4 quadrant detector |
| CN109061831B (en) * | 2018-09-19 | 2021-01-15 | 西安理工大学 | Wireless laser communication reflection type aiming tracking system and laser aiming tracking method |
| CN113589450A (en) * | 2021-07-14 | 2021-11-02 | 浙江大学 | High-efficiency coupling method of photoelectric element and optical fiber |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4812002A (en) * | 1986-10-24 | 1989-03-14 | Hitachi, Ltd. | Optical coupling device and method of making the same |
| DE4313493A1 (en) * | 1992-11-25 | 1994-05-26 | Ant Nachrichtentech | Arrangement for coupling an optical waveguide to a light-emitting or receiving element |
| JPH11509007A (en) * | 1995-06-30 | 1999-08-03 | ザ ウィタカー コーポレーション | Passive alignment frame using single crystal material |
| CN1319770A (en) * | 2000-01-31 | 2001-10-31 | 摩托罗拉公司 | Method and equipment for alignment of waveguide and device |
| CN1341226A (en) * | 1999-02-19 | 2002-03-20 | 艾利森电话股份有限公司 | Optical fiber aligning structure |
| US20040017977A1 (en) * | 2002-03-14 | 2004-01-29 | Dennis Lam | Integrated platform for passive optical alignment of semiconductor device with optical fiber |
-
2004
- 2004-11-25 CN CNB2004100813253A patent/CN100373132C/en not_active Expired - Fee Related
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4812002A (en) * | 1986-10-24 | 1989-03-14 | Hitachi, Ltd. | Optical coupling device and method of making the same |
| DE4313493A1 (en) * | 1992-11-25 | 1994-05-26 | Ant Nachrichtentech | Arrangement for coupling an optical waveguide to a light-emitting or receiving element |
| JPH11509007A (en) * | 1995-06-30 | 1999-08-03 | ザ ウィタカー コーポレーション | Passive alignment frame using single crystal material |
| CN1341226A (en) * | 1999-02-19 | 2002-03-20 | 艾利森电话股份有限公司 | Optical fiber aligning structure |
| CN1319770A (en) * | 2000-01-31 | 2001-10-31 | 摩托罗拉公司 | Method and equipment for alignment of waveguide and device |
| US20040017977A1 (en) * | 2002-03-14 | 2004-01-29 | Dennis Lam | Integrated platform for passive optical alignment of semiconductor device with optical fiber |
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